Manipulator and industrial robot

Abstract

The invention provides a robot hand and an industrial robot, which can effectively prevent dirt attached to the robot hand from being attached to a conveyed object after cleaning even if the dirt is attached to the robot hand from the conveyed object before cleaning. In a robot, a first support member and a second support member are fixed to one surface of a mounting portion on which a conveyance object can be mounted, and a second support member and a third support member are fixed to the other surface of the mounting portion. A rotation mechanism that rotates the carrying part relative to the robot base part with the horizontal direction as the axial direction of rotation causes the carrying part to rotate relative to the robot base part between a position where one surface of the carrying part faces upward and a position where the other surface of the carrying part faces upward. The object to be conveyed loaded on the loading part is supported by the first support member and the first support member from the lower side when one surface of the loading part faces the upper side, and is supported by the second support member and the second support member from the lower side when the other surface of the loading part faces the upper side.

Description

Technical Field

[0001] The present invention relates to a manipulator of an industrial robot and the industrial robot. Background Art

[0002] Conventionally, a robot (robot unit) used in a transport device for transporting semiconductor wafers is known (see, for example, Patent Document 1). The robot described in Patent Document 1 comprises a plate-shaped robot member on which the semiconductor wafer is placed, a base unit to which the base of the robot member is fixed, and two first support members, two second support members, and two third support members that support the lower surface of the semiconductor wafer. The robot member has a pair of fingers and is formed in a U-shape, with the fingers connected at the base.

[0003] In the manipulator described in Patent Document 1, a first support member is fixed to the upper surface of the front end of the finger. Two second support members are fixed to the upper surface of the root of the manipulator member. Two third support members are arranged on the root in a movable manner. A driving unit for moving the two third support members relative to the manipulator member is built into the base unit. The first support member is formed with: a first support portion for supporting the semiconductor wafer at a prescribed first support height; and a second support portion for supporting the semiconductor wafer at a second support height higher than the first support height. The semiconductor wafer arranged at the first support height is supported by the first support portion and the second support member of the first support member. The semiconductor wafer arranged at the second support height is supported by the second support portion and the third support member of the first support member.

[0004] The transport device described in Patent Document 1, for example, transports pre-cleaned semiconductor wafers into a cleaning device and transports cleaned semiconductor wafers out of the cleaning device. Specifically, the robot described in Patent Document 1 carries both pre-cleaned and cleaned semiconductor wafers. In the robot described in Patent Document 1, the pre-cleaned semiconductor wafer is supported by the first support portion and the second support member of the first support member, while the cleaned semiconductor wafer is supported by the second support portion and the third support member of the first support member. Therefore, the robot described in Patent Document 1 can prevent dirt and the like from adhering to the robot from the pre-cleaned semiconductor wafer from adhering to the cleaned semiconductor wafer.

[0005] [Prior art literature]

[0006] [Patent Document]

[0007] [Patent Document 1] Japanese Patent No. 6276317 Summary of the Invention

[0008] [Problems to be solved by the invention]

[0009] The inventors of the present application have developed a manipulator for an industrial robot that is used to carry transport objects such as semiconductor wafers, similar to the manipulator described in Patent Document 1. Similar to the manipulator described in Patent Document 1, the manipulator may sometimes carry transport objects before cleaning and transport objects after cleaning. If dirt or the like that has adhered to the manipulator from the transport object before cleaning adheres to the transport object after cleaning, it is possible that the quality of the transport object that undergoes prescribed processing after cleaning will be reduced. Therefore, for the manipulator under development, it is preferred that dirt or the like that has adhered to the manipulator from the transport object before cleaning is less likely to adhere to the transport object after cleaning.

[0010] Therefore, the present invention aims to provide a manipulator for an industrial robot that transports an object. For example, even if dirt or the like adheres to the manipulator from the object before cleaning, the dirt adhered to the manipulator can be effectively prevented from adhering to the object after cleaning. Furthermore, the present invention aims to provide an industrial robot including such a manipulator.

[0011] [Technical means to solve the problem]

[0012] In order to solve the above-mentioned problem, the manipulator of an industrial robot in one aspect of the present invention is a manipulator of an industrial robot for transporting a transported object, and is characterized in that it includes: a carrying part, which can carry the transported object; a manipulator base, which constitutes the base end side part of the manipulator; a rotating mechanism, which makes the carrying part rotate at least 180° relative to the manipulator base with the horizontal direction as the rotation axis; a first support member, which is fixed to one side of the carrying part; and a second support member, which is fixed to the other side of the carrying part, and the rotating mechanism makes the carrying part rotate relative to the manipulator base between a position where one side of the carrying part faces upward and a position where the other side of the carrying part faces upward, when one side of the carrying part faces upward, the transported object carried on the carrying part is supported from the bottom by the first support member, and when the other side of the carrying part faces upward, the transported object carried on the carrying part is supported from the bottom by the second support member.

[0013] In the manipulator of the industrial robot of this embodiment, a first support member is fixed to one side of a carrying portion capable of carrying an object, and a second support member is fixed to the other side of the carrying portion. Furthermore, in this embodiment, a rotation mechanism causes the carrying portion to rotate relative to the manipulator base between a position in which one side of the carrying portion faces upward and a position in which the other side of the carrying portion faces upward. Furthermore, in this embodiment, an object carried on the carrying portion is supported from below by the first support member when one side of the carrying portion faces upward, and supported from below by the second support member when the other side of the carrying portion faces upward.

[0014] Therefore, in this aspect, for example, an object to be transported before cleaning can be loaded onto one side of the loading portion for transport, and an object to be transported after cleaning can be loaded onto the other side of the loading portion for transport. Therefore, in this aspect, for example, compared to a case where the first and second supporting members are fixed to one side of the loading portion and the object to be transported before cleaning and the object to be transported after cleaning are loaded onto one side of the loading portion, even if dirt or the like is attached to the robot arm from the object to be transported before cleaning, it is possible to effectively prevent the dirt attached to the robot arm from being attached to the object to be transported after cleaning.

[0015] The manipulator of this embodiment can be used in an industrial robot including a manipulator arm to which the manipulator is connected and a main body to which the manipulator arm is connected. In the industrial robot, even if dirt or the like adheres to the manipulator arm from a transported object before cleaning, the dirt adhering to the manipulator arm can be effectively prevented from adhering to the transported object after cleaning.

