All-quartz three-dimensional spiral groove torquer framework and manufacturing process thereof

Abstract

The all-quartz three-dimensional spiral groove torquer framework comprises a three-dimensional spiral groove torquer framework body, the three-dimensional spiral groove torquer framework body is an equal-diameter cylindrical polished pipe body with the left side end face and the right side end face being parallel, the pipe body is divided into a left area, a middle area and a right area in the axis direction, and the left area and the right area are torquer coil containing areas; the middle area comprises a skeleton laser welding area and a connecting linear groove, the skeleton laser welding area is welded with a pendulous reed and skeleton connecting area of the accelerometer pendulous reed, skeleton spiral grooves are uniformly distributed on the inner and outer cylindrical surfaces of the left area and the right area of the tube body, and the torquer coil is wound on the skeleton spiral grooves through the connecting linear groove. The two-way spiral groove array is constructed, the design of the radial heat dissipation channels on the end face is combined, the space limitation of traditional two-dimensional winding is broken through, the structure can achieve coil space expansion, turn number multiplication, resistance reduction and heat dissipation efficiency improvement, and the measuring range, the full-temperature performance, the quick starting performance and the long-term performance of the accelerometer are remarkably improved.

Description

Technical Field

[0001] The present invention relates to the technical field of sensors, and in particular to an all-quartz three-dimensional spiral groove torquer skeleton and a manufacturing process thereof. Background Art

[0002] The quartz flexible accelerometer is a high-precision sensor for measuring acceleration and a key component of inertial systems. It was first developed by the American company Sundstein in the 1970s. A quartz flexible accelerometer consists of a sensitive movement and a housing. The sensitive movement comprises a pendulum, an upper magnetic ring, a lower magnetic ring, and a connecting ring. The pendulum is sandwiched between the upper and lower magnetic rings, which are then secured with the connecting ring to form a stable sandwich structure. The pendulum consists of a quartz pendulum, a flexible support structure made of fused quartz, and two torque coils. The torque coils are made of enameled wire wound around a bobbin and then bonded to the pendulum by gluing. The bobbin is typically made of aluminum alloy and insulated.

[0003] The torque coils of traditional quartz flexure accelerometers have the following technical bottlenecks: 1) In ordinary torque coil structures, the coil is only wound on the surface of the frame. Due to space limitations, it is difficult to increase the number of coil turns, resulting in a limited range; 2) The traditional winding method results in a high resistance value (>30Ω), which affects the dynamic response; 3) The difference in thermal expansion coefficients (Δα≥1.5×10⁻) between the enameled wire, aluminum alloy frame, and adhesive 5 / ℃) leads to interface stress concentration; 4) The contact area between the coil and the frame is small, the heat dissipation path is single, and the long-term working temperature drift makes it difficult to meet the requirements of high-precision navigation systems.

[0004] To address these issues, CN118501497B discloses an all-quartz sensitive component for an accelerometer, in which the torque coil is composed of a metal film conductor; CN115792279A discloses an integrated all-quartz mass pendulum, in which a metal film layer is coated on the outer ring surface of the skeleton to form a torque coil; both patents are torquer structures using metal film conductors, but the quartz surface is plated with a limited number of turns; processing is difficult when the number of turns is high, and whether it is coating or 3D printing process, there will be problems such as interlayer short circuit and heat dissipation; and due to process limitations, the film layer thickness is thin and the resistance value is large; the bonding force is limited and it is extremely easy to damage.

[0005] In response to the above technical problems, the present invention proposes an all-quartz three-dimensional spiral groove torquer skeleton and a manufacturing process thereof. Summary of the Invention

[0006] The purpose of the present invention is to overcome the shortcomings of the existing technology, provide an all-quartz three-dimensional spiral groove torquer skeleton and its manufacturing process, construct a bidirectional spiral groove array, and combine the end face radial heat dissipation channel design to break through the spatial limitations of traditional two-dimensional winding. This structure can achieve coil space expansion, multiplication of the number of turns, reduction of resistance and improvement of heat dissipation efficiency, avoid the use of adhesives, and is suitable for high-precision quartz flexible accelerometers, significantly improving the accelerometer's range, full-temperature performance, fast startup performance and long-term performance.

