Built-in cooling circulation driving structure of vacuum pump

Abstract

The invention relates to the technical field of vacuum pumps, in particular to a vacuum pump built-in cooling circulation driving structure which is arranged in a vacuum pump, and the vacuum pump comprises a driving motor, a gear transmission set, a pump shell and a rotor arranged in the pump shell. The circulating driving structure comprises a front connecting shell arranged between the driving motor and the pump shell, a first pump set is arranged in the front connecting shell, the first pump set is driven by a gear transmission set to move, and the first pump set circularly pumps a first cooling medium in the front connecting shell into the rotor. Automatic circulation of the cooling medium is achieved, an independent external motor is not needed for driving, and an external power source is saved.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum pumps, in particular to a vacuum pump with a built-in cooling circulation drive structure. Background Art

[0002] A vacuum pump refers to a device or equipment that uses mechanical, physical, chemical or physicochemical methods to evacuate the container to obtain a vacuum. It is used in semiconductors, lithium batteries, photovoltaics, steel, chemicals, petroleum, light industry, medicine and food. During the operation of the screw vacuum pump, multiple parts will generate heat due to energy conversion and mechanical action. In order to ensure normal operation, it needs to be cooled. For example, the vacuum pump screw rotor cooling system disclosed in announcement number CN204082557U realizes direct contact and effective cooling of the cooling water and the rotor surface by arranging cooling water flow channels and spiral flow channel walls inside the vacuum pump screw rotor. However, this type of cooling structure requires continuous replenishment of cooling water, and the cooling water cannot be recycled. Summary of the Invention

[0003] The object of the present invention is to provide a vacuum pump with a built-in cooling circulation drive structure to solve the problems raised in the above background technology.

[0004] To solve the above technical problems, the present invention is achieved through the following technical solutions: A vacuum pump with a built-in cooling circulation drive structure is arranged in the vacuum pump. The vacuum pump includes a driving motor, a gear transmission group, a pump housing and a rotor arranged in the pump housing. It is characterized in that the circulation drive structure includes a front connecting housing arranged between the driving motor and the pump housing, and a first pump group is arranged in the front connecting housing. The first pump group is driven to move by the gear transmission group, and the first pump group circulates the first cooling medium in the front connecting housing to the inside of the rotor.

[0005] Furthermore, the front connecting shell has a space for accommodating the first cooling medium, the front connecting shell is provided with a convex plate, the convex plate is provided with a medium channel, and a first liquid inlet hole and a first liquid outlet hole are formed on the front connecting shell and the convex plate, the first liquid outlet hole is connected to the conveying pipe body, and the conveying pipe body is connected to the inside of the rotor.

[0006] Furthermore, a first transmission gear is provided on the convex plate, the first transmission gear is driven to rotate by the gear transmission group, the first pump group is driven to move by the first transmission gear, and the first pump group is provided in the convex plate.

[0007] Furthermore, a first reflux hole is provided on the convex plate, and an inlet channel and a discharge channel are provided in the convex plate, and the inlet channel and the discharge channel are provided on both sides of the first pump group, the inlet channel is connected to the first reflux hole, and the discharge channel is connected to the filter, and a first main hole body is provided on the outside of the front connecting shell, the first main hole body is connected to the filter and connected to the heat exchange box, and the first liquid inlet hole is connected to the heat exchange box through a pipeline.

[0008] Furthermore, the first cooling medium inside the rotor flows back to the front connecting shell, the first cooling medium in the front connecting shell is guided to the filter through the first pump body, the first cooling medium in the filter is discharged to the heat exchange box through the first main hole body, and the first cooling medium after heat exchange is extracted to the medium channel and sent into the rotor.

[0009] Furthermore, the filter includes a main box body, a filter cartridge is provided in the main box body, a filter hole is provided on the filter cartridge, a cover plate is provided on the filter cartridge, the cover plate is used to close the main box body, a hole body connected to the interior of the main box body is provided on the cover plate, the hole body is located on the outside of the filter cartridge, and a first joint is provided on the cover plate, the first joint is connected to the interior of the filter cartridge and connected to the first main hole body.