[0016] [Effects of the Invention]

[0017] As described above, in one aspect of the present invention, in the manipulator of an industrial robot that transports a transported object, for example, even if dirt or the like adheres to the manipulator from the transported object before cleaning, the dirt adhered to the manipulator can be effectively prevented from adhering to the transported object after cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a perspective view of an industrial robot according to an embodiment of the present invention.

[0019] Figure 2 yes Figure 1 A side view of the manipulator, manipulator arm, manipulator arm support structure and lifting structure shown.

[0020] Figure 3 yes Figure 1 A plan view of the manipulator shown.

[0021] Figure 4A It is from Figure 3 A side view of a portion of the manipulator is shown in the EE direction. Figure 4B It means to make Figure 4A The side view of the robot arm is shown with part of it turned upside down. Figure 4C yes Figure 4A The enlarged view of part F, Figure 4D It is from Figure 4C A plan view of the front end of the manipulator is shown in the GG direction.

[0022] Figure 5 It is used for Figure 3 This is a bottom view illustrating the structure of the pressing member and moving mechanism shown.

[0023] Figure 6 It is used for Figure 3 A side view illustrating the structure of the pressing member and the rotating mechanism shown.

[0024] Figure 7A Yes Figure 3 The diagram shows the state of the detection mechanism when the pressing member is retreated to the base end side of the robot, Figure 7B 1 is a diagram showing the state of the detection mechanism when the pressing member moves to a position where the wafer contacts the first contact surface. Figure 7C 1 is a diagram showing the state of the detection mechanism when the pressing member moves to a position where the wafer abuts against the second abutting surface. Figure 7D This is a diagram showing the state of the detection mechanism when the pressing member moves to the front end side of the robot hand in a state where no wafer is mounted on the mounting portion.

[0025] [Explanation of Symbols]

[0026] 2: Robots (industrial robots)

[0027] 3: Wafers (semiconductor wafers, transported objects)

[0028] 4, 5: Robotic arm

[0029] 6, 7: Robotic arm

[0030] 8: Main body

[0031] 11: Robotic arm support component

[0032] 12: Lifting components

[0033] 13: Keep the frame

[0034] 14, 15, 16, 17: Robotic arm

[0035] 20, 21: bottom shell

[0036] 22, 29: Rotation mechanism

[0037] 23: Motor

[0038] 24: Power transmission mechanism

[0039] 27: Carrying part

[0040] 28: Robot base

[0041] 30: Pushing member

[0042] 31: Mobile mechanism

[0043] 32: Testing agency

[0044] 33: Carrying part body

[0045] 34: Mounting base end

[0046] 36: Support member (first support member, first front end side support member)

[0047] 36b: abutting surface (first abutting surface)

[0048] 37: Support member (first support member)

[0049] 38: Support member (second support member, second front end side support member)

[0050] 38b: abutting surface (second abutting surface)

[0051] 39: Support member (second support member)

[0052] 41: Motor

[0053] 42: Power transmission mechanism

[0054] 43: Pulley

[0055] 44: Pulley (rotating member)

[0056] 44b: spline hole

[0057] 45: belt

[0058] 46: Bearing retainer

[0059] 47: Mounting support member

[0060] 50: Roller

[0061] 51: Roller holding member

[0062] 52: Moving axis

[0063] 52b: Spline shaft

[0064] 53: Cylinder

[0065] 53b: Rod

[0066] 54: Sliding component

[0067] 55: Bearings

[0068] 56: Shaft retaining member

[0069] 58, 59, 60: Sensors

[0070] 61: Detection board

[0071] 61b: Detected part

[0072] 67: Carrying part

[0073] 68: Robot base

[0074] EE, GG, Y: direction

[0075] X: First direction (direction)

[0076] X1: Second direction side (direction)

[0077] X2: Third direction side (direction) DETAILED DESCRIPTION

[0078] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

[0079] (Overall structure of an industrial robot)

[0080] Figure 1 It is a perspective view of an industrial robot 2 according to an embodiment of the present invention. Figure 2 yes Figure 1 The robot 4, robot 5, robot arm 6, robot arm 7, robot arm support member 11 and lifting member 12 are shown in side views.

[0081] The industrial robot 2 of this embodiment (hereinafter referred to as "robot 2") is a horizontal multi-jointed robot used to transport a semiconductor wafer 3 (hereinafter referred to as "wafer 3") as a transport object. The wafer 3 is formed in the shape of a thin circular plate. The robot 2 is incorporated into a semiconductor manufacturing system for manufacturing semiconductors. The semiconductor manufacturing system includes, for example, a cleaning device (not shown) for cleaning the wafer 3. The robot 2 carries the wafer 3 into the cleaning device and carries the wafer 3 out of the cleaning device.

[0082] The robot 2 includes two manipulators 4 and 5 for carrying the wafer 3; a manipulator arm 6 to which the manipulator 4 is connected; a manipulator arm 7 to which the manipulator 5 is connected; and a main body 8 to which the manipulator arms 6 and 7 are connected. When the manipulators 4 and 5 are carrying the wafer 3, the outer shape of the manipulators 4 and 5 when viewed from above and below is an elongated, roughly rectangular shape. The specific structure of the manipulators 4 and 5 will be described later. The main body 8 includes a manipulator support member 11 to which the base ends of the manipulators 6 and 7 are connected; a lifting member 12 to maintain the manipulator support member 11 in a rotatable manner; and a retaining frame 13 to maintain the lifting member 12 in a liftable manner.

[0083] The robot 6 includes: a robot arm portion 14, the base end side of which is fixed to the robot arm support member 11; and a robot arm portion 15, the base end side of which is rotatably connected to the front end side of the robot arm portion 14. The robot 6 includes two robot arm portions 14 and 15. The robot hand 4 is rotatably connected to the front end side of the robot arm portion 15. The robot arm portion 15 and the robot hand 4 rotate with the up-down direction (vertical direction) as the axis of rotation. The robot arm portion 14 is arranged at a lower side than the robot arm support member 11, the robot arm portion 15 is arranged at a lower side than the robot arm portion 14, and the robot hand 4 is arranged at a lower side than the robot arm portion 15. That is, the robot arm 6 is arranged at a lower side than the robot arm support member 11, and the robot hand 4 is arranged at a lower side than the robot arm 6.

