Micro force measuring device

Abstract

The invention discloses a micro force measuring device, and relates to the field of micro-nano scale mechanical testing, a first parallel plate capacitor comprises a first polar plate and a second polar plate, a second parallel plate capacitor comprises a third polar plate and a fourth polar plate, and the first polar plate and the third polar plate are connected with a device body; the second pole plate is connected with the force loading probe, the fourth pole plate is connected with the displacement transmission piece, the force loading probe can move relative to the device body in the first direction, and the displacement transmission piece is configured to move together with the force loading probe after the force loading probe moves by a preset distance in the first direction. Therefore, the displacement transmission piece can move together with the force loading probe after the force loading probe moves by the preset distance in the first direction, so that the micro-force measuring device can be automatically switched to wide-range measurement through the displacement transmission piece after small-range measurement reaches the limit, and the micro-force measuring device is high in sensitivity, high in resolution and wide in range; and the measurement accuracy and convenience of the micro-force measurement device can be improved.

Description

Technical Field

[0001] The present invention relates to the field of micro-nano scale mechanical testing, and in particular to a micro-force measuring device. Background Art

[0002] With the rise of nanoscience and technology, there is an urgent need to develop experimental testing technologies and methods at the micro- and nanoscale. In related technologies, micro-force measurement devices are often poorly configured. High-sensitivity, high-resolution micro-force measurement devices have a small range, while those with a large range have low sensitivity and resolution. As a result, micro-force measurement devices cannot achieve both high sensitivity, high resolution, and a large range, affecting both measurement accuracy and convenience. Summary of the Invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, one object of the present invention is to provide a micro-force measurement device that can achieve high sensitivity, high resolution and a large range, thereby improving the accuracy and convenience of measurement.

[0004] The micro-force measuring device according to the present invention includes: a device body; a first parallel plate capacitor and a second parallel plate capacitor, the first parallel plate capacitor includes a first electrode plate and a second electrode plate, the second parallel plate capacitor includes a third electrode plate and a fourth electrode plate, the first electrode plate and the third electrode plate are connected to the device body; a force loading probe, a first force sensitive element, a second force sensitive element, and a displacement transmission member, the second electrode plate is connected to the force loading probe, the fourth electrode plate is connected to the displacement transmission member, the first force sensitive element is connected between the device body and the force loading probe, the second force sensitive element is connected between the displacement transmission member and the device body, the force loading probe is movable relative to the device body along a first direction, and the displacement transmission member is constructed so that after the force loading probe moves a preset distance along the first direction, it moves together with the force loading probe.

[0005] According to the micro-force measuring device of the present invention, by enabling the displacement transmission member to move together with the force loading probe after the force loading probe moves a preset distance along the first direction, the micro-force measuring device can automatically switch to a large-range measurement through the displacement transmission element after the small-range measurement reaches its limit, so that the micro-force measuring device has both high sensitivity / high resolution and a large range, which is conducive to improving the accuracy and convenience of the measurement of the micro-force measuring device.

[0006] In some examples of the present invention, there are multiple first electrode plates, multiple second electrode plates, multiple third electrode plates, and multiple fourth electrode plates. Along the first direction, multiple first electrode plates and multiple second electrode plates are alternately arranged, and multiple third electrode plates and multiple fourth electrode plates are alternately arranged.

[0007] In some examples of the present invention, the spacing between at least one pair of adjacent first electrode plates and second electrode plates is different from the spacing between another pair of adjacent first electrode plates and second electrode plates;

[0008] And / or, the distance between at least one pair of adjacent third electrode plates and the fourth electrode plates is different from the distance between another pair of adjacent third electrode plates and the fourth electrode plates.

[0009] In some examples of the present invention, the force loading probe has a first mating portion, and the displacement transmission member has a second mating portion. After the force loading probe moves a preset distance along the first direction, the first mating portion can cooperate with the second mating portion to enable the displacement transmission member to move together with the force loading probe.

[0010] In some examples of the present invention, the first mating portion includes: a first sub-portion and a second sub-portion, the second sub-portion is connected to the first sub-portion, along the first direction, at least a portion of the first sub-portion is located on one side of the second mating portion and corresponds to the second mating portion, and at least a portion of the second sub-portion is located on the other side of the second mating portion and corresponds to the second mating portion.

[0011] In some examples of the present invention, the micro-force measuring device is made of amorphous alloy.

[0012] In some examples of the present invention, the first parallel plate capacitor and the second parallel plate capacitor are spaced along the first direction, the first force sensitive element is located at one end of the first parallel plate capacitor facing away from the second parallel plate capacitor, and the second force sensitive element is located at one end of the second parallel plate capacitor facing away from the first parallel plate capacitor.

[0013] In some examples of the present invention, the micro-force measurement device further includes: a third force-sensitive element, which is connected between the device body and the force-loading probe, and along the first direction, the third force-sensitive element is located between the first force-sensitive element and the second force-sensitive element.

[0014] In some examples of the present invention, the device body includes: a first sub-body, a second sub-body, and a third sub-body, the second sub-body and the third sub-body are both arranged on the inside of the first sub-body, the first force-sensitive element is connected between the first sub-body and the force-loading probe, the second force-sensitive element is connected between the displacement transmission part and the third sub-body, the third force-sensitive element is connected between the third sub-body and the force-loading probe, and the first electrode plate and the third electrode plate are both connected to the second sub-body.

[0015] In some examples of the present invention, there are two of each of the first parallel plate capacitor, the second parallel plate capacitor, the first force sensitive element, the second force sensitive element, and the third force sensitive element, and the two of the first parallel plate capacitor, the first force sensitive element, and the second force sensitive element are spaced apart along a second direction, and the second direction is perpendicular to the first direction;

[0016] And / or, the force loading probe, the first sub-body, and the third sub-body are connected to a ground terminal, and the second sub-body is connected to a voltage terminal.

