Dust-free room facility

Abstract

The invention provides a dust-free room facility which can make the temperature of a plurality of dust-free rooms proper through a simple structure. A clean room facility (100) is provided with: a plurality of clean rooms including a first clean room and a second clean room; a chamber (C1) provided as a common space on the back surface of the ceilings of the plurality of clean rooms; an air conditioner (32); a plurality of air supply fans (1a-4a); at least one return air fan (11a, 12a); and a piping shaft (DS2) that guides air from a predetermined second clean room to the chamber (C1), the second clean room being provided downstream of the first clean room in the direction of flow of the air in the chamber (C1), and the flow path of the air in the chamber (C1) being throttled upstream of the piping shaft (DS2).

Description

Technical Field

[0001] The present invention relates to clean room facilities. Background Art

[0002] Clean rooms with high air cleanliness are used in regenerative medicine, pharmaceutical production, etc. Regarding such clean rooms, for example, Patent Document 1 discloses a structure in which "the spaces behind the ceilings of a plurality of clean rooms are included in the chamber as a common space."

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent No. 7181425 Summary of the Invention

[0006] Problems to be solved by the invention

[0007] In the technology described in Patent Document 1, as described above, the chamber behind the ceiling serves as a common space for multiple clean rooms. In this configuration, if the heat load during air conditioning varies among the clean rooms, clean rooms with lower heat loads (such as dressing rooms) may be overcooled. Even in a configuration where multiple clean rooms share a common chamber, it is desirable to maintain an appropriate temperature in each clean room, but Patent Document 1 does not describe such a technology.

[0008] Therefore, an object of the present invention is to provide a clean room facility capable of maintaining the temperatures of a plurality of clean rooms at appropriate temperatures with a simple structure.

[0009] Solutions to Problems

[0010] In order to solve the above-mentioned problems, the clean room facility of the present invention comprises: multiple clean rooms, including a first clean room and a second clean room; a chamber, which is arranged as a common space on the back of the ceiling of the multiple clean rooms; an air conditioner, whose blow-out side is connected to the chamber via a duct; multiple air supply fans, which supply air from the chamber to the multiple clean rooms respectively; a return air fan, which returns air from at least one of the multiple clean rooms to the chamber; and a duct shaft, which guides air from a predetermined second clean room to the chamber, and in the air circulation direction in the chamber, the second clean room is arranged on the downstream side of the first clean room, and the air flow path in the chamber is throttled on the upstream side of the duct shaft.

[0011] Effects of the Invention

[0012] According to the present invention, a clean room facility can be provided that can adjust the temperatures of a plurality of clean rooms to appropriate temperatures with a simple structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is an explanatory diagram showing the plan layout of each room of the clean room facility according to the first embodiment.

[0014] Figure 2 It is an explanatory diagram showing the flow of air in the clean room facility according to the first embodiment.

[0015] Figure 3 It is an explanatory diagram showing the flow of air in a clean room facility according to a second modified example of the first embodiment.

[0016] Figure 4 It is an explanatory diagram showing the flow of air in the clean room facility according to the second embodiment.

[0017] Figure 5 It is an explanatory diagram showing the flow of air in the clean room facility according to the third embodiment.

[0018] Figure 6 It is an explanatory diagram showing the flow of air in the clean room facility according to the fourth embodiment.

[0019] Figure 7 It is an explanatory diagram showing the flow of air in the clean room facility according to the fifth embodiment.

[0020] Figure 8 It is an explanatory diagram showing the flow of air in a clean room facility of a reference system.

[0021] Figure 9 This is an explanatory diagram showing the flow of air in a clean room facility in a combination of the first embodiment and the reference form. DETAILED DESCRIPTION

[0022] First Implementation Method

[0023] <Clean Room Facility Structure>

[0024] Figure 1 It is an explanatory diagram showing the plan layout of each room of the clean room facility 100 according to the first embodiment.

[0025] In addition, Figure 1 In the embodiment, the external air handling unit 31 (see Figure 2 ) diagram. In addition, Figure 1 The shaded portion shows the chamber C1 on the back of the ceiling of each clean room (see Figure 2 ) is provided with a range of the convex portions 51 and 52. Figure 1 The hollow arrow X shows that the air passes through the chamber C1 (refer to Figure 2 ) direction of circulation.

[0026] Cleanroom facility 100 regulates the temperature, pressure, cleanliness, etc. of multiple cleanrooms such as preparation room R1, transfer room R2, and dressing room R3. Such cleanroom facility 100 is used, for example, for cell culture processing and the production of sterile preparations (vaccines, injections, eye drops, etc.).

[0027] exist Figure 1 In the example of , as the “plural clean rooms” included in the clean room facility 100 , a preparation room R1 (first clean room), a transfer room R2 (second clean room), and a dressing room R3 (second clean room) are provided.

[0028] The front room R4 is a general room whose cleanliness is not specially managed. In the front room R4, predetermined pre-processing, analysis, etc. are carried out. For example, the operating panel, monitoring device, and public device of the equipment (not shown) used in the preparation room R1 can also be set in the front room R4. The dressing room R3 is a clean room for workers to undress and dress, and is set between the preparation room R1 and the front room R4. In addition, people can enter and exit between the front room R4 and the dressing room R3 through the door 21. In addition, people can enter and exit between the dressing room R3 and the preparation room R1 through another door 22. In addition, the room pressure and cleanliness of the dressing room R3 are lower than those of the preparation room R1.

[0029] The transfer room R2 is a clean room for carrying in / out samples and is located between the preparation room R1 and the front room R4. Figure 1 In the example of FIG, a person can enter and exit between the front room R4 and the transfer room R2 via the door 23. In addition, a person can enter and exit between the transfer room R2 and the preparation room R1 via another door 24.

[0030] Furthermore, to prevent sample contamination, the pressure in the transfer chamber R2 can be set higher than that in the preparation chamber R1 and front chamber R4. This prevents dust from entering the preparation chamber R1 via the transfer chamber R2 when doors 23 and 24 are opened and closed, and people from entering and leaving. Furthermore, it prevents the sample (aerosol) from flowing from the preparation chamber R1 to the front chamber R4 via the transfer chamber R2.

