Method and device for remotely controlling machine, electronic equipment and storage medium

Abstract

The invention discloses a method and device for remotely controlling a machine table, electronic equipment and a storage medium, and relates to the technical field of semiconductors. The method comprises the steps of obtaining a to-be-processed formula data template, and processing the to-be-processed formula data template according to a formula parameter type and / or adjustment operation of formula personnel on formula steps to obtain a target formula data template; storing the target formula data template to a specified path according to a preset network address; reading the target formula data template from the specified path through a preset template management gadget, and analyzing and checking the target formula data template; under the condition that the analysis verification is passed, according to the analyzed target formula data template, generating a process formula file meeting the requirements of the machine; and sending the process formula file to an industrial personal computer corresponding to the machine, so that the machine reads and executes the process formula file from the industrial personal computer. According to the invention, the remote control of the machine can be realized, and the control efficiency of the machine is improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing technology, and in particular to a method, device, electronic equipment and storage medium for remotely controlling a machine. Background Art

[0002] In the semiconductor manufacturing sector, the continuous advancement of integrated circuit technology toward miniaturization and higher performance places unprecedented demands on production environment cleanliness, process stability, and equipment management efficiency. Currently, semiconductor manufacturing equipment must strictly adhere to quality standards established by organizations such as the Semiconductor Equipment and Materials International (SEMI). All production activities must be conducted in cleanroom environments meeting specific cleanliness levels to ensure product yield and reliability, meeting the market's stringent demand for high-end chips.

[0003] However, this high-standard production environment also presents significant operational challenges. First, personnel entering and exiting the cleanroom must follow strict dust prevention procedures, including changing into specialized dust-proof clothing, wearing masks, and using air showers to remove adhering dust. While these procedures effectively maintain the production environment, frequent entry and exit for minor issues like equipment commissioning and troubleshooting significantly reduces work efficiency and increases time and labor costs.

[0004] Secondly, to cope with the complexity and high-precision requirements of semiconductor manufacturing, companies generally adopt computer-integrated manufacturing (CIM) systems such as equipment automation programs (EAPs), recipe management systems (RMSs), and fault detection and classification (FDCs) to achieve automation, informationization, and intelligent production processes. However, the deployment and maintenance of these advanced systems require huge capital investments, including hardware purchases, software licensing, system integration, and professional personnel training. For small and medium-sized enterprises with relatively tight funds, this poses a heavy financial burden, limiting their ability to upgrade their technology and enhance their market competitiveness.

[0005] In view of this, the industry urgently needs a new method to achieve remote control of semiconductor manufacturing equipment. Summary of the Invention

[0006] The present invention provides a method, device, electronic equipment and storage medium for remotely controlling a machine.

[0007] According to one aspect of the present invention, a method for remotely controlling a machine is provided, comprising:

[0008] Obtain a recipe data template to be processed, and process the recipe data template to be processed according to the recipe parameter type and / or the recipe step adjustment operation performed by the recipe personnel to obtain a target recipe data template;

[0009] According to the preset network address, save the target recipe data template to the specified path;

[0010] Through the preset template management gadget, read the target recipe data template from the specified path, and parse and verify the target recipe data template;

[0011] If the parsing verification passes, a process recipe file that meets the machine requirements is generated based on the parsed target recipe data template;

[0012] The process recipe file is sent to the industrial computer corresponding to the machine, so that the machine reads and executes the process recipe file from the industrial computer.

[0013] According to another aspect of the present invention, there is provided a device for remotely controlling a machine, comprising:

[0014] The template processing module is used to obtain the recipe data template to be processed, and process the recipe data template to be processed according to the recipe parameter type and / or the adjustment operation of the recipe personnel on the recipe steps to obtain the target recipe data template;

[0015] A saving module is used to save the target recipe data template to a specified path according to a preset network address;

[0016] A parsing and verification module is used to read the target recipe data template from a specified path through a preset template management gadget, and parse and verify the target recipe data template;

[0017] The file generation module is used to generate a process recipe file that meets the machine requirements based on the parsed target recipe data template when the parsing verification passes;

[0018] The file sending module is used to send the process recipe file to the industrial computer corresponding to the machine, so that the machine reads and executes the process recipe file from the industrial computer.

