A laser detection device for detecting the inner diameter of a quartz tube

Abstract

The application provides a laser detection device for inner diameter detection of a quartz tube, and relates to the technical field of laser detection.The device comprises a supporting plate, a stand, a fixed frame, a moving mechanism, a clamping and positioning mechanism, a detection mechanism, a lifting mechanism and a laser detection system.The stable clamping and position adjustment of the quartz tube are realized by the moving mechanism, the lifting mechanism and the clamping and positioning mechanism.The laser detection system comprises a laser detection module, a storage module and an output display module, and the inner diameter is calculated by preprocessing a light spot image, extracting features, dynamically monitoring parameter stability and combining the principle of laser triangulation.The problems of unstable positioning and insufficient precision of traditional devices are solved through the collaborative design of the mechanical structure and the laser detection system, the adaptability, high precision and intelligence of the quartz tube inner diameter detection are realized, the detection efficiency and data reliability are improved, and the device is suitable for strict detection requirements of the quality of quartz tubes in various precision fields.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of laser detection, in particular to a laser detection device for inner diameter detection of a quartz tube. BACKGROUND

[0002] The quartz tube is widely applied to precise fields such as semiconductor manufacturing, optical instruments and photovoltaic industry due to the characteristics of high temperature resistance, good light transmission and strong chemical stability. The inner diameter size precision of the quartz tube directly affects the assembly precision and use performance, and therefore the inner diameter needs to be detected with high precision.

[0003] The existing laser detection device has the following defects:

[0004] The positioning mechanism is simple in design and cannot stably clamp quartz tubes of different specifications (diameter and length), and the quartz tubes are prone to shaking during detection, leading to large detection errors.

[0005] The laser detection system lacks a dynamic parameter monitoring and calibration mechanism, and fluctuation of laser intensity and unreasonable frame rate of light spot collection can affect data reliability.

[0006] The inner diameter calculation does not fully consider the refraction effect of light and light spot offset, and the precision is insufficient.

[0007] The detection path is fixed, adaptive encryption detection points for distortion regions are lacking, and it is difficult to comprehensively evaluate the quality of the quartz tube.

[0008] Therefore, there is an urgent need for a laser detection device that can adapt to quartz tubes of different specifications, has high detection precision and is highly intelligent. SUMMARY

[0009] The application aims to solve the defects in the background art and provide a laser detection device for inner diameter detection of a quartz tube.

[0010] To solve the above technical problems, the application provides a laser detection device for inner diameter detection of a quartz tube, which comprises a supporting plate, a stand, a fixed frame, a moving mechanism, a clamping and positioning mechanism, a detection mechanism, a lifting mechanism and a laser detection system. The stand is fixedly connected to one side of the upper part of the supporting plate, and the fixed frame is fixedly connected to the upper middle part of the supporting plate. The moving mechanism is installed in the fixed frame, and the clamping and positioning mechanism is assembled on the moving mechanism. The lifting mechanism is installed on the stand, and the detection mechanism is installed on the lifting mechanism. The detection mechanism comprises an electric telescopic rod fixedly installed on one side of a lifting seat. The telescopic end of the electric telescopic rod is fixedly connected with an L-shaped positioning frame. A laser detector is installed on the L-shaped positioning frame, and a detection port is arranged in the L-shaped positioning frame.

[0011] The laser detection system comprises a laser detection module, a storage module and an output display module.

[0012] The laser detection module comprises a laser preprocessing unit, a laser analysis unit, a dynamic monitoring unit and an inner diameter calculation unit.

[0013] The laser preprocessing unit is used for pre-processing operation on the light spot image data, and the pre-processing operation specifically comprises: removing image noise through Gaussian filtering, extracting light spot edge contour through Canny edge detection algorithm, and optimizing edge continuity through morphological operation.

[0014] The laser analysis unit is used for extracting image features after preprocessing, and the extraction includes identifying light spot center coordinates, calculating light spot offset and analyzing light spot shape distortion degree.

[0015] The dynamic monitoring unit tracks the stability of detection parameters in real time, including fluctuation evaluation value of laser intensity and light spot acquisition frame rate.

[0016] The inner diameter calculation unit calculates the inner diameter according to the feature data of the laser analysis unit and in combination with the principle of laser triangulation.

[0017] The storage module is used for storing detection data and related information, and the output display module is used for displaying information in the storage module.

[0018] As preferred, the application further comprises a data acquisition module, which is electrically connected with the laser detector in the detection mechanism, and the working process of the data acquisition module comprises:

[0019] Image acquisition: through the image acquisition component built in the laser detector, the light spot image formed by the reflection of the laser beam on the inner wall of the quartz tube is captured in real time.

[0020] Parameter acquisition: the laser emission angle and the laser emission intensity during laser emission are synchronously acquired, and the detection position coordinates fed back by the moving mechanism and the lifting mechanism are acquired.

[0021] Data integration and transmission: the acquired light spot image, laser parameters and position coordinates are synchronously integrated with time stamp to form a complete original data set, and the original data set is transmitted to the laser detection module for processing.

[0022] As preferred, the lifting mechanism comprises positioning grooves vertically arranged on both sides of the vertical direction of one end of the column, a linear motor is vertically installed in one of the positioning grooves, the linear motor is slidably and movably installed with a lifting seat on the column, and a limiting plate is fixedly installed at the top end of the column.

[0023] As preferred, the moving mechanism comprises guide rods horizontally fixedly installed on both sides of the fixed frame, a first screw rod rotatably installed between the guide rods, a second servo motor installed on the fixed frame at one end of the first screw rod, the output end of the second servo motor penetrating through the fixed frame and clamped at one end of the first screw rod, a first moving plate sleeved on the first screw rod and the guide rods, and the first moving plate being threadedly connected with the first screw rod.

