A double-disc drying machine for deep ultraviolet coating processing

Abstract

The present invention relates to the technical field of coating processing, and in particular to a double-disc spin dryer for deep ultraviolet coating processing, comprising a spin drying box, a motor and a vertical shaft, wherein the motor is installed in a spin drying chamber of the spin drying box, the vertical shaft is vertically rotatably installed in the spin drying chamber of the spin drying box, the lower end of the vertical shaft is transmission-connected to the output shaft of the motor, and a double-disc mechanism is installed on the vertical shaft; the present invention also comprises a sub-frame, a sub-shaft, a first drive wheel, a second drive wheel, a transmission belt and an energy storage mechanism, wherein the sub-frame is installed in the spin drying chamber of the spin drying box, the sub-shaft is rotationally installed on the upper part of the sub-frame, the drive wheel is concentrically installed on the sub-shaft, the drive wheel second is concentrically installed on the vertical shaft, the transmission belt is sleeved and connected to the first drive wheel and the second drive wheel, the energy storage mechanism is installed at the lower part of the sub-frame, and the energy storage mechanism is in a disconnectable transmission connection with the sub-shaft; through the energy storage process and the release process of the energy storage mechanism, the acceleration and deceleration time of the coating element is shortened, and the working efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of coating processing, in particular to a double-disc spin dryer for deep ultraviolet coating processing. Background Art

[0002] The double-disc spin dryer used in deep ultraviolet coating processing is a precision device primarily used to remove moisture and chemical residues during the surface treatment of wafers or substrates in the semiconductor and photovoltaic industries, ensuring coating quality. Prior art Chinese utility model patent publication number CN219264732U proposes a lens spin dryer comprising a housing with a through slot, a sealing assembly for sealing the through slot, a base rotatably connected to the housing, a driving member for driving the base, a hanging basket rotatably connected to the base, the basket's rotational axis on the base being located on a chord of an arbitrary circle concentric with the base's rotational axis, the through slot being located along the path of the basket's movement following the base, and a hot air assembly in communication with the housing. This can reduce the risk of lenses moving on the hanging basket due to excessive centrifugal force during the spin drying process, thereby improving the stability of the lenses during the spin drying process.

[0003] During the drying process, the two material trays need to be accelerated from a stationary state to a specified speed for high-speed drying. After the coated lens is dried at a stable speed, it needs to be decelerated to a stationary state. Since the existing spin dryer does not intervene in the acceleration and deceleration process of the rotating shaft and the two material trays, the motor needs to exert more torque during acceleration to reduce the acceleration time, and natural deceleration takes more time, resulting in reduced work efficiency. Summary of the Invention

[0004] In order to solve the above technical problems, the present invention provides a double-disc spin dryer for deep ultraviolet coating processing, which shortens the acceleration and deceleration time of the coating component and improves work efficiency through the energy storage process and release process of the energy storage mechanism.

[0005] The motor is installed in the drying chamber of the drying box, and the vertical shaft is installed in the drying chamber of the drying box, and the lower end of the vertical shaft is connected to the output shaft of the motor, and the double-disc mechanism is installed on the vertical shaft; it also includes a sub-frame, a sub-shaft, a first driving wheel, a second driving wheel, a transmission belt and an energy storage mechanism. The sub-frame is installed in the drying chamber of the drying box, the sub-shaft is rotatably installed on the upper part of the sub-frame, the driving wheel is concentrically installed on the sub-shaft, the driving wheel second is concentrically installed on the vertical shaft, the transmission belt is connected to the first driving wheel and the second driving wheel, the energy storage mechanism is installed at the lower part of the sub-frame, and the energy storage mechanism is connected to the sub-shaft in a disconnectable transmission connection; when working, the pick-up and placement door assembly is opened to put the coating elements to be dried into the two material trays of the two double-disc mechanisms respectively, the pick-up and placement door assembly is closed, and the motor is started through The output shaft drives the vertical shaft to rotate at an accelerated speed, and the vertical shaft drives the double-disk mechanism to start accelerating rotation. At this time, the countershaft is connected to the energy storage mechanism, and the stored energy of the energy storage mechanism is released to drive the countershaft to rotate. The countershaft drives the driving wheel one to rotate, and the driving wheel one drives the driving wheel two to rotate through the transmission belt, and the driving wheel two drives the vertical shaft to rotate, thereby increasing additional torque for the motor. When the speed output by the energy storage mechanism is lower than the output speed of the motor, the energy storage mechanism is disconnected from the countershaft, thereby shortening the acceleration time of the vertical shaft. After the vertical shaft reaches the set speed, the coating component is dried at a high speed through the double-disk mechanism. After the coating component is dried, the motor is powered off, the vertical shaft starts to decelerate, and the countershaft is connected to the energy storage mechanism. At this time, the vertical shaft drives the driving wheel two to rotate, and the driving wheel two drives the driving wheel one and the countershaft to rotate through the transmission belt, so that the countershaft drives the energy storage mechanism to store energy. The energy storage process shortens the deceleration time of the vertical shaft. Through the energy storage process and release process of the energy storage mechanism, the acceleration and deceleration time are shortened, thereby improving work efficiency.