[0010] The present invention has the following beneficial effects: The present invention realizes automatic circulation of the cooling medium and provides a stable and effective rotor heat dissipation effect.

[0011] The present invention realizes heat exchange of the cooling medium introduced into the rotor by arranging a heat exchange box.

[0012] The present invention drives the movement of the inner circulation drive structure and the outer circulation drive structure by a driving motor, and does not require a separate external motor for driving, thus saving an external power source. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0014] Figure 1 Schematic diagram of the vacuum pump with built-in cooling cycle drive structure combined with the vacuum pump of Example 1; Figure 2 for Figure 1 An enlarged schematic diagram of the location of the mid-circulation drive structure; Figure 3 for Figure 2 Partial schematic diagram of Figure 4 for Figure 3 Schematic diagram from another perspective; Figure 5 for Figure 3 A cross-sectional schematic diagram of a first position; Figure 6 for Figure 3 a cross-sectional schematic diagram of a second position of Figure 7 for Figure 4 Exploded diagram of the filter. DETAILED DESCRIPTION

[0015] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0016] Example 1 like Figure 1-Figure 7 As shown, the vacuum pump in this embodiment has a built-in cooling circulation drive structure, which is arranged in the vacuum pump. The vacuum pump conventionally includes a drive motor 1, a gear transmission group 2, a pump housing 3 and a rotor arranged in the pump housing 3. The rotor is a twin-screw rotor structure, and the shafts at both ends penetrate into the gear transmission group 2. The drive motor 1 drives the gear transmission group 2 to move, and the gear transmission group 2 drives the two screw rotors to move synchronously.

[0017] Here, the circulation drive structure includes a front connecting shell 10 arranged between the drive motor 1 and the pump shell 3, and a first pump group 20 is arranged in the front connecting shell 10. The first pump group 20 is driven to move by the gear transmission group 2. The first pump group 20 circulates the first cooling medium in the front connecting shell 10 to the inside of the rotor. The first pump group 20 adopts a conventional cycloid rotor pump in the field, but does not need an external motor to drive it.

[0018] In addition, there is a space for accommodating the first cooling medium in the front connecting shell 10, forming a lidless box-like structure. The first cooling medium is cooling oil. A convex plate 11 is raised on the inner wall of the front connecting shell 10. The convex plate 11 is roughly distributed in a cross shape. Two medium channels 12 arranged in a roughly horizontal direction are provided in the convex plate 11, and two first liquid inlet holes 13 and two first liquid outlet holes 14 are respectively formed on the front connecting shell 10 and the convex plate 11. The first liquid outlet hole 14 is connected to the conveying pipe body 15, and the conveying pipe body 15 is connected to the interior of the rotor. There is a reflux channel inside the rotor for the cooling oil to flow back to the internal space of the front connecting shell 10.

[0019] A first transmission gear 101 is provided on the convex plate 11, and the first transmission gear 101 is driven to rotate by the gear transmission group 2. The first pump group 20 is driven to move by the first transmission gear 101. The first pump group 20 is provided in the convex plate 11, and thus the first pump group 20 is driven to move by the drive motor 1 of the vacuum pump.

[0020] In addition, a first reflux hole 16 is provided on the convex plate 11, and an inlet channel 17 and a discharge channel 18 are provided in the convex plate 11. The inlet channel 17 and the discharge channel 18 are vertically arranged on both sides of the first pump group 20. The inlet channel 17 is connected to the first reflux hole 16, and the discharge channel 18 is connected to the filter 30. A first main hole body 19 is provided on the outside of the front connecting shell 10. The first main hole body 19 is connected to the filter 30 and is connected to the heat exchange box 40. The first liquid inlet hole 13 is connected to the heat exchange box 40 through a pipeline.

[0021] The heat exchange box 40 conventionally has a double-layer space, which can be separated by a heat conduction plate. One layer of space contains cooling oil, and the other layer of space contains hot water. The hot water can be connected to an external water source for supply, thereby realizing heat exchange, cooling the cooling oil and re-inputting it into the rotor.

