Metastructure optical device for detecting nuclear radiation and manufacturing method thereof

Abstract

A metasurface optical device for detecting nuclear radiation. The device comprises an image sensor, a scintillator, a super-structure lens module located between the image sensor and the scintillator, and a reflection structure used for limiting the movement direction of visible light photons generated by the scintillator. The scintillator is suitable for absorbing nuclear radiation so as to generate visible light photons. The super-structure lens module is used for converging the visible light photons generated by the scintillator and transmitting the visible light photons to the image sensor, so that the energy density of the visible light photons reaches the detection threshold value of the image sensor. The super-structure optical device is small in size and light in weight, so that the super-structure optical device is particularly suitable for daily radiation detection and environment monitoring.

Description

Technical Field

[0001] The present invention relates to nuclear radiation detection equipment, in particular to nuclear radiation detection equipment which is easy to carry. Background Art

[0002] Nuclear radiation, also known as ionizing radiation, refers to the particle and electromagnetic radiation emitted by radionuclides, primarily alpha, beta, and gamma rays. Exposure to radiation exceeding a certain dose poses potential health risks to living organisms. To protect humans and the environment from the hazards of nuclear radiation, the need for nuclear radiation monitoring is increasing. Portable nuclear radiation monitoring equipment, which provides immediate and reliable radiation measurement and monitoring capabilities, plays a vital role in emergency response, radiation environment monitoring, and public awareness and education regarding nuclear radiation.

[0003] Traditional portable nuclear radiation monitoring devices, typically based on photomultiplier tubes or Geiger counters, are bulky and heavy, making daily monitoring difficult. For example, a typical Geiger counter-based device measures 3.05cm × 10.51cm × 19.05cm. Geiger counters are commonly used to detect beta particles, but have lower sensitivity for gamma rays. On the other hand, typical photomultiplier tube (PMT)-based devices are larger than Geiger counters and consist of two parts: the photomultiplier tube and a handheld device. Consequently, such devices are bulky, require two hands to operate, and are difficult to carry around daily, making them more difficult to monitor. Furthermore, the detection results of such devices are displayed only as numerical values, with limited visualization capabilities. Summary of the Invention

[0004] Therefore, in one aspect, the present invention provides a meta-optical device for detecting nuclear radiation. The device includes an image sensor, a scintillator, a meta-lens module positioned between the image sensor and the scintillator, and a reflective structure for limiting the direction of motion of visible light photons generated by the scintillator. The scintillator is adapted to absorb nuclear radiation and thereby generate visible light photons. The meta-lens module is configured to converge the visible light photons generated by the scintillator and transmit them to the image sensor, such that the energy density of the visible light photons reaches the detection threshold of the image sensor.

[0005] Preferably, the image sensor is substantially planar. One side of the meta-lens module is adjacent to the image sensor, and the other side is adjacent to the scintillator. The scintillator has a substantially rectangular parallelepiped shape.

[0006] More preferably, the metalens module is a metalens array, which includes a plurality of metalenses arranged substantially in the same plane.

[0007] More preferably, each of the plurality of metalenses in the metalens array has a shape of a regular polygon or a circle.

[0008] In a specific embodiment, each of the plurality of metalenses in the metalens array is in the shape of a regular hexagon.

[0009] In another embodiment, each of the plurality of metalenses in the metalens array is in the shape of a regular polygon, wherein at least two of the plurality of metalenses abut together via their sides.

[0010] In a variation of a preferred embodiment, the image sensor is a CMOS image sensor.

[0011] In a variation of a preferred embodiment, the reflective structure is a reflective layer that covers four faces of the cuboid scintillator, except for a first face of the scintillator adjoining the meta-lens module and a second face opposite to the first face.

[0012] In another aspect of the present invention, a method for manufacturing a meta-optical device for detecting nuclear radiation is provided. The method comprises the following steps: providing an image sensor, forming a meta-lens module on the image sensor, forming a scintillator on the meta-lens module, and forming a reflective structure on the scintillator to restrict the direction of motion of visible light photons. The scintillator is adapted to absorb nuclear radiation and thereby generate visible light photons. The meta-lens module is configured to converge the visible light photons generated by the scintillator and transmit them to the image sensor, such that the energy density of the visible light photons reaches the detection threshold of the image sensor.

[0013] In another aspect of the present invention, a portable nuclear radiation detection device is disclosed, comprising a meta-optical device and a display device connected to the meta-optical device. The display device is used to display nuclear radiation detection results in an image format.

