Vacuum coating water-cooled machine with gas-liquid separation type cooling module

Abstract

The application relates to the technical field of vacuum coating equipment, and discloses a vacuum coating water cooling machine adopting a gas-liquid separation type cooling module, which comprises a machine box provided with upper and lower baffles, a water tank and a water-cooled plate heat exchanger are respectively arranged on the left side and the right side of the upper baffle, a gas-liquid separator is arranged on the left side of the lower baffle in a penetrating mode, an evaporator is arranged on the right side of the lower baffle, a compressor is arranged on the left rear side of the inner wall of the bottom end of the machine box, and a condenser is arranged on the front side of the bottom end of the machine box. The vacuum coating water cooling machine adopting the gas-liquid separation type cooling module can effectively solve the problems in the prior art, that is, simple gas-liquid separation is mostly carried out by using a gas-liquid separator, the separation effect is unstable, the load on the gas-liquid separator is large, and the gas-liquid separation efficiency is further affected; the traditional gas-liquid separator mostly adopts welding or custom flange connection, cannot meet the demand of quick parallel connection of refrigeration units, and cannot quickly dock different flanges when the custom flange connection is used.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum coating equipment, in particular to a vacuum coating water cooling machine adopting a gas-liquid separation type cooling module. BACKGROUND

[0002] As the core equipment of modern precision manufacturing, vacuum coating equipment is widely used in optical coating, semiconductor packaging, decorative coating and functional film deposition fields, and its stable operation highly depends on efficient and accurate temperature control. The existing water cooling machine can improve the basic cooling performance by strengthening the efficiency of the heat exchanger and optimizing the compressor control, and undertake the core task of efficiently leading out the continuously accumulated heat load of key components such as the coating cavity, the magnetron target material and the vacuum pump set.

[0003] To this end, the present application designs a vacuum coating water cooling machine adopting a gas-liquid separation type cooling module. In order to avoid the mechanical damage caused by the liquid refrigerant rushing into the compressor, the existing water cooling machine mostly adopts a gas-liquid separator for simple gas-liquid separation. However, the separation effect is unstable, which leads to the problem that the separated gas still has oil mist and steam carrying. Moreover, when processing the high-speed airflow transported from the evaporator, the gas-liquid separator is subjected to a large load due to the mixing of large droplets and the entrainment of solid particles, which further affects the gas-liquid separation efficiency. At the same time, the traditional gas-liquid separator mostly adopts welding or custom flange connection. When expanding the vacuum coating production line and adding PVD chambers, it is difficult to meet the demand of rapid parallel connection of refrigeration units due to the rigid connection and difficulty in adaptation. Moreover, when connecting through custom flanges, it is also difficult to quickly connect different flanges, and the applicability needs to be improved. SUMMARY

[0004] In view of the above-mentioned shortcomings of the prior art, the present application provides a vacuum coating water cooling machine adopting a gas-liquid separation type cooling module, which can effectively solve the problems that the existing technology mostly adopts a gas-liquid separator for simple gas-liquid separation, the separation effect is unstable, and the gas-liquid separator is subjected to a large load, which further affects the gas-liquid separation efficiency; the traditional gas-liquid separator mostly adopts welding or custom flange connection, which cannot meet the demand of rapid parallel connection of refrigeration units, and when connecting through custom flanges, it is also difficult to quickly connect different flanges.

[0005] To achieve the above purpose, the present application realizes the following technical solutions:

[0006] The present application provides a vacuum coating water cooling machine adopting a gas-liquid separation type cooling module, comprising:

[0007] The upper and lower partition plates are provided with a water tank and a water-cooled plate heat exchanger on the left and right sides of the upper partition plate, a gas-liquid separator is installed on the left side of the lower partition plate, and an evaporator is installed on the right side of the lower partition plate.

[0008] The load reduction adjusting part comprises a liquid accumulation seat installed on the inner wall of the bottom end of the cabinet, the lower end of the gas-liquid separator is communicated with the liquid accumulation seat, a gas phase discharge pipe is installed on the upper end of the gas-liquid separator through a circular hole, a rotating shaft is arranged in the middle of the gas phase discharge pipe, a liquid distribution plate is fixedly sleeved on the outer wall of the gas phase discharge pipe, and a load reduction group is arranged on the rotating shaft.

[0009] The load reduction adjusting part further comprises a threaded sleeve threadedly connected to the middle and lower side of the outer wall of the rotating shaft, a flow adjusting group is arranged on the rotating shaft, and a sleeve pipe is slidably sleeved on the lower side of the outer wall of the rotating shaft.

[0010] Further, the quick release part comprises a butt joint pipe communicated with the upper end and the upper and lower sides of the outer wall of the gas-liquid separator, a plurality of butt joint pipes are communicated with the evaporator and the compressor, flanges are threadedly connected to the opposite ends of adjacent two butt joint pipes, and a quick release group is arranged on the flange.

[0011] Further, the load reduction group comprises strong magnetic rings symmetrically arranged on the inner wall of the gas phase discharge pipe, air holes are symmetrically arranged on the strong magnetic rings, the upper strong magnetic ring is fixedly sleeved on the rotating shaft and rotationally attached to the inner wall of the gas phase discharge pipe, the lower strong magnetic ring is threadedly connected to the rotating shaft, and the outer wall of the lower strong magnetic ring is symmetrically provided with a matching sliding groove, the inner wall of the gas phase discharge pipe is symmetrically provided with a matching sliding block corresponding to the upper threaded segment of the rotating shaft, the two matching sliding blocks are slidably connected to the inner walls of the corresponding matching sliding grooves, and the lower end of the rotating shaft is rotationally connected to the inner wall of the liquid accumulation seat and the upper end is rotationally penetrated into the corresponding butt joint pipe.

