A new high-precision eutectic chip mounter

Abstract

The present application relates to the technical field of eutectic wafer, and particularly relates to a novel high-precision eutectic wafer machine, which comprises a workbench and an XY moving mechanism, the workbench is provided with a wafer taking area, a solder taking area, a chip taking area and a heating eutectic area, the XY moving mechanism is provided with a coaxial visual positioning taking and placing mechanism, the coaxial visual positioning taking and placing mechanism comprises a camera with a downward camera head and three taking and placing mechanical arms which are uniformly distributed outside the camera head, the taking and placing mechanical arm comprises a loading part, the loading part is provided with a suction rod, when stacking, the three taking and placing mechanical arms can sequentially stack the wafer, the solder and the chip on the heating eutectic area in the state of camera positioning, meanwhile, the hollow stepping motor is matched with the suction rod through the connection sleeve and the spline, and the horizontal angle of the chip can be dynamically rotated and adjusted when the visual detection table is intervened, so that the problem that the existing eutectic equipment cannot realize high-precision dynamic correction of the horizontal angle of the chip during multiple positioning and taking and placing is solved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of eutectic patch, in particular to a novel high-precision eutectic patch machine. BACKGROUND

[0002] In the existing eutectic patch process, a vacuum suction pen is usually used to suck the soldering sheet and the chip respectively, and then they are stacked on the surface of the carrier sheet in the heating eutectic area. The specific process is as follows: first, place the carrier sheet on the heating eutectic area and heat it to the set temperature, then position and suck the soldering sheet and the chip respectively by the vacuum suction pen, and then stack them on the surface of the carrier sheet. When the soldering sheet reaches the molten state, the suction pen applies a certain pressure to the chip and makes it rub on the surface of the carrier sheet, and the eutectic patch is completed after the soldering sheet solidifies.

[0003] The existing eutectic patch equipment adopts a step-by-step positioning operation mode, so the soldering sheet, the chip and the carrier sheet need to be positioned and positioned separately, which leads to redundant operation process and low production efficiency. At the same time, the cumulative error of the mechanical and visual system is easily introduced by multiple positioning, which affects the welding alignment accuracy and reduces the eutectic quality. In addition, the discrete positioning and stacking actions lack coordination, which further restricts the improvement of production rhythm and is difficult to meet the needs of efficient batch manufacturing.

[0004] Moreover, the existing equipment cannot realize high-precision dynamic real-time correction, resulting in orientation deviation problem when mounting components. During the eutectic process, this angle deviation will directly affect the contact quality of the welding interface and reduce the product reliability. SUMMARY

[0005] In view of the problems existing in the prior art, a novel high-precision eutectic patch machine is provided, which is provided with a coaxial visual positioning and taking-out mechanism, so that the three taking-out mechanical arms therein can take out materials under the positioning of the camera, and when stacking, the three taking-out mechanical arms can stack the carrier sheet, the soldering sheet and the chip on the heating eutectic area in turn under the positioning of the camera. At the same time, the hollow stepping motor can dynamically rotate and adjust the horizontal angle of the chip through the spline cooperation of the connecting sleeve and the suction rod when the visual detection table is involved, which solves the problem that the existing eutectic equipment cannot realize high-precision dynamic correction of the horizontal angle of the chip when taking out multiple times.

[0006] In order to solve the problems in the prior art, the application provides a novel high-precision eutectic chip mounter, which comprises a workbench and an XY-direction moving mechanism arranged on the top of the workbench, a slide glass taking area, a soldering piece taking area, a chip taking area and a heating eutectic area are arranged on the workbench, a coaxial visual positioning and taking and placing mechanism is arranged on the XY-direction moving mechanism, the coaxial visual positioning and taking and placing mechanism comprises a camera with a downward camera head and three taking and placing mechanical arms which are uniformly distributed on the outer side of the camera head, the taking and placing mechanical arm comprises a loading part which can move from the outer side of the camera head to the bottom of the camera head, a suction rod is arranged on the loading part, the suction rod is arranged in the vertical direction, when the loading part moves to the bottom of the camera head, the suction rod is coaxial with the camera head, in the heating eutectic area, the suction rods on the three taking and placing mechanical arms stack the slide glass, the soldering piece and the chip on the heating eutectic area in sequence, the taking and placing mechanical arm is provided with a swing arm driving assembly which enables the suction rod to move from the outer side of the camera head to the bottom of the camera head, a hollow stepping motor is arranged on the loading part, the suction rod is connected with the hollow shaft of the hollow stepping motor, when the suction rod passes through the visual detection table, the hollow stepping motor adjusts the horizontal angle of the element carried by the suction rod.

[0007] Preferably, a visual detection table with an upward detection direction is arranged on the workbench.

[0008] Preferably, the taking and placing mechanical arm further comprises a fixed plate and a movable plate which extend in the longitudinal direction, the suction rod is arranged on the movable plate in the longitudinal direction, two groups of parallel connecting rods are arranged between the fixed plate and the movable plate, one of the connecting rods is provided with a driving arm which is rotationally connected with the connecting rod, the swing arm driving assembly is arranged on the fixed plate and is rotationally connected with the driving arm, when the driving arm swings relative to the fixed plate, the suction rod moves from the outer side of the camera head to the bottom of the camera head.