[0017] Additional aspects and advantages of the present invention will be set forth in part in the description which follows and, in part, will be obvious from the description which follows, or may be learned by practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the following description of the embodiments with reference to the accompanying drawings, in which:

[0019] Figure 1 is a top view of a micro-force measurement device according to an embodiment of the present invention;

[0020] Figure 2 is an enlarged schematic diagram of a first parallel plate capacitor according to an embodiment of the present invention;

[0021] Figure 3 is a schematic diagram of a first matching portion and a second matching portion according to an embodiment of the present invention;

[0022] Figure 4 is a schematic diagram of a second force-sensitive element according to an embodiment of the present invention;

[0023] Figure 5 is a graph showing the relationship between capacitance and displacement of a micro-force measurement device according to an embodiment of the present invention;

[0024] Figure 6 3 is a diagram showing the relationship between the displacement and force of the micro-force measurement device corresponding to the second force-sensitive elements of different lengths according to an embodiment of the present invention.

[0025] Reference numerals:

[0026] Micro-force measuring device 100;

[0027] Device body 10; first sub-body 11; second sub-body 12; third sub-body 13;

[0028] First parallel plate capacitor 20; first plate 21; second plate 22;

[0029] Second parallel plate capacitor 30; third plate 31; fourth plate 32;

[0030] Force loading probe 40; first mating portion 41; first sub-portion 411; second sub-portion 412;

[0031] A first force-sensitive element 51; a second force-sensitive element 52; a third force-sensitive element 53;

[0032] Displacement transmission member 60; second matching portion 61. DETAILED DESCRIPTION

[0033] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0034] Reference below Figures 1-6 A micro-force measuring device 100 according to an embodiment of the present invention is described.

[0035] like Figures 1-6 As shown, the micro-force measurement device 100 according to an embodiment of the present invention includes: a device body 10 , a first parallel plate capacitor 20 , a second parallel plate capacitor 30 , a force loading probe 40 , a first force sensitive element 51 , a second force sensitive element 52 and a displacement transmission member 60 .

[0036] The first parallel plate capacitor 20 includes a first plate 21 and a second plate 22, and the second parallel plate capacitor 30 includes a third plate 31 and a fourth plate 32. The first plate 21 and the third plate 31 are connected to the device body 10; the second plate 22 is connected to the force loading probe 40, and the fourth plate 32 is connected to the displacement transmission member 60. The first force sensitive element 51 is connected between the device body 10 and the force loading probe 40, and the second force sensitive element 52 is connected between the displacement transmission member 60 and the device body 10. The force loading probe 40 can move relative to the device body 10 along the first direction, and the displacement transmission member 60 is constructed so that the force loading probe 40 moves along the first direction (i.e., Figure 1 After moving a preset distance in the Z direction (as shown), it moves together with the force loading probe 40.

[0037] Among them, as some embodiments of the present application, along the first direction (i.e. Figure 1 The first parallel plate capacitor 20 and the second parallel plate capacitor 30 are spaced apart, and the distance between the first parallel plate capacitor 20 and the force loading probe 40 is smaller than the distance between the second parallel plate capacitor 30 and the force loading probe 40.

[0038] The first parallel plate capacitor 20 includes a first plate 21 and a second plate 22. In some embodiments of the present application, the first plate 21 is configured as a positive plate, and the second plate 22 is configured as a negative plate. The second parallel plate capacitor 30 includes a third plate 31 and a fourth plate 32. In some embodiments of the present application, the third plate 31 is configured as a positive plate, and the fourth plate 32 is configured as a negative plate. When the relative positions of the first plate 21 and the second plate 22 of the first parallel plate capacitor 20 change, the capacitance of the first parallel plate capacitor 20 changes. When the relative positions of the third plate 31 and the fourth plate 32 of the second parallel plate capacitor 30 change, the capacitance of the second parallel plate capacitor 30 also changes.

[0039] As some embodiments of the present application, the size parameters of the first parallel plate capacitor 20 and the second parallel plate capacitor 30 can be adjusted according to actual needs.

[0040] The first and third plates 21 and 31 are connected to the device body 10. In some embodiments of the present application, the first and third plates 21 and 31 are integrally formed with the device body 10. The second plate 22 is connected to the force-applying probe 40. In some embodiments of the present application, the second plate 22 and the force-applying probe 40 are integrally formed. The fourth plate 32 is connected to the displacement transmission member 60. In some embodiments of the present application, the fourth plate 32 and the displacement transmission member 60 are integrally formed.

[0041] The first force-sensitive element 51 is connected between the device body 10 and the force-loading probe 40. As some embodiments of the present application, the first force-sensitive element 51 is constructed as a "J"-shaped structure. The first force-sensitive element 51 has two ends, one end of which is connected to the device body 10, and the other end is connected to the force-loading probe 40. As some embodiments of the present application, the first force-sensitive element 51, the device body 10, and the force-loading probe 40 are constructed as an integrally molded part.

[0042] like Figure 1 and Figure 4 As shown, the second force-sensitive element 52 is connected between the displacement transmission member 60 and the device body 10, along the first direction (ie Figure 1 The second force sensitive element 52 has an end close to the displacement transmission member 60 and an end away from the displacement transmission member 60. The end of the second force sensitive element 52 close to the displacement transmission member 60 is connected to the displacement transmission member 60, and the end of the second force sensitive element 52 away from the displacement transmission member 60 is connected to the device body 10.

[0043] The force loading probe 40 is moved in a first direction (ie Figure 1 The force loading probe 40 can be moved relative to the device body 10 in the Z direction as shown. In other words, the force loading probe 40 can be moved along the first direction (ie, Figure 1Alternatively, the force-loading probe 40 may be moved in a first direction (ie, Z direction) toward the device body 10. Figure 1 The Z direction shown) can be moved in a direction away from the device body 10.

