Probe card bearing device and test equipment with same

Abstract

The invention relates to a probe card bearing device and test equipment with the same. The probe card bearing device comprises a fixing mechanism used for fixing the probe card, a connecting mechanism arranged on one side of the fixing mechanism, and a linkage mechanism arranged between the fixing mechanism and the connecting ring. The connecting mechanism comprises a connecting ring used for being connected with the fixing mechanism and a clamping structure arranged on the connecting ring. The linkage mechanism is used for driving the connecting ring to be switched between a butt joint state and a test state; in the butt joint state, the connecting ring is far away from the fixing mechanism, and the clamping structure can be connected with a test head of the test equipment; in the test state, the connecting ring is close to the fixing mechanism so that the probe on the test head can make contact with the probe card. According to the invention, the difficulty of effective contact between the test head and the probe card can be reduced; the effective contact between the probe and the probe card can be ensured, so that a test signal can be stably transmitted; and the butt joint accuracy of the probe of the test head and the probe card can be greatly improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor component testing, and in particular to a probe card carrying device and testing equipment having the same. Background Art

[0002] The Probe Card Assembly (PCA) is a critical component in semiconductor testing, connecting the test equipment to the chips on the wafer to ensure accurate electrical signal transmission. During chip testing, connection errors and signal distortion between the probe card and the test equipment can directly impact test accuracy and reliability.

[0003] The most common issues during testing are effective contact and mechanical misalignment between the probe card and the test equipment. These issues are key contributors to test failures, data errors, and even hardware damage. Currently, there is no effective solution to this problem, so a technology to address this issue is urgently needed. Summary of the Invention

[0004] The purpose of the present invention is to provide a probe card carrying device and a test device to solve the deficiencies in the related art and to achieve precise connection and stable contact between the probe card and the test head.

[0005] In order to achieve one of the above purposes, the present invention adopts the following technical solution.

[0006] A probe card carrier device comprises: a fixing mechanism for fixing a probe card; a connecting mechanism arranged on one side of the fixing mechanism, the connecting mechanism comprising a connecting ring for connecting to the fixing mechanism and a clamping structure arranged on the connecting ring; a linkage mechanism arranged between the fixing mechanism and the connecting ring, the linkage mechanism being used to drive the connecting ring to switch between a docking state and a test state; in the docking state, the connecting ring is away from the fixing mechanism and the clamping structure can be connected to a test head of a test device; in the test state, the connecting ring is close to the fixing mechanism so that the probe on the test head contacts the probe card.

[0007] In some embodiments, the clamping structure includes a rotating clamping ring rotatably disposed on the connecting ring, and a limiting clamping block connected to the rotating clamping ring, wherein the limiting clamping block is used to clamp with the test head.

[0008] In some embodiments, a plurality of the limiting blocks are arranged at intervals along the circumference of the rotating clamping ring; and / or the limiting blocks are detachably connected to the rotating clamping ring.

[0009] In some embodiments, the connecting mechanism further includes a support ring fixed to the connecting ring and a plurality of limiting ears fixed on the support ring, wherein the plurality of limiting ears cooperate with the support ring to enclose a rotating track that limits the rotation of the rotating clamping ring.

[0010] In some embodiments, a ball is provided on the side of the limiting ear facing the rotating retaining ring; and / or a gasket is provided on the side of the limiting ear facing the rotating retaining ring; and / or the limiting ear includes a connecting portion connected to the outer peripheral side of the support ring, a first extension portion connected to an end of the connecting portion away from the support ring, and a second extension portion connected to an end of the first extension portion away from the connecting portion, the first extension portion extends along the axial direction of the support ring toward the side away from the connecting ring, the second extension portion extends along the radial direction of the support ring toward the side where the support ring is located, the first extension portion is provided with a ball toward the side of the rotating retaining ring, and the second extension portion is provided with a gasket toward the side of the rotating retaining ring.

[0011] In some embodiments, the rotating clamping ring is fixed with an operating rod; the connecting ring is fixed with a limiting clamping plate, and the limiting clamping plate is provided with a limiting groove, and at least part of the operating rod is located in the limiting groove.

[0012] In some embodiments, the linkage mechanism includes several linearly movable driving parts, each of which includes a fixed part and a movable part that moves linearly relative to the fixed part. One of the fixed part and the movable part is fixed to the connecting ring, and the other is fixed to the fixing mechanism.

[0013] In some embodiments, the linkage mechanism also includes a guide structure arranged between the connecting ring and the fixing mechanism, the guide structure includes a bracket fixed on the connecting ring, an abutment wheel rotatably arranged on the bracket, and a support plate fixed on the fixing mechanism, the abutment wheel is pressed against the support plate, and the support plate extends in a direction perpendicular to the probe card.

[0014] In some embodiments, the fixing mechanism is provided with a guide post, which is used to cooperate with the connecting mechanism or the test head to limit the movement of the test head in a direction perpendicular to the probe card; And / or, the fixing mechanism includes a first fixing ring and a second fixing ring, the first fixing ring is connected to the connecting ring, and the second fixing ring is movably connected to the side of the first fixing ring away from the connecting mechanism, the first fixing ring and the second fixing ring clamp the probe card when they are in contact, and the test area of ​​the probe card is exposed at the through hole in the middle of the first fixing ring and the second fixing ring.

[0015] A testing device includes a transmission device for transmitting components to be tested, a testing device connected to the transmission device, and a probe card carrying device. The testing device includes a test head. The probe card carrying device is located between the transmission device and the testing device, and the fixing mechanism is connected to the transmission device on a side away from the connecting mechanism.