[0009] Preferably, the swing arm driving assembly comprises a driving block, a lead screw and a driving motor, the driving block is arranged on one side of the fixed plate in the longitudinal sliding mode, the lead screw is rotationally arranged on the fixed plate, the lead screw extends in the longitudinal direction and is threadedly connected with the driving block after penetrating through the driving block, one end of the driving arm is rotationally connected with the driving block, the driving motor is arranged on the fixed plate, the output shaft of the driving motor is in transmission connection with the lead screw.

[0010] Preferably, the bottom end of the hollow shaft of the hollow stepping motor is provided with a connecting sleeve, the top end of the suction rod is in spline connection with the lower part of the inner cavity of the connecting sleeve, a lower elastic element is arranged between the top end of the suction rod and the hollow stepping motor.

[0011] Preferably, the inner wall bottom end of the connecting sleeve is provided with a lower fixing ring coaxial therewith, the lower fixing ring is connected with the suction rod by means of a spline, the top end of the suction rod is provided with an upper fixing ring, and the upper fixing ring is in sealing sliding fit with the inner wall of the connecting sleeve.

[0012] Preferably, a piston is further arranged in the connecting sleeve, the piston is located between the suction rod and the hollow shaft of the hollow stepping motor, and an upper elastic element is arranged between the piston and the hollow shaft of the hollow stepping motor.

[0013] Preferably, the bottom end of the movable plate is provided with a sealing shell, the bottom end of the hollow shaft of the hollow stepping motor is provided with a rotating disc, the rotating disc is provided with an eccentric shaft extending downward, the inner bottom of the sealing shell is provided with a sliding seat in sealing sliding fit along the front-rear direction, the connecting sleeve is arranged in the sliding seat and the top end of the connecting sleeve penetrates through the sliding seat, the top end of the sliding seat is provided with a sliding groove perpendicular to the sliding direction of the sliding seat, the eccentric shaft is in sliding fit with the sliding groove, and when the hollow shaft of the hollow stepping motor rotates, the sliding seat can reciprocate along the front-rear direction.

[0014] Preferably, the bottom end of the rotating disc is provided with a mounting groove extending along the radial direction thereof, the top end of the eccentric shaft is arranged in the mounting groove in a sliding manner, the mounting groove is further provided with an adjusting pin in rotational connection therewith, the adjusting pin is in threaded connection with the eccentric shaft, the distance between the eccentric shaft and the hollow shaft of the hollow stepping motor is adjusted by rotating the eccentric shaft, and then the sliding stroke of the sliding seat is adjusted.

[0015] Preferably, the sliding seat comprises a lower sliding block and an upper sliding block, the lower sliding block is arranged below the inside of the sealing shell in a sliding manner along the front-rear direction, the upper sliding block is arranged on the lower sliding block in a sliding manner along the vertical direction, the horizontal contact surface of the upper sliding block and the lower sliding block is in meshing, the bottom end edge of the rotating disc is provided with an electromagnetic coil, the upper part of the connecting sleeve is in rotational fit with the lower sliding block and is in spline fit with the upper sliding block, and when the electromagnetic coil is electrified, the upper sliding block moves upward relative to the lower sliding block and forms a transmission connection with the rotating disc.

[0016] The application has the following beneficial effects compared with the prior art:

[0017] The application sets a coaxial visual positioning and taking and placing mechanism, so that three taking and placing mechanical arms can synchronously complete taking operation under the guidance of a unified camera positioning system, and sequentially and accurately stack the carrier sheet, the solder sheet and the chip on the heating eutectic area. The three mechanical arms share the same high-precision visual positioning system, so that the accurate position information of the solder sheet, the chip and the carrier sheet can be synchronously acquired in the taking stage, and the sequential and accurate stacking of the three is realized through control in the stacking stage, thereby completely solving the problem of repeated positioning of the traditional equipment multiple times. The integrated positioning and sequential stacking design not only greatly improves the production efficiency, but also significantly improves the precision and consistency of eutectic welding by eliminating the cumulative error caused by multiple positioning. At the same time, the camera arranged directly above the centers of the three mechanical arms can cooperate with the mechanical arms, and through symmetrical field coverage and real-time visual feedback, the positioning precision and stacking consistency of the taken and placed chip are further improved.

[0018] The hollow stepping motor of the application is matched with the suction rod through the connecting sleeve and the spline, and the horizontal angle of the chip can be dynamically rotated and adjusted when the visual detection table intervenes. It is ensured that each taken and placed element has completed accurate posture adjustment before entering the stacking, and matches the heating eutectic area. Through the cooperative control mechanism of visual detection and angle adjustment, even if the element has a slight deflection when initially taken, it can be corrected in real time before entering the eutectic. In this way, not only is the welding deviation caused by inconsistent rotation angles of the elements prevented, but also the defects such as virtual welding and offset welding in the eutectic process are effectively reduced, and the stability of the mounting quality is further improved.

[0019] The application sets a piston in the suction rod, so that the inner cavity of the suction rod is divided into a lower cavity capable of directly contacting the element and an upper cavity in communication with the vacuum pumping system. When the upper cavity generates negative pressure, the piston moves upward to generate negative pressure in the lower cavity. Since the displacement distance of the piston is limited, the damage of the element caused by excessive suction force of the lower cavity can be prevented, so as to enhance the adaptive ability of the system. The negative pressure in each suction process is controlled within a reasonable range, so as to avoid suction failure or damage to the element due to excessive or insufficient negative pressure.