[0007] The present invention solves the technical problem by the following technical solutions: An all-quartz three-dimensional spiral groove torquer skeleton, including a three-dimensional spiral groove torquer skeleton, the three-dimensional spiral groove torquer skeleton is an equal-diameter cylindrical polished tube body with parallel left and right end faces, the tube body is divided into a left area, a middle area and a right area along the axial direction, the left area and the right area are both torquer coil accommodating areas, the middle area includes a skeleton laser welding area and a connecting linear groove, the skeleton laser welding area is welded to the pendulum of the accelerometer pendulum and the skeleton connection area, the inner and outer cylindrical surfaces of the left and right areas of the tube body are evenly distributed with skeleton spiral grooves, and the torquer coil is wound on the skeleton spiral groove through the connecting linear grooves.

[0008] Furthermore, a connecting linear groove is provided on the inner cylindrical surface of the middle area of ​​the tube body of the three-dimensional spiral groove torquer skeleton, and the connecting linear groove connects the skeleton spiral grooves evenly distributed on the inner cylindrical surfaces of the left and right areas of the tube body.

[0009] Furthermore, the parallel end faces on the left and right sides of the tube body of the three-dimensional spiral groove torquer skeleton are symmetrically provided with connecting radial straight grooves along the radial direction of the tube body, and the connecting radial straight grooves respectively connect the skeleton spiral grooves evenly distributed on the inner and outer cylindrical surfaces of the left area of ​​the tube body and the skeleton spiral grooves evenly distributed on the inner and outer cylindrical surfaces of the right area of ​​the tube body.

[0010] Furthermore, the pendulum and frame connection area and the frame laser welding area of ​​the accelerometer pendulum are both contact surfaces between the outer cylindrical surface of the middle area of ​​the tube body of the three-dimensional spiral groove torquer frame and the inner diameter cylindrical surface of the cylindrical through hole of the accelerometer pendulum.

[0011] Furthermore, the skeleton spiral grooves on the inner and outer cylindrical surfaces of the left and right areas of the tube body of the three-dimensional spiral groove torquer skeleton are symmetrically distributed, and the cross-section of the skeleton spiral groove is a U-shaped spiral continuous groove.

[0012] A manufacturing process for an all-quartz three-dimensional spiral groove torquer skeleton, characterized by comprising the following steps: Step 1: Segment the pipe body: Divide the pipe body into left, middle and right areas; Step 2: Laser modification and wet etching to process the skeleton spiral grooves in the left and right areas and the connecting linear grooves in the middle area; Step 3, end face grooving: Use a diamond blade to machine connecting radial straight grooves on the parallel end faces of the left and right sides of the tube body of the three-dimensional spiral groove torquer skeleton. The depth of the connecting radial straight grooves is 80μm. Step 4: Surface treatment: The three-dimensional spiral groove torquer skeleton is surface treated by chemical polishing, with a surface roughness of Ra < 0.1 μm.

[0013] Furthermore, in step 1, the left area and the right area are 3 mm long, and the middle area is 0.6 mm long.

[0014] Furthermore, in step 2, a femtosecond laser with a pulse width of 100 fs and a repetition frequency of 1 kHz is used to process the skeleton spiral groove. The groove depth of the skeleton spiral groove is 80 μm, the groove width of the skeleton spiral groove is 20 μm, the pitch of the skeleton spiral groove is 20 μm, the groove wall roughness Ra of the skeleton spiral groove is ≤ 0.05 μm, and the groove bottom R angle of the skeleton spiral groove is < 40 μm.

[0015] The advantages and positive effects of the present invention are: 1. The present invention adopts a full quartz three-dimensional spiral groove torquer skeleton. The inner and outer cylindrical surfaces of the left and right areas of the three-dimensional spiral groove torquer skeleton are evenly distributed with skeleton spiral grooves. The torquer coil is wound on the skeleton spiral grooves, which can realize bidirectional winding of the torquer coil, greatly increase the number of turns, and expand the accelerometer range.