[0024] As preferred, a fixed block is fixedly installed on the upper end of the first moving plate, a groove is formed downward on the upper end of the fixed block, a second screw rod is horizontally installed in the groove, a first servo motor is installed on the fixed block at one end of the second screw rod, the output end of the first servo motor penetrating through the fixed block and clamped at one end of the second screw rod, and a moving seat is threadedly connected with the second screw rod, the moving seat being installed in the groove of the fixed block.

[0025] As preferred, the clamping and positioning mechanism comprises a clamping groove formed on the moving seat, clamping blocks oppositely installed on both sides of the clamping groove, connecting holes oppositely formed on the lower ends of the clamping blocks, and elastic springs fixedly installed in the connecting holes between the clamping blocks.

[0026] As preferred, the laser analysis unit is used to extract image features after preprocessing, and the specific extraction steps are as follows:

[0027] The edge profile of the preprocessed light spot is subjected to curve fitting, the center of the fitted curve is taken as the light spot center coordinate, and an iterative optimization fitting process is performed, in which the average distance between the actual profile and the fitted ellipse after each fitting is calculated and recorded as a residual error, and if the residual error is greater than a preset threshold, the profile point deviating the most is removed and the fitting is performed again.

[0028] A coordinate system with the center of the laser detection port as the origin is established, a quartz theoretical axis coordinate is preset, the light spot center coordinate is compared with the preset reference axis coordinate, and the offset of the light spot in the horizontal and vertical directions is obtained.

[0029] The actual light spot edge profile is compared with the light spot profile in the ideal state, the shape difference between the actual light spot edge profile and the ideal ellipse profile is calculated, and the shortest distance of each profile point to the ideal ellipse is calculated.

[0030] The difference characteristics of the profile shape are used to judge whether there are protrusions, depressions or irregular deformations on the inner wall of the quartz tube, and the positions of the distorted regions are marked.

[0031] When the average distortion distance or the maximum distortion distance exceeds the corresponding preset distortion threshold, it is determined that there is spot shape distortion; by continuously setting the area where the shortest distance of a number of contour points exceeds the threshold, the area is marked as a distortion area, and the position coordinates are the center coordinates of the distortion area, and the inner wall abnormal position is marked.

[0032] As preferred, the dynamic monitoring unit tracks the stability of the detection parameters in real time, specifically in the following steps:

[0033] Laser intensity fluctuation monitoring: continuously collect the intensity signal of the laser reflected by the inner wall of the quartz tube at fixed time intervals, denoted as an intensity sequence; analyze the change trend of the intensity signal in the intensity sequence in real time, calculate its fluctuation parameters, including intensity average, intensity standard deviation, and relative fluctuation coefficient; weight all parameters in the fluctuation parameters with their preset weights to obtain a fluctuation evaluation value; when the fluctuation evaluation value is greater than the preset stability range threshold, it is determined that the laser intensity fluctuation is abnormal, triggering the automatic calibration mechanism of the laser source; the automatic calibration mechanism is used to adjust the driving current of the laser emitter to restore the intensity to a stable state;

[0034] Spot collection frame rate adjustment: set an initial collection frame rate according to the nominal length of the quartz tube, and set a first collection frame rate and a second collection frame rate according to the initial collection frame rate, wherein the initial collection frame rate is less than the first collection frame rate, and the first collection frame rate is less than the second collection frame rate;

[0035] Region identification and frame rate adjustment: when the distance of the detection position from the two ends of the quartz tube is less than or equal to a preset proportion, it is determined to be an end region that is easy to deform, and the collection frame rate is raised to the first collection frame rate;

[0036] Middle region determination: when the detection position is in the middle of the quartz tube and the laser analysis unit feedbacks that the spot shape is not distorted, the initial collection frame rate is used;

[0037] When the laser analysis unit detects that the spot shape is distorted, the collection frame rate of the region is raised to the second collection frame rate, and the frame rate is maintained within a range of a set length before and after the distorted region; when the detection position leaves the end region or the distorted region, it is restored to the initial collection frame rate.

[0038] As preferred, the inner diameter calculation unit calculates the inner diameter according to the feature data of the laser analysis unit and the principle of laser triangulation, specifically:

[0039] Collect the laser emission angle, the vertical distance from the center of the laser detector 6 detection port to the axis of the quartz tube, the horizontal offset of the spot center perpendicular to the axis direction of the quartz tube, and the refractive index of the quartz material output by the laser analysis unit;

[0040] A geometric model is established based on the principle of laser triangulation. After the laser beam is emitted from the detection port, a light spot is formed by reflection on the inner wall of the quartz tube. The center offset of the light spot is directly related to the position of the reflection point on the inner wall. The offset of the light spot is converted into the inner diameter size through geometric relationship:

[0041] Basic geometric relationship. In an ideal situation where refraction effect is ignored, the radius of the quartz tube is determined by the laser emission angle and the distance;

[0042] Light spot offset correction. When there is a horizontal offset in the center of the light spot, the change in the position of the reflection point leads to a radius correction;

[0043] Refractive effect correction. Refraction occurs when the laser passes through the quartz tube and the air interface. According to the law of refraction, the actual radial size needs to be corrected by the refractive index;

[0044] The inner diameter size of the quartz tube is calculated by the vertical distance, the horizontal offset of the light spot center, the laser emission angle, and the refractive index of the quartz material.