[0044] The displacement transmission member 60 is configured to force the probe 40 along a first direction (ie Figure 1 After moving a preset distance in the Z direction (shown), the force loading probe 40 moves together with the force loading probe 40. That is, the force loading probe 40 is spaced apart from the displacement transmitting member 60 by a preset distance, such as Figure 3 and Figure 5 As shown, the preset distance is represented by h, and the force loading probe 40 is subjected to force along the first direction (ie Figure 1 When the force-loading probe 40 moves in the Z direction (as shown), when the displacement of the force-loading probe 40 is less than the preset distance, the displacement transmission member 60 will not contact the force-loading probe 40 and will not move together with the force-loading probe 40, so that the micro-force measuring device 100 remains in the small range. When the displacement of the force-loading probe 40 exceeds the preset distance, the force-loading probe 40 will contact the displacement transmission member 60, and the displacement transmission member 60 will move together with the force-loading probe 40, so that the micro-force measuring device 100 enters the large range.

[0045] The first force-sensitive element 51 and the second force-sensitive element 52 both have elastic force. The first force-sensitive element 51 can be but not limited to a spring-like structure, and the second force-sensitive element 52 can be but not limited to a spring-like structure. The force-loading probe 40 moves in the first direction (i.e. Figure 1 The first force-sensitive element 51 and / or the second force-sensitive element 52 can be elastically deformed by moving the first force-sensitive element 51 and / or the second force-sensitive element 52 relative to the device body 10 in the Z direction shown. Within the elastic range, the force and the displacement in the force direction of the first force-sensitive element 51 and the second force-sensitive element 52 satisfy Hooke's law:

[0046] F=kx

[0047] In the above formula, k is the elastic stiffness of the first force-sensitive element 51 or the second force-sensitive element 52, x is the displacement of the first force-sensitive element 51 or the second force-sensitive element 52 when it is deformed, and F is the force. Figure 6 As shown, the measuring range of the micro-force measuring device 100 can be adjusted by adjusting the elastic stiffness and size parameters of the first force sensitive element 51 and / or the second force sensitive element 52 .

[0048] As some embodiments of this application, Figure 4 As shown, the size parameter of the second force sensitive element 52 is l, as shown in FIG. Figure 6 As shown, the elastic stiffness of the second force-sensitive element 52 can be changed by changing the size parameter l of the second force-sensitive element 52 , so as to adjust the measuring range of the micro-force measuring device 100 .

[0049] As some embodiments of the present application, the micro-force measuring device 100 further includes a capacitance measuring circuit, and the first parallel plate capacitor 20 and the second parallel plate capacitor 30 are both connected to the capacitance measuring circuit through wires, so as to determine the capacitance of the first parallel plate capacitor 20 and the second parallel plate capacitor 30 through the capacitance measuring circuit, and then determine the displacement of the force loading probe 40, for example. Figure 1 and Figure 3 As shown, the force loading probe 40 is subjected to force along the first direction (ie Figure 1 When the force loading probe 40 moves in the Z direction (as shown), the capacitance of the first parallel plate capacitor 20 will change, and the displacement of the force loading probe 40 can be determined based on the capacitance change.

[0050] As some embodiments of this application, Figure 5 As shown, the relationship between the capacitance of the first parallel plate capacitor 20 and the second parallel plate capacitor 30 and the displacement of the force loading probe 40 needs to be calibrated before measurement to draw a relationship diagram between the capacitance of the first parallel plate capacitor 20 and the second parallel plate capacitor 30 and the displacement of the force loading probe 40. Figure 5 It can be seen that the micro-force measurement device 100 has high measurement accuracy in a large range, and this can facilitate the subsequent determination of the corresponding relationship between the capacitance of the first parallel plate capacitor 20 and the second parallel plate capacitor 30 and the displacement of the force loading probe 40.

[0051] As some embodiments of the present application, when the micro-force measuring device 100 is used for measurement, the force applied to the force-loading probe 40 is applied along the first direction (ie Figure 1 The force loading probe 40 moves in the first direction (ie, the Z direction shown in FIG. Figure 1 The movement of the force-loading probe 40 in the Z direction shown in the figure can change the distance between the first electrode plate 21 and the second electrode plate 22. The change in the distance between the first electrode plate 21 and the second electrode plate 22 can change the capacitance of the first parallel plate capacitor 20, so that the movement distance of the force-loading probe 40 can be obtained according to the capacitance. If the movement distance of the force-loading probe 40 is less than the preset distance, the force magnitude can be obtained according to the elastic stiffness of the first force-sensitive element 51, so as to realize the micro-force measuring device 100 to measure in a small range. If the movement distance of the force-loading probe 40 is greater than the preset distance, the force-loading probe 40 will contact the displacement transmission member 60, and the displacement transmission member 60 will move together with the force-loading probe 40, so that the micro-force measuring device 100 enters a large range. The force magnitude can be obtained according to the elastic stiffness of the first force-sensitive element 51 and the second force-sensitive element 52, so as to realize the micro-force measuring device 100 to measure in a large range.

[0052] As some embodiments of the present application, the sensitivity of the small range and the sensitivity of the large range of the micro-force measuring device 100 of the present application can be obtained by the following formulas:

[0053]

[0054] Where S is the sensitivity, n is the number of small-range capacitors (the number of first parallel plate capacitors) or the number of large-range capacitors (the number of first parallel plate capacitors and the number of second parallel plate capacitors), ε is the dielectric constant between the plates, A is the plate area, and d is the plate spacing. As can be seen from this formula, the resolution of the micro-force measurement device 100 can be improved by reducing the plate spacing, or by reducing the number of capacitors. Furthermore, the range can be adjusted by adjusting the preset distance of the displacement transmission member 60.

