Tower-shaped cilia vector hydrophone based on piezoelectric effect and underwater acoustic system

Abstract

The invention provides a tower-shaped cilia vector hydrophone based on a piezoelectric effect and an underwater acoustic system, and relates to the technical field of micro-mechanical electronics. The hydrophone comprises tower-shaped vibration pick-up cilia, a cross beam structure and a piezoelectric unit, the cross beam structure comprises a connecting body and four cross beams, and the cross beams are fixed to the side faces of the connecting body to form the cross beam structure; the piezoelectric units are arranged at the head end and the tail end of the cross beam, and the tower-shaped vibration pickup cilia are fixed to the connecting body. According to the embodiment of the invention, the tower-shaped vibration pick-up cilia can be used for achieving the consideration of the working bandwidth and the sensitivity, thereby greatly improving the sensitivity and the working bandwidth of the hydrophone, and effectively improving the use experience effect of a user.

Description

Technical Field

[0001] The present application relates to the field of micro-mechanical electronic technology, and in particular to a tower-shaped ciliary vector hydrophone and an underwater acoustic system based on the piezoelectric effect. Background Art

[0002] In the field of underwater acoustics, sensors are typically referred to as transducers. These transducers primarily include scalar sensors and vector sensors, also known as scalar hydrophones and vector hydrophones. Traditionally, scalar hydrophones (acoustic pressure hydrophones) have been used to measure sound fields. However, scalar hydrophones can only measure scalar parameters in the sound field. Biomimetic ciliary vector hydrophones, on the other hand, can measure vector parameters in the sound field. Their application helps obtain vector information about the sound field, which is crucial for expanding the functionality of sonar equipment. Therefore, biomimetic ciliary vector hydrophones are widely used in various underwater acoustic systems for purposes such as ocean monitoring and underwater target detection.

[0003] However, with the rapid development of ocean exploration technology, modern underwater acoustic systems have placed higher demands on bionic ciliary vector hydrophones: highly sensitive detection of weak acoustic signals against a complex ocean noise background. Traditional bionic ciliary vector hydrophones primarily use piezoresistive sensing, but piezoresistive sensing suffers from insufficient sensitivity and narrow bandwidth, making it difficult to effectively meet these sensitivity and bandwidth requirements. Summary of the Invention

[0004] The present invention provides a piezoelectric-based tower-shaped ciliary vector hydrophone and underwater acoustic system, which can solve the problem that existing biomimetic ciliary vector hydrophones are difficult to meet sensitivity and bandwidth requirements. To achieve this goal, the present invention provides the following solutions.

[0005] According to one aspect of an embodiment of the present application, a piezoelectric effect-based tower-shaped ciliary vector hydrophone is provided, comprising: tower-shaped vibration-picking cilia, a cross-beam structure, and a piezoelectric unit, wherein the cross-beam structure comprises a connector and four cross-beams, wherein the cross-beams are fixed to the sides of the connector to form the cross-beam structure; The piezoelectric units are arranged at both ends of the beam, and the tower-shaped vibration-picking cilia are fixed on the connector.

[0006] In a possible implementation, a frame-shaped base is further included, the frame-shaped base surrounds the cross beam structure, and one end of the cross beam away from the connector is fixed to the inner side of the frame-shaped base.

[0007] In a possible implementation, the frame-type base includes a substrate layer, a buried oxide layer, and a device layer stacked in sequence, and the inner side of the device layer is fixedly connected to the beam.

[0008] In a possible implementation, the device layer and the cross-beam structure are made of the same material, and the cross-beam structure and the device layer are integrally formed.

[0009] In a possible implementation, the piezoelectric units at both ends of the same beam are connected in series.

[0010] In a possible implementation, the piezoelectric unit includes a bottom electrode, a piezoelectric film, and a top electrode. The top electrode and the bottom electrode are arranged on both sides of the piezoelectric film, and two piezoelectric units on the same beam share a bottom electrode.

[0011] In a possible implementation, the piezoelectric film is laid above the crossbeam of the cross-beam structure, and the tower-shaped vibration-picking cilia are arranged on a side of the piezoelectric film away from the crossbeam.