[0012] Further, the load reduction group further comprises a positioning ring one fixedly sleeved on the upper and lower ends of the upper threaded segment of the rotating shaft, a magnetic sleeve is rotationally sleeved on the outer wall of the gas phase discharge pipe corresponding to the upper strong magnetic ring, a plurality of brush plates are arranged on the outer wall of the magnetic sleeve and uniformly distributed in a circle, and a magnetic baffle is slidably sleeved on the outer wall of the gas phase discharge pipe corresponding to the lower strong magnetic ring.

[0013] Further, the load reduction group further comprises a plurality of stepped holes arranged on the outer wall of the gas-liquid separator corresponding to the liquid distribution plate, the plurality of stepped holes are uniformly distributed in a circle, an electromagnet is arranged on the inner wall of the side with a larger diameter of the stepped hole, a plug is connected to one end of the electromagnet facing the rotating shaft through a compression spring, the outer wall of the plug is movably attached to the inner wall of the side with a smaller diameter of the stepped hole, and a collection cover is fixedly sleeved on the outer wall of the gas-liquid separator corresponding to the plurality of electromagnets.

[0014] Further, the flow adjusting group comprises two positioning rings fixedly sleeved on the upper and lower ends of the lower threaded segment of the rotating shaft, a plurality of expansion separation plates are hingedly connected to the outer wall of the threaded sleeve and are uniformly distributed in a circle, and the ends of the expansion separation plates away from the threaded sleeve are connected to the inner wall of the gas-liquid separator.

[0015] Further, the outer wall of the sleeve is rotatably sleeved with a buoyancy plate on the upper side, and rotatably sleeved with a liquid blocking plate on the lower side, the liquid blocking plate is movably connected to the inner wall of the bottom end of the liquid accumulation seat through the tension spring.

[0016] Further, the outer wall of the gas phase discharge pipe is fixedly sleeved with a spiral blade in the middle, and the inner wall of the gas phase discharge pipe is provided with a plurality of breaking nets uniformly distributed from bottom to top.

[0017] Further, the flange disc is provided with a light shaft segment in the middle of the threaded segment and on the side close to the tail end of the threaded segment of the butt joint pipe, the quick release group comprises a plurality of accommodating holes formed in the inner wall of the flange disc corresponding to the light shaft segments, the plurality of accommodating holes are respectively connected to the corresponding bolt holes, and the inner wall of the accommodating hole is movably provided with a contact plug rod through the compression spring, and the outer wall of the light shaft segment in the threaded segment of the butt joint pipe is provided with a clamping groove corresponding to the plurality of accommodating holes.

[0018] Compared with the prior art, the technical scheme provided by the application has the following beneficial effects:

[0019] The vacuum coating water cooling machine provided by the application adopts a gas-liquid separation type cooling module, when it is necessary to adapt to the butt joint pipe with different specification flange discs, the working personnel sequentially remove the mounting bolts on the plurality of flange discs of the gas-liquid separator, so that the effect of quickly releasing the clamping of the plurality of contact plug rods on the position between the flange disc and the corresponding butt joint pipe is realized, the working personnel make the flange disc separate from the butt joint pipe through spiral rotation, and the same specification flange disc is installed on the tail end of the butt joint pipe through spiral rotation, when the vacuum coating production line is expanded and a PVD chamber is added, the problem that the conventional welding or customized flange connection cannot meet the demand of quickly parallel refrigeration units due to rigid connection and large adaptation difficulty is avoided, different flange discs can be quickly butt jointed and have the anti-loosening function, and the applicability of the gas-liquid separator is effectively improved.

[0020] The refrigerant used in the evaporator is converted into a high-speed gas flow in a gas-liquid state, and is input into the gas-liquid separator through the butt joint pipe on the upper side of the outer wall of the gas-liquid separator, and is continuously transported to the lower side of the gas-liquid separator after being filtered through the plurality of coarse filter holes on the separation plate, so that the mixed large droplets and the entrained solid particles in the high-speed gas flow are preliminarily intercepted, the load of the main separation area on the lower side of the gas-liquid separator is reduced, and the problem that the subsequent separation components are prone to be blocked is avoided.

[0021] When the slow-moving gas flow after gas-liquid separation is delivered above the telescopic separation plate, the gas phase in the slow-moving gas flow will move upward after contacting the end faces of the plurality of telescopic separation plates, the liquid phase in the slow-moving gas flow will be filtered and separated through the fine filter holes on the plurality of telescopic separation plates, and coagulate into water droplets to drop downward on the liquid accumulation area at the bottom of the gas-liquid separator, thereby improving the effect of capturing liquid droplets and avoiding the problem that the separated gas still contains oil mist and steam carried due to unstable separation effect through the effect of secondary filtering of the slow-moving gas flow by the inclined telescopic separation plate. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0023] Figure 1 is a schematic diagram of the three-dimensional structure of the case in the embodiment of the present application;

[0024] Figure 2 is a schematic diagram of the three-dimensional structure of the case in the embodiment of the present application;

[0025] Figure 3 is a schematic diagram of the three-dimensional structure of the inside of the case in the embodiment of the present application;

[0026] Figure 4 is a schematic diagram of the three-dimensional structure of the inside of the case in the embodiment of the present application;