[0016] 2. The all-quartz three-dimensional spiral groove torquer skeleton of the present invention avoids the use of adhesives, reduces the stress caused by the difference in thermal expansion coefficients of various materials, improves the full-temperature stability of the accelerometer, avoids the creep of adhesives, and improves the long-term performance of the accelerometer.

[0017] 3. The present invention provides a full quartz three-dimensional spiral groove torquer skeleton. The spiral groove structure of the skeleton reduces the insulation thickness between coil layers, reduces parasitic resistance, and improves the stability of the accelerometer.

[0018] 4. The present invention's all-quartz three-dimensional spiral groove torquer skeleton has spiral grooves that increase the surface area. Combined with the high thermal conductivity of quartz material, it effectively improves the heat dissipation efficiency and enhances the rapid startup performance of the accelerometer.

[0019] 5. The present invention provides a full quartz three-dimensional spiral groove torquer skeleton, in which the spiral grooves are realized by precision processing, such as ultrafast laser modification and wet / dry etching. Its symmetrical structure facilitates mass production.

[0020] 6. The present invention provides a full quartz three-dimensional spiral groove torquer skeleton. The inner cylindrical surface of the middle area of ​​the tube body of the three-dimensional spiral groove torquer skeleton is provided with a connecting linear groove. The connecting linear groove 213 connects the skeleton spiral grooves evenly distributed on the inner cylindrical surfaces of the left and right areas of the tube body. The torquer coil is wound on the skeleton spiral grooves evenly distributed on the inner and outer cylindrical surfaces of the left and right areas of the tube body, and is connected as a whole through the connecting linear grooves, thereby ensuring the continuity of the torquer coil, improving the structural symmetry, and improving the nonlinear performance of the accelerometer.

[0021] 7. The present invention provides a full quartz three-dimensional spiral groove torquer skeleton. The parallel end faces on the left and right sides of the tube body of the three-dimensional spiral groove torquer skeleton are symmetrically provided with connecting radial straight grooves along the radial direction of the tube body. The connecting radial straight grooves are respectively connected to the skeleton spiral grooves uniformly distributed on the inner and outer cylindrical surfaces of the left area of ​​the tube body and the skeleton spiral grooves uniformly distributed on the inner and outer cylindrical surfaces of the right area of ​​the tube body. The torquer coil is respectively wound on the skeleton spiral grooves uniformly distributed on the inner and outer cylindrical surfaces of the left area of ​​the tube body and the skeleton spiral grooves uniformly distributed on the inner and outer cylindrical surfaces of the right area of ​​the tube body through the connecting radial straight grooves, and is connected into one through the connecting straight grooves, thereby ensuring the continuity of the torquer coil, improving the structural symmetry, and improving the nonlinear performance of the accelerometer.

[0022] 8. The present invention provides an all-quartz three-dimensional spiral groove torquer skeleton and its manufacturing process. The inner and outer cylindrical surfaces of the left and right areas of the tube body of the three-dimensional spiral groove torquer skeleton are evenly distributed with skeleton spiral grooves to construct a bidirectional spiral groove array. Combined with the end face radial heat dissipation channel design, it breaks through the spatial limitations of traditional two-dimensional winding. This structure can achieve coil space expansion, multiplication of the number of turns, reduction of resistance and improvement of heat dissipation efficiency, avoid the use of adhesives, and is suitable for high-precision quartz flexible accelerometers, significantly improving the accelerometer's range, full-temperature performance, rapid startup performance and long-term performance. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is a cross-sectional view of the connection between the all-quartz three-dimensional spiral groove torquer skeleton and the accelerometer pendulum of the present invention; Figure 2 This is a schematic structural diagram of the all-quartz three-dimensional spiral groove torquer skeleton of the present invention; Figure 3 Schematic cross-section of the all-quartz three-dimensional spiral groove torquer skeleton of the present invention; Figure 4 It is a partial cross-sectional schematic diagram of the combination of the framework spiral groove and the metal film layer conductor of the framework of the all-quartz three-dimensional spiral groove torquer of the present invention; Figure 5 This is a schematic cross-sectional view of the connecting linear grooves of the all-quartz three-dimensional spiral groove torquer skeleton of the present invention; Figure 6 This is an enlarged view of the radial straight grooves connecting the skeleton of the all-quartz three-dimensional spiral groove torquer of the present invention; In the picture: 101. Torquer coil housing area; 102. Skeleton laser welding area; 201. Accelerometer pendulum; 202. 3D spiral groove torquer skeleton; 203. Pendulum and skeleton connection area; 211. Metal film conductor; 212. Skeleton spiral groove; 213. Connecting linear groove; 214. Connecting radial straight groove. DETAILED DESCRIPTION

