Method and device for determining contour graph, equipment, medium and product

Abstract

The invention discloses a method, device and equipment for determining a contour graph, a medium and a product, and the method comprises the steps: obtaining an image of a chip, the chip comprising a plurality of core particles, and the image comprising contour graphs of the plurality of core particles; grouping the plurality of contour graphs based on the Hash coding value of the layout graph corresponding to each contour graph to obtain a plurality of contour groups, the Hash coding values of the layout graphs corresponding to the plurality of contour graphs in each contour group being the same; registering the plurality of contour graphs in each contour group to enable the center points and the target points of the plurality of contour graphs to coincide and to be located in the same coordinate system, and obtaining a plurality of registered contour groups; and determining the target contour graph corresponding to each registered contour group based on the coordinate values of the feature points of the contour graphs in each registered contour group, so that the target contour graph of the core particle can be determined based on the image of one chip, and the efficiency and accuracy of determining the target contour graph are improved.

Description

Technical Field

[0001] The present application belongs to the field of data processing technology, and in particular relates to a method, device, equipment, medium and product for determining a contour graphic. Background Art

[0002] Currently, chip images captured have high noise levels, resulting in rough contours of the core particles. Simulation optical proximity correction (OPC) or simulation modeling based on these rough contours results in low accuracy, so smoothing the rough contours is necessary.

[0003] Existing techniques use a scanning electron microscope to capture multiple images of the same location on a chip and average the core particle outlines in these images to produce a smoothed outline. However, the scanning electron microscope may capture distorted images, resulting in a significantly different smoothed outline from the actual core particle outline, leading to inaccurate core particle outlines. Summary of the Invention

[0004] The embodiments of the present application provide a method, apparatus, device, medium, and product for determining an outline graphic, which can improve the accuracy of the determined outline graphic of a core particle in a chip.

[0005] In a first aspect, an embodiment of the present application provides a method for determining a contour graphic, comprising:

[0006] Acquire an image of the chip, the chip including a plurality of core particles, the image including contour graphics of the plurality of core particles;

[0007] Grouping the multiple contour graphics based on the hash code value of the layout graphic corresponding to each contour graphic to obtain multiple contour groups, wherein the hash code value of the layout graphic corresponding to the multiple contour graphics in each contour group is the same;

[0008] Registering multiple contour graphics in each contour group so that the center points and target points of the multiple contour graphics coincide and are located in the same coordinate system, thereby obtaining multiple registered contour groups;

[0009] Based on the coordinate values ​​of the feature points of the contour graphics in each registered contour group, the target contour graphics corresponding to each registered contour group are determined.

[0010] In a second aspect, an embodiment of the present application provides a device for determining a contour graphic, comprising:

[0011] An acquisition module is used to acquire an image of a chip, wherein the chip includes a plurality of core particles, and the image includes contour graphics of the plurality of core particles;

[0012] a grouping module, configured to group the plurality of contour graphics based on a hash code value of a layout graphic corresponding to each contour graphic, to obtain a plurality of contour groups, wherein the hash code values ​​of the layout graphics corresponding to the plurality of contour graphics in each contour group are the same;

[0013] A registration module is used to register multiple contour graphics in each contour group so that the center points and target points of the multiple contour graphics coincide and are located in the same coordinate system, thereby obtaining multiple registered contour groups;

[0014] The determination module is used to determine the target contour graphic corresponding to each registered contour group based on the coordinate values ​​of the feature points of the contour graphic in each registered contour group.

[0015] In a third aspect, an embodiment of the present application provides an electronic device, the device comprising:

[0016] a processor and a memory storing computer program instructions;

[0017] When the processor executes the computer program instructions, it is used to perform the method for determining the contour graphic of the first aspect.

[0018] In a fourth aspect, an embodiment of the present application provides a computer storage medium having computer program instructions stored thereon, which, when executed by a processor, implements the method for determining a contour graphic according to the first aspect.

[0019] In a fifth aspect, an embodiment of the present application provides a computer program product, including a computer program, which, when processed by a processor, implements the method for determining a contour graphic according to the first aspect.

[0020] The methods, devices, equipment, media and products for determining contour graphics provided in the embodiments of the present application obtain a contour image of a chip, where the contour image includes contour graphics of multiple core particles, group the multiple contour graphics based on the hash code value of the layout graphic, determine multiple contour groups, and determine the target contour graphics based on the coordinate values ​​of the multiple contours in each contour group. This can achieve the determination of a smooth target contour graphic of the core particle based on a contour image of the chip, thereby improving the authenticity and accuracy of the target contour graphic. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0022] Figure 1A flowchart of a method for determining a contour graphic provided in some embodiments of the present application.