[0016] Compared to related art, the probe card carrier of the present invention includes a fixing mechanism, a connecting mechanism, and a linkage mechanism. The fixing mechanism is used to secure the probe card. When attached to a transport device that transports the device to be tested, the fixing mechanism maintains the probe card in a testing position. The connecting mechanism includes a connecting ring and a clamping structure provided on the connecting ring. The connecting ring connects to the fixing mechanism, and the clamping structure connects to a test head of a test device, allowing probes on the test head to contact the probe card to enable testing. The linkage mechanism is provided between the fixing mechanism and the connecting ring and is used to drive the connecting ring between a docking state and a testing state. In the docking state, the connecting ring is away from the fixing mechanism, and the clamping structure can connect to the test head of the test device. In the testing state, the connecting ring is closer to the fixing mechanism, and the probes on the test head contact the probe card. When testing the device to be tested, the linkage mechanism drives the connecting ring to the docking state, where it is precisely aligned and connected to the test head through the clamping structure. The linkage mechanism then drives the connecting ring to the testing state, allowing the probes of the test head to press against the probe card. As the connecting ring moves from the docking state to the test state, it drives the test head closer to the probe card and defines the test head's final movement trajectory. This reduces the difficulty of the test head moving directly to the probe card in a single step, ensures effective contact between the probe and the probe card, and ensures stable transmission of test signals. It also greatly improves the docking accuracy of the test head's probe and the probe card. When the test is completed or the probe card needs to be replaced, the linkage mechanism drives the connecting ring from the test state to the docking state, allowing the test head and its probe to separate from the probe card. The test head can then be removed from the connecting ring or the probe card can be replaced, making operation easier and avoiding damage to the probe. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a first isometric view of a probe card carrying device provided by the present invention.

[0018] Figure 2 yes Figure 1 A second isometric view of the probe card carrier is shown.

[0019] Figure 3 yes Figure 2 A partial enlarged view of part A.

[0020] Figure 4 yes Figure 1 The probe card carrier is shown in another perspective view.

[0021] Figure 5 yes Figure 1 A schematic diagram of the connection structure in the probe card carrier device is shown.

[0022] Figure 6 yes Figure 5 A partial enlarged view of part B.

[0023] Figure 7 yes Figure 5 Schematic diagram of part of the connection structure.

[0024] Figure 8 yes Figure 7 A partial enlarged view of part C.

[0025] Figure 9 yes Figure 1 A first isometric view of the fixing mechanism in the probe card carrier is shown.

[0026] Figure 10 yes Figure 9 A partial enlarged view of part D.

[0027] Figure 11 yes Figure 9 A partial enlarged view of part D' in the middle.

[0028] Figure 12 yes Figure 9 A second axonometric view of the fixing mechanism is shown.

[0029] Figure 13 yes Figure 12 A partial enlarged view of part E in the middle.

[0030] Figure 14 yes Figure 1 FIG. 1 is a schematic diagram of a probe card carrying device in which the second fixing ring is in an open state.

[0031] Reference numerals: 10. Fixing mechanism; 11. First fixing ring; 111. Guide post; 12. Second fixing ring; 121. First limiting group; 1211. First limiting hole; 1212. First limiting post; 122. Second limiting group; 1221. Second limiting hole; 13. Accommodating groove; 14. Locking structure; 141. Lock body; 1411. Locking groove; 14111. Opening; 14112. Engaging portion; 142. Locking rod; 143. Rotating rod; 15. Anti-rotation structure; 151. Anti-rotation rod; 1511. Hinge portion; 1512. Fitting portion; 1513. Stopping portion; 152. Anti-rotation member; 1521. Connecting block; 1522. Anti-rotation post; 1523. Through groove; 20. Connecting mechanism; 21. Connecting ring; 22. Clamping structure; 221. Rotating clamping ring; 222. Limiting block; 223. Operating lever; 224. First sensing piece; 23. Supporting ring; 24. Limiting ear; 241. Connecting part; 242. First extension part; 243. Second extension part; 244. Ball; 245. Gasket; 25. Limiting clamping plate; 251. Limiting groove; 26. First sensor; 27. Second sensing piece; 28. Second sensor; 30. Linkage mechanism; 31. Linear movable driving member; 311. Fixed part; 312. Moving part; 32. Guide structure; 321. Bracket; 322. Abutting wheel; 323. Back plate. DETAILED DESCRIPTION

[0032] The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and are not to be construed as limiting the present invention.

[0033] Terms indicating spatial relative positions, such as "upper," "above," "lower," and "below," are used in this embodiment for ease of explanation to describe the relationship of one element or feature relative to another element or feature as shown in the accompanying drawings. Spatially relative terms may be intended to encompass different orientations of the device during use or operation other than the orientation shown in the drawings.

[0034] The terms "first," "second," etc., in this disclosure are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Furthermore, it should be noted that, unless otherwise expressly specified or limited, the term "connected" should be understood in a broad sense. For example, a connection can be a direct connection or an indirect connection via an intermediate medium, and can be a fixed connection, a movable connection, a detachable connection, or an integral connection. Those skilled in the art will understand the specific meanings of the above terms in this disclosure based on specific circumstances.

[0035] In order to make those skilled in the art better understand the technical solution of the present invention, the following will be combined with the attached embodiment of the present invention. Figure 1-14, clearly and completely describe the technical solutions in the implementation methods of the present invention.

[0036] The present invention provides a probe card carrier device for assembling in a test device for testing semiconductor devices. The test device may be, but is not limited to, a test device for testing chips or wafers waiting for testing.

[0037] The probe card carrier is used to fix the probe card and fix the probe card in the test position. The PCB end of the probe card is docked with the test head of the test equipment, and the other end is docked with the component to be tested (chip or wafer). The test signal is transmitted to the I / O port of the component to be tested through the probe and the probe card to test the yield of the component to be tested. Usually, the PCB end of the probe card has thousands of test points (or PAD points), and the diameter of each test point is only about 1mm. The test points are docked with the probes on the test head of the test equipment (such as the Pogo Pin array) to realize signal transmission. The accuracy of the docking between the probe card and the test head directly affects the normal test and also brings certain difficulties to technological innovation.

[0038] Please refer to Figures 1 to 14 As shown, a probe card carrier device of a preferred embodiment of the present invention includes a fixing mechanism 10, a connecting mechanism 20, and a linkage mechanism 30 arranged between the fixing mechanism 10 and the connecting mechanism 20. The fixing mechanism 10 is used to fix the probe card. The connecting mechanism 20 is arranged on one side of the fixing mechanism 10, and the connecting mechanism 20 includes a connecting ring 21 for connecting to the fixing mechanism 10 and a clamping structure 22 arranged on the connecting ring 21. The linkage mechanism 30 is arranged between the fixing mechanism 10 and the connecting ring 21, and the linkage mechanism 30 is used to drive the connecting ring 21 to switch between a docking state and a test state. In the docking state, the connecting ring 21 is away from the fixing mechanism 10 and the clamping structure 22 can be connected to the test head of the test equipment. In the test state, the connecting ring 21 is close to the fixing mechanism 10 and the probe on the test head contacts the probe card.