[0045] As preferred, the application also includes a position calibration module. The working process of the position calibration module includes:

[0046] The offset in the horizontal and vertical directions of the light spot is obtained, and the total deviation is calculated. A permissible deviation threshold is set. When the total offset is greater than the preset permissible deviation threshold, it is determined that the offset is out of tolerance, and the offset calibration mechanism is triggered. When the total offset is less than or equal to the preset permissible deviation threshold, it is determined that the position is qualified;

[0047] When the offset calibration mechanism is triggered, the adjustment amount is calculated by a proportional adjustment algorithm, and the moving / lifting mechanism is driven to correct the position;

[0048] The proportional adjustment coefficient is set to balance the adjustment speed and stability through factory calibration optimization;

[0049] The horizontal direction adjustment amount and the vertical direction adjustment amount are calculated according to the horizontal direction adjustment amount and the vertical direction adjustment amount respectively;

[0050] The horizontal moving mechanism is controlled according to the horizontal direction adjustment amount to correct the radial relative position of the detection system and the quartz tube, and the lifting mechanism is controlled according to the vertical direction adjustment amount to correct the axial relative position, so that the center of the light spot is closer to the theoretical reference;

[0051] After each adjustment, the following steps are re-executed: the laser analysis unit re-collects the light spot, calculates the new horizontal direction adjustment amount, the vertical direction adjustment amount, and the total offset; the calibration adjustment steps are repeated until the total offset is less than or equal to the preset permissible deviation threshold, the adjustment is stopped, and the final position parameters are recorded; the number of repeated calibrations is recorded. If the number of repeated calibrations is greater than the preset number, it is determined that the mechanical structure has a jamming / positioning abnormality, and a device alarm signal is generated;

[0052] The length of the quartz tube is obtained, an initial detection interval is preset, and then the number of detection points is obtained, wherein the detection point coordinates are uniformly distributed along the axial direction of the quartz tube; when there is a spot shape distortion, the distortion region is subjected to encryption expansion processing, a set length distance is expanded before and after the center coordinates of the distortion region, an encryption region is formed, and the detection interval of the encryption region is adjusted to a second detection interval; wherein the second detection interval is smaller than the initial detection interval.

[0053] Compared with the related art, the laser detection device for inner diameter detection of a quartz tube has the following beneficial effects:

[0054] 1. By the cooperation of the clamping blocks and the extension springs in the clamping positioning mechanism, different diameters of quartz tubes can be adaptively clamped, stable clamping is realized by the spring elastic force, and shaking during detection is avoided. At the same time, the relative position of the quartz tube and the detection mechanism can be accurately adjusted by the coordinated adjustment of the moving mechanism and the lifting mechanism, the problem of unstable positioning of traditional devices for multiple specifications of quartz tubes is solved, and the detection versatility is improved.

[0055] 2. The laser detection system optimizes the spot image through preprocessing, improves the feature extraction accuracy by combining elliptical fitting and iterative optimization, introduces refraction correction and offset compensation in the inner diameter calculation, and real-time calibrates the laser intensity fluctuation and adjusts the frame rate by the dynamic monitoring unit, reduces the interference of environmental and equipment factors on the detection result, and ensures the data accuracy.

[0056] 3. The position calibration module automatically corrects the spot offset through closed-loop control, the detection path is adaptively encrypted according to the distortion region, and manual intervention is reduced; the storage and output module realizes data tracing and intuitive display, and timely alarms in case of abnormality, and improves the detection efficiency and quality control ability.

[0057] In summary, through the collaborative design of the mechanical structure and the laser detection system, the adaptability, high precision and intelligence of the quartz tube inner diameter detection are realized, the problems of unstable positioning and insufficient precision of traditional devices are solved, and the detection efficiency and data reliability are improved through the automatic process, which is suitable for the strict detection requirements of quartz tube quality in various precision fields. BRIEF DESCRIPTION OF DRAWINGS

[0058] Figure 1 It is a perspective view of embodiment 1 of the laser detection device for inner diameter detection of a quartz tube provided by the present application;

[0059] Figure 2 It is a perspective view of another side as shown in the figure; Figure 1

[0060] Figure 3 It is a structure enlarged view of A part as shown in the figure; Figure 1

[0061] ​​Figure 4 As shown in the top view structure schematic diagram; Figure 1 As shown in the top view structure schematic diagram;

[0062] Figure 5 As shown in the top view structure schematic diagram;

[0063] Figure label 1, support plate; 2, column; 3, lifting seat; 4, limit plate; 5, electric telescopic rod; 6, laser detector; 7, fixed frame; 8, guide rod; 9, first screw; 10, first moving plate; 12, fixed block; 13, second screw; 14, first servo motor; 15, clamping block; 16, moving seat; 17, linear motor; 18, telescopic spring; 19, second servo motor. DETAILED DESCRIPTION

[0064] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of protection of the present application.

[0065] The terms used in the present disclosure are merely for the purpose of describing particular embodiments and are not intended to limit the present disclosure. The singular forms "a," "an," and "the" used in the present disclosure and the appended claims are also intended to include the plural forms, unless the context clearly indicates otherwise. It will be further understood that the terms "and / or," as used herein, refer to and encompass any or all possible combinations of one or more associated listed items.