[0020] The application sets a sealing shell at the bottom end of the movable plate, and integrates a rotating disc driven by a hollow stepping motor and a sliding seat structure inside, so as to realize the friction movement of the chip eutectic. The rotating disc is matched with the sliding groove of the sliding seat through the eccentric shaft, so that the rotary motion of the hollow stepping motor is converted into the forward and backward reciprocating motion of the sliding seat, and the stable friction of the chip eutectic is ensured. The eccentricity can be changed through the rotary adjusting pin, so that the stroke of the sliding seat can be flexibly adjusted to adapt to different process requirements.

[0021] The application also locks the upper slider and the lower slider through the meshing surface, so that the rotating force of the rotating disc is completely converted into linear motion, and the stability of eutectic friction is ensured. When the electromagnetic coil is energized, the upper slider and the lower slider are disengaged, the upper slider forms friction transmission with the rotating disc under the action of magnetic force, so that the hollow stepping motor can drive the suction rod to rotate, and the angle adjustment of the chip is realized. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 is a perspective view of a novel high-precision eutectic chip mounter according to the present application in a first view angle.

[0023] Figure 2 is a perspective view of a novel high-precision eutectic chip mounter according to the present application in a second view angle.

[0024] Figure 3 is a perspective view of a coaxial vision positioning pick-and-place mechanism in a novel high-precision eutectic chip mounter according to the present application.

[0025] Figure 4 is a bottom view of a coaxial vision positioning pick-and-place mechanism in a novel high-precision eutectic chip mounter according to the present application.

[0026] Figure 5 is a perspective view of a pick-and-place mechanical arm in a novel high-precision eutectic chip mounter according to the present application.

[0027] Figure 6 is a schematic view of a pick-and-place mechanical arm in a novel high-precision eutectic chip mounter according to the present application at an initial position.

[0028] Figure 7 is a schematic view of a pick-and-place mechanical arm in a novel high-precision eutectic chip mounter according to the present application when picking and placing materials.

[0029] Figure 8 is a sectional view of a hollow stepping motor and a suction rod in a novel high-precision eutectic chip mounter according to the present application.

[0030] Figure 9 is a perspective exploded view of a hollow stepping motor and a suction rod in a novel high-precision eutectic chip mounter according to the present application. Figure 8

[0031] Figure 10 is a schematic view of a middle upper slider and a lower slider in a novel high-precision eutectic chip mounter according to the present application when moving in a front-back reciprocating direction.

[0032] Figure 11 is a schematic view of a middle upper slider and a lower slider in a novel high-precision eutectic chip mounter according to the present application when being separated.

[0033] Figure 12 is a schematic view of a middle upper slider and a lower slider in a novel high-precision eutectic chip mounter according to the present application when being separated. ​

[0034] The diagram is labeled as follows: 1. XY-axis moving mechanism; 11. Longitudinal lifting mechanism; 2. Worktable; 21. Wafer picking area; 22. Solder piece picking area; 23. Chip picking area; 24. Heating eutectic zone; 25. Vision inspection station; 31. Camera; 32. Picking and unloading robotic arm; 321. Fixed plate; 322. Movable plate; 323. Linkage rod; 324. Drive arm; 3251. Drive block; 3252. Lead screw; 3253. Drive motor; 3254. Upper limit block; 3255. Lower... Limiting block; 3256, Positioning block; 33, Suction rod; 331, Upper fixing ring; 34, Hollow stepper motor; 35, Connecting sleeve; 351, Lower fixing ring; 352, Piston; 36, Lower elastic element; 37, Upper elastic element; 41, Sealing shell; 411, Operating port; 42, Turntable; 421, Eccentric shaft; 423, Adjusting pin; 43, Sliding seat; 431, Slide groove; 432, Upper slider; 433, Lower slider; 44, Electromagnetic coil; 45, Sealing ring; 46, Sealing gasket. Detailed Implementation

[0035] To further understand the features, technical means, and specific objectives and functions achieved by the present invention, the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments.

[0036] like Figures 1-4 As shown, a novel high-precision eutectic bonding machine includes a worktable 2 and an XY-axis moving mechanism 1 mounted on top of the worktable 2. The worktable 2 is provided with a wafer pick-up area 21, a solder wafer pick-up area 22, a chip pick-up area 23, and a heating eutectic zone 24. The XY-axis moving mechanism 1 is equipped with a coaxial vision positioning pick-and-place mechanism. The coaxial vision positioning pick-and-place mechanism includes a camera 31 with its camera end facing downwards and three pick-and-place robotic arms 32 evenly distributed outside the camera 31. The pick-and-place robotic arms 32 include features that can move from the camera 31... The outer side of the device moves to the mounting part at the bottom of the camera 31. The mounting part is provided with a suction rod 33, which is installed vertically. When the mounting part moves to the bottom of the camera 31, the suction rod 33 is coaxial with the camera 31. In the heating eutectic zone 24, the suction rods 33 on the three picking and placing robotic arms 32 stack the wafer, solder pad and chip in sequence on the heating eutectic zone 24. The picking and placing robotic arms 32 are provided with a swing arm drive assembly that moves the suction rod 33 from the outer side of the camera 31 to the bottom of the camera 31.