[0014] Some embodiments of this patent combine a scintillator with a metalens array integrated on an image sensor, realizing a truly ultra-thin and ultra-light portable nuclear radiation monitor. The scintillator releases visible light photons after absorbing the main constituent particles and electromagnetic waves of nuclear radiation. The metalens array is responsible for receiving and converging the visible light photons released from the scintillator, causing them to reach the signal threshold of the image sensor. By analyzing the captured image, the radiation dose can be calculated. This is because the planar metalens array can increase the photon energy density, thereby reaching the detection threshold of the image sensor without the use of a photomultiplier tube.

[0015] Therefore, by employing an ultrathin metalens array to increase the energy density of converted photons, the visible light collected by the aforementioned element can reach its minimum effective brightness. This functionality is similar to that of a photomultiplier tube, but with a much smaller footprint. Furthermore, if the materials are compatible, the present invention allows the metalens array to be constructed directly on the imaging sensor, further reducing the size of the component.

[0016] Due to its compact size and light weight, the meta-optical device is particularly well-suited for everyday radiation detection and environmental monitoring. Its compact size (compressed nearly 100 times) allows for single-handed operation of portable nuclear radiation detection equipment, significantly enhancing portability. Furthermore, the device can be integrated with an image sensor, displaying detection results as images, providing visualization and ease of understanding. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and other features of the present invention will be apparent from the following description of specific embodiments thereof, which are provided by way of example only when taken in conjunction with the accompanying drawings in which:

[0018] Figure 1 A perspective view showing the internal structure of a meta-optical device for detecting nuclear radiation according to a first embodiment of the present invention is shown.

[0019] Figure 2 yes Figure 1 A side view of the internal structure of a meta-optical device, showing example paths of radiation and light.

[0020] Figure 3 yes Figure 1 Schematic diagram of the working principle of the meta-optical device for generating and converging visible light photons.

[0021] Figure 4 A block diagram of the internal structure of a portable nuclear radiation detection device according to an embodiment of the present invention is shown.

[0022] Figure 5 is based on Figure 1 Flowchart of a method for calculating radiation dose from a captured photon image of a meta-optical device.

[0023] Figure 6a A three-dimensional diagram of the geometric phase-based metacell used in designing a metalens is shown.

[0024] Figure 6b Shown Figure 6a A top view of the geometric phase-based metacell.

[0025] Figure 7a Schematic diagram of the phase distribution of a circular meta-lens according to an embodiment of the present invention.

[0026] Figure 7b Schematic diagram of the phase distribution of a square meta-lens according to an embodiment of the present invention.

[0027] Figure 7c Schematic diagram of the phase distribution of a regular hexagonal metalens according to an embodiment of the present invention.

[0028] Figure 8a Shows multiple Figure 7a Schematic diagram of a metalens array composed of circular metalenses.

[0029] Figure 8b Shows multiple Figure 7b Schematic diagram of a metalens array composed of square metalenses.

[0030] Figure 8c Shows multiple Figure 7c Schematic diagram of a metalens array composed of regular hexagonal metalenses.

[0031] Figure 9 is a flow chart of a method for manufacturing a meta-optical device according to another embodiment of the present invention.

[0032] Figure 10 FIG. 4 is a flow chart of a method for manufacturing a metalens according to another embodiment of the present invention. DETAILED DESCRIPTION

[0033] For example, certain words are used in the specification and claims to refer to specific components. Those skilled in the art should understand that hardware manufacturers may use different terms to refer to the same component. This specification and claims do not use differences in names as a way to distinguish components, but use differences in the functions of the components as the criteria for distinction. For example, "including" mentioned throughout the specification and claims is an open term, so it should be interpreted as "including but not limited to". "Substantially" means that within an acceptable error range, those skilled in the art can solve the technical problem within a certain error range and basically achieve the technical effect.

[0034] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0035] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature identified as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined.

[0036] In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "connect," "fixed," etc. should be understood broadly. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediary; or internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0037] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Furthermore, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0038] Unless otherwise defined, technical or scientific terms used herein shall have the ordinary meaning as understood by persons of ordinary skill in the art to which this invention pertains. The terms "first," "second," and similar terms used in the present patent application specification and claims do not denote any order, quantity, or importance, but are merely used to distinguish different components. Similarly, terms such as "a" or "an" do not denote a limitation of quantity, but rather denote the presence of at least one.