[0031] The preparation room R1 is a clean room for preparing samples. Examples of such "samples" include cells and sterile preparations, but are not limited thereto. Samples are prepared in the preparation room R1, so the cleanliness of the preparation room R1 is higher than that of the transfer room R2 and the dressing room R3. The machine room M1 is a room where the air conditioner 32 is installed. In addition, as the ceiling of the machine room M1, the ceiling of the clean room facility 100 (see Figure 2 ), and in addition, the ceiling of the machine room M1 may be set separately, which can be arbitrary. The air conditioner 32 is adjusted to the chamber C1 (refer to Figure 2) A device for controlling the temperature, humidity, etc. of the air supplied. As such an air conditioner 32, for example, an air handling unit or a cabinet air conditioner is used.

[0032] Figure 1 The pipe well DS1 shown is an air duct for the air from the conditioning room R1, extending in the vertical direction (see also Figure 2 The other pipe shaft DS2 is used to transfer the air from the transfer chamber R2 to the chamber C1 (refer to Figure 2 ) guides the air duct, extending in the vertical direction. These pipe wells DS1 and DS2 are connected to the chamber C1 (refer to Figure 2 ) are connected. In addition, Figure 1 The illustrated plan layout of the clean room facility 100 is an example and is not limited thereto.

[0033] Figure 2 It is an explanatory diagram showing the flow of air in the clean room facility 100 .

[0034] like Figure 2 As shown, clean room facility 100 includes an external air handling unit 31, an air conditioner 32, a chamber C1, and pressure sensors 41 and 42. In addition to the above-described configuration, clean room facility 100 further includes fan filter units 1 to 4 on the supply air side, fan filter units 11 and 12 on the return air side, and protrusions 51 and 52.

[0035] The outside air processing unit 31 is a device that takes in outside air and supplies it to the air conditioner 32. Figure 2 As shown, the external air processing unit 31 includes a filter 31a and a fan 31b. The filter 31a collects dust from the external air taken in through the duct D1. The fan 31b is a blower for sending the air that has passed through the filter 31a to the air conditioner 32 through the duct D2. Figure 2 As shown, the duct D1 is provided with a damper 61. The damper 61 is set to a predetermined opening degree during the test operation of the external air handling unit 31, and is maintained at the predetermined opening degree during the subsequent normal operation.

[0036] The air conditioner 32 is a device that adjusts the temperature, humidity, etc. of the air directed toward the chamber C1. Figure 2 As shown, air conditioner 32 includes an inlet 32a, a filter 32b, a cooling coil 32c, a fan 32d, and an inverter 32e. Inlet 32a is a cylindrical body that merges the air flowing through ducts D2 and D3 and guides the merged air toward filter 31a. Duct D3 is connected to duct shaft DS1 at its upstream end and to inlet 32a at its downstream end.

[0037] Filter 32b collects dust from the air flowing through inlet 32a toward cooling coil 32c. Cooling coil 32c is a heat exchanger that exchanges heat between the air passing through filter 32b and the refrigerant flowing through a heat transfer tube (not shown). Fan 32d is a blower that delivers the air cooled by cooling coil 32c into chamber C1 via duct D4. Inverter 32e drives the motor (not shown) of fan 32d in a predetermined manner.

[0038] like Figure 2 As shown in FIG, the air outlet side of the air conditioner 32 is connected to the chamber C1 via the duct D4. The air cooled by the air conditioner 32 is guided to the chamber C1 via the duct D4. Figure 2 As shown, the duct D4 is provided with a damper 62. The damper 62 is set to a predetermined opening degree during the test operation of the air conditioner 32, and is maintained at the predetermined opening degree during the subsequent air conditioning operation.

[0039] Figure 2 The chamber C1 shown is the space behind the ceilings of each clean room. Specifically, the chamber C1 is provided behind the ceilings of multiple clean rooms, including the preparation room R1, the transfer room R2, and the dressing room R3, as a shared space. The chamber C1 is formed by the ceilings 71-73, upper panels C1a, and side panels C1b of the preparation room R1, the transfer room R2, and the dressing room R3.

[0040] The upper plate C1a is higher than the top plates 71 to 73 of each clean room and is substantially parallel to these top plates 71 to 73. The side plates C1b extend downward from the edge of the upper plate C1a and are connected to the top plates 71 to 73. Figure 2 In the example of FIG, a space A1 different from the chamber C1 is provided on the upper side of the upper plate C1a, but a structure in which the space A1 is not particularly provided may be adopted.

[0041] Figure 2 The fan filter units 1 and 2 shown are devices that supply air from chamber C1 to preparation chamber R1 and are embedded in the ceiling 71 of preparation chamber R1. The fan filter unit 1 includes an air supply fan 1a and a filter 1b. The air supply fan 1a is a blower that supplies air from chamber C1 to preparation chamber R1.

[0042] Filter 1b collects dust from the air flowing from air supply fan 1a toward preparation chamber R1 and is located on the outlet side of air supply fan 1a. Examples of such filter 1b include a HEPA (High Efficiency Particulate Air Filter) or an ULPA (Ultra Low Penetration Air Filter). The fan-filter unit 2 used to supply air to preparation chamber R1 also has a similar structure.

[0043] The fan filter unit 3 supplies air from chamber C1 to transfer room R2 and is embedded in the ceiling 72 of transfer room R2. Another fan filter unit 4 supplies air from chamber C1 to dressing room R3 and is embedded in the ceiling 73 of dressing room R3. These fan filter units 3 and 4 have the same structure as the fan filter units 1 and 2 described above, so their description will be omitted. Thus, multiple air supply fans 1a to 4a are provided to supply air from chamber C1 to multiple "clean rooms."

[0044] The fan filter unit 11 is a device for making the air in the conditioning chamber R1 flow out to the duct shaft DS1 and is installed in the duct shaft DS1. Figure 2 As shown, the fan filter unit 11 includes a return air fan 11a and a filter 11b. The return air fan 11a is a blower that returns air from the conditioning chamber R1 to the chamber C1 and the air conditioner 32 via the duct shaft DS1. The filter 11b collects dust from the air flowing from the conditioning chamber R1 toward the return air fan 11a and is located on the suction side of the return air fan 11a.

[0045] Another fan filter unit 12 is installed in the duct shaft DS2, which returns air from the transfer room R2 to the chamber C1. Since the fan filter unit 12 has the same structure as the fan filter unit 11 described above, its description will be omitted. Thus, return air fans 11a and 12a are installed to return air from multiple "clean rooms" to the chamber C1.

[0046] Air from the dressing room R3 is exhausted to the front room R4 through the opening E3. A micro-differential pressure damper (not shown) that opens and closes according to the pressure difference between the dressing room R3 and the front room R4 may also be provided. The air from the front room R4 is exhausted to the outside through a gap such as a door (not shown). Furthermore, the flow rate of air introduced into the clean room facility 100 by the external air handling unit 31 is set to be approximately equal to the flow rate of air flowing out of the clean room facility 100.