[0023] Figure 2 A schematic diagram of an image of a chip provided in some embodiments of the present application.

[0024] Figure 3 A schematic diagram of an original image of a chip provided in some embodiments of the present application.

[0025] Figure 4 A schematic diagram of contour grouping after registration is provided for some embodiments of the present application.

[0026] Figure 5 A flowchart of another method for determining a contour graphic provided in some embodiments of the present application.

[0027] Figure 6 A flowchart of another method for determining a contour graphic is provided for some embodiments of the present application.

[0028] Figure 7 A flowchart of another method for determining a contour graphic is provided for some embodiments of the present application.

[0029] Figure 8 A schematic diagram of a device for determining a contour graphic provided in some embodiments of the present application.

[0030] Figure 9 A schematic diagram of the hardware structure of an electronic device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0031] The features and exemplary embodiments of various aspects of the present application will be described in detail below. In order to make the purpose, technical solutions and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application, rather than to limit the present application. For those skilled in the art, the present application can be implemented without the need for some of these specific details. The following description of the embodiments is merely to provide a better understanding of the present application by illustrating the examples of the present application.

[0032] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article, or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, method, article, or device. In the absence of further limitations, an element defined by the phrase "comprising..." does not exclude the presence of additional identical elements in the process, method, article, or device comprising the element.

[0033] Before describing the technical solutions provided by the embodiments of the present application, in order to facilitate understanding of the embodiments of the present application, the present application first specifically describes the problems existing in the related art:

[0034] To test the various functions of a chip, existing techniques often involve simulating the chip to create a simulated chip. This simulated chip is then subjected to a series of different tests to assess the chip's yield. Therefore, to improve test accuracy, the precision of chip simulation is crucial.

[0035] Currently, when simulating a chip, such as performing OPC processing or modeling, it is often necessary to obtain and process a smooth contour image of the chip. The existing method for obtaining a smooth contour image is to use a scanning electron microscope to capture multiple images of the same location on the chip and then average these images to obtain the smooth contour image.

[0036] However, the scanning electron microscope equipment collects images by emitting a charged particle beam to the chip and imaging the charged particle beam reflected by the chip. Collecting multiple images at the same position on the chip is equivalent to emitting and collecting multiple charged particle beams at the same position to form an image. It can be imagined that emitting multiple charged particle beams to the same position on the chip may cause the material properties of the chip to change. For example, it may cause the chip to shrink, resulting in the contour figure in the collected image to change accordingly and causing the contour figure to be distorted. Therefore, the smooth core particle contour figure obtained by averaging multiple images at the same position is quite different from the actual core particle contour and is inaccurate, which affects the accuracy of subsequent simulations.

[0037] Based on this, the embodiments of the present application provide a method, apparatus, device, medium, and product for determining a contour graphic, which can improve the accuracy of the determined contour graphic.

[0038] In some embodiments, as Figure 1 As shown, the embodiment of the present application provides a method for determining a contour graphic, which may include the following steps S110-S140:

[0039] S110: Acquire an image of a chip, where the chip includes a plurality of core particles, and the image includes outlines of the plurality of core particles.

[0040] You can get Figure 2 The image of the chip shown in FIG. 2 may include the outline graphics 201 of multiple core particles. Figure 2 Each contour graphic 201 in the image of the chip shown can be based on Figure 3 The chip image 301 in the initial image shown is obtained after contour extraction.

[0041] In some examples, based on the initial image, determining the image of the chip may include:

[0042] The initial image is subjected to Gaussian filtering to obtain a Gaussian filtered image, the Gaussian filtered image is binarized, and contour extraction is performed based on the binarized image to obtain an image of the chip.

[0043] S120: Grouping the multiple outline graphics based on the hash code value of the layout graphics corresponding to each outline graphic to obtain multiple outline groups, wherein the hash code values ​​of the layout graphics corresponding to the multiple outline graphics in each outline group are the same.

[0044] It can be imagined that each outline graphic corresponds to a layout graphic, and the outline graphics can be grouped based on the hash code value of the layout graphic corresponding to the outline graphic to obtain multiple outline groups. Here, the layout graphic corresponding to each outline graphic can be determined based on the similarity between each outline graphic and the layout graphic.

[0045] In some examples, the similarity between the areas of each outline graphic and the layout graphic may be calculated to determine the layout graphic corresponding to each outline graphic.

[0046] In some examples, determining the hash code value of each layout graphic may include:

[0047] A coordinate system is established with the center point of each layout graphic to obtain the coordinate system corresponding to each layout graphic; based on the coordinate system corresponding to each layout graphic, the coordinate value of the feature point of each layout graphic is determined; based on the coordinate value of the feature point of each layout graphic, the hash code value of each layout graphic is determined.