[0037] The workbench 2 is divided into a carrier sheet taking area 21, a soldering sheet taking area 22, a chip taking area 23 and a heating eutectic area 24, each functional area is compact and orderly, and provides a basic space guarantee for the efficient operation of the chip mounter. The XY moving mechanism 1 can move flexibly in the horizontal direction, and drive the components on it to accurately reach each work area, realizing quick switching and positioning of the spatial position.

[0038] The XY moving mechanism 1 is provided with a coaxial visual positioning and taking-placing mechanism, which is one of the core components of the chip mounter to realize high-precision operation. It includes a camera 31 with the camera end facing down, and three taking-placing mechanical arms 32 evenly distributed outside the camera 31. The camera 31 can accurately capture image information in the work area, providing visual guidance for taking-placing operation. The three taking-placing mechanical arms 32 are evenly arranged around the outside of the camera 31, forming a compact and reasonable structure layout, ensuring multi-functional collaborative operation in limited space.

[0039] The taking-placing mechanical arm 32 includes a loading part that can move from the outside of the camera 31 to the bottom of the camera 31, and a suction rod 33 is arranged on the loading part, which is installed along the vertical direction. This design enables the loading part to move flexibly between the outside and the bottom of the camera 31, and when the loading part moves to the bottom of the camera 31, the suction rod 33 is coaxial with the camera 31. This coaxial design is of great significance, as it ensures that the suction rod 33 can accurately align with the components to be taken or placed under the guidance of the visual positioning system, ensuring the high precision of the taking and placing positions.

[0040] In the heating eutectic area 24, the suction rods 33 on the three taking-placing mechanical arms 32 sequentially stack the carrier sheet, the soldering sheet and the chip on the heating eutectic area 24. Throughout the process, the three taking-placing mechanical arms 32 work collaboratively under the guidance of the unified camera 31 positioning system. During the taking stage, the three mechanical arms sharing the same high-precision visual positioning system can simultaneously obtain the accurate position information of the soldering sheet, the chip and the carrier sheet, avoiding the tedious process of repeated positioning required by traditional equipment, greatly improving the taking efficiency. During the stacking stage, through precise control, the three components are accurately stacked in sequence, completely solving the problem of cumulative error caused by multiple positioning in traditional equipment, and significantly improving the precision and consistency of eutectic welding.

[0041] The new high-precision eutectic chip mounter has remarkable advantages. In terms of production efficiency, the integrated positioning design enables the three mechanical arms to perform material taking operations simultaneously, without the need for positioning and material taking one by one as in traditional devices, greatly shortening the production cycle and improving the output per unit time. In terms of precision and consistency, the cumulative error caused by multiple positioning is eliminated, enabling the precise stacking of the carrier, the soldering sheet and the chip, ensuring the high quality of eutectic welding, improving the reliability and stability of the product, reducing the scrap rate caused by positioning error, and reducing the production cost. In addition, the compact and reasonable structure design optimizes the overall layout of the device, occupies relatively small space, and the collaborative work between components is smoother, further improving the comprehensive performance and market competitiveness of the device.

[0042] As shown in Figure 2 The workbench 2 is provided with a visual detection table 25 with a detection direction upward, and the loading part is provided with a hollow stepping motor 34. The suction rod 33 is connected with the output shaft of the hollow stepping motor 34. When the suction rod 33 passes through the visual detection table 25, the hollow stepping motor 34 adjusts the horizontal angle of the element carried by the suction rod 33.

[0043] On the workbench 2, a visual detection table 25 with a detection direction upward is arranged, which is specially used for real-time detection of the posture of the element adsorbed on the suction rod 33. The suction rod 33, as the end execution component of the taking and placing mechanism, is installed on the loading part and connected with the output shaft of the hollow stepping motor 34. When the suction rod 33 carries the element to pass above the visual detection table 25, the visual system immediately accurately identifies the plane posture of the element, including the slight error of the horizontal angle direction.

[0044] Once the visual detection table 25 detects the posture deviation, the system will immediately drive the hollow stepping motor 34 to rotate for compensation at the corresponding angle. Since the hollow stepping motor 34 is adopted, the suction rod 33 can be connected with the hollow output shaft of the hollow stepping motor 34, so that the rotation posture adjustment is maintained while keeping the structure compact and the transmission stable. The rotation action is fast in response and has high resolution. This mechanism ensures that each element taken and placed has completed accurate posture adjustment before entering the stacking, and matches the heating eutectic area 24.

[0045] Through this whole set of visual detection and angle adjustment collaborative control mechanism, even if there is a slight deflection of the element when initially taking the material, it can be corrected in real time before entering the eutectic. This not only prevents the welding deviation caused by inconsistent rotation angles of the elements, but also effectively reduces defects such as virtual welding and offset welding in the eutectic process, further improving the stability of the mounting quality.