[0039] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the described embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0040] Figure 1-2The first embodiment of the present invention is shown in FIG2 , which is a meta-optical device 21 having an overall rectangular parallelepiped shape. The meta-optical device 21 includes an image sensor 20 at the bottom, a meta-lens module 22 above the image sensor 20, a scintillator 24 generally above the meta-lens module 22, and a reflective layer 26 surrounding the scintillator 24. Figure 1 As can be seen in the figure, the scintillator 24 is generally in the shape of a rectangular parallelepiped, and the reflective layer 26 covers the four sides of the rectangular parallelepiped, except for the bottom surface (i.e., the side of the scintillator 24 adjacent to the meta-lens module 22) and the top surface. The top surface of the scintillator 24 is adjacent to the air, thereby serving as an incident interface to receive high-energy particles and electromagnetic waves. In one embodiment, the reflective layer 26 can be made of barium sulfate. The function of the reflective layer 26 is to act as a reflective structure to prevent the visible light photons generated by the scintillator 24 from escaping from the scintillator 24. Specifically, it restricts the photons from escaping from the direction away from the meta-lens module 22, and makes the photons (for example, after one or more reflections) move only in the direction of the meta-lens module 22.

[0041] The function of the scintillator 24 is to release visible light photons after absorbing the main constituent particles of nuclear radiation and electromagnetic waves. Specifically, the scintillator 24 can interact with radioactive particles (such as gamma rays, x-rays, alpha particles, or beta particles) to convert the incident radiation energy into observable visible light. However, the visible light photons emitted from the scintillator 24 are not only weak in energy but also have different emission angles, making them almost impossible to reach the signal threshold of the image sensor. The emission angle problem is solved by the aforementioned reflective layer 26, while the weak energy problem is solved by the metalens module 22, which will be described in detail below. The material of the scintillator 24 can be selected from CsI(Tl) (cesium iodide (thallium doped)), NaI(Tl) (sodium iodide (thallium doped)), BGO (bismuth germanium oxide), etc. Different scintillator materials interact with different types of radiation particles or rays, and the peak wavelengths of the visible light photons emitted after the interaction also vary.

[0042] Image sensor 20 such as Figure 1 As shown, the image sensor 1 has a generally planar shape. In one embodiment, the image sensor 1 is a CMOS (Complementary Metal Oxide Semiconductor) image sensor, whose primary material is silicon. As shown above, the image sensor 20 has a certain detection threshold. If the received light intensity (photon density) is less than the threshold, it cannot be detected by the image sensor 20.

[0043] The meta-lens module 22 is as follows Figure 1 The meta-lens module 22 is shown sandwiched between the image sensor 20 and the scintillator 24. That is, one side of the meta-lens module 22 is adjacent to the image sensor 20, and the other side is adjacent to the scintillator 24. Figure 1In the embodiment, the meta-lens module 22 is a meta-lens array, which includes multiple meta-lenses 22a, which have the functions of traditional lenses but are lighter and thinner than traditional lenses. These meta-lenses 22a are generally arranged in the same plane, that is, a virtual plane parallel to the image sensor 20. In this embodiment, each meta-lens 22a has a regular hexagonal shape. It can be seen that the multiple meta-lenses 22a are closely abutted against each other, specifically, they are abutted together via their respective side edges (i.e., the six sides of the hexagon), forming a structure similar to a honeycomb. Therefore, the periodic arrangement of regular hexagons can achieve seamless tiling, which can maximize the use of the area of ​​the image sensor 20 and collect as many photons as possible. At the same time, the above-mentioned meta-lenses 22a are periodically arranged to form an array. Such an array is necessary because the cross-sectional area of ​​the scintillator 24 is larger than that of a single meta-lens 22a. Constructing the array can fully utilize the area of ​​the scintillator 24, so that all photons emitted from the scintillator 24 can be converged through the meta-lens array. The metalens module 22 is characterized by its ultra-compactness, with a thickness on the nanometer scale. The metalens array module 22 is capable of receiving and focusing visible light photons emitted from the scintillator 24, thereby reaching the signal detection threshold of the image sensor 20. In one exemplary embodiment, the metalens 22a is made of SiN (silicon nitride).