[0048] Here, the characteristic points of the layout graphics can be vertices of the minimum enclosing rectangle of the layout graphics. A minimum enclosing rectangle can be generated for each layout graphic, a coordinate system can be established based on the center point of each layout graphic, the coordinate values ​​of the four vertices of the minimum enclosing rectangle of each layout graphic are determined, and the coordinate values ​​of the four vertices are hashed to obtain a hash code value for each layout graphic.

[0049] Here, for each vertex, the coordinate value of the vertex can be alternately encoded using binary division to generate a binary sequence, and the binary sequence is mapped to a preset character table, such as a Base32 character table, to obtain a hash code value corresponding to each vertex.

[0050] Here, when grouping multiple contour graphics, the contour graphics corresponding to the layout graphics with the same hash code values ​​of the four vertices can be grouped together to obtain multiple contour groups.

[0051] S130: registering the multiple contour graphics in each contour group so that the center points and target points of the multiple contour graphics coincide and are located in the same coordinate system, thereby obtaining multiple registered contour groups.

[0052] The contour graphics in each of the above contour groups can be aligned so that the center points and target points of multiple contour graphics coincide with each other, and multiple aligned contour groups can be obtained. For example, the following can be obtained: Figure 4 The target point can be the vertex or center point of the minimum circumscribed rectangle of each contour figure.

[0053] S140: Determine the target contour graphic corresponding to each registered contour group based on the coordinate values ​​of the feature points of the contour graphic in each registered contour group.

[0054] A plurality of feature points may be determined in the contour graph of each registered contour group, and based on the coordinate values ​​of the feature points, the target contour graph corresponding to each registered contour group may be determined.

[0055] In some examples, such as Figure 4 As shown, based on the position information input by the user, the contour line corresponding to each aligned contour group can be generated, and the normal line L of the vertical contour line is made for any point A on the contour line. The intersection point with the above normal line L is determined on each aligned contour figure, and the average value is calculated based on the coordinate value of each intersection point to obtain the coordinate value of the average point. By connecting multiple average points, the target contour figure is obtained.

[0056] The present application is implemented by obtaining a contour image of the chip, grouping multiple contour graphics based on the hash code value of the layout graphic, and determining multiple contour groups. It is possible to group contour graphics corresponding to layout graphics of the same shape, thereby improving the accuracy of grouping contour graphics. Subsequently, the target contour graphic is determined based on the coordinate values ​​of multiple contours in each contour group. It is possible to determine a smooth target contour graphic of the core particle based on a contour image of the chip, thereby avoiding the problem of inaccurate contours obtained by smoothing multiple distorted images in the prior art, and improving the authenticity and accuracy of the target contour graphic.

[0057] It is conceivable that before grouping the contour graphics based on the layout graphics corresponding to the contour graphics, the contour graphics in the image can be screened to remove the contour graphics that do not meet the rules to improve the accuracy of the determined target contour graphics. In some embodiments, such as Figure 5 As shown, before grouping multiple contour graphics based on the hash code value of the layout graphic corresponding to each contour graphic to obtain multiple contour groups, the method may further include the following steps:

[0058] S510: Based on the size information of the layout graphic corresponding to each outline graphic, a preset polygon corresponding to each outline graphic is generated, and the center of the preset polygon is aligned with the center of the outline graphic.

[0059] The preset polygon corresponding to each contour graphic can be determined based on the size information of the layout graphic corresponding to each contour graphic. Here, the above-mentioned preset polygon can be a preset rectangle. The above-mentioned preset polygon can be generated at the location of each contour graphic, and the center of each preset polygon can be aligned with the center of the contour graphic.

[0060] In some examples, the length of the preset rectangle may be less than or equal to the length of the layout graphic, and the width of the preset rectangle may be less than or equal to the width of the layout graphic.

[0061] S520: Selecting a contour graphic whose edges are all within the corresponding preset polygon as a first target contour graphic.

[0062] A contour graphic whose edges are all within the corresponding preset polygon may be used as the first target contour graphic.

[0063] The multiple contour graphics are grouped based on the hash code value of the layout graphic corresponding to each contour graphic to obtain multiple contour groups, including:

[0064] S530: Grouping the plurality of first target outline graphics based on the hash code value of the layout graphic corresponding to each first target outline graphic to obtain a plurality of outline groups.

[0065] The above-mentioned first target contour graphics can be grouped, for example, based on the hash code value of the layout graphics corresponding to the first target contour graphics, so that the first target contour graphics corresponding to the layout graphics with the same hash code value are grouped into one group to obtain the above-mentioned multiple contour groups.