[0039] The probe card carrying device of the present invention fixes the probe card through a fixing mechanism 10, is fixed to the test head in the test equipment through a connecting mechanism 20, and drives the connecting ring 21 of the connecting mechanism 20 to move through a linkage mechanism 30, so that the connecting ring 21 drives the test head to approach or move away from the fixing mechanism 10, and then the connecting mechanism 20 drives the test head and the probe card to achieve precise and effective contact or separation.

[0040] Specifically, the fixing mechanism 10 is used to fix the probe card. When the fixing mechanism 10 is fixed to the transmission device that transmits the component to be tested, the probe card is maintained in the test position. The connecting mechanism 20 includes a connecting ring 21 and a clamping structure 22 provided on the connecting ring 21. The connecting ring 2 is connected to the fixing mechanism 10, and the clamping structure 22 is connected to the test head, so that the probes on the test head contact the probe card to enable testing. The linkage mechanism 30 is provided between the fixing mechanism 10 and the connecting ring 21 to drive the connecting ring 21 to switch between the docking state and the test state.

[0041] When testing the component to be tested, the linkage mechanism 30 drives the connecting ring 21 to the docking state, precisely aligns and connects it with the test head through the clamping structure 22, and connects the probe head at a distance from the probe card. This can prevent damage caused by friction between the probe and the probe card during the connection process. The linkage mechanism 30 then drives the connecting ring 21 to move to the testing state, so that the probe of the test head is pressed against the probe card. In the process of moving the connecting ring 21 from the docking state to the testing state, it drives the test head closer to the probe card and defines the final movement trajectory of the test head. The precise adjustment of the relative position of the test head and the probe card can reduce the difficulty of the test head moving directly to achieve effective contact with the probe card in one step. It can ensure effective contact between the probe and the probe card to stably transmit the test signal. It can also greatly improve the accuracy of the docking between the probe of the test head and the probe card.

[0042] When the test is completed or the probe card needs to be replaced, the linkage mechanism 30 drives the connecting ring 21 to switch from the test state to the docking state, and the test head and its probe leave the probe card, making it convenient to remove the test head from the connecting ring 21 or replace the probe card, and avoiding damage to the probe or probe card caused by the disassembly operation.

[0043] In some embodiments, the connecting ring 21 moves along the arrangement direction of the connecting mechanism 20 and the fixing mechanism 10, that is, the connecting ring 21 moves along a direction perpendicular to the probe card mounted on the fixing mechanism 10. For ease of description, the direction perpendicular to the probe card is defined as the first direction.

[0044] Please refer to Figures 1 to 4 、 Figures 9 to 14 As shown, the fixing mechanism 10 includes a first fixing ring 11 and a second fixing ring 12 .

[0045] One side of the first retaining ring 11 is connected to the connecting ring 21 of the connecting mechanism 20, and the other side is connected to the transport device used to transport the device under test. Specifically, the first retaining ring 11 is connected to a vertical sidewall of the transport device, allowing the probe card to be perpendicular to the horizontal plane. The vertical sidewall can be extended outward a predetermined distance to provide operating space for removing and placing the probe card.

[0046] The second fixing ring 12 is movably connected to the side of the first fixing ring 11 away from the connection mechanism 20. When the vertical sidewalls are pulled outward a predetermined distance, the second fixing ring 12 is opened relative to the first fixing ring 11, and the probe card is placed on the first fixing ring 11 and / or the second fixing ring 12; then the first fixing ring 11 and the second fixing ring 12 are brought into contact with each other to clamp the probe card. The test area of ​​the probe card (the area that contacts the test head and the component to be tested) is exposed at the through-holes in the middle of the first fixing ring 11 and the second fixing ring 12. The vertical sidewalls are pushed inward to their original position, and the probe card remains in the test position, so that both sides of the probe card are in contact with the test head and the component to be tested, respectively, to complete the test.

[0047] In some embodiments, the second fixing ring 12 is pivotally connected to the first fixing ring 11, for example, the second fixing ring 12 is rotatably connected to the first fixing ring 11 via a hinge. The second fixing ring 12 is flipped open to pre-install the probe card on the first fixing ring 11 and / or the second fixing ring 12. The second fixing ring 12 is then flipped closed to allow the first fixing ring 11 and the second fixing ring 12 to position the probe card.

[0048] In some embodiments, the second fixing ring 12 is detachably connected to the first fixing ring 11. For example, the second fixing ring 12 is fixedly connected to the first fixing ring 11 via fasteners. The fasteners include but are not limited to screws and clamping structures.

[0049] When the probe card needs to be assembled or replaced, the second fixing ring 12 is disassembled to separate the second fixing ring 12 from the first fixing ring 11. After the probe card is pre-installed on the first fixing ring 11 and / or the second fixing ring 12, the second fixing ring 12 is connected to the first fixing ring 11 through fasteners, so that the first fixing ring 11 and the second fixing ring 12 limit the probe card.

[0050] In some embodiments, at least one of the first fixing ring 11 and the second fixing ring 12 is provided with a receiving groove 13 for accommodating a probe card. The receiving groove 13 can limit the position of the probe card, so that the probe card is fixed between the first fixing ring 11 and the second fixing ring 12 when the first fixing ring 11 and the second fixing ring 12 are attached.

[0051] In one embodiment, both the first and second retaining rings 11, 12 have an annular body and a through-hole extending through the center of the annular body. When a probe card is secured between the first and second retaining rings 11, 12, the through-hole is covered by the probe card. This exposes the test area of ​​the probe card at the through-hole, facilitating connection between the test head and the device under test on either side of the probe card.

[0052] In some embodiments, the receiving groove 13 is disposed on the second fixing ring 12, specifically on the side of the second fixing ring 12 facing the first fixing ring 11. Fastening the probe card to the movable second fixing ring 12 is easier to operate than directly fastening the probe card to the first fixing ring 11 in a vertical or horizontal position.

[0053] The shape and size of the receiving groove 13 are adapted to those of the probe card, and the probe card can be engaged with the receiving groove 13. The side of the first fixing ring 11 facing the second fixing ring 12 is set as a flat surface, and when the first fixing ring 11 and the second fixing ring 12 are attached, the probe card is fixed.