[0047] The fan filter units 1 to 4 on the supply air side and the fan filter units 11 and 12 on the return air side are controlled by a control device (not shown). Alternatively, the fan filter units 1 to 4, 11, and 12 may each have a built-in control device, or multiple fan filter units may be connected to a single control device via wiring.

[0048] The rotational speed of the return air fan 11a is controlled to maintain the pressure in the preparation chamber R1 at a predetermined set pressure (target pressure). Similarly, the rotational speed of the other return air fan 12a is controlled to maintain the pressure in the transfer chamber R2 at a predetermined set pressure. The rotational speeds of the supply air fans 1a to 4a can be constant or adjusted as appropriate.

[0049] Figure 2 The pressure sensor 41 shown is a sensor for detecting the pressure in the preparation chamber R1 and is installed in the preparation chamber R1. The detection value of the pressure sensor 41 is used to control the fan-filter unit 11 on the return air side of the preparation chamber R1. Another pressure sensor 42 is a sensor for detecting the pressure in the transfer chamber R2 and is installed in the transfer chamber R2. The detection value of the pressure sensor 42 is used to control the fan-filter unit 12 on the return air side of the transfer chamber R2.

[0050] In addition, although Figure 2 Although not shown in the figure, temperature sensors for detecting room temperature are installed in each of the preparation room R1, the delivery room R2, and the dressing room R3. The detection values ​​of these temperature sensors are used to control the air conditioner 32.

[0051] As described above, duct shaft DS1 is an air duct for circulating air from preparation room R1, extending vertically. As the fan filter unit 11 is driven, a portion of the air flowing out of preparation room R1 into duct shaft DS1 is guided to the air conditioner 32 via duct D3, while the remaining air returns to chamber C1. Duct shaft DS2 is an air duct that guides air from transfer room R2 (the designated second clean room) to chamber C1, extending vertically.

[0052] Figure 2 The convex portions 51 and 52 shown are components for restricting the flow path of air in the chamber C1 on the upstream side of the duct shaft DS2. The reasons for providing the convex portions 51 and 52 and their structures will be described in detail below.

[0053] <Clean Room Temperature>

[0054] The preparation room R1 is often equipped with equipment such as a thermostat (not shown) and a safety cabinet (not shown). These equipment generate heat during operation, so to maintain the preparation room R1 at a predetermined set temperature (e.g., 22°C), cooled air is supplied from the air conditioner 32 to the chamber C1 via the duct D4.

[0055] As described above, chamber C1 is provided as a shared space behind the ceiling of the preparation room R1, transfer room R2, and dressing room R3. If the projections 51 and 52 were not provided, the low-temperature air supplied to chamber C1 via duct D4 would be blown directly into the transfer room R2 and dressing room R3. These transfer rooms R2 and dressing room R3 often lack dedicated equipment that generates heat during operation. Consequently, the transfer rooms R2 and dressing room R3 are too cold, making it easy for workers to feel cold when changing clothes in dressing room R3, for example.

[0056] Incidentally, the set temperatures of the transfer room R2 and the dressing room R3 may sometimes be higher than the set temperature of the preparation room R1, but may also be approximately equal to the set temperature of the preparation room R1. Even if the set temperatures of the preparation room R1, transfer room R2, and dressing room R3 are all equal (e.g., 22°C), low-temperature air (e.g., 18°C) is supplied from the air conditioner 32 to the chamber C1 to cool the preparation room R1, which contains equipment generating heat during operation. If the configuration lacks the protrusions 51 and 52, the low-temperature air flowing through the chamber C1 is directly supplied to the transfer room R2 and the dressing room R3. Therefore, the actual temperatures of the transfer room R2 and the dressing room R3 are likely to fall below the set temperature (e.g., 22°C).

[0057] Therefore, in the first embodiment, convex portions 51 and 52 are provided on the upstream side of the duct shaft DS2 in the chamber C1. This increases the flow resistance near the convex portions 51 and 52, thereby preventing the low-temperature air supplied to the chamber C1 from flowing downstream beyond the convex portions 51 and 52. This prevents overcooling of the transfer room R2 and the dressing room R3.

[0058] like Figure 1 As shown, in the direction of air circulation in the chamber C1 (arrow X1), a transfer room R2 (second clean room) and a changing room R3 (second clean room) are provided on the downstream side of the preparation room R1 (first clean room). The above-mentioned "first clean room" is a clean room that supplies low-temperature air in order to maintain an appropriate temperature. Such a "first clean room" is mostly a room with a relatively large heat load for air conditioning, such as the preparation room R1. In addition, the "second clean room" is a clean room that suppresses the supply of low-temperature air and supplies air with a temperature slightly higher than that of the "first clean room". Such a "second clean room" is mostly a room with a relatively small heat load for air conditioning, such as the transfer room R2 and the changing room R3.

[0059] Furthermore, the distinction between the "first clean room" and the "second clean room" does not need to be determined solely by the magnitude of the heat load of the air conditioning, but can be appropriately determined during the design phase by taking into account the overall layout and ease of use of the clean room facility 100. For example, Figure 2 In the example, the transfer room R2 is the "second clean room", but there is also another structure as described later (see Figure 3 ) as in the case where the transfer room R2 is the “first clean room”.

[0060] Figure 2 The protrusion 51 on one side of the protrusions 51 and 52 shown is fixed to the lower surface of the upper plate C1a of the chamber C1 by screws or the like, and protrudes downward from the upper plate C1a. In other words, the protrusion 51 is provided so as to protrude from the upper plate C1a of the chamber C1 in the vertical direction toward the space within the chamber C1. The protrusion 52 on the other side is fixed to the upper surface of the top plate 71 of the preparation chamber R1 by screws or the like, and protrudes upward from the top plate 71. In other words, the protrusion 52 is provided so as to protrude from the top plate 71 of the preparation chamber R1 (first clean room) in the vertical direction toward the space within the chamber C1. These protrusions 51 and 52 are opposed to each other in the vertical direction.

[0061] exist Figure 2 In the example shown, the cross-sectional shape of the protrusions 51 and 52 is rectangular, but other shapes are also possible. The protrusions 51 and 52 can be made of the same material as the heat insulation panels forming the preparation room R1, transfer room R2, and dressing room R3, or can be made of metal or resin. The protrusions 51 and 52 can be hollow or solid.

