Double-shaft integrated MIM waveguide optical accelerometer based on T-shaped sensitive beam structure

Abstract

The invention relates to the technical field of accelerometers, in particular to a biaxial integrated MIM waveguide optical accelerometer based on a T-shaped sensitive beam structure, which comprises a substrate, a metal filling layer is arranged on the upper surface of the substrate, and a first Z-shaped waveguide slot, a second Z-shaped waveguide slot, an x-axis sensitive structure and a y-axis sensitive structure are respectively hollowed out on the surface of the metal filling layer. The head end of the first Z-shaped waveguide slot is closed, the tail end of the first Z-shaped waveguide slot penetrates through the left side face of the metal filling layer, the head end of the second Z-shaped waveguide slot is closed, the tail end of the second Z-shaped waveguide slot penetrates through the right side face of the metal filling layer, the x-axis sensitive structure is located between the first Z-shaped waveguide slot and the second Z-shaped waveguide slot, and the y-axis sensitive structure is located on the front sides of the first Z-shaped waveguide slot and the second Z-shaped waveguide slot. The problems that a traditional electromechanical accelerometer is low in sensitivity, poor in anti-interference capacity and difficult to achieve miniaturization are solved, and the accelerometer is suitable for the fields of inertial navigation, structural health monitoring, industrial control, consumer electronics, seismic exploration, aerospace and the like.

Description

Technical Field

[0001] The present invention relates to the technical field of accelerometers, in particular to a dual-axis integrated MIM waveguide optical accelerometer based on a T-shaped sensitive beam structure. Background Art

[0002] Accelerometers, as core devices for measuring the acceleration of objects in motion, have extremely broad and important applications in inertial navigation, structural health monitoring, industrial control, consumer electronics (such as smartphones and game controllers), earthquake detection, aerospace, and other fields. However, in practical applications, traditional electromechanical accelerometers (such as piezoresistive and capacitive) generally suffer from low sensitivity, poor anti-interference capabilities, and difficulty in miniaturization due to their inherent structural limitations. Therefore, traditional electromechanical accelerometers exhibit significant limitations when faced with modern application requirements for high precision, electromagnetic interference resistance, extreme environments (such as high temperatures and strong radiation), and miniaturization and integration. Therefore, it is necessary to invent a dual-axis integrated MIM waveguide optical accelerometer based on a T-shaped sensitive beam structure to address the low sensitivity, poor anti-interference capabilities, and difficulty in miniaturization of traditional electromechanical accelerometers. Summary of the Invention

[0003] In order to solve the problems of low sensitivity, poor anti-interference ability and difficulty in miniaturization of traditional electromechanical accelerometers, the present invention provides a dual-axis integrated MIM waveguide optical accelerometer based on a T-shaped sensitive beam structure.

[0004] The present invention is achieved by adopting the following technical solutions: A dual-axis integrated MIM waveguide optical accelerometer based on a T-shaped sensitive beam structure comprises a substrate; a metal filling layer is provided on the upper surface of the substrate; The surface of the metal filling layer is hollowed out to form a first Z-shaped waveguide gap, a second Z-shaped waveguide gap, an x-axis sensitive structure, and a y-axis sensitive structure; The first Z-shaped waveguide slot has a closed head end and a tail end that passes through the left side of the metal filling layer; the second Z-shaped waveguide slot has a closed head end and a tail end that passes through the right side of the metal filling layer; the head end of the first Z-shaped waveguide slot and the head end of the second Z-shaped waveguide slot are opposite each other on the left and right; The x-axis sensitive structure is located between the first Z-shaped waveguide slot and the second Z-shaped waveguide slot; and the y-axis sensitive structure is located in front of the first Z-shaped waveguide slot and the second Z-shaped waveguide slot.