[0046] As shown in Figures 5-7As shown, the pick-and-place mechanical arm 32 further comprises a fixed plate 321 and a movable plate 322 extending longitudinally, the suction rod 33 is longitudinally arranged on the movable plate 322, and two groups of parallel connecting rods 323 are arranged between the fixed plate 321 and the movable plate 322, one of the connecting rods 323 is provided with a driving arm 324 rotationally connected thereto, and a swing arm driving assembly is arranged on the fixed plate 321 and rotationally connected with the driving arm 324, when the driving arm 324 swings relative to the fixed plate 321, the suction rod 33 moves from the outside of the camera 31 to the bottom of the camera 31.

[0047] The pick-and-place mechanical arm 32 comprises a fixed plate 321 and a movable plate 322 extending longitudinally, and the suction rod 33 is longitudinally arranged on the movable plate 322. Two groups of parallel connecting rods 323 are arranged between the fixed plate 321 and the movable plate 322 to maintain the stability of the position and the control of the motion trajectory of the suction rod 33 during movement. The parallel arrangement of the connecting rod structure not only ensures the controllability of the moving path of the suction rod 33, but also improves the rigidity and precision of the overall movement.

[0048] Among the two connecting rods 323, one of the connecting rods 323 is provided with a driving arm 324 rotationally connected thereto, and the driving arm 324 forms a power transmission mechanism with a swing arm driving assembly installed on the fixed plate 321. When the swing arm driving assembly is started, the swing arm drives the driving arm 324 to swing at an angle, and then drives the movable plate 322 as a whole to change its position through the connecting rod 323. With the movement of the movable plate 322, the suction rod 33 gradually rotates from the outside of the camera 31 to the bottom of the camera 31, realizing smooth conversion from the standby position to the coaxial positioning position.

[0049] The control characteristics of mechanical transmission are utilized to enable the suction rod 33 to complete precise actions without relying on complex slide rails or linear guides, which not only reduces the system size, but also improves the response speed and repeatability of operation. At the same time, since the movement process of the suction rod 33 is completely constrained by the mechanism, it can well avoid the problems of attitude drift or nonlinear deviation that may occur in high-speed picking and placing.

[0050] As shown in Figures 5-7 The swing arm driving assembly comprises a driving block 3251, a lead screw 3252, and a driving motor 3253. The driving block 3251 is longitudinally and slidingly arranged on one side of the fixed plate 321, the lead screw 3252 is rotationally arranged on the fixed plate 321, the lead screw 3252 extends longitudinally and penetrates the driving block 3251 to be threadedly connected therewith, one end of the driving arm 324 is rotationally connected with the driving block 3251, and the driving motor 3253 is arranged on the fixed plate 321, and the output shaft of the driving motor 3253 is in transmission connection with the lead screw 3252.

[0051] The driving block 3251 is longitudinally slidably arranged on one side of the fixed plate 321, and the main function of the driving block 3251 is to transmit the power provided by the driving motor 3253 to the movable plate 322 through the driving arm 324, so as to control the action of the suction rod 33. The longitudinal sliding function of the driving block 3251 ensures that the suction rod 33 can be accurately positioned in the vertical direction to reach the predetermined position.

[0052] The screw rod 3252 is rotatably arranged on the fixed plate 321, longitudinally extends and penetrates the driving block 3251. The screw rod 3252 is designed to allow the driving block 3251 to slide freely thereon and achieve accurate transmission through threaded connection. When the driving motor 3253 is started, the output shaft of the driving motor 3253 drives the screw rod 3252 to rotate, and the rotary motion of the screw rod 3252 drives the driving block 3251 to slide along the fixed plate 321 through the threaded action. Through this linear transmission, the driving block 3251 accurately moves the movable plate 322 through the driving arm 324, so as to drive the suction rod 33 to complete high-precision motion.

[0053] As shown in Figures 5-7 The fixed plate 321 is provided with an upper limiting block 3254 and a lower limiting block 3255 from top to bottom, and the driving block 3251 is provided with a positioning block 3256 between the upper limiting block 3254 and the lower limiting block 3255, and the positioning block 3256 slides between the upper limiting block 3254 and the lower limiting block 3255.

[0054] The fixed plate 321 is provided with an upper limiting block 3254 and a lower limiting block 3255 from top to bottom, and the driving block 3251 is provided with a positioning block 3256 between the upper limiting block 3254 and the lower limiting block 3255, and the positioning block 3256 slides between the upper limiting block 3254 and the lower limiting block 3255.

[0055] The driving block 3251 is also provided with a positioning block 3256, which is located between the upper limiting block 3254 and the lower limiting block 3255. The main function of the positioning block 3256 is to accurately constrain the motion trajectory of the driving block 3251 within the sliding range specified by the upper limiting block 3254 and the lower limiting block 3255. When the system works, the driving block 3251 slides longitudinally, and the positioning block 3256 slides between the upper limiting block 3254 and the lower limiting block 3255, so as to ensure that the sliding of the driving block 3251 is always controlled within the set travel limit range.

[0056] As shown in Figure 5 The fixed plate 321 and the movable plate 322 are both provided with two connecting rods 323 on both sides.

[0057] The left and right sides of the fixed plate 321 and the movable plate 322 are each provided with two connecting rods 323, which are connected in parallel. Compared with the traditional single-side double-rod structure, this four-rod configuration can more effectively offset the yaw and torsional moments caused by movement or load. The synchronous movement of the four rods enables the movable plate 322 to move smoothly and parallelly under the action of the driving arm 324, avoiding the deviation or angle error caused by single-side stress.