[0066] In an embodiment of the present application, before grouping the contour graphics, a preset polygon corresponding to each contour graphic is generated based on the size information of the layout graphics, the contour graphics are screened based on the preset polygon, and a first target contour graphic whose edges are all within the preset polygon is selected. This can screen out contour graphics with irregular shapes or distorted shapes, and group the first target contour graphics obtained by screening to obtain multiple contour groups. This can improve the accuracy of subsequently determining the target contour graphic based on the contour grouping, so that the target contour graphic is close to the true contour of the core particle.

[0067] In some embodiments, before grouping multiple contour graphics based on the hash code value of the layout graphic corresponding to each contour graphic to obtain multiple contour groups, the method may further include:

[0068] A design layout of the chip is obtained, wherein the design layout includes layout graphics of multiple core particles; the difference between the area of ​​each outline graphic and the layout area of ​​the multiple layout graphics is calculated respectively; and the layout graphic corresponding to the layout area having the smallest area difference with each outline graphic is determined as the layout graphic corresponding to the outline graphic.

[0069] When determining the layout graphic corresponding to each contour graphic, the design layout of the chip can be obtained, and the similarity between the area of ​​each contour graphic and each layout graphic can be calculated. For example, the absolute value of the difference between the area of ​​each contour graphic and the area of ​​multiple layout graphics can be calculated respectively, and the layout graphic with the smallest absolute value of the area difference with the contour graphic can be determined as the layout graphic corresponding to the contour graphic.

[0070] The embodiment of the present application calculates the difference between the area of ​​each contour graphic and the area of ​​the layout graphic, determines the layout graphic with the smallest area difference with each contour graphic, and thus determines the layout graphic corresponding to each contour graphic. This can improve the accuracy of determining the layout graphic corresponding to each contour graphic, and is conducive to improving the accuracy of the contour grouping determined based on the hash code value of the layout graphic.

[0071] It can be imagined that when the design layout of the chip is based on any layout graphic and a graphic transformation rule is performed, such as rotation or mirroring, to obtain a target layout graphic, when the layout graphics are grouped, the contour graphics corresponding to the layout graphics obtained by processing the graphic transformation rule based on the same layout graphic can be grouped together, thereby increasing the number of contour graphics in each contour group, thereby reducing the number of contour groups and making the target contour graphics corresponding to each contour group more realistic.

[0072] In some embodiments, as Figure 6 As shown, grouping multiple contour graphics based on the hash code value of the layout graphic corresponding to each contour graphic to obtain multiple contour groups may include the following steps:

[0073] S610: Based on the layout identifier of the layout graphic corresponding to each outline graphic, determine design information of the layout graphic corresponding to each layout identifier in the design layout of the chip.

[0074] Here, in the design layout, each layout graphic corresponds to a layout identifier, and the design information of each layout graphic can be determined based on the layout identifier of each layout graphic. The above-mentioned design information may include the position coordinates and layout identifier of each layout graphic. Here, there may be a graphic transformation rule in the design information of the target layout graphic. The above-mentioned graphic transformation rule can characterize the target layout graphic as a graphic obtained by processing the graphic transformation rule based on the first layout graphic, and the first layout graphic is any layout graphic other than the target layout graphic. For example, the design information of the target layout graphic can be (identification, position, "rotation" based on XX layout graphic).

[0075] S620: Based on the design information of each layout graphic, determine a target layout graphic including a graphic transformation rule in the design information, wherein the hash value of the first layout graphic is the same as the hash code value of the layout graphic after the target layout graphic is processed according to the inverse graphic transformation rule.

[0076] A target layout pattern including pattern transformation rules may be determined based on the design information of each layout pattern.

[0077] S630: Grouping the second target contour graphic corresponding to the target layout graphic subjected to the graphic transformation rule processing based on the same first layout graphic and the contour graphic corresponding to the first layout graphic into one group to obtain a plurality of contour groups.

[0078] The second target contour graphic and the contour graphic corresponding to the first layout graphic can be grouped together. The above-mentioned second target contour graphic is the contour graphic corresponding to the target layout graphic processed by the graphic transformation rule based on the same first layout graphic. For example, the second target contour graphic corresponding to the target layout graphic obtained by mirroring or rotating the same first layout graphic and the contour graphic corresponding to the first layout graphic are grouped together.

[0079] In an embodiment of the present application, when grouping contour graphics, a target layout graphic including a graphic transformation rule is determined based on the design information of each layout graphic, and a second target contour graphic corresponding to the target layout graphic processed according to the graphic transformation rule based on the same first layout graphic and a contour graphic corresponding to the first layout graphic are grouped together to obtain multiple contour groups, thereby reducing the number of contour groups. At the same time, an increase in the number of contour graphics in a group can make the target contour graphic corresponding to each contour group more realistic.