[0066] It should be understood that, although the terms first, second, third, etc. can be employed in this disclosure to describe various information, these information should not be limited to these terms. These terms are only used to distinguish one piece of information from another piece of information of the same type. For example, without departing from the scope of the present disclosure, the first information can also be referred to as the second information, and similarly, the second information can also be referred to as the first information. Depending on the context, the word "if" as used herein can be interpreted as "when" or "upon determination" or "in response to determining". Embodiment 1

[0067] Please refer to Figures 1-3The utility model provides a laser detection device for quartz tube inner diameter detection, including support plate 1, stand 2, fixed frame 7, moving mechanism, clamping positioning mechanism, detection mechanism, lifting mechanism and laser detection system, stand 2 is fixedly connected to the upper side of support plate 1, fixed frame 7 is fixedly connected to the upper end of support plate 1, moving mechanism is installed in fixed frame 7, clamping positioning mechanism is assembled on moving mechanism, is used for clamping quartz tube, lifting mechanism is installed on stand 2, detection mechanism is installed on lifting mechanism, is located above clamping positioning mechanism, is used for emitting laser and collecting reflection light spot, detection mechanism includes the electric telescopic handle 5 of fixed installation in the one side of lifting seat 3, and the telescopic end of electric telescopic handle 5 is fixedly connected with L-shaped positioning frame, and L-shaped positioning frame is installed with laser detector 6, and the detection port is passed through L-shaped positioning frame and is equipped in the lower end middle part of laser detector 6,

[0068] In the application, the lifting mechanism includes positioning grooves vertically arranged on both sides of the vertical direction of one end of the stand 2, a linear motor 17 is vertically installed in one side of the positioning groove, the lifting seat 3 is slidably installed on the stand 2 by the linear motor 17, and a limiting plate 4 is fixedly installed on the top end of the stand 2.

[0069] In the application, the moving mechanism includes guide rods 8 horizontally fixedly installed on both sides of the inside of the fixed frame 7, a first screw rod 9 is rotatably installed between the guide rods 8, a second servo motor 19 is installed on the fixed frame 7 at one end of the first screw rod 9, the output end of the second servo motor 19 is clamped at one end of the first screw rod 9 by penetrating through the fixed frame 7, a first moving plate 10 is sleeved on the first screw rod 9 and the guide rods 8, and the first moving plate 10 is connected with the first screw rod 9 by threads.

[0070] In the application, the first moving plate 10 is fixedly installed with a fixed block 12 at the upper end, a recess is downwardly formed in the upper end of the fixed block 12, a second screw rod 13 is horizontally installed in the recess, a first servo motor 14 is installed on the fixed block 12 at one end of the second screw rod 13, the output end of the first servo motor 14 is clamped at one end of the second screw rod 13 by penetrating through the fixed block 12, a moving seat 16 is connected with the second screw rod 13 by threads, and the moving seat 16 is installed in the recess of the fixed block 12.

[0071] In the application, the clamping positioning mechanism includes a clamping groove formed in the moving seat 16, clamping blocks 15 are oppositely installed inside the clamping groove, connecting holes are oppositely formed in the lower ends of the clamping blocks 15, and telescopic springs 18 are fixedly installed in the connecting holes between the clamping blocks 15. Embodiment 2

[0072] Please refer to Figure 4As shown, based on the laser detection device for quartz tube inner diameter detection provided in Embodiment 1 of the present application, Embodiment 2 of the present application proposes another laser detection system for quartz tube inner diameter detection. Embodiment 2 is only a preferred mode of Embodiment 1, and the implementation of Embodiment 2 does not affect the separate implementation of Embodiment 1.

[0073] Specifically, the laser detection system for quartz tube inner diameter detection provided in Embodiment 2 of the present application is different in that:

[0074] The laser detection system comprises a laser detection module, a position calibration module, a storage module, and an output display module.

[0075] The laser detection module comprises a laser preprocessing unit, a laser analysis unit, a dynamic monitoring unit, and an inner diameter calculation unit.

[0076] The laser preprocessing unit is used for preprocessing operation on the light spot image data; wherein the preprocessing operation specifically comprises: removing image noise by Gaussian filtering, extracting light spot edge profile by Canny edge detection algorithm, and optimizing edge continuity by morphological operation.

[0077] The laser analysis unit is used for extracting image features after preprocessing, including identifying light spot center coordinates, calculating light spot offset, and analyzing light spot shape distortion degree.

[0078] The dynamic monitoring unit tracks the stability of detection parameters in real time, including fluctuation evaluation value of laser intensity and light spot acquisition frame rate.

[0079] The inner diameter calculation unit calculates the inner diameter according to the feature data of the laser analysis unit and in combination with the principle of laser triangulation.

[0080] The storage module is used for storing detection data and related information; and the output display module is used for displaying information in the storage module.

[0081] The laser detection system is designed by modularization, and the automation and precision of quartz tube inner diameter detection are realized by the cooperation of multiple units: the preprocessing unit optimizes image quality, the analysis unit extracts key features, the dynamic monitoring unit guarantees parameter stability, the inner diameter calculation unit accurately evaluates in combination with the principle of laser, and the storage and display modules realize data tracing and visualization. The advantages of the laser detection system lie in that the modules have clear division of labor and close linkage, which not only improves the detection accuracy through algorithm optimization, but also reduces manual intervention relying on automatic process.

[0082] In the present application, a data acquisition module is also included, which is electrically connected with the laser detector 6 in the detection mechanism, and the working process thereof comprises:

[0083] Image acquisition: through the image acquisition component built-in the laser detector 6, the light spot image formed by the reflection of the laser beam on the inner wall of the quartz tube is captured in real time.

[0084] Parameter acquisition: Synchronously collect the laser emission angle, laser emission intensity, and detection position coordinates fed back by the moving mechanism and lifting mechanism during laser emission;

[0085] Data integration and transmission: The collected spot images, laser parameters and position coordinates are time-stamped and synchronously integrated to form a complete original data set, which is then transmitted to the laser detection module for processing. The data acquisition module is linked with the laser detector 6 to achieve synchronous acquisition and integration of the spot images, laser parameters and detection positions, providing a complete and time-consistent original data basis for subsequent detection and analysis, ensuring the continuity of the detection chain and data reliability.