[0027] Figure 5 is a schematic diagram of the three-dimensional structure of the inside of the case in the embodiment of the present application; Figure 4

[0028] Figure 6

[0029] Figure 7 is a schematic diagram of the three-dimensional structure of the inside of the case in the embodiment of the present application;

[0030] Figure 8 is a schematic diagram of the three-dimensional structure of the inside of the case in the embodiment of the present application;

[0031] Figure 9 is a schematic diagram of the three-dimensional structure of the inside of the case in the embodiment of the present application;

[0032] ​​The labels in the figure respectively represent: 1, case; 2, water tank; 3, water-cooled plate heat exchanger; 4, gas-liquid separator; 5, evaporator; 6, compressor; 7, condenser; 8, load reduction adjusting part; 81, liquid accumulation seat; 82, gas phase discharge pipe; 821, spiral blade; 822, defoaming net; 83, rotating shaft; 84, liquid separation plate; 85, load reduction group; 851, strong magnetic ring; 852, positioning ring one; 853, magnetic sleeve; 854, brush plate; 855, magnetic blocking plate; 856, electromagnet; 857, plug; 858, collection cover; 86, threaded sleeve; 87, flow adjusting group; 871, positioning ring two; 872, telescopic separation plate; 88, sleeve pipe; 881, buoyancy plate; 882, liquid blocking plate; 9, quick release part; 91, flange plate; 92, quick release group; 921, abutting plug rod. DETAILED DESCRIPTION

[0033] To make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described below in connection with the drawings in the embodiments of the present application. Obviously, the described embodiments are some but not all of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0034] The present application will be further described below in connection with the embodiments.

[0035] Embodiment:

[0036] Please refer to Figures 1-9 The present application provides a technical solution: a vacuum coating water-cooled machine using a gas-liquid separation type cooling module, comprising:

[0037] The case 1 is provided with upper and lower two partitions, the upper partition is provided with a water tank 2 and a water-cooled plate heat exchanger 3 on the left and right sides respectively, the lower partition is provided with an evaporator 5 on the left side and a gas-liquid separator 4 penetratingly installed on the right side, a compressor 6 is installed on the left rear side of the inner wall of the bottom end of the case 1, a condenser 7 is installed on the front side of the bottom end of the case 1, and a load reduction adjusting part 8 and a quick release part 9 are arranged on the gas-liquid separator 4 respectively;

[0038] The load reduction adjusting part 8 comprises a liquid accumulation seat 81 installed on the inner wall of the bottom end of the case 1, the lower end of the gas-liquid separator 4 is communicated with the liquid accumulation seat 81, a gas phase discharge pipe 82 is installed on the upper end of the gas-liquid separator 4 through a round hole, a rotating shaft 83 is arranged in the middle of the gas phase discharge pipe 82, a liquid separation plate 84 is fixedly sleeved on the outer wall of the gas phase discharge pipe 82, a plurality of groups of circumferentially uniformly distributed coarse filter holes are formed on the arc-shaped end face of the liquid separation plate 84, and a load reduction group 85 is arranged on the rotating shaft 83;

[0039] The load reduction adjusting part 8 further comprises a threaded sleeve 86 screwed on the lower side of the outer wall of the rotating shaft 83, and a flow adjusting group 87 arranged on the rotating shaft 83.

[0040] The quick release part 9 comprises a plurality of docking pipes communicated with the upper end and the upper and lower sides of the outer wall of the gas-liquid separator 4, and a plurality of docking pipes communicated with the evaporator 5 and the compressor 6, and flanges 91 are screwed on the opposite ends of adjacent two docking pipes, and a quick release group 92 is arranged on the flanges 91.

[0041] The load reduction group 85 comprises strong magnetic rings 851 symmetrically arranged on the inner wall of the gas phase discharge pipe 82, and air holes are symmetrically arranged on the strong magnetic rings 851, the upper strong magnetic ring 851 is fixedly sleeved on the rotating shaft 83 and rotationally attached to the inner wall of the gas phase discharge pipe 82, the lower strong magnetic ring 851 is screwed on the rotating shaft 83, and a matching sliding groove is symmetrically arranged on the outer wall of the lower strong magnetic ring 851, and a matching sliding block is symmetrically arranged on the inner wall of the gas phase discharge pipe 82 corresponding to the upper threaded segment of the rotating shaft 83, the two matching sliding blocks are respectively slidably connected to the inner walls of the corresponding matching sliding grooves, and the lower end of the rotating shaft 83 is rotationally connected to the inner wall of the liquid accumulation seat 81, and the upper end is rotationally penetrated through the corresponding docking pipe.

[0042] The load reduction group 85 further comprises positioning rings one 852 fixedly sleeved on the upper threaded segment of the rotating shaft 83, a magnetic sleeve 853 rotationally sleeved on the outer wall of the gas phase discharge pipe 82 corresponding to the upper strong magnetic ring 851, the magnetic sleeve 853 is magnetically connected to the upper strong magnetic ring 851, and a plurality of brush plates 854 are arranged on the outer wall of the magnetic sleeve 853, and the brush plates 854 are circumferentially and uniformly distributed, and a magnetic blocking plate 855 is slidably sleeved on the outer wall of the gas phase discharge pipe 82 corresponding to the lower strong magnetic ring 851, and the magnetic blocking plate 855 is magnetically connected to the lower strong magnetic ring 851.