[0019] According to another aspect of the present invention, an electronic device is provided, comprising:

[0020] at least one processor; and

[0021] a memory communicatively connected to the at least one processor; wherein,

[0022] The memory stores a computer program executable by the at least one processor. The computer program is executed by the at least one processor so that the at least one processor can execute the method for remotely controlling a machine according to an embodiment of the present invention.

[0023] According to another aspect of the present invention, a computer-readable storage medium is provided, wherein the computer-readable storage medium stores computer instructions, and the computer instructions are used to enable a processor to implement the method for remotely controlling a machine according to an embodiment of the present invention when executed.

[0024] The technical solution of the embodiment of the present invention can realize remote control of the machine and improve the control efficiency of the machine.

[0025] It should be understood that the content described in this section is not intended to identify the key or important features of the embodiments of the present invention, nor is it intended to limit the scope of the present invention. Other features of the present invention will become readily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0027] Figure 1 1 is a flow chart of a method for remotely controlling a machine according to an embodiment of the present invention;

[0028] Figure 2 1 is a flow chart of a method for remotely controlling a machine according to an embodiment of the present invention;

[0029] Figure 3 1 is a schematic structural diagram of a device for remotely controlling a machine according to an embodiment of the present invention;

[0030] Figure 4 It is a structural diagram of an electronic device for implementing the method for remotely controlling a machine according to an embodiment of the present invention. DETAILED DESCRIPTION

[0031] In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0032] Example 1

[0033] Figure 1A flowchart of a method for remotely controlling a machine provided in an embodiment of the present invention is provided. This embodiment is applicable to scenarios of remotely controlling semiconductor manufacturing equipment. The method can be executed by a device for remotely controlling the machine. The device for remotely controlling the machine can be implemented in the form of hardware and / or software. The device for remotely controlling the machine can be configured in an electronic device, such as a computer device or a mobile terminal.

[0034] like Figure 1 As shown, the method for remotely controlling a machine includes:

[0035] S101 , obtaining a recipe data template to be processed, and processing the recipe data template to be processed according to the recipe parameter type and / or the adjustment operation of the recipe steps by the recipe personnel to obtain a target recipe data template.

[0036] In the embodiment of the present invention, the recipe data template to be processed may optionally be a file in a specified format that includes complete recipe parameters. Alternatively, the recipe data template to be processed may be a file in a spreadsheet format, such as an Excel file. It is understood that a recipe data template to be processed created in a spreadsheet format is simple to operate and less prone to errors, and does not require the purchase of additional office tools.

[0037] In the embodiment of the present invention, the recipe parameter types include fixed value parameters, default value parameters and key parameters. Based on this, the recipe data template to be processed is processed according to the recipe parameter type, including at least one of steps AC:

[0038] Step A: Determine the formula parameters that are fixed value parameters in the recipe data template to be processed, and eliminate the formula parameters that are fixed value parameters. Optionally, identify the formula parameters that are fixed value parameters based on preset rules and template design; for example, determine the formula parameters that are fixed value parameters by reading the column name, specific numerical value or data format of the template table. It is understandable that fixed value parameters may not be very meaningful for variable production practices. Eliminating them can streamline the template content, reduce data redundancy, improve data processing efficiency, and avoid consuming resources or causing interference in subsequent processes due to processing such insignificant parameters, thereby playing a positive role in ensuring the accuracy of process results.

[0039] Step B, determine the recipe parameters that belong to the default value parameters in the recipe data template to be processed, and modify the values ​​of the recipe parameters that belong to the default value parameters according to the production requirements. Optionally, according to the preset rules and template design, identify the recipe parameters that belong to the default value parameters; for example, by reading the column name, specific numerical value or data format of the template table, determine the recipe parameters that belong to the default value parameters. It is understandable that for recipe parameters with default values, the default situation is not directly adopted, but filled in according to the specific needs of actual production. This reflects the consideration of production flexibility and accuracy. Different production scenarios, target products, etc. may have different requirements for default value parameters. By filling in according to actual needs, the recipe can be more in line with actual production, which helps to improve the accuracy of process results.