[0084] The robot 7 includes: a robot arm portion 16, the base end side of which is fixed to the robot arm support member 11; and a robot arm portion 17, the base end side of which is rotatably connected to the front end side of the robot arm portion 16. The robot 7 includes two robot arm portions 16 and 17. The robot hand 5 is rotatably connected to the front end side of the robot arm portion 17. The robot arm portion 17 and the robot hand 5 rotate with the up-down direction as the axis of rotation. The robot arm portion 16 is arranged at an upper side than the robot arm support member 11, the robot arm portion 17 is arranged at an upper side than the robot arm portion 16, and the robot hand 5 is arranged at an upper side than the robot arm portion 17. That is, the robot arm 7 is arranged at an upper side than the robot arm support member 11, and the robot hand 5 is arranged at an upper side than the robot arm 7.

[0085] The robot arm support member 11 is formed in a cylindrical shape. The axial direction of the robot arm support member 11 formed in a cylindrical shape is consistent with the up-down direction. The base end side of the robot arm part 14 is fixed to the lower surface of the robot arm support member 11, and the base end side of the robot arm part 16 is fixed to the upper surface of the robot arm support member 11. The robot arm support member 11 can rotate relative to the lifting member 12 with the up-down direction as the axial direction of rotation. Fixed to the lifting member 12 are: a bottom shell (drain pan) 20 arranged on the lower side of the robot 4 and a bottom shell 21 arranged on the lower side of the robot 5. The retaining frame 13 is formed in the shape of a column that is slender in the up-down direction.

[0086] The robot 2 includes a rotation mechanism 22 that rotates the robot arm support member 11 relative to the lifting member 12. The rotation mechanism 22 includes a motor 23 and a power transmission mechanism 24 that transmits power from the motor 23 to the robot arm support member 11. The rotation mechanism 22 rotates the robot arm portion 14 and the robot arm portion 16 fixed to the robot arm support member 11 together with the robot arm support member 11. In addition, the robot 2 includes: a lifting mechanism that raises and lowers the lifting member 12 relative to the retaining frame 13; a robot arm drive mechanism that rotates the robot arm portion 15 relative to the robot arm portion 14 and rotates the robot hand 4 relative to the robot arm portion 15; and a robot arm drive mechanism that rotates the robot arm portion 17 relative to the robot arm portion 16 and rotates the robot hand 5 relative to the robot arm portion 17.

[0087] When the robot 4 is used to transport the wafer 3 relative to the cleaning apparatus, the robot support member 11 rotates, and the robot arm 15 and the robot 4 rotate, so that the robot 4 moves linearly while the robot 4 is facing a certain direction. Similarly, when the robot 5 is used to transport the wafer 3 relative to the cleaning apparatus, the robot support member 11 rotates, and the robot arm 17 and the robot 5 rotate, so that the robot 5 moves linearly while the robot 5 is facing a certain direction.

[0088] (Structure of the robot)

[0089] Figure 3 yes Figure 1 A plan view of the manipulator 4 is shown. Figure 4A It is from Figure 3 A side view of a portion of the manipulator 4 is shown in the EE direction. Figure 4B It means to make Figure 4A The side view of the state in which a part of the robot arm 4 is turned upside down is shown. Figure 4C yes Figure 4A The enlarged view of part F, Figure 4D It is from Figure 4C A plan view of the front end portion of the robot 4 is shown in the GG direction. Figure 5 It is used for Figure 3 The bottom view is used to explain the structures of the pressing member 30, the moving mechanism 31, etc. Figure 6 It is used for Figure 3 The structure of the pressing member 30 and the rotating mechanism 29 shown in FIG. 7A to 7D Is used for Figure 3 The side view is for explaining the state of the detection mechanism 32 corresponding to the position of the pressing member 30 shown.

[0090] As described above, the outer shape of the robot 4 and the robot 5 when the wafer 3 is mounted thereon is an elongated substantially rectangular shape when viewed from the top and bottom. In the following description, the direction of the long side of the robot 4 in the substantially rectangular shape when viewed from the top and bottom ( Figure 3 The X direction of the front and back directions is set as "front and back directions", and the Figure 3 The Y direction of the vertical direction is defined as the "left-right direction". That is, the X direction perpendicular to the vertical direction (vertical direction) is defined as the front-back direction, and the Y direction perpendicular to the vertical direction and the front-back direction is defined as the left-right direction. In addition, in the following description, the left-right direction is defined as one side of the front-back direction. Figure 3 The X1 direction side of the other side is set as the "front" side, and the Figure 3 The X2 direction side is defined as the “rear” side. The front side is the front end side of the robot 4, and the rear side is the base end side of the robot 4.

[0091] The robot 4 includes: a carrying portion 27 capable of carrying the wafer 3; a robot base 28 constituting the base end side portion of the robot 4; and a rotating mechanism 29 (see Figure 6 ), rotating the carrying portion 27 at least 180° relative to the manipulator base 28 with the horizontal axis as the rotation axis. The carrying portion 27 is formed into a thin, flat plate. The rotation mechanism 29 rotates the carrying portion 27 relative to the manipulator base 28 between a position where one side of the flat-plate-shaped carrying portion 27 faces upward and a position where the other side of the carrying portion 27 faces upward. In other words, the rotation mechanism 29 inverts the carrying portion 27 upside down.

[0092] The robot base 28 is formed into a hollow shape. In addition, the robot base 28 is formed into a rectangular box shape. The robot base 28 is rotatably connected to the front end side of the robot arm 15. In addition, the robot 4 includes: a pushing member 30 that contacts the end surface of the wafer 3 and pushes the wafer 3 from the rear side; a moving mechanism 31 (see Figure 5 ), which moves the pressing member 30 linearly in the front-to-back direction; and a detection mechanism 32 for detecting the position of the pressing member 30 in the front-to-back direction. A portion of the rotation mechanism 29, the movement mechanism 31, and the detection mechanism 32 are housed in the hollow manipulator base 28.

[0093] The carrying portion 27 includes: a carrying portion main body 33 for carrying the chip 3; and two carrying base end portions 34, which constitute the base end side portion (rear side portion) of the carrying portion 27. The carrying portion main body 33 constitutes the front end side portion (front side portion) of the carrying portion 27. The carrying portion 27 of this form includes the carrying portion main body 33 and two carrying base end portions 34. The carrying portion main body 33 is formed into a substantially rectangular flat plate shape that is elongated in the front-to-back direction. The front end portion (front end portion) of the carrying portion main body 33 is U-shaped and is formed into two strands. The carrying base end portion 34 is formed into a rectangular flat plate shape that is elongated in the front-to-back direction. The front end of the carrying base end portion 34 is connected to the rear end of the carrying portion main body 33. The two carrying base end portions 34 are arranged in a spaced-apart state in the left-right direction.