[0006] Preferably, the energy storage mechanism includes a flywheel disc, multiple clamping blocks, multiple springs, an energy accumulator and a friction wheel, the flywheel disc is concentrically mounted on the lower end of the secondary shaft, the multiple clamping blocks are uniformly slidably mounted on the flywheel disc, the multiple clamping blocks all slide radially along the flywheel disc, the inner ends of the multiple springs are respectively connected to the multiple clamping blocks, the outer ends of the multiple springs are connected to the flywheel disc, the elastic force of the multiple springs pushes the multiple clamping blocks inward respectively, the energy accumulator is mounted on the lower part of the secondary frame, the output shaft of the energy accumulator is concentrically mounted with the friction wheel, and the friction wheel is located in the center of the multiple clamping blocks; at the beginning of acceleration, the elastic force of the multiple springs causes the multiple clamping blocks to be pressed against the friction wheel, so that the friction wheel and the multiple clamping blocks are transmission-connected, when the motor drives the vertical shaft to accelerate, the stored energy of the energy accumulator is released, driving the friction wheel to rotate, the friction wheel drives the flywheel disc to rotate through the multiple clamping blocks, the flywheel disc drives the driving wheel one to rotate through the secondary shaft, the driving wheel one increases the additional torque for the vertical shaft through the transmission belt and the driving wheel two, shortening When the speed of the motor is lower than that of the flywheel, the flywheel starts to rotate through the plurality of clamping blocks. At this time, the speed of the vertical shaft reaches the specified speed, and the centrifugal force received by the plurality of clamping blocks is greater than the elastic force of the plurality of springs, so that the plurality of clamping blocks move outward and are disconnected from the friction wheel, and the energy accumulator does not cause additional burden on the motor. When the motor is powered off and the vertical shaft is decelerated freely, the secondary shaft drives the flywheel to rotate through the transmission action of the drive wheel 2, the transmission belt and the drive wheel 1. When the vertical shaft is lower than the specified speed, the speed of the flywheel is also lower than the specified speed. At this time, the centrifugal force received by the plurality of clamping blocks is less than the elastic force of the plurality of springs, so that the plurality of springs press the plurality of clamping blocks against the friction wheel, thereby driving the energy accumulator to store energy. The energy storage process of the energy accumulator causes resistance to the vertical shaft, thereby shortening the deceleration time. In the next spin drying process, the motor is rotated in the opposite direction to adapt to the rotation direction of the friction wheel when the energy stored in the energy accumulator is released, which has good practicality.

[0007] Preferably, it also includes a push cylinder and a friction block, the push cylinder is installed on the sub-frame, the friction block is installed on the piston rod of the push cylinder, a brake disc is concentrically arranged at the bottom of the friction wheel, and the friction block is located on the outside of the brake disc of the friction wheel; after the multiple clamping blocks are disengaged from the transmission connection with the friction wheel, the push cylinder drives the piston rod to move, so that the friction block is pressed against the brake disc of the friction wheel, thereby locking the friction wheel to avoid waste of stored energy in the energy accumulator; when the friction wheel and the multiple clamping blocks resume the transmission connection, the push cylinder drives the piston rod to move, so that the friction block is disengaged from the brake disc of the friction wheel, so that the stored energy of the energy accumulator is effectively released.

[0008] Preferably, the double-disc mechanism includes two transverse shafts, two hangers and two material tray racks, the inner ends of the two transverse shafts are respectively connected to the two sides of the vertical shaft, the two hangers are respectively installed on the outer ends of the two transverse shafts, and the two material tray racks are rotatably installed on the two hangers, and hollow trays are provided at the lower parts of the material tray racks; the coating elements are loaded onto the trays of the two material tray racks through special tooling, the vertical shaft drives the two transverse shafts to rotate, the two transverse shafts drive the two hangers to rotate, and the two hangers drive the two material tray racks to rotate, so that the two material tray racks are gradually swung from a vertical state to a horizontal state under the action of centrifugal force during the acceleration process, so that the residual liquid on the coating elements in the special tooling is thrown out through the hollow tray of the material tray rack, thereby achieving efficient drying.

[0009] Preferably, the transverse axis member includes a bevel gear 1, a transverse axis rod, a bevel gear 2 and a connecting member. The bevel gear 1 is fixedly installed in the drying chamber of the drying box, and a concentric ring of the bevel gear is arranged on the outside of the vertical axis. The inner end of the transverse axis rod is rotatably connected to the side wall of the vertical axis. The bevel gear 2 is concentrically installed on the transverse axis rod, and the bevel gear 2 is meshed with the bevel gear 1. The outer end of the transverse axis rod is connected to the middle part of the hanger through the connecting member; when the vertical axis rotates, it drives the two transverse axis rods to rotate around the vertical axis. Since the two bevel gears 2 are meshed with the bevel gear 1, the two transverse axis rods rotate around their axes, and the two transverse axis rods drive the two hangers to rotate around the two transverse axis rods respectively through the connecting member, and then drive the two material tray racks to rotate, so that the two material tray racks rotate around the vertical axis and the two transverse axis rods respectively, so that the centrifugal force exerted on the coating element is more complex, thereby improving the drying efficiency.

[0010] Preferably, the connecting member includes a gear ring 1, a sleeve, a gear ring 2 and a spring 2. The outer end of the transverse axis rod is provided with a gear ring 1, the inner end of the sleeve is movably sleeved on the outer wall of the outer end of the transverse axis rod, the inner end of the sleeve is provided with a gear ring 2, the gear ring 2 is matched and aligned with the gear ring 1, the outer end of the sleeve is connected to the middle of the hanger, the inner end of the spring 2 is connected to the transverse axis rod, the outer end of the spring 2 is rotatably connected to the inner end of the sleeve through a bearing, and the elastic force of the spring 2 causes the gear ring 2 to separate from the gear ring 1; when the vertical shaft rotates, the transverse axis rod is driven to rotate through the bevel gear 1 and the bevel gear 2. When the vertical shaft rotates at a low speed, the centrifugal force on the hanger is less than the elastic force of the second spring, so that the second gear ring is disconnected from the first gear ring. When the vertical shaft rotates at a low speed, the centrifugal force on the hanger is less than the elastic force of the second spring, and the sleeve slides outward along the horizontal shaft rod, so that the second gear ring is engaged with the first gear ring, so that the horizontal shaft rod drives the sleeve to rotate, and the sleeve drives the hanger and the tray rack to rotate, so that the two tray racks only revolve and rotate when the vertical shaft rotates at a high speed, and only revolve when the vertical shaft rotates at a low speed, which has good practicality.