[0005] Furthermore, the x-axis sensitive structure includes a first straight waveguide slot, a first square waveguide slot, a first short arc waveguide slot, a second short arc waveguide slot, and a long arc waveguide slot hollowed out on the surface of the metal filling layer; The first straight waveguide slot is arranged longitudinally, and both ends of the first straight waveguide slot are closed; The first square-waveform waveguide slot is arranged side by side on the right side of the first straight waveguide slot, and both ends of the first square-waveform waveguide slot are closed; a first T-shaped sensitive beam is formed between the first square-waveform waveguide slot and the first straight waveguide slot, and a distance is left between the lower surface of the first T-shaped sensitive beam and the upper surface of the substrate; The leading end of the first short arc waveguide slot and the leading end of the second short arc waveguide slot are both closed, and the leading end of the first short arc waveguide slot and the leading end of the second short arc waveguide slot are symmetrically arranged on both sides of the U-shaped section of the first square-waveform waveguide slot; the trailing end of the first short arc waveguide slot and the trailing end of the second short arc waveguide slot are respectively connected to the right sides of the two straight sections of the first square-waveform waveguide slot; a first fan-shaped block is formed between the first short arc waveguide slot and the first square-waveform waveguide slot; a second fan-shaped block is formed between the second short arc waveguide slot and the first square-waveform waveguide slot; Both ends of the long arc waveguide slot are connected to the left side of the first straight waveguide slot; and an arched block is formed between the long arc waveguide slot and the first straight waveguide slot.

[0006] Furthermore, the y-axis sensitive structure includes a second straight waveguide slot, a second square-wave waveguide slot, a first L-shaped waveguide slot, a second L-shaped waveguide slot, and a U-shaped waveguide slot hollowed out on the surface of the metal filling layer; The second straight waveguide slot is arranged in a transverse direction, and both ends of the second straight waveguide slot are closed; The second square-wave waveguide slot is arranged side by side in front of the second straight waveguide slot, and both ends of the second square-wave waveguide slot are closed; a second T-shaped sensitive beam is formed between the second square-wave waveguide slot and the second straight waveguide slot, and a distance is left between the lower surface of the second T-shaped sensitive beam and the upper surface of the substrate; The leading end of the first L-shaped waveguide slot and the leading end of the second L-shaped waveguide slot are both closed, and the leading end of the first L-shaped waveguide slot and the leading end of the second L-shaped waveguide slot are symmetrically arranged on both sides of the U-shaped section of the second square-waveform waveguide slot; the trailing end of the first L-shaped waveguide slot and the trailing end of the second L-shaped waveguide slot are respectively connected to the front sides of the two straight sections of the second square-waveform waveguide slot; a first small rectangular block is formed between the first L-shaped waveguide slot and the second square-waveform waveguide slot; and a second small rectangular block is formed between the second L-shaped waveguide slot and the second square-waveform waveguide slot. Both ends of the U-shaped waveguide slot are connected to the rear side of the second straight waveguide slot; a large rectangular block is formed between the U-shaped waveguide slot and the second straight waveguide slot.

[0007] Furthermore, the substrate is a silicon substrate; and the metal filling layer is a silver filling layer.

[0008] Compared with traditional electromechanical accelerometers, the dual-axis integrated MIM waveguide optical accelerometer based on a T-shaped sensitive beam structure described in the present invention achieves the measurement of x-axis and y-axis acceleration by adopting a brand-new structure. It utilizes the unique subwavelength confinement, local field enhancement characteristics and compact size advantages of the MIM (Metal-Insulator-Metal) waveguide structure, and has the advantages of high sensitivity, strong anti-interference ability, and easy miniaturization. Therefore, it can well meet the modern application requirements of high precision, electromagnetic interference resistance, extreme environment, miniaturization and integration.

[0009] The present invention effectively solves the problems of low sensitivity, poor anti-interference ability and difficulty in miniaturization of traditional electromechanical accelerometers, and is suitable for inertial navigation, structural health monitoring, industrial control, consumer electronics, earthquake detection, aerospace and other fields. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention.

[0011] Figure 2 It is a schematic diagram of the three-dimensional structure of the metal filling layer in the present invention.

[0012] Figure 3 It is a schematic diagram of the planar structure of the metal filling layer in the present invention.