[0024] The present invention will be further described in detail below through specific examples. The following examples are only illustrative and not restrictive, and the scope of protection of the present invention cannot be limited thereto.

[0025] like Figures 1 to 6 As shown, an all-quartz three-dimensional spiral groove torquer skeleton includes a three-dimensional spiral groove torquer skeleton 202. The three-dimensional spiral groove torquer skeleton 202 is an equal-diameter cylindrical polished tube body with parallel left and right end faces. The tube body is divided into a left area, a middle area and a right area along the axial direction. The left area and the right area are both torquer coil accommodating areas 101. The middle area includes a skeleton laser welding area 102 and a connecting linear groove 213. The skeleton laser welding area 102 is welded to the pendulum of the accelerometer pendulum 201 and the skeleton connection area 203. The inner and outer cylindrical surfaces of the left and right areas of the tube body are evenly distributed with skeleton spiral grooves 212. The torquer coil is wound on the skeleton spiral groove 212 through the connecting linear groove 213.

[0026] The inner cylindrical surface of the middle area of ​​the tube body of the three-dimensional spiral groove torquer skeleton 202 is provided with a connecting linear groove 213, and the connecting linear groove 213 is connected to the skeleton spiral grooves 212 evenly distributed on the inner cylindrical surfaces of the left and right areas of the tube body. The torquer coil is wound on the skeleton spiral grooves 212 evenly distributed on the inner and outer cylindrical surfaces of the left and right areas of the tube body, and is connected as a whole through the connecting linear grooves 213, thereby ensuring the continuity of the torquer coil, improving the structural symmetry, and improving the nonlinear performance of the accelerometer.

[0027] The parallel end faces on the left and right sides of the tube body of the three-dimensional spiral groove torquer skeleton 202 are symmetrically provided with connecting radial straight grooves 214 along the radial direction of the tube body. The connecting radial straight grooves 214 are respectively connected to the skeleton spiral grooves 212 evenly distributed on the inner and outer cylindrical surfaces of the left area of ​​the tube body and the skeleton spiral grooves 212 evenly distributed on the inner and outer cylindrical surfaces of the right area of ​​the tube body. The torquer coil is respectively wound on the skeleton spiral grooves 212 evenly distributed on the inner and outer cylindrical surfaces of the left area of ​​the tube body and the skeleton spiral grooves 212 evenly distributed on the inner and outer cylindrical surfaces of the right area of ​​the tube body through the connecting radial straight grooves, and is connected into one through the connecting straight grooves, thereby ensuring the continuity of the torquer coil, improving the structural symmetry, and improving the nonlinear performance of the accelerometer.

[0028] The pendulum and frame connection area 203 and the frame laser welding area 102 are both contact surfaces between the outer cylindrical surface of the middle area of ​​the tube body of the three-dimensional spiral groove torquer frame 202 and the inner diameter cylindrical surface of the cylindrical through hole of the accelerometer pendulum 201, which are used to connect and weld the accelerometer pendulum 201 and the three-dimensional spiral groove torquer frame 202.

[0029] The skeleton spiral grooves 212 are evenly distributed on the inner and outer cylindrical surfaces of the left and right areas of the tube body of the three-dimensional spiral groove torquer skeleton 202. Their cross-sections are all U-shaped spiral continuous grooves. The skeleton spiral grooves 212 extend to the edge of the middle area of ​​the tube body and terminate to form a continuous torquer coil winding channel.