[0055] It should be noted that the micro-force measuring device 100 can achieve high-precision and high-resolution micro-force measurement when the range is small (the moving distance of the force loading probe 40 is less than the preset distance). When the micro-force measuring device 100 is in a large range (the moving distance of the force loading probe 40 is greater than the preset distance), it can perform a large-scale micro-force measurement that takes into account both accuracy and resolution, and no additional switching operation is required when switching between the small range and the large range, which is beneficial to improving the reliability and convenience of the use of the micro-force measuring device 100.

[0056] Therefore, by connecting the first force-sensitive element 51 between the device body 10 and the force-loading probe 40, and connecting the second force-sensitive element 52 between the displacement transmission member 60 and the device body 10, and enabling the displacement transmission member 60 to move together with the force-loading probe 40 after the force-loading probe 40 moves a preset distance along the first direction, the micro-force measuring device 100 can automatically switch to a large-range measurement through the displacement transmission element after the small-range measurement reaches its limit, so that the micro-force measuring device 100 has high sensitivity, high resolution and a large range, which is conducive to improving the accuracy and convenience of the measurement of the micro-force measuring device 100.

[0057] In some embodiments of the present invention, Figure 1 and Figure 2 As shown, there are multiple first electrode plates 21, second electrode plates 22, third electrode plates 31, and fourth electrode plates 32. Along the first direction, multiple first electrode plates 21 and multiple second electrode plates 22 are alternately arranged, and multiple third electrode plates 31 and multiple fourth electrode plates 32 are alternately arranged.

[0058] There are multiple first electrode plates 21, which may be, but not limited to, four or five. In some embodiments of the present application, the number of first electrode plates 21 is seventeen. There are multiple second electrode plates 22, which may be, but not limited to, four or five. In some embodiments of the present application, the number of second electrode plates 22 is seventeen.

[0059] As some embodiments of the present application, the number of the first electrode plates 21 is seventeen, the number of the second electrode plates 22 is the same as that of the first electrode plates 21 and they are arranged in a one-to-one correspondence, and the first electrode plates 21 are arranged in a one-to-one correspondence. Figure 1 In some embodiments of the present application, the number of first plates 21 is eighteen, the number of second plates 22 is seventeen, and the number of first plates 21 and second plates 22 are arranged alternately. Figure 1 In the Z direction shown in FIG, eighteen first electrode plates 21 and seventeen second electrode plates 22 are alternately arranged.

[0060] There are multiple third electrode plates 31, which may be, but not limited to, four or five. In some embodiments of the present application, the number of third electrode plates 31 is seventeen. There are multiple fourth electrode plates 32, which may be, but not limited to, four or five. In some embodiments of the present application, the number of fourth electrode plates 32 is seventeen.

[0061] As some embodiments of the present application, the number of the third electrode plates 31 is seventeen, the number of the fourth electrode plates 32 is the same as that of the third electrode plates 31 and they are arranged in a one-to-one correspondence. Figure 1 In the Z direction shown in FIG, seventeen third plates 31 and seventeen fourth plates 32 are arranged alternately. In some embodiments of the present application, the number of third plates 31 is eighteen, and the number of fourth plates 32 is seventeen. Figure 1 In the Z direction shown in FIG, eighteen third electrode plates 31 and seventeen fourth electrode plates 32 are alternately arranged.

[0062] As some embodiments of the present application, the number of the first electrode plates 21 is eighteen, and the number of the second electrode plates 22 is seventeen, wherein any two adjacent first electrode plates 21 and a second electrode plate 22 therebetween can constitute a first-stage plate group, and the distances between the second electrode plate 22 and the two first electrode plates 21 are different. In other words, along the first direction (i.e. Figure 1 The second electrode plates 22 are offset toward one of the first-stage plates 21 in the first-stage plate group. The offset directions of the second electrode plates 22 in the plurality of first-stage plate groups are the same.

[0063] The number of the third plates 31 is eighteen, and the number of the fourth plates 32 is seventeen. Any two adjacent third plates 31 and a fourth plate 32 therebetween can constitute a second-stage plate group. The distances between the fourth plate 32 and the two third plates 31 are different. In other words, along the first direction (i.e. Figure 1The fourth plate 32 will be offset toward one of the third plates 31 in the second plate group. The offset directions of the fourth plates 32 of the plurality of second plate groups are the same, and the fourth plates 32 along the first direction (ie Figure 1 The second electrode plate 22 and the fourth electrode plate 32 have different offset directions.

[0064] As some embodiments of the present application, the number of the first electrode plates 21 is seventeen, and the number of the second electrode plates 22 is eighteen, wherein any two adjacent second electrode plates 22 and a first electrode plate 21 therebetween can constitute a third-level plate group, and the distances between the first electrode plate 21 and the two second electrode plates 22 are different. In other words, along the first direction (i.e. Figure 1 The first electrode plate 21 will deviate toward one of the second-stage plates 22 in the third-stage plate group, and the first electrode plates 21 of the plurality of third-stage plate groups have the same deviating direction.

[0065] The number of the third plates 31 is seventeen, and the number of the fourth plates 32 is eighteen. Any two adjacent fourth plates 32 and one third plate 31 therebetween can constitute a fourth-stage plate group. The distances between the third plate 31 and the two fourth plates 32 are different. In other words, along the first direction (i.e. Figure 1 The third electrode plate 31 will be offset toward one of the fourth electrode plates 32 in the fourth plate group. The offset directions of the third electrode plates 31 of the plurality of fourth plate groups are the same, and the first direction (ie Figure 1 The third electrode plate 31 and the first electrode plate 21 have different offset directions.

[0066] As some embodiments of the present application, the first parallel plate capacitor 20 and the second parallel plate capacitor 30 are both constructed as a comb structure.

[0067] Such a configuration can increase the electrode areas of the first parallel plate capacitor 20 and the second parallel plate capacitor 30 , which is beneficial to improving the sensitivity and measurement accuracy of the micro-force measurement device 100 .