[0054] In order to more stably fix the probe card between the first fixing ring 11 and the second fixing ring 12 , the fixing mechanism 10 further includes a limiting structure located between the first fixing ring 11 and the second fixing ring 12 .

[0055] In some embodiments, the receiving groove 13 and the limiting structure are provided on the same fixing ring. When the probe card is fixed in the receiving groove 13 and the first fixing ring 11 and the second fixing ring 12 are not attached, the limiting structure limits the probe card.

[0056] In a specific embodiment, the accommodating groove 13 is provided on the second fixing ring 12 , and the limiting structure is also provided on the second fixing ring 12 .

[0057] The limiting structure includes a first limiting group 121 and a second limiting group 122 provided on the side of the second fixing ring 12 facing the first fixing ring 11. By providing the first limiting group 121 and the second limiting group 122, a foolproof effect can be achieved.

[0058] The first limiting group 121 includes a plurality of first limiting holes 1211 and limiting posts 1212. The limiting posts 1212 are located within one or more of the first limiting holes 1211. The limiting posts 1212 can be extended or retracted within the first limiting holes 1211, or can be fixed within the first limiting holes 1211. The first limiting holes 1211 and limiting posts 1212 cooperate with corresponding structures on the probe card to accurately position the probe card.

[0059] The first limiting holes 1211 of each first limiting group 121 are spaced apart along the radial direction of the second fixing ring 12. The plurality of first limiting holes 1211 can accommodate probe cards of different sizes and improve alignment accuracy. Preferably, at least two first limiting holes 1211 have different diameters to prevent errors.

[0060] The second stopper group 122 includes a plurality of second stopper holes 1221 arranged radially along the second fixing ring 12. The second stopper holes 1211 differ from the first stopper holes 1211 in at least one of number, diameter, and placement, providing a foolproofing mechanism. The first and second stopper groups 121, 122 enable more precise alignment with the probe card's structure, ensuring reliable connection between the probe card and the test head and the device under test.

[0061] At least one first limiting group 121 and at least one second limiting group 122 are arranged along the circumference of the second fixing ring 12 to limit the probe card from multiple positions and play a fool-proof role.

[0062] In addition, the probe card can be fixed to the second fixing ring 12 by fasteners to keep the probe card stable when the second fixing ring 12 is rotated. In one embodiment, the probe card can be fixed to the second fixing ring 12 by fasteners such as screws passing through the probe card and the at least one first limiting hole 1211, or by fasteners such as screws passing through the probe card and the at least one second limiting hole 1221.

[0063] Based on any of the above designs, the fixing mechanism 10 further includes a locking structure 14 , which is used to lock and fix the second fixing ring 12 on the first fixing ring 11 .

[0064] The locking structure 14 includes a lock body 141 and a locking rod 142. The lock body 141 is provided with a locking groove 1411 that mates with the locking rod 142. One of the lock body 141 and the locking rod 142 is provided on the first fixing ring 11, while the other is provided on the second fixing ring 12. The engagement of the locking rod 142 and the lock body 141 securely secures and connects the first fixing ring 11 and the second fixing ring 12.

[0065] In one embodiment, the lock body 141 is rotatably mounted on the first fixing ring 11, and the lock rod 142 is fixed to the second fixing ring 12. Specifically, the lock body 141 is disposed at the outer edge of the first fixing ring 11, and the lock rod 142 is disposed at the outer edge of the second fixing ring 12. The lock rod 142 and the lock body 141 cooperate to reliably secure and connect the first fixing ring 11 and the second fixing ring 12.

[0066] In one embodiment, the locking groove 1411 is disposed at an edge of the lock body 141 to facilitate locking with the locking rod 142 .

[0067] The locking groove 1411 includes an opening portion 14111 and a snap-fit ​​portion 14112 that are interconnected. The opening portion 14111 passes through the lock body 141 along the arrangement direction of the first fixing ring 11 and the second fixing ring 12, so that when the second fixing ring 12 moves to a state of being in contact with the first fixing ring 11, the locking rod 142 enters the locking groove 1411; the snap-fit ​​portion 14112 is used to snap-fit ​​with the locking rod 142.

[0068] It should be noted that “the arrangement direction of the first fixing ring 11 and the second fixing ring 12 ” refers to the arrangement direction of the first fixing ring 11 and the second fixing ring 12 when they are attached to each other, and this arrangement direction is consistent with the first direction.

[0069] In one embodiment, the lock body 141 is cylindrical, with its axial direction substantially aligned with the arrangement direction of the first fixing ring 11 and the second fixing ring 12. An opening 14111 extends axially through the lock body 141, and a locking portion 14112 extends circumferentially along the lock body 141. The opening 14111 and the locking portion 14112 are generally L-shaped.

[0070] In the embodiment where the second fixing ring 12 is pivotally connected to the first fixing ring 11, the second fixing ring 12 is flipped over and fitted onto the first fixing ring 11. The locking rod 142 enters the locking groove 1411 from the position of the opening 14111. The lock body 141 is rotated, and the engaging portion 14112 restrains the locking rod 142. This effectively restrains and secures the second fixing ring 12, providing convenient operation and effective locking.

[0071] A rotating rod 143 is provided on the outer peripheral side of the lock body 141 . Operating the rotating rod 143 can drive the lock body 141 to rotate, making it convenient for the operator to fix and lock the second fixing ring 12 .

[0072] Several groups of locking structures 14 are arranged at intervals along the circumferential direction of the first fixing ring 11 . The several groups of locking structures 14 can reliably limit the second fixing ring 12 .

[0073] In the embodiment where the second fixing ring 12 is pivotally connected to the first fixing ring 11, the second fixing ring 12 can be flipped open relative to the first fixing ring 11. The fixing mechanism 10 further includes a rotation-stopping structure 15 that limits the rotation angle of the second fixing ring 12 relative to the first fixing ring 11.

[0074] In one embodiment, the anti-rotation structure 15 includes an anti-rotation rod 151 hinged to the first fixing ring 11 and an anti-rotation member 152 provided on the second fixing ring 12 .

[0075] The anti-rotation rod 151 includes a hinge portion 1511, a matching portion 1512, and a stop portion 1513 arranged in sequence along its axial direction. The hinge portion 1511 is rotatably connected to the first fixing ring 11, the matching portion 1512 is a round rod, and the stop portion 1513 has a larger diameter than the matching portion 1512.