[0062] like Figure 1 As shown in the top view, the convex parts 51 and 52 extend along the boundary line L1 between the preparation room R1 (first clean room) and the transfer room R2 and the dressing room R3 (second clean room), and extend elongated on the side closer to the preparation room R1 than the boundary line L1. That is, the convex parts 51 and 52 extend along the boundary line L1 between the preparation room R1 (first clean room) and the transfer room R2 and the dressing room R3 (second clean room). Figure 2 ) in the direction of air flow ( Figure 1 It extends slenderly in a direction perpendicular to the arrow X1).

[0063] like Figure 1 As shown, the longitudinal ends of the protrusions 51 and 52 extend to the side surfaces of the preparation chamber R1 (side surfaces parallel to the direction of air flow in the chamber C1) when viewed from above. In other words, the protrusions 51 and 52 are arranged so as to span the entire width of the preparation chamber R1. Furthermore, the protrusions 51 and 52 may contact the side surfaces of the chamber C1 or may be spaced a predetermined distance apart from the side surfaces.

[0064] The air flow direction of the convex parts 51 and 52 in the chamber C1 ( Figure 1 The air flow path in chamber C1 is throttled by protrusions 51 and 52 upstream of duct shaft DS2. Here, "throttled" air flow path in chamber C1 means that the cross-sectional area of ​​the air flow path is reduced at a predetermined location when the air flows through chamber C1.

[0065] More specifically, in chamber C1 (see Figure 2 ), protrusions 51 and 52 are provided between the downstreammost air supply fan (i.e., air supply fan 2a) among the multiple air supply fans 1a and 2a supplying air to the conditioning chamber R1 (first clean room) and the duct shaft DS2. As described above, the duct shaft DS2 is an air duct for returning air flowing out of the transfer room R2 (second clean room) to the chamber C1.

[0066] This structure makes it difficult for air flowing through chamber C1 to be directed downstream of protrusions 51 and 52. Consequently, most of the low-temperature air cooled by air conditioner 32 is supplied to preparation chamber R1 by fan-filter units 1 and 2 on the air supply side. As a result, preparation chamber R1, which houses equipment that generates heat during operation, can be appropriately cooled, while also preventing overcooling of transfer room R2 and dressing room R3.

[0067] Furthermore, the air directed to chamber C1 via duct shaft DS2 is less likely to be directed upstream of protrusions 51 and 52 (upstream of the air flow direction within chamber C1). As a result, the majority of the air directed from transfer room R2 via duct shaft DS2 to chamber C1 is supplied to transfer room R2 and dressing room R3 via fan filter units 3 and 4. This creates a short-circuit flow downstream of protrusions 51 and 52, thereby preventing overcooling of transfer room R2 and dressing room R3. Furthermore, even when short-circuit flow occurs, adequate cleanliness can be maintained in transfer room R2 and dressing room R3 by ensuring a high ventilation rate.

[0068] Furthermore, at least one of the "second clean rooms," such as dressing room R3, can be located at the downstream end of the multiple clean rooms in the air flow direction of chamber C1. In chamber C1, the air temperature tends to increase toward the downstream end, effectively preventing overcooling of dressing room R3 and the like.

[0069] <Effect>

[0070] According to the first embodiment, protrusions 51 and 52 are provided upstream of the duct shaft DS2 in the direction of air flow within chamber C1. This allows for moderate cooling of the preparation room R1 (first clean room), which has a relatively high heat load for air conditioning. Furthermore, overcooling of the transfer room R2 (second clean room) and the dressing room R3 (second clean room), which have a lower heat load for air conditioning than the preparation room R1, can be prevented.

[0071] Furthermore, since the spaces upstream and downstream of the protrusions 51 and 52 in chamber C1 are connected, the pressure within chamber C1 can be made uniform. Furthermore, due to the simple structure of providing the protrusions 51 and 52 in chamber C1, there is no need to use a separate heat source such as a heater (not shown) to heat the transfer room R2 and the dressing room R3, thereby reducing construction costs and electricity costs.

[0072] First Modification of the First Embodiment

[0073] In the first embodiment, the cavity C1 is provided with the protrusions 51 and 52 (see Figure 2 ) structures, one of the protrusions 51 and 52 can be omitted. Specifically, a "protrusion" can be provided that protrudes vertically from at least one of the top plate 71 of the preparation room R1 (first clean room) and the upper plate C1a of the chamber C1 into the space within the chamber C1. Even with this structure, the preparation room R1 can be appropriately cooled while preventing overcooling of the transfer room R2 and the dressing room R3.

[0074] Second Modification of the First Embodiment

[0075] In the first embodiment, the dressing room R3 (refer to Figure 2 ) The case where the air is exhausted to the front chamber R4 through the opening E3 is described, but the present invention is not limited thereto. That is, a duct shaft DS3 (see FIG. 1 ) may be provided to return the air in the dressing room R3 to the chamber C1. Figure 3 ).use Figure 3 Such a structure will be described.

[0076] Figure 3 It is an explanatory diagram showing the flow of air in the clean room facility 100A according to the second modified example of the first embodiment.

[0077] like Figure 3As shown, a duct shaft DS3 is provided between transfer room R2 and dressing room R3. Duct shaft DS3 serves as an air duct for returning air flowing out of dressing room R3 to chamber C1. Duct shaft DS3 extends vertically and communicates with chamber C1. A fan filter unit 13 is installed in duct shaft DS3, serving as a device for returning air from dressing room R3 to chamber C1 via duct shaft DS3. The rotational speed of the return air fan 13a of fan filter unit 13 is adjusted appropriately based on the pressure sensor 43 in dressing room R3.

[0078] exist Figure 3 In the example shown in FIG1 , convex portions 51 and 52 are provided upstream of the duct shaft DS3 in the direction of air flow in chamber C1. More specifically, convex portions 51 and 52 are provided between the fan filter unit 3 that supplies air to the transfer chamber R2 and the duct shaft DS3 in the direction of air flow in chamber C1.

[0079] The convex portion 51 is provided on the lower surface of the upper plate C1a of the chamber C1 and projects downward from the upper plate C1a. The other convex portion 52 is provided on the upper surface of the top plate 72 of the transfer chamber R2 and projects upward from the top plate 72. These convex portions 51 and 52 face each other in the vertical direction. Figure 3 In this example, the preparation room R1 and the transfer room R2 serve as the "first clean room," while the dressing room R3 serves as the "second clean room." This configuration not only allows for moderate cooling of the preparation room R1 and the transfer room R2, but also prevents overcooling of the dressing room R3. Furthermore, the clean air in the dressing room R3 can be reused.