[0040] Step C, determine the recipe parameters that are key parameters in the recipe data template to be processed, and verify the recipe parameters that are key parameters. Optionally, identify the recipe parameters that are key parameters according to preset rules and template design; for example, determine the recipe parameters that are key parameters by reading the column name, specific numerical value or data format of the template table. It is understandable that the key parameters closely related to the recipe are verified one by one to ensure that no key parameters are missed. Key parameters have a significant impact on process results. The absence or error of any key parameter may lead to deviation or even failure of process results. Through strict verification, the accuracy of process results is guaranteed from the perspective of parameter integrity. It should be noted that the execution order of the above steps A, B, and C can be adjusted arbitrarily, without priority.

[0041] After processing the recipe data template to be processed according to at least one of the above steps A, B, and C, a target recipe data template is obtained.

[0042] In an embodiment of the present invention, the adjustment operation of the recipe steps by the recipe personnel includes the operation of adding a new process step and the operation of deleting a process step. On this basis, according to the adjustment operation of the recipe personnel on the recipe steps, the recipe data template to be processed is processed, including: in response to the recipe personnel adding a new process step, the recipe parameters corresponding to the new process step are added to the recipe data template to be processed; exemplarily, when the recipe data template to be processed is a file in Excel format, the recipe parameters corresponding to the new step can be automatically expanded through Excel dynamic named areas; in response to the recipe personnel deleting a process step, the recipe parameters corresponding to the deleted process step are marked as discarded in the recipe data template to be processed, for example, a deletion character suffix is ​​added after the recipe parameters corresponding to the deleted process step, or the row where the recipe parameters corresponding to the deleted process step are located is marked as gray through Excel conditional formatting.

[0043] It should be noted that the above process of obtaining the target recipe parameter template can be implemented based on computer equipment in the office area, which provides a basis for remote control of the machine. The machine involved in the present invention refers to semiconductor manufacturing equipment.

[0044] S102: Save the target recipe data template to a specified path according to a preset network address.

[0045] In an embodiment of the present invention, after obtaining the target recipe data template, the target recipe data template can be saved to a specified path according to a pre-set network address (such as a virtual IP address), and at the same time, the template management gadget in the preset file transfer station is triggered, so that the template management gadget completes remote control of the machine according to steps S103-S105.

[0046] S103 , using a preset template management tool, reading the target recipe data template from the specified path, and parsing and verifying the target recipe data template.

[0047] In an embodiment of the present invention, the template management gadget can store specified path information through a configuration file. After the template management gadget is triggered, it can first verify whether the template management gadget has read permission. If it does, it reads the target recipe data template according to the specified path information stored in the configuration file. If it does not, an exception prompt is issued. After reading the target recipe data template, the template management gadget can parse and verify the target recipe data template. Specifically, it includes the following steps 1-2:

[0048] Step 1: Parse the target recipe data template using a syntax parsing algorithm to obtain a template parsing result; wherein the template parsing result includes at least the parameter name and value of the recipe parameter. Optionally, the syntax parsing algorithm includes lexical analysis and grammatical analysis. During lexical analysis, the text of the input target recipe data template is scanned according to the character stream to identify individual words or symbols, such as parameter names, values, operators, etc. During grammatical analysis, a syntax tree is constructed based on the word sequence obtained from the lexical analysis according to predefined grammatical rules. For example, for a recipe data template with a specific format, grammatical rules such as the parameter definition method, the relationship between parameters, and the structure of the entire template are specified. Syntax analysis algorithms such as recursive descent analysis and operator precedence analysis can be used to check whether the input template complies with the grammatical rules. If the template does not comply with the grammatical rules, an error will be reported, indicating the location of the error and the possible cause.