[0076] The anti-rotation member 152 includes a connecting block 1521 fixed on the second fixing ring 12 and an anti-rotation column 1522 fixed on the connecting block 1521. The anti-rotation column 1522 is provided with a through groove 1523, and the matching part 1512 of the anti-rotation rod 151 slides through the through groove 1523 of the anti-rotation column 1522.

[0077] The mating portion 1512 between the hinge portion 1511 and the stop portion 1513 cooperates with the through-slot 1523. As the second fixing ring 12 flips open, the second fixing ring 12 drives the stop member 152 to move. The stop post 1522, while moving on the stop rod 151, simultaneously drives the stop rod 151 to rotate. When the stop post 1522 moves to the end where the stop rod 151 is located near the stop portion 1513, the stop portion 1513 acts as a limit stop, preventing the stop rod 151 from disengaging from the through-slot 1523. This effectively limits the rotation of the second fixing ring 12.

[0078] The length of the anti-rotation rod 151 can be configured according to the rotation angle of the second fixing ring 12. If the anti-rotation rod 151 is set to a shorter length, the opening and closing angle between the second fixing ring 12 and the first fixing ring 11 will be smaller. If the anti-rotation rod 151 is set to a longer length, the opening and closing angle between the second fixing ring 12 and the first fixing ring 11 will be larger. For example, the opening and closing angle between the second fixing ring 12 and the first fixing ring 11 is 60°, 90°, or 120°.

[0079] In this embodiment, the opening and closing angle between the second fixing ring 12 and the first fixing ring 11 is set to 90°, that is, when the second fixing ring 12 is fully opened, the second fixing ring 12 is perpendicular to the first fixing ring 11. In use, the axial direction of the first fixing ring 11 extends horizontally, and when the second fixing ring 12 is fully opened, the axial direction of the second fixing ring 12 extends vertically, and the second fixing ring 12 extends within a horizontal plane, making it easier for operators to install or replace probe cards.

[0080] Two symmetrical sets of anti-rotation structures 15 are provided, symmetrically arranged about the vertically extending diameter axis of the first fixing ring 11. These two sets of anti-rotation structures 15 ensure a smooth connection between the first fixing ring 11 and the second fixing ring 12, providing excellent connection and support during the opening and closing of the second fixing ring 12.

[0081] Furthermore, a plastic washer or a rubber washer can also be provided in the groove 1523 to fill the gap between the groove 1523 and the anti-rotation rod 151, and increase the friction between the groove 1523 and the anti-rotation rod 151. During the opening and closing process of the second fixing ring 12, the second fixing ring 12 can be prevented from falling directly under the action of gravity, and a certain protective effect is played on the connection structure between the second fixing ring 12 and the first fixing ring 11, thereby reducing the mechanical loss of the mechanism.

[0082] Please refer to Figures 1 to 8 、 Figure 14 As shown, the connecting mechanism 20 includes a connecting ring 21 and a snap-fit ​​structure 22. The connecting ring 21 is connected to the fixing mechanism 10, specifically, movably connected to the side of the first fixing ring 11 facing away from the second fixing ring 12. The connecting ring 21 moves toward or away from the first fixing ring 11 in the fixing mechanism 10 under the influence of the linkage mechanism 30.

[0083] The clamping structure 22 includes a rotating clamping ring 221 and a limiting clamping block 222. The rotating clamping ring 221 is rotatably arranged on the connecting ring 21, and the limiting clamping block 222 is connected to the rotating clamping ring 221, so that the position of the clamping structure 22 is adjustable and can be clamped and connected with the test head.

[0084] In some embodiments, the connection structure 20 includes a plurality of limit blocks 222 , which are arranged at intervals along the circumference of the rotating retaining ring 221 to form a plurality of connection points connected to the test head, and can also be connected to a variety of different test heads.

[0085] In some embodiments, the limit block 222 is detachably connected to the rotating clamping ring 221, and the number and setting position of the limit block 222 can be adjusted according to the number and position of the slots on the test head so that the clamping structure 22 can be accurately engaged with the test head.

[0086] When the connecting ring 21 is moved away from the first fixing ring 11 to the docking position, the stopper block 222 engages with the slot on the test head. The rotating ring 221 is then driven to rotate, which in turn causes the stopper block 222 to rotate, securing the stopper block 222 to the test head. The connecting ring 21 is then moved toward the first fixing ring 11 to the testing position. The connecting ring 21 drives the test head toward the probe card, which presses against the probe card, achieving stable contact and precise connection between the test head and the probe card.

[0087] The connecting mechanism 20 further includes a support ring 23 fixed to the connecting ring 21 and a plurality of limiting ears 24 fixed to the support ring 23. The limiting ears 24 cooperate with the support ring 23 to enclose a rotation track that limits the rotation of the rotating clamping ring 221.

[0088] Specifically, the support ring 23 is fixed to the side of the connecting ring 21 facing the first fixing ring 11 , and the shape and size of the support ring 23 are adapted to the shape and size of the rotating clamping ring 221 .

[0089] The plurality of limiting ears 24 are arranged at intervals, preferably evenly, along the circumference of the support ring 23. The rotating clamping ring 221 can maintain a stable state when it rotates to any angle in the rotating track.

[0090] The retaining ear 24 includes a connecting portion 241, a first extending portion 242, and a second extending portion 243. The connecting portion 241, the first extending portion 242, and the second extending portion 243 are integrally formed. The connecting portion 241 is fixedly connected to the outer periphery of the support ring 23. The first extending portion 242 extends from the end of the connecting portion 241 away from the support ring 23 in the axial direction of the support ring 23 toward the side away from the connecting ring 21. The second extending portion 243 extends from the end of the first extending portion 242 away from the connecting portion 241 in the radial direction of the support ring 23 toward the side of the support ring 23.

[0091] The connecting portion 241, the first extension portion 242, and the second extension portion 243 are generally C-shaped. The second extension portion 243 is parallel to the end surface of the support ring 23. Thus, the support ring 23, the first extension portion 242, and the second extension portion 243 form a track groove that cooperates with the clamping structure 22. A plurality of evenly spaced retaining ears 24 cooperate with each other, and the track grooves collectively define a rotation track, within which the rotating clamping ring 221 is constrained for rotation.