[0080] Second Implementation Method

[0081] The second embodiment differs from the first embodiment in that a clean room facility 100B (see Figure 4 ) floor and the upper floor separated by a plate-shaped upper floor slab E1 (refer to Figure 4 ). In addition, the second embodiment is different from the first embodiment in that the convex portions 51 and 52 (see Figure 2 ) to cover beam B1 (refer to Figure 4 ) is provided in the manner of setting the covering member 53 (refer to Figure 4 ). Other aspects are the same as those of the first embodiment. Therefore, only the parts different from the first embodiment will be described, and the description of the overlapping parts will be omitted.

[0082] Figure 4 It is an explanatory diagram showing the flow of air in the clean room facility 100B according to the second embodiment.

[0083] In addition, Figure 4 In the embodiment, the external air handling unit 31 is omitted (refer to Figure 2 ) is shown in the figure, but an external air processing unit 31 is provided in the same manner as the first embodiment.

[0084] exist Figure 4 In the example, a plate-shaped upper floor E1 is provided to separate the clean room facility 100B from the upper floor. As such an upper floor E1, for example, thick-walled concrete is used. A beam B1 is provided on the lower surface of the upper floor E1. The beam B1 passes through the upper plate C1a of the chamber C1 and protrudes downward (or the upper plate C1a is formed so as to avoid the beam B1). That is, the beam B1 is provided so as to protrude into the space inside the chamber C1 in the vertical direction. In addition, the beam B1 is provided in the direction of air circulation in the chamber C1 ( Figure 1 The beam B1 is provided on the upstream side of the pipe well DS2 and extends in a direction perpendicular to the flow direction. The range of the beam B1 is similar to that of the convex portion 51 of the first embodiment (see Figure 1 ) have the same scope.

[0085] Figure 4 The cover member 53 shown covers the beam B1 in the space of the chamber C1 and is generally U-shaped when viewed in cross section. Specifically, the cover member 53 includes a pair of side plates 53a and 53b that are opposed to each other and a bottom plate 53c that connects the lower ends of these side plates 53a and 53b. The cover member 53 is fixed to the lower surface of the upper plate C1a of the chamber C1 by screws or the like near both ends when viewed in cross section. When covering the beam B1, the cover member 53 is in a state of being aligned with the air flow direction ( Figure 1 Thus, since the beam B1 is covered by the covering member 53, compared with a structure in which the beam B1 is exposed in the cavity C1, it is possible to prevent problems from occurring in ensuring thermal insulation and maintaining cleanliness.

[0086] exist Figure 4 In the example shown, a predetermined gap is provided between the covering member 53 and the beam B1. However, at least a portion of the inner surface of the covering member 53 may be in contact with the beam B1. The covering member 53 may be made of the same material as the heat insulating panels forming the preparation room R1, transfer room R2, and dressing room R3, or may be made of metal or resin.

[0087] The positions of both ends of the covering member 53 in the longitudinal direction may be substantially the same as the positions of both ends of the beam B1, or may extend longer than both ends of the beam B1. Figure 4 As shown, the covering part 53 is arranged between the air supply fan located on the most downstream side (that is, the air supply fan 2a) among the multiple air supply fans 1a and 2a that supply air to the modulation room R1 (first clean room) and the duct shaft DS2 in the air circulation direction in the chamber C1.

[0088] By placing the cover member 53 in this manner, the air flow path in chamber C1 is throttled upstream of the duct shaft DS2. Therefore, in addition to moderately cooling the conditioning room R1, it also prevents overcooling of the transfer room R2 and the dressing room R3. Furthermore, the position of the cover member 53 in the direction of air flow does not necessarily need to be between the air supply fan 2a and the duct shaft DS2; a structure in which a portion of the cover member 53 overlaps the vertical projection of the duct shaft DS2 (not shown) is also acceptable.

[0089] exist Figure 4 In the example described above, a portion of the beam B1 is present in the chamber C1. However, the same applies to a case where at least a portion of a tubular member such as a pipe (not shown) is present in the chamber C1 instead of the beam B1. In this case, the pipe (not shown) is covered by the covering member 53.

[0090] <Effect>

[0091] According to the second embodiment, even if a portion of the beam B1 is present in the chamber C1, a clean room such as the preparation room R1 can be provided below the beam B1. This makes it easier to secure the clean room area and improves the layout freedom in the design stage.

[0092] Third Implementation Method

[0093] In the third embodiment, the convex portions 51 and 52 described in the first embodiment (see Figure 2 ) and provided with a plurality of holes 54a (refer to Figure 5 ) of the porous plate 54 (refer to Figure 5 ). Other aspects are the same as those of the first embodiment. Therefore, only the parts different from the first embodiment will be described, and the description of the overlapping parts will be omitted.

[0094] Figure 5 It is an explanatory diagram showing the flow of air in the clean room facility 100C according to the third embodiment.

[0095] Figure 5 The porous plate 54 shown is a rectangular plate used to throttle the flow of air flowing through chamber C1 on the upstream side of pipe shaft DS2. The porous plate 54 is provided with a plurality of holes 54a. The porous plate 54 is positioned in chamber C1 and extends vertically. The upper end of the porous plate 54 is fixed to the lower surface of the upper plate C1a of chamber C1. Furthermore, the lower end of the porous plate 54 is fixed to the upper surface of the top plate 71 of the modulation chamber R1.

[0096] The porous plate 54 is in the flow direction of the air in the chamber C1 ( Figure 1The porous plate 54 extends in a direction perpendicular to the arrow X1). The range of the porous plate 54 in the above direction is the same as that of the convex portions 51 and 52 of the first embodiment (see Figure 1 ) in the same range. A porous plate 54 is installed in the air flow direction of chamber C1 between the most downstream air supply fan (i.e., air supply fan 2a) of the multiple air supply fans 1a and 2a supplying air to the preparation room R1 (first clean room) and the duct shaft DS2. The porous plate 54 can be made of the same material as the insulation panels forming the preparation room R1, transfer room R2, and dressing room R3, or it can be made of metal or resin.

[0097] <Effect>

[0098] According to the third embodiment, the porous plate 54 is provided to restrict the flow of air flowing through chamber C1 upstream of the duct shaft DS2. This allows for moderate cooling of the preparation room R1 with a simple structure while also preventing overcooling of the transfer room R2 and the dressing room R3. Furthermore, in chamber C1, the spaces upstream and downstream of the porous plate 54 are connected via the multiple holes 54a, thereby ensuring uniform pressure within chamber C1.