[0086] In this application, the laser analysis unit is used to extract features of the pre-processed image. The specific extraction steps are as follows:

[0087] Perform curve fitting on the pre-processed edge profile of the light spot, use the center of the fitting curve as the center coordinate of the light spot, and iterate and optimize the fitting process to improve the recognition accuracy of the center coordinate;

[0088] The curve fitting specifically adopts elliptic curve fitting, and the elliptic equation is: , and then use the least square method to minimize the sum of the squares of the distances from the contour point to the ellipse, that is, Minimum, and introduce constraints , the constraints are used to avoid multiple solutions, where Represents the coordinates of the i-th point on the edge contour of the spot, which is extracted from the spot image using the Canny edge detection algorithm. n is the number of contour points. A, B, C, D, E, and F represent the coefficients of the preset elliptical curve fitting, which are used to define the geometric shape of the ellipse.

[0089] After fitting is completed, the coordinates of the spot center are calculated using the ellipse parameters. , the formula is: ;

[0090] Then, the iterative optimization fitting process is as follows: after each fitting, the average distance between the actual contour and the fitted ellipse is calculated and recorded as the residual. If the residual is greater than the preset threshold, the contour point with the largest deviation is removed and the fitting is repeated;

[0091] Establish a coordinate system with the center of the laser detection port as the origin, and preset the coordinates of the quartz tube theoretical axis as , the center coordinates of the spot Compare with the preset reference axis coordinates, and obtain the offset of the light spot in the horizontal and vertical directions, which are recorded as 、 , the formula is ;

[0092] The actual light spot edge profile is compared with the ideal light spot profile, the shape difference between the actual light spot edge profile and the ideal elliptical profile (the above-mentioned fitted ellipse) is calculated, and the shortest distance of each profile point to the ideal ellipse is calculated ; wherein the shape difference includes the average distortion distance, the maximum distortion distance, the average distortion distance The formula is , and the maximum distortion distance The formula is ;

[0093] By the difference characteristics of the profile shape, it is judged whether there is a protrusion, a depression or an irregular deformation on the inner wall of the quartz tube, and the position of the distortion region is marked:

[0094] When the average distortion distance or the maximum distortion distance exceeds the corresponding preset distortion threshold, it is determined that there is a light spot shape distortion;

[0095] By continuously setting the shortest distance of a number of profile points All exceeding the threshold value, the distortion region is marked, and the position coordinates of the distortion region are the center coordinates of the distortion region , and the abnormal position of the inner wall is marked;

[0096] It should be noted that the above-mentioned parameters are based on the light spot image data collected by the laser detector 6, and are gradually obtained through image optimization of the laser preprocessing unit, feature extraction and calculation of the laser analysis unit, and finally provide core data support for inner diameter calculation, position calibration and quality judgment; The acquisition process of the parameters is deeply related to the positioning accuracy of the equipment mechanical structure (such as the clamping positioning mechanism, the moving mechanism) and the algorithm accuracy of the laser detection module, and together ensures the accuracy of the detection result.

[0097] In the present application, the dynamic monitoring unit tracks the stability of the detection parameters in real time, specifically according to the following steps:

[0098] Laser intensity fluctuation monitoring: continuously collect the intensity signal of the laser reflected by the inner wall of the quartz tube at fixed time intervals, denoted as intensity sequence , k represents the number of collection times in a set unit time, and the intensity signal collected in the jth time is denoted as ;

[0099] Real-time analysis of the change trend of the intensity signal in the intensity sequence, calculation of its fluctuation parameters, including intensity average, intensity standard deviation, relative fluctuation coefficient; the weighted calculation of all parameters in the fluctuation parameter and its preset weight obtains the fluctuation evaluation value; wherein the specific calculation formula of the fluctuation parameter is:

[0100] The intensity average in a unit time is calculated, and the formula is ;

[0101] The intensity standard deviation is calculated, and the formula is ;

[0102] The relative fluctuation coefficient is calculated, and the formula is ;

[0103] When the fluctuation evaluation value is greater than the preset stable range threshold value, it is determined that the laser intensity fluctuation is abnormal, and the automatic calibration mechanism of the laser source is triggered; the automatic calibration mechanism is used to restore the intensity to a stable state by adjusting the driving current of the laser emitter;

[0104] Spot collection frame rate adjustment: according to the detection position characteristics of the quartz tube and the feedback results of the laser analysis unit, the spot collection frame rate is dynamically adjusted, specifically:

[0105] According to the nominal length L of the quartz tube, the initial collection frame rate is set , and the first collection frame rate and the second collection frame rate are set according to the initial collection frame rate, wherein the initial collection frame rate is less than the first collection frame rate, and the first collection frame rate is less than the second collection frame rate;

[0106] Region identification and frame rate adjustment: when the distance between the detection position and the two ends of the quartz tube is less than or equal to a preset proportion, it is determined that it is the end region prone to deformation, and the collection frame rate is raised to the first collection frame rate;

[0107] Middle region determination: when the detection position is in the middle of the quartz tube, specifically, the distance from both ends is greater than Lx10% and the laser analysis unit feedbacks that the spot shape is not distorted, the initial collection frame rate is used ;

[0108] When the laser analysis unit detects that the spot shape is distorted, the collection frame rate of the region is raised to the second collection frame rate, and the frame rate is maintained within a range of a set length before and after the distorted region;

[0109] When the detection position leaves the end region or the distorted region, it returns to the initial collection frame rate ;

[0110] The dynamic monitoring unit tracks the laser intensity fluctuation in real time and dynamically adjusts the collection frame rate, which not only ensures the stability of the laser signal through multi-parameter weighted evaluation, but also adapts the frame rate according to the characteristics of different regions of the quartz tube, reduces redundant data while ensuring detection accuracy, realizes adaptive optimization of the detection process, and balances data quality and efficiency.

