Pressurizing device and elastic support member

Abstract

The invention provides a high pressure device which is provided with a supporting part of an inclined objective table capable of adjusting inclination with high precision and properly receiving force from a pressure surface. A pressurizing device is provided with: an inclined stage having a pressurizing surface for pressing an object to be pressurized, the inclination of which can be changed; a base disposed on the opposite side of the pressing surface with respect to the inclined stage; a support unit that connects the base and the inclined stage such that the inclined stage can be inclined with reference to a fulcrum on a central axis; and a telescopic member, one end portion of which is in contact with the inclined stage, the other end portion of which is in contact with the base and is sandwiched between the inclined stage and the base, the telescopic member being capable of changing the length between the one end portion and the other end portion.

Description

Technical Field

[0001] The present disclosure relates to, for example, a pressurizing device requiring a high level of parallelism between a pressurizing surface and a pressurized object, and an elastic supporting member used in such a pressurizing device. Background Art

[0002] For example, in a pressurizing device used in a manufacturing process where components are arranged at a high density, a high level of parallelism is sometimes required between the pressurizing surface and the mounting surface on which the pressurized object is mounted, or the surface of the pressurized object itself. As an example of such a pressurizing device, the following device has been proposed: a device using three retractable piezoelectric actuators to support a head having a pressurizing surface, and by retracting and contracting the piezoelectric actuators, the inclination of the pressurizing surface can be adjusted (see Patent Document 1, etc.).

[0003] However, conventional pressurizing devices using piezoelectric actuators have the problem of applying a force to the piezoelectric actuator, causing it to flex, when the pressurizing surface is tilted. For example, if the piezoelectric actuator flexes more, the force exerted by the pressurizing surface, which can safely support the piezoelectric actuator, weakens. Furthermore, in conventional structures that utilize a piezoelectric actuator support head, if the pressurizing surface is changed to one that can tilt independently of the piezoelectric actuator, the accuracy and resolution of adjusting the pressurizing surface's inclination will decrease.

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application Laid-Open No. 2011-51328 Summary of the Invention

[0007] Problems to be solved by the invention

[0008] The present disclosure has been made in view of such actual circumstances and relates to a pressurizing device having a support portion for an inclined stage capable of adjusting the inclination with high precision and appropriately receiving a force from a pressurizing surface, and an elastic support member for supporting the inclined stage.

[0009] Technical solutions to solve problems

[0010] In order to achieve the above objectives, the present disclosure provides a pressurizing device having:

[0011] A tilting stage having a pressing surface for pressing a pressurized object and capable of changing its inclination;

[0012] a base disposed on an opposite side of the pressurizing surface relative to the tilting stage;

[0013] a support portion connecting the base and the tilting stage so that the tilting stage can tilt with a fulcrum on the central axis as a reference; and

[0014] The telescopic member has one end in contact with the tilting stage and the other end in contact with the base, and is sandwiched between the tilting stage and the base, and is capable of changing the length between the one end and the other end.

[0015] The pressurizing device disclosed herein includes, in addition to the telescopic member, a support portion connecting the tilting stage to the base. This reduces the force transmitted from the pressurizing surface to the telescopic member, effectively absorbing the force from the pressurizing surface. Furthermore, the support portion allows the tilting stage's inclination to be adjusted with high precision, even without securing the telescopic member to the base or the tilting stage.

[0016] Furthermore, for example, the support portion may be an elastic support member having one end fixed to the base and the other end fixed to the tilting stage, and elastically deforming so as to bend at least a portion thereof in the direction of the central axis.

[0017] In this pressurizing device, the elastic support member securely connects the base and the tilting stage, further reducing the load on the telescopic member. Furthermore, the elastic support member connects the tilting stage and the base without any relative movement, such as sliding or rotating, between the contact surfaces of the members. Therefore, this pressurizing device can adjust the tilt of the tilting stage with high precision.

[0018] Furthermore, for example, at least one of one end portion of the telescopic member that contacts the tilt stage and the other end portion that contacts the base may have a convex rotational curved surface.

[0019] Such a telescopic member can prevent the telescopic member from being bent relative to the pressing direction even when the tilt stage is tilted, and can prevent damage caused by the force transmitted from the pressing surface.

[0020] Furthermore, for example, at least one of the stage contact portion of the tilt stage with which one end portion of the telescopic member contacts and the base contact portion of the base with which the other end portion of the telescopic member contacts may have a concave rotational curved surface.

[0021] This pressurizing device prevents the telescopic member from bending relative to the pressurizing direction even when the tilting stage is tilted, thus preventing damage to the telescopic member. Furthermore, it prevents unintended deviation in the contact positions of one end of the telescopic member with the tilting stage and the base, allowing for highly precise adjustment of the tilting stage's inclination.

[0022] Furthermore, for example, the telescopic member may include a piezoelectric actuator.

[0023] The telescopic member with a piezoelectric actuator allows for fine adjustment of its length, enabling the pressurizing device to precisely adjust the tilt of the tilt stage. Furthermore, because the support member mitigates the force transmitted from the pressurizing surface to the telescopic member, the pressurizing device can adequately absorb the force from the pressurizing surface, even if the telescopic member has a piezoelectric actuator made of brittle material.

[0024] In addition, for example, the pressurizing device of the present disclosure may also have at least two telescopic members.

[0025] The contact positions of the one end portions of the two telescopic members with respect to the tilting stage and the intersection of the central axis of the support portion with respect to the tilting stage form a triangle with these contact points forming vertices.

[0026] This type of pressurizing device can adjust the orientation of the pressurizing surface to any direction as long as it is within the adjustment range.