[0099] Fourth Implementation Method

[0100] In the fourth embodiment, the convex portions 51 and 52 described in the first embodiment (see Figure 2 ) and set the wind guide plate 55 (refer to Figure 6 ). Other aspects are the same as those of the first embodiment. Therefore, only the parts different from the first embodiment will be described, and the description of the overlapping parts will be omitted.

[0101] Figure 6 It is an explanatory diagram showing the flow of air in the clean room facility 100D according to the fourth embodiment.

[0102] Figure 6 The illustrated air guide plate 55 is a rectangular plate used to restrict the flow of air flowing through chamber C1 on the upstream side of duct shaft DS2. It is positioned in chamber C1 at a predetermined angle. The lower end of the air guide plate 55 is fixed to the upper surface of the top plate 71 of the conditioning chamber R1. More specifically, in duct shaft DS2, the lower end of the air guide plate 55 is positioned near a plane F1 that includes the inner surface of the side wall 81 on the conditioning chamber R1 (first clean room) side. The upper end of the air guide plate 55 is separated by a predetermined distance from the upper plate C1a of chamber C1.

[0103] Air guide plate 55 is tilted so that the horizontal distance between its upper end and plane F1 increases as it approaches its upper end. This allows air rising through duct shaft DS2 to be easily guided into the spaces above transfer room R2 and dressing room R3 in chamber C1. This facilitates the creation of a short circuit through duct shaft DS2.

[0104] The air guide plate 55 is in the direction of the air flow in the chamber C1 ( Figure 1 The range of the wind deflector 55 in the above-mentioned direction is the same as that of the convex portions 51 and 52 of the first embodiment (see Figure 1 ) in the same range. Air guide plate 55 is installed in the air flow direction of chamber C1 between the most downstream air supply fan (i.e., air supply fan 2a) of the multiple air supply fans 1a and 2a supplying air to the preparation room R1 (first clean room) and duct shaft DS2. The air guide plate 55 can be made of the same material as the insulation panels forming the preparation room R1, transfer room R2, and dressing room R3, or it can be made of metal or resin.

[0105] <Effect>

[0106] According to the fourth embodiment, the air flow path of the air flowing through the chamber C1 is restricted upstream of the duct shaft DS2 by providing the air guide plate 55. This prevents low-temperature air from flowing downstream of the air guide plate 55. Furthermore, a short circuit air flow through the duct shaft DS2 is easily formed. Therefore, in addition to moderately cooling the preparation room R1, overcooling of the transfer room R2 and dressing room R3 can be prevented.

[0107] Fifth Implementation Method

[0108] The fifth embodiment is configured such that, instead of the convex portions 51 and 52 described in the first embodiment (see Figure 2 ) so that the top plate 71 of the modulation chamber R1 (refer to Figure 7 ) is higher than the transfer room R2 and the dressing room R3. In the fifth embodiment, the projection surface S1 (refer to Figure 7 ) area S2 (refer to Figure 7 ) is lower than the other parts. In addition, the rest is the same as the first embodiment. Therefore, the parts different from the first embodiment are described, and the description of the repeated parts is omitted.

[0109] Figure 7 It is an explanatory diagram showing the flow of air in the clean room facility 100E according to the fifth embodiment.

[0110] like Figure 7As shown, the height of the ceiling 71 of the preparation room R1 (first clean room) is higher than the height of the ceiling 72 of the transfer room R2 (second clean room) and the height of the ceiling 73 of the dressing room R3 (second clean room). In addition, in the upper plate C1a of the chamber C1, the height of the area S2 including the vertical projection surface S1 of the duct shaft DS2 is lower than the height of the upstream side of this area S2.

[0111] also, Figure 7 The plate C11a shown is included in the upper plate C1a of the chamber C1. The range of the region S2 in the direction perpendicular to the air flowing through the chamber C1 is the same as that of the convex portions 51 and 52 of the first embodiment (see Figure 1 ) have the same scope.

[0112] exist Figure 7 In the example, the air flow direction in the chamber C1 ( Figure 1 As shown by arrow X1, area S2 including projection surface S1 extends to a predetermined location above transfer chamber R2, but this is not limited to this. For example, the scope of area S2 may coincide with projection surface S1 of duct shaft DS2. Alternatively, area S2 may extend to near the downstream end of chamber C1 in the direction of air circulation.

[0113] <Effect>

[0114] According to the fifth embodiment, the vertical distance between the downstream end of the top plate 71 of the preparation chamber R1 and the upstream end of the plate C11a is relatively short in the air flow direction within chamber C1. In other words, the air flow path within chamber C1 is restricted upstream of the duct shaft DS2. This prevents low-temperature air supplied to chamber C1 from being directly supplied to the transfer room R2 or dressing room R3.

[0115] Reference Method

[0116] Reference method (refer to Figure 8 ) is different from the first embodiment in that no protrusions 51, 52 are provided (see Figure 2 ). In addition, the fan filter units 3 and 4 on the air supply side of the transfer room R2 and the dressing room R3 of the reference method (refer to Figure 8 ) is different from the first embodiment. In addition, the rest is the same as the first embodiment. Therefore, the parts that are different from the first embodiment are described, and the description of the repeated parts is omitted.

[0117] Figure 8 It is an explanatory diagram showing the flow of air in the clean room facility 100F of the reference embodiment.

[0118] like Figure 8As shown, the duct shaft DS2 is provided with a fan filter unit 3 on the air supply side and a fan filter unit 12 on the air return side. That is, the duct shaft DS2 is provided with an air supply fan 3a for supplying air to the transfer room R2 (predetermined second clean room), and a return air fan 12a for returning air from the transfer room R2 to the chamber C1.

[0119] Furthermore, the supply fan 3a in duct shaft DS2 is positioned at a higher level than the return fan 12a in duct shaft DS2. Furthermore, as the return fan 12a is driven, air flowing out of transfer chamber R2 rises through duct shaft DS2, with the majority of this air returning to transfer chamber R2 via the supply fan 3a. This creates a short-circuit flow within duct shaft DS2 in the reference configuration. The same can be said for the fan filter unit 4 on the supply side and the fan filter unit 13 on the return side in the other duct shaft DS3.