[0043] The load reduction group 85 further comprises a plurality of stepped holes arranged on the outer wall of the gas-liquid separator 4 corresponding to the distribution plate 84, the stepped holes are circumferentially and uniformly distributed, an electromagnet 856 is arranged on the inner wall of the side with a larger diameter of the stepped hole, the electromagnet 856 is a semicircular structure, and a plug 857 is connected to one end of the electromagnet 856 facing the rotating shaft 83 through a compression spring, the plug 857 is movably attached to the inner wall of the side with a smaller diameter of the stepped hole, and a collection cover 858 is fixedly sleeved on the outer wall of the gas-liquid separator 4 corresponding to the plurality of electromagnets 856.

[0044] The flow adjusting group 87 comprises positioning rings two 871 fixedly sleeved on the upper and lower ends of the lower threaded segment of the rotating shaft 83, a plurality of stretchable separation plates 872 are hingedly connected to the outer wall of the threaded sleeve 86, the stretchable separation plates 872 are connected to the inner wall of the gas-liquid separator 4 away from the threaded sleeve 86, and a plurality of groups of fine filter holes are arranged on the stretchable separation plates 872 in a circumferentially and uniformly distributed manner.

[0045] The outer wall of the sleeve 88 is rotatably sleeved with a buoyancy plate 881 on the upper side, and the outer wall of the sleeve 88 is rotatably sleeved with a liquid blocking plate 882 which is movably attached to the inner wall of the effusion seat 81 on the lower side, and the lower end of the liquid blocking plate 882 is connected to the inner wall of the bottom end of the effusion seat 81 by a tension spring.

[0046] The outer wall of the gas phase discharge pipe 82 is fixedly sleeved with a spiral blade 821 in the middle, and the inner wall of the gas phase discharge pipe 82 is installed with a plurality of downwardly and uniformly distributed defoaming nets 822.

[0047] The middle of the threaded section of the flange plate 91 and the threaded section of the butt joint pipe are provided with a light shaft section near the tail end, the quick release group 92 includes a plurality of accommodating holes which are opened on the inner wall of the flange plate 91 corresponding to the light shaft section, the plurality of accommodating holes are respectively communicated with corresponding bolt holes, and a contact plug rod 921 is slidably installed on the inner wall of the accommodating hole through a compression spring, and the outer wall of the light shaft section in the threaded section of the butt joint pipe is provided with a clamping groove corresponding to the plurality of accommodating holes.

[0048] The water tank 2 is connected to the water-cooled plate heat exchanger 3 through a water pump, the evaporator 5 is connected to the water tank 2, the water-cooled plate heat exchanger 3 and the condenser 7 through a conveying pipe respectively, and the compressor 6 is also connected to the condenser 7 through a conveying pipe.

[0049] In specific implementation:

[0050] Firstly, the load reduction adjusting part 8 in the present application adopts a hierarchical processing mode, has the advantages of compact structure, small volume, low energy consumption, high efficiency, real-time processing, etc., can effectively reduce the load caused by mixed large droplets and entrained solid particles on the gas-liquid separator 4, and effectively increase the effect of gas-liquid separation, the quick release part 9 adopts a replaceable flange plate 91, has an anti-loosening function, meets the needs of quick parallel refrigeration units, and can also quickly butt joint different flange plates 91, is suitable for scenes such as mixed use of multiple equipment in a vacuum coating production line, high-frequency expansion reconstruction, butt joint of vibration-sensitive refrigeration units, etc.

[0051] It should be noted that the water tank 2, the water pump, the water-cooled plate heat exchanger 3 and the evaporator 5 in the present application form a water circulation closed loop system through a conveying pipe, and the compressor 6, the condenser 7, the external expansion valve, the evaporator 5 and the gas-liquid separator 4 form a refrigerant circulation closed loop system through a conveying pipe and a butt joint pipe, which is prior art and will not be described in detail here.

[0052] When installing the gas-liquid separator 4, first, the worker moves the flange plate 91 corresponding to the plurality of butt pipes on the gas-liquid separator 4 to the tail end of the butt pipe by screw rotation, at this time, the plurality of accommodation holes in the inner wall of the flange plate 91 are aligned with the corresponding optical axis segments on the outer wall of the butt pipe, and the plurality of abutting insertion rods 921 on the flange plate 91 are initially located in the corresponding bolt holes on the flange plate 91 under the action of the compression spring, and the insertion end of the abutting insertion rod 921 is initially retracted into the corresponding accommodation hole. When the gas-liquid separator 4 is placed in the appropriate position, the plurality of butt pipes on the gas-liquid separator 4 are respectively connected to the butt pipes on the evaporator 5 and the compressor 6 through the flange plate 91, and then the worker successively screws the mounting bolts into the bolt holes on the flange plate 91 for locking and installation. During this period, the mounting bolts will gradually be inserted into the corresponding bolt holes, pushing the corresponding abutting insertion rods 921 to retract the abutting end into the corresponding accommodation hole, and the insertion end extends out of the corresponding accommodation hole and is inserted into the corresponding clamping groove, thereby achieving the effect of further clamping the position between the flange plate 91 and the corresponding butt pipe through the plurality of abutting insertion rods 921, effectively preventing the flange plate 91 from loosening due to external vibration and other factors, and causing connection failure and leakage between the butt pipes.