[0068] In some embodiments of the present invention, Figure 2 As shown, the distance between at least one pair of adjacent first electrode plates 21 and second electrode plates 22 is different from the distance between another pair of adjacent first electrode plates 21 and second electrode plates 22 .

[0069] Among them, the spacing between at least one pair of adjacent first electrode plates 21 and second electrode plates 22 is different from the spacing between another pair of adjacent first electrode plates 21 and second electrode plates 22, that is, the spacing between a pair of adjacent first electrode plates 21 and second electrode plates 22 is different from the spacing between another pair of adjacent first electrode plates 21 and second electrode plates 22, or the spacing between multiple pairs of adjacent first electrode plates 21 and second electrode plates 22 is different from the spacing between multiple pairs of adjacent first electrode plates 21 and second electrode plates 22. As some embodiments of the present application, the spacing between multiple pairs of adjacent first electrode plates 21 and second electrode plates 22 is different from the spacing between multiple pairs of adjacent first electrode plates 21 and second electrode plates 22.

[0070] Such a setting enables the first parallel plate capacitor 20 to form a differential circuit, which can improve the linearity of the capacitance of the first electrode plate 21 and the second electrode plate 22 and the distance between the first electrode plate 21 and the second electrode plate 22, which is beneficial to the correspondence between the displacement of the force loading probe 40 and the capacitance of the first electrode plate 21 and the second electrode plate 22, and is beneficial to improving the accuracy of the measurement.

[0071] In some embodiments of the present invention, Figure 2 As shown, the distance between at least one pair of adjacent third electrode plates 31 and fourth electrode plates 32 is different from the distance between another pair of adjacent third electrode plates 31 and fourth electrode plates 32 .

[0072] Among them, the spacing between at least one pair of adjacent third pole plates 31 and fourth pole plates 32 is different from the spacing between another pair of adjacent third pole plates 31 and fourth pole plates 32, that is, the spacing between a pair of adjacent third pole plates 31 and fourth pole plates 32 is different from the spacing between another pair of adjacent third pole plates 31 and fourth pole plates 32, or the spacing between multiple pairs of adjacent third pole plates 31 and fourth pole plates 32 is different from the spacing between multiple pairs of adjacent third pole plates 31 and fourth pole plates 32. As some embodiments of the present application, the spacing between multiple pairs of adjacent third pole plates 31 and fourth pole plates 32 is different from the spacing between multiple pairs of adjacent third pole plates 31 and fourth pole plates 32.

[0073] Such a setting enables the second parallel plate capacitor 30 to form a differential circuit, which can improve the linearity of the capacitance of the third plate 31 and the fourth plate 32 and the spacing between the third plate 31 and the fourth plate 32, which is beneficial to the correspondence between the displacement of the force loading probe 40 and the capacitance of the third plate 31 and the fourth plate 32, and is beneficial to improving the accuracy of the measurement.

[0074] In some embodiments of the present invention, Figure 1 and Figure 3 As shown, the force loading probe 40 has a first matching portion 41, the displacement transmission member 60 has a second matching portion 61, and the force loading probe 40 is moved in a first direction (ie Figure 1After moving a preset distance in the Z direction (as shown), the first matching portion 41 can match with the second matching portion 61, so that the displacement transmission member 60 moves together with the force loading probe 40.

[0075] As some embodiments of the present application, the force loading probe 40 is moved in a first direction (ie Figure 1 After moving a preset distance toward the side close to the device body 10 (in the Z direction shown), the first matching portion 41 can abut and mate with the second matching portion 61, and the first matching portion 41 can push the second matching portion 61, so that the displacement transmission member 60 moves toward the side close to the device body 10 together with the force loading probe 40.

[0076] As some embodiments of the present application, the force loading probe 40 is moved in a first direction (ie Figure 1 After moving a preset distance toward the side away from the device body 10 (in the Z direction shown), the first matching portion 41 can abut and mate with the second matching portion 61, and the first matching portion 41 can pull the second matching portion 61 to move the displacement transmission member 60 and the force loading probe 40 toward the side away from the device body 10.

[0077] Such a configuration enables the force loading probe 40 and the displacement transmission member 60 to be reasonably designed, and enables the micro-force measuring device 100 to automatically switch from a small range to a large range under a force state (after the force loading probe 40 moves beyond a preset distance) without the need for other operations, which is conducive to improving the ease of use of the micro-force measuring device 100.

[0078] In some embodiments of the present invention, Figure 1 As shown, the first matching portion 41 includes: a first sub-portion 411 and a second sub-portion 412, the second sub-portion 412 is connected to the first sub-portion 411, and is arranged along a first direction (ie Figure 1 In the Z direction shown in the figure, at least a portion of the first sub-portion 411 is located on one side of the second matching portion 61 and corresponds to the second matching portion 61, and at least a portion of the second sub-portion 412 is located on the other side of the second matching portion 61 and corresponds to the second matching portion 61.

[0079] Among them, the second sub-section 412 is connected to the first sub-section 411, and the connection method between the second sub-section 412 and the first sub-section 411 can be but is not limited to welding, bolt connection, etc. As some embodiments of the present application, the second sub-section 412 and the first sub-section 411 are integrally formed.

[0080] Along the first direction (i.e. Figure 1In the Z direction shown in the figure, at least part of the first sub-section 411 is located on one side of the second matching portion 61 and corresponds to the second matching portion 61, that is, part of the first sub-section 411 is located on one side of the second matching portion 61 and corresponds to the second matching portion 61, or the entire first sub-section 411 is located on one side of the second matching portion 61 and corresponds to the second matching portion 61.