[0080] In some embodiments, registering multiple contour graphics in each contour group to obtain multiple registered contour groups includes:

[0081] The second target contour graphic in the contour group is processed according to the inverse graphic transformation rule to obtain a processed contour graphic; and the multiple contour graphics in the contour group including the processed contour graphic are registered to obtain a registered contour group.

[0082] After grouping the second target contour graphics corresponding to the target layout graphics obtained by mirroring or rotating the same first layout graphics and the contour graphics corresponding to the first layout graphics, the second target contour graphics in the contour group can be processed according to the inverse graphic transformation rule to obtain a processed contour graphic. For example, when the graphic transformation rule is to rotate 90° to the left, the inverse graphic transformation rule is to rotate 90° to the right. Multiple contour graphics in the contour group including the processed contour graphic can then be registered to obtain a registered contour group.

[0083] In an embodiment of the present application, the second target contour graphic in the contour group is processed by inverse graphic transformation rules to obtain a processed contour graphic, and multiple contour graphics in the contour group including the processed contour graphic are aligned to obtain the above-mentioned aligned contour grouping, so that the target contour graphic determined based on the above-mentioned contour grouping is more realistic.

[0084] In some embodiments, as Figure 7 As shown, determining the target contour graphic corresponding to each registered contour group based on the coordinate values ​​of the feature points of the contour graphic in each registered contour group may include:

[0085] For each registered contour group, the following steps are performed:

[0086] S710: In response to position information input by a user, a contour line is generated in the registered contour group, and a plurality of feature points corresponding to a plurality of position points of the contour line are determined in the registered contour group.

[0087] Contour lines may be generated in the registered contour grouping in response to the position information input by the user, e.g. Figure 4 In the generated Figure 4 The contour line shown, the above position information can be determined based on the layout graphic corresponding to any contour graphic in the contour group.

[0088] In some examples, for each contour group, the layout graphic corresponding to any contour graphic can be registered with the registered contour group, and contour lines can be generated on the registered layout graphic. Figure 4 As shown, when generating a contour line on the registered layout graphic, an arc can be generated based on the radius and the position information of the origin included in the position information input by the user, and a plurality of arcs can be connected to obtain a contour line.

[0089] The above-mentioned position information may also include position information of multiple position points, and multiple feature points corresponding to the multiple position points can be determined on the contour line based on the position information of the multiple position points. Here, a vertical line perpendicular to the contour line can be generated at each position point, and the feature point is determined based on the intersection of the vertical line and the contour line.

[0090] S720: Calculate the average value of the coordinate values ​​of the multiple feature points corresponding to each position point, determine multiple average coordinate points, and determine the target contour graphic based on the multiple average coordinate points.

[0091] The average value of the coordinate values ​​of multiple feature points corresponding to each position point can be calculated to determine multiple average coordinate points, and then the multiple average coordinate points can be connected to generate a target contour graphic.

[0092] The embodiment of the present application generates a contour line corresponding to each aligned contour group based on the position information input by the user, and calculates the average value of the coordinate values ​​of multiple feature points corresponding to each position line on the contour line to determine multiple average coordinate points. The target contour graphic is determined based on the multiple average coordinate points, and a smooth target contour graphic corresponding to each core particle can be obtained, thereby improving the efficiency and accuracy of determining the target contour graphic of the core particle.

[0093] Based on the same inventive concept, an embodiment of the present application also provides a device for determining a contour graphic.

[0094] In some embodiments, as Figure 8 As shown, an embodiment of the present application provides a device for determining a contour graphic, comprising:

[0095] An acquisition module 801 is configured to acquire an image of a chip, where the chip includes a plurality of core particles, and the image includes contour graphics of the plurality of core particles;

[0096] A grouping module 802 is configured to group the plurality of contour graphics based on a hash code value of a layout graphic corresponding to each contour graphic to obtain a plurality of contour groups, wherein the hash code values ​​of the layout graphics corresponding to the plurality of contour graphics in each contour group are the same;

[0097] A registration module 803 is configured to register multiple contour graphics in each contour group so that the center points and target points of the multiple contour graphics coincide and are located in the same coordinate system, thereby obtaining multiple registered contour groups;

[0098] The determination module 804 is configured to determine the target contour graphic corresponding to each registered contour group based on the coordinate values ​​of the feature points of the contour graphic in each registered contour group.

[0099] In some embodiments, the grouping module may be specifically configured to:

[0100] Based on the size information of the layout graphic corresponding to each outline graphic, a preset polygon corresponding to each outline graphic is generated, and the center of the preset polygon is aligned with the center of the outline graphic;

[0101] Selecting a contour graphic whose edges are all within the corresponding preset polygon as a first target contour graphic;

[0102] The plurality of first target outline graphics are grouped based on the hash code value of the layout graphic corresponding to each first target outline graphic to obtain a plurality of outline groups.