[0012] In a possible implementation, the piezoelectric film is made of scandium-doped aluminum nitride.

[0013] In a possible implementation, the material of the tower-shaped vibration-picking cilia is epoxy resin, and the density of the epoxy resin corresponds to the density of the medium in the environment in which the tower-shaped vibration-picking cilia are used.

[0014] According to one aspect of an embodiment of the present application, an underwater acoustic system is provided, which includes a signal acquisition circuit and the tower-shaped ciliary vector hydrophone as described above, wherein the signal acquisition circuit is connected to the tower-shaped ciliary vector hydrophone to detect sound signals.

[0015] The beneficial effects of the technical solution provided by the embodiments of the present application are: The piezoelectric-effect-based tower-shaped ciliary vector hydrophone provided in this application comprises tower-shaped vibration-collecting cilia, a cross-beam structure, and a piezoelectric unit. The cross-beam structure comprises a connector and four crossbeams, which are fixed to the sides of the connector to form the cross-beam structure. The piezoelectric unit is located at the front and rear ends of the crossbeams, and the tower-shaped vibration-collecting cilia are fixed to the connector. Embodiments of this application utilize the tower-shaped vibration-collecting cilia to achieve a balance between operating bandwidth and sensitivity, thereby significantly improving the sensitivity and operating bandwidth of the hydrophone and effectively enhancing the user experience. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following is a brief introduction to the drawings required for describing the embodiments of the present application.

[0017] Figure 1 A structural diagram of a tower-shaped ciliary vector hydrophone based on the piezoelectric effect provided in an embodiment of the present application; Figure 2This is a structural exploded diagram of a tower-shaped ciliary vector hydrophone based on the piezoelectric effect provided in an embodiment of the present application; Figure 3 A cross-sectional view of a hydrophone provided in an embodiment of the present application; Figure 4 A schematic diagram of a piezoelectric unit connected in series according to an embodiment of the present application; Figure 5 This is a diagram showing the stress distribution on the X and Y axes of the cross-beam structure after the tower-shaped vibration-collecting cilia provided in an embodiment of the present application are subjected to X-axis sound waves; Figure 6 This is a simulation diagram of the tower-shaped vibration-picking cilia provided in an embodiment of the present application being acted upon by X-axis sound waves; Figure 7 for Figure 6 The stress distribution diagram on the X-axis of the cross beam structure after the tower-shaped vibration-picking cilia are acted upon by the X-axis sound wave; Figure 8 This is a simulation diagram of the cylindrical vibration-picking cilia provided in an embodiment of the present application being acted upon by X-axis sound waves; Figure 9 for Figure 8 The stress distribution diagram on the X-axis of the cross beam structure after the cylindrical vibration-picking cilia are subjected to the X-axis sound wave; Figure 10 This is a simulation diagram of the lollipop-shaped vibration-picking cilia provided in an embodiment of the present application being acted upon by X-axis sound waves; Figure 11 for Figure 10 The stress distribution diagram on the X-axis of the cross beam structure after the lollipop-shaped vibration-picking cilia are acted upon by the X-axis sound wave; Figure 12 A sensitivity curve of a hydrophone when ScALN and PZT provided in an embodiment of the present application are used as piezoelectric films respectively; Figure 13 This is a structural diagram of the underwater acoustic system provided in an embodiment of the present application.

[0018] 1. Tower-shaped vibration-collecting cilia; 2. Crossbeam; 3. Connector; 4. Top electrode; 5. Piezoelectric film; 6. Bottom electrode; 7. Device layer; 8. Buried oxide layer; 9. Substrate layer; 10. Piezoelectric unit; 11. Frame base; 12. Cross-beam structure. DETAILED DESCRIPTION

[0019] The following describes the embodiments of the present application in conjunction with the accompanying drawings. It should be understood that the embodiments described below in conjunction with the accompanying drawings are exemplary descriptions for explaining the technical solutions of the embodiments of the present application and do not constitute a limitation on the technical solutions of the embodiments of the present application.