[0044] In introducing Figure 1 After describing the structure and components of the meta-optical device 21, the working principle of the meta-optical device 21 is now described. Figure 2 The figure shows the propagation of nuclear radiation and visible light photons emitted by the scintillator. Figure 2 In the illustrated scenario, a nuclear radiation source 30 (e.g., ore, nuclear-contaminated objects, dust, etc.) releases nuclear radiation 32, such as high-energy particles / electromagnetic waves (e.g., gamma rays, x-rays, alpha particles, or beta particles) that are invisible to the naked eye. The nuclear radiation 32 from the nuclear radiation source 30 is received by the meta-optical device 21, and due to the large surface area of ​​the scintillator 24 in the meta-optical device 21, multiple nuclear radiations can be absorbed (in the Figure 2 The scintillator 24 converts the absorbed nuclear radiation 32 into visible light photons ( Figure 2 As described above, the visible light photons emitted from the scintillator 24 are not only weak in energy but also have different emission angles, making them almost unable to reach the signal threshold of the image sensor. However, under the action of the reflective layer 26, these visible light photons will not leak out of the scintillator 24, but will be reflected by the reflective layer 26. Figure 2 An exemplary bounce path 34 is shown in FIG. In this way, no matter how many times a visible light photon is reflected, it will ultimately be transmitted toward the meta-lens module 22 and then received by the latter.

[0045] Figure 3 The working principle of the meta-lens module 22 of the meta-optical device 21 is shown. Starting from the far left of the figure, assume that there is a high-energy particle 40. After entering the scintillator 24, it releases multiple visible light photons 42 with different scattering angles. These visible light photons 42 are all transmitted to the meta-lens module 22 (through the above-mentioned reflective layer 26). Then, the visible light photons 42 are received and converged by the meta-lens module 22 (as shown in FIG. Figure 3 After that, it is finally captured by the image sensor 20.

[0046] Figure 4 FIG. 5 shows a structural block diagram of a nuclear radiation detection device 50 according to an embodiment of the present invention. The nuclear radiation detection device 50 includes Figure 1 The meta-optical device 21 is shown, along with a computing device 52 and a display device 54. The computing device 52 is connected to both the meta-optical device 21 and the display device 54. The computing device 52 (e.g., a CPU and memory) is used to convert the total intensity of the photon image to the radiation dose, while the display device 54 (e.g., a display screen) is used to display the nuclear radiation detection results in an image format.

[0047] Specifically, the image sensor 20 in the meta-optical device 21 generates a corresponding photon image after collecting the collected visible light photons 42. After capturing the photon image information, the computing device 52 adds the intensity of each pixel in the image to obtain the total photon image intensity I t , and finally by I t The radiation dose R is converted. The total intensity of the photon image I t The exact relationship between the radiation dose R needs to be calibrated using a standard radiation source. Here, it is assumed that the total intensity I t There is a first-order linear relationship between the radiation dose R and R = aI t +b, changing the radiation source dose R can obtain the corresponding different I t , the values ​​of coefficients a and b can be obtained by fitting when there are enough samples. It should be noted that the accuracy of the conversion between total intensity and radiation dose is not only related to the number of samples, but also to the assumed fitting relationship. The fitting relationship can be adjusted appropriately according to the actual situation, such as from the first-order R = aI t +b is adjusted to the second-order linear relationship R = aI t 2 +bI t +c.

[0048] Figure 5The following figure shows the specific steps for calculating the radiation dose by the computing device 52 from the photon image information obtained by the image sensor 20. First, in step 60, the computing device 52 obtains the photon image captured by the meta-optical device 21. Then, in step 62, the computing device 52 superimposes the intensity magnitude I of each pixel in the photon image. i , and the total strength Finally, the calculation device 52 converts the total intensity I t The radiation dose R is converted. The radiation dose R can be displayed in an image format, so it can be visualized and easily understood by the user.

[0049] Next, the meta-lens (eg Figure 1-2 The phase distribution of the meta-lens is shown in the following equation (1):

[0050]

[0051] Here, λ is the wavelength of the incident light, and f is the focal length of the metalens. The wavelength of the incident light can be determined by the type of scintillator material used. This is because different scintillator crystals have corresponding peak emission wavelengths, such as 550nm for CsI(Tl), 415nm for NaI(Tl), and 480nm for BGO. The diameter and focal length of the corresponding metalens, and ultimately the metalens' phase distribution, can be determined based on the structural parameters and optical properties of the image sensor.