[0053] When it is necessary to adapt the butt pipe with different specification flange plates 91, the worker successively removes the mounting bolts on the plurality of flange plates 91 on the gas-liquid separator 4, during which the corresponding abutting insertion rods 921 will be restored to their original positions under the action of the compression spring as the mounting bolts gradually exit the corresponding bolt holes. At this time, the abutting end of the abutting insertion rod 921 will again be located in the corresponding bolt hole on the flange plate 91, and the insertion end of the abutting insertion rod 921 will again be retracted into the corresponding accommodation hole, thereby achieving the effect of quickly releasing the clamping of the position between the flange plate 91 and the corresponding butt pipe by the plurality of abutting insertion rods 921. The worker can quickly connect different flange plates 91 and have an anti-loosening function, effectively improving the applicability of the gas-liquid separator 4.

[0054] When the gas-liquid separator 4 works, it is necessary to note that in this application, the high-temperature heat generated by the coating equipment is first directly absorbed by the water-cooled plate heat exchanger 3 to transfer the heat to the water circulating medium, and then the heated cooling water is output to the evaporator 5, which is a first heat exchange. The evaporator 5 uses the latent heat of evaporation of the refrigerant to deeply cool the medium-temperature cooling water output by the water-cooled plate to the set temperature, which is a second deep cooling, and outputs the low-temperature cooling water to the water tank 2. The water tank 2 sends the low-temperature cooling water to the water-cooled plate heat exchanger 3 through the water pump to realize a water circulation closed loop system.

[0055] The used refrigerant in the evaporator 5 will be converted into a high-speed gas flow in a gas-liquid state and input to the gas-liquid separator 4 through the butt joint pipe on the upper side of the outer wall of the gas-liquid separator 4. Since the high-speed gas flow transported from the evaporator 5 will mix with large droplets and entrain solid particles, when the high-speed gas flow enters the gas-liquid separator 4, it will be filtered through the multiple coarse filter holes on the liquid separation plate 84 and continue to be transported to the lower side of the gas-liquid separator 4, thereby realizing the preliminary interception of the mixed large droplets and entrained solid particles in the high-speed gas flow, reducing the load of the main separation area on the lower side of the gas-liquid separator 4, and avoiding the problem of easy blockage of the subsequent separation components. It is necessary to note that the large droplets intercepted on the liquid separation plate 84 will condense and drop down the spiral blade 821, and then spiral down to the telescopic separation plate 872 along with the spiral blade 821, and finally further filtered and refined through the multiple fine filter holes on the telescopic separation plate 872 to drop into the bottom liquid accumulation area in the gas-liquid separator 4. The high-speed gas flow filtered and screened by the liquid separation plate 84 will be reduced in flow rate and converted into a slow-speed gas flow.

[0056] When the slow-speed gas flow filtered preliminarily is transported to the spiral blade 821, the spiral blade 821 will force the slow-speed gas flow to do centrifugal cyclone motion to generate centrifugal force, so that the gas phase and the liquid phase with different densities in the slow-speed gas flow move relatively. The liquid will adhere to the inner wall of the gas-liquid separator 4 and also spiral down the spiral blade 821 to the telescopic separation plate 872 under the action of gravity to accumulate in the bottom liquid accumulation area in the gas-liquid separator 4, thereby realizing the effect of gas-liquid separation. At this time, the gas phase and a small amount of liquid phase not separated out in the slow-speed gas flow will be transported to above the telescopic separation plate 872 through the spiral blade 821.

[0057] When the slow-moving gas flow after gas-liquid separation is delivered above the telescopic separation plate 872, it should be noted that the plurality of telescopic separation plates 872 collectively form a umbrella-shaped flow guide plate. Under the guidance and filtering effect of the umbrella-shaped flow guide plate, the water droplets will be deposited downward due to their weight, and the gas will move upward. The gas phase in the slow-moving gas flow will move upward after contacting the upper end surface of the plurality of telescopic separation plates 872, and will be delivered to the bottom inlet of the gas phase discharge pipe 82, and the fine water droplets entrained in the slow-moving gas flow will be separated by the plurality of defoaming nets 822, so that the condensed larger water droplets sink onto the plurality of telescopic separation plates 872, and then the pure gaseous gas flow is discharged into the butt joint pipe at the upper end of the gas-liquid separator 4, and finally delivered into the compressor 6 to realize the refrigerant circulation closed loop system.

[0058] During this period, the liquid phase in the slow-moving gas flow will be filtered and separated through the fine filter holes on the plurality of telescopic separation plates 872, and will be condensed into water droplets and fall downward in the gas-liquid separator 4 to the bottom liquid accumulation area, thereby achieving the effect of secondary filtering of the mixed small droplets in the slow-moving gas flow by the inclined telescopic separation plate 872, further improving the droplet capture effect, avoiding the problem that the separated gas still contains oil mist and steam carried due to unstable separation effect, and the telescopic separation plate 872 can buffer the impact of the high-speed gas flow on the liquid accumulation at the bottom of the gas-liquid separator 4, preventing the liquid accumulation from being mixed into the high-speed gas flow again.

[0059] It should also be noted that when the coating process suddenly changes from standby state to high-power sputtering / evaporation stage, due to the stepwise increase in thermal load, the response delay of the traditional temperature feedback loop causes the outlet temperature of the cooling water to increase instantaneously. At this time, the step change in sputtering / evaporation power will directly cause the flow of the slow-moving gas flow to change. Since the residence time of the slow-moving gas flow changes with the fluctuation of the inlet gas quantity, when the flow of the slow-moving gas flow is low, the servo motor control rotating shaft 83 is rotated, and the rotating shaft 83 drives the plurality of telescopic separation plates 872 to move downward synchronously through the threaded sleeve 86, reducing the flow angle / resistance, shortening the flow path to avoid excessive residence, and maintaining a reasonable pressure drop. When the flow of the slow-moving gas flow is high, the servo motor control rotating shaft 83 is reversely rotated, and the rotating shaft 83 drives the plurality of telescopic separation plates 872 to move upward synchronously through the threaded sleeve 86, increasing the flow angle / resistance, lengthening the flow path to reduce the flow velocity, increasing the residence time, and ensuring that the tiny droplets are fully settled. During the upward and downward movement of the threaded sleeve 86, the plurality of telescopic separation plates 872 will be adaptively telescoped to adjust the flow angle of the plurality of telescopic separation plates 872, thereby avoiding the problems of excessive residence time when the flow of the slow-moving gas flow is low, resulting in excessive efficiency, and insufficient residence time when the flow of the slow-moving gas flow is high, leading to incomplete gas-liquid separation.