[0020] Those skilled in the art will understand that, unless otherwise stated, the singular forms "a," "an," "said," and "the" used herein may also include plural forms. It should be further understood that the terms "including" and "comprising" used in the embodiments of the present application mean that the corresponding features can be implemented as the presented features, information, data, steps, operations, elements, and / or components, but do not exclude implementation as other features, information, data, steps, operations, elements, components, and / or combinations thereof supported by the present technical field. It should be understood that when we refer to an element as being "connected" or "coupled" to another element, the element can be directly connected or coupled to the other element, or it can refer to the element and the other element establishing a connection relationship through an intermediate element. In addition, the "connection" or "coupling" used herein may include wireless connection or wireless coupling. The term "and / or" used herein indicates at least one of the items defined by the term, for example, "A and / or B" indicates implementation as "A," or implementation as "A," or implementation as "A and B."

[0021] In order to make the objectives, technical solutions and advantages of this application clearer, the implementation methods of this application will be further described in detail below with reference to the accompanying drawings.

[0022] The following describes several exemplary embodiments to illustrate the technical solutions of the embodiments of the present application and the technical effects produced by the technical solutions of the present application. It should be noted that the following embodiments can refer to, draw on, or combine with each other, and the same terms, similar features, and similar implementation steps in different embodiments will not be repeated.

[0023] The tower-shaped ciliary vector hydrophone and underwater acoustic system based on the piezoelectric effect provided in this application are intended to solve at least one technical problem existing in the prior art.

[0024] Optionally, the piezoelectric effect-based tower-shaped ciliary vector hydrophone of the present application can be installed in sonar equipment, underwater communication equipment, and other equipment that needs to detect underwater sound waves. These devices can effectively detect underwater sound waves through the hydrophone of the present application.

[0025] Optionally, the piezoelectric effect-based tower-shaped ciliary vector hydrophone of the present application may be a MEMS (Micro-Electro-Mechanical System) sensor. By using MEMS technology, the volume and weight of the hydrophone can be effectively reduced, and digital signal output can be achieved.

[0026] Alternatively, as Figures 1-12As shown, the tower-shaped ciliary vector hydrophone based on the piezoelectric effect of the present application includes: tower-shaped vibration-picking cilia 1, a cross-beam structure 12 and a piezoelectric unit 10. The cross-beam structure 12 includes a connector 3 and four cross beams 2. The cross beams 2 are fixed to the side of the connector 3 to form the cross-beam structure 12; the piezoelectric unit 10 is arranged at the head and tail ends of the cross beam 2, and the tower-shaped vibration-picking cilia 1 are fixed on the connector 3.

[0027] As shown in Table 1, when equipped with the tower-shaped vibration-picking cilia 1, the hydrophone's performance significantly outperforms that of cilia of other shapes, effectively combining high sensitivity with broadband response. This solves the technical challenge of traditional vector hydrophones, where sensitivity and bandwidth are mutually constrained during miniaturization. Furthermore, the hydrophone of this application is manufactured using MEMS technology, offering advantages such as compact structure, mass production, and good consistency, making it suitable for underwater acoustic detection and micro-sensing systems.

[0028] Table 1. Performance indicators of hydrophones equipped with different shapes of vibration-picking cilia

[0029] Optionally, the material of the tower-shaped vibration-picking cilia 1 is epoxy resin, and the density of the epoxy resin corresponds to the density of the medium in the environment in which the tower-shaped vibration-picking cilia 1 are used.

[0030] In one embodiment, the hydrophone is used in an environment formed by seawater, freshwater, or other liquids. The density of the epoxy resin can be the same as or similar to the density of the liquid (e.g., seawater) in the application environment (e.g., the density difference is less than a preset value, which can be 0.1 g / cubic centimeter or other set values). By setting the density of the tower-shaped vibration-collecting cilia 1 to be similar to the density of the medium in the environment, the sensitivity of sound detection is improved.

[0031] Optionally, the material of the tower-shaped vibration-picking cilia 1 may also be polystyrene, polyurethane, or other resins with a density close to that of water.

[0032] Optionally, the tower-shaped vibration-picking cilia 1 include a tower base and a column, the bottom of the tower base is fixed on the connector 3, the column is arranged on the side of the tower base away from the connector 3, and the bottom area of ​​the column is smaller than the area of ​​the side of the tower base contacting the column.