[0027] Furthermore, for example, in the triangle, the length of a side connecting the contact position of one of the two telescopic elements to the intersection of the central axis may be different from the length of a side connecting the contact position of the other of the two telescopic elements to the intersection of the central axis.

[0028] Such a pressurizing device can reduce the amount of change in the length of the telescopic member required to change the orientation of the pressurizing surface to any direction.

[0029] Furthermore, for example, in the triangle, a side connecting the contact position of one of the two telescopic members to the intersection point of the central axis intersects at a right angle with a side connecting the contact position of the other of the two telescopic members to the intersection point of the central axis.

[0030] This type of pressurizing device can simplify and speed up the control of the inclination adjustment of the tilt stage because the relationship between the change in the orientation of the pressurizing surface and the change in the length of the telescopic member is simple.

[0031] Furthermore, for example, the support portion may be an elastic support member fixed at one end to the base and at the other end to the tilting stage and elastically deformed so as to bend at least a portion in the direction of the central axis.

[0032] The elastic supporting member may also have: a first-direction low-rigidity portion having anisotropic flexibility that is easily bent in a direction roughly parallel to the side of the triangle connecting the contact position of one of the two telescopic members to the intersection of the center axis; and a second-direction low-rigidity portion having anisotropic flexibility that is easily bent in a direction roughly parallel to the side of the triangle connecting the contact position of the other of the two telescopic members to the intersection of the center axis.

[0033] In this pressurizing device, the change in length of one telescopic member corresponds to the deformation of the low-rigidity portion in the first direction, and the change in length of the other telescopic member corresponds to the deformation of the low-rigidity portion in the second direction, thereby achieving a stable inclination adjustment action of the tilting stage with little deviation.

[0034] Furthermore, for example, the elastic supporting member may include a rigid portion disposed closer to the base than the tilting stage, and a flexible portion disposed closer to the tilting stage than the rigid portion and more easily flexible than the rigid portion.

[0035] Such an elastic support member adapts to the inclination of the tilt stage by elastically deforming the flexible portion close to the tilt stage. Therefore, the portion of the elastic support member that is non-parallel to the pressing direction can be limited to a narrow range.

[0036] Furthermore, for example, the elastic supporting member may be in the shape of a column having a rigid portion disposed so as to be offset from one another in the direction of the central axis and a flexible portion that is more easily bent than the rigid portion.

[0037] The flexible portion may also have: a first-direction low-rigidity portion, which is clamped by a pair of first cutting portions, and after the pair of first cutting portions cut into the side of the elastic supporting member roughly symmetrically toward the center axis, they clamp the center axis and extend parallel to the center axis for a specified length; and a second-direction low-rigidity portion, which is clamped by a pair of second cutting portions, and after the pair of second cutting portions cut into the side of the elastic supporting member roughly symmetrically toward the center axis, they clamp the center axis and extend parallel to the center axis for a specified length, and the symmetry reference plane is roughly perpendicular to the pair of first cutting portions.

[0038] The flexible portion of the elastic support member can support the tilting stage by following the tilt of the tilting stage, and the vertical arrangement of the first direction low rigidity portion and the second direction low rigidity portion achieves stable supporting force and operation and appropriate durability.

[0039] In addition, for example, the pressurizing device of the present disclosure may also have at least two telescopic members.

[0040] The contact positions of the one ends of the two telescopic members with respect to the tilting stage and the intersection of the central axis of the support portion with respect to the tilting stage may form a right triangle with the vertices thereof.

[0041] It may also be that the side of the right triangle connecting the contact position of one of the two telescopic members to the intersection of the central axis is approximately perpendicular to the symmetry reference plane of the pair of first cutting portions, and the side of the right triangle connecting the contact position of the other of the two telescopic members to the intersection of the central axis is approximately perpendicular to the symmetry reference plane of the pair of second cutting portions.

[0042] In this pressurizing device, the change in length of one telescopic member corresponds to the deformation of the first-direction low-rigidity portion, while the change in length of the other telescopic member corresponds to the deformation of the second-direction low-rigidity portion. Furthermore, because the triangle forms a right triangle, the relationship between the change in the orientation of the pressurizing surface and the change in the length of the telescopic member is simple. Furthermore, the perpendicular arrangement of the first-direction low-rigidity portion and the second-direction low-rigidity portion of the elastic support member achieves stable support force and operation, as well as adequate durability.

[0043] Furthermore, for example, the first-direction low-rigidity portion and the second-direction low-rigidity portion may be formed in opposite directions in the central axis direction and may be formed so that at least a portion overlaps with each other in the central axis direction.

[0044] This elastic support member can reduce the total length in the central axis direction, so the device can be miniaturized. In addition, by reducing the total length, the bending moment can be reduced and the durability strength is improved.

[0045] Furthermore, for example, the elastic supporting member may include a stopper whose front end portion protrudes toward any of the pair of first cutout portions and the pair of second cutout portions, and whose protrusion amount is adjustable.

[0046] The stopper can prevent excessive deformation of the elastic support member and prevent unintended forces from being applied to the elastic support member itself, the telescopic member, etc. If machining errors occur in the cutout portion of the elastic support member, the range of motion of the low-rigidity portion in the first and second directions can be appropriately set by adjusting the protrusion of the stopper.

[0047] In addition, the present disclosure provides an elastic supporting member that connects an inclination stage that changes its inclination and a base that receives the inclination stage.

[0048] The elastic supporting member is columnar and includes a rigid portion disposed at positions offset from each other in a central axis direction and a flexible portion that is more easily bent than the rigid portion.

[0049] Because this elastic support member securely connects the base and the tilting stage, it can further reduce the load on the telescopic member used for adjusting the tilt. Furthermore, the elastic support member connects the tilting stage and the base without requiring the surfaces of the members to slide and move relative to each other. Therefore, the use of this elastic support member allows for highly precise adjustment of the tilting stage's tilt. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] Figure 1 This is a schematic diagram of a pressurizing device according to one embodiment of the present disclosure.