[0120] <Effect>

[0121] According to the reference method, not only can the preparation room R1 be appropriately cooled, but overcooling of the transfer room R2 and the dressing room R3 can also be prevented. Furthermore, in the chamber C1, since the fan filter units 3 and 4 on the air supply side do not need to be specifically located above the transfer room R2 and the dressing room R3, the height of the upper plate C1a in this area (the portion above the transfer room R2 and the dressing room R3) can be lowered. This allows the clean room facility 100F to be partially lowered, achieving a more compact structure.

[0122] Combination of the First Implementation Method and the Reference Method

[0123] It can also Figure 1 、 Figure 2 The first embodiment shown is Figure 8 The reference method shown is combined to become Figure 9 The structure shown.

[0124] Figure 9 It is an explanatory diagram showing the flow of air in the clean room facility 100G in which the first embodiment and the reference form are combined.

[0125] like Figure 9 As shown, the clean room facility 100G includes convex parts 51 and 52. The convex parts 51 and 52 are components for restricting the flow path of the air flowing through the chamber C1 on the upstream side of the duct shaft DS3. Figure 9 In the example, a convex portion 51 is provided at a predetermined position of the upper plate C1a of the chamber C1. Figure 8 The upper surface of the same) is provided with a convex portion 52. These convex portions 51, 52 are opposed to each other in the up-down direction.

[0126] In addition, a fan filter unit 4 is provided on the air supply side in the pipe well DS3, and a fan filter unit 13 is provided on the air return side. Thus, a short-circuit flow can be generated inside the pipe well DS3. Figure 9 The configuration of the convex portions 51, 52 shown in FIG. 2 is different from that of the convex portions 51, 52 shown in FIG. 2 , and the convex portions 51, 52 are provided on the upstream side of the pipe shaft DS2.

[0127] <Effect>

[0128] according to Figure 9 The structure shown makes it difficult for the low-temperature air supplied to chamber C1 to be directed downstream of protrusions 51 and 52. Furthermore, a short-circuit flow is generated within duct shaft DS3, so most of the air flowing out of dressing room R3 into duct shaft DS3 returns to dressing room R3. This allows for moderate cooling of the preparation room R1 and transfer room R2, while preventing overcooling of dressing room R3.

[0129] Modification

[0130] As mentioned above, although the clean room facility 100 etc. of this invention were demonstrated in each embodiment, it is not limited to these descriptions, and various changes are possible.

[0131] For example, in the first embodiment, the convex portions 51 and 52 and the air flow direction ( Figure 1 That is, the extending direction of the protrusions 51 and 52 may be inclined in a predetermined manner relative to the above-mentioned flow direction when viewed from above, or may be bent into a crank shape when viewed from above.

[0132] In addition, in the first embodiment (see Figure 2 ), a portion of the air in the duct shaft DS2 may be returned to the chamber C1 by the return fan 12a, and the remaining portion may be exhausted through the gap in the door. Such a structure also includes the matter of the return fan 12a "returning air" to the chamber C1. In addition, the configuration and number of the return fans can be appropriately changed. For example, the return fan can also be configured to return air from at least one of the multiple clean rooms to the chamber C1.

[0133] In addition, in the first embodiment (see Figure 2), the case where the number of air supply fans 1a and 2a supplying air to the modulation chamber R1 (first clean room) is two is described, but the number of air supply fans may be one, or three or more. In other words, any structure may be provided with one or more air supply fans supplying air to the "first clean room". In the case where the number of air supply fans supplying air to the "first clean room" is one, the "air supply fan located on the most downstream side among the air supply fans" is the one air supply fan. In addition, it can be said that the second to fifth embodiments and the reference method are also the same.

[0134] In addition, in the first modification of the first embodiment (see Figure 3 ) in the description of the structure with two convex parts 51 and 52, but it is not limited to this. For example, it is also possible to Figure 3 In addition to the structure shown above, a convex portion is also provided on the upstream side of the duct shaft DS2. This structure allows the flow of low-temperature air into the dressing room R3 to a lesser extent than into the transfer room R2. Therefore, in addition to suppressing overcooling in the transfer room R2, it also significantly reduces overcooling in the dressing room R3.

[0135] In addition, in the second modification of the first embodiment (see Figure 3 ) in the transfer chamber R2, the top plate 72 is provided with a convex portion 52 and the other convex portion 51 is provided on the upper plate C1a in a manner opposite to the convex portion 52, but the present invention is not limited thereto. For example, instead of Figure 3 The arrangement of the convex parts 51 and 52 shown in the figure is such that the convex part 52 is provided on the ceiling 71 of the preparation room R1, and the other convex part 51 is provided on the upper plate C1a so as to face the convex part 52. In such a structure, the transfer room R2 and the dressing room R3 can also be prevented from being overcooled.

[0136] In the second embodiment, the chamber C1 (see Figure 4 ) is a case where a portion of the beam B1 exists in the cavity C1, but the present invention is not limited thereto. That is, a covering member 53 may be provided to cover the beam B1 or the duct provided so as to protrude vertically into the cavity C1.

[0137] In addition, in the fourth embodiment (see Figure 6 ) in the above description, the structure of fixing the lower end of the air guide plate 55 to the top plate 71 of the modulation chamber R1 is described, but it is not limited to this. For example, it is also possible to configure the air guide plate 55 to be fixed to the top plate 71 of the modulation chamber R1. Figure 6 The configuration moves parallel to the upper side so that its upper end is fixed to the upper plate C1a of the chamber C1 and its lower end is separated from the top plate 71 of the modulation chamber R1.

[0138] In addition, in the fifth embodiment (see Figure 7 ), the plate C11a of the chamber C1 may be omitted, and the height of the top plate 71 of the preparation room R1 may be higher than that of the transfer room R2 and the dressing room R3. In such a structure, by appropriately adjusting the height of the top plate 71 during the design phase, it is possible to prevent the transfer room R2 and the dressing room R3 from being overcooled.

[0139] In the fifth embodiment, a plate member C11a (see Figure 7 ) structure has been described above, but is not limited thereto. Specifically, the thickness of the upper plate C1a may be made substantially uniform, with a predetermined step provided near the boundary of the region S2. This structure also produces the same effects as the fifth embodiment.

[0140] In addition, in each embodiment and reference form, the fan filter unit 11 (refer to Figure 2 ) is driven by the fan 11 and returns air from the modulation chamber R1 to the chamber C1 via the duct shaft DS1, but the present invention is not limited to this. For example, the fan filter unit 11 on the return air side can be omitted, and the air flowing out of the modulation chamber R1 into the duct shaft DS1 through a predetermined gap (for example, the gap in the door) can be directly guided to the air conditioner 32 via the duct D3. In this case, the opening at the upper end of the duct shaft DS1 can also be blocked.