[0033] In one embodiment, the tower base and the column can be cylindrical structures, wherein the diameter of the column is smaller than the diameter of the tower base. Specifically, the total length of the tower-shaped vibration-picking cilia 1 is 5000 μm, the bottom base is 500 μm high and has a diameter of 1200 μm, and the top column is 4500 μm high and has a diameter of 500 μm.

[0034] Optionally, the connector 3 may be a square structure, with a crossbeam 2 provided on each side of the connector 3. The crossbeam 2 may be a rectangular parallelepiped structure, with the piezoelectric units 10 provided at both ends of the same side of the crossbeam 2. When the tower-shaped vibration-picking cilia 1 are affected by sound waves and swing, the stress of the crossbeam 2 of the cross-beam structure 12 changes. The piezoelectric units 10 at the ends of the same crossbeam 2 are subjected to opposite stresses. Therefore, the two piezoelectric units 10 on the same crossbeam 2 share the bottom electrode 6, which is connected in series. This causes the piezoelectric units 10 to generate corresponding electrical signals based on the stress changes to achieve sound detection.

[0035] In one embodiment, the connector 3 can be a square structure, and one end of the beam 2 is fixed to the middle of the side of the square structure. The tower-shaped vibration-picking cilia 1 and the piezoelectric unit 10 are arranged on the same side of the cross-beam structure 12. Among them, the two beams 2 on the opposite sides of the connector 3 are located in the same axial direction, and the piezoelectric units 10 on the two beams 2 in the same axial direction output opposite signals, thereby achieving differential mode output and obtaining a larger output voltage. Specifically, the two axial directions formed by the beams 2 of the cross-beam structure 12 are called the X-axis and the Y-axis. When the hydrophone is subjected to an X-axis sound wave of 1Pa@1kHz, the stress distribution diagrams of the X-axis and Y-axis are as shown in FIG. Figure 5 As shown, it can be seen that when the X-axis sound wave acts, the X-axis beam 2 has obvious stress deformation, and the Y-axis beam 2 has no stress deformation, which can effectively detect sound waves in different axes. The vertical cross setting of the beam 2 can effectively avoid crosstalk between the X-axis and the Y-axis, thereby effectively detecting the sound wave.

[0036] According to the acoustic wave reception theory of particle velocity hydrophones, when ka << 1 (k is the wave number of the sound wave, and a is the diameter of the pickup cilia), the sound field near the pickup cilia is not significantly distorted. When the upper operating frequency of the vector hydrophone is 2 kHz, since a = 500 μm, the target sound wave number k is < 8.4 (k = 2πf / v, where f is the operating frequency and v is the speed of sound in water, assumed to be 1500 m / s). The vector hydrophone designed in this application meets the condition of ka << 1 (ka < 0.0125), and the sound field near the tower-shaped pickup cilia 1 is not distorted, enabling effective underwater sound wave detection.

[0037] And, as Figures 6-11As shown, simulation software was used to analyze vector hydrophones equipped with three different vibration-picking cilia (the other structures were the same as the hydrophone structure of the present application, and the length of the vibration-picking cilia was the same, and the diameter of the cylindrical part was the same). The results showed that the first-order resonance frequencies of the cylindrical, lollipop, and tower-shaped vibration-picking cilia vector hydrophones were 1924.1Hz, 1201.1Hz, and 2275.5Hz, respectively. That is, the bandwidth of the lollipop-shaped vibration-picking cilia was narrower than that of the cylindrical and tower-shaped types. A 1Pa@1kHz pressure signal was applied in the X direction. When the same sound wave was applied, the greater the stress generated on the beam 2, the higher the sensitivity of the hydrophone. Therefore, the maximum stress generated on the beam 2 in the X-axis direction of the three different structures was 10kP, 14kPa, and 12kPa, respectively. The results show that although the lollipop-shaped vibration-picking cilia can improve the sensitivity of the bionic vector hydrophone, it does so at the expense of a large amount of the hydrophone's bandwidth; on the contrary, the tower-shaped vibration-picking cilia 1 not only improve the sensitivity but also broaden its bandwidth compared to the cylindrical vibration-picking cilia. This result is sufficient to prove that the tower-shaped bionic cilia have a wider frequency response and greater sensitivity than bionic cilia with other structures.

