Cluster generation device

Abstract

The invention discloses a cluster generation device which comprises a cluster generation device front end, a cluster generation device nozzle end and an air inlet pipe of the cluster generation device. The cluster generation device front end comprises an upper condensation chamber transverse plate, a lower condensation chamber transverse plate, two parallel side plates and an air inlet side plate; an air inlet pipe of the cluster generation device penetrates through the air inlet side plate and enters the cavity at the front end of the cluster generation device; the nozzle end of the cluster generation device comprises an upper nozzle inclined plate, a lower nozzle inclined plate, an upper nozzle outlet transverse plate, a lower nozzle outlet transverse plate and an outlet slit of the cluster generation device; and a gap between the upper nozzle outlet transverse plate and the lower nozzle outlet transverse plate forms an outlet slit of the cluster generation device. According to the invention, under the condition that the beam density in the prior art is kept unchanged, the cross section area through which the cluster beam passes is enlarged, so that the throughput of the cluster beam and the intensity of the cluster beam are enhanced.

Description

Technical Field

[0001] The present invention relates to the technical field of cluster generation, in particular to a cluster generation device. Background Art

[0002] The cluster beam outlet of the existing cluster generating device is a small circular hole. The cluster beam flows out from the extremely small circular outlet to generate a cluster ion flow. The beam intensity is related to the nozzle diameter, angle and other parameters, but these parameters can be modified. One way to increase the cluster beam intensity is to increase the cluster beam density, and another way is to increase the cross-sectional area through which the beam passes. Due to the Coulomb force between charged ions, the beam density cannot be increased indefinitely. The existing cluster generator beam flows out from the small circular hole of the nozzle. The cross-sectional area through which the beam passes is extremely small, and the space for increasing the beam intensity is limited. This limits the increase in cluster beam intensity, and therefore the beam density cannot be increased indefinitely. This also leads to limitations in the size of the ion beam intensity. Some special beam intensity requirements cannot be met by the existing cluster generating device. Summary of the Invention

[0003] The object of the present invention is to provide a cluster generating device which, while keeping the beam density unchanged in the prior art, can expand the cross-sectional area through which the cluster beam passes, thereby increasing the throughput and intensity of the cluster beam.

[0004] In order to solve the above technical problems, the present invention provides the following technical solutions:

[0005] A cluster generating device is axially symmetrical and comprises a cluster generating device front end, a cluster generating device nozzle end, and an air inlet pipe of the cluster generating device; the cluster generating device front end is connected to the cluster generating device nozzle end;

[0006] The front end of the cluster generating device is in the shape of a rectangular parallelepiped, including an upper condensation chamber horizontal plate, a lower condensation chamber horizontal plate, two mutually parallel side plates and an air inlet side plate; the upper side of the air inlet side plate is connected to the upper condensation chamber horizontal plate, the lower side of the air inlet side plate is connected to the lower condensation chamber horizontal plate, and the two sides of the air inlet side plate are respectively connected to the two mutually parallel side plates, and the air inlet pipe of the cluster generating device passes through the air inlet side plate and enters the interior of the front end cavity of the cluster generating device;

[0007] The nozzle end of the cluster generating device includes an upper nozzle inclined plate, a lower nozzle inclined plate, an upper nozzle outlet horizontal plate, a lower nozzle outlet horizontal plate and an outlet slit of the cluster generating device; one end of the upper condensation chamber horizontal plate is connected to the upper nozzle inclined plate, and one end of the upper nozzle inclined plate is the upper nozzle outlet horizontal plate; one end of the upper condensation chamber horizontal plate is connected to the lower nozzle inclined plate, and one end of the lower nozzle inclined plate is connected to the lower nozzle outlet horizontal plate; the gap between the upper nozzle outlet horizontal plate and the lower nozzle outlet horizontal plate constitutes the outlet slit of the cluster generating device.

[0008] Preferably, the physical parameters of the upper condensing chamber transverse plate and the lower condensing chamber transverse plate are the same;

[0009] The physical parameters of the upper nozzle outlet horizontal plate and the lower nozzle outlet horizontal plate are the same;

[0010] The physical parameters of the upper nozzle inclined plate and the lower nozzle inclined plate are the same. The physical parameters of the upper condensation chamber horizontal plate and the lower condensation chamber horizontal plate, the upper nozzle outlet horizontal plate and the lower nozzle outlet horizontal plate, and the upper nozzle inclined plate and the lower nozzle inclined plate can be adjusted according to needs.