[0011] Preferably, it also includes four insertion rods and four push rods, and the two ends of the two hanging brackets are slidably inserted with the insertion rods, and the two insertion rods are respectively inserted and connected with the two ends of the upper arms of the two material tray racks, and push rods are provided on the four insertion rods; the two ends of the upper arms of the material tray rack are respectively aligned with the two ends of the hanging bracket, and the two insertion rods are pushed outward by the two push rods, so that the two insertion rods are respectively inserted and connected with the arms of the material tray rack, so that the material tray rack and the hanging bracket can be quickly installed and disassembled.

[0012] Preferably, it also includes a lower frame, multiple lower flip plates, multiple lower torsion springs, a component loading frame, an upper frame, multiple upper flip plates and multiple upper torsion springs, the lower frame and the upper frame are both square frame-shaped, one end of the multiple lower flip plates are rotatably mounted on the inside of the lower frame through a rotating shaft, the multiple lower torsion springs are respectively mounted on the rotating shafts of the multiple lower flip plates, the elastic force of the multiple lower torsion springs makes the multiple lower flip plates horizontal and isolates the inside of the lower frame, the component loading frame is mounted on the lower frame, the component loading frame is used to load the coating components, the upper frame is mounted on the component loading frame, one end of the multiple upper flip plates are rotatably mounted on the inside of the upper frame through a rotating shaft, the multiple upper torsion springs are respectively mounted on the rotating shafts of the multiple upper flip plates On the shaft, the elastic force of multiple upper torsion springs makes the multiple upper flip plates horizontal and separates the interior of the upper frame; the lower frame, the component loading frame and the upper frame constitute a three-layer structure of special tooling, the coated components are loaded in the component loading frame, the multiple lower torsion springs separate the interior of the lower frame, and the upper flip plates separate the interior of the upper frame, thereby reducing the contact between the coated components and the outside world, and when the special tooling is loaded onto the tray of the tray rack, when the special tooling follows the tray rack for drying, the centrifugal force on the other end of the multiple lower flip plates is greater than the torsion of the multiple lower torsion springs, and they rotate outward to open, so that the residual liquid on the coated components is thrown out through the lower frame, thereby reducing the contamination of the coated components during the transfer and drying process.

[0013] Preferably, the pick-up and placement door assembly includes an upper cover, two slide rail frames, two rails, a box door and a push cylinder 2. An inspection port is provided on the upper end surface of the spin dryer box, the upper cover is installed on the inspection port of the spin dryer box, a pick-up and placement port is provided on the upper cover, two slide rail frames are installed on the upper cover, the two slide rail frames are arranged oppositely on both sides of the pick-up and placement port, rails are provided on both slide rail frames, multiple track wheels are rotatably installed on both sides of the box door, and the multiple track wheels are respectively rollingly installed in the two levers, one end of the push cylinder 2 is rotatably connected to the upper cover, and the other end of the push cylinder 2 is rotatably connected to the box door, and the box door is used to close and open the pick-up and placement port of the upper cover; the piston rod of the push cylinder 2 contracts to drive the box door to move, and the track wheels of the box door move along the two rails of the two slide rail frames respectively, so that the box door opens the pick-up and placement port of the upper cover; the piston rod of the push cylinder 2 extends to push the box door to move, so that the box door closes the pick-up and placement port, and the sealing is good.

[0014] Preferably, it also includes two inner slides, a pick-up and placement rack, a vertical slide and an adsorption head, the two inner slides are installed on the lower end surface of the upper cover plate, the two inner slides are respectively located on both sides of the pick-up and placement opening of the upper cover plate, the upper end of the pick-up and placement rack is slidably connected with the two inner slides, the vertical slide is vertically slidably connected to the pick-up and placement rack, and the adsorption head is installed at the lower part of the vertical slide; after the box door is moved to open the pick-up and placement opening of the upper cover plate, the pick-up and placement rack is pushed inward along the two inner slides so that the pick-up and placement rack is located under the pick-up and placement opening of the upper cover plate, so that the lower part of the pick-up and placement rack drives the vertical slide to approach the special tooling on the material tray rack, so that the adsorption head adsorbs the special tooling, and the vertical slide is lifted upward, so that the vertical slide can lift the special tooling through the pick-up and placement opening of the upper cover plate through the adsorption head, which is convenient for taking materials, and the direction operation is convenient for loading, thereby improving work efficiency.

[0015] Compared with the prior art, the present invention has the following beneficial effects: through the energy storage process and release process of the energy storage mechanism, the acceleration and deceleration time is shortened, thereby improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of the present invention;

[0017] Figure 2 It is a front cross-sectional structural schematic diagram of the present invention;

[0018] Figure 3 It is a schematic side sectional view of the present invention;

[0019] Figure 4 is an axonometric schematic diagram of the present invention;

[0020] Figure 5 It is a schematic diagram of the structure of the motor, vertical shaft and double disc mechanism;

[0021] Figure 6 It is a structural diagram of the motor, vertical shaft, auxiliary frame, auxiliary shaft, driving wheel 1, driving wheel 2, flywheel disc and energy storage device;

[0022] Figure 7 It is a structural diagram of the auxiliary frame, auxiliary shaft, driving wheel 1, flywheel disc, spring 1, energy accumulator, friction wheel, push cylinder and friction block;

[0023] Figure 8 It is a front view structural diagram of the auxiliary frame, auxiliary shaft, driving wheel 1, flywheel disc, spring 1, energy accumulator, friction wheel, push cylinder and friction block;

[0024] Figure 9 It is a schematic diagram of the structure of the flywheel disc, clamp block and spring;

[0025] Figure 10 It is a structural diagram of the horizontal axis, hanging bracket and other structures;

[0026] Figure 11 It is a structural diagram of the decomposed state of the special tooling;

[0027] Figure 12 It is a structural diagram of the door assembly and other structures;

[0028] Figure 13 It is a structural diagram of the inner slide, pick-and-place rack, vertical slide and adsorption head.