[0038] Optionally, the hydrophone further comprises a frame base 11, which surrounds the cross beam structure 12, and one end of the cross beam 2 away from the connector 3 is fixed to the inner side of the frame base 11. In this way, the cross beam structure 12 is suspended in the hydrophone.

[0039] Optionally, the frame-type base 11 may be a square frame, and the cross beam structure 12 is provided above the square cavity formed by the square frame. The lengths of each cross beam 2 in the cross beam structure 12 may be the same or different.

[0040] Optionally, the frame base 11 includes a substrate layer 9, a buried oxide layer 8, and a device layer 7 stacked in sequence, and the inner side of the device layer 7 is fixedly connected to the beam 2. The substrate layer 9, the buried oxide layer 8, and the device layer 7 can have the same shape, all of which are square frame structures.

[0041] In one embodiment, to improve processing consistency, the frame-shaped base 11 can be fabricated using SOI (Silicon-On-Insulator) technology. Specifically, the frame-shaped base 11 has an outer side length of 10,000 μm and an inner side length of 5,200 μm. From top to bottom, it comprises a 30 μm-thick device layer 7 formed of single-crystal silicon, a 2 μm-thick buried oxide layer 8 formed of silicon dioxide, and a 475 μm-thick substrate layer 9 formed of single-crystal silicon.

[0042] Optionally, the device layer 7 and the cross-beam structure 12 are made of the same material, and the cross-beam structure 12 and the device layer 7 are integrally formed.

[0043] In one embodiment, the cross-beam structure 12 can be processed simultaneously with the device layer 7, thereby ensuring that the thickness of the cross-beam structure 12 is consistent with that of the device layer 7. The thickness of the cross-beam 2 is the same as that of the connector 3. Specifically, the cross-beam structure 12 is 30 μm thick, the cross-beam 2 is 2000 μm long, and the cross-beam 2 is 400 μm wide. The connector 3 is square with a side length of 1200 μm.

[0044] Optionally, the piezoelectric units 10 at both ends of the same beam 2 are connected in series, and signal superposition is achieved through the series connection, thereby improving the sensitivity of sound detection.

[0045] Optionally, the piezoelectric unit 10 includes a bottom electrode 6 , a piezoelectric film 5 and a top electrode 4 . The top electrode 4 and the bottom electrode 6 are arranged on both sides of the piezoelectric film 5 , and two piezoelectric units 10 on the same beam 2 share one bottom electrode 6 .

[0046] Optionally, the piezoelectric film 5 is laid on top of the two cross beams 2 of the cross beam structure 12 , and the tower-shaped vibration-picking cilia 1 are arranged on a side of the piezoelectric film 5 away from the cross beams 2 .

[0047] In one embodiment, the bottom electrode 6 is disposed between the beam 2 and the piezoelectric film 5, and the top electrode 4 is located on the side of the beam 2 facing the tower-shaped vibration-picking cilia 1. Furthermore, the top electrodes 4 of the two piezoelectric units 10 are symmetrically disposed at both ends of the beam 2. The output voltage of the piezoelectric film 5 can be calculated by referring to the following formula: U=F*d 31 / ε Where, F is the stress on the piezoelectric film 5, d 31 When sound waves act on the tower-shaped vibration-picking cilia 1, the vibration of the tower-shaped vibration-picking cilia 1 generates stress changes on the cross-beam structure 12, and the piezoelectric film 5 generates an electrical signal output due to the positive piezoelectric effect.

[0048] Optionally, to facilitate signal transmission, the top electrodes 4 of the two piezoelectric units 10 on the same beam 2 are connected in series, and a first pin connected to the top electrode 4 is provided on the device layer 7, and the number of the first pins is two. The piezoelectric film 5 laid on the bottom electrode 6 is provided with a second pin, and the number of the second pins can also be two. The second pin is provided on the device layer 7, and the first pin is provided on the side of the second pin away from the device layer 7. A third pin is provided at the tail end of the bottom electrode 6, and the third pin is located on the side of the device layer 7 away from the buried oxide layer 8, and does not overlap with the first pin and the second pin.

