Probe card holder selection assembly and probe card holder

Abstract

The invention discloses a probe card holder selection assembly and a probe card holder. The probe card holder comprises a holder main body and a supporting part; the supporting part is fixedly arranged in the lower end of the holder main body; the movable part is movably arranged in the center of the upper end of the supporting part; the movable part comprises an adjusting part; the adjusting part is movably arranged on the outer side of the upper end of the movable part and movably connected with the movable part. The probe card holder can drive the servo motor to drive the workbench to move transversely, the driving motor drives the center shaft and the rotating base to rotate, and the lifting push rod is driven to drive the rotating base to ascend and descend, so that the holder body can be flexibly adjusted in the x axis, the y axis and the z axis, and meanwhile, the angle can be adjusted. During detection, the plurality of fixed slide rails can be driven by the driving motor to rotate so as to select the probe clamping plates, and the movable slide rails are driven to carry out position adjustment.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor testing technology, in particular to a probe card holder selection component and a probe card holder. Background Art

[0002] During the semiconductor device production process, numerous circuit contacts within one or more devices must be accessed multiple times. A probe card is moved by a moving mechanism to bring the probes into contact with the contacts. To match the multiple sets of contacts during the test, multiple probe cards are required, secured by a holder. However, conventional holders present the following challenges during use: Semiconductor test lines frequently replace probe cards. For example, for 300mm wafer mass production testing, probe cards can be replaced 10-15 times daily. Existing holders rely on multiple screws to secure each card, taking over 10 minutes to disassemble and assemble. These screws require specialized tools, significantly impacting test line efficiency and increasing equipment downtime. Furthermore, traditional holders are often custom-designed and incompatible with a variety of probe cards. When the production line needs to switch test items, frequent hardware replacements are often necessary due to holder compatibility issues, resulting in wasted resources and increased costs. Traditional retainers are often fixed with screws or snap-on connections. During equipment adjustment, manual tightening with bolts is often required. Traditional screw fastening is time-consuming, and frequent disassembly and assembly can easily lead to thread wear and errors, resulting in low work efficiency. Traditional holders mostly use single-point clamping or symmetrical dual-electric clamping structures (such as screw fastening on both sides). The probe card is only clamped in the local area of ​​the edge, while the middle area lacks support. For example, when a 300mm probe card uses double-point clamping, the deformation difference between the edge and the center can reach 20-30μm, which can easily cause the probe card to warp or deform, thereby affecting the detection accuracy. Summary of the Invention

[0003] In order to achieve the above-mentioned purpose, an embodiment of the present invention provides a probe card holder selection assembly, including a central axis for rotation and a rotating base, the central axis for driving passes through the middle of the adjustment assembly, the adjustment assembly is used to adjust the orientation of the probe card holder selection assembly, and the adjustment assembly is also provided with a stabilizing component that can fix and clamp the probe card, and the stabilizing component is also provided with a clamping component for providing uniform pressure.

[0004] Furthermore, the adjusting component includes: A mounting seat, the mounting seat being fixedly arranged on the upper end of the rotating base in a circumferential manner; A limit seat for mounting the movable slide rail is fixedly arranged on the upper end of the mounting seat in a circumferential manner; A fixed slide rail, the fixed slide rail being fixedly arranged on the inner side of the mounting seat in a circle with the central axis as the center; A horizontal slider, the horizontal slider being slidably disposed on the upper end of the fixed slide rail, the horizontal slider being slidably connected to the fixed slide rail for vertical adjustment of the probe card; A fixing seat, used for setting the probe card plate, fixedly arranged at the front end of the horizontal slider; A probe card board is fixedly arranged on the upper end of the fixing seat.

[0005] Furthermore, the stabilizing component includes: Movable slide rails, the movable slide rails being arranged on the inner side of the upper end of the limit seat in a circular motion with the central axis as the center, and the number of the movable slide rails corresponds to the number of the limit seats; An oblique slider, the oblique slider being slidably arranged on the movable slide rail; a stabilizing clip, the stabilizing clip being fixedly disposed at one end of the oblique slider; an adjusting pressure rod, the adjusting pressure rod being movably arranged on the front end side of the stabilizing clamp; A fixed frame, the fixed frame being fixedly arranged at the other end of the oblique sliding block; A pressure plate is fixedly arranged at the lower end of the adjusting pressure rod and matches the adjusting pressure rod.