[0060] When the distribution plate 84 needs to be cleaned, the rotating shaft 83 is rotated by the external servo motor control, the rotating shaft 83 drives the upper strong magnetic ring 851 to rotate, the upper strong magnetic ring 851 drives the magnetic sleeve 853 to rotate synchronously through magnetic attraction connection, the magnetic sleeve 853 drives the plurality of brush plates 854 to rotate synchronously to clean the upper end surface of the distribution plate 84, preventing the filtered large liquid drops and the entrained solid particles from blocking the plurality of coarse filter holes on the distribution plate 84, the filtered solid particles will slide from the arc-shaped inclined end of the distribution plate 84 to the horizontal end, at the same time, the rotating shaft 83 drives the lower strong magnetic ring 851 to move upward through threaded connection, the lower strong magnetic ring 851 drives the magnetic blocking plate 855 to move upward synchronously through magnetic attraction connection, until the upper end surface of the magnetic blocking plate 855 is tightly attached to the lower end surface of the distribution plate 84, so that the effect of sealing the distribution plate 84 is realized, at this time, the plurality of electromagnets 856 can be controlled to start working, under the action of the strong magnetic attraction of the plurality of electromagnets 856, the plurality of plugs 857 will exit from the inner wall of the smaller diameter side of the stepped hole to the inner wall of the larger diameter side, and approach the corresponding electromagnets 856 respectively, then the solid particles on the upper end of the distribution plate 84 are sucked out by the external vacuum pump connected by the collecting cover 858 for treatment, so that the effect of cleaning the distribution plate 84 is realized, after cleaning, the plurality of electromagnets 856 are controlled to stop working, under the action of the compression spring, the plurality of plugs 857 will restore to the original position and be inserted into the inner wall of the smaller diameter side of the stepped hole again for sealing, avoiding the problem of high-speed airflow leakage when the gas-liquid separator 4 works.

[0061] When the liquid refrigerant stored in the liquid accumulation area of the bottom of the gas-liquid separator 4 exceeds the predetermined high liquid level and needs to be discharged, it should be noted that during the gas-liquid separation process, as the liquid level of the liquid refrigerant stored in the liquid accumulation area of the bottom of the gas-liquid separator 4 gradually increases, under the action of the buoyancy of the buoyant plate 881, the buoyant plate 881 drives the sleeve 88 and the liquid blocking plate 882 to move upward along the rotating shaft 83 synchronously, until the liquid blocking plate 882 moves upward to the liquid accumulation area of the gas-liquid separator 4, then the liquid refrigerant flows into the liquid accumulation seat 81, and is pumped out by the external water pump through the docking pipe and transported into the evaporator 5, during which, as the liquid level of the liquid refrigerant stored in the liquid accumulation area of the bottom of the gas-liquid separator 4 gradually decreases and reaches the predetermined low liquid level, under the combined action of the tension of the tension spring and the buoyancy of the buoyant plate 881, the buoyant plate 881 drives the sleeve 88 and the liquid blocking plate 882 to move downward along the rotating shaft 83 synchronously, until the liquid blocking plate 882 moves downward to restore to the original position and block the inlet of the docking pipe of the liquid accumulation seat 81 again, so that the effect of automatically quantitatively discharging by cooperating the liquid level of the liquid refrigerant with the buoyant plate 881 and the liquid blocking plate 882 is realized, without the need for external driving to reduce equipment cost.

[0062] In summary, the present application has the following advantages:

[0063] The first advantage is that when the gas-liquid separator 4 is installed, the staff first moves the flange plate 91 to the tail end of the butt joint pipe by screw rotation, then the staff successively locks and installs the installation bolts in the bolt holes on the flange plate 91, so as to realize the effect of clamping the position between the flange plate 91 and the corresponding butt joint pipe through the plurality of resisting insertion rods 921, effectively prevent the flange plate 91 from loosening due to external vibration and other factors, and cause the connection between the butt joint pipes to be invalid and leak.

[0064] The second advantage is that when the butt joint pipe with different specifications of flange plate 91 needs to be adapted, the staff successively removes the installation bolts on the plurality of flange plates 91 on the gas-liquid separator 4, so as to realize the effect of quickly releasing the clamping of the position between the flange plate 91 and the corresponding butt joint pipe by the plurality of resisting insertion rods 921, and the staff makes the flange plate 91 separate from the butt joint pipe by screw rotation, and installs the same specification of flange plate 91 adapted on the tail end of the butt joint pipe by screw rotation. When the vacuum coating production line is expanded and the PVD chamber is added, the problem that the conventional welding or customized flange connection cannot meet the demand of quickly parallel refrigeration unit due to rigid connection and large adaptation difficulty can be avoided. Different flange plates 91 can be quickly connected and have the anti-loosening function, which effectively improves the applicability of the gas-liquid separator 4.