[0094] Support members 36 and 37 are fixed to one side of the mounting portion 27 for supporting the wafer 3 from below. Support members 38 and 39 are fixed to the other side of the mounting portion 27 for supporting the wafer 3 from below. Specifically, the robot arm 4 includes support members 36 and 37 fixed to one side of the mounting portion 27, and support members 38 and 39 fixed to the other side of the mounting portion 27. In this embodiment, support members 36 and 37 are first support members, and support members 38 and 39 are second support members.

[0095] Two support members 36 and two support members 37 are fixed to one surface of the mounting portion 27. Two support members 38 and two support members 39 are fixed to the other surface of the mounting portion 27. Support members 36 and 38 are fixed to the front end portion of the mounting portion main body 33. Support members 37 and 39 are fixed to the boundary between the mounting portion main body 33 and the mounting base end portion 34. In this embodiment, support member 36 is a first front-end support member disposed on the front end side of the mounting portion 27, and support member 38 is a second front-end support member disposed on the front end side of the mounting portion 27.

[0096] The two support members 36 are arranged in a spaced state in the left-right direction. In addition, the two support members 36 are arranged in the same position in the front-back direction. The two support members 38 are arranged in a spaced state in the left-right direction. In addition, the two support members 38 are arranged in the same position in the front-back direction. Figures 4A to 4D As shown in FIG, the support member 36 and the support member 38 are arranged at positions offset in the front-rear direction. In this embodiment, the support member 36 is arranged at a position further rearward than the support member 38.

[0097] The two support members 37 are arranged at a distance from each other in the left-right direction. Furthermore, the two support members 37 are arranged at the same position in the front-to-back direction. The two support members 39 are arranged at a distance from each other in the left-right direction. Furthermore, the two support members 39 are arranged at the same position in the front-to-back direction. The support members 37 and 39 are arranged at offset positions in the front-to-back direction. In this embodiment, the support member 37 is arranged further rearward than the support member 39.

[0098] The support member 36 has a first contact surface 36b against which the end surface of the wafer 3 contacts. The support member 38 has a second contact surface 38b (see FIG. Figure 4D ). The abutting surfaces 36b and 38b are generally oriented toward the rear. More specifically, the abutting surfaces 36b and 38b are oriented radially inward of the wafer 3 mounted on the mounting portion 27. As described above, the support member 36 and the support member 38 are positioned at offset positions in the front-to-back direction, and the abutting surfaces 36b and 38b are positioned at offset positions in the front-to-back direction. Specifically, the abutting surface 36b is positioned further to the rear than the abutting surface 38b.

[0099] When one side of the mounting portion 27 faces upward, the wafer 3 mounted on the mounting portion 27 is placed on the supporting members 36 and 37 and supported from below by the supporting members 36 and 37 (see FIG. Figure 4A When the other side of the mounting portion 27 faces upward, the wafer 3 mounted on the mounting portion 27 is placed on the supporting members 38 and 39 and supported from the bottom by the supporting members 38 and 39 (see Figure 4B When one surface of the mounting portion 27 faces upward and when the other surface of the mounting portion 27 faces upward, the thickness direction of the mounting portion 27 formed in a flat plate shape substantially coincides with the up-down direction.

[0100] The rotation mechanism 29 rotates the carrying portion 27 relative to the manipulator base 28, with the front-to-back direction serving as the axis of rotation. Furthermore, the rotation mechanism 29 rotates the carrying portion 27 relative to the manipulator base 28, with the centerline of the carrying portion 27 in the left-to-right direction, as viewed from the top and bottom, serving as the center of rotation. In this embodiment, the front-to-back direction (X direction) is the axis of rotation of the carrying portion 27 relative to the manipulator base 28, i.e., the first direction. Furthermore, the front side (X1 direction side) is the second direction side, which is one side of the first direction, and the rear side (X2 direction side) is the third direction side, which is the opposite side of the second direction side.

[0101] like Figure 6As shown, the rotating mechanism 29 includes a motor 41 and a power transmission mechanism 42 that transmits the power of the motor 41 to the mounting portion 27. The motor 41 is housed inside the manipulator base 28. The motor 41 is arranged at a lower side than the pushing member 30. The power transmission mechanism 42 includes: a pulley 43 fixed to the output shaft of the motor 41; a pulley 44 rotatably held on the manipulator base 28; and a belt 45 mounted on the pulley 43 and the pulley 44. The pulley 44 is arranged on the upper side of the pulley 43. The pulleys 43 and 44 rotate with the front-to-back direction as the axial direction of rotation. The pulley 44 in this form is a rotating component that rotates relative to the manipulator base 28 with the front-to-back direction as the axial direction of rotation.

[0102] A bearing holder 46 for housing a bearing is fixed to the front surface of the manipulator base 28. The pulley 44 is rotatably held on the manipulator base 28 via the bearing housed in the bearing holder 46 and the bearing holder 46. A mounting portion support member 47 is fixed to the front end of the pulley 44. The rear end of the mounting base end 34 is fixed to the mounting portion support member 47. That is, the rear end of the mounting portion 27 is fixed to the pulley 44 via the mounting portion support member 47. A spline hole 44b is formed in the center of the pulley 44, which passes through the pulley 44 in the front-to-back direction (see FIG. 4B ). Figure 5 、 Figure 6 ). A plurality of teeth are formed in the spline hole 44b.

[0103] The pressing member 30 is positioned behind the wafer 3 placed on the mounting portion 27 and contacts the wafer 3 placed on the mounting portion 27 from the rear. When viewed from the top and bottom, the pressing member 30 is positioned on the center line of the mounting portion 27 in the left-right direction. The pressing member 30 includes two rollers 50 that contact the end surfaces of the wafer 3; a roller retaining member 51 that rotatably retains the two rollers 50; and a movable shaft 52 to which the roller retaining member 51 is fixed. The movable shaft 52 is formed into an elongated cylindrical shape with its axial direction being the front-to-back direction. The roller retaining member 51 is fixed to the front end of the movable shaft 52.