[0029] Markings in the attached figure: 1, spin box; 2, motor; 3, vertical shaft; 4, auxiliary frame; 5, auxiliary shaft; 6, driving wheel 1; 7, driving wheel 2; 8, transmission belt; 9, flywheel; 10, clamping block; 11, spring 1; 12, energy accumulator; 13, friction wheel; 14, push cylinder; 15, friction block; 16, horizontal shaft; 17, hanging rack; 18, material tray rack; 19, bevel gear 1; 20, horizontal shaft rod; 21, bevel gear 2; 22, ring gear 1; 23. Sleeve; 24. Gear ring 2; 25. Spring 2; 26. Insert rod; 27. Push rod; 28. Lower frame; 29. ​​Lower flip plate; 30. Lower torsion spring; 31. Component loading frame; 32. Upper frame; 33. Upper flip plate; 34. Upper torsion spring; 35. Upper cover; 36. Slide rail rack; 37. Track; 38. Box door; 39. Push cylinder 2; 40. Inner slide; 41. Pick-and-place rack; 42. Vertical slide; 43. Adsorption head. DETAILED DESCRIPTION

[0030] To facilitate understanding of the present invention, the present invention will be described more fully below with reference to the accompanying drawings. The present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0031] Example 1, as Figures 1 to 10As shown, a double-disc spin dryer for deep ultraviolet coating processing includes a spin box 1, a motor 2 and a vertical shaft 3. A spin chamber is arranged inside the spin box 1, and a pick-up and drop door assembly connected to the spin chamber is arranged on the top of the spin box 1. The motor 2 is installed in the spin chamber of the spin box 1, and the vertical shaft 3 is vertically rotatably installed in the spin chamber of the spin box 1. The lower end of the vertical shaft 3 is transmission-connected to the output shaft of the motor 2, and the double-disc mechanism is installed on the vertical shaft 3; it also includes a sub-frame 4, a sub-shaft 5, a driving wheel 1 6, a driving wheel 2 7, a transmission belt 8 and an energy storage mechanism. The sub-frame 4 is installed in the spin chamber of the spin box 1, the sub-shaft 5 is rotatably installed on the upper part of the sub-frame 4, the driving wheel 1 6 is concentrically installed on the sub-shaft 5, the driving wheel 2 7 is concentrically installed on the vertical shaft 3, the transmission belt 8 is suitably connected to the driving wheel 1 6 and the driving wheel 2 7, the energy storage mechanism is installed at the lower part of the sub-frame 4, and the energy storage mechanism and the sub-shaft 5 have a disengageable transmission connection. The energy storage mechanism includes a flywheel disc 9, multiple clamping blocks 10, multiple springs 11, an energy accumulator 12 and a friction wheel 13. The flywheel disc 9 is concentrically mounted on the lower end of the secondary shaft 5. Multiple clamping blocks 10 are uniformly slidably mounted on the flywheel disc 9. Multiple clamping blocks 10 slide radially along the flywheel disc 9. The inner ends of multiple springs 11 are respectively connected to the multiple clamping blocks 10, and the outer ends of multiple springs 11 are connected to the flywheel disc 9. The elastic force of multiple springs 11 pushes the multiple clamping blocks 10 inward respectively. The energy accumulator 12 is mounted on the lower part of the sub-frame 4. The output shaft of the energy accumulator 12 is concentrically mounted with the friction wheel 13, and the friction wheel 13 is located in the center of the multiple clamping blocks 10; it also includes a push cylinder 14 and a friction block 15. The push cylinder 14 is mounted on the sub-frame 4, and the friction block 15 is mounted on the piston rod of the push cylinder 14. A brake disc is concentrically arranged at the bottom of the friction wheel 13, and the friction block 15 is located outside the brake disc of the friction wheel 13.

[0032] The energy storage device 12 may be a clockwork energy storage device, a magnetic energy storage device, a flywheel energy storage device, or other devices for storing energy.