[0111] In the present application, the inner diameter calculation unit calculates the inner diameter according to the characteristic data of the laser analysis unit and the principle of laser triangulation, specifically:

[0112] Collect the laser emission angle output by the laser analysis unit , the laser detector 6 detects the vertical distance U of the center of the detection port to the quartz tube axis, the horizontal offset of the center of the light spot in the direction perpendicular to the quartz tube axis and the refractive index e of the quartz material;

[0113] A geometric model is established based on the principle of laser triangulation. After the laser beam is emitted from the detection port, a light spot is formed by reflection on the inner wall of the quartz tube. The offset of the center of the light spot is directly related to the position of the reflection point on the inner wall. The offset of the light spot is converted into the inner diameter size through geometric relationship. Specifically,

[0114] Basic geometric relationship. In the ideal case where the refraction effect is ignored, the radius R of the quartz tube is determined by the laser emission angle and the distance U, which satisfies ;

[0115] Light spot offset correction. When the center of the light spot has a horizontal offset , the radius is corrected due to the change of the reflection point position, and the correction amount is ; wherein is used to project the two-dimensional offset to the radial direction;

[0116] Refractive effect correction: when the laser passes through the quartz tube and air interface, refraction occurs. According to the refraction law, the actual radial size needs to be corrected by introducing the refractive index correction coefficient 1 / e;

[0117] The inner diameter size G of the quartz tube is calculated by the vertical distance U, the horizontal offset of the center of the light spot, the laser emission angle , and the refractive index e of the quartz material, and the formula is ; wherein represents the inner diameter calculated from the radius; the inner diameter calculation unit integrates the laser emission angle, the vertical distance, the light spot offset, and the refractive index, and constructs a geometric model based on the principle of laser triangulation. The inner diameter is finally accurately calculated by sequentially deducing the basic geometric relationship, correcting the light spot offset, and correcting the refraction effect. By considering the influence of light spot offset and light refraction, the ideal model limitation is broken through, and the detection accuracy is greatly improved.

[0118] The present application also includes a position calibration module; the working process of the position calibration module includes:

[0119] The offset of the light spot in the horizontal and vertical directions is respectively denoted as , , and the total deviation E is calculated, and the formula is ; Set the allowable deviation threshold. When the total offset is greater than the preset allowable deviation threshold, it is determined that the offset is out of tolerance, and the offset calibration mechanism is triggered. When the total offset is less than or equal to the preset allowable deviation threshold, it is determined that the position is qualified.

[0120] When the offset calibration mechanism is triggered, the adjustment amount is calculated by the proportional adjustment algorithm, and the moving / lifting mechanism is driven to correct the position:

[0121] The proportional adjustment coefficient is set by balancing the adjustment speed and stability through factory calibration optimization ;

[0122] The horizontal direction adjustment amount and the vertical direction adjustment amount are calculated according to the horizontal direction adjustment amount and the vertical direction adjustment amount respectively, and the calculation formula of the horizontal direction adjustment amount and the vertical direction adjustment amount is , ;

[0123] The horizontal moving mechanism is controlled according to to correct the radial relative position of the detection system and the quartz tube, and the lifting mechanism is controlled according to to correct the axial relative position, so that the center of the light spot is close to the theoretical reference;

[0124] After each adjustment, the following steps are re-executed:

[0125] The laser analysis unit re-acquires the light spot, calculates the new horizontal direction adjustment amount and the vertical direction adjustment amount, and the total offset amount;

[0126] Repeat the calibration adjustment steps until the total offset amount is less than or equal to the preset allowable deviation threshold, stop adjusting and record the final position parameters; record the number of repeated calibrations, if the number of repeated calibrations is greater than the preset number, determine that the mechanical structure has stuck / abnormal positioning, and generate a device alarm signal; the device alarm signal is used to prompt the maintenance personnel to troubleshoot;

[0127] Get the length H of the quartz tube, and preset the initial detection interval d, then the number of detection points V is ; wherein represents the floor function, and the detection point coordinates are uniformly distributed along the quartz tube axis;

[0128] When there is a shape distortion of the light spot, the distorted area is expanded and processed, the center coordinates of the distorted area are expanded by a set length distance, forming an encryption area, and the detection interval of the encryption area is adjusted to a second detection interval; wherein the second detection interval is smaller than the initial detection interval.

[0129] The position calibration module determines whether to trigger calibration by calculating the total offset amount of the light spot, drives the mechanism to correct the position using the proportional adjustment algorithm, and ensures that the offset amount is within the allowable range through closed-loop feedback, while planning the detection points according to the length of the quartz tube and encrypting the distorted area, realizing automatic and accurate calibration of the position, and improving the detection pertinence of the abnormal area by dynamically adjusting the distribution of the detection points.

[0130] Other embodiments of the application will be apparent to those skilled in the art from consideration of the specification and practice of the application disclosed herein. It is intended that the application be construed as including any patent, any patent applications, and any patent publications to the extent that such patent, patent applications, and patent publications are consistent with the present disclosure. It is intended that the specification and examples be considered exemplary only, with the true scope and spirit of the application being indicated by the following claims.

[0131] It is to be understood that the application is not limited to the precise construction herein disclosed and shown in the drawings, and that various modifications and changes can be effected therein by those skilled in the art without departing from the scope of the application. The scope of the application is to be limited only by the appended claims.