[0104] A portion of the movable shaft 52 is disposed in the spline hole 44b of the pulley 44. The movable shaft 52 is formed with a spline shaft portion 52b (see FIG. Figure 5 、 Figure 6 ). That is, the pressing member 30 is formed with a spline shaft portion 52b. The spline shaft portion 52b is formed with a plurality of teeth that mesh with the teeth of the spline hole 44b. The pressing member 30 is movable in the front-rear direction relative to the pulley 44.

[0105] like Figure 5As shown, the moving mechanism 31 includes a cylinder 53 having a rod 53b and a sliding member 54 fixed to the rod 53b. The cylinder 53 is arranged on the right or left side of the rear end side portion of the moving shaft 52. The rod 53b moves linearly in the front-to-back direction relative to the main body of the cylinder 53. In addition, the rod 53b protrudes rearward from the main body of the cylinder 53. The sliding member 54 is formed in a block shape. The sliding member 54 is fixed to the rear end portion of the rod 53b. In addition, the moving mechanism 31 includes a stop member (not shown), which is used to prevent the cylinder 53 and the sliding member 54 from rotating in the axial direction with the front-to-back direction as the rotation axis.

[0106] The pushing member 30 is held by the sliding member 54. Specifically, the rear end of the movable shaft 52 is held by the sliding member 54. The pushing member 30 moves in the front-rear direction together with the sliding member 54. A bearing 55 (see FIG. 5 ) is mounted on the sliding member 54 to support the rear end of the movable shaft 52 in a rotatable manner. Figure 5 ). That is, the rear end of the movable shaft 52 is rotatably held by the sliding member 54 via the bearing 55. The pressing member 30 can rotate relative to the sliding member 54 with the forward and backward directions as the axial direction of rotation. In addition, an axis holding member 56 (see FIG. 5 ) is attached to the mounting base end 34 to hold the front end portion of the movable shaft 52. Figure 3 A sealing member (not shown) that contacts the outer peripheral surface of the movable shaft 52 is attached to the shaft holding member 56 .

[0107] When one side of the mounting portion 27 faces upward, the pressing member 30 contacts the wafer 3 supported from below by the support members 36 and 37 from the rear side, pressing the end face of the wafer 3 against the abutment surface 36b of the support member 36. Furthermore, when the other side of the mounting portion 27 faces upward, the pressing member 30 contacts the wafer 3 supported from below by the support members 38 and 39 from the rear side, pressing the end face of the wafer 3 against the abutment surface 38b of the support member 38.

[0108] In this embodiment, for example, a wafer 3 loaded into the cleaning apparatus before cleaning is loaded onto a loading portion 27 with one surface facing upward, and supported from below by support members 36 and 37. Furthermore, a wafer 3 loaded from the cleaning apparatus after cleaning is loaded onto a loading portion 27 with the other surface facing upward, and supported from below by support members 38 and 39. As described above, since the abutment surface 36b and the abutment surface 38b are positioned offset in the front-to-back direction, the wafer 3 abutting the abutment surface 36b and the wafer 3 abutting the abutment surface 38b are positioned offset in the front-to-back direction. For example, the wafer 3 abutting the abutment surface 36b and the wafer 3 abutting the abutment surface 38b are offset in the front-to-back direction by approximately 4 mm.

[0109] As described above, the pulley 44 is provided with a spline hole 44b, and the movable shaft 52 is provided with a spline shaft portion 52b. Furthermore, the rear end portion of the movable shaft 52 is rotatably held by the sliding member 54 via a bearing 55. Therefore, in this embodiment, when the pulley 44 rotates, the pressing member 30 rotates along with the pulley 44. Specifically, the rotating mechanism 29 rotates the pressing member 30 relative to the manipulator base 28 along with the mounting portion 27, with the horizontal direction serving as the axis of rotation (specifically, the forward and backward direction serving as the axis of rotation).

[0110] The detection mechanism 32 includes three sensors 58-60 and a detection plate 61 having a detection portion 61b that is detected by the sensors 58-60. Sensors 58-60 are, for example, transmissive optical sensors having a light-emitting portion and a light-receiving portion disposed opposite each other. Sensors 58-60 are fixed inside the manipulator base 28. Sensors 58-60 are arranged in the front-to-back direction. Furthermore, sensors 58-60 are arranged in order from the rear to the front.

[0111] The detection plate 61 is formed by bending a metal plate formed into a predetermined shape. The detection plate 61 is fixed to the sliding member 54 and moves in the front-to-back direction along with the sliding member 54. In other words, the detection plate 61 moves in the front-to-back direction along with the pressing member 30. The detected portion 61b is formed into a flat plate. The detected portion 61b is positioned between the light emitting portion and the light receiving portion of the sensors 58 and 60.

[0112] In this embodiment, when the pressing member 30 retreats to separate the two rollers 50 from the end surface of the wafer 3 (ie, when the pressing member 30 moves to the base end side of the robot 4), as shown in FIG. Figure 7A As shown, the light emitting portion and the light receiving portion of the sensor 58 are blocked by the detected portion 61 b ​​, and the light emitting portion and the light receiving portion of the sensor 59 and the light emitting portion and the light receiving portion of the sensor 60 are not blocked by the detected portion 61 b ​​.

[0113] Furthermore, when the pressing member 30 advances to a position where the two rollers 50 contact the end surface of the wafer 3 with the wafer 3 mounted on the mounting portion 27 with one surface facing upward (i.e., when the pressing member 30 moves to a position where the wafer 3 abuts the abutting surface 36b), as shown in FIG. Figure 7B As shown, the light emitting part and the light receiving part of the sensor 58 and the light emitting part and the light receiving part of the sensor 59 are blocked by the detection part 61b, and the light emitting part and the light receiving part of the sensor 60 are not blocked by the detection part 61b.

[0114] Then, when the pressing member 30 advances to a position where the two rollers 50 contact the end surface of the wafer 3 with the wafer 3 mounted on the mounting portion 27 with the other surface facing upward (i.e., when the pressing member 30 moves to a position where the wafer 3 abuts the abutting surface 38b), as shown in FIG. Figure 7C As shown, the space between the light emitting portion and the light receiving portion of the sensor 58, the space between the light emitting portion and the light receiving portion of the sensor 59, and the space between the light emitting portion and the light receiving portion of the sensor 60 is blocked by the detection portion 61b.