[0103] In some embodiments, the acquisition module may also be used to:

[0104] Obtaining a design layout of a chip, wherein the design layout includes layout patterns of a plurality of chiplets;

[0105] Calculate the difference between the area of ​​each outline figure and the layout area of ​​the plurality of layout figures respectively;

[0106] The layout pattern corresponding to the layout area having the smallest area difference with each outline pattern is determined as the layout pattern corresponding to the outline pattern.

[0107] In some embodiments, the grouping module may also be used to:

[0108] Based on the layout identifier of the layout graphic corresponding to each outline graphic, determining design information of the layout graphic corresponding to each layout identifier in the design layout of the chip;

[0109] Determining, based on design information of each layout graphic, a target layout graphic including a graphic transformation rule in the design information, wherein the graphic transformation rule indicates that the target layout graphic is a graphic obtained by performing the graphic transformation rule processing on the first layout graphic, the first layout graphic is any layout graphic other than the target layout graphic, and a hash value of the first layout graphic is the same as a hash code value of the layout graphic after performing the inverse graphic transformation rule processing on the target layout graphic;

[0110] The second target contour graphic corresponding to the target layout graphic processed by the graphic transformation rule based on the same first layout graphic and the contour graphic corresponding to the first layout graphic are grouped together to obtain a plurality of contour groups.

[0111] In some embodiments, the registration module may be specifically configured to:

[0112] Performing inverse graphic transformation rule processing on the second target contour graphic in the contour group to obtain a processed contour graphic;

[0113] The plurality of contour graphics in the contour group including the processed contour graphic are registered to obtain a registered contour group.

[0114] In some embodiments, the determination module may be specifically configured to:

[0115] For each registered contour group, the following steps are performed:

[0116] In response to the user inputting the position information, generating a contour line in the registered contour group, and determining a plurality of feature points in the registered contour group corresponding to a plurality of position points of the contour line respectively;

[0117] The average value of the coordinate values ​​of the multiple feature points corresponding to each position point is calculated to determine multiple average coordinate points, and the target contour graphic is determined based on the multiple average coordinate points.

[0118] The device of the above embodiment is used to implement the corresponding method for determining the contour graphic in any of the above embodiments, and has the beneficial effects of the corresponding method embodiment, which will not be described in detail here.

[0119] Figure 9 A schematic diagram of the hardware structure of an electronic device provided in an embodiment of the application.

[0120] The electronic device 900 may include a processor 901 and a memory 902 storing computer program instructions.

[0121] Specifically, the processor 901 may include a central processing unit (CPU), or an application-specific integrated circuit (ASIC), or may be configured to implement one or more integrated circuits of the embodiments of the present application.

[0122] The memory 902 may include a large capacity memory for data or instructions. By way of example and not limitation, the memory 902 may include a hard disk drive (HDD), a floppy disk drive, a flash memory, an optical disk, a magneto-optical disk, a magnetic tape, or a universal serial bus (USB) drive, or a combination of two or more of these. Where appropriate, the memory 902 may include removable or non-removable (or fixed) media. Where appropriate, the memory 902 may be inside or outside the integrated gateway disaster recovery device. In a specific embodiment, the memory 902 is a non-volatile solid-state memory.

[0123] In certain embodiments, memory 902 includes read-only memory (ROM). The ROM may be mask-programmed ROM, programmable ROM (PROM), erasable PROM (EPROM), electrically erasable PROM (EEPROM), electrically alterable ROM (EAROM), or flash memory, or a combination of two or more thereof, where appropriate.

[0124] The memory may include a read-only memory (ROM), a random access memory (RAM), a magnetic disk storage medium device, an optical storage medium device, a flash memory device, an electrical, optical or other physical / tangible memory storage device. Thus, generally, the memory includes one or more tangible (non-transitory) computer-readable storage media (e.g., a memory device) encoded with software including computer-executable instructions, and when the software is executed (e.g., by one or more processors), it is operable to perform the operations described with reference to the method according to the first aspect of the present application.

[0125] The processor 901 reads and executes computer program instructions stored in the memory 902 to implement any one of the methods for determining a contour graphic in the above embodiments.

[0126] In one example, the electronic device may further include a communication interface 903 and a bus 904. Figure 9 The processor 901, the memory 902, and the communication interface 903 are connected via a bus 904 and communicate with each other.

[0127] The communication interface 903 is mainly used to implement communication between various modules, devices, units and / or equipment in the embodiments of the present application.