[0081] The second matching portion 61 has a side close to the force loading probe 40 and a side away from the force loading probe 40. As some embodiments of the present application, along the first direction (ie Figure 1 In the Z direction shown in FIG, the first sub-portion 411 is located on a side of the second matching portion 61 close to the force loading probe 40 and corresponds to the second matching portion 61 .

[0082] As some embodiments of the present application, along the first direction (ie Figure 1 In the Z direction shown in FIG, the entire first sub-portion 411 is located on a side of the second matching portion 61 close to the force loading probe 40 and corresponds to the second matching portion 61 .

[0083] At least part of the second sub-part 412 is located on the other side of the second matching part 61 and corresponds to the second matching part 61, that is, part of the second sub-part 412 is located on the other side of the second matching part 61 and corresponds to the second matching part 61, or the entire second sub-part 412 is located on the other side of the second matching part 61 and corresponds to the second matching part 61.

[0084] As some embodiments of the present application, along the first direction (ie Figure 1 In the Z direction shown in FIG, the second sub-portion 412 is located on a side of the second matching portion 61 away from the force loading probe 40 and corresponds to the second matching portion 61 .

[0085] As some embodiments of the present application, along the first direction (ie Figure 1 The entire second sub-portion 412 is located on a side of the second mating portion 61 away from the force loading probe 40 and corresponds to the second mating portion 61 .

[0086] Such a setting can make the structural design of the first matching portion 41 reasonable, and can enable the micro-force measuring device 100 to automatically switch from a small range to a large range during the force process (after the force loading probe 40 moves beyond a preset distance) without the need for other operations, which is conducive to improving the ease of use of the micro-force measuring device 100.

[0087] In some embodiments of the present invention, the material of the micro-force measurement device 100 is an amorphous alloy. That is, the material of the device body 10, the first parallel plate capacitor 20, the second parallel plate capacitor 30, the force loading probe 40, the first force sensitive element 51, the second force sensitive element 52 and the displacement transmission member 60 are all constructed of an amorphous alloy. The amorphous alloy can be, but is not limited to, an iron-based amorphous alloy, a cobalt-based amorphous alloy, etc. As some embodiments of the present application, the amorphous alloy is a cobalt-based amorphous alloy. As some embodiments of the present application, the micro-force measurement device 100 is constructed as an integrally formed part.

[0088] Amorphous alloys have the characteristics of high hardness, high strength and high elasticity. Such a setting can increase the measuring range of the micro-force measuring device 100, which is beneficial to increasing the service life of the micro-force measuring device 100. In addition, such a setting can reduce the production difficulty of the micro-force measuring device 100, which is beneficial to improving the production efficiency of the micro-force measuring device 100.

[0089] In some embodiments of the present invention, Figure 1 As shown, the first parallel plate capacitor 20 and the second parallel plate capacitor 30 are arranged along the first direction (ie Figure 1 The first force sensitive element 51 is located at one end of the first parallel plate capacitor 20 away from the second parallel plate capacitor 30 , and the second force sensitive element 52 is located at one end of the second parallel plate capacitor 30 away from the first parallel plate capacitor 20 .

[0090] The first parallel plate capacitor 20 and the second parallel plate capacitor 30 are arranged along the first direction (ie Figure 1 Specifically, along the first direction (ie Figure 1 In the Z direction shown in FIG, the distance between the first parallel plate capacitor 20 and the force loading probe 40 is smaller than the distance between the second parallel plate capacitor 30 and the force loading probe 40 .

[0091] The first parallel plate capacitor 20 has one end close to the second parallel plate capacitor 30 and one end away from the second parallel plate capacitor 30 . The first force sensitive element 51 is located at the end of the first parallel plate capacitor 20 away from the second parallel plate capacitor 30 .

[0092] The second parallel plate capacitor 30 has one end close to the first parallel plate capacitor 20 and one end facing away from the first parallel plate capacitor 20 . The second force sensitive element 52 is located at the end of the second parallel plate capacitor 30 facing away from the first parallel plate capacitor 20 .

[0093] Such a setting enables the first force-sensitive element 51 to correspond to the first parallel plate capacitor 20 , and the second force-sensitive element 52 to correspond to the second parallel plate capacitor 30 . The structural setting is reasonable, which is conducive to improving the accuracy and convenience of measurement of the micro-force measuring device 100 , and can reduce the difficulty of manufacturing the micro-force measuring device 100 .

[0094] In some embodiments of the present invention, Figure 1 As shown, the micro-force measurement device 100 further includes: a third force-sensitive element 53, which is connected between the device body 10 and the force-loading probe 40 and moves along the first direction (ie Figure 1 In the Z direction shown in the figure), the third force-sensitive element 53 is located between the first force-sensitive element 51 and the second force-sensitive element 52.

[0095] The third force-sensitive element 53 is connected between the device body 10 and the force-applying probe 40. As some embodiments of the present application, along the first direction (ie Figure 1 The third force sensitive element 53 has two opposite ends, one end of which is connected to the force loading probe 40, and the other end of which is connected to the device body 10.

[0096] And, along the first direction (ie Figure 1 The third force-sensitive element 53 is located between the first force-sensitive element 51 and the second force-sensitive element 52. The third force-sensitive element 53 has elastic force. The third force-sensitive element 53 can be but is not limited to being constructed as a spring-like structure. The force-loading probe 40 moves in the first direction (i.e., Figure 1 The movement of the first force-sensitive element 51 and the third force-sensitive element 53 relative to the device body 10 in the Z direction as shown can cause elastic deformation of the first force-sensitive element 51 and the third force-sensitive element 53. The force and displacement of the force direction of the third force-sensitive element 53 within the elastic range satisfy the Hooke's law described above.

[0097] By making the micro-force measuring device 100 also include the third force-sensitive element 53, it is possible to smoothly and smoothly switch to the large range when the displacement of the force loading probe 40 approaches the limit of the small range. In addition, such a setting can also reduce the risk of overloading the micro-force measuring device 100 at the small range, which is conducive to improving the reliability of the micro-force measuring device 100.