[0051] Figure 2A Yes Figure 1 An enlarged view (front view) of the periphery of the support portion of the pressurizing device shown.

[0052] Figure 2B Yes Figure 1 An enlarged view (perspective view) of the periphery of the support portion of the pressurizing device shown.

[0053] Figure 3 It is a partial cross-sectional view of the periphery of the support portion shown in FIG. 2 .

[0054] Figure 4 This is a conceptual diagram showing the arrangement of the support portion and the like with respect to the tilt stage.

[0055] Figure 5 This is a cross-sectional perspective view of an elastic support portion constituting a support portion of a pressurizing device.

[0056] Figure 6 It is a partially enlarged view showing the flexible portion of the elastic supporting member.

[0057] Figure 7 yes Figure 6 A cross-sectional view of the flexible portion is shown.

[0058] Figure 8 is a cross-sectional view of the elastic supporting member.

[0059] Figure 9 It is a front view of the periphery of the support portion of the pressurizing device according to the second embodiment.

[0060] Figure 10 It is a right side view of the periphery of the support portion of the pressurizing device according to the second embodiment.

[0061] Figure 11 It will Figure 10An enlarged partial view of the periphery of the front end portion of the stopper is shown.

[0062] Figure 12 It is a perspective view of the periphery of a support portion of a pressurizing device according to a second embodiment. DETAILED DESCRIPTION

[0063] Hereinafter, the present invention will be described based on the embodiments shown in the drawings.

[0064] First embodiment

[0065] Figure 1 1 is an external view of a pressurizing device 10 according to a first embodiment of the present disclosure. The pressurizing device 10 includes a frame 12, a driving unit 13, an output shaft 14, a base 20, a tilting stage 30, a loading stage 15, and the like. Figure 1 As shown, the pressurizing device 10 presses the pressurized object 90 placed on the placement stage 15 below the frame 12 by pressing the lower surface of the inclined stage 30 , ie, the pressurizing surface 32 , from above.

[0066] A drive unit 13 is provided on the upper portion of the frame 12. The force of the drive unit 13 is transmitted to the base 20, the tilting stage 30, the pressurized object 90, and the like via an output shaft 14 extending downward from the drive unit 13. In the pressurizing device 10, the base 20, the tilting stage 30, and the like constitute a variable pressurizing surface support unit 18. The variable pressurizing surface support unit 18 is capable of changing the inclination of the pressurizing surface 32 of the tilting stage 30 and transmits the force from the drive unit 13 to the pressurizing surface 32 of the tilting stage 30.

[0067] Figure 2A Yes Figure 1 The front view of the variable pressure surface support portion 18 of the pressure device 10 shown in FIG. Figure 2B 18 is a perspective view of the variable pressure surface support portion 18. Figure 2A and Figure 2B As shown, the variable pressure surface support portion 18 includes a tilting stage 30, a base 20, a support portion 50, and a telescopic member 40 (in Figure 2A In the figure, only the first telescopic member 41 appears), the spring 61, etc.

[0068] The tilting stage 30 has a pressing surface 32 for pressing the object to be pressed. The tilting stage 30 is in the shape of a substantially rectangular flat plate (see Figure 4 ), the tilting stage 30 is not limited to a rectangular flat plate. The tilting stage 30 may be in any shape other than a rectangular flat plate, such as a disk, a prism, or a cylinder, as long as it has a pressure surface 32 on one side facing the pressure direction (in the embodiment, the lower surface).

[0069] As described later, the tilting stage 30 can change the inclination of the pressing surface 32 (which can also be referred to as the orientation of the pressing surface 32 (the normal direction of the pressing surface 32 )).

[0070] like Figure 2A and Figure 2B As shown, the base 20 is arranged on the opposite side of the pressurizing surface 32 relative to the tilting stage 30. Figure 1 As shown, the output shaft 14 is connected to the upper surface of the base 20, which is the side opposite to the tilting stage 30. The support portion 50, the first telescopic member 41, the second telescopic member 42, the spring 61, and the spring 62 are arranged between the base 20 and the tilting stage 30. In addition, the second telescopic member 42 and the spring 62 are arranged at Figure 2A Hidden behind the support portion 50 and not visible (see Figure 2B 、 Figure 4 ).

[0071] The support part 50 connects the base 20 and the tilting stage 30. The support part 50 is made of a solid material such as metal or resin, and is preferably made of a metal material from the perspective of rigidity. The support part 50 can tilt the stage 30 with the central axis 51 of the support part 50 (see Figure 5 ) is connected to the tilting stage 30 in a manner as a reference tilt.

[0072] Figure 3 yes Figure 2A A partial cross-sectional view of the variable pressure surface support portion 18 is shown. Figure 3 As shown, the support portion 50 is an elastic support member, one end portion 50a of which is fixed to the tilting stage 30, and the Figure 5 The other end portion 50b shown is fixed to the base 20 and is elastically deformed so that at least a portion thereof, that is, the flexible portion 54 is bent in the direction of the central axis 51. The detailed structure of the support portion 50 will be described later.

[0073] like Figure 3 As shown, one end 41a of the first telescopic element 41 contacts the tilt stage 30, while the other end 41b contacts the base 20, thereby being sandwiched between the tilt stage 30 and the base 20. The first telescopic element 41 has a piezoelectric actuator internally configured to adjust the length between the one end 41a and the other end 41b. Specifically, the pressurizing device 10 sends a drive signal to the piezoelectric actuator of the first telescopic element 41, thereby adjusting the length of the first telescopic element 41 and thereby changing the inclination of the tilt stage 30.