[0006] Furthermore, the pressing component includes: A slide groove, the slide groove is mirror-imaged and opened on the inner side of the rear end of the fixed frame; An electric push rod, which is fixedly arranged at the bottom end of the fixed frame and passes through one side of the fixed frame; A pressing block is slidably arranged between the sliding grooves and a rear end of the pressing block is fixedly connected to the electric push rod.

[0007] Furthermore, the stabilizing component further includes: An electric-controlled lock, the electric-controlled lock being fixedly arranged at the rear end of the fixed slide rail; A lock head is fixedly arranged at the lower end of the movable slide rail and matches the electric control lock.

[0008] Furthermore, the pressing component further includes: A control shaft is fixedly arranged on the inner side of the limiting seat and matches the movable slide rail.

[0009] A probe card holder selection assembly also includes a holder body; a supporting member, the supporting member being fixedly disposed inside the lower end of the holder body; A movable component, the movable component being movably arranged at the center of the upper end of the supporting component; The movable parts include: An adjusting component is movably arranged on the outer side of the upper end of the movable component and is movably connected to the movable component.

[0010] Furthermore, the supporting component includes: A support base, the support base being fixedly disposed at the lower end of the holder body; A moving component is movably arranged inside the supporting base and matches the workbench.

[0011] Furthermore, the moving part includes: A servo motor, the servo motor being fixedly arranged at the right end of the support base; A limiting hole, the limiting hole is opened on the left side of the supporting base; A threaded rod, the threaded rod is fixedly connected to the output shaft of the servo motor and matches the limiting hole; Limit rods, two sets of limit rods are fixedly disposed inside the support base in a mirror-image manner and matched with the limit holes; There are two groups of connecting blocks, and both connecting blocks are fixedly arranged at the lower end of the workbench and the bottoms are engaged with the threaded rod and the limiting rod threads.

[0012] Furthermore, the movable parts include: A protective shell, the protective shell is fixedly arranged on the upper end of the workbench; a drive motor, the drive motor being fixedly disposed inside the protective shell; a central shaft, the central shaft passing through the upper end of the protective shell and fixedly connected to the output shaft of the drive motor; a rotating base, the rotating base being fixedly arranged outside the central axis and matching the central axis; A lifting push rod is fixedly arranged on the upper end of the central shaft and matches the rotating base.

[0013] Compared with the prior art, the embodiments of the present invention have the following beneficial effects: When the inspector is inspecting the semiconductor wafer, the servo motor can be driven to drive the workbench to move horizontally, and the central axis and the rotating base can be rotated by the driving motor, and the lifting push rod can be driven to drive the rotating base to move up and down, so that the holder body can be flexibly adjusted in the xyz axis and the angle can also be adjusted to meet different inspection needs. Cards of different specifications can be installed on the upper ends of several fixed seats. During inspection, the probe card board can be selected by driving the motor to rotate several fixed slides, and the movable slide can be driven to adjust the position. At the same time, the fixed frame can be replaced according to needs, which is convenient for inspectors to quickly replace and adjust the probe card according to different inspection needs. The electric push rod is driven to drive the clamping block to move, and the front pressure plate is used to fix and clamp the probe card inside the fixed frame. The pressure is more uniform to avoid warping or deformation of the probe card. The control axis can drive the movable slide to lift and press, and can quickly release and press, which simplifies the probe card replacement process, improves test efficiency, and improves the compatibility and replacement efficiency of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The present invention will be further described below with reference to the accompanying drawings and examples.

[0015] Figure 1 An axonometric view of the present invention is shown; Figure 2 Shows a right side view of the present invention; Figure 3 Shown is a front view of the present invention; Figure 4 shows a top view of the present invention; Figure 5 An enlarged view of the regulating component of the present invention is shown; Figure 6 Shows an enlarged view of the movable parts of the present invention; Figure 7 An enlarged view of the stabilizing component of the present invention is shown.