[0065] The third advantage is that the refrigerant used in the evaporator 5 will be converted into a high-speed gas flow in a gas-liquid state, and will be input into the gas-liquid separator 4 from the butt joint pipe on the upper side of the outer wall of the gas-liquid separator 4. After being filtered by the plurality of coarse filter holes on the liquid separation plate 84, it will continue to be transported to the lower side of the gas-liquid separator 4, so as to realize the effect of preliminarily intercepting the mixed large droplets and the entrained solid particles in the high-speed gas flow, reducing the load of the main separation area on the lower side of the gas-liquid separator 4, and avoiding the problem that the subsequent separation components are easily blocked.

[0066] The fourth advantage is that when the slowed gas flow separated by the gas-liquid separator is transported above the telescopic separation plate 872, the gas phase in the slowed gas flow will move upward after contacting the upper end faces of the plurality of telescopic separation plates 872, and the liquid phase in the slowed gas flow will be filtered and separated through the fine filter holes on the plurality of telescopic separation plates 872, and will condense into water droplets and fall downward in the liquid accumulation area at the bottom of the gas-liquid separator 4, so as to realize the effect of twice filtering the mixed small droplets in the slowed gas flow through the inclined telescopic separation plate 872, further improve the droplet capture effect, avoid the problem that the separated gas still has oil mist and steam carrying due to unstable separation effect, and the telescopic separation plate 872 can buffer the impact of the high-speed gas flow on the liquid accumulation at the bottom of the gas-liquid separator 4, and prevent the liquid accumulation from being mixed into the high-speed gas flow again.

[0067] Advantage five, when the low flow rate of the slow speed airflow, through the servo motor control rotating shaft 83 by the threaded sleeve 86 driven multiple telescopic separation plate 872 synchronous downward movement, reduce the flow angle / resistance, shorten the flow path to avoid excessive retention, maintain a reasonable pressure drop, when the high flow rate of the slow speed airflow, through the servo motor control rotating shaft 83 by the threaded sleeve 86 driven multiple telescopic separation plate 872 synchronous upward movement, increase the flow angle / resistance, prolong the flow path to reduce the flow rate, increase the residence time, to ensure that the small droplets are fully settled, so as to realize the effect of adjusting the flow angle of the multiple telescopic separation plate 872, avoid the problem of excessive residence time when the low flow rate of the slow speed airflow, resulting in the problem of surplus efficiency, and the problem of insufficient residence time when the high flow rate of the slow speed airflow, leading to the problem of incomplete gas-liquid separation.

[0068] Advantage six, when the need to clean the separation plate 84, by the servo motor control rotating shaft 83 rotation, multiple brush plate 854 synchronous rotation on the upper end surface of the separation plate 84 cleaning, prevent the filtered large droplets and entrained solid particles block the multiple coarse filter holes on the separation plate 84, at the same time the upper end surface of the magnetic plug plate 855 closely adhere to the lower end surface of the separation plate 84, so as to realize the effect of sealing the separation plate 84, at this time, the multiple electromagnet 856 can be controlled to start working, then by the vacuum pump connected with the collection cover 858, the solid particles on the upper end of the separation plate 84 are sucked out by the multiple stepped holes for processing, so as to realize the effect of cleaning the separation plate 84, after cleaning, the multiple electromagnet 856 can be controlled to stop working, the multiple plugs 857 will restore the original position and be inserted into the inner wall of the smaller side of the stepped hole again to block, avoiding the problem of high speed airflow leakage when the gas-liquid separator 4 works.

[0069] Advantage seven, with the gradual increase of the liquid level of the liquid refrigerant stored in the bottom liquid accumulation area of the gas-liquid separator 4, under the action of the buoyancy of the buoyancy plate 881, the buoyancy plate 881 will drive the sleeve 88 and the liquid blocking plate 882 to move upward along the rotating shaft 83, and the liquid refrigerant will flow into the liquid accumulation seat 81 through the butt joint pipe and be pumped into the evaporator 5. With the gradual decrease of the liquid level of the liquid refrigerant stored in the bottom liquid accumulation area of the gas-liquid separator 4, the buoyancy plate 881 will drive the sleeve 88 and the liquid blocking plate 882 to move downward along the rotating shaft 83, so as to realize the effect of automatic quantitative discharge by the cooperation of the buoyancy plate 881 and the liquid blocking plate 882 with the liquid level of the liquid refrigerant, without external driving to reduce the equipment cost.

[0070] The above examples are only used to illustrate the technical solutions of the present application, and are not intended to limit the present application; although the present application has been described in detail with reference to the foregoing examples, those skilled in the art should understand that the technical solutions recorded in the foregoing examples can be modified, or some technical features can be replaced by equivalent features; and these modifications or replacements will not cause the essence of the corresponding technical solutions to deviate from the protection scope of the technical solutions of the embodiments of the present application.