[0011] Preferably, the nozzle end of the cluster generating device includes a square nozzle, and a nozzle fixing member is installed on the side of the nozzle. The nozzle fixing member can be extended in conjunction with the side plate of the front end of the entire cluster generating device. The nozzle fixing member is made of aluminum material, which has high strength and simple processing technology.

[0012] Preferably, a cross roller guide and a cross guide rail tightening piece are installed on the side of the nozzle fixing piece, and the cross roller guide and the cross guide rail tightening piece are installed with the nozzle fixing piece as the base, and the other end of the cross roller guide and the cross guide rail tightening piece are connected to the nozzle nozzle device, and the cross roller guide and the cross guide rail tightening piece cooperate with the nozzle fixing piece to operate.

[0013] Preferably, a nozzle lifting rack is installed at the middle position of the side of the nozzle, a nozzle support plate is installed on the other side of the nozzle lifting rack, and a plurality of reinforcing ribs are installed on the other side of the nozzle support plate;

[0014] The nozzle lifting rack is provided with a nozzle lifting bearing fixing part, and the nozzle driving driven shaft crosses several of the reinforcing ribs and is connected to the nozzle lifting rack via the nozzle lifting bearing fixing part;

[0015] The nozzle drive driven shaft, nozzle lifting bearing fixing part and nozzle lifting rack cooperate with the cross roller guide rail, cross guide rail tightening part and nozzle fixing part to control the up and down movement of the nozzle nozzle device to achieve the adjustment of the outlet slit size of the cluster generating device.

[0016] Preferably, the ribs are opened to allow passage of a liquid nitrogen pipe used in the cooling system of the cluster generating device. The liquid nitrogen pipe is made of stainless steel, which is high in strength, airtight, and not easily deformed in low-temperature environments. This material ensures that the liquid nitrogen pipe can support the normal circulation of ultra-low temperature liquid nitrogen.

[0017] Compared to the prior art, the present invention achieves the following beneficial effects: the cluster generating device is lengthened in width, and the beam outlet is transformed from the conventional circular hole into a slit formed by two parallel electrode plates, thereby increasing the cross-sectional area through which the cluster beam passes. By extending the width of the parallel electrode plates to increase the cross-sectional area through which the cluster beam passes, the intensity of the generated ion beam is increased, thereby achieving the goal of increasing cluster beam intensity and cluster yield. Furthermore, the width of the parallel electrode plates can be selectively extended as needed to increase ion beam intensity and cluster yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0019] Figure 1 It is a structural schematic diagram of a cluster generating device of the present invention;

[0020] Figure 2 This is a schematic diagram of the nozzle end structure of the cluster generating device of the present invention;

[0021] Figure 3 This is the velocity distribution diagram of the cluster generating device outlet in this embodiment;

[0022] Figure 4 This is a rendering of the cluster ions passing through the exit slit of the cluster generating device in this embodiment;

[0023] Figure 5 This is a rendering of the cluster generating device with a slit width of 1m in this embodiment;

[0024] In the figure: 1. Upper condensation chamber horizontal plate; 2. Lower condensation chamber horizontal plate; 3. Upper nozzle inclined plate; 4. Lower nozzle inclined plate; 5. Upper nozzle outlet horizontal plate; 6. Lower nozzle outlet horizontal plate; 7. Air inlet pipe; 8. Outlet slit of cluster generating device; 9. Side plate; 10. Air inlet side plate; 11. Nozzle; 12. Nozzle fixing part; 13. Cross roller guide; 14. Cross guide tightening part; 15. Nozzle lifting rack; 16. Nozzle support plate; 17. Reinforcement rib; 18. Nozzle lifting bearing fixing part; 19. Nozzle drive driven shaft; 20. Liquid nitrogen tube. DETAILED DESCRIPTION

[0025] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0026] Example 1

[0027] A cluster generating device ( Figure 1 ), axially symmetrical, comprising: a front end of a cluster generating device, a nozzle end of a cluster generating device, and an air inlet pipe 7 of the cluster generating device; the front end of the cluster generating device is connected to the nozzle end of the cluster generating device;

[0028] The front end of the cluster generating device is in the shape of a rectangular parallelepiped, and includes an upper condensation chamber transverse plate 1, a lower condensation chamber transverse plate 2, two mutually parallel side plates 9, and an air inlet side plate 10; the upper side of the air inlet side plate 10 is connected to the upper condensation chamber transverse plate 1, and the lower side of the air inlet side plate 10 is connected to the lower condensation chamber transverse plate 2. The two sides of the air inlet side plate 10 are respectively connected to the two mutually parallel side plates 9. The air inlet pipe 7 of the cluster generating device passes through the air inlet side plate 10 and enters the interior of the front end cavity of the cluster generating device;