[0030] The connecting straight grooves 213 opened on the inner cylindrical surface of the middle area of ​​the tube body of the three-dimensional spiral groove torquer skeleton 202 and the connecting radial straight grooves 214 opened symmetrically along the radial direction on the parallel end surfaces of the left and right sides of the tube body are consistent with the specifications of the skeleton spiral grooves 212 evenly distributed on the inner and outer cylindrical surfaces of the left and right areas of the tube body, ensuring the lead-out or connection of the torquer coil.

[0031] The width of the middle area of ​​the tube of the three-dimensional spiral groove torquer skeleton 202 is the same as the thickness of the cylindrical through hole of the accelerometer pendulum 201 .

[0032] The three-dimensional spiral groove torquer skeleton 202 is constructed from a high-purity quartz glass tube, precision-ground into a polished cylindrical tube with parallel left and right end faces. The torquer coil is wound around the uniformly distributed spiral grooves 212 on the outer cylindrical surfaces of the left and right sections of the tube, respectively. The torquer coil is introduced and wound around the uniformly distributed spiral grooves 212 on the inner cylindrical surfaces of the left and right sections of the tube, respectively, through connecting radial straight grooves 214. The coils are then connected together through connecting linear grooves 213. Metal film conductors 211 are inserted into the spiral grooves 212 of the three-dimensional spiral groove torquer skeleton 202 to provide electromagnetic force for the pendulum component. The three-dimensional spiral groove torquer skeleton 202 with the torquer coil wound around it is passed through the center hole of the accelerometer pendulum 201, so that the middle area of ​​the tube body of the three-dimensional spiral groove torquer skeleton 202 is located at the center of the accelerometer pendulum 201, and the symmetry of the left and right areas of the tube body of the three-dimensional spiral groove torquer skeleton 202 is ensured. Laser welding is used to weld the three-dimensional spiral groove torquer skeleton 202 and the accelerometer pendulum 201 through the pendulum and skeleton connection area 203 and the skeleton laser welding area 102 to enhance the welding strength.

[0033] The present invention provides a full quartz three-dimensional spiral groove torquer skeleton, wherein the inner and outer cylindrical surfaces of the left and right areas of the tube body of the three-dimensional spiral groove torquer skeleton are evenly distributed with skeleton spiral grooves. The torquer coil is wound on the skeleton spiral grooves, which can realize bidirectional winding of the torquer coil, greatly increase the number of turns, and expand the accelerometer range.

[0034] The all-quartz three-dimensional spiral groove torquer skeleton of the present invention avoids the use of adhesives, reduces stress caused by differences in thermal expansion coefficients of multiple materials, improves the full-temperature stability of the accelerometer, avoids creep of the adhesive, and improves the long-term performance of the accelerometer.

[0035] The present invention provides an all-quartz three-dimensional spiral groove torquer skeleton. The skeleton spiral groove structure reduces the insulation thickness between coil layers, reduces parasitic resistance, and improves the stability of the accelerometer. The skeleton spiral groove increases the surface area, and combined with the high thermal conductivity of the quartz material, effectively improves the heat dissipation efficiency and the fast startup performance of the accelerometer. The skeleton spiral groove is achieved through precision processing, such as ultrafast laser modification and wet / dry etching, and its symmetrical structure facilitates mass production.

[0036] A manufacturing process for an all-quartz three-dimensional spiral groove torquer skeleton comprises the following steps: Step 1: Segment the tube: Divide the tube into a left area, a middle area, and a right area; the left area and the right area are 3 mm long, and the middle area is 0.6 mm long.

[0037] Step 2: Laser modification and wet etching to process the skeleton spiral grooves 212 in the left and right areas and the connecting linear grooves 213 in the middle area; A femtosecond laser is used with a pulse width of 100fs and a repetition frequency of 1kHz to process the skeleton spiral groove 212. The groove depth of the skeleton spiral groove 212 is 80μm, the groove width of the skeleton spiral groove 212 is 20μm, the pitch of the skeleton spiral groove 212 is 20μm, the groove wall roughness Ra of the skeleton spiral groove 212 is ≤0.05μm, and the groove bottom R angle of the skeleton spiral groove 212 is <40μm.