[0115] In addition, when the pressing member 30 advances in a state where no wafer 3 is mounted on the mounting portion 27 (ie, when the pressing member 30 moves to the front end side of the robot 4), as shown in FIG. Figure 7D As shown, the light emitting part and the light receiving part of the sensor 59 and the light emitting part and the light receiving part of the sensor 60 are blocked by the detection part 61b, and the light emitting part and the light receiving part of the sensor 58 are not blocked by the detection part 61b.

[0116] Therefore, in this form, based on the detection results of the detection mechanism 32, it is possible to detect whether a chip 3 is mounted on the mounting part 27, and when a chip 3 is mounted on the mounting part 27, it is possible to detect the following situations: whether the chip 3 is mounted on one side of the mounting part 27 or on the other side of the mounting part 27.

[0117] Like robot 4, robot 5 includes a mounting portion 67 capable of mounting wafers 3; a robot base 68 constituting the base end portion of robot 5; and a rotation mechanism that rotates mounting portion 67 at least 180° relative to robot base 68, with the horizontal direction serving as the rotation axis. Mounting portion 67 is constructed similarly to mounting portion 27, and robot base 68 is constructed similarly to robot base 28.

[0118] In robot 5, wafer 3 is loaded only on one side of loading section 67. Therefore, in robot 5, support members equivalent to support members 36 and 37 are fixed to one side of loading section 67, but support members equivalent to support members 38 and 39 are not fixed to the other side of loading section 67. Aside from these features, robot 5 is constructed substantially the same as robot 4, so a detailed description of the structure of robot 5 will be omitted. Furthermore, similar to robot 4, wafer 3 can also be loaded on the other side of loading section 67. In this case, support members equivalent to support members 38 and 39 are fixed to the other side of loading section 67.

[0119] (Main effect of this form)

[0120] As described above, in this form, support members 36 and 37 are fixed to one side of the mounting portion 27, and support members 38 and 39 are fixed to the other side of the mounting portion 27. The chip 3 mounted on the mounting portion 27 is supported from the bottom by the support members 36 and 37 when one side of the mounting portion 27 is facing upward, and is supported from the bottom by the support members 38 and 39 when the other side of the mounting portion 27 is facing upward.

[0121] Therefore, in this embodiment, for example, as described above, the wafer 3 before cleaning can be loaded and transported on one side of the loading portion 27, and the wafer 3 after cleaning can be loaded and transported on the other side of the loading portion 27. Therefore, in this embodiment, for example, compared to a case where the wafer 3 before cleaning and the wafer 3 after cleaning are loaded on one side of the loading portion 27, even if dirt or the like is attached to the robot hand 4 from the wafer 3 before cleaning, the dirt attached to the robot hand 4 can be effectively suppressed from being attached to the wafer 3 after cleaning.

[0122] In this embodiment, the wafer 3 supported from below by the support members 36 and 37 is pressed against the abutment surface 36b, and the wafer 3 supported from below by the support members 38 and 39 is pressed against the abutment surface 38b using a common pressing member 30 and moving mechanism 31. Therefore, in this embodiment, the structure of the robot 4 can be simplified.

[0123] In this embodiment, the wafer 3 abutting the abutting surface 36b of the support member 36 and the wafer 3 abutting the abutting surface 38b of the support member 38 are arranged at positions offset in the front-to-back direction. Therefore, in this embodiment, as described above, when the wafer 3 is mounted on the mounting portion 27, it is possible to detect based on the detection results of the detection mechanism 32 whether the wafer 3 is mounted on one surface of the mounting portion 27 or on the other surface of the mounting portion 27.

[0124] In this embodiment, the rotation mechanism 29 that rotates the mounting portion 27 relative to the manipulator base 28 with the front-to-back direction as the axis of rotation also rotates the pressing member 30 relative to the manipulator base 28 with the front-to-back direction as the axis of rotation. Therefore, in this embodiment, the structure of the manipulator 4 can be simplified compared to a case where a rotation mechanism that rotates the pressing member 30 relative to the manipulator base 28 with the front-to-back direction as the axis of rotation is provided independently of the rotation mechanism 29.

[0125] In this embodiment, a spline hole 44b is formed in the pulley 44, and a spline shaft portion 52b is formed in the pushing member 30 and is disposed in the spline hole 44b. When the pulley 44 rotates, the pushing member 30 rotates together with the pulley 44. Therefore, in this embodiment, the pushing member 30, which is movable in the front-rear direction relative to the mounting portion 27 and the pulley 44, can be rotated together with the mounting portion 27 using a relatively simple structure.

[0126] In this embodiment, the pressing member 30 is held by a sliding member 54 fixed to the rod 53b of the air cylinder 53, and moves in the front-to-back direction together with the sliding member 54. Furthermore, in this embodiment, the pressing member 30 is rotatable relative to the sliding member 54, with the front-to-back direction being the axis of rotation. Therefore, in this embodiment, the pressing member 30, which rotates together with the mounting portion 27, can be moved in the front-to-back direction with a relatively simple structure.

[0127] (Other embodiments)

[0128] The above-described embodiment is an example of a preferred embodiment of the present invention, but the present invention is not limited thereto, and various modifications can be made without departing from the spirit of the present invention.

[0129] In the described form, the power transmission mechanism 42 may also include a gear on the driving side and a gear on the driven side instead of the pulley 43, the pulley 44 and the belt 45, wherein the gear on the driving side is fixed to the output shaft of the motor 41, and the gear on the driven side is rotatably held on the manipulator base 28 and meshes with the gear on the driving side. In this case, the gear on the driven side is rotatably held on the manipulator base 28 via a bearing built into the bearing holder 46 and the bearing holder 46. In addition, a mounting support member 47 is fixed to the front end portion of the gear on the driven side. A spline hole for configuring the spline shaft portion 52b is formed in the center of the gear on the driven side. At this time, the gear on the driven side is a rotating member that rotates relative to the manipulator base 28 with the front-to-back direction as the axial direction of rotation.

[0130] In the described embodiment, the abutment surface 36b of the support member 36 and the abutment surface 38b of the support member 38 may be arranged at the same position in the front-to-back direction. In this case, the wafer 3 abutting the abutment surface 36b and the wafer 3 abutting the abutment surface 38b are arranged at the same position in the front-to-back direction. In addition, in the described embodiment, the robot 4 may also include a rotation mechanism independent of the rotation mechanism 29 that rotates the pushing member 30 relative to the robot base 28 with the front-to-back direction as the axial direction of rotation. In this case, the spline hole 44b is not formed in the pulley 44. In addition, the spline shaft portion 52b is not formed in the movable shaft 52. Furthermore, in the described embodiment, the pushing member 30 may not be able to rotate relative to the robot base 28.