[0033] During operation, the pick-up and placement door assembly is opened and the coated components to be dried are placed in the two material trays of the two double-disc mechanisms respectively. The pick-up and placement door assembly is closed, and the motor 2 is started to drive the vertical shaft 3 to rotate through the output shaft. The vertical shaft 3 drives the double-disc mechanism to start rotating. When the vertical shaft 3 starts to accelerate, the elastic force of multiple springs 11 causes the multiple clamping blocks 10 to be pressed against the friction wheel 13, so that the friction wheel 13 and the multiple clamping blocks 10 are connected in transmission. The push cylinder 14 drives the piston rod to move, so that the friction block 15 is disengaged from the brake disc of the friction wheel 13, so that the stored energy of the accumulator 12 is effectively released, driving the friction wheel 13 to rotate. The friction wheel 13 drives the flywheel disc 9 to rotate through multiple clamping blocks 10, and the flywheel disc 9 drives the drive wheel 1 6 to rotate through the secondary shaft 5. The drive wheel 1 6 increases the additional torque for the vertical shaft 3 through the transmission belt 8 and the drive wheel 2 7, shortening the acceleration time. When the speed of the friction wheel 13 is lower than the speed of the flywheel disc 9, the flywheel disc 9 starts to drive the friction wheel 13 to rotate through multiple clamping blocks 10. At this time, the speed of the vertical shaft 3 reaches the specified speed, and the centrifugal force received by the multiple clamping blocks 10 is greater than the elastic force of the multiple springs 11, causing the multiple clamping blocks 10 to move outward and disconnect from the friction wheel 13, storing energy. The device 12 does not cause additional burden on the motor 2; after the vertical shaft 3 reaches the set speed, the coating element is dried at high speed through the double-disc mechanism. After the coating element is dried, the motor 2 is powered off, and the vertical shaft 3 begins to decelerate freely. The vertical shaft 3 drives the flywheel disc 9 to rotate through the transmission effect of the driving wheel 2 7, the transmission belt 8 and the driving wheel 1 6. When the vertical shaft 3 is lower than the specified speed, the speed of the flywheel disc 9 is also lower than the specified speed. At this time, the centrifugal force on the multiple clamping blocks 10 is less than the elastic force of the multiple springs 11, so that the multiple springs 11 press the multiple clamping blocks 10 on the friction wheel 13, thereby The energy accumulator 12 is driven to store energy. The energy storage process of the energy accumulator 12 creates resistance to the vertical shaft 3, thereby shortening the deceleration time. When the vertical shaft 3 stops, the push cylinder 14 drives the piston rod to move, so that the friction block 15 is pressed against the brake disc of the friction wheel 13, thereby locking the friction wheel 13 and avoiding waste of stored energy in the energy accumulator 12. During the next spin-drying process, the motor 2 is rotated in the opposite direction through the controller to adapt to the rotation direction of the friction wheel 13 when the stored energy of the energy accumulator 12 is released. Therefore, through the energy storage process and release process of the energy storage mechanism, the acceleration and deceleration time are shortened and the work efficiency is improved.

[0034] Example 2, as Figure 1 、 Figure 2 、 Figure 3 、 Figure 5 、 Figure 10 and Figure 11As shown, on the basis of Example 1, it also includes a lower frame 28, multiple lower flip plates 29, multiple lower torsion springs 30, a component loading frame 31, an upper frame 32, multiple upper flip plates 33 and multiple upper torsion springs 34. The lower frame 28 and the upper frame 32 are both square frame-shaped, one end of the multiple lower flip plates 29 are respectively rotatably mounted on the inside of the lower frame 28 through a rotating shaft, and the multiple lower torsion springs 30 are respectively mounted on the rotating shafts of the multiple lower flip plates 29. The elastic force of the multiple lower torsion springs 30 makes the multiple lower flip plates 29 horizontal and isolates the inside of the lower frame 28. The component loading frame 31 is mounted on the lower frame 28. The component loading frame 31 is used to load the coating components. The upper frame 32 is mounted on the component loading frame 31. One end of the multiple upper flip plates 33 are respectively rotatably mounted on the inside of the upper frame 32 through a rotating shaft. The multiple upper torsion springs 34 are respectively mounted on the rotating shafts of the multiple upper flip plates 33. The elastic force of the multiple upper torsion springs 34 makes the multiple upper flip plates 33 horizontal and isolates the inside of the upper frame 32.

[0035] The lower frame 28, the component loading frame 31 and the upper frame 32 constitute a three-layer structure of a special tooling. The coated components are loaded in the component loading frame 31. Multiple lower torsion springs 30 separate the interior of the lower frame 28, and the upper flip plate 33 separates the interior of the upper frame 32, thereby reducing the contact between the coated components and the outside world. When the special tooling is loaded onto the tray of the tray rack 18, when the special tooling follows the tray rack 18 for drying, the other end of the multiple lower flip plates 29 is rotated outward and opened when the centrifugal force exerted on it is greater than the torsion of the multiple lower torsion springs 30, so that the residual liquid on the coated components is thrown out through the lower frame 28, thereby reducing the contamination of the coated components during the transfer and drying process.

[0036] The double-disc mechanism includes two transverse shafts 16, two hangers 17 and two material tray racks 18. The inner ends of the two transverse shafts 16 are respectively connected to the two sides of the vertical shaft 3, and the two hangers 17 are respectively mounted on the outer ends of the two transverse shafts 16. The two material tray racks 18 are rotatably mounted on the two hangers 17, and the lower parts of the material tray racks 18 are provided with hollow trays; the transverse shaft 16 includes a bevel gear 19, a transverse shaft rod 20, a bevel gear 21 and a connecting piece. The bevel gear 19 is fixedly installed in the drying chamber of the drying box 1. The bevel gear 19 is concentrically arranged on the outside of the vertical shaft 3. The inner end of the transverse shaft rod 20 is rotatably connected to the side wall of the vertical shaft 3. The bevel gear 21 is concentrically mounted on the transverse shaft rod 20. The bevel gear 21 meshes with the bevel gear 19. The outer end of the transverse shaft rod 20 is connected to the middle part of the hanger 17 through a connecting piece. The connecting parts include a ring gear 22, a sleeve 23, a ring gear 24 and a spring 25. The outer end of the transverse axis 20 is provided with a ring gear 22, and the inner end of the sleeve 23 is movably sleeved on the outer wall of the outer end of the transverse axis 20. The inner end of the sleeve 23 is provided with a ring gear 24, and the ring gear 24 is matched and aligned with the ring gear 22. The outer end of the sleeve 23 is connected to the middle part of the hanger 17, and the inner end of the spring 25 is connected to the transverse axis 20. The outer end of the spring 25 is rotatably connected to the inner end of the sleeve 23 through a bearing. The elastic force of the spring 25 causes the ring gear 24 to disengage from the ring gear 22; it also includes four insertion rods 26 and four driving rods 27. The insertion rods 26 are slidably inserted at both ends of the two hangers 17. The two insertion rods 26 are respectively inserted and connected to the two ends of the upper arms of the two material tray racks 18, and the four insertion rods 26 are provided with driving rods 27.