[0098] In some embodiments of the present invention, Figure 1As shown, the device body 10 includes: a first sub-body 11, a second sub-body 12, and a third sub-body 13. The second sub-body 12 and the third sub-body 13 are both arranged on the inner side of the first sub-body 11. The first force-sensitive element 51 is connected between the first sub-body 11 and the force-loading probe 40. The second force-sensitive element 52 is connected between the displacement transmission member 60 and the third sub-body 13. The third force-sensitive element 53 is connected between the third sub-body 13 and the force-loading probe 40. The first electrode 21 and the third electrode 31 are both connected to the second sub-body 12.

[0099] In some embodiments of the present application, the first sub-body 11, the second sub-body 12, and the third sub-body 13 are integrally formed. The second sub-body 12 and the third sub-body 13 are both disposed inside the first sub-body 11. In some embodiments of the present application, the first sub-body 11 can define a storage space, and the second sub-body 12 and the third sub-body 13 are both disposed in the storage space and inside the first sub-body 11.

[0100] like Figure 1 As shown, the first force-sensitive element 51 is connected between the first sub-body 11 and the force-loading probe 40, the second force-sensitive element 52 is connected between the displacement transmission member 60 and the third sub-body 13, the third force-sensitive element 53 is connected between the third sub-body 13 and the force-loading probe 40, and the first electrode plate 21 and the third electrode plate 31 are both arranged on the second sub-body 12.

[0101] Such a setting can make the design of the device body 10 reasonable and reduce the difficulty of manufacturing the device body 10. Moreover, such a setting can ensure that when the force loading probe 40 moves a distance less than a preset distance, only the first force sensitive element 51 and the third force sensitive element 53 are deformed. When the force loading probe 40 moves a distance greater than the preset distance, the first force sensitive element 51, the second force sensitive element 52, and the third force sensitive element 53 are all deformed, thereby realizing the conversion from a small range to a large range, which is beneficial to improving the reliability of the micro-force measuring device 100.

[0102] In some embodiments of the present invention, Figure 1 As shown, the first parallel plate capacitor 20, the second parallel plate capacitor 30, the first force sensitive element 51, the second force sensitive element 52, and the third force sensitive element 53 are all two and are all along the second direction (ie Figure 1 The X direction shown in the figure) is arranged at intervals, and the second direction (i.e. Figure 1 The X direction shown) and the first direction (ie Figure 1 The Z direction shown is perpendicular to the reference numeral 1.

[0103] The number of the first parallel plate capacitor 20, the second parallel plate capacitor 30, the first force sensitive element 51, the second force sensitive element 52, and the third force sensitive element 53 are all two, and the two first parallel plate capacitors 20 are arranged along the second direction (i.e. Figure 1 The two second parallel plate capacitors 30 are spaced apart along the second direction (ie, the X direction shown in FIG. Figure 1 The two first force-sensitive elements 51 are spaced apart along the second direction (ie, the X direction shown in FIG. Figure 1 The two second force-sensitive elements 52 are spaced apart along the second direction (ie, the X direction shown in FIG. Figure 1 The two third force-sensitive elements 53 are spaced apart along the second direction (ie, the X direction shown in FIG. Figure 1 The second direction (i.e. Figure 1 The X direction shown) and the first direction (ie Figure 1 The Z direction shown) are perpendicular to each other.

[0104] Such a configuration can significantly improve the measuring range and resolution of the micro-force measuring device 100 , which is beneficial to improving the measurement accuracy of the micro-force measuring device 100 .

[0105] In some embodiments of the present invention, the force loading probe 40 , the first sub-body 11 , and the third sub-body 13 are connected to a ground terminal, and the second sub-body 12 is connected to a voltage terminal.

[0106] Among them, the grounding end can be constructed as but not limited to a substrate, and the material of the substrate can be but not limited to a silicon wafer, a ceramic wafer or a glass wafer, etc. As some embodiments of the present application, the grounding end is constructed as a substrate, and the material of the substrate is a silicon wafer.

[0107] The force loading probe 40 , the first sub-body 11 , and the third sub-body 13 are connected to the ground terminal. In some embodiments of the present application, the force loading probe 40 , the first sub-body 11 , and the third sub-body 13 are connected to the ground terminal via a wire.

[0108] The second sub-body 12 is connected to the voltage terminal so that the first electrode plate 21 and the third electrode plate 31 provided on the second sub-body 12 are charged. The voltage terminal to which the second sub-body 12 is connected can be a positive pole or a negative pole. As some embodiments of the present application, the second sub-body 12 is connected to the positive pole of the voltage terminal so that the first electrode plate 21 and the third electrode plate 31 are positively charged. As some embodiments of the present application, the second sub-body 12 is connected to the negative pole of the voltage terminal so that the first electrode plate 21 and the third electrode plate 31 are negatively charged.

[0109] Such a configuration can improve the measurement safety of the micro-force measurement device 100 , reduce the risk of leakage and short circuit in the micro-force measurement device 100 , and reduce the risk of inaccurate measurement caused by leakage, thereby improving the stability and measurement accuracy of the micro-force measurement device 100 .

[0110] As some embodiments of the present application, when micro-force measurement is required, first select a micro-force measurement device 100 with a suitable range (such as Figure 6As shown, the elastic stiffness of the first force sensitive element 51 , the second force sensitive element 52 , and the third force sensitive element 53 are different, and the measuring range of the micro-force measuring device 100 is different).

[0111] Next, the micro-force measuring device 100 is connected to the capacitance measuring circuit, and the force to be measured is applied to the force loading probe 40, and the capacitance of the micro-force measuring device 100 is detected when the force loading probe 40 is subjected to force movement. Specifically, the force loading probe 40 is subjected to force in the first direction (i.e., Figure 1 The force loading probe 40 moves in the first direction (ie, the Z direction shown in FIG. Figure 1 Movement in the Z direction (as shown) can change the distance between the first electrode plate 21 and the second electrode plate 22. The change in the distance between the first electrode plate 21 and the second electrode plate 22 can change the capacitance of the first parallel plate capacitor 20.