[0074] like Figure 3As shown, unlike the one end 50a of the support portion 50, the one end 41a of the first telescopic member 41 is not fixed to the tilt stage 30. Furthermore, unlike the other end 50b of the support portion 50, the other end 41b of the first telescopic member 41 is not fixed to the base 20. The one end 41a and the other end 41b of the first telescopic member 41 are pressed against the stage contact portion 31a of the tilt stage 30 and the base contact portion 21a of the base 20, respectively, by the elastic force of the spring 61.

[0075] That is, Figure 2A and Figure 3 As shown, the spring 61 that elastically connects the upper surface of the tilt stage 30 and the lower surface of the base 20 is provided so as to sandwich the first telescopic member 41 between the spring 61 and the support portion 50. Therefore, even if the length of the first telescopic member 41 changes due to the driving of the piezoelectric actuator, the one end 41a and the other end 41b of the first telescopic member 41 always reliably maintain contact with the tilt stage 30 or the base 20.

[0076] like Figure 3 As shown, at least one (in the embodiment, both) of the first telescopic element 41's one end 41a, which contacts the tilt stage 30, and the other end 41b, which contacts the base 20, has a convex rotational curved surface (in the embodiment, a spherical surface). Since the first telescopic element 41 has a convex rotational spherical surface at one end 41a or the other end 41b, even when the tilt stage 30 is tilted relative to the base 20, the first telescopic element 41 is prevented from bending relative to the pressurizing direction, and damage to the piezoelectric actuator and the like built into the first telescopic element 41 is prevented.

[0077] In addition, if Figure 3 As shown, at least one (in the embodiment, both) of the platform contact portion 31a of the tilting stage 30 with which one end 41a of the first telescopic member 41 contacts and the base contact portion 21a of the base 20 with which the other end 41b of the first telescopic member 41 contacts has a concave rotational curved surface (in the embodiment, a spherical surface or a conical side surface). This pressurizing device 10 can prevent the first telescopic member 41 from bending relative to the pressurizing direction and damage the first telescopic member 41 even when the tilting stage 30 is tilted. In addition, the contact positions where the one end 41a and the other end 41b of the first telescopic member 41 contact the tilting stage 30 and the base 20 prevent accidental deviation. Therefore, this pressurizing device 10 can adjust the inclination of the tilting stage 30 with high precision.

[0078] Figure 4 It is a conceptual diagram showing the arrangement of the support portion 50 , the first telescopic element 41 , and the second telescopic element 42 with respect to the tilt stage 30 . Figure 4This is a diagram of the tilt stage 30 as viewed from the pressing direction (upper direction), and shows the arrangement of the support portion 50 , the first telescopic element 41 , the second telescopic element 42 , the spring 61 , and the spring 62 .

[0079] like Figure 4 As shown, the pressurizing device 10 has two telescopic members 40 consisting of a first telescopic member 41 and a second telescopic member 42. Figure 3 As shown, the first telescopic element 41 and the second telescopic element 42 are arranged between the base 20 and the tilt stage 30 so as to be substantially parallel to the central axis 51 of the support portion 50 . Figure 4 The second telescopic member 42 shown is different from the one shown in FIG. 2 and FIG. 3 except that the arrangement in the horizontal direction (the direction perpendicular to the pressurizing direction) is different. Figure 3 The first telescopic element 41 described above is the same, and therefore, a detailed description of the structure of the second telescopic element 42 will be omitted.

[0080] like Figure 4 As shown, the support portion 50 is arranged at the center of the tilting stage 30. The central axis 51 of the support portion 50 (see Figure 5 ) with respect to the tilting stage 30 is roughly consistent with the center of the tilting stage 30 (the center of the inscribed circle).

[0081] like Figure 4 As shown, the contact points 33 and 34 of the one ends 41a and 42a of the two telescopic members 40 (the first telescopic member 41 and the second telescopic member 42) with the tilting stage 30, and the intersection 35 of the central axis 51 of the support portion 50 with the tilting stage 30, form a triangle 36 with these vertices. Within the adjustment range, this pressurizing device 10 can adjust the pressurizing surface 32 of the tilting stage 30 to any direction. Furthermore, when the one ends 41a and 42a are in surface contact with the tilting stage 30, the contact points 33 and 34 correspond to the center of gravity of the contact surfaces.

[0082] Furthermore, in the triangle 36 formed by the contact positions 33, 34, and the intersection 35, the length of the side 36a connecting the first telescopic element 41 and the support portion 50 may be different from the length of the side 36b connecting the second telescopic element 42 and the support portion 50. Here, the side 36a is defined as the side connecting the contact position 33 of the first telescopic element 41, one of the two telescopic elements 40, with the tilting stage 30, to the intersection 35 of the central axis 51. Furthermore, the side 36b is defined as the side connecting the contact position 34 of the second telescopic element 42, the other of the two telescopic elements 40, with the tilting stage 30, to the intersection 35 of the central axis 51.

[0083] Since the length of the side 36 a connecting the first telescopic element 41 and the support portion 50 is different from the length of the side 36 b connecting the second telescopic element 42 and the support portion 50, the pressurizing device 10 can reduce the amount of change in the length of the first telescopic element 41 and the second telescopic element 42 required to change the orientation of the pressurizing surface 32 to any direction, compared to a case where the lengths of the sides 36 a and 36 b are the same.

[0084] Furthermore, in the triangle 36 formed by the contact positions 33, 34 and the intersection 35, the side 36a connecting the first telescopic element 41 and the support portion 50 intersects at a right angle with the side 36b connecting the second telescopic element 42 and the support portion 50, so that the triangle 36 may be formed as a right triangle. This pressurizing device 10 simplifies and speeds up the control of the inclination adjustment of the tilt stage 30 because the relationship between the change in the orientation of the pressurizing surface 32 and the change in the length of the telescopic elements 41, 42 is simple.