[0049] Optionally, the material of the piezoelectric film 5 can be scandium-doped aluminum nitride (ScALN), and the material of the bottom electrode 6 and the top electrode 4 can be molybdenum (Mo). Figure 12It can be seen that the method of using scandium-doped aluminum nitride to form the piezoelectric film 5 can effectively improve the sensitivity coefficient of the hydrophone, has high compatibility with MEMS, is simple to prepare, and effectively reduces the production cost of the hydrophone.

[0050] Table 2. Comparison of piezoelectric film 5 material parameters

[0051] In one embodiment, the piezoelectric film 5 is made of ScALN by plasma-enhanced chemical vapor deposition (PECVD). This improves the compatibility of the piezoelectric film 5 with CMOS processes, making the piezoelectric film 5 simple to manufacture, uniform in thickness, and highly sensitive. Specifically, the bottom electrode 6 has a thickness of 200 nm, the piezoelectric film 5 made of scandium-doped aluminum nitride has a thickness of 1 μm, and the top electrode 4 has a thickness of 200 nm.

[0052] The tower-shaped ciliary vector hydrophone based on the piezoelectric effect in this application has the following advantages: 1. When sound waves act on the tower-shaped vibration-picking cilia 1, the swing of the tower-shaped vibration-picking cilia 1 produces stress changes on the cross-beam structure 12, and the piezoelectric film 5 generates an electrical signal output due to the positive piezoelectric effect. This application innovatively selects ScALN as the piezoelectric film 5. Compared with the piezoelectric vector hydrophone with the same structure of piezoresistive type and PZT as the piezoelectric film 5, it has higher sensitivity, simple preparation and high integration.

[0053] 2. The innovative selection of tower-shaped cilia as vibration pickup units can better balance sensitivity and working bandwidth compared to other structures of vibration pickup cilia. In addition, the hydrophone is prepared using micro-nano processing technology, which realizes the miniaturization of the vector hydrophone. In addition, the piezoelectric film 5 in the sandwich structure piezoelectric unit 10 is prepared by PECVD, which has higher consistency and better uniformity, and the material properties make it more sensitive. The piezoelectric end elements located on the two end surfaces of a single beam 2 are connected in series to achieve signal superposition in this direction. The two beams 2 located on the same axial direction have opposite output signals, and the differential mode output can obtain a larger output voltage and effectively suppress noise.

[0054] Based on the same inventive concept, the embodiment of the present application provides an underwater acoustic system, such as Figure 13 As shown, the underwater acoustic system includes a signal acquisition circuit and the aforementioned tower-shaped ciliary vector hydrophone. The excitation circuit is connected to the tower-shaped ciliary vector hydrophone to detect sound signals. The signal acquisition circuit can collect the electrical signal generated by the stress and deformation of the piezoelectric model of the piezoelectric unit in the hydrophone due to the crossbeam, and transmit this electrical signal to the signal analysis device to obtain the sound detection result.

[0055] Those skilled in the art will appreciate that the steps, measures, and schemes in the various operations, methods, and processes discussed in this application may be interchanged, modified, combined, or deleted. Furthermore, other steps, measures, and schemes in the various operations, methods, and processes discussed in this application may also be interchanged, modified, rearranged, decomposed, combined, or deleted. Furthermore, steps, measures, and schemes in the related art that are similar to those disclosed in this application may also be interchanged, modified, rearranged, decomposed, combined, or deleted.

[0056] In the description of this application, the directions or positional relationships indicated by words such as "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", and "outside" are exemplary directions or positional relationships based on the accompanying drawings. They are intended to facilitate or simplify the description of the embodiments of this application, and do not indicate or imply that the device or component referred to must have a specific orientation or be constructed and operated in a specific orientation. Therefore, they should not be understood as limitations on this application.

[0057] In the specification and claims of this application and the accompanying drawings, the terms "first," "second," "third," "fourth," "1," "2," and so on (if any) are used to distinguish similar objects and are not necessarily used to describe a particular order or sequence. It should be understood that the terms used in this manner are interchangeable where appropriate, such that the embodiments of the present application described herein can be practiced in an order other than that shown or described.