[0092] The rotating snap ring 221 is rotatably connected in the rotating track. In order to prevent the rotating snap ring 221 from getting stuck during rotation, a ball 244 is provided on the side of the limiting ear 24 facing the rotating snap ring 221.

[0093] In one embodiment, the ball 244 is arranged on the side of the first extension portion 242 facing the rotating retaining ring 221. The ball 244 abuts against the outer peripheral wall of the rotating retaining ring 221, which can reduce the friction between the rotating retaining ring 221 and the limiting ear 24 and ensure the smooth rotation of the rotating retaining ring 221.

[0094] In some embodiments, a gasket 245 is further provided on the side of the limiting ear 24 facing the rotating collar 221. The gasket 245 can fill the gap between the limiting ear 24 and the rotating collar 221 caused by assembly and production, so that the rotating collar 221 precisely matches the rotating track and prevents the rotating collar 221 from shaking in the rotating track.

[0095] In one embodiment, a washer 245 is disposed on a side of the second extension 243 facing the rotating collar 221. The washer 245 cooperates with the end surface of the rotating collar 221 to help retain the rotating collar 221 within the rotating track to prevent it from falling off the rotating track during rotation.

[0096] In one embodiment, the gasket 245 is a rubber gasket having a certain elasticity and can fill the gap without causing hard interference.

[0097] In one embodiment, the ball bearing 244 is positioned on the side of the first extension 242 facing the rotating collar 221, while the washer 245 is positioned on the side of the second extension 243 facing the rotating collar 221. These two components are positioned in separate locations so as not to interfere with each other. Furthermore, the ball bearing 244 is positioned where friction between the rotating collar 221 and the retaining ear 24 is greatest, maintaining stable and smooth rotation.

[0098] An operating lever 223 is fixed to the outer periphery of the rotating snap ring 221. An operator can use the operating lever 223 to rotate the rotating snap ring 221. A limit plate 25 is fixed to the connecting ring 21. The limit plate 25 extends toward one side of the support ring 23 and is provided with a limit slot 251. When the operating lever 223 is within the limit slot 251, the rotating snap ring 221 stops moving.

[0099] The limiting groove 251 limits the moving stroke of the operating rod 223. The operating rod 223 is limited to move within the length range of the limiting groove 251, preventing the operator from excessively rotating the rotating retaining ring 221 due to excessive force or misoperation, ensuring that the operation is carried out within a safe range. At the same time, it reduces the mechanical interference between the block 222 and the test head caused by excessive rotation angle, avoids damage to components in the test head, and improves the service life of the equipment.

[0100] To further improve the accuracy of the rotation angle of the rotating collar 221, a first sensing piece 224 is provided on the rotating collar 221, and a first sensor 26 is provided on the connecting ring 21. The sensing position of the first sensor 26 is located on the moving path of the first sensing piece 224. The first sensor 26 can be, for example, a laser sensor or an electromagnetic sensor.

[0101] During the rotation of the rotating retaining ring 221, the first sensing piece 224 is driven to rotate synchronously. When the first sensing piece 224 moves to the sensing position of the first sensor 26, the first sensor 26 can sense the first sensing piece 224 and thereby send a signal (for example, a signal that the clamping block 222 is engaged with the test head), which serves to remind the operator and ensure the accuracy when operating the rotating retaining ring 221.

[0102] Based on any of the above designs, in some embodiments, a guide post 111 is further provided on the fixing mechanism 10, and the guide post 111 can cooperate with the connecting mechanism 20 or the test head to limit the moving trajectory of the test head, so that the test head moves in a direction perpendicular to the probe card.

[0103] In one embodiment, a guide groove that cooperates with the guide post 111 is provided on the connecting ring 21 of the connecting mechanism 20. During the process of the connecting ring 21 moving toward the first fixed ring 11, the guide post 111 can cooperate with the guide groove on the connecting ring 21, so that the connecting ring 21 drives the test head to move only along the extension direction of the guide post 111, further ensuring the reliable movement of the test head and realizing the precise docking of the probe of the test head and the probe card.

[0104] In one embodiment, a guide groove that cooperates with the guide post 111 is provided on the test head. During the movement of the connecting ring 21 toward the first fixing ring 11, the guide post 111 can cooperate with the guide groove on the test head, so that the test head only moves along the extension direction of the guide post 111, further ensuring the reliable movement of the test head and realizing the precise docking of the probe of the test head with the probe card.

[0105] In some embodiments, the guide post 111 is disposed on the first fixing ring 11 , and the guide post 111 extends toward one side of the connecting ring 21 in a direction away from the second fixing ring 12 .

[0106] In one embodiment, the guide post 111 extends in a direction perpendicular to the first fixing ring 11, so that the test head moves in a direction perpendicular to the probe card, and the probe contacts the probe card in a direction perpendicular to the probe card. This can avoid the situation where some probes cannot be aligned with the test points on the probe card due to tilted direction, and ensure that all probes can accurately contact the test points on the probe card.

[0107] The linkage mechanism 30 is disposed between the first fixing ring 11 and the connecting ring 21. The linkage mechanism 30 drives the connecting ring 21 to the docking state, aligning and connecting the clamping structure 22 with the test head. The linkage mechanism 30 then drives the connecting ring 21 to the testing state, allowing the test head probes to press against the probe card. When the test is complete or the probe card needs to be replaced, the linkage mechanism 30 drives the connecting ring 21 from the testing state to the docking state, allowing the test head and its probes to separate from the probe card. This facilitates removal of the test head from the connecting ring 21 or replacement of the probe card, while preventing damage to the probes.

[0108] Please refer to Figures 1 to 8 、 Figure 14 As shown, linkage mechanism 30 includes a driver disposed between connecting ring 21 and first fixing ring 11. The driver is configured as a linearly movable driver 31 that drives connecting mechanism 20 in a linear motion. The driver drives connecting ring 21 and the test head fixed thereto in a linear motion, thereby improving the alignment of the test head probes with the test points on the probe card and ensuring linear contact between the probes and the probe card, thereby ensuring contact stability and preventing damage to the test points on the probe card.

[0109] In some embodiments, "moving along a straight line" means moving along a direction perpendicular to the probe card, that is, moving along the arrangement direction of the connecting mechanism 20 and the fixing mechanism 10. In other embodiments, the moving straight line may not be perpendicular to the probe card.