[0029] The nozzle end of the cluster generating device includes an upper nozzle inclined plate 3, a lower nozzle inclined plate 4, an upper nozzle outlet horizontal plate 5, a lower nozzle outlet horizontal plate 6 and an outlet slit 8 of the cluster generating device; one end of the upper condensation chamber horizontal plate 1 is connected to the upper nozzle inclined plate 3, and one end of the upper nozzle inclined plate is the upper nozzle outlet horizontal plate 5; one end of the upper condensation chamber horizontal plate 2 is connected to the lower nozzle inclined plate 4, and one end of the lower nozzle inclined plate 4 is connected to the lower nozzle outlet horizontal plate 6; the gap between the upper nozzle outlet horizontal plate 5 and the lower nozzle outlet horizontal plate 6 constitutes the outlet slit 8 of the cluster generating device.

[0030] In addition, the nozzle end structure (2) of the cluster generating device includes a square-structured nozzle nozzle 11, and a nozzle fixing part 12 is installed on the side of the nozzle nozzle 11; a cross roller guide 13 and a cross guide tightening part 14 are installed on the side of the nozzle fixing part 12, and the cross roller guide 13 and the cross guide tightening part 14 are installed with the nozzle fixing part 12 as the base, and the other ends of the cross roller guide 13 and the cross guide tightening part 14 are connected to the nozzle nozzle 11, and the cross roller guide 13 and the cross guide tightening part 14 cooperate with the nozzle fixing part 12 to operate.

[0031] A nozzle lifting rack 15 is installed in the middle position on the side of the nozzle nozzle 11, a nozzle support plate 16 is installed on the other side of the nozzle lifting rack 15, and a number of reinforcing ribs 17 are installed on the other side of the nozzle support plate 16; the reinforcing rib 17 has an opening to pass the liquid nitrogen pipe 20 used for the cooling system of the cluster generating device.

[0032] A nozzle lifting bearing fixing part 18 is provided on the nozzle lifting rack 15, and the nozzle driving driven shaft 19 crosses several reinforcing ribs 17 and is connected to the nozzle lifting rack 15 via the nozzle lifting bearing fixing part 18; the nozzle driving driven shaft 19, the nozzle lifting bearing fixing part 18 and the nozzle lifting rack 15 cooperate with the cross roller guide 13, the cross guide tightening part 14 and the nozzle fixing part 12 to control the up and down movement of the nozzle nozzle 11, so as to realize the adjustment of the size of the outlet slit 8 of the cluster generating device.

[0033] Among them, the front end of the cluster generating device is made of 304 stainless steel material, with an overall height of 603mm. The distance between the upper condensation chamber horizontal plate 1 and the lower condensation chamber horizontal plate 2 is 535mm, the length is 885mm, the width is W=1, and the thickness is 15mm. There are multiple 15mm thick 304 stainless steel reinforcement ribs welded on the surface of the cluster generating device to strengthen the strength of the entire cavity. The cluster generating device has an inner and outer layer structure. The interior is a vacuum chamber filled with inert gas, which is the place where clusters are generated and moved. The middle interlayer is connected to the liquid nitrogen pipe. The liquid nitrogen is introduced from the outside of the condensation chamber to achieve the purpose of cooling the cluster generation site without destroying the vacuum environment in the vacuum chamber. The 304 stainless steel liquid nitrogen pipe with an inner diameter of 10mm ensures that the flow rate of liquid nitrogen is sufficient to support the cooling of the entire cavity to 77K.

[0034] The entire cluster generating device is 1180mm long and 830mm wide. The inclination angle of the upper nozzle inclined plate 3 and the lower nozzle inclined plate 4 is 30°, the distance on the left is 296mm, the distance on the right is 56mm, the length is 500mm, the width is W=1, and the thickness is 15mm. The distance between the upper nozzle outlet horizontal plate 5 and the lower nozzle outlet horizontal plate 6 is 56mm, the length is 500mm, the width is W=1, and the thickness is 15mm. The outlet slit height of the cluster generating device is 5mm, and the height of this outlet slit can be adjusted by the nozzle drive device. The width is W1. The two parallel side plates are 15mm thick and perpendicular to the horizontal plates to ensure good air tightness inside the cluster generating device.

[0035] Example 2

[0036] According to the cluster generating device of Example 1, helium gas was introduced, the internal pressure of the cluster generating device was 100 Pa, the external pressure was 0.1 Pa to 1 Pa, and the internal temperature was 77K.