[0128] Bus 904 includes hardware, software or both, and the parts of online data flow metering equipment are coupled to each other. For example, but not limitation, bus can include accelerated graphics port (AGP) or other graphics bus, enhanced industry standard architecture (EISA) bus, front side bus (FSB), hypertransport (HT) interconnection, industry standard architecture (ISA) bus, infinite bandwidth interconnection, low pin count (LPC) bus, memory bus, micro channel architecture (MCA) bus, peripheral component interconnection (PCI) bus, PCI-Express (PCI-X) bus, serial advanced technology attachment (SATA) bus, video electronics standard association local (VLB) bus or other suitable bus or two or more of these combinations. In appropriate cases, bus 904 can include one or more buses. Although the present application embodiment describes and shows specific bus, the application considers any suitable bus or interconnection.

[0129] The electronic device of the above embodiment is used to implement the corresponding method for determining the contour graphic in any of the above embodiments, and has the beneficial effects of the corresponding method embodiment, which will not be described in detail here.

[0130] In addition, in conjunction with the method for determining a contour graphic in the above embodiments, embodiments of the present application may provide a computer storage medium for implementation. The computer storage medium stores computer program instructions; when the computer program instructions are executed by a processor, any of the methods for determining a contour graphic in the above embodiments is implemented.

[0131] In addition, in combination with the method for determining a contour graphic in the above embodiments, the present application can provide a computer program product for implementation. When the computer program product instructions are executed by a processor of an electronic device, any one of the methods for determining a contour graphic in the above embodiments is implemented.

[0132] Those skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of the present application (including the claims) is limited to these examples. Within the scope of the present application, the technical features in the above embodiments or different embodiments may be combined, the steps may be implemented in any order, and there are many other variations of the different aspects of the embodiments of the present application as described above, which are not provided in detail for the sake of simplicity.

[0133] The functional blocks shown in the above-described block diagram can be implemented as hardware, software, firmware or a combination thereof. When implemented in hardware, they can be, for example, electronic circuits, application specific integrated circuits (ASICs), appropriate firmware, plug-ins, function cards, etc. When implemented in software, the elements of the present application are programs or code segments that are used to perform the required tasks. The program or code segment can be stored in a machine-readable medium, or transmitted on a transmission medium or a communication link by a data signal carried in a carrier wave. "Machine-readable medium" can include any medium that can store or transmit information. Examples of machine-readable media include electronic circuits, semiconductor memory devices, ROMs, flash memories, erasable ROMs (EROMs), floppy disks, CD-ROMs, optical disks, hard disks, optical fiber media, radio frequency (RF) links, etc. The code segment can be downloaded via a computer network such as the Internet, an intranet, etc.

[0134] It should also be noted that the exemplary embodiments mentioned in this application describe some methods or devices based on a series of steps or devices. However, this application is not limited to the order of the above steps. In other words, the steps can be performed in the order mentioned in the embodiments, or in a different order, or several steps can be performed simultaneously.

[0135] The present invention has been described above with reference to the flowchart and / or block diagram of the method, device (device) and computer program product according to the embodiments of the present application.It should be understood that each box in the flowchart and / or block diagram and the combination of each box in the flowchart and / or block diagram can be realized by computer program instructions.These computer program instructions can be provided to the processor of a general-purpose computer, a special-purpose computer or other programmable data processing device to produce a machine so that these instructions executed via the processor of the computer or other programmable data processing device enable the realization of the function / action specified in one or more boxes of the flowchart and / or block diagram.Such a processor can be, but is not limited to, a general-purpose processor, a special-purpose processor, a special application processor or a field programmable logic circuit.It is also understood that each box in the block diagram and / or the flowchart and the combination of the boxes in the block diagram and / or the flowchart can also be realized by the dedicated hardware that performs the specified function or action, or can be realized by the combination of dedicated hardware and computer instructions.

[0136] The above description is only a specific embodiment of the present application. Those skilled in the art will clearly understand that for the convenience and brevity of description, the specific working processes of the devices, modules and units described above can refer to the corresponding processes in the aforementioned method embodiments, and will not be repeated here. It should be understood that the scope of protection of the present application is not limited thereto. Any person skilled in the art can easily think of various equivalent modifications or replacements within the technical scope disclosed in the present application, and these modifications or replacements should be included in the scope of protection of the present application.

Claims

1. A method for determining a contour graph, characterized in that: include: Acquiring an image of a chip, wherein the chip includes a plurality of core particles, and the image includes contour patterns of the plurality of core particles; Grouping the plurality of contour graphics based on a hash code value of a layout graphic corresponding to each contour graphic to obtain a plurality of contour groups, wherein the hash code value of the layout graphics corresponding to the plurality of contour graphics in each contour group is the same; Registering multiple contour graphics in each contour group so that center points and target points of the multiple contour graphics coincide and are located in the same coordinate system, thereby obtaining multiple registered contour groups; Based on the coordinate values ​​of the feature points of the contour graphics in each registered contour group, the target contour graphics corresponding to each registered contour group are determined.