Claims

1. A laser detection device for detecting the inner diameter of a quartz tube, comprising a supporting plate (1), a column (2), a fixing frame (7), a moving mechanism, a clamping and positioning mechanism, a detection mechanism, a lifting mechanism and a laser detection system, characterized in that: The column (2) is fixed to one side of the upper portion of the support plate (1), the fixed frame (7) is in the middle of the upper end of the support plate (1), the moving mechanism is installed in the fixed frame (7), and the clamping and positioning mechanism is equipped on the moving mechanism; the lifting mechanism is installed on the column (2), and the detection mechanism is installed on the lifting mechanism; the detection mechanism has an electric telescopic rod (5) fixed to one side of the lifting seat (3), the telescopic end of which is connected to the L-shaped positioning frame, and the frame is equipped with a laser detector (6); The laser detection system includes a laser detection module, a storage module, and an output display module; the laser detection module includes a laser preprocessing unit, a laser analysis unit, a dynamic monitoring unit, and an inner diameter calculation unit; The laser pre-processing unit is used to pre-process the spot image data: Gaussian filtering is used to remove image noise, Canny edge detection algorithm is used to extract the edge contour of the spot, and morphological operation is used to optimize edge continuity; The laser analysis unit is used to extract the features of the pre-processed image, including: identifying the center coordinates of the light spot, calculating the light spot offset, and analyzing the degree of light spot shape distortion; The dynamic monitoring unit tracks the stability of detection parameters in real time, including the fluctuation evaluation value of laser intensity and the frame rate of light spot acquisition; The inner diameter calculation unit calculates the inner diameter based on the characteristic data of the laser analysis unit in combination with the laser triangulation principle; The storage module is used to store detection data and related information; the output display module is used to display the information in the storage module; Among them, it also includes a position calibration module; the working process of the position calibration module includes: Obtain the horizontal and vertical offsets of the light spot and calculate the total offset. Set an allowable deviation threshold. When the total offset is greater than the preset allowable deviation threshold, it is determined to be an excessive offset and trigger the offset calibration mechanism. When the total offset is less than or equal to the preset allowable deviation threshold, the position is determined to be qualified. When the offset calibration mechanism is triggered, the adjustment amount is calculated through the proportional adjustment algorithm to drive the moving / lifting mechanism to correct the position; Through factory calibration optimization, balance the adjustment speed and stability to set the proportional adjustment coefficient; Calculate the horizontal direction adjustment amount and the vertical direction adjustment amount respectively according to the horizontal direction adjustment amount and the vertical direction adjustment amount; The horizontal movement mechanism is controlled according to the horizontal adjustment amount to correct the radial relative position of the detection system and the quartz tube. The lifting mechanism is controlled according to the vertical adjustment amount to correct the axial relative position so that the center of the light spot is close to the theoretical reference. After each adjustment, the following steps are repeated: the laser analysis unit re-collects the light spot and calculates the new horizontal and vertical adjustment amounts and the total offset; the calibration and adjustment steps are repeated until the total offset is less than or equal to the preset allowable deviation threshold, at which point the adjustment is stopped and the final position parameters are recorded; the number of calibration repetitions is recorded. If the number of calibration repetitions exceeds the preset number, it is determined that the mechanical structure is stuck or the positioning is abnormal, and an equipment alarm signal is generated; The length of the quartz tube is obtained, and the initial detection interval is preset to obtain the number of detection points, where the coordinates of the detection points are evenly distributed along the axial direction of the quartz tube. When there is a distortion in the shape of the light spot, the distorted area is encrypted and expanded, and a set length distance is extended before and after the center coordinate of the distorted area to form an encrypted area. The detection interval of the encrypted area is adjusted to a second detection interval; the second detection interval is smaller than the initial detection interval.

2. A laser detection device for detecting the inner diameter of a quartz tube according to claim 1, characterized in that: It also includes a data acquisition module, which is electrically connected to the laser detector (6) in the detection mechanism, and its working process includes: Image acquisition: The built-in image acquisition component of the laser detector (6) is used to capture the spot image formed by the laser beam reflected by the inner wall of the quartz tube in real time; Parameter acquisition: Synchronously collect the laser emission angle, laser emission intensity, and detection position coordinates fed back by the moving mechanism and lifting mechanism during laser emission; Data integration and transmission: The collected spot images, laser parameters and position coordinates are time-stamped and synchronously integrated to form a complete raw data set, which is then transmitted to the laser detection module for processing.

3. The laser detection device for detecting the inner diameter of a quartz tube according to claim 1, characterized in that: The lifting mechanism includes positioning slots vertically provided on both sides of one end of the column (2) in the vertical direction, a linear motor (17) is vertically installed in the positioning slot on one side, a lifting seat (3) is slidably installed on the linear motor (17) and the column (2), and a limiting plate (4) is fixedly installed on the top of the column (2).

4. The laser detection device for detecting the inner diameter of a quartz tube according to claim 1, characterized in that: The moving mechanism comprises guide rods (8) fixedly mounted horizontally on both sides of the interior of the fixed frame (7), a first screw rod (9) being rotatably mounted between the guide rods (8), a second servo motor (19) being mounted on the fixed frame (7) at one end of the first screw rod (9), an output end of the second servo motor (19) passing through the fixed frame (7) and being clamped at one end of the first screw rod (9), a first moving plate (10) being sleeved on the first screw rod (9) and the guide rods (8), and the first moving plate (10) being connected to the first screw rod (9) via a threaded connection.