[0016] In the picture: 1. Holder body; 2. Support components; 21. Support base; 22. Workbench; 3. Moving parts; 31. Protective shell; 32. Driving motor; 33. Central axis; 34. Rotating base; 35. Lifting push rod; 4. Adjustment component; 41. Mounting seat; 42. Limiting seat; 43. Fixed slide rail; 44. Horizontal slider; 45. Fixing seat; 46. Probe card board; 5. Stabilizing components; 51. Movable slide rail; 52. Oblique slider; 53. Stabilizing clamp; 54. Adjustable pressure rod; 55. Fixed frame; 56. Pressure plate; 57. Electric lock; 58. Lock head; 6. Moving parts; 61. Servo motor; 62. Limiting hole; 63. Threaded rod; 64. Limiting rod; 65. Connecting block; 7. Clamping component; 71. Slide; 72. Electric push rod; 73. Clamping block; 74. Control shaft. DETAILED DESCRIPTION

[0017] The present invention will now be described in further detail with reference to the accompanying drawings. Figure 1 , Figure 1 Shows an axonometric view of the present invention; see Figure 2 , Figure 2 Shows a right side view of the present invention; see Figure 3 , Figure 3 Shows a front view of the present invention; see Figure 4 , Figure 4 Shows a top view of the present invention; see Figure 5 , Figure 5 Shows an enlarged view of the adjustment component of the present invention; see Figure 6 , Figure 6 Shows an enlarged view of the active parts of the present invention; see Figure 7 , Figure 7 Shows an enlarged view of the stabilizing component of the present invention; Figure 1-7 As shown, a probe card holder includes Holder body 1; The supporting member 2 is provided inside the holder body 1 and is used for supporting; The movable component 3 is movably arranged on the supporting component 2; Active Part 3 includes: An adjusting member 4 is movably disposed on the outer side of the upper end of the movable member 3 and is movably connected to the movable member 3, and is used to adjust the orientation of the probe card holder selection component while providing a space for fixing and installing the stabilizing member 5; The stabilizing component 5 is movably arranged on the upper end of the adjusting component 4. The supporting component 2 can provide a fixing and installation space for the movable component 3. At the same time, the adjusting component 4 and the stabilizing component 5 can provide a fixing and clamping space for the probe card for detection.

[0018] Optionally, the supporting component 2 includes: A support base 21, the support base 21 is fixedly arranged at the lower end of the holder body 1; The movable component 6 is movably arranged inside the support base 21 and matches the workbench 22. The support base 21 can provide a space for fixing and installing the workbench 22. At the same time, the movable component 6 can drive the workbench 22 to move horizontally for adjustment.

[0019] Optionally, the moving component 6 includes: The servo motor 61 is fixedly mounted on the right end of the support base 21; A limiting hole 62 is provided on the left side of the support base 21; A threaded rod 63, which is fixedly connected to the output shaft of the servo motor 61 for providing driving force and matches the limiting hole 62 for limiting the position; Limit rods 64, two sets of limit rods 64 are fixedly disposed inside the support base 21 in a mirror-image manner and match the limit holes 62; There are two groups of connecting blocks 65, and the connecting blocks 65 are fixedly arranged at the lower end of the workbench 22, and the bottom is threadedly engaged with the threaded rod 63 and the limit rod 64. The servo motor 61 can drive the threaded rod 63 to rotate, and the two groups of connecting blocks 65 can drive the workbench 22 to move laterally. At the same time, the limit holes 62 can provide space for the threaded rod 63 and the two groups of limit rods 64 to move and install, and at the same time limit their range of motion so that they can only rotate around their own axis. The driving servo motor 61 can be adjusted in real time according to the different position requirements of the probe card.