[0022] In addition, the filter 30 includes a main box body 31, in which a filter cartridge 32 is provided, and a filter hole 321 is provided on the filter cartridge 32. A cover plate 33 is provided on the filter cartridge 32, and the cover plate 33 is used to close the main box body 31. The cover plate 33 is provided with a hole body that communicates with the interior of the main box body 31, and the hole body is located on the outside of the filter cartridge 32. A first joint 34 is provided on the cover plate 33, and the first joint 34 is communicated with the interior of the filter cartridge 32 and connected to the first main hole body 19. As a result, the cooling oil enters the main box body 31 through the hole body on the cover plate 33, enters the interior of the filter cartridge 32 after passing through the filter hole 321, and is discharged from the first joint 34 to the first main hole body 19.

[0023] The flow path of the cooling oil, that is, the first cooling medium, is generally as follows: first, the first cooling medium inside the rotor flows back to the front connecting shell 10, the first cooling medium in the front connecting shell 10 is guided to the filter 30 through the first pump body, and the first cooling medium in the filter 30 is discharged to the heat exchange box 40 through the first main hole 19. The first cooling medium after heat exchange is extracted to the medium channel 12 and re-sent into the rotor.

[0024] The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the present invention to the specific embodiments described. Obviously, many modifications and variations are possible based on the content of this specification. These embodiments are selected and described in detail in this specification to better explain the principles and practical applications of the present invention, thereby enabling those skilled in the art to better understand and utilize the present invention. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A vacuum pump with a built-in cooling cycle drive structure, arranged in a vacuum pump, the vacuum pump comprising a drive motor, a gear transmission group, a pump housing and a rotor arranged in the pump housing, characterized in that: The circulation drive structure includes a front connecting shell arranged between the drive motor and the pump shell, and a first pump group is arranged in the front connecting shell. The first pump group is driven to move by a gear transmission group, and the first pump group circulates the first cooling medium in the front connecting shell to the inside of the rotor.

2. A vacuum pump with a built-in cooling cycle drive structure according to claim 1, characterized in that: The front connecting shell has a space for accommodating the first cooling medium, and a convex plate is provided in the front connecting shell. A medium channel is provided in the convex plate, and a first liquid inlet hole and a first liquid outlet hole are formed on the front connecting shell and the convex plate. The first liquid outlet hole is connected to the conveying pipe body, and the conveying pipe body is connected to the inside of the rotor.

3. The vacuum pump with built-in cooling circulation drive structure according to claim 2, characterized in that: The convex plate is provided with a first transmission gear, which is driven to rotate by the gear transmission group. The first pump group is driven to move by the first transmission gear, and the first pump group is provided in the convex plate.

4. The vacuum pump with built-in cooling circulation drive structure according to claim 3, characterized in that: A first reflux hole is provided on the convex plate, and an inlet channel and a discharge channel are provided in the convex plate. The inlet channel and the discharge channel are provided on both sides of the first pump group. The inlet channel is connected to the first reflux hole, and the discharge channel is connected to the filter. A first main hole body is provided on the outside of the front connecting shell, and the first main hole body is connected to the filter and connected to the heat exchange box. The first liquid inlet hole is connected to the heat exchange box through a pipeline.

5. The vacuum pump with built-in cooling circulation drive structure according to claim 3, characterized in that: The first cooling medium inside the rotor flows back to the front connecting shell, and the first cooling medium in the front connecting shell is guided to the filter through the first pump body. The first cooling medium in the filter is discharged to the heat exchange box through the first main hole body. The first cooling medium after heat exchange is extracted to the medium channel and sent into the rotor.

6. The vacuum pump with built-in cooling circulation drive structure according to claim 4, characterized in that: The filter includes a main box body, a filter cartridge is provided in the main box body, a filter hole is provided on the filter cartridge, a cover plate is provided on the filter cartridge, the cover plate is used to close the main box body, a hole body connected to the interior of the main box body is provided on the cover plate, the hole body is located on the outside of the filter cartridge, and a first joint is provided on the cover plate, the first joint is connected to the interior of the filter cartridge and connected to the first main hole body.

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