[0085] Figure 5 yes Figure 2A and Figure 3 The support portion 50 shown is a sectional perspective view based on a section passing through the central axis 51. Figure 5 As shown, the support portion 50 has a cylindrical outer shape extending along the central axis 51. However, the support portion 50 is not limited to a cylindrical shape and may have a shape other than a prismatic shape (see the second embodiment).

[0086] like Figure 3 As shown, one end portion 50a of the support portion 50 is fixed to the tilting stage 30 via a plurality of bolts 63 and 64. Figure 5 The other end 50b of the support portion 50 shown is also secured to the base 20 via multiple bolts, similar to the one end 50a. The fixed areas between the support portion 50, the tilting stage 30, and the base 20, and the interior of the support portion 50, do not contain any portion where the contact surfaces of the components slide or rotate relative to each other. Specifically, the support portion 50 is an elastic supporting member that elastically deforms by flexing at least a portion of the support portion 50 in the direction of the central axis 51, enabling the tilting stage 30 to tilt as the telescopic member 40 extends and contracts.

[0087] like Figure 5 As shown, the support portion 50 includes a rigid portion 52 disposed closer to the base 20 than the tilting stage 30 , and a flexible portion 54 disposed closer to the tilting stage 30 than the rigid portion 52 and more easily flexible than the rigid portion 52 . Figure 6 (a) is based on the central axis 51 and Figure 5 (a) a cross-sectional view of the support portion 50 in a vertical cross section, Figure 6 (b) is based on Figure 51 is a cross-sectional view of the support portion 50 having the same cross-section as that shown in (a).

[0088] like Figure 5 、 Figure 6 (a) and Figure 6 As shown in FIG. 5( b ), the flexible portion 54 in the support portion 50 includes a first direction low rigidity portion 56 sandwiched between a pair of first cutout portions 58 , and a second direction low rigidity portion 57 sandwiched between a pair of second cutout portions 59 .

[0089] like Figure 6 As shown in (a), the pair of first cutouts 58 forming the first-direction low-rigidity portion 56 are composed of a first cutout 58a and a first cutout 58b that are mirror-symmetrical with respect to a symmetry reference plane 58c passing through the central axis 51. The first cutouts 58a and 58b are cut approximately symmetrically from the side surface 50c of the support portion 50 toward the central axis 51, and then extend parallel to the central axis 51 for a predetermined length, sandwiching the central axis 51. Specifically, the first cutouts 58a and 58b have distance-varying portions 58ab and 58bb that approach each other from the side surface 50c toward the central axis 51, and parallel portions 58aa and 58ba that extend parallel to the central axis 51, sandwiching the central axis 51 between them.

[0090] Furthermore, the first-direction low-rigidity portion 56 includes an inclined portion 56 b sandwiched between the distance changing portions 58ab and 58bb, and a flat plate portion 56 a sandwiched between the parallel portions 58aa and 58ba. Figure 7 This is a partially enlarged perspective view of the flexible portion 54 of the support portion 50. Figure 8 (a) Figure 8 (b) and Figure 8 (c) is along Figure 7 The cross-sectional perspective view of the flexible portion 54 is shown along the cross-sectional lines aa, bb, and cc.

[0091] like Figure 8 (a)~ Figure 8 As shown in (c), a gap formed by the pair of first cutouts 58a and 58b is formed around the first-direction low-rigidity portion 56. Therefore, the flexible portion 54 of the support portion 50 has relatively low rigidity with respect to forces applied in a direction perpendicular to the symmetry reference plane 58c of the pair of first cutouts 58 due to the narrow thickness of the flat plate portion 56a of the first-direction low-rigidity portion 56. In other words, the first-direction low-rigidity portion 56 has anisotropic flexibility, allowing it to bend easily in a direction perpendicular to the symmetry reference plane 58c.

[0092] On the other hand, Figure 6As shown in (b), the pair of second cutouts 59 forming the second-direction low-rigidity portion 57 are composed of a second cutout 59a and a second cutout 59b that are mirror-symmetrical with respect to a symmetry reference plane 59c passing through the central axis 51. The second cutouts 59a and 59b are cut approximately symmetrically from the side surface 50c of the support portion 50 toward the central axis 51, and then extend parallel to the central axis 51 for a predetermined length, sandwiching the central axis 51. Similar to the first cutouts 58a and 58b, the second cutouts 59a and 59b have distance-varying portions 59ab and 59bb that approach each other from the side surface 50c toward the central axis 51, and parallel portions 59aa and 59ba that extend parallel to the central axis 51, sandwiching the central axis 51.

[0093] However, the symmetric reference planes 59c of the pair of second cutouts 59 are substantially perpendicular to the symmetric reference planes 58c of the pair of first cutouts 58. In addition, the pair of first cutouts 58 are cut from top to bottom, whereas the pair of second cutouts 59 are cut from bottom to top.

[0094] In addition, if Figure 6 As shown in (b), the second direction low rigidity portion 57 has an inclined portion 57b sandwiched between the distance changing portions 59ab and 59bb, and a flat plate portion 57a ​​sandwiched between the parallel portions 59aa and 59ba. Figure 6 (a) and Figure 6 From the comparison of (b), it can be understood that the first direction low rigidity portion 56 and the second direction low rigidity portion 57 are formed in opposite directions to each other in the direction of the center axis 51, and are formed in a manner that at least a portion (especially the flat plate portion 56a and the flat plate portion 57a) are repeated in the direction of the center axis 51.