[0131] In the above embodiment, the moving mechanism 31 may include a motor as a driving source instead of the air cylinder 53. Furthermore, in the above embodiment, the number of rollers 50 included in the pressing member 30 may be one. Furthermore, in the above embodiment, the pressing member 30 may not include the roller 50. In this case, for example, the pressing member 30 may include a cylindrical member fixed to the roller holding member 51 instead of the roller 50.

[0132] In the above embodiment, a pressing member may be provided to press the wafer 3 supported from below by support members 36 and 37 against abutment surface 36b, and a pressing member may be provided to press the wafer 3 supported from below by support members 38 and 39 against abutment surface 38b. In this case, for example, robot arm 4 includes two movement mechanisms that independently move each of the two pressing members in the front-rear direction. Furthermore, in the above embodiment, detection mechanism 32 may include reflective optical sensors in place of transmissive optical sensors 58 to 60, or may include sensors other than optical sensors.

[0133] In the above embodiment, the robot arm 4 may not include the pressing member 30, the moving mechanism 31, and the detecting mechanism 32. In this case, for example, the support members 36 to 39 may be provided with suction holes for sucking and holding the wafer 3 placed thereon. Furthermore, in this case, the support members 36 and 38 may not have the contact surfaces 36b and 38b formed thereon. Furthermore, in the above embodiment, the robot arms 6 and 7 may include three or more robot arm sections. Furthermore, in the above embodiment, the robot 2 may not include the robot arm 5 and the robot arm 7.

[0134] In the above embodiment, the object being transported by robot 2 may be an object other than wafer 3. Furthermore, the industrial robot to which the present invention is applied may be a robot other than a horizontal multi-jointed industrial robot. For example, the industrial robot to which the present invention is applied may be an industrial robot comprising: a robot arm to which robot hands 4 and 5 are connected so as to enable linear reciprocating movement; a main body to which the robot arm is rotatably connected; and a linear drive unit to which robot hands 4 and 5 are linearly reciprocating relative to the robot arm.

[0135] (Structure of this technology)

[0136] Furthermore, the present technology can achieve the following structure.

[0137] (1) A manipulator, which is a manipulator of an industrial robot for transporting a transported object, characterized in that:

[0138] The robot comprises: a carrying portion capable of carrying the transport object; a manipulator base portion constituting the base end portion of the manipulator; a rotating mechanism for rotating the carrying portion at least 180 degrees relative to the manipulator base with the horizontal direction as the rotation axis; a first supporting member fixed to one side of the carrying portion; and a second supporting member fixed to the other side of the carrying portion.

[0139] The rotation mechanism rotates the carrying portion relative to the manipulator base between a position where one surface of the carrying portion faces upward and a position where the other surface of the carrying portion faces upward.

[0140] When one side of the carrying portion faces upward, the transport object carried on the carrying portion is supported from below by the first supporting member.

[0141] When the other surface of the placing portion faces upward, the conveyance object placed on the placing portion is supported from below by the second supporting member.

[0142] (2) The robot according to (1), characterized in that when the axial direction of the rotation of the carrying portion relative to the robot base is set as the first direction, one side of the first direction is set as the second direction side, and the side opposite to the second direction side is set as the third direction side,

[0143] The robot includes a first front-end side support member arranged at the front end side of the carrying portion as the second direction side as the first support member, and a second front-end side support member arranged at the front end side of the carrying portion as the second support member, and includes: a pushing member that contacts the end surface of the conveyed object and pushes the conveyed object from the third direction side; and a moving mechanism that causes the pushing member to move linearly along the first direction,

[0144] The first front end side supporting member has a first contact surface formed thereon, with which the end surface of the transported object contacts.

[0145] The second front end side supporting member has a second abutting surface formed thereon for abutting against the end surface of the transported object.

[0146] The pushing member pushes the end face of the transport object supported from the lower side by the first supporting member to the first abutting surface when one side of the carrying portion faces upward, and pushes the end face of the transport object supported from the lower side by the second supporting member to the second abutting surface when the other side of the carrying portion faces upward.

[0147] (3) The robot according to (2), characterized by comprising a detection mechanism for detecting the position of the pushing member in the first direction,

[0148] The conveyed object whose end surface abuts against the first abutting surface and the conveyed object whose end surface abuts against the second abutting surface are arranged at positions shifted in the first direction.

[0149] (4) The robot according to (2) or (3), characterized in that the rotation mechanism rotates the pressing member together with the mounting portion relative to the robot base with the first direction as the rotation axis.

[0150] (5) The manipulator according to (4), characterized in that the rotation mechanism includes a motor and a power transmission mechanism that transmits power of the motor to the mounting portion,

[0151] The power transmission mechanism includes a rotating member that rotates relative to the manipulator base with the first direction as the axial direction of rotation and includes a pulley or a gear.

[0152] The end portion of the mounting portion on the third direction side is fixed to the rotating member,

[0153] The pushing member is movable along the first direction relative to the rotating member,

[0154] A spline hole is formed in the rotating member and penetrates in the first direction.

[0155] The pressing member is formed with a spline shaft portion arranged in the spline hole.

[0156] When the rotating member rotates, the pressing member rotates together with the rotating member.

[0157] (6) The manipulator according to (4) or (5), characterized in that the moving mechanism includes: a cylinder having a rod that moves linearly in the first direction; and a sliding member fixed to the rod,

[0158] The pressing member is held by the sliding member, moves along the first direction together with the sliding member, and is rotatable relative to the sliding member with the first direction as an axial direction of rotation.

[0159] (7) An industrial robot comprising: the manipulator according to any one of (1) to (6), a manipulator arm to which the manipulator is connected, and a main body to which the manipulator arm is connected.