[0013] In the figure: 1-substrate, 201-first Z-shaped waveguide slot, 202-second Z-shaped waveguide slot, 301-first straight waveguide slot, 302-first square-waveform waveguide slot, 303-first short-arc waveguide slot, 304-second short-arc waveguide slot, 305-long-arc waveguide slot, 306-first T-shaped sensitive beam, 307-first fan-shaped block, 308-second fan-shaped block, 309-arch-shaped block, 401-second straight waveguide slot, 402-second square-waveform waveguide slot, 403-first L-shaped waveguide slot, 404-second L-shaped waveguide slot, 405-U-shaped waveguide slot, 406-second T-shaped sensitive beam, 407-first small rectangular block, 408-second small rectangular block, 409-large rectangular block. DETAILED DESCRIPTION

[0014] A dual-axis integrated MIM waveguide optical accelerometer based on a T-shaped sensitive beam structure comprises a substrate 1; a metal filling layer is provided on the upper surface of the substrate 1; The surface of the metal filling layer is hollowed out to form a first Z-shaped waveguide slot 201, a second Z-shaped waveguide slot 202, an x-axis sensitive structure, and a y-axis sensitive structure; The first Z-shaped waveguide slot 201 has a closed head end and a tail end that passes through the left side of the metal filling layer; the second Z-shaped waveguide slot 202 has a closed head end and a tail end that passes through the right side of the metal filling layer; the head end of the first Z-shaped waveguide slot 201 and the head end of the second Z-shaped waveguide slot 202 are opposite to each other on the left and right sides; The x-axis sensitive structure is located between the first Z-shaped waveguide slot 201 and the second Z-shaped waveguide slot 202 ; the y-axis sensitive structure is located in front of the first Z-shaped waveguide slot 201 and the second Z-shaped waveguide slot 202 .

[0015] During operation, the tail end of the first Z-shaped waveguide slot 201 is connected to a light source, and the tail end of the second Z-shaped waveguide slot 202 is connected to a photodetector and a host computer.

[0016] The specific operating process is as follows: A light source outputs a light wave, which excites SPPs (surface plasmon polaritons) on the side of the first Z-shaped waveguide slot 201. The SPPs propagate along the sides of the first Z-shaped waveguide slot 201 and the sides of the second Z-shaped waveguide slot 202, respectively, to the photodetector. The photodetector converts the SPPs into electrical signals, which are then transmitted to a host computer and converted into a transmission spectrum. During this propagation process, some SPPs couple into the x- and y-axis sensitive structures through the corners of the first Z-shaped waveguide slot 201, generating SPR (surface plasmon resonance) within these structures. The resonant energy generated by the SPR couples into the second Z-shaped waveguide slot 202 through the corners of the second Z-shaped waveguide slot 202, resulting in a transmission peak in the transmission spectrum.

[0017] When there is no acceleration input, neither the x-axis sensitive structure nor the y-axis sensitive structure deforms, and the transmission peak does not shift. In this case, the output of the present invention is zero. When there is acceleration input, the x-axis sensitive structure and the y-axis sensitive structure deform under the action of the acceleration, causing the transmission peak to shift, and the shift is related to the input acceleration. At this point, the host computer calculates the input acceleration in real time based on the transmission peak shift.

[0018] The x-axis sensitive structure includes a first straight waveguide slot 301, a first square waveguide slot 302, a first short arc waveguide slot 303, a second short arc waveguide slot 304, and a long arc waveguide slot 305, which are hollowed out on the surface of the metal filling layer. The first straight waveguide slot 301 is arranged longitudinally, and both ends of the first straight waveguide slot 301 are closed; A first square-waveform waveguide slot 302 is disposed side by side to the right of the first straight waveguide slot 301, with both ends of the first square-waveform waveguide slot 302 being closed. A first T-shaped sensitive beam 306 is formed between the first square-waveform waveguide slot 302 and the first straight waveguide slot 301, with a distance between the lower surface of the first T-shaped sensitive beam 306 and the upper surface of the substrate 1. The leading end of the first short arc waveguide slot 303 and the leading end of the second short arc waveguide slot 304 are both closed, and the leading end of the first short arc waveguide slot 303 and the leading end of the second short arc waveguide slot 304 are symmetrically arranged on both sides of the U-shaped section of the first square-waveform waveguide slot 302; the trailing end of the first short arc waveguide slot 303 and the trailing end of the second short arc waveguide slot 304 are respectively connected to the right sides of the two straight sections of the first square-waveform waveguide slot 302; a first fan-shaped block 307 is formed between the first short arc waveguide slot 303 and the first square-waveform waveguide slot 302; and a second fan-shaped block 308 is formed between the second short arc waveguide slot 304 and the first square-waveform waveguide slot 302. Both ends of the long arc waveguide slot 305 are connected to the left side of the first straight waveguide slot 301 ; an arched block 309 is formed between the long arc waveguide slot 305 and the first straight waveguide slot 301 .