[0095] like Figure 5 、 Figure 6 (b) and Figure 8 As shown in (c), a gap formed by a pair of second cut-out portions 59a and 59b is formed around the second direction low rigidity portion 57. Therefore, the flexible portion 54 of the support portion 50 achieves relatively low rigidity with respect to the force in the direction perpendicular to the symmetry reference plane 59c of the pair of second cut-out portions 59 by the narrow thickness of the flat plate portion 57a ​​of the second direction low rigidity portion 57. That is, the second direction low rigidity portion 57 has anisotropic flexibility that is easy to bend in the direction perpendicular to the symmetry reference plane 59c. In addition, Figure 8 The central common portion 5657 shown in (c) is a common portion of the first-direction low-rigidity portion 56 and the second-direction low-rigidity portion 57 , and is formed at the center of the flexible portion 54 along the central axis 51 .

[0096] like Figure 5As shown, the flexible portion 54 is formed between the upper end of the first cut portion 58a and the lower ends of the second cut portions 59a and 59b in the direction of the central axis 51. Figures 6 to 8 The first-direction low-rigidity portion 56 and the second-direction low-rigidity portion 57 shown in the figure are therefore more easily flexed than the rigid portion 52 and the second rigid portion 55, which are arranged with their positions offset from each other in the direction of the central axis 51. Furthermore, the rigid portion 52 is formed between the other end portion 50b and the upper ends of the first cutout portions 58a and 58b, and the second rigid portion 55 is formed between the lower ends of the second cutout portions 59a and 59b and the one end portion 50a.

[0097] The support portion 50 in which the first direction low rigidity portion 56 and the second direction low rigidity portion 57 exhibit anisotropic flexibility may also be configured such that the symmetric reference planes 58c and 59c in the support portion 50 are aligned with the symmetric reference planes 58c and 59c in the support portion 50. Figure 4 The sides 36a and 36b of the right triangle 36 are substantially perpendicular. Figure 4 The side 36a of the right triangle 36 shown, which connects the intersection 35 from the contact position 33 of the first telescopic element 41 to the central axis 51, is substantially perpendicular to the symmetry reference plane 58c of the pair of first cutouts 58. Thus, the direction in which the first-direction low-rigidity portion 56 easily bends to achieve anisotropic flexibility is substantially parallel to the side 36a of the right triangle 36.

[0098] In addition, the support portion 50 is configured as Figure 4 The side 36b of the right triangle 36 shown, which connects the intersection 35 from the contact position 34 of the second telescopic element 42 to the central axis 51, is substantially perpendicular to the symmetry reference plane 59c of the pair of second cutouts 59. Thus, the direction in which the second-direction low-rigidity portion 57 easily bends to achieve anisotropic flexibility is substantially parallel to the side 36b of the right triangle 36.

[0099] Figures 5 to 8 The support portion 50 shown can be manufactured by forming a pair of first cutout portions 58 and a pair of second cutout portions 59 on a columnar metal material by laser cutting or the like, for example.

[0100] This processing apparatus 10, in which the support portion 50 supports the tilting stage 30, includes, in addition to the telescopic member 40, the support portion 50 connecting the tilting stage 30 to the base 20. This allows the force transmitted from the pressurizing surface 32 to the telescopic member 40 to be reduced while also appropriately receiving the force from the pressurizing surface 32. Furthermore, the support portion 50 allows the inclination of the tilting stage 30 to be adjusted with high precision, for example, without fixing the telescopic member 40 to the base 20 and the tilting stage 30.

[0101] Second embodiment

[0102] Figure 9 1 is a front view showing a variable pressurizing surface support portion 118 used in a pressurizing device according to a second embodiment of the present disclosure. Figure 10 yes Figure 9 The right side view of the variable pressure surface support portion 118 is shown. Figure 10 In order to show the shape of the end portion 150a of the support portion 150, a portion of the tilt stage 30 is shown in perspective. Figure 12 It is a perspective view showing the variable pressurizing surface support portion 118 .

[0103] The variable pressurizing surface support portion 118 differs from the variable pressurizing surface support portion 18 shown in FIG2 in the shape of the support portion 150 and the presence of stoppers 171, 172, 173, 174, and 175 on the support portion 150. However, other aspects are the same as the variable pressurizing surface support portion 18 shown in FIG2 . Regarding the pressurizing device of the second embodiment, only the differences from the pressurizing device 10 of the first embodiment will be described, and descriptions of the common points will be omitted.

[0104] like Figure 9 and Figure 12 As shown, the support portion 150 is an elastic support member having a substantially prismatic outer shape. In addition, the first direction low rigidity portion 156 and the second direction low rigidity portion 157 of the support portion 150 are thicker than the flat plate portions 156a and 157a. Figure 5 and Figure 6 The flat plate portions 56a and 57a shown are thin and have substantially the same shape as the first-direction low-rigidity portion 56 and the second-direction low-rigidity portion 57 of the support portion 50. The thickness of the flat plate portions 156a and 157a can be appropriately changed depending on the pressure transmitted from the pressurizing surface 32 to the pressurized object, the adjustment accuracy required for the tilt stage 30, the power of the telescopic members 41 and 42, and the like.

[0105] like Figure 10 As shown, the support portion 150 includes stoppers 171 and 172, and the front end portions 171a and 172a of the stoppers 171 and 172 protrude toward a pair of second cutout portions 159a and 159b sandwiching the second direction low rigidity portion 157 (see FIG. Figure 11 ), and the protrusion amount of the front end portions 171a and 172a can be adjusted. Figure 11 It will Figure 10 An enlarged partial view of the periphery of the stoppers 171 , 172 is shown.