[0049] Step 2: Perform field type verification, data integrity verification, and value rationality verification on the template parsing results. Field type verification checks whether the data type of each parameter field meets expectations. For example, numeric parameters should be numeric, and string parameters should be text. Data type determination functions (such as the isinstance() function in Python) can be used for verification. When performing data integrity verification, the target recipe data template is compared with a predefined standard template to check whether all required parameters and information are included. The standard template defines a complete parameter list, parameter order, parameter default values, and other information. By comparing each recipe parameter individually, it ensures that no key parameters are missing in the target template and that the definition and format of the recipe parameters are consistent with the standard template. If certain recipe parameters are missing in the target template or the definition of recipe parameters differs from the standard template, the user will be prompted to supplement or correct them. Value rationality verification checks the value range of numeric recipe parameters to ensure that they are within a reasonable range. In practice, the actual value of the recipe parameter can be compared with the preset upper and lower limits. If the parameter value is less than the lower limit or greater than the upper limit, it is determined that the parameter value is out of the reasonable range, an error message is recorded, and the user is prompted to make corrections.

[0050] In an embodiment of the present invention, after the template parsing result is verified, the verification result can also be fed back. Specifically, if errors or non-compliance with requirements are found during the verification process, a detailed error report is generated, wherein the error report includes information such as the error type, error location (such as a specific cell or parameter item), and error description. Based on the verification result, it is determined whether to allow the target recipe data template to continue to be used. If the verification passes, the parsed data can be used for subsequent operations; if the verification fails, a verification failure prompt is displayed.

[0051] S104: If the parsing verification passes, a process recipe file that meets the machine requirements is generated according to the parsed target recipe data template.

[0052] In an optional implementation, when the parsing verification is passed, the recipe parameters in the target recipe data template are reorganized and encoded to generate a process recipe file that can be recognized and executed by the machine, and the process recipe file is named according to a preset naming rule, thereby obtaining a process recipe file (i.e., Recipe file) that meets the machine requirements. The preset naming rule can be: naming in the following format: "basic prefix" + "dynamic content" + "specific marking character". The basic prefix is ​​exemplarily 12#, the dynamic content can be the process type or machine number, etc., and the specific marking character is exemplarily Remote.

[0053] S105 , sending the process recipe file to the industrial computer corresponding to the machine, so that the machine reads and executes the process recipe file from the industrial computer.

[0054] In an embodiment of the present invention, the process recipe file can be sent to the industrial computer corresponding to the machine through an encryption algorithm to prevent the process recipe file from being maliciously intercepted and tampered with during the transmission process; after the process recipe file is sent to the industrial computer, it can be backed up and the original process recipe file in the industrial computer can be overwritten; further, the machine can determine whether there is a new process recipe file on the industrial computer through polling. If so, the latest process recipe file is read from the industrial computer and executed.

[0055] The embodiments of the present invention achieve remote control of a machine without the aid of computer integrated manufacturing (CIM) systems such as an automated process (EAP), a recipe management system (RMS), and a fault detection and classification (FDC), thereby improving the efficiency of machine control.

[0056] Example 2

[0057] Figure 2 The present invention provides a flowchart of a method for remotely controlling a machine. Figure 2 , the method comprises the following steps:

[0058] S201: Obtain a recipe data template to be processed, and process the recipe data template to be processed according to the recipe parameter type and / or the adjustment operation of the recipe personnel on the recipe steps.

[0059] The specific processing process can be found in the description of the above embodiment and will not be repeated here. In the embodiment of the present invention, in addition to processing the recipe data template to be processed according to step S201, the recipe parameters in the recipe data template to be processed can also be processed according to step S202 and / or step S203. It should be noted that when it is necessary to process according to step S202 and step S203 at the same time, the execution order of step S202 and step S203 is not specific.

[0060] S202: Differentiate and label parameters with similar names in the recipe data template to be processed.

[0061] For example, the parameter RF (radio frequency) includes two sub-parameters, HF (high frequency) and LF (low frequency), and the sub-parameter names can be distinguished by different background colors; the gas analysis system GAS has multiple groups of settings, each with a different number of gas paths and ranges, which can be identified by the background color of the repeater (gas signal repeater) for easy identification.

[0062] S203: Determine the recipe parameters with card control values ​​in the recipe data template to be processed, and add corresponding card control values ​​to the recipe parameters with card control values ​​in the recipe data template to be processed.