[0019] During operation, when there is no acceleration input in the x-axis direction, first T-shaped sensitive beam 306 does not deform, and the corresponding transmission peak does not shift. At this point, the output of the present invention in the x-axis direction is zero. When there is acceleration input in the x-axis direction, first T-shaped sensitive beam 306 bends and deforms under the action of the acceleration, causing the corresponding transmission peak to shift, and the amount of the shift is related to the acceleration input in the x-axis direction. At this point, the host computer calculates the acceleration input in the x-axis direction in real time based on the transmission peak shift.

[0020] The y-axis sensitive structure includes a second straight waveguide slot 401, a second square-wave waveguide slot 402, a first L-shaped waveguide slot 403, a second L-shaped waveguide slot 404, and a U-shaped waveguide slot 405, which are hollowed out on the surface of the metal filling layer. The second straight waveguide slot 401 is arranged in a transverse direction, and both ends of the second straight waveguide slot 401 are closed; The second square-wave waveguide slot 402 is arranged side by side in front of the second straight waveguide slot 401, and both ends of the second square-wave waveguide slot 402 are closed. A second T-shaped sensitive beam 406 is formed between the second square-wave waveguide slot 402 and the second straight waveguide slot 401, and a distance is left between the lower surface of the second T-shaped sensitive beam 406 and the upper surface of the substrate 1. The leading end of the first L-shaped waveguide slot 403 and the leading end of the second L-shaped waveguide slot 404 are both closed, and the leading ends of the first L-shaped waveguide slot 403 and the leading ends of the second L-shaped waveguide slot 404 are symmetrically arranged on both sides of the U-shaped section of the second square-waveform waveguide slot 402. The trailing ends of the first L-shaped waveguide slot 403 and the trailing ends of the second L-shaped waveguide slot 404 are respectively connected to the front sides of the two straight sections of the second square-waveform waveguide slot 402. A first small rectangular block 407 is formed between the first L-shaped waveguide slot 403 and the second square-waveform waveguide slot 402; and a second small rectangular block 408 is formed between the second L-shaped waveguide slot 404 and the second square-waveform waveguide slot 402. Both ends of the U-shaped waveguide slot 405 are connected to the rear side of the second straight waveguide slot 401 ; a large rectangular block 409 is formed between the U-shaped waveguide slot 405 and the second straight waveguide slot 401 .

[0021] During operation, when there is no acceleration input in the y-axis direction, second T-shaped sensitive beam 406 does not deform, and the corresponding transmission peak does not shift. At this point, the output of the present invention in the y-axis direction is zero. When there is acceleration input in the y-axis direction, second T-shaped sensitive beam 406 bends and deforms under the action of the acceleration, causing the corresponding transmission peak to shift, and the amount of the shift is related to the acceleration input in the y-axis direction. At this point, the host computer calculates the acceleration input in the y-axis direction in real time based on the transmission peak shift.

[0022] The substrate 1 is a silicon substrate; the metal filling layer is a silver filling layer.

[0023] Although specific embodiments of the present invention have been described above, those skilled in the art will appreciate that these are merely illustrative and that the scope of the present invention is defined by the appended claims. Those skilled in the art may make various changes or modifications to these embodiments without departing from the principles and essence of the present invention, and such changes and modifications are intended to fall within the scope of the present invention.