[0160] In this aspect, preferably, when the axial direction of rotation of the carrying portion relative to the base of the manipulator is set as a first direction, one side of the first direction is set as a second direction side, and the side opposite to the second direction side is set as a third direction side, the manipulator includes a first front end side support member arranged on the front end side of the carrying portion as the second direction side as the first support member, and includes a second front end side support member arranged on the front end side of the carrying portion as the second support member, and includes: a pushing member that contacts the end face of the conveyed object and pushes the conveyed object from the third direction side; and a moving mechanism that causes the pushing member to move linearly along the first direction, a first abutting surface for abutting the end face of the conveyed object is formed on the first front end side support member, and a second abutting surface for abutting the end face of the conveyed object is formed on the second front end side support member, the pushing member pushes the end face of the conveyed object supported from the lower side by the first support member against the first abutting surface when one side of the carrying portion faces upward, and pushes the end face of the conveyed object supported from the lower side by the second support member against the second abutting surface when the other side of the carrying portion faces upward.

[0161] With this configuration, a common pressing member and moving mechanism can be used to press the conveyed object supported from below by the first supporting member against the first abutment surface, and to press the conveyed object supported from below by the second supporting member against the second abutment surface. This simplifies the structure of the robot arm.

[0162] In this aspect, preferably, the manipulator includes a detection mechanism, wherein the detection mechanism is used to detect the position of the pushing member in the first direction, and the transported object whose end face abuts the first abutting surface and the transported object whose end face abuts the second abutting surface are arranged at staggered positions in the first direction. If so constructed, by detecting the position of the pushing member in the first direction based on the detection result of the detection mechanism, it is possible to detect whether the transported object is carried on the carrying portion. In addition, if so constructed, the transported object whose end face abuts the first abutting surface and the transported object whose end face abuts the second abutting surface are arranged at staggered positions in the first direction. Therefore, by detecting the position of the pushing member in the first direction based on the detection result of the detection mechanism, it is possible to detect on which side of the carrying portion the transported object is carried.

[0163] In this embodiment, for example, the rotation mechanism causes the pushing member to rotate relative to the manipulator base along with the carrying portion, with the first direction being the rotation axis. In this case, the structure of the manipulator can be simplified compared to a case where a mechanism is provided independently of the rotation mechanism to cause the pushing member to rotate relative to the manipulator base, with the horizontal direction being the rotation axis.

[0164] In this aspect, the rotation mechanism preferably includes a motor and a power transmission mechanism for transmitting power from the motor to the mounting portion. The power transmission mechanism includes a rotation member that rotates relative to the manipulator base with a first direction as its axis of rotation and includes a pulley or gear. The mounting portion is fixed to the rotation member at an end portion on the third direction side. The pushing member is movable relative to the rotation member in the first direction. The rotation member includes a spline hole extending in the first direction, and the pushing member includes a spline shaft portion disposed in the spline hole. When the rotation member rotates, the pushing member rotates together with the rotation member. With this configuration, the pushing member, which is movable relative to the mounting portion and the rotation member in the first direction, can be rotated together with the mounting portion using a relatively simple structure.

[0165] In this aspect, the moving mechanism preferably includes: a cylinder having a rod that moves linearly in a first direction; and a sliding member fixed to the rod. The pressing member is held by the sliding member and moves along with the sliding member in the first direction and is rotatable relative to the sliding member with the first direction as the rotation axis. With this configuration, the pressing member, which rotates along with the mounting portion, can be moved in the first direction with a relatively simple structure.

Claims

1. A manipulator, which is a manipulator of an industrial robot for transporting an object to be transported. It is characterized in that include: The carrying portion is capable of carrying the transport object; the manipulator base portion constitutes the base end side portion of the manipulator; A rotating mechanism causes the carrying portion to rotate at least 180 degrees relative to the manipulator base with the horizontal direction as the rotation axis; a first supporting member is fixed to one side of the carrying portion; and a second supporting member is fixed to the other side of the carrying portion. The rotation mechanism rotates the carrying portion relative to the manipulator base between a position where one surface of the carrying portion faces upward and a position where the other surface of the carrying portion faces upward. When one side of the carrying portion faces upward, the transport object carried on the carrying portion is supported from below by the first supporting member. When the other surface of the placing portion faces upward, the conveyance object placed on the placing portion is supported from below by the second supporting member.

2. The manipulator according to claim 1, characterized in that: When the axial direction of the rotation of the carrying portion relative to the manipulator base is set as the first direction, one side of the first direction is set as the second direction side, and the opposite side of the second direction side is set as the third direction side, The robot includes a first front-end side support member arranged at the front end side of the carrying portion as the second direction side as the first support member, and a second front-end side support member arranged at the front end side of the carrying portion as the second support member, and includes: a pushing member that contacts the end surface of the conveyed object and pushes the conveyed object from the third direction side; and a moving mechanism that causes the pushing member to move linearly along the first direction, The first front end side supporting member has a first contact surface formed thereon, with which the end surface of the transported object contacts. The second front end side supporting member has a second abutting surface formed thereon for abutting against the end surface of the transported object. The pushing member pushes the end face of the transport object supported from the lower side by the first supporting member to the first abutting surface when one side of the carrying portion faces upward, and pushes the end face of the transport object supported from the lower side by the second supporting member to the second abutting surface when the other side of the carrying portion faces upward.

3. The manipulator according to claim 2, characterized in that comprising a detection mechanism for detecting the position of the pushing member in the first direction, The conveyed object whose end surface abuts against the first abutting surface and the conveyed object whose end surface abuts against the second abutting surface are arranged at positions shifted in the first direction.

4. The manipulator according to claim 2 or 3, characterized in that: The rotation mechanism rotates the pressing member together with the mounting portion relative to the manipulator base with the first direction as the axial direction of rotation.

5. The robot according to claim 4, characterized in that: The rotating mechanism includes a motor and a power transmission mechanism for transmitting power of the motor to the carrying portion. The power transmission mechanism includes a rotating member that rotates relative to the manipulator base with the first direction as the axial direction of rotation and includes a pulley or a gear. The end portion of the mounting portion on the third direction side is fixed to the rotating member, The pushing member is movable along the first direction relative to the rotating member, A spline hole is formed in the rotating member and penetrates in the first direction. The pressing member is formed with a spline shaft portion arranged in the spline hole. When the rotating member rotates, the pressing member rotates together with the rotating member.

6. The robot according to claim 4, characterized in that: The moving mechanism includes: a cylinder having a rod that moves linearly along the first direction; and a sliding member fixed to the rod. The pressing member is held by the sliding member, moves along the first direction together with the sliding member, and is rotatable relative to the sliding member with the first direction as an axial direction of rotation.

7. An industrial robot, characterized in that include: A robot according to any one of claims 1 to 3, a robot arm to which the robot is connected, and a main body to which the robot arm is connected.

Images