[0037] The two ends of the upper arm of the tray rack 18 are aligned with the two ends of the hanger 17 respectively, and the two insertion rods 26 are pushed outward by the two levers 27, so that the two insertion rods 26 are respectively plugged and connected with the arms of the tray rack 18, so that the tray rack 18 and the hanger 17 can be quickly installed and disassembled;

[0038] The coating components are loaded onto the trays of the two tray racks 18 through a special tool. The vertical shaft 3 drives the two horizontal shafts 16 to rotate, the two horizontal shafts 16 drive the two hanging racks 17 to rotate, and the two hanging racks 17 drive the two tray racks 18 to rotate, so that the two tray racks 18 are gradually swung from a vertical state to a horizontal state under the action of centrifugal force during the acceleration process, so that the residual liquid on the coating components in the special tool is swung out through the hollow trays of the tray racks 18, achieving efficient drying;

[0039] When the vertical shaft 3 rotates, the two horizontal shaft rods 20 are driven to rotate around the vertical shaft 3. Since the two bevel gears 21 are engaged with the bevel gear 1 19, the two horizontal shaft rods 20 are driven to rotate around their axes. When the vertical shaft 3 rotates, the bevel gears 1 19 and 21 drive the horizontal shaft rods 20 to rotate. When the speed of the vertical shaft 3 is low, the centrifugal force on the hanger 17 is less than the elastic force of the spring 2 25, so that the ring gear 2 24 is disconnected from the ring gear 1 22. When the speed of the vertical shaft 3 increases, the centrifugal force on the hanger 17 is greater than the elastic force of the spring 2 25. The sleeve 23 slides outward along the horizontal axis 20, so that the ring gear 24 engages with the ring gear 1 22, so that the horizontal axis 20 drives the sleeve 23 to rotate, and the sleeve 23 drives the hanger 17 and the material tray rack 18 to rotate, so that the two material tray racks 18 only revolve and rotate when the vertical axis 3 rotates at a high speed, and the two material tray racks 18 only revolve when the vertical axis 3 rotates at a low speed, so that the two material tray racks 18 rotate around the vertical axis 3 and the two horizontal axis rods 20 respectively at the same time, making the centrifugal force on the coating element more complex and improving the drying efficiency.

[0040] Example 3, as Figure 1 、 Figure 4 、 Figure 12 and Figure 13 As shown, on the basis of Example 1, the pick-up and placement door assembly includes an upper cover plate 35, two slide rail frames 36, two tracks 37, a box door 38 and a second push cylinder 39. An inspection port is provided on the upper end surface of the drying box 1. The upper cover plate 35 is mounted on the inspection port of the drying box 1. A pick-up and placement port is provided on the upper cover plate 35. Two slide rail frames 36 are mounted on the upper cover plate 35. The two slide rail frames 36 are relatively arranged on both sides of the pick-up and placement port. Both slide rail frames 36 are provided with tracks 37. Multiple track wheels are rotatably installed on both sides of the box door 38. The multiple track wheels are respectively rotatably installed in the two shift rods 27. One end of the push cylinder 39 is rotatably connected to the upper cover 35, and the other end of the push cylinder 39 is rotatably connected to the box door 38. The box door 38 is used to close and open the pick-up and placement opening of the upper cover 35; it also includes two inner slide grooves 40, a pick-up and placement rack 41, a vertical slide 42 and an adsorption head 43. The two inner slide grooves 40 are installed on the lower end surface of the upper cover 35. The two inner slide grooves 40 are respectively located on both sides of the pick-up and placement opening of the upper cover 35. The upper end of the pick-up and placement rack 41 is slidably connected to the two inner slide grooves 40, the vertical slide 42 is vertically slidably connected to the pick-up and placement rack 41, and the adsorption head 43 is installed at the lower part of the vertical slide 42.

[0041] The suction head 43 is a vacuum suction cup or an electromagnet, and the piston rod of the push cylinder 39 contracts to drive the box door 38 to move, and the track wheels of the box door 38 move along the two tracks 37 of the two slide rail frames 36 respectively, so that the box door 38 opens the take-out opening of the upper cover plate 35; the piston rod of the push cylinder 2 39 extends to push the box door 38 to move, so that the box door 38 closes the take-out opening, and the sealing is good. After the box door 38 is moved to open the take-out opening of the upper cover plate 35, the take-out rack 41 is pushed inward along the two inner slide grooves 40, so that the take-out rack 41 is located below the take-out opening of the upper cover plate 35, so that the lower part of the take-out rack 41 drives the vertical slide 42 to approach the special tooling on the material tray rack 18, so that the suction head 43 adsorbs the special tooling, and the vertical slide 42 is lifted upward, so that the vertical slide 42 can lift the special tooling through the take-out opening of the upper cover plate 35 through the suction head 43, which is convenient for taking materials. At the same time, the directional operation is convenient for loading and improves work efficiency.