[0112] Next, the displacement of the force-loading probe 40 under the force to be measured is determined based on the detected capacitance.

[0113] Finally, the force applied to the force loading probe 40 is determined based on the elastic stiffness of the first force sensitive element, the second force sensitive element 52, and the third force sensitive element 53 and the displacement of the force loading probe 40 under force. It should be noted that if the moving distance of the force loading probe 40 is less than the preset distance, the force to be measured can be obtained based on the elastic stiffness of the first force sensitive element 51 and the third force sensitive element 53, so as to realize the micro-force measuring device 100 to measure in a small range. If the moving distance of the force loading probe 40 is greater than the preset distance, the force loading probe 40 will contact the displacement transmission member 60, and the displacement transmission member 60 will move together with the force loading probe 40, so that the micro-force measuring device 100 enters a large range. The force can be obtained based on the elastic stiffness of the first force sensitive element 51, the second force sensitive element 52, and the third force sensitive element 53, so as to realize the micro-force measuring device 100 to measure in a large range.

[0114] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0115] In the description of the present invention, "first feature" or "second feature" may include one or more of the features.

[0116] In the description of the present invention, "plurality" means two or more.

[0117] In the description of the present invention, a first feature being “on” or “under” a second feature may include the first and second features being in direct contact with each other, or the first and second features not being in direct contact with each other but being in contact with each other via another feature therebetween.

[0118] In the description of the present invention, “on”, “above” and “above” a first feature of a second feature include the first feature being directly above and obliquely above the second feature, or simply means that the first feature is horizontally higher than the second feature.

[0119] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that a specific feature, structure, material, or characteristic described in conjunction with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, illustrative uses of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0120] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to the embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the claims and their equivalents.

Claims

1. A micro-force measuring device, characterized in that: include: device body; a first parallel plate capacitor and a second parallel plate capacitor, wherein the first parallel plate capacitor comprises a first plate and a second plate, and the second parallel plate capacitor comprises a third plate and a fourth plate, wherein the first plate and the third plate are connected to the device body; A force-loading probe, a first force-sensitive element, a second force-sensitive element, and a displacement transmission member. The second electrode plate is connected to the force-loading probe, the fourth electrode plate is connected to the displacement transmission member, the first force-sensitive element is connected between the device body and the force-loading probe, the second force-sensitive element is connected between the displacement transmission member and the device body, the force-loading probe is movable relative to the device body along a first direction, and the displacement transmission member is constructed so that after the force-loading probe moves a preset distance along the first direction, it moves together with the force-loading probe.

2. The micro-force measuring device according to claim 1, characterized in that: There are multiple first electrode plates, multiple second electrode plates, multiple third electrode plates, and multiple fourth electrode plates. Along the first direction, multiple first electrode plates and multiple second electrode plates are alternately arranged, and multiple third electrode plates and multiple fourth electrode plates are alternately arranged.

3. The micro-force measuring device according to claim 2, characterized in that: The spacing between at least one pair of adjacent first electrode plates and second electrode plates is different from the spacing between another pair of adjacent first electrode plates and second electrode plates; And / or, the distance between at least one pair of adjacent third electrode plates and the fourth electrode plates is different from the distance between another pair of adjacent third electrode plates and the fourth electrode plates.

4. The micro-force measuring device according to claim 1, characterized in that: The force loading probe has a first mating portion, and the displacement transmission member has a second mating portion. After the force loading probe moves a preset distance along the first direction, the first mating portion can cooperate with the second mating portion to enable the displacement transmission member to move together with the force loading probe.

5. The micro-force measuring device according to claim 4, characterized in that: The first mating portion includes: a first sub-portion and a second sub-portion, the second sub-portion is connected to the first sub-portion, along the first direction, at least a portion of the first sub-portion is located on one side of the second mating portion and corresponds to the second mating portion, and at least a portion of the second sub-portion is located on the other side of the second mating portion and corresponds to the second mating portion.

6. The micro-force measuring device according to claim 1, characterized in that: The material of the micro-force measuring device is amorphous alloy.

7. The micro-force measuring device according to claim 1, characterized in that: The first parallel plate capacitor and the second parallel plate capacitor are spaced apart along the first direction. The first force sensitive element is located at one end of the first parallel plate capacitor facing away from the second parallel plate capacitor. The second force sensitive element is located at one end of the second parallel plate capacitor facing away from the first parallel plate capacitor.

8. The micro-force measuring device according to claim 7, characterized in that: Also includes: A third force-sensitive element is connected between the device body and the force-loading probe, and along the first direction, the third force-sensitive element is located between the first force-sensitive element and the second force-sensitive element.

9. The micro-force measuring device according to claim 8, characterized in that: The device body includes: a first sub-body, a second sub-body, and a third sub-body. The second sub-body and the third sub-body are both arranged on the inside of the first sub-body. The first force-sensitive element is connected between the first sub-body and the force-loading probe. The second force-sensitive element is connected between the displacement transmission part and the third sub-body. The third force-sensitive element is connected between the third sub-body and the force-loading probe. The first electrode plate and the third electrode plate are both connected to the second sub-body.

10. The micro-force measuring device according to claim 9, characterized in that: There are two of each of the first parallel plate capacitor, the second parallel plate capacitor, the first force sensitive element, the second force sensitive element, and the third force sensitive element, and they are all spaced apart along a second direction, and the second direction is perpendicular to the first direction; And / or, the force loading probe, the first sub-body, and the third sub-body are connected to a ground terminal, and the second sub-body is connected to a voltage terminal.

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