[0038] Step 3, end face grooving: Use a diamond blade to machine connecting radial straight grooves 214 on the parallel end faces of the left and right sides of the tube body of the three-dimensional spiral groove torquer skeleton 202. The depth of the connecting radial straight grooves 214 is 80 μm.

[0039] Step 4: Surface Treatment: Chemically polish the 3D spiral groove torquer frame 202 to a surface roughness of Ra < 0.1 μm. The 3D spiral groove torquer frame 202 has spiral grooves 212 evenly distributed on the inner and outer cylindrical surfaces of the left and right sections of the tube. The cross-section of the spiral grooves 212 is a U-shaped continuous spiral groove. The groove cross-section is polished to a smooth surface, ensuring assembly accuracy.

[0040] Example: Use high-purity quartz glass tube OD2.8mm×ID2.2mm: A manufacturing process for an all-quartz three-dimensional spiral groove torquer skeleton comprises the following steps: Step 1: Segment the tube: Divide the tube into a left area, a middle area, and a right area; the left area and the right area are 3 mm long, and the middle area is 0.6 mm long.

[0041] Step 2: Laser modification and wet etching to process the skeleton spiral grooves 212 in the left and right areas and the connecting linear grooves 213 in the middle area; A femtosecond laser is used with a pulse width of 100fs and a repetition frequency of 1kHz to process the skeleton spiral groove 212. The groove depth of the skeleton spiral groove 212 is 80μm, the groove width of the skeleton spiral groove 212 is 20μm, the pitch of the skeleton spiral groove 212 is 20μm, the groove wall roughness Ra of the skeleton spiral groove 212 is ≤0.05μm, and the groove bottom R angle of the skeleton spiral groove 212 is <40μm.

[0042] Step 3, end face grooving: Use a diamond blade to machine connecting radial straight grooves 214 on the parallel end faces of the left and right sides of the tube body of the three-dimensional spiral groove torquer skeleton 202. The depth of the connecting radial straight grooves 214 is 80 μm.

[0043] Step 4: Surface Treatment: Chemically polish the 3D spiral groove torquer frame 202 to a surface roughness of Ra < 0.1 μm. The 3D spiral groove torquer frame 202 has spiral grooves 212 evenly distributed on the inner and outer cylindrical surfaces of the left and right sections of the tube. The cross-section of the spiral grooves 212 is a U-shaped continuous spiral groove. The groove cross-section is polished to a smooth surface, ensuring assembly accuracy.

[0044] Tests have shown that 300 turns can be wound within a 2.8mm outer diameter constraint, with a coil resistance of 40Ω. The spiral grooves 212 of the skeleton form an annular heat dissipation channel, increasing the heat conduction area by 210%.

[0045] The present invention discloses an all-quartz three-dimensional spiral groove torquer skeleton and its manufacturing process. The inner and outer cylindrical surfaces of the left and right areas of the tube body of the three-dimensional spiral groove torquer skeleton 202 are evenly distributed with skeleton spiral grooves 212, forming a bidirectional spiral groove array. Combined with the end face radial heat dissipation channel design, this structure breaks through the spatial limitations of traditional two-dimensional winding. This structure can achieve coil space expansion, multiplication of the number of turns, reduction of resistance and improvement of heat dissipation efficiency, avoiding the use of adhesives. It is suitable for high-precision quartz flexible accelerometers and significantly improves the accelerometer's range, full-temperature performance, rapid startup performance and long-term performance.

[0046] Although the embodiments and drawings of the present invention are disclosed for illustrative purposes, those skilled in the art will understand that various substitutions, changes and modifications are possible without departing from the spirit and scope of the present invention and the appended claims. Therefore, the scope of the present invention is not limited to the contents disclosed in the embodiments and drawings.