[0042] like Figures 1 to 13 As shown, a double-disc spin dryer for deep ultraviolet coating processing of the present invention, when working, first open the box door 38 to load the coating components to be dried into the component loading frame 31, and load the special tooling composed of the lower frame 28, the component loading frame 31 and the upper frame 32 into the material trays of the two material tray racks 18 respectively, and close the box door 38. Then the motor 2 starts to drive the vertical shaft 3 to accelerate the rotation through the output shaft, and the vertical shaft 3 drives the double-disc mechanism to start accelerating rotation. At this time, the friction wheel 13 is connected to the multiple clamping blocks 10, and the energy stored in the energy accumulator 12 is released, driving the friction wheel 13 to rotate. The friction wheel 13 drives the flywheel 9 to rotate through the multiple clamping blocks 10. The flywheel 9 drives the drive wheel 1 6 to rotate through the secondary shaft 5. The drive wheel 1 6 is driven by the transmission belt 8 and the drive wheel 2 7 In order to increase the additional torque of the vertical shaft 3 and the motor 2, when the rotation speed of the friction wheel 13 is lower than the output speed of the motor 2, the multiple clamping blocks 10 are disconnected from the friction wheel 13, thereby shortening the acceleration time of the vertical shaft 3. Then, after the vertical shaft 3 reaches the set rotation speed, the coated components are spun at high speed through the double-disc mechanism. After the coated components are dried, the motor 2 is powered off, and the vertical shaft 3 and the flywheel 9 begin to decelerate, so that the multiple clamping blocks 10 are connected to the friction wheel 13 again. At this time, the vertical shaft 3 drives the driving wheel 2 7 to rotate, and the driving wheel 2 7 drives the driving wheel 1 6 and the auxiliary shaft 5 to rotate through the transmission belt 8, so that the auxiliary shaft 5 drives the friction wheel 13 to rotate through the flywheel 9 and the multiple clamping blocks 10, so that the energy accumulator 12 stores energy. The energy storage process shortens the deceleration time of the vertical shaft 3.

[0043] The main functions achieved by the present invention are:

[0044] 1. Through the energy storage and release process of the energy storage mechanism, the acceleration and deceleration time of the coating component is shortened and the working efficiency is improved;

[0045] 2. The double-disc mechanism with self-rotation and tooling is used to make the coating components undergo a more complex drying process and improve the drying efficiency;

[0046] 3. Use special tooling with a closed structure to reduce contamination of coating components.

[0047] The present invention relates to a double-disc spin dryer for deep ultraviolet coating processing. Its installation method, connection method or setting method are all common mechanical methods. As long as it can achieve its beneficial effects, it can be implemented; the present invention relates to a double-disc spin dryer for deep ultraviolet coating processing, comprising a spin box 1, a motor 2, a vertical shaft 3, a secondary shaft 5, a driving wheel 1 6, a driving wheel 2 7, a transmission belt 8, a flywheel 9, a clamping block 10, a spring 11, an energy accumulator 12, a friction wheel 13, a push cylinder 14, a friction block 15, a material tray frame 18, and a bevel gear. One 19, horizontal axis 20, bevel gear two 21, ring gear one 22, sleeve 23, ring gear two 24, spring two 25, lower torsion spring 30, component loading frame 31, upper torsion spring 34, upper flip plate 33, lower flip plate 29, upper cover 35, slide rail frame 36, box door 38, push cylinder two 39, inner slide groove 40, and adsorption head 43 are purchased on the market. Technicians in this industry only need to install and operate them according to the accompanying instruction manual, and there is no need for technical personnel in this field to make creative labor.

[0048] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A double-disc drying machine for deep ultraviolet coating processing, comprising a drying box (1), a motor (2) and a vertical shaft (3), wherein a drying chamber is provided inside the drying box (1), a take-in and put-out door assembly communicating with the drying chamber is provided on the top of the drying box (1), the motor (2) is installed in the drying chamber of the drying box (1), the vertical shaft (3) is installed in the drying chamber of the drying box (1) for vertical rotation, the lower end of the vertical shaft (3) is connected to the output shaft of the motor (2), and the double-disc mechanism is installed on the vertical shaft (3); characterized in that, It also includes a sub-frame (4), a sub-shaft (5), a driving wheel 1 (6), a driving wheel 2 (7), a transmission belt (8) and an energy storage mechanism, wherein the sub-frame (4) is mounted in the drying chamber of the drying box (1), the sub-shaft (5) is rotatably mounted on the upper part of the sub-frame (4), the driving wheel 1 (6) is concentrically mounted on the sub-shaft (5), the driving wheel 2 (7) is concentrically mounted on the vertical shaft (3), the transmission belt (8) is sleeve-connected to the driving wheel 1 (6) and the driving wheel 2 (7), the energy storage mechanism is mounted on the lower part of the sub-frame (4), and the energy storage mechanism is in a disconnectable transmission connection with the sub-shaft (5); The energy storage mechanism includes a flywheel disc (9), a plurality of clamping blocks (10), a plurality of springs (11), an energy storage device (12) and a friction wheel (13), wherein the flywheel disc (9) is concentrically mounted on the lower end of the secondary shaft (5), the plurality of clamping blocks (10) are uniformly slidably mounted on the flywheel disc (9), the plurality of clamping blocks (10) all slide along the radial direction of the flywheel disc (9), the inner ends of the plurality of springs (11) are respectively connected to the plurality of clamping blocks (10), the outer ends of the plurality of springs (11) are connected to the flywheel disc (9), the elastic force of the plurality of springs (11) respectively pushes the plurality of clamping blocks (10) inward, the energy storage device (12) is mounted on the lower part of the secondary frame (4), the friction wheel (13) is concentrically mounted on the output shaft of the energy storage device (12), and the friction wheel (13) is located in the center of the plurality of clamping blocks (10); The double-disc mechanism comprises two transverse shaft members (16), two hanging racks (17) and two material tray racks (18), wherein the inner ends of the two transverse shaft members (16) are respectively connected to the two sides of the vertical shaft (3), the two hanging racks (17) are respectively mounted on the outer ends of the two transverse shaft members (16), and the two material tray racks (18) are respectively rotatably mounted on the two hanging racks (17), and the lower part of the material tray rack (18) is provided with a hollow tray.