[0063] In an embodiment of the present invention, the control value generally has two options: "warning" and "alarm." These two options represent different alert levels for the coefficient status. "Warning" generally indicates that the coefficient is in a state that requires attention, possibly approaching but not exceeding the normal range, prompting the operator to pay attention so that potential problems can be discovered and appropriate measures can be taken in a timely manner; "alarm" indicates that the coefficient has exceeded the normal range and may have a serious impact on the process results. The operator needs to take immediate action to adjust or address it to avoid adverse consequences. These two clear options allow the operator to quickly understand the status of the coefficient and make accurate judgments and decisions.

[0064] Although control values ​​are relevant to all items, they are not listed in the template; only the coefficients with control values ​​are displayed. This is because listing the control values ​​for all coefficients of every recipe would make the template overly complex and bulky, increasing the difficulty and workload of data analysis. Displaying only the control values ​​highlights key issues, allowing operators to quickly focus on the issues that need to be addressed. This also reduces unnecessary data interference, improves the efficiency of data processing and analysis, facilitates faster decision-making, and ensures smooth process execution. This approach embodies the principles of practicality and efficiency in data management, rationally screening and displaying data based on actual needs to better support production and process control.

[0065] It should be noted that the target recipe data template obtained by the present invention is consistent with the machine web page data format, and the parameter names and row names are consistent, so as to ensure smooth operation without any sense of violation.

[0066] After the to-be-processed recipe data template is processed accordingly through steps S201 - S203 , the target recipe data template can be obtained.

[0067] S204: Save the designated path sent by the target recipe data template according to a preset network address.

[0068] S205 . Using a preset template management tool, read the target recipe data template from the specified path, and parse and verify the target recipe data template.

[0069] S206 : Render and display the acquired target recipe data template on the display interface of the template management widget.

[0070] Optionally, the parameter names and corresponding parameter values ​​parsed from the target recipe template are displayed in the display interface of the gadget to verify the correctness of the data.

[0071] S207 : When the parsing verification passes, a process recipe file that meets the machine requirements is generated according to the parsed target recipe data template.

[0072] S208 , sending the process recipe file to the industrial computer corresponding to the machine, so that the machine reads and executes the process recipe file from the industrial computer.

[0073] The solution of the present invention simplifies the recipe data template by distinguishing and marking and configuring the card control values ​​of some parameters, and facilitates the verification of the correctness of the data by visually displaying the recipe data template.

[0074] Example 3

[0075] Figure 3 Schematic diagram of a device for remotely controlling a machine provided by an embodiment of the present invention. Figure 3 As shown, the device includes:

[0076] The template processing module 301 is used to obtain a recipe data template to be processed, and process the recipe data template to be processed according to the recipe parameter type and / or the adjustment operation of the recipe step by the recipe personnel to obtain a target recipe data template;

[0077] The saving module 302 is used to save the target recipe data template to a specified path according to a preset network address;

[0078] The parsing and verification module 303 is used to read the target recipe data template from the specified path through a preset template management gadget, and parse and verify the target recipe data template;

[0079] The file generation module 304 is used to generate a process recipe file that meets the machine requirements based on the parsed target recipe data template when the parsing verification passes;

[0080] The file sending module 305 is used to send the process recipe file to the industrial computer corresponding to the machine, so that the machine reads and executes the process recipe file from the industrial computer.

[0081] In some embodiments, the recipe parameter types include fixed value parameters, default value parameters, and key parameters;

[0082] In terms of processing the recipe data template to be processed according to the recipe parameter type, the template processing module 301 is specifically configured to perform at least one of the following steps:

[0083] Determine the recipe parameters that are fixed value parameters in the recipe data template to be processed, and remove the recipe parameters that are fixed value parameters;

[0084] Determine the recipe parameters that belong to the default value parameter type in the recipe data template to be processed, and modify the values ​​of the recipe parameters that belong to the default value parameter type according to production requirements;

[0085] In the recipe data template to be processed, the recipe parameters of the key parameter type are determined, and the recipe parameters of the key parameter type are verified.