Claims

1. An all-quartz three-dimensional spiral groove torquer skeleton, characterized in that: The invention comprises a three-dimensional spiral groove torquer skeleton, wherein the three-dimensional spiral groove torquer skeleton (202) is an equal-diameter cylindrical polished tube body with parallel left and right end faces, and the tube body is divided into a left area, a middle area and a right area along the axial direction, wherein the left area and the right area are both torquer coil accommodating areas (101), the middle area comprises a skeleton laser welding area (102) and a connecting linear groove (213), the skeleton laser welding area (102) is welded to the pendulum of the accelerometer pendulum (201) and the skeleton connecting area (203), the skeleton spiral grooves (212) are evenly distributed on the inner and outer cylindrical surfaces of the left and right areas of the tube body, and the torquer coil is wound on the skeleton spiral groove (212) through the connecting linear groove (213).

2. The all-quartz three-dimensional spiral groove torquer skeleton according to claim 1, characterized in that: The inner cylindrical surface of the middle area of ​​the tube body of the three-dimensional spiral groove torquer skeleton (202) is provided with a connecting linear groove (213), and the connecting linear groove (213) connects the skeleton spiral grooves (212) evenly distributed on the inner cylindrical surfaces of the left and right areas of the tube body.

3. The all-quartz three-dimensional spiral groove torquer skeleton according to claim 1, characterized in that: The parallel end surfaces on the left and right sides of the tube body of the three-dimensional spiral groove torquer skeleton (202) are symmetrically provided with connecting radial straight grooves (214) along the radial direction of the tube body, and the connecting radial straight grooves (214) respectively connect the skeleton spiral grooves (212) evenly distributed on the inner and outer cylindrical surfaces of the left area of ​​the tube body and the skeleton spiral grooves (212) evenly distributed on the inner and outer cylindrical surfaces of the right area of ​​the tube body.

4. The all-quartz three-dimensional spiral groove torquer skeleton according to claim 1, characterized in that: The pendulum and frame connection area (203) and the frame laser welding area (102) of the accelerometer pendulum (201) are both contact surfaces between the outer cylindrical surface of the middle area of ​​the tube body of the three-dimensional spiral groove torquer frame (202) and the inner diameter cylindrical surface of the cylindrical through hole of the accelerometer pendulum (201).

5. The all-quartz three-dimensional spiral groove torquer skeleton according to claim 1, characterized in that: The skeleton spiral grooves (212) on the inner and outer cylindrical surfaces of the left and right areas of the tube body of the three-dimensional spiral groove torquer skeleton (202) are symmetrically distributed, and the cross-section of the skeleton spiral grooves (212) is a U-shaped spiral continuous groove.

6. The manufacturing process of the all-quartz three-dimensional spiral groove torquer skeleton according to claim 1, characterized in that: The following steps are involved: Step 1: Segment the tube body: Divide the tube body into left, middle and right areas; Step 2: laser modification and wet etching to process the skeleton spiral grooves (212) in the left and right areas and the connecting linear grooves (213) in the middle area; Step 3, end face grooving: using a diamond blade, machining connecting radial straight grooves (214) on the parallel end faces of the left and right sides of the tube body of the three-dimensional spiral groove torquer skeleton (202), the depth of the connecting radial straight grooves (214) being 80 μm; Step 4, surface treatment: The three-dimensional spiral groove torquer skeleton (202) is surface treated by chemical polishing, with a surface roughness Ra < 0.1 μm.

7. The manufacturing process of the all-quartz three-dimensional spiral groove torquer skeleton according to claim 7, characterized in that: In step 1, the left and right areas are 3 mm long, and the middle area is 0.6 mm long.

8. The manufacturing process of the all-quartz three-dimensional spiral groove torquer skeleton according to claim 7, characterized in that: In the step 2, a femtosecond laser is used with a pulse width of 100 fs and a repetition frequency of 1 kHz to process the skeleton spiral groove (212), wherein the groove depth of the skeleton spiral groove (212) is 80 μm, the groove width of the skeleton spiral groove (212) is 20 μm, the pitch of the skeleton spiral groove (212) is 20 μm, the groove wall roughness Ra of the skeleton spiral groove (212) is ≤ 0.05 μm, and the groove bottom R angle of the skeleton spiral groove (212) is < 40 μm.

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