[0052] Taking CsI(Tl) as an example, high-energy particles are converted into multiple visible light photons with a wavelength of 550nm after passing through the CsI(Tl) scintillator. Figure 7b This is a schematic diagram of the phase distribution of the metalens that converges these visible light photons. The metalens has a diameter of 50 microns and a focal length of 10 microns. To comply with sampling principles, the period of the metacell is preferably less than λ / 2, set here to 250 nm. It should be noted that the diameter, focal length, and period of the metalens can be flexibly adjusted.

[0053] The corresponding phase distribution can be directly realized using geometric phase or transmission phase. The magnitude of the geometric phase is related to the rotation angle of the nanostructure in the meta-unit. The nanostructures in the meta-structure and their rotation angles are well known to those skilled in the art. In the design of the meta-lens of the present invention, if the rotation angle of the nanostructure is θ, then the geometric phase corresponding to the meta-unit is 2θ. The reference schematic diagram of the meta-unit based on geometric phase is shown in FIG. Figure 6a-6b ,in Figure 6a For a three-dimensional graph, Figure 6b This is a top view. Figure 6a-6bNanopillars 70 are rectangular parallelepipeds, but can also be modified to elliptical cylinders or other shapes with aspect ratios other than 1:1 depending on actual needs. The shape of base 72 is not fixed to a square; a regular hexagon can also be used. The magnitude of the transmission phase is directly related to the volume fraction of the nanostructure. Nanostructures with smaller volume fractions have smaller transmission phases. Therefore, nanostructures of varying sizes can be constructed to achieve corresponding phase distributions. In this case, there are no specific requirements for the aspect ratio of the nanostructures.

[0054] Next, the arrangement of the meta-lens array in the embodiment of the present invention will be described in detail. The nano-pillars 70 that can achieve corresponding phases are arranged to form a meta-lens (e.g. Figure 1-2 After the meta-lens 22a in the image is formed, it is necessary to form an array of many identical meta-lenses. This is because the cross-sectional area of ​​the scintillator is generally larger than that of a single meta-lens. Constructing an array can fully utilize the area of ​​the scintillator so that all photons emitted from the scintillator can be converged through the meta-lens array. The shape of a single meta-lens can be varied, such as a regular polygon or a circle. Figure 1-2 In the embodiment of the present invention, the shape of the meta-lens is a regular hexagon, which is also Figure 7c The array is shown in Figure c. Figure 7a and 8a In the embodiment shown, the shape of the meta-lens is circular, and in Figure 7b and 8b In the embodiment shown, the shape of the meta-lens is square. It should be noted that the shape of the meta-lens is particularly preferred because it can achieve the greatest degree of tessellation and fully utilize the area of ​​the image sensor.

[0055] Figure 9 A method for manufacturing a meta-optical device 21 (e.g., Figure 1-Figure 3 The main steps of the method of the meta-optical device 21 in FIG. First, in step 80, an image sensor (eg, Figure 1-3 Then, in step 82, a meta-lens array including a plurality of meta-lenses is formed on the image sensor. Then, in step 84, a scintillating crystal layer is formed on the meta-lens array. Figure 9 Although not shown, the manufacturing method also includes other steps, such as wrapping a reflective layer around the outside of the scintillator.

[0056] Next, we will Figure 9The details of step 82 in the following are described below. The most critical step in metalens fabrication is etching, such as conventional photolithography, laser direct write lithography, laser interference lithography, electron beam etching, focused ion beam etching, probe scanning etching, nanoimprint etching, and microsphere projection etching, all of which are well known to those skilled in the art. In addition to etching techniques, deposition methods are also required to complete the metalens. Depending on the material of the nanostructure and the processing equipment, the metalens fabrication method may also vary accordingly.

[0057] The following is an example of preparing GaN nanorods to introduce the complete processing flow. The specific steps are as follows and shown in Figure 10 middle.

[0058] Step 1: Gallium nitride is deposited on a twice-polished sapphire substrate using chemical vapor deposition.

[0059] Step 2: Deposit silicon dioxide on gallium nitride using plasma chemical vapor deposition;

[0060] Step 3: Spin-coat photoresist on silicon dioxide;

[0061] Step 4: Etching the photoresist layer using electron beam;

[0062] Step 5: Use electron beam evaporation technology to evaporate a layer of chromium on the top surface;

[0063] Step 6: Peel off the chrome layer;

[0064] Step 7: Etch the silicon dioxide layer using reactive ion etching technology;

[0065] Step 8: Remove the chrome layer;

[0066] Step 9: Using inductively coupled plasma etching technology to etch gallium nitride to obtain nanopillars;

[0067] Step 10: Remove the silica layer to obtain the final sample.