[0020] Optionally, the movable component 3 includes: A protective shell 31 is fixedly mounted on the upper end of the workbench 22; A drive motor 32 is fixedly disposed inside the protective shell 31; A central shaft 33 passes through the upper end of the protective shell 31 and is fixedly connected to the output shaft of the driving motor 32 for providing driving force; The rotating base 34 is fixedly arranged on the outside of the central axis 33 and matches the central axis 33. The protective shell 31 can provide installation and support space for the internal driving motor 32, and the central axis 33 and the rotating base 34 are driven to rotate by the driving motor 32. At the same time, the protective shell 31 can limit the range of movement of the central axis 33 so that it can only rotate around its own axis. The rotation of the rotating base 34 can drive the adjustment component 4 and the stabilizing component 5 to rotate, which can support the rapid replacement and adjustment of the probe card, and effectively improve the test efficiency.

[0021] Optionally, the adjusting component 4 includes: The mounting seat 41 is fixedly arranged on the upper end of the rotating base 34 in a circumferential manner to provide a space for fixing and installing; A limiting seat 42 for mounting the movable slide rail 51 is fixedly arranged on the upper end of the mounting seat 41 in a circumferential manner; A fixed slide rail 43 is fixedly arranged on the inner side of the mounting seat 41 in a circle with the central axis 33 as the center; A horizontal slider 44 is slidably disposed on the upper end of the fixed slide rail 43; A fixing seat 45, which is fixedly arranged at the front end of the horizontal slider 44; The probe card board 46 is fixedly arranged on the upper end of the fixed seat 45. The mounting seat 41 can provide a space for fixing and installing the fixed slide rail 43. The fixed slide rail 43 can be driven to slide between the horizontal slider 44, driving the fixed seat 45 and the probe card board 46 located at the front end and the upper end of the horizontal slider 44 to adjust forward and backward. At the same time, the upper ends of several fixed seats 45 can be used to install cards of different sizes according to the requirements of different probe tests. The probe card board 46 can be selected by driving several fixed slide rails 43 to rotate by the driving motor 32. At the same time, the vertical distance of the probe card board 46 can be adjusted by sliding between the fixed slide rail 43 and the horizontal slider 44 according to different probe position requirements.

[0022] Optionally, the stabilizing component 5 includes: A movable slide rail 51 is disposed on the inner side of the upper end of the limit seat 42 and is movable in a circle around the central axis 33; An oblique slider 52 is slidably disposed on the upper end of the movable slide rail 51; A stabilizing clip 53 is fixedly disposed at the front end of the oblique slider 52 and is used to press down the probe card placed on the upper end of the probe card plate 46; An adjusting pressure rod 54 is movably arranged at the front end side of the stabilizing clamp 53; A fixed frame 55 is fixedly arranged at the front end of the oblique slider 52; A pressure plate 56 is fixedly disposed at the lower end of the adjusting pressure rod 54 and matches the adjusting pressure rod 54; The clamping component 7 is movably arranged at the rear end of the fixed frame 55. A plurality of movable slide rails 51 are matched with a plurality of inclined sliders 52. The movable slide rails 51 can be driven to adjust the position according to the position of the lower end probe card plate 46. The fixed frame 55 is fixed by adjusting the pressure rod 54. Before testing, the fixed frame 55 can be replaced according to the different shapes of different probe card plates 46, which can effectively improve the compatibility and replacement efficiency of the device.

[0023] Optionally, the pressing component 7 includes: A slide groove 71 is mirrored and opened on the inner side of the rear end of the fixed frame 55; An electric push rod 72 is fixedly disposed at the bottom end of the fixed frame 55 and passes through one side of the fixed frame 55; The clamping block 73 is slidably arranged between the slide grooves 71 and the rear end is fixedly connected to the electric push rod 72. The electric push rod 72 at the upper end drives the clamping block 73 to move through the slide groove 71, and cooperates with the pressure plate 56 at the front end to press and fix the probe card inside the fixed frame 55. The pressing and clamping at both ends are more stable. At the same time, the probe card plate 46 at the lower end can provide an upward supporting force, so that the pressing pressure is more uniform, avoiding warping or deformation of the probe card while improving the accuracy of detection.

[0024] Optionally, the stabilizing component 5 further includes: An electric lock 57 is fixedly arranged at the rear end of the fixed slide rail 43; The lock head 58 is fixedly arranged at the lower end of the movable slide rail 51 and matches the electric lock 57. When the movable slide rail 51 presses the cover downward, the electric lock 57 and the lock head 58 perform a locking operation, so that the pressure between the fixed frame 55 and the probe card plate 46 is more stable. When the detection is completed, the electric lock 57 is automatically unlocked for easy replacement and adjustment.