[0037] Among them, the velocity distribution at the outlet of the cluster generating device is as follows: Figure 3 As shown in the figure, the maximum speed obtained by simulation is about 350m / s. The effect diagram of cluster ions passing through the exit slit of the cluster generating device is shown in the figure. Figure 4 As shown, the effect diagram of the cluster generation device with a slit width of 1m is as follows Figure 5 shown.

[0038] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0039] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art will be able to modify the technical solutions described in the aforementioned embodiments or substitute equivalents for some of the technical features. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A cluster generating device, axially symmetrical, characterized in that: It comprises a cluster generating device front end, a cluster generating device nozzle end, and an air inlet pipe (7) of the cluster generating device; the cluster generating device front end is connected to the cluster generating device nozzle end; The front end of the cluster generating device is in the shape of a rectangular parallelepiped, comprising an upper condensation chamber transverse plate (1), a lower condensation chamber transverse plate (2), two mutually parallel side plates (9) and an air inlet side plate (10); the upper side of the air inlet side plate (10) is connected to the upper condensation chamber transverse plate (1), the lower side of the air inlet side plate (10) is connected to the lower condensation chamber transverse plate (2), and both sides of the air inlet side plate (10) are respectively connected to the two mutually parallel side plates (9); the air inlet pipe (7) of the cluster generating device passes through the air inlet side plate (10) and enters the interior of the front end cavity of the cluster generating device; The nozzle end of the cluster generating device comprises an upper nozzle inclined plate (3), a lower nozzle inclined plate (4), an upper nozzle outlet transverse plate (5), a lower nozzle outlet transverse plate (6) and an outlet slit (8) of the cluster generating device; one end of the upper condensation chamber transverse plate (1) is connected to the upper nozzle inclined plate (3), and one end of the upper nozzle inclined plate is connected to the upper nozzle outlet transverse plate (5); one end of the upper condensation chamber transverse plate (2) is connected to the lower nozzle inclined plate (4), and one end of the lower nozzle inclined plate (4) is connected to the lower nozzle outlet transverse plate (6); the gap between the upper nozzle outlet transverse plate (5) and the lower nozzle outlet transverse plate (6) constitutes the outlet slit (8) of the cluster generating device.

2. A cluster generating device according to claim 1, characterized in that: The physical parameters of the upper condensation chamber transverse plate (1) and the lower condensation chamber transverse plate (2) are the same; The physical parameters of the upper nozzle outlet transverse plate (5) and the lower nozzle outlet transverse plate (6) are the same; The physical parameters of the upper nozzle inclined plate (3) and the lower nozzle inclined plate (4) are the same.

3. A cluster generating device according to claim 1, characterized in that: The structure of the nozzle end of the cluster generating device includes a square-shaped nozzle (11) inside, and a nozzle fixing member (12) is installed on the side of the nozzle (11).

4. A cluster generating device according to claim 3, characterized in that: A cross roller guide rail (13) and a cross guide rail tightening member (14) are installed on the side of the nozzle fixing member (12); the cross roller guide rail (13) and the cross guide rail tightening member (14) are installed with the nozzle fixing member (12) as a base; the other ends of the cross roller guide rail (13) and the cross guide rail tightening member (14) are connected to the nozzle nozzle (11); the cross roller guide rail (13) and the cross guide rail tightening member (14) cooperate with the nozzle fixing member (12) to operate.

5. A cluster generating device according to claim 4, characterized in that: A nozzle lifting rack (15) is installed at the middle position of the side of the nozzle (11), a nozzle supporting plate (16) is installed on the other side of the nozzle lifting rack (15), and a plurality of reinforcing ribs (17) are installed on the other side of the nozzle supporting plate (16); A nozzle lifting bearing fixing part (18) is provided on the nozzle lifting rack (15); a nozzle driving driven shaft (19) passes through a plurality of the reinforcing ribs (17) and is connected to the nozzle lifting rack (15) via the nozzle lifting bearing fixing part (18); The nozzle drive driven shaft (19), the nozzle lifting bearing fixing member (18) and the nozzle lifting rack (15) cooperate with the cross roller guide rail (13), the cross guide rail tightening member (14) and the nozzle fixing member (12) to control the up and down movement of the nozzle nozzle (11) to achieve the adjustment of the size of the outlet slit (8) of the cluster generating device.

6. A cluster generating device according to claim 5, characterized in that: The reinforcing rib (17) is opened to allow a liquid nitrogen pipe (20) for the cooling system of the cluster generating device to pass through.

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