Claims

1. A dual-axis integrated MIM waveguide optical accelerometer based on a T-shaped sensitive beam structure, characterized by: It comprises a substrate (1); a metal filling layer is provided on the upper surface of the substrate (1); The surface of the metal filling layer is hollowed out to provide a first Z-shaped waveguide slot (201), a second Z-shaped waveguide slot (202), an x-axis sensitive structure, and a y-axis sensitive structure; The first Z-shaped waveguide slot (201) has a closed head end and a tail end that passes through the left side of the metal filling layer; the second Z-shaped waveguide slot (202) has a closed head end and a tail end that passes through the right side of the metal filling layer; the head end of the first Z-shaped waveguide slot (201) and the head end of the second Z-shaped waveguide slot (202) are opposite to each other on the left and right; The x-axis sensitive structure is located between the first Z-shaped waveguide slot (201) and the second Z-shaped waveguide slot (202); and the y-axis sensitive structure is located in front of the first Z-shaped waveguide slot (201) and the second Z-shaped waveguide slot (202).

2. The dual-axis integrated MIM waveguide optical accelerometer based on a T-shaped sensitive beam structure according to claim 1, characterized in that: The x-axis sensitive structure comprises a first straight waveguide slot (301) hollowed out on the surface of the metal filling layer, a first square waveguide slot (302), a first short arc waveguide slot (303), a second short arc waveguide slot (304), and a long arc waveguide slot (305); The first straight waveguide slot (301) is arranged longitudinally, and both ends of the first straight waveguide slot (301) are closed; The first square waveguide slot (302) is arranged side by side on the right side of the first straight waveguide slot (301), and both ends of the first square waveguide slot (302) are closed; a first T-shaped sensitive beam (306) is formed between the first square waveguide slot (302) and the first straight waveguide slot (301), and a distance is left between the lower surface of the first T-shaped sensitive beam (306) and the upper surface of the substrate (1); The head end of the first short arc waveguide slot (303) and the head end of the second short arc waveguide slot (304) are both closed, and the head end of the first short arc waveguide slot (303) and the head end of the second short arc waveguide slot (304) are symmetrically arranged on both sides of the U-shaped section of the first square waveguide slot (302); the tail end of the first short arc waveguide slot (303) and the tail end of the second short arc waveguide slot (304) are respectively connected to the right sides of the two straight sections of the first square waveguide slot (302); a first fan-shaped block (307) is formed between the first short arc waveguide slot (303) and the first square waveguide slot (302); and a second fan-shaped block (308) is formed between the second short arc waveguide slot (304) and the first square waveguide slot (302); Both ends of the long arc waveguide slot (305) are connected to the left side of the first straight waveguide slot (301); and an arched block (309) is formed between the long arc waveguide slot (305) and the first straight waveguide slot (301).

3. The dual-axis integrated MIM waveguide optical accelerometer based on a T-shaped sensitive beam structure according to claim 1, characterized in that: The y-axis sensitive structure comprises a second straight waveguide slot (401) hollowed out and opened on the surface of the metal filling layer, a second square-wave waveguide slot (402), a first L-shaped waveguide slot (403), a second L-shaped waveguide slot (404), and a U-shaped waveguide slot (405); The second straight waveguide slot (401) is arranged in a transverse direction, and both ends of the second straight waveguide slot (401) are closed; The second square-wave waveguide slot (402) is arranged side by side in front of the second straight waveguide slot (401), and both ends of the second square-wave waveguide slot (402) are closed; a second T-shaped sensitive beam (406) is formed between the second square-wave waveguide slot (402) and the second straight waveguide slot (401), and a distance is left between the lower surface of the second T-shaped sensitive beam (406) and the upper surface of the substrate (1); The head end of the first L-shaped waveguide slot (403) and the head end of the second L-shaped waveguide slot (404) are both closed, and the head end of the first L-shaped waveguide slot (403) and the head end of the second L-shaped waveguide slot (404) are symmetrically arranged on both sides of the U-shaped section of the second square-waveform waveguide slot (402); the tail end of the first L-shaped waveguide slot (403) and the tail end of the second L-shaped waveguide slot (404) are respectively connected to the front sides of the two straight sections of the second square-waveform waveguide slot (402); a first small rectangular block (407) is formed between the first L-shaped waveguide slot (403) and the second square-waveform waveguide slot (402); and a second small rectangular block (408) is formed between the second L-shaped waveguide slot (404) and the second square-waveform waveguide slot (402); Both ends of the U-shaped waveguide slot (405) are connected to the rear side of the second straight waveguide slot (401); a large rectangular block (409) is formed between the U-