[0058] As shown in Figure 1 , the XY moving mechanism 1 is also provided with a longitudinal lifting mechanism 11, and the coaxial visual positioning and picking mechanism is arranged at the working end of the longitudinal lifting mechanism 11. The longitudinal lifting mechanism 11 is used to drive the coaxial visual positioning and picking mechanism to move in the vertical direction.

[0059] On the basis of the original XY moving platform, the longitudinal lifting mechanism 11 is added, which enhances the freedom of movement of the device in the horizontal plane and the vertical plane. The XY moving mechanism 1 is responsible for controlling the precise movement of the device in the horizontal direction, while the longitudinal lifting mechanism 11 can adjust the visual positioning and picking mechanism up and down in the vertical direction, thereby adapting to the picking task of different height objects.

[0060] The coaxial visual positioning and picking mechanism is installed at the working end of the longitudinal lifting mechanism 11, and uses visual sensors and positioning technology to monitor and adjust the accuracy of the suction action in real time. The coaxial layout design can ensure the movement synchronization between the visual system and the picking device, reducing the positional deviation in the picking action.

[0061] As shown in Figure 8 , Figure 9 , and Figure 10 , the bottom end of the output shaft of the hollow stepping motor 34 is provided with a connecting sleeve 35, the top end of the suction rod 33 is formed with a spline connection with the lower part of the inner cavity of the connecting sleeve 35, and a lower elastic element 36 is arranged between the top end of the suction rod 33 and the hollow stepping motor 34.

[0062] The bottom end of the output shaft of the hollow stepping motor 34 is provided with a connecting sleeve 35, which is a transition connecting component between the hollow stepping motor 34 and the suction rod 33. Its role is not only mechanical connection, but more importantly, power transmission and structure transition. The spline connection can transmit the torque of the output shaft of the hollow stepping motor 34 to the suction rod 33, so as to adjust the horizontal angle of the suction element of the suction rod 33. During the up-down movement (especially the rapid lifting) or the suction / release of the element by the suction rod 33, the sudden impact load is effectively relieved. The lower elastic element 36 can provide flexible pre-pressing, making the connection more tight, preventing looseness or abnormal sound caused by gap, and avoiding excessive pressure of the suction rod 33 on the element.

[0063] AsFigure 8 、 Figure 9 and Figure 10 As shown in

[0064] The lower fixing ring 351 at the bottom end of the inner wall of the connecting sleeve 35 is coaxial with the lower fixing ring 351 at the bottom end of the inner wall of the connecting sleeve 35. The ring is mechanically fixed with the suction rod 33 through the spline connection, which avoids the phenomenon of disengagement or loosening of the suction rod 33 during operation due to rotation or external force. The spline connection has high torque transmission function, which can ensure the stable rotation of the suction rod 33 and reduce the interference of axial displacement to the system.

[0065] Through the cooperation of the upper fixing ring 331 and the lower fixing ring 351, the suction rod 33 can be prevented from being separated from the connecting sleeve 35.

[0066] As shown in Figure 8 、 Figure 9 and Figure 10 The connecting sleeve 35 is also provided with a piston 352, which is located between the suction rod 33 and the output shaft of the hollow stepping motor 34, and an upper elastic element 37 is arranged between the piston 352 and the output shaft of the hollow stepping motor 34.

[0067] A piston 352 is arranged in the connecting sleeve 35, which is located between the suction rod 33 and the output shaft of the hollow stepping motor 34. This design can adjust the suction force by the movement of the piston 352, avoiding the damage of the element caused by the excessive suction of the suction rod 33.

[0068] When the output shaft of the hollow stepping motor 34 produces negative pressure, the piston 352 will move upward against the elastic force of the upper elastic element 37 (such as spring). At this time, the pressure space between the piston 352 and the top end of the suction rod 33 is reduced, so that the suction rod 33 produces appropriate suction force to adsorb the element.

[0069] The upper elastic element 37 between the piston 352 and the output shaft provides a restoring force. When the negative pressure disappears or is eliminated, the piston 352 will automatically reset under the action of the elastic force of the upper elastic element 37, so as to restore the normal working state of the suction rod 33, ensuring that the suction rod 33 can continuously and effectively adsorb the element.

[0070] The movement space of the piston 352 is limited, ensuring that it always remains within the appropriate movement range during operation. When the negative pressure inside the suction rod 33 is too low, the piston 352 adjusts the suction force through movement, preventing excessive suction from damaging the components; when the negative pressure disappears, the piston 352 quickly resets, preventing the suction rod 33 from having excessive suction on the target components, ensuring that each suction is performed under appropriate negative pressure conditions.

[0071] The design of the piston 352 not only effectively adjusts the suction force, but also prevents component damage caused by excessive suction, enhancing the system's adaptive ability. The negative pressure during each suction process is controlled within a reasonable range, avoiding suction failure or damage to components due to excessive or insufficient negative pressure.