[0086] In terms of processing the recipe data template to be processed according to the recipe personnel's adjustment operation on the recipe steps, the template processing module 301 is specifically used to:

[0087] In response to the new process step added by the recipe personnel, the recipe parameters corresponding to the new process step are added to the recipe data template to be processed;

[0088] In response to the recipe personnel deleting a process step, the recipe parameters corresponding to the deleted process step are marked as discarded in the recipe data template to be processed.

[0089] In some embodiments, a marking module is further included for:

[0090] Differentiate and label parameters with similar names in the recipe data template to be processed; and / or,

[0091] Determine the recipe parameters with card control values ​​in the recipe data template to be processed, and add corresponding card control values ​​to the recipe parameters with card control values ​​in the recipe data template to be processed.

[0092] In some embodiments, in parsing and verifying the target recipe data template, the parsing and verification module 303 is specifically used to:

[0093] Parsing the target recipe data template using a syntax parsing algorithm to obtain a template parsing result; wherein the template parsing result includes at least parameter names and values ​​of the recipe parameters;

[0094] The template parsing results are checked for field type, data integrity, and numerical rationality.

[0095] In some embodiments, the file generation module 304 is specifically configured to:

[0096] If the parsing verification passes, the recipe parameters in the target recipe data template are reorganized and encoded to generate a process recipe file that can be recognized and executed by the machine, and the process recipe file is named according to the preset naming rules.

[0097] In some embodiments, a display module is further included for:

[0098] On the display interface of the template management gadget, the obtained target recipe data template is rendered and displayed.

[0099] The apparatus for remotely controlling a machine provided in the embodiment of the present invention can execute the method for remotely controlling a machine provided in any embodiment of the present invention, and has the corresponding functional modules and beneficial effects of the execution method.

[0100] Example 4

[0101] Figure 4 A schematic diagram of the structure of an electronic device 10 that can be used to implement an embodiment of the present invention is shown. The electronic device is intended to represent various forms of digital computers, such as laptop computers, desktop computers, workstations, personal digital assistants, servers, blade servers, mainframe computers, and other suitable computers. The electronic device can also represent various forms of mobile devices, such as personal digital processing, cellular phones, smart phones, wearable devices (such as helmets, glasses, watches, etc.) and other similar computing devices. The components shown herein, their connections and relationships, and their functions are merely examples and are not intended to limit the implementation of the present invention described and / or claimed herein.

[0102] like Figure 4 As shown, the electronic device 10 includes at least one processor 11 and a memory, such as a read-only memory (ROM) 12, a random access memory (RAM) 13, etc., which is communicatively connected to the at least one processor 11. The memory stores a computer program that can be executed by the at least one processor. The processor 11 can perform various appropriate actions and processes according to the computer program stored in the read-only memory (ROM) 12 or the computer program loaded from the storage unit 18 into the random access memory (RAM) 13. Various programs and data required for the operation of the electronic device 10 can also be stored in the RAM 13. The processor 11, ROM 12, and RAM 13 are connected to each other via a bus 14. An input / output (I / O) interface 15 is also connected to the bus 14.

[0103] Multiple components in the electronic device 10 are connected to the I / O interface 15, including an input unit 16, such as a keyboard, a mouse, etc.; an output unit 17, such as various types of displays, speakers, etc.; a storage unit 18, such as a magnetic disk, an optical disk, etc.; and a communication unit 19, such as a network card, a modem, a wireless communication transceiver, etc. The communication unit 19 allows the electronic device 10 to exchange information / data with other devices via a computer network such as the Internet and / or various telecommunication networks.

[0104] The processor 11 can be any general-purpose and / or specialized processing component with processing and computing capabilities. Some examples of the processor 11 include, but are not limited to, a central processing unit (CPU), a graphics processing unit (GPU), various specialized artificial intelligence (AI) computing chips, various processors running machine learning model algorithms, a digital signal processor (DSP), and any suitable processor, controller, microcontroller, etc. The processor 11 executes the various methods and processes described above, such as executing a method for remotely controlling a machine.