Claims

1. A vacuum coating water-cooled machine using a gas-liquid separation type cooling module, characterized in that, Include: The cabinet (1) with upper and lower two partitions, the upper partition is respectively installed with water tank (2) and water-cooled plate heat exchanger (3) on the left and right sides, the lower partition is installed with gas-liquid separator (4) on the left side, the lower partition is installed with evaporator (5) on the right side, the compressor (6) is installed on the left rear side of the bottom end inner wall of the cabinet (1), the condenser (7) is installed on the bottom end front side of the cabinet (1), the gas-liquid separator (4) is respectively provided with load reduction adjusting part (8) and quick release part (9); Wherein, the load reduction adjusting part (8) includes the liquid accumulation seat (81) installed on the bottom end inner wall of the cabinet (1), the lower end of the gas-liquid separator (4) is communicated with the liquid accumulation seat (81), the gas phase discharge pipe (82) is installed on the upper end of the gas-liquid separator (4) through the round hole, the rotating shaft (83) is arranged in the middle of the gas phase discharge pipe (82), the liquid distribution plate (84) is fixedly sleeved on the outer wall of the gas phase discharge pipe (82), the rotating shaft (83) is provided with load reduction group (85); Wherein, the load reduction adjusting part (8) further includes the threaded sleeve (86) which is located on the middle and lower side of the outer wall of the rotating shaft (83) and is connected through threads, the rotating shaft (83) is provided with flow adjusting group (87), the rotating shaft (83) is slidably sleeved with the sleeve pipe (88) on the lower side of the outer wall; Wherein, the quick release part (9) includes the butt joint pipe which is communicated on the upper end and the outer wall of the gas-liquid separator (4), the evaporator (5) and the compressor (6) are communicated with a plurality of butt joint pipes, the flange plate (91) is threadedly connected on the opposite end of the adjacent two butt joint pipes, the flange plate (91) is provided with quick release group (92); Wherein, the load reduction group (85) includes the strong magnetic ring (851) which is symmetrically arranged on the inner wall of the gas phase discharge pipe (82), the strong magnetic ring (851) is symmetrically provided with the air hole, the upper strong magnetic ring (851) is fixedly sleeved on the rotating shaft (83) and is rotationally attached to the inner wall of the gas phase discharge pipe (82), the lower strong magnetic ring (851) is threadedly connected to the rotating shaft (83), and the outer wall of the lower strong magnetic ring (851) is symmetrically provided with a matching sliding groove, the corresponding threaded segment of the rotating shaft (83) is symmetrically installed on the inner wall of the gas phase discharge pipe (82), and the two matching sliding blocks are respectively slidably connected to the inner wall of the corresponding matching sliding groove, the lower end of the rotating shaft (83) is rotationally connected to the inner wall of the liquid accumulation seat (81), and the upper end is rotationally penetrated into the corresponding butt joint pipe; Wherein, the middle part of the threaded segment of the flange plate (91) and the threaded segment of the butt joint pipe are provided with a light shaft segment, the quick release group (92) includes a plurality of accommodating holes which are provided on the inner wall of the flange plate (91) corresponding to the light shaft segment, the plurality of accommodating holes are respectively communicated with the corresponding bolt holes, and the resisting plug rod (921) is slidably installed in the accommodating hole through the compression spring, and the light shaft segment of the threaded segment of the butt joint pipe is provided with a clamping groove corresponding to the plurality of accommodating holes.

2. The vacuum coating water-cooled machine with gas-liquid separation type cooling module according to claim 1, characterized in that: The load reduction group (85) further comprises a positioning ring one (852) fixedly sleeved on both ends of the upper threaded section of the rotating shaft (83), a magnetic sleeve (853) is rotatably sleeved on the outer wall of the gas phase discharge pipe (82) corresponding to the upper strong magnetic ring (851), and a plurality of brush plates (854) are uniformly distributed in a circle and mounted on the outer wall of the magnetic sleeve (853), and the gas phase discharge pipe (82) is slidably sleeved with a magnetic blocking plate (855) corresponding to the lower strong magnetic ring (851) on the outer wall.

3. The vacuum coating water-cooled machine with gas-liquid separation type cooling module according to claim 2, characterized in that: The load reduction group (85) further comprises a plurality of stepped holes opened on the outer wall of the gas-liquid separator (4) corresponding to the distribution plate (84), the plurality of stepped holes are uniformly distributed in a circle, an electromagnet (856) is mounted on the inner wall of the side with a larger diameter of the stepped hole, one end of the electromagnet (856) facing the rotating shaft (83) is connected with a plug (857) through a compression spring, the outer wall of the plug (857) is movably attached to the inner wall of the side with a smaller diameter of the stepped hole, and the outer wall of the gas-liquid separator (4) is fixedly sleeved with a collection cover (858) corresponding to the plurality of electromagnets (856).

4. The vacuum coating water-cooled machine with gas-liquid separation type cooling module according to claim 1, characterized in that: The flow regulating group (87) comprises a positioning ring two (871) fixedly sleeved on both ends of the lower threaded section of the rotating shaft (83), a plurality of stretchable separation plates (872) are hingedly connected to the outer wall of the threaded sleeve (86) and uniformly distributed in a circle, and one end of the stretchable separation plate (872) away from the threaded sleeve (86) is connected to the inner wall of the gas-liquid separator (4).

5. The vacuum coating water-cooled machine employing the gas-liquid separation type cooling module according to claim 1, characterized in that: The outer wall of the sleeve (88) is rotatably sleeved with a buoyancy plate (881), the outer wall of the sleeve (88) is rotatably sleeved with a liquid blocking plate (882) movably attached to the inner wall of the liquid accumulation seat (81), and the lower end of the liquid blocking plate (882) is connected to the bottom inner wall of the liquid accumulation seat (81) through a tensile spring.

6. The vacuum coating water-cooled machine with gas-liquid separation type cooling module according to claim 2, characterized in that: The outer wall of the gas phase discharge pipe (82) is fixedly sleeved with a spiral blade (821) in the middle, and a plurality of upwardly distributed defoaming nets (822) are mounted on the inner wall of the gas phase discharge pipe (82).

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