[0068] In the above, exemplary embodiments are fully described. Although the description mentions specific embodiments, it is clear to those skilled in the art that the present invention can be implemented by changing these specific details. Therefore, the present invention should not be interpreted as being limited to the embodiments described herein.

[0069] Although embodiments of the present invention have been described and illustrated in detail in the accompanying drawings and the foregoing description, they should be considered exemplary rather than restrictive. It goes without saying that only exemplary embodiments are shown and described and are not intended to limit the scope of the present invention in any way. It is understood that any feature described herein may be used in any embodiment. The exemplary embodiments are not mutually exclusive, nor do they exclude other embodiments not described herein. Therefore, the present invention also provides embodiments comprising a combination of one or more of the illustrative embodiments described above. The present invention may be modified and varied without departing from the spirit and scope of the present invention, and therefore, only the limitations specified in the appended claims should be applied.

[0070] For example, the material selection for constructing the meta-lens of the present invention can be varied, in addition to Figure 9 and Figure 10 In addition to the materials that can be grown directly on the image sensor as described in the embodiments, other materials can also be selected, and even scintillator materials can be directly used to construct a meta-lens, thereby realizing the photon conversion and focusing functions at the same time.

[0071] Similarly, the present invention is not limited to the scintillator material, as long as it can absorb nuclear radiation and thereby generate visible light. For example, the scintillator material can be BGO, NaI(Tl), CsI(Tl), LaBr3(Ce), or LaGPS, whose luminescence peaks are 480nm, 415nm, 550nm, 380nm, and 390nm, respectively.

[0072] In addition, the phase distribution of the metadevice can also change according to the target requirements. There are more ways to increase energy density than just photon convergence. For example, deflecting photons to a uniform angle can also be achieved.

Claims

1. A meta-optical device for detecting nuclear radiation, comprising: Image sensor; Scintillators, suitable for absorbing nuclear radiation to produce visible light photons; a meta-lens module located between the image sensor and the scintillator; as well as a reflective structure for limiting the moving direction of the visible light photons generated by the scintillator; The meta-lens module is used to converge the visible light photons generated by the scintillator and transmit them to the image sensor, so that the energy density of the visible light photons reaches the detection threshold of the image sensor.

2. The meta-optical device of claim 1 , wherein the image sensor is a substantially planar structure; One side of the meta-lens module is adjacent to the image sensor, and the other side is adjacent to the scintillator; The scintillator has a generally rectangular parallelepiped shape.

3. The meta-optical device according to claim 2, wherein the meta-lens module is a meta-lens array, which includes a plurality of meta-lenses; the plurality of meta-lenses are generally arranged in the same plane. 4 . The meta-optical device according to claim 3 , wherein the shape of each of the plurality of metalenses in the metalens array is a regular polygon or a circle. 5 . The meta-optical device according to claim 4 , wherein each of the plurality of metalenses in the metalens array has a regular hexagonal shape.

6. The meta-optical device according to claim 4, wherein each of the plurality of metalenses in the metalens array has a shape of a regular polygon, and wherein at least two of the plurality of metalenses abut against each other through their sides.

7. The meta-optical device according to claim 1, wherein the image sensor is a CMOS image sensor.

8. The meta-optical device according to claim 2, wherein the reflective structure is a reflective layer that covers four surfaces of the rectangular parallelepiped of the scintillator except a first surface of the scintillator adjacent to the meta-lens module and a second surface opposite to the first surface.

9. A method for manufacturing the meta-optical device for detecting nuclear radiation according to claim 1, comprising the following steps: Providing image sensors; forming a meta-lens module on the image sensor; forming a scintillator on the meta-lens module; the scintillator is suitable for absorbing nuclear radiation to generate visible light photons; as well as forming a reflective structure on the scintillator for limiting the moving direction of the visible light photons; The meta-lens module is used to converge the visible light photons generated by the scintillator and transmit them to the image sensor, so that the energy density of the visible light photons reaches the detection threshold of the image sensor.

10. A portable nuclear radiation detection device comprising: The meta-optical device according to claim 1; as well as a display device connected to the meta-optical device; The display device is used to display the nuclear radiation detection results in an image format.

Images