[0105] In some embodiments, the method for remotely controlling a machine can be implemented as a computer program, which is tangibly contained in a computer-readable storage medium, such as the storage unit 18. In some embodiments, part or all of the computer program can be loaded and / or installed on the electronic device 10 via the ROM 12 and / or the communication unit 19. When the computer program is loaded into the RAM 13 and executed by the processor 11, one or more steps of the method for remotely controlling a machine described above can be performed. Alternatively, in other embodiments, the processor 11 can be configured to execute the method for remotely controlling a machine in any other appropriate manner (e.g., by means of firmware).

[0106] Various embodiments of the systems and techniques described above can be implemented in digital electronic circuit systems, integrated circuit systems, field programmable gate arrays (FPGAs), application specific integrated circuits (ASICs), application specific standard products (ASSPs), system-on-chip systems (SOCs), complex programmable logic devices (CPLDs), computer hardware, firmware, software, and / or combinations thereof. These various embodiments can include being implemented in one or more computer programs that are executable and / or interpreted on a programmable system that includes at least one programmable processor, which can be a special purpose or general purpose programmable processor that can receive data and instructions from a storage system, at least one input device, and at least one output device, and transmit data and instructions to the storage system, the at least one input device, and the at least one output device.

[0107] Computer programs for implementing the methods of the present invention can be written in any combination of one or more programming languages. These computer programs can be provided to a processor of a general-purpose computer, a special-purpose computer, or other programmable remote control device, so that when executed by the processor, the functions / operations specified in the flowcharts and / or block diagrams are implemented. The computer programs can be executed entirely on the machine, partially on the machine, as a stand-alone software package, partially on the machine and partially on a remote machine, or entirely on a remote machine or server.

[0108] In the context of the present invention, computer-readable storage media can be tangible media that can contain or store a computer program for use with an instruction execution system, device or equipment or used in combination with an instruction execution system, device or equipment. Computer-readable storage media can include but are not limited to electronic, magnetic, optical, electromagnetic, infrared or semiconductor systems, devices or equipment, or any suitable combination of the foregoing. Alternatively, computer-readable storage media can be machine-readable signal media. More specific examples of machine-readable storage media can include electrical connections based on one or more lines, portable computer disks, hard disks, random access memories (RAM), read-only memories (ROM), erasable programmable read-only memories (EPROM or flash memory), optical fibers, portable compact disk read-only memories (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination of the foregoing.

[0109] To provide interaction with a user, the systems and techniques described herein can be implemented on an electronic device having: a display device (e.g., a CRT (cathode ray tube) or LCD (liquid crystal display) monitor) for displaying information to the user; and a keyboard and pointing device (e.g., a mouse or trackball) through which the user can provide input to the electronic device. Other types of devices can also be used to provide interaction with the user; for example, the feedback provided to the user can be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user can be received in any form (including acoustic input, voice input, or tactile input).

[0110] The systems and techniques described herein can be implemented in a computing system that includes back-end components (e.g., as a data server), or a computing system that includes middleware components (e.g., an application server), or a computing system that includes front-end components (e.g., a user computer with a graphical user interface or web browser through which a user can interact with implementations of the systems and techniques described herein), or a computing system that includes any combination of such back-end components, middleware components, or front-end components. The components of the system can be interconnected by any form or medium of digital data communication (e.g., a communication network). Examples of communication networks include: a local area network (LAN), a wide area network (WAN), a blockchain network, and the Internet.

[0111] A computing system may include clients and servers. The clients and servers are typically remote from each other and typically interact via a communication network. This client-server relationship arises through computer programs running on the respective computers, creating a client-server relationship. The server may be a cloud server, also known as a cloud computing server or cloud host. This server is a hosting product within the cloud computing service ecosystem that addresses the management difficulties and limited scalability of traditional physical hosting and VPS services.

[0112] It should be understood that the various forms of the processes shown above can be used to reorder, add, or delete steps. For example, the steps described in the present invention can be performed in parallel, sequentially, or in a different order, as long as the desired results of the technical solution of the present invention can be achieved. This is not limited herein.

[0113] The above specific embodiments do not limit the scope of protection of the present invention. Those skilled in the art will appreciate that various modifications, combinations, sub-combinations, and substitutions may be made based on design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention are intended to be included within the scope of protection of the present invention.