[0025] Optionally, the pressing component 7 further includes: The control shaft 74 is fixedly disposed inside the limiting seat 42 and matches the movable slide rail 51; The movable slide rail 51 can be adjusted in angle with the control axis 74 as the center through the limit seat 42. Several control axes 74 can drive several movable slide rails 51 to perform lifting and pressing operations. They can be adjusted in real time according to the detection requirements, and can be released and pressed quickly, simplifying the probe card replacement process.

[0026] Optionally, the movable component 3 further includes: The lifting push rod 35 is fixedly arranged at the upper end of the central axis 33 and matched with the rotating base 34. The lifting push rod 35 can drive the rotating base 34 to perform lifting and lowering activities, and can be adjusted in real time according to different probe detection device heights, so that the holder body 1 can be flexibly adjusted in the xyz axes and the angle can also be adjusted to meet different detection requirements.

[0027] The use process of the probe card holder of the present invention includes the following steps: In the first step, the staff can replace the probe cards 46 on the upper ends of the plurality of fixing seats 45 by adjusting the clamping between the pressure rods 54 and the fixing frame 55 according to the shapes and sizes of the probe cards to be tested; In the second step, the staff can drive the several electric push rods 72 on the upper end of the rotating base 34 to drive the clamping block 73 to move through the slide groove 71, and cooperate with the front pressure plate 56 to press and fix the probe card inside the fixed frame 55. The movable slide rail 51 can be adjusted in angle with the control shaft 74 as the center through the limit seat 42. The several control shafts 74 are driven to drive the several movable slide rails 51 to lift and press the probe card, which can quickly release and press the probe card. When the movable slide rail 51 presses down, the electric lock 57 and the lock head 58 perform the locking operation; In the third step, the staff can adjust the holder body 1 according to different probe card wafer detection positions. The servo motor 61 is driven to drive the threaded rod 63 to rotate, and the connecting block 65 is used to drive the workbench 22 to move horizontally. At the same time, the fixed rails 43 and the horizontal sliders 44 are driven to slide, which drives the fixed seats 45 and the probe card plates 46 to adjust their vertical positions. The lifting push rod 35 is driven to drive the rotating base 34 to move up and down. The height of the probe detection device can be adjusted in real time according to different heights, so that the holder body 1 can be flexibly adjusted in all x, y, and z axes. In the fourth step, when the test is completed, the staff can drive the rotating base 34 to rotate through the driving motor 32, so that the probe card plates 46 on the upper ends of the plurality of fixing seats 45 rotate, and the probe cards can be quickly replaced to perform different tests.

Claims

1. A probe card holder selection assembly, comprising a central axis (33) for rotation and a rotating base (34), characterized in that: The middle of the adjustment component (4) passes through a central shaft (33) for driving. The adjustment component (4) is used to adjust the orientation of the probe card holder selection component. The adjustment component (4) is also provided with a stabilizing component (5) for fixing and clamping the probe card. The stabilizing component (5) is also provided with a pressing component (7) for providing uniform pressure.

2. The probe card holder selection assembly according to claim 1, wherein: The regulating component (4) comprises: A mounting seat (41), the mounting seat (41) being fixedly arranged in a circumferential manner on the upper end of the rotating base (34); A limiting seat (42) for mounting the movable slide rail (51) and fixedly arranged in a circumferential manner on the upper end of the mounting seat (41); A fixed slide rail (43), the fixed slide rail (43) being fixedly arranged on the inner side of the mounting seat (41) in a circular manner with the central axis (33) as the center; A horizontal slider (44), the horizontal slider (44) being slidably disposed on the upper end of the fixed slide rail (43), the horizontal slider (44) being slidably connected to the fixed slide rail (43) for vertical adjustment of the probe card plate (46); A fixing seat (45), used for setting the probe card plate (46), the fixing seat (45) being fixedly set at the front end of the horizontal slider (44); A probe card plate (46), a replaceable probe card plate (46) is fixedly arranged on the upper end of the fixing seat (45).