[0141] In addition, each embodiment can be combined as appropriate. For example, the first embodiment and the second embodiment can be combined to provide a covering member 53 covering the beam B1 (the second embodiment: see Figure 4 ), and convex portions 51, 52 are provided at predetermined locations (first embodiment: refer to Figure 2 ). In addition, the first to fourth embodiments (see Figures 1 to 6 ) and the fifth embodiment (refer to Figure 7 ) combinations. In addition, the first to fifth embodiments (see Figures 1 to 7 ) and the reference method (reference Figure 8 ) combination.

[0142] In the first embodiment, the "first clean room" is the preparation room R1 and the "second clean room" is the transfer room R2 and the changing room R3. However, the types and numbers of rooms corresponding to the "first clean room" and "second clean room" can be changed as appropriate.

[0143] Furthermore, a clean room facility may be configured to include additional rooms (clean rooms or general rooms) that do not correspond to the "first clean room" or "second clean room." Such a configuration is also included in the clean room facility "including a plurality of clean rooms including the first clean room and the second clean room."

[0144] In addition, the clean room facility may also be configured to include a plurality of chambers separated by plates. Figure 2 、 Figure 3 ), covering member 53 (refer to Figure 4 ), porous plate 54 (refer to Figure 5 ) and wind deflector 55 (refer to Figure 2 ) can also be provided in one or more of the plurality of chambers. Such a structure also includes the matter of "the air flow path in the chamber is throttled on the upstream side of the duct shaft" in the clean room facility.

[0145] In the first embodiment, the clean room facility 100 is provided with an external air processing unit 31 (see Figure 2 ) has been described, but the external air processing unit 31 may be appropriately omitted. In addition, the second to fifth embodiments and the reference form can also be said to be the same.

[0146] Furthermore, in each embodiment, the case where the clean room such as the preparation room R1 is used as a positive pressure room has been described. However, the clean room may be used as a negative pressure room depending on its application.

[0147] Furthermore, in each embodiment, the clean room facility 100 is described as being used for cell culture processing and pharmaceutical production, but the present invention is not limited thereto. For example, each embodiment can also be applied to various fields such as semiconductor, precision machinery, liquid crystal panel manufacturing, the food industry, the cosmetics industry, and experiments using radioactive substances.

[0148] In addition, each embodiment is described in detail to explain the present invention in an easy-to-understand manner, and is not necessarily limited to having all the structures described. In addition, with respect to a part of the structure of the embodiment, other structures can be added, deleted, or replaced.

[0149] In addition, the above-described mechanisms and structures show those considered necessary for explanation, and do not show all the mechanisms and structures in the product.

[0150] Explanation of symbols

[0151] 1a, 2a, 3a, 4a—supply fans; 11a, 12a, 13a—return fans; 31—external air handling unit; 32—air conditioner; 41, 42, 43—pressure sensor; 51, 52—protrusions; 53—covering member; 54—perforated plate; 54a—hole; 55—air deflector; 71, 72, 73—top plate; 100, 100A, 100B, 100C, 100D 100E, 100F, 100G—clean room facilities; B1—beam; C1—chamber; C1a—upper plate; C1b—side plate; D4—pipeline; DS2, DS3—pipe shaft; E1—upper floor; F1—plane; R1—modulation room (first clean room); R2—transfer room (first clean room / second clean room); R3—changing room (second clean room); S1—projection surface; S2—area.

Claims

1. A clean room facility, characterized in that: have: A plurality of clean rooms, including a first clean room and a second clean room; a chamber, which is provided as a common space on the back of the ceilings of the plurality of clean rooms; an air conditioner, the outlet side of which is connected to the chamber via a duct; a plurality of air supply fans for supplying air from the chamber to the plurality of clean rooms; a return air fan for returning air from at least one of the plurality of clean rooms to the chamber; as well as a duct shaft that guides air from the predetermined second clean room to the chamber, The second clean room is provided downstream of the first clean room in the air flow direction in the chamber. The flow path of the air in the chamber is restricted on the upstream side of the pipe shaft.

2. The clean room facility according to claim 1, wherein: A convex portion is provided so as to protrude from at least one of the top plate of the first clean room and the upper plate of the chamber in the vertical direction toward the space within the chamber, The convex portion is provided between the duct shaft and the most downstream air supply fan among the one or more air supply fans that supply air to the first clean room in the air circulation direction in the chamber.

3. The clean room facility according to claim 1, wherein: A covering member is provided for covering the beam or the pipe provided in the space of the chamber so as to protrude vertically into the space within the chamber. The covering member is provided between the duct shaft and the most downstream air supply fan among the one or more air supply fans that supply air to the first clean room in the air circulation direction in the chamber.

4. The clean room facility according to claim 1, wherein: A porous plate is provided, the porous plate being provided with a plurality of holes and being arranged in the chamber, The porous plate is provided between the duct shaft and the most downstream air supply fan among the one or more air supply fans that supply air to the first clean room in the air flow direction in the chamber.

5. The clean room facility according to claim 1, wherein: An air guide plate is provided, the air guide plate being arranged in a predetermined tilted state in the chamber, The air guide plate is provided between the most downstream air supply fan of the one or more air supply fans supplying air to the first clean room and the duct shaft in the air flow direction in the chamber. The lower end of the air guide plate is arranged in the duct shaft near a plane including the inner surface of the side wall on the first clean room side. The wind guide plate is inclined such that a horizontal distance from the plane increases as the wind guide plate approaches an upper end thereof.

6. The clean room facility according to claim 1, wherein: The height position of the ceiling of the first clean room is higher than the height position of the ceiling of the second clean room.

7. The clean room facility according to claim 6, wherein: In the upper plate of the chamber, a region including a vertical projection of the pipe shaft is positioned lower in height than a position upstream of the region in the air flow direction in the chamber.

8. The clean room facility according to claim 1, wherein: At least one of the second clean rooms is provided at an end portion on a downstream side of the plurality of clean rooms in the air flow direction in the chamber.

9. The clean room facility according to claim 1, wherein: An air supply fan for supplying air to the predetermined second clean room is provided inside the duct shaft, and an air return fan for returning air from the second clean room to the chamber is provided. The height position of the air supply fan in the pipe shaft is higher than the height position of the air return fan in the pipe shaft.

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