[0106] like Figure 11As shown, stoppers 171 and 172 are inserted through through-holes formed in support portion 150, with their front ends 171a and 172a protruding toward second cutouts 159a and 159b. Screw grooves are engraved in stoppers 171 and 172 and the through-holes through which they are inserted. Therefore, stoppers 171 and 172 can be moved forward and backward, and the amount of protrusion of front ends 171a and 172a toward second cutouts 159a and 159b can be changed by rotating stoppers 171 and 172.

[0107] The support portion 150 having the stoppers 171 and 172 can limit the inclination of the tilt stage 30 to an appropriate range by adjusting the amount of protrusion of the stoppers 171 and 172 toward the second cutout portions 159a and 159b. Furthermore, the support portion 150 having the stoppers 171 and 172 can prevent the flexible portion 154 of the support portion 150 from being permanently strained due to an unexpected load, or prevent excessive force from being applied to the telescopic members 41 and 42.

[0108] like Figure 9 and Figure 10 As shown, the support portion 150 includes, in addition to the stoppers 171, 172, and 173, whose front ends protrude toward the second cutout portions 159a and 159b, stoppers 174 and 175, whose front ends protrude toward the first cutout portions 158a and 158b. Like the stoppers 171, 172, and 173, the stoppers 174 and 175 also serve to limit the inclination of the tilting stage 30 to an appropriate range.

[0109] The stoppers 171 to 175 can be arranged at positions that are appropriately changed as long as the front end portions thereof protrude toward any of the pair of first cutouts 158a, 158b and the pair of second cutouts 159a, 159b. Figure 9 As shown in the stoppers 174, 175, the first cutouts 158a, 158b are extended upward, and the stoppers 174, 175 are provided on the extended portions. Alternatively, as shown in the support portion 150, in addition to the stoppers 171 to 175, stoppers 176, 177 may be provided (see FIG. Figure 9 ), the stopper 178 and the stopper 179 paired therewith, the stopper 181 paired with the stopper 172, and the stoppers 182 and 183 provided on the other end side of the support portion 150 (see Figure 10). The front end portions of the stops 182 and 183 protrude toward a pair of second cut-in portions 159b and 159a. The stops 176 and 177 are composed of gap adjustment pieces (block-shaped stops) and the like, which are configured to be movable relative to the rigid portion 152 and have end faces opposite to the flexible portion 154. The stops 178, 179, 181, and 182 are composed of bolts and the like, the front end portions of which protrude toward any cut-in portion. By adjusting the gap (gasket adjustment) using the stops 171 to 179, 181, and 182, the inclination of the tilting stage 30 can be adjusted with high precision while ensuring reliability.

[0110] In addition, the support portion 150 and the pressurizing device including the support portion 150 of the second embodiment achieve the same effects as the support portion 50 and the pressurizing device 10 of the first embodiment.

[0111] While the above embodiments illustrate the pressurizing device and elastic support member of the present disclosure, the present disclosure is not limited to the aforementioned embodiments but may also include multiple other embodiments or variations. For example, the pressurizing device is not limited to a support portion formed of a metal elastic support member, but may also include a support portion having a composite structure of a metal block or rod and a spring or resin, a support portion having a spherical bearing, and the like. Furthermore, the symmetry reference planes with respect to the pair of first incisions and the symmetry reference planes with respect to the pair of second incisions may be perpendicular to each other as shown in the embodiments, but may also intersect at a predetermined angle other than a right angle.

[0112] Description of Reference Numerals

[0113] 10... Pressurization device

[0114] 12...frame

[0115] 13...Drive unit

[0116] 14...output shaft

[0117] 15... Loading stage

[0118] 18, 118... Pressurized surface variable support portion

[0119] 20...base

[0120] 21a……Base contact part

[0121] 30... Tilt stage

[0122] 31a: Stage contact area

[0123] 32... Pressurized surface

[0124] 33, 34...Contact positions

[0125] 35...Intersection

[0126] 36...Triangle

[0127] 36a, 36b...side

[0128] 40... telescopic member

[0129] 41...first telescopic member

[0130] 42...Second telescopic member

[0131] 50, 150...support part

[0132] 41a, 42a, 50a, 150a... one end

[0133] 41b, 50b...the other end

[0134] 50c...side

[0135] 51...Central axis

[0136] 51a……Fulcrum

[0137] 52, 152... Rigidity

[0138] 54, 154... flexible part

[0139] 55...the second rigid part

[0140] 56, 156……first direction low rigidity portion

[0141] 57, 157... Second direction low rigidity portion

[0142] 56a, 57a, 156a, 157a... Flat plate

[0143] 56b, 57b... inclined portion

[0144] 58...a pair of first entry points

[0145] 59...a pair of second entry points

[0146] 58a, 58b, 158a, 158b...the first entry part

[0147] 59a, 59b, 159a, 159b...second cutting part

[0148] 58aa, 58ba, 59aa, 59ba...parallel section

[0149] 58ab, 58bb, 59ab, 59bb...distance change part

[0150] 58c, 59c...symmetry reference plane

[0151] 5657...Central Common Department

[0152] 61, 62...spring

[0153] 63, 64...bolts

[0154] 90... Pressurized object

[0155] 171, 172, 173, 174, 175, 181, 182, 183...stoppers

[0156] 171a, 172a...front end

Claims

1. A pressurizing device, wherein: have: A tilting stage having a pressing surface for pressing a pressurized object and capable of changing its inclination; a base disposed on an opposite side of the pressurizing surface relative to the tilting stage; a support portion connecting the base and the tilting stage so that the tilting stage can tilt with a fulcrum on the central axis as a reference; and The telescopic member has one end in contact with the tilting stage and the other end in contact with the base, and is sandwiched between the tilting stage and the base, and is capable of changing the length between the one end and the other end.