5. The laser detection device for detecting the inner diameter of a quartz tube according to claim 4, characterized in that: A fixed block (12) is fixedly mounted on the upper end of the first movable plate (10), a groove is downwardly provided on the upper end of the fixed block (12), a second screw rod (13) is horizontally mounted in the groove, a first servo motor (14) is mounted on the fixed block (12) at one end of the second screw rod (13), an output end of the first servo motor (14) passes through the fixed block (12) and is clamped at one end of the second screw rod (13), a movable seat (16) is connected to the second screw rod (13) by a thread, and the movable seat (16) is mounted in the groove provided in the fixed block (12).

6. The laser detection device for detecting the inner diameter of a quartz tube according to claim 1, characterized in that: The clamping and positioning mechanism comprises a clamping groove provided on a movable seat (16), clamping blocks (15) being relatively installed on both sides of the clamping groove, connecting holes being relatively opened at the lower ends of the clamping blocks (15), and telescopic springs (18) being fixedly installed in the connecting holes between the clamping blocks (15).

7. The laser detection device for detecting the inner diameter of a quartz tube according to claim 1, characterized in that: The laser analysis unit is used to extract features of the pre-processed image. The specific extraction steps are as follows: The pre-processed spot edge contour is subjected to curve fitting, and the center of the fitting curve is used as the coordinate of the spot center. The fitting process is optimized iteratively. The iterative optimization process is as follows: after each fitting, the average distance between the actual contour and the fitted ellipse is calculated and recorded as the residual. If the residual is greater than the preset threshold, the contour point with the largest deviation is removed and the fitting is performed again. Establish a coordinate system with the center of the laser detection port as the origin, preset the theoretical axis coordinates of the quartz tube, compare the center coordinates of the light spot with the preset reference axis coordinates, and obtain the horizontal and vertical offsets of the light spot; Compare the actual spot edge contour with the ideal spot contour, calculate the morphological difference between the actual spot edge contour and the ideal ellipse contour, and calculate the shortest distance from each contour point to the ideal ellipse; the morphological difference includes the average distortion distance and the maximum distortion distance; By looking at the difference in contour morphology, determine whether there are bulges, depressions, or irregular deformations on the inner wall of the quartz tube, and mark the location of the distorted area: When the average distortion distance or the maximum distortion distance exceeds the corresponding preset distortion threshold, it is determined that there is spot shape distortion; by continuously setting a number of contour points whose shortest distance exceeds the threshold, the area is marked as the distortion area, and its position coordinates are the center coordinates of the distortion area, marking the abnormal position of the inner wall.

8. The laser detection device for detecting the inner diameter of a quartz tube according to claim 1, characterized in that: The dynamic monitoring unit tracks the stability of the detection parameters in real time, specifically by the following steps: Laser intensity fluctuation monitoring: The intensity signal of the laser reflected from the inner wall of the quartz tube is continuously collected at fixed time intervals and recorded as an intensity sequence. The changing trend of the intensity signal in the intensity sequence is analyzed in real time, and its fluctuation parameters are calculated, including the intensity mean, intensity standard deviation, and relative fluctuation coefficient. A fluctuation evaluation value is obtained by weighting all parameters in the fluctuation parameter with their preset weights. When the fluctuation evaluation value is greater than the preset stability range threshold, the laser intensity fluctuation is determined to be abnormal, triggering the automatic calibration mechanism of the laser source. The automatic calibration mechanism is used to restore the intensity to a stable state by adjusting the driving current of the laser emitter. Adjustment of the light spot acquisition frame rate: the initial acquisition frame rate is set according to the nominal length of the quartz tube, and the first acquisition frame rate and the second acquisition frame rate are set according to the initial acquisition frame rate, wherein the initial acquisition frame rate is smaller than the first acquisition frame rate and smaller than the second acquisition frame rate; Region identification and frame rate adjustment: when the distance between the detection position and the two ends of the quartz tube is less than or equal to the preset ratio, it is determined to be an easily deformable end region, and the acquisition frame rate is increased to the first acquisition frame rate; Central area judgment: When the detection position is in the middle of the quartz tube and the laser analysis unit feedback spot shape is not distorted, the initial acquisition frame rate is used; When the laser analysis unit detects that the spot shape is distorted, the acquisition frame rate of the area is increased to the second acquisition frame rate, and the frame rate is maintained within the range of the set lengths before and after the distorted area; when the detection position leaves the end area or the distorted area, it is restored to the initial acquisition frame rate.

9. The laser detection device for detecting the inner diameter of a quartz tube according to claim 1, characterized in that: The inner diameter calculation unit calculates the inner diameter based on the characteristic data of the laser analysis unit in combination with the principle of laser triangulation measurement, specifically: Collect the laser emission angle output by the laser analysis unit, the vertical distance from the center of the detection port of the laser detector (6) to the axis of the quartz tube, the horizontal offset of the center of the light spot perpendicular to the axis of the quartz tube, and the refractive index of the quartz material; A geometric model is established based on the principle of laser triangulation. After the laser beam is emitted from the detection port, it is reflected by the inner wall of the quartz tube to form a light spot. The center offset of the light spot is directly related to the position of the reflection point on the inner wall. The light spot offset is converted into the inner diameter size through the geometric relationship: In the ideal case of ignoring the refraction effect, the radius of the quartz tube is determined by the laser emission angle and distance. Spot offset correction: when there is a horizontal offset in the center of the spot, the change in the position of the reflection point leads to radius correction; Refraction effect correction: when the laser passes through the interface between the quartz tube and the air, refraction occurs. According to the law of refraction, the actual radial size needs to be corrected by the refractive index. The inner diameter of the quartz tube is calculated based on the vertical distance, the horizontal offset of the center of the light spot, the laser emission angle, and the refractive index of the quartz material.

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