3. The probe card holder selection assembly according to claim 2, wherein: The stabilizing component (5) comprises: A movable slide rail (51), the movable slide rail (51) being arranged on the inner side of the upper end of the limiting seat (42) in a circular motion with the central axis (33) as the center, and the number of the movable slide rails (51) corresponds to the number of the limiting seats (42); An oblique slider (52), the slidable oblique slider (52) is slidably arranged on the movable slide rail (51); A stabilizing clamp (53), wherein the stabilizing clamp (53) is fixedly disposed on one end of the oblique sliding block (52); an adjusting pressure rod (54), the adjusting pressure rod (54) being movably arranged on the front end side of the stabilizing clamp (53); A fixed frame (55), the fixed frame (55) being fixedly arranged at the other end of the oblique slider (52); A pressure plate (56) is fixedly arranged at the lower end of the regulating pressure rod (54) and matches the regulating pressure rod (54).

4. The probe card holder selection assembly according to claim 3, wherein: The pressing component (7) comprises: A slide groove (71), the slide groove (71) is mirror-imaged and opened on the inner side of the rear end of the fixed frame (55); An electric push rod (72), the electric push rod (72) being fixedly arranged at the bottom end of the fixed frame (55) and passing through one side of the fixed frame (55); A pressing block (73) is slidably disposed between the slide grooves (71) and has a rear end fixedly connected to the electric push rod (72).

5. The probe card holder selection assembly according to claim 4, wherein: The stabilizing component (5) further comprises: An electric control lock (57), the electric control lock (57) being fixedly arranged at the rear end of the fixed slide rail (43); A lock head (58) is fixedly arranged at the lower end of the movable slide rail (51) and matches the electric control lock (57).

6. The probe card holder selection assembly according to claim 5, wherein: The pressing component (7) further comprises: A control shaft (74), wherein the control shaft (74) is fixedly arranged inside the limiting seat (42) and matches the movable slide rail (51).

7. A probe card holder comprising a probe card holder selection assembly according to any one of claims 1 to 6, characterized in that: Also included is a holder body (1); A supporting component (2), the supporting component (2) being fixedly arranged inside the lower end of the holder body (1); A movable component (3), the movable component (3) being movably arranged at the center position of the upper end of the supporting component (2); The movable part (3) comprises: An adjusting component (4) is movably arranged on the outer side of the upper end of the movable component (3) and is movably connected to the movable component (3).

8. The probe card holder according to claim 7, wherein: The supporting component (2) comprises: A support base (21), the support base (21) being fixedly arranged at the lower end of the holder body (1); A movable component (6), the movable component (6) being movably arranged inside the supporting base (21) and matching the workbench (22).

9. The probe card holder according to claim 8, wherein: The moving part (6) comprises: A servo motor (61), the servo motor (61) being fixedly arranged at the right end of the support base (21); A limiting hole (62), the limiting hole (62) being opened on the left side of the supporting base (21); a threaded rod (63), the threaded rod (63) being fixedly connected to the output shaft of the servo motor (61) and matching the limiting hole (62); Limiting rods (64), two sets of the limiting rods (64) are fixedly arranged in a mirror image inside the support base (21) and match the limiting holes (62); There are two groups of connecting blocks (65), and both connecting blocks (65) are fixedly arranged at the lower end of the workbench (22), and the bottoms are threadedly engaged with the threaded rod (63) and the limiting rod (64).

10. The probe card holder according to claim 9, wherein: The movable part (3) comprises: A protective shell (31), wherein the protective shell (31) is fixedly arranged on the upper end of the workbench (22); a drive motor (32), the drive motor (32) being fixedly disposed inside the protective shell (31); A central shaft (33), the central shaft (33) passing through the upper end of the protective shell (31) and fixedly connected to the output shaft of the drive motor (32); a rotating base (34), the rotating base (34) being fixedly arranged outside the central axis (33) and matching the central axis (33); A lifting push rod (35) is fixedly arranged on the upper end of the central shaft (33) and matches the rotating base (34).

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