[0072] As shown in Figure 11 and Figure 12 , the bottom end of the movable plate 322 is provided with a sealing shell 41, the bottom end of the hollow shaft of the hollow stepping motor 34 is provided with a rotating disc 42, the rotating disc 42 is provided with an eccentric shaft 421 extending downward, the inner bottom of the sealing shell 41 is provided with a sliding seat 43 that seals and slides in the front-back direction, the connecting sleeve 35 is arranged in the sliding seat 43 and its top end penetrates the sliding seat 43, the top end of the sliding seat 43 is provided with a sliding groove 431 perpendicular to its sliding direction, and the eccentric shaft 421 and the sliding groove 431 slide fit. When the hollow shaft of the hollow stepping motor 34 rotates, the sliding seat 43 can move back and forth in the front-back direction.

[0073] The hollow stepping motor 34 drives the rotating disc 42 to rotate, causing the eccentric shaft 421 to drive the sliding seat 43 to move back and forth in the front-back direction, achieving the purpose of the suction rod 33 driving the chip to rub back and forth. At the same time, the bubbles are removed by rubbing, and the soldering piece is tightly attached to the interface.

[0074] In the eutectic process, the main purpose of driving the chip to rub back and forth is to promote the uniform distribution of eutectic soldering pieces, remove the interface oxide layer, and enhance the soldering reliability,

[0075] As shown in Figure 11 and Figure 12 , the bottom end of the rotating disc 42 is provided with a mounting groove extending in its radial direction, the top end of the eccentric shaft 421 is slidingly arranged in the mounting groove, and the mounting groove is further provided with an adjusting pin 423 rotationally connected thereto. The adjusting pin 423 is threadedly connected with the eccentric shaft 421, and the distance between the eccentric shaft 421 and the hollow shaft of the hollow stepping motor 34 is adjusted by rotating the eccentric shaft 421, thereby adjusting the sliding stroke of the sliding seat 43.

[0076] The circumferential surface of the rotating disc 42 is provided with a stepped groove in sealing cooperation with the sealing shell 41, the stepped groove is provided with a sealing ring 45, and the sealing shell 41 is provided with an operating port 411 opposite the adjusting pin 423.

[0077] The rotation adjustment pin 423 is rotated through the operation opening 411 to adjust the rotation radius of the deflection shaft, thereby adjusting the sliding formation of the sliding seat 43, so as to control the friction range of the suction rod 33.

[0078] The bottom end of the sealing shell 41 is provided with a mounting opening, the bottom end of the lower sliding block 433 is provided with a connecting block penetrating through the mounting opening and slidingly matched with the mounting opening in the front-rear direction, the bottom of the lower sliding block 433 is larger than the mounting opening to prevent air pressure leakage, and a sealing gasket 46 is arranged between the bottom end of the lower sliding block 433 and the bottom of the sealing shell 41.

[0079] The sealing shell 41 is fixedly connected with the movable plate 322, serving as the basis for the movement of the sliding seat 43. The sealing ring 45 and the sealing gasket 46 are used to ensure that negative pressure can be generated in the sealing shell 41.

[0080] As shown in Figure 11 and Figure 12 , the sliding seat 43 includes a lower sliding block 433 and an upper sliding block 432, the lower sliding block 433 is slidingly arranged below the inside of the sealing shell 41 in the front-rear direction, the upper sliding block 432 is slidingly arranged on the lower sliding block 433 in the vertical direction, the horizontal contact surface of the upper sliding block 432 and the lower sliding block 433 is in engagement, the bottom end edge of the rotating disc 42 is provided with an electromagnetic coil 44, the upper part of the connecting sleeve 35 is rotationally matched with the lower sliding block 433 and is splined with the upper sliding block 432, when the electromagnetic coil 44 is energized, the upper sliding block 432 moves upward relative to the lower sliding block 433 and forms a transmission connection with the rotating disc 42.

[0081] The upper sliding block 432, the lower sliding block 433 and the overall material can be made of 3D printing material, the material of the rotating disc 42 is a material that can be attracted by a magnetic field, such as iron or other materials, or the bottom end of the rotating disc 42 is provided with an iron sheet that can be attracted by the electromagnetic coil 44, so as to guide the electromagnetic coil 44 and the upper sliding block 432 to move upward, thereby forming a connection.

[0082] When the horizontal contact surface of the upper sliding block 432 and the lower sliding block 433 is in engagement, the upper sliding block 432 cannot rotate relative to the lower sliding block 433, and then when the rotating disc 42 rotates, the eccentric shaft 421 can drive the upper sliding block 432 and the lower sliding block 433 to reciprocate in the front-rear direction.

[0083] When the electromagnetic coil 44 is energized, the upper sliding block 432 is attracted by the magnetic force, the upper sliding block 432 can move upward relative to the lower sliding block 433, thereby releasing the horizontal engagement force of the upper sliding block 432 and the lower sliding block 433, the upper sliding block 432 is frictionally matched with the rotating disc 42, the rotating disc 42 can input torque to the upper sliding block 432, thereby inputting torque to the suction rod 33 that is splined with the upper sliding block 432, and then adjusting the rotation angle of the suction rod 33.

[0084] The bottom of the sliding groove 431 is lower than the bottom end of the eccentric shaft 421, so that the top end of the upper sliding block 432 can be in contact with the bottom end of the rotating disc 42.