2. The method for determining a contour graphic according to claim 1, wherein: Before grouping the plurality of contour graphics based on the hash code value of the layout graphic corresponding to each contour graphic to obtain a plurality of contour groups, the method further includes: Based on the size information of the layout graphic corresponding to each outline graphic, a preset polygon corresponding to each outline graphic is generated, wherein the center of the preset polygon is aligned with the center of the outline graphic; Selecting a contour graphic whose edges are all within the corresponding preset polygon as a first target contour graphic; The grouping of the plurality of contour graphics based on the hash code value of the layout graphic corresponding to each contour graphic to obtain a plurality of contour groups includes: The plurality of first target outline graphics are grouped based on the hash code value of the layout graphic corresponding to each first target outline graphic to obtain the plurality of outline groups.

3. The method for determining a contour graphic according to claim 1, wherein: Before grouping the plurality of contour graphics based on the hash code value of the layout graphic corresponding to each contour graphic to obtain a plurality of contour groups, the method further includes: Obtaining a design layout of the chip, wherein the design layout includes layout patterns of multiple core particles; respectively calculating the difference between the area of ​​each outline graphic and the layout areas of the plurality of layout graphics; The layout pattern corresponding to the layout area with the smallest area difference with each outline pattern is determined as the layout pattern corresponding to the outline pattern.

4. The method for determining a contour graphic according to claim 1, wherein: The grouping of the plurality of contour graphics based on the hash code value of the layout graphic corresponding to each contour graphic to obtain a plurality of contour groups includes: Based on the layout identifier of the layout graphic corresponding to each outline graphic, determining design information of the layout graphic corresponding to each layout identifier in the design layout of the chip; Determining, based on design information of each layout graphic, a target layout graphic including a graphic transformation rule in the design information, wherein the graphic transformation rule indicates that the target layout graphic is a graphic obtained by performing the graphic transformation rule processing on a first layout graphic, the first layout graphic being any layout graphic other than the target layout graphic, and a hash value of the first layout graphic being the same as a hash code value of a layout graphic obtained by performing an inverse graphic transformation rule processing on the target layout graphic; The second target contour graphic corresponding to the target layout graphic subjected to the graphic transformation rule processing based on the same first layout graphic and the contour graphic corresponding to the first layout graphic are grouped together to obtain the plurality of contour groups.

5. The method for determining a contour graphic according to claim 4, wherein: The registering of the multiple contour graphics in each contour group to obtain multiple registered contour groups includes: performing the inverse graphic transformation rule processing on the second target contour graphic in the contour group to obtain a processed contour graphic; A plurality of contour graphics in the contour group including the processed contour graphic are registered to obtain a registered contour group.

6. The method for determining a contour graphic according to claim 1, wherein: The determining, based on the coordinate values ​​of the feature points of the contour graphics in each registered contour group, the target contour graphics corresponding to each registered contour group comprises: For each registered contour group, the following steps are performed: In response to position information input by a user, a contour line is generated in the registered contour group, and a plurality of feature points corresponding to a plurality of position points of the contour line are determined in the registered contour group; An average value of the coordinate values ​​of a plurality of feature points corresponding to each position point is obtained to determine a plurality of average coordinate points, and the target contour graphic is determined based on the plurality of average coordinate points.

7. A device for determining a contour pattern, characterized in that: include: an acquisition module, configured to acquire an image of a chip, wherein the chip includes a plurality of core particles, and the image includes contour patterns of the plurality of core particles; a grouping module, configured to group the plurality of contour graphics based on a hash code value of a layout graphic corresponding to each contour graphic, to obtain a plurality of contour groups, wherein the hash code value of the layout graphic corresponding to the plurality of contour graphics in each contour group is the same; a registration module for registering multiple contour graphics in each contour group so that the center points and target points of the multiple contour graphics coincide and are located in the same coordinate system, thereby obtaining multiple registered contour groups; The determination module is configured to determine the target contour graphic corresponding to each registered contour group based on the coordinate values ​​of the feature points of the contour graphic in each registered contour group.

8. An electronic device, characterized in that: The device includes: a processor, and a memory storing computer program instructions; The processor reads and executes the computer program instructions to implement the method for determining a contour graphic according to any one of claims 1 to 6.

9. A readable storage medium, characterized in that The readable storage medium stores computer program instructions, and when the computer program instructions are executed by a processor, the method for determining a contour graphic according to any one of claims 1 to 6 is implemented.

10. A computer program product comprising a computer program, characterized in that When the computer program is processed by a processor, the method for determining a contour graphic according to any one of claims 1 to 6 is implemented.

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