[0058] It should be understood that, although each operation step is indicated by arrows in the flowchart of the embodiment of the present application, the order of implementation of these steps is not limited to the order indicated by the arrows. Unless otherwise clearly stated herein, in some implementation scenarios of the embodiment of the present application, the implementation steps in each flowchart can be performed in other orders according to demand. In addition, some or all of the steps in each flowchart can include multiple sub-steps or multiple stages based on actual implementation scenarios. Some or all of these sub-steps or stages can be executed at the same time, and each sub-step or stage in these sub-steps or stages can also be executed at different times respectively. Under different scenarios at the execution time, the execution order of these sub-steps or stages can be flexibly configured according to demand, and the embodiment of the present application does not limit this.

[0059] The above description is only an optional implementation method for some implementation scenarios of this application. It should be pointed out that for ordinary technicians in this technical field, without departing from the technical concept of the solution of this application, the use of other similar implementation methods based on the technical ideas of this application also falls within the protection scope of the embodiments of this application.

Claims

1. A tower-shaped ciliary vector hydrophone based on piezoelectric effect, characterized in that: include: Tower-shaped vibration-collecting cilia (1), a cross-beam structure (12), and a piezoelectric unit (10), wherein the cross-beam structure (12) comprises a connector (3) and four cross-beams (2), and the cross-beams (2) are fixed to the side surfaces of the connector (3) to form the cross-beam structure (12); The piezoelectric unit (10) is arranged at both ends of the beam (2), and the tower-shaped vibration-picking cilia (1) are fixed on the connector (3).

2. The piezoelectric effect-based tower-shaped ciliary vector hydrophone according to claim 1, characterized in that: It also includes a frame-shaped base (11), the frame-shaped base (11) surrounds the cross beam structure (12), and one end of the cross beam (2) away from the connector (3) is fixed to the inner side of the frame-shaped base (11).

3. The piezoelectric effect-based tower-shaped ciliary vector hydrophone according to claim 2, characterized in that: The frame-shaped base (11) comprises a substrate layer (9), a buried oxide layer (8), and a device layer (7) stacked in sequence, and the inner side of the device layer (7) is fixedly connected to the crossbeam (2).

4. The piezoelectric effect-based tower-shaped ciliary vector hydrophone according to claim 3, characterized in that: The device layer (7) and the cross beam structure (12) are made of the same material, and the cross beam structure (12) and the device layer (7) are integrally formed.

5. The piezoelectric effect-based tower-shaped ciliary vector hydrophone according to claim 1, characterized in that: The piezoelectric units (10) at both ends of the same beam (2) are connected in series.

6. The piezoelectric effect-based tower-shaped ciliary vector hydrophone according to claim 5, characterized in that: The piezoelectric unit (10) comprises a bottom electrode (6), a piezoelectric film (5), and a top electrode (4); the top electrode (4) and the bottom electrode (6) are arranged on both sides of the piezoelectric film (5), and two piezoelectric units (10) on the same beam (2) share one bottom electrode (6).

7. The piezoelectric effect-based tower-shaped ciliary vector hydrophone according to claim 6, characterized in that: The piezoelectric film (5) is laid above the cross beam (2) of the cross beam structure (12).

8. The piezoelectric effect-based tower-shaped ciliary vector hydrophone according to claim 6, characterized in that: The material of the piezoelectric film (5) is scandium-doped aluminum nitride.

9. The piezoelectric effect-based tower-shaped ciliary vector hydrophone according to claim 1, characterized in that: The material of the tower-shaped vibration-picking cilia (1) is epoxy resin, and the density of the epoxy resin corresponds to the density of the medium in the environment in which the tower-shaped vibration-picking cilia (1) are used.

10. An underwater acoustic system, characterized in that: The underwater acoustic system includes a signal acquisition circuit and the tower-shaped ciliary vector hydrophone according to any one of claims 1 to 9, wherein the signal acquisition circuit is connected to the tower-shaped ciliary vector hydrophone to detect sound signals.

Images