Foam breaking rectifying tower for preparing high-purity electronic-grade molybdenum hexafluoride and control method

By using a bubble stretching and thinning mechanism and a liquid driving device in a molybdenum hexafluoride distillation tower, the problem of viscous bubbles bursting and ejecting at low temperatures is solved, the preparation of high-purity molybdenum hexafluoride is achieved, and the distillation effect is improved.

CN120617992AActive Publication Date: 2025-09-12FUJIAN DEXU NEW MATERIALS CO LTD
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Patent Information

Application Number
CN202511132828.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-08-13
Publication Date
2025-09-12
Estimated Expiration
2045-08-13

AI Technical Summary

Technical Problem

In the prior art, during the distillation of molybdenum hexafluoride, viscous impurity bubbles slowly form and burst at low temperatures, causing impurities to be ejected into the gas phase, affecting the distillation effect. This problem is difficult to solve effectively with a defoaming device.

Method used

A bubble-breaking distillation tower is designed, which adopts a bubble stretching and thinning mechanism and a liquid driving device. The bubble attachment plate is driven to swing rapidly by the liquid impact force, shearing the bubble contact line and mechanically breaking the bubbles to prevent high-pressure injection.

Benefits of technology

It effectively reduces the impurity ejection when bubbles burst at low temperatures, improves the purity and distillation efficiency of molybdenum hexafluoride, prevents impurities from entering the gas phase, and improves product purity.

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Abstract

The invention relates to a bubble breaking rectifying tower for preparing high-purity electronic grade molybdenum hexafluoride and a control method, the bubble breaking rectifying tower comprises a plurality of bubble stretching and thinning mechanisms, each bubble stretching and thinning mechanism comprises a gas flow guide frame body, a fixed plate body and a bubble attachment plate, the gas flow guide frame bodies and the fixed plate bodies are arranged on a first mounting bracket at intervals, and the gas flow guide frame bodies and the fixed plate bodies are arranged on a second mounting bracket at intervals; the middle part of the bubble attachment plate is transversely hinged to the top end of the fixed plate body, the bubble attachment plate shields an opening of the gas guide frame body in an unstressed state, and the gas guide frame body and the bubble attachment plate are arranged at an interval; the liquid driving devices are arranged on the second mounting support and used for outputting liquid towards the top of the bubble attachment plate, the bubble attachment plate stretches and thinns a contact line between the foam corresponding fixing plate body and the bubble attachment plate in the rapid swinging process, and after the bubble attachment plate and the gas flow guide frame body are opened, the bubble attachment plate and the gas flow guide frame body are separated from each other. And the bubble attachment plate drives air to flow into the opening so as to break the stretched and thinned part.
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