2. A double-disc spin dryer for deep ultraviolet coating processing according to claim 1, characterized in that: The invention also includes a push cylinder (14) and a friction block (15), wherein the push cylinder (14) is mounted on the auxiliary frame (4), the friction block (15) is mounted on the piston rod of the push cylinder (14), a brake disc is concentrically arranged at the bottom of the friction wheel (13), and the friction block (15) is located outside the brake disc of the friction wheel (13).

3. The double-disc spin dryer for deep ultraviolet coating processing according to claim 1, characterized in that: The horizontal shaft member (16) includes a bevel gear 1 (19), a horizontal shaft rod (20), a bevel gear 2 (21) and a connecting member. The bevel gear 1 (19) is fixedly installed in the drying chamber of the drying box (1). The bevel gear 1 (19) is concentrically arranged on the outside of the vertical shaft (3). The inner end of the horizontal shaft rod (20) is rotatably connected to the side wall of the vertical shaft (3). The bevel gear 2 (21) is concentrically installed on the horizontal shaft rod (20). The bevel gear 2 (21) is meshed with the bevel gear 1 (19). The outer end of the horizontal shaft rod (20) is connected to the middle of the hanger (17) through the connecting member.

4. A double-disc spin dryer for deep ultraviolet coating processing as claimed in claim 3, characterized in that: The connecting member includes a gear ring 1 (22), a sleeve (23), a gear ring 2 (24) and a spring 2 (25). The outer end of the transverse axis rod (20) is provided with the gear ring 1 (22). The inner end of the sleeve (23) is movably sleeved on the outer wall of the outer end of the transverse axis rod (20). The inner end of the sleeve (23) is provided with the gear ring 2 (24). The gear ring 2 (24) is matched and aligned with the gear ring 1 (22). The outer end of the sleeve (23) is connected to the middle part of the hanger (17). The inner end of the spring 2 (25) is connected to the transverse axis rod (20). The outer end of the spring 2 (25) is rotatably connected to the inner end of the sleeve (23) through a bearing. The elastic force of the spring 2 (25) causes the gear ring 2 (24) to be separated from the gear ring 1 (22).

5. The double-disc spin dryer for deep ultraviolet coating processing according to claim 1, characterized in that: It also includes four insertion rods (26) and four shifting rods (27), both ends of the two hanging racks (17) are slidably inserted with the insertion rods (26), the two insertion rods (26) are respectively plugged and connected to the two ends of the upper suspension arms of the two material tray racks (18), and the shifting rods (27) are all provided on the four insertion rods (26).

6. A double-disc spin dryer for deep ultraviolet coating processing as claimed in claim 1, characterized in that: The invention also includes a lower frame (28), a plurality of lower flip plates (29), a plurality of lower torsion springs (30), a component loading frame (31), an upper frame (32), a plurality of upper flip plates (33) and a plurality of upper torsion springs (34). The lower frame (28) and the upper frame (32) are both square frame-shaped. One end of the plurality of lower flip plates (29) is respectively rotatably mounted inside the lower frame (28) through a rotating shaft. The plurality of lower torsion springs (30) are respectively mounted on the rotating shafts of the plurality of lower flip plates (29). The elastic force of the plurality of lower torsion springs (30) causes the plurality of lower flip plates (29) to be water-sealed. The lower frame (28) is leveled and the interior of the lower frame (28) is partitioned. The component loading frame (31) is mounted on the lower frame (28). The component loading frame (31) is used to load the coating component. The upper frame (32) is mounted on the component loading frame (31). One end of a plurality of upper flip plates (33) is respectively mounted inside the upper frame (32) through a rotating shaft. A plurality of upper torsion springs (34) are respectively mounted on the rotating shafts of the plurality of upper flip plates (33). The elastic force of the plurality of upper torsion springs (34) makes the plurality of upper flip plates (33) level and partitions the interior of the upper frame (32).

7. The double-disc spin dryer for deep ultraviolet coating processing according to claim 1, characterized in that: The pick-up and placement door assembly comprises an upper cover (35), two slide rail frames (36), two tracks (37), a box door (38) and a push cylinder (39). An inspection port is provided on the upper end surface of the drying box (1). The upper cover (35) is mounted on the inspection port of the drying box (1). A pick-up and placement port is provided on the upper cover (35). Two slide rail frames (36) are mounted on the upper cover (35). The two slide rail frames (36) are arranged on both sides of the pick-up and placement port relative to each other. Tracks (37) are provided on both slide rail frames (36). Multiple track wheels are rotatably mounted on both sides of the box door (38). The multiple track wheels are respectively rotatably mounted on two shifting rods (27). One end of the push cylinder (39) is rotatably connected to the upper cover (35), and the other end of the push cylinder (39) is rotatably connected to the box door (38). The box door (38) is used to close and open the pick-up and placement port of the upper cover (35).

8. A double-disc spin dryer for deep ultraviolet coating processing as claimed in claim 7, characterized in that: It also includes two inner slides (40), a pick-up and placement rack (41), a vertical slide (42) and an adsorption head (43), the two inner slides (40) are installed on the lower end surface of the upper cover (35), the two inner slides (40) are respectively located on both sides of the pick-up and placement opening of the upper cover (35), the upper end of the pick-up and placement rack (41) is slidably connected to the two inner slides (40), the vertical slide (42) is vertically slidably connected to the pick-up and placement rack (41), and the adsorption head (43) is installed at the lower part of the vertical slide (42).

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