Claims

1. A method for remotely controlling a machine, characterized in that: include: Obtaining a recipe data template to be processed, and processing the recipe data template to be processed according to the recipe parameter type and / or the adjustment operation of the recipe step by the recipe personnel to obtain a target recipe data template; According to a preset network address, the target recipe data template is saved to a specified path; Reading the target recipe data template from the specified path through a preset template management gadget, and parsing and verifying the target recipe data template; If the parsing verification passes, a process recipe file that meets the machine requirements is generated based on the parsed target recipe data template; The process recipe file is sent to the industrial computer corresponding to the machine, so that the machine reads and executes the process recipe file from the industrial computer.

2. The method according to claim 1, characterized in that The recipe parameter types include fixed value parameters, default value parameters and key parameters; The processing of the to-be-processed recipe data template according to the recipe parameter type comprises at least one of the following steps: Determining, in the recipe data template to be processed, recipe parameters of a type belonging to fixed-value parameters, and removing the recipe parameters of a type belonging to fixed-value parameters; Determining, in the recipe data template to be processed, recipe parameters of a type belonging to default value parameters, and modifying values ​​of the recipe parameters of a type belonging to default value parameters according to production requirements; Recipe parameters belonging to the key parameter type are determined in the recipe data template to be processed, and the recipe parameters belonging to the key parameter type are verified.

3. The method according to claim 1, characterized in that The step of processing the to-be-processed recipe data template according to the recipe personnel's adjustment operation on the recipe steps includes: In response to a new process step added by the recipe personnel, recipe parameters corresponding to the new process step are added to the recipe data template to be processed; In response to the recipe personnel deleting a process step, the recipe parameters corresponding to the deleted process step are marked as discarded in the recipe data template to be processed.

4. The method according to claim 2, characterized in that The method further comprises: Distinguishing and labeling recipe parameters with similar names in the recipe data template to be processed; and / or, Determine the recipe parameters with card control values ​​in the recipe data template to be processed, and add corresponding card control values ​​to the recipe parameters with card control values ​​in the recipe data template to be processed.

5. The method according to claim 1, characterized in that The parsing and verifying the target recipe data template includes: Parsing the target recipe data template using a syntax parsing algorithm to obtain a template parsing result; wherein the template parsing result at least includes parameter names and values ​​of recipe parameters; The template parsing result is checked for field type, data integrity, and numerical rationality.

6. The method according to claim 1, wherein If the parsing verification passes, generating a process recipe file that meets the machine requirements based on the parsed target recipe data template includes: When the parsing verification passes, the recipe parameters in the target recipe data template are reorganized and encoded to generate a process recipe file that can be recognized and executed by the machine, and the process recipe file is named according to a preset naming rule.

7. The method according to claim 1, characterized in that After reading the target recipe data template from the specified path through the preset template management gadget, the method further includes: The obtained target recipe data template is rendered and displayed on the display interface of the template management gadget.

8. A device for remotely controlling a machine, characterized in that: include: A template processing module is used to obtain a recipe data template to be processed, and process the recipe data template to be processed according to the recipe parameter type and / or the adjustment operation of the recipe step by the recipe personnel to obtain a target recipe data template; A saving module, configured to save the target recipe data template to a specified path according to a preset network address; A parsing and verification module, configured to read the target recipe data template from the specified path through a preset template management gadget, and parse and verify the target recipe data template; A file generation module is used to generate a process recipe file that meets the machine requirements according to the parsed target recipe data template when the parsing verification passes; The file sending module is used to send the process recipe file to the industrial computer corresponding to the machine, so that the machine reads and executes the process recipe file from the industrial computer.

9. An electronic device, characterized in that: include: at least one processor; as well as a memory communicatively connected to the at least one processor; wherein, The memory stores a computer program executable by the at least one processor. The computer program is executed by the at least one processor to enable the at least one processor to perform the method according to any one of claims 1 to 7.

10. A computer-readable storage medium, characterized in that The computer-readable storage medium stores computer instructions, and the computer instructions are used to enable a processor to implement the method according to any one of claims 1 to 7 when executed.

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