[0110] The linearly movable driving member 31 includes a fixed portion 311 and a movable portion 312. The movable portion 312 can move linearly relative to the fixed portion 311. One of the fixed portion 311 and the movable portion 312 is fixed to the connecting ring 21, and the other is fixed to the first fixing ring 11.

[0111] In some embodiments, the linearly movable drive member 31 is a cylinder, with the cylinder body serving as the fixed portion 311 and the cylinder piston rod serving as the movable portion 312. The cylinder body is fixed to the connecting ring 21, and the piston rod is fixed to the first fixing ring 11. Alternatively, the cylinder body is fixed to the first fixing ring 11, and the piston rod is fixed to the connecting ring 21.

[0112] When the cylinder is activated and the piston rod extends, the connecting ring 21 moves away from the first fixing ring 11, approaching the test head and connecting the clamping structure 22 to the test head. When the piston rod retracts, the connecting ring 21 moves toward the first fixing ring 11, causing the connecting ring 21 to drive the test head toward the first fixing ring 11, allowing the test head's probe to accurately press against the probe card.

[0113] In some embodiments, the linear movable driving member 31 may be configured as an oil cylinder, an electric lead screw, or a gear rack or a worm gear, etc. The present invention does not make any specific limitation thereto.

[0114] There are several, for example four, linear motion drive members 31. The linear motion drive members 31 are evenly distributed around the first fixing ring 11 and the connecting ring 21. The synchronous operation of the drive members ensures reliable linear movement of the connecting ring 21.

[0115] In order to further ensure the stability of the operation of the connecting ring 21 , the linkage mechanism 30 further includes a guide structure 32 disposed between the connecting ring 21 and the fixing mechanism 10 . The guide structure 32 is specifically disposed between the connecting ring 21 and the first fixing ring 11 .

[0116] The guide structure 32 includes a bracket 321 fixed on the connecting ring 21, an abutment wheel 322 rotatably set on the bracket 321, and a support plate 323 fixed on the first fixed ring 11. The support plate 323 extends in a direction perpendicular to the probe card. The axial direction of the abutment wheel 322 is parallel to the support plate 323, and the outer peripheral surface of the abutment wheel 322 is tightly fitted against the side wall of the support plate 323.

[0117] As the connecting ring 21 moves toward and away from the first fixing ring 11, the abutment wheel 322 always engages the support plate 323. This guides the movement of the connecting ring 21, ensuring that the connecting ring 21 always moves in the intended direction, avoiding deviation or shaking. This prevents deviations in the movement trajectory of the connecting ring 21 due to uneven force, thereby improving the reliability of equipment operation. Furthermore, the abutment wheel 322 and the support plate 323 tightly fit together to form a rigid support that resists external vibration or lateral force interference, ensuring that the connecting ring 21 can maintain stable movement even under high-speed and loaded conditions.

[0118] The guide structure 32 can be provided with two or more groups. When the connecting ring 21 moves back and forth between the docking state and the test state, the two or more groups of guide structures 32 can reliably guide the movement of the connecting ring 21, so that the connecting ring 21 drives the test head to move more accurately.

[0119] A sensing structure is also provided between the connecting ring 21 and the first fixing ring 11. A second sensing piece 27 is fixed to the connecting ring 21, and a second sensor 28 is fixed to the first fixing ring 11. The sensing position of the second sensor 28 is set on the moving path of the second sensing piece 27. The second sensor 28 can be, for example, a laser sensor or an electromagnetic sensor.

[0120] During the movement of the connecting ring 21, the second sensing piece 27 is driven to move. When the second sensing piece 27 moves to the sensing position of the second sensor 28, the second sensor 28 can sense the second sensing piece 27 and thereby send a signal that the connecting ring 21 has moved to the sensing position, thereby reminding the operator and ensuring the accuracy of the movement of the connecting ring 21.

[0121] The working principle of the probe card carrying device provided by the present invention is described in detail below: The fixing mechanism 10 is fixed to a transport device used to transport the components to be tested. Specifically, the first fixing ring 11 is fixed to a vertical side wall of the transport device on the side facing the second fixing ring 12. The plane of the first fixing ring 11 is perpendicular to the horizontal plane, and the axial direction of the first fixing ring 11 extends in the horizontal direction.

[0122] When taking or replacing the probe card, pull the vertical side wall outward by a predetermined distance, open the second fixing ring 12 relative to the first fixing ring 11, and place the probe card in the receiving groove 13 on the first fixing ring 11. The probe card cooperates with the first limiting group 121 and the second limiting group 122 and is precisely aligned and installed in the receiving groove 13. Flip the second fixing ring 12 so that the first fixing ring 11 and the second fixing ring 12 fit together, clamping the probe card. The test area of ​​the probe card is exposed at the through hole in the middle of the first fixing ring 11 and the second fixing ring 12. Use the locking structure 14 to lock the first fixing ring 11 and the second fixing ring 12 to limit and fix the position of the second fixing ring 12. Push the vertical side wall inward to its original position. At this time, the probe card remains in the test position so that the two sides of the probe card are respectively in contact with the test head and the component to be tested, and are ready for testing.

[0123] Activating the linearly movable drive member 31 moves the connecting ring 21 away from the first fixing ring 11. When the connecting ring 21 reaches the docking position, the engaging structure 22 engages with the slot in the test head. Operating the operating lever 223, which then rotates the engaging structure 22, locks it into the slot in the test head, and achieves precise docking between the connecting mechanism 20 and the test head.

[0124] The linear movable driving member 31 is operated in reverse to move the connecting ring 21 toward the first fixing ring 11. When the connecting ring 21 moves to the testing state, the probes of the test head are precisely pressed onto the probe card to achieve connection between the probes and the probe card.

[0125] The probe card carrier of the present invention enables precise connection between not only normal-sized probe cards but also small-sized probe cards. The connection process is smooth and reliable, and the connection between small-sized probe cards and test equipment is even more precise, significantly improving the accuracy of chip / wafer testing.

[0126] The present invention also provides a testing device for testing a chip / wafer. The testing device includes a transmission device, a testing device, and a probe card carrying device.