[0085] A resilient reset element (e.g. a spring) can be arranged between the rotating disc 42 and the upper sliding block 432, so that after the electromagnetic coil 44 is powered off, the upper sliding block 432 can be quickly reset relative to the lower sliding block 433.

[0086] Resilient centering elements (e.g. springs) are arranged between the front and rear sides (sides in the moving direction) of the lower sliding block 433 and the inner wall of the sealing shell 41, so as to ensure that the lower sliding block 433 is always in the centered position in the initial state, and to suppress the fluctuation of the lower sliding block 433 caused by the rotation of the upper sliding block 432.

[0087] The above embodiments only express one or several embodiments of the present application, and the description is more specific and detailed, but it cannot be understood as a limitation on the protection scope of the present application. It should be noted that for those skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are all within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the appended claims.

Claims

1. A high-precision eutectic die bonder comprising a worktable and an XY moving mechanism arranged on the top of the worktable, a slide carrier taking area, a die taking area, a chip taking area and a heating eutectic area are arranged on the worktable, characterized in that, The XY moving mechanism is provided with a coaxial visual positioning and taking and placing mechanism, which comprises a camera head with a downward camera head and three taking and placing mechanical arms uniformly distributed outside the camera head. The taking and placing mechanical arm is provided with a swing arm driving assembly for moving the suction rod from the outside of the camera head to the bottom of the camera head. The taking and placing mechanical arm further comprises a fixed plate and a movable plate extending in the longitudinal direction, the suction rod is arranged on the movable plate in the longitudinal direction, two groups of parallel connecting rods are arranged between the fixed plate and the movable plate, one of the connecting rods is provided with a driving arm rotatably connected thereto, the swing arm driving assembly is arranged on the fixed plate and rotatably connected with the driving arm, when the driving arm swings relative to the fixed plate, the suction rod moves from the outside of the camera head to the bottom of the camera head. The swing arm driving assembly comprises a driving block, a lead screw and a driving motor, the driving block is arranged on one side of the fixed plate in the longitudinal direction, the lead screw is rotatably arranged on the fixed plate, the lead screw extends in the longitudinal direction and is threadedly connected with the driving block after penetrating the driving block, one end of the driving arm is rotatably connected with the driving block, and the driving motor is arranged on the fixed plate.

2. The high-precision eutectic die bonder according to claim 1, wherein The workbench is provided with a visual detection table with a detection direction upward.

3. The high-precision eutectic die bonder according to claim 1, wherein The bottom end of the hollow shaft of the hollow step motor is provided with a connecting sleeve, the top end of the suction rod is formed with a spline connection with the lower part of the inner cavity of the connecting sleeve, and a lower elastic element is arranged between the top end of the suction rod and the hollow step motor.

4. The high-precision eutectic die bonder according to claim 3, wherein The inner wall of the connecting sleeve is provided with a lower fixed ring coaxial therewith, the lower fixed ring is splined with the suction rod, the top end of the suction rod is provided with an upper fixed ring, and the upper fixed ring is sealingly and slidingly fitted with the inner wall of the connecting sleeve.

5. A high precision eutectic die bonder according to claim 4, wherein The connecting sleeve is further provided with a piston arranged between the top end of the suction rod and the hollow shaft of the hollow step motor, and an upper elastic element is arranged between the piston and the hollow shaft of the hollow step motor.

6. The high-precision eutectic die bonder according to claim 3, wherein The bottom end of the movable plate is provided with a sealing shell, the bottom end of the hollow shaft of the hollow step motor is provided with a turntable, the turntable is provided with an eccentric shaft extending downward, the inner bottom of the sealing shell is provided with a sliding seat sealingly and slidingly fitted in the front-rear direction, the connecting sleeve is arranged in the sliding seat and penetrates the sliding seat at the top end, the top end of the sliding seat is provided with a sliding groove perpendicular to the sliding direction thereof, and the eccentric shaft is slidingly fitted with the sliding groove. When the hollow shaft of the hollow step motor rotates, the sliding seat can reciprocate in the front-rear direction.

7. A high precision eutectic die bonder according to claim 6, wherein The bottom end of the rotating disc is provided with a mounting groove extending along the radial direction thereof, the top end of the eccentric shaft is slidingly arranged in the mounting groove, and an adjusting pin in rotational connection with the mounting groove is further arranged in the mounting groove, the adjusting pin is in threaded connection with the eccentric shaft, the distance between the eccentric shaft and the hollow shaft of the hollow stepping motor is adjusted by rotating the eccentric shaft, and then the sliding stroke of the sliding seat is adjusted.

8. The high-precision eutectic die bonder according to claim 6, wherein The sliding seat comprises a lower sliding block and an upper sliding block, the lower sliding block is slidingly arranged below the inside of the sealing shell in the front-rear direction, the upper sliding block is slidingly arranged on the lower sliding block in the vertical direction, the horizontal contact surface of the upper sliding block and the lower sliding block is in engagement, the bottom end edge of the rotating disc is provided with an electromagnetic coil, the upper part of the connecting sleeve is in rotational cooperation with the lower sliding block and is in spline cooperation with the upper sliding block, and when the electromagnetic coil is electrified, the upper sliding block moves upward relative to the lower sliding block and is in transmission connection with the rotating disc.

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