2. The pressurizing device according to claim 1, wherein: The support portion is an elastic support member having one end portion fixed to the tilting stage and the other end portion fixed to the base, and elastically deforming so that at least a portion thereof in the direction of the central axis is bent.

3. The pressurizing device according to claim 1, wherein: At least one of one end portion of the telescopic member in contact with the tilt stage and the other end portion in contact with the base has a convex rotational curved surface.

4. The pressurizing device according to claim 1, wherein: At least one of a stage contact portion of the tilt stage with which one end portion of the telescopic member contacts and a base contact portion of the base with which the other end portion of the telescopic member contacts has a concave rotational curved surface.

5. The pressurizing device according to claim 1, wherein The telescopic member includes a piezoelectric actuator.

6. The pressurizing device according to claim 1, wherein: There are at least two telescopic members, The contact positions of the one end portions of the two telescopic members with respect to the tilting stage and the intersection of the central axis of the support portion with respect to the tilting stage form a triangle with these contact points forming vertices.

7. The pressurizing device according to claim 6, wherein: In the triangle, the length of a side connecting the contact position of one of the two telescopic elements to the intersection of the central axis is different from the length of a side connecting the contact position of the other of the two telescopic elements to the intersection of the central axis.

8. The pressurizing device according to claim 6, wherein: In the triangle, a side connecting the contact position of one of the two telescopic elements to the intersection point of the central axis intersects a side connecting the contact position of the other of the two telescopic elements to the intersection point of the central axis at a right angle.

9. The pressurizing device according to claim 6, wherein: The support portion is an elastic support member fixed at one end to the base and at the other end to the tilting stage, and elastically deforms so that at least a portion thereof in the direction of the central axis is bent. The elastic supporting member includes: a first-direction low-rigidity portion having anisotropic flexibility that is easily bent in a direction substantially parallel to a side of the triangle connecting the contact position of one of the two telescopic members to the intersection of the central axis; and a second-direction low-rigidity portion having anisotropic flexibility that allows easy deflection in a direction substantially parallel to a side of the triangle connecting the contact position of the other of the two telescopic members to the intersection of the central axis.

10. The pressurizing device according to claim 2, wherein: The elastic supporting member includes a rigid portion disposed closer to the base than the tilting stage, and a flexible portion disposed closer to the tilting stage than the rigid portion and more easily flexible than the rigid portion.

11. The pressurizing device according to claim 2, wherein: The elastic supporting member is columnar and has a rigid portion disposed at positions offset from each other in the direction of the central axis and a flexible portion that is more easily bent than the rigid portion. The flexible portion comprises: a first-direction low-rigidity portion, which is clamped by a pair of first cutting portions, and after the pair of first cutting portions cut into the side surface of the elastic supporting member approximately symmetrically toward the central axis, they clamp the central axis and extend parallel to the central axis for a specified length; and a second-direction low-rigidity portion, which is clamped by a pair of second cutting portions, and after the pair of second cutting portions cut into the side surface of the elastic supporting member approximately symmetrically toward the central axis, they clamp the central axis and extend parallel to the central axis for a specified length, and the symmetry reference plane is approximately perpendicular to the pair of first cutting portions.

12. The pressurizing device according to claim 11, wherein: There are at least two telescopic members, The contact positions of the one ends of the two telescopic members with respect to the tilting stage and the intersection of the central axis of the support portion with respect to the tilting stage form a right triangle with the vertices thereof. The side of the right triangle connecting the contact position of one of the two telescopic members to the intersection of the central axis is approximately perpendicular to the symmetry reference plane of the pair of first incision portions, and the side of the right triangle connecting the contact position of the other of the two telescopic members to the intersection of the central axis is approximately perpendicular to the symmetry reference plane of the pair of second incision portions.

13. The pressurizing device according to claim 11, wherein: The first-direction low-rigidity portion and the second-direction low-rigidity portion are formed in opposite directions to each other in the central axis direction, and are formed so that at least a portion overlaps with each other in the central axis direction.

14. The pressurizing device according to claim 11, wherein The elastic supporting member includes a stopper having a front end portion that protrudes toward any one of the pair of first cutout portions and the pair of second cutout portions, and an amount of protrusion of the front end portion is adjustable.

15. An elastic supporting member, wherein: It is an elastic supporting member connecting the tilting stage of which the inclination is changed and the base supporting the tilting stage. The elastic supporting member is columnar and includes a rigid portion disposed at positions offset from each other in a central axis direction and a flexible portion that is more easily bent than the rigid portion.

16. The elastic supporting member according to claim 15, wherein The flexible portion has a first-direction low-rigidity portion, which is clamped by a pair of first cutting portions. The pair of first cutting portions cut into the elastic support member approximately symmetrically from the side surface toward the central axis, and then extend a specified length parallel to the central axis while clamping the central axis.

17. The elastic supporting member according to claim 16, wherein The flexible portion has a second-direction low-rigidity portion, which is clamped by a pair of second cutting portions. After the pair of second cutting portions cut roughly symmetrically from the side of the elastic supporting member toward the center axis, they extend a specified length parallel to the center axis while clamping the center axis, and the symmetry reference plane intersects with the pair of first cutting portions.

18. The elastic supporting member according to claim 17, wherein The first-direction low-rigidity portion and the second-direction low-rigidity portion are formed in opposite directions to each other in the central axis direction, and are formed so that at least a portion overlaps with each other in the central axis direction.

19. The elastic supporting member according to claim 16, wherein A stopper is provided, wherein a front end portion of the stopper protrudes toward any one of the pair of first incision portions, and the protrusion amount of the front end portion is adjustable.

20. The elastic supporting member according to claim 17, wherein A stopper is provided, wherein a front end portion of the stopper protrudes toward any one of the pair of second incision portions, and the protrusion amount of the front end portion is adjustable.

Images