[0127] The probe card carrier is fixedly mounted on the transmission device. More specifically, the probe card carrier is located between the transmission device and the test device and is used to securely support the probe card. The probe card carrier of the present invention facilitates the connection between test heads of any size and probe cards, while also ensuring a precise connection between the probe card and the test head.

[0128] The transport device is used to transport DUTs. After testing one DUT, it automatically transports the next DUT to connect it to the probe card. The transport device has a vertical sidewall that can be pulled outward a predetermined distance. A fixing mechanism 10 is attached to the vertical sidewall, maintaining the probe card in a test position perpendicular to a horizontal plane. Pulling out the vertical sidewall and the fixing mechanism 10 affixed thereto facilitates assembly or replacement of the probe card.

[0129] The testing device includes a test bench located on one side of the transmission device and a test machine mounted on the test bench. The test machine includes a test head with probes. The test bench is typically movably connected to one side of the transmission device. During testing, the test bench drives the test machine toward the transmission device so that the probes on the test head contact the probe card. After the test is completed, the test bench drives the test machine away from the transmission device to separate the probes on the test head from the probe card. Typically, the test machine is detachably mounted on the test bench so that the test machine can be replaced according to different test objects.

[0130] The above describes in detail the structure, features and effects of the present invention based on the embodiments shown in the drawings. The above description is only a preferred embodiment of the present invention, but the present invention is not limited to the scope of implementation shown in the drawings. Any changes made in accordance with the concept of the present invention, or modifications to equivalent embodiments with equivalent changes, which do not exceed the spirit covered by the description and drawings, should be within the scope of protection of the present invention.

Claims

1. A probe card carrying device, characterized in that: include: A fixing mechanism (10) for fixing the probe card; A connecting mechanism (20) is provided on one side of the fixing mechanism (10), and the connecting mechanism (20) comprises a connecting ring (21) for connecting with the fixing mechanism (10) and a clamping structure (22) provided on the connecting ring (21); A linkage mechanism (30) is provided between the fixing mechanism (10) and the connecting ring (21), and the linkage mechanism (30) is used to drive the connecting ring (21) to switch between a docking state and a test state; in the docking state, the connecting ring (21) is away from the fixing mechanism (10) and the clamping structure (22) can be connected to a test head of a test device; in the test state, the connecting ring (21) is close to the fixing mechanism (10) so that the probe on the test head contacts the probe card.

2. The probe card carrying device according to claim 1, wherein: The clamping structure (22) comprises a rotating clamping ring (221) rotatably arranged on the connecting ring (21), and a limiting clamping block (222) connected to the rotating clamping ring (221), wherein the limiting clamping block (222) is used for clamping with the test head.

3. The probe card carrying device according to claim 2, wherein: A plurality of the limiting blocks (222) are arranged at intervals along the circumference of the rotating clamping ring (221); And / or, the limiting block (222) is detachably connected to the rotating clamping ring (221).

4. The probe card carrying device according to claim 2, wherein: The connecting mechanism (20) further comprises a supporting ring (23) fixed to the connecting ring (21), and a plurality of limiting ears (24) fixed to the supporting ring (23); the plurality of limiting ears (24) cooperate with the supporting ring (23) to enclose a rotating track for limiting the rotation of the rotating clamping ring (221).

5. The probe card carrying device according to claim 4, wherein: A ball (244) is provided on the side of the limiting ear (24) facing the rotating clamp (221); And / or, a gasket (245) is provided on the side of the limiting ear (24) facing the rotating clamping ring (221); And / or, the limiting ear (24) includes a connecting portion (241) connected to the outer peripheral side of the support ring (23), a first extending portion (242) connected to one end of the connecting portion (241) away from the support ring (23), and a second extending portion (243) connected to one end of the first extending portion (242) away from the connecting portion (241), the first extending portion (242) extends along the axial direction of the support ring (23) toward a side away from the connecting ring (21), the second extending portion (243) extends along the radial direction of the support ring (23) toward the side where the support ring (23) is located, the first extending portion (242) is provided with a ball (244) on the side facing the rotating retaining ring (221), and the second extending portion (243) is provided with a gasket (245) on the side facing the rotating retaining ring (221).

6. The probe card carrying device according to claim 2, wherein: The rotating clamping ring (221) is fixed with an operating rod (223); the connecting ring (21) is fixed with a limiting clamping plate (25), the limiting clamping plate (25) is provided with a limiting groove (251), and at least a part of the operating rod (223) is located in the limiting groove (251).

7. The probe card carrying device according to claim 1, wherein: The linkage mechanism (30) includes a plurality of linear movable driving members (31), each of the linear movable driving members (31) including a fixed portion (311) and a movable portion (312) that moves linearly relative to the fixed portion (311), one of the fixed portion (311) and the movable portion (312) being fixed to the connecting ring (21), and the other being fixed to the fixing mechanism (10).

8. The probe card carrying device according to claim 7, wherein: The linkage mechanism (30) also includes a guide structure (32) arranged between the connecting ring (21) and the fixing mechanism (10), and the guide structure (32) includes a bracket (321) fixed on the connecting ring (21), an abutment wheel (322) rotatably arranged on the bracket (321), and a support plate (323) fixed on the fixing mechanism (10), the abutment wheel (322) is pressed against the support plate (323), and the support plate (323) extends in a direction perpendicular to the probe card.

9. The probe card carrying device according to any one of claims 1 to 8, characterized in that: The fixing mechanism (10) is provided with a guide post (111), and the guide post (111) is used to cooperate with the connecting mechanism (20) or the test head to limit the movement of the test head in a direction perpendicular to the probe card; And / or, the fixing mechanism (10) includes a first fixing ring (11) and a second fixing ring (12), the first fixing ring (11) is connected to the connecting ring (21), and the second fixing ring (12) is movably connected to a side of the first fixing ring (11) away from the connecting mechanism (20), and the first fixing ring (11) and the second fixing ring (12) clamp the probe card when they are in contact, and the test area of ​​the probe card is exposed at the through hole in the middle of the first fixing ring (11) and the second fixing ring (12).

10. A testing device, characterized in that: It comprises a transmission device for transmitting components to be tested, a test device connected to the transmission device, and a probe card carrying device as described in any one of claims 1 to 9, wherein the test device comprises a test head, the probe card carrying device is located between the transmission device and the test device, and the fixing mechanism (10) is connected to the transmission device on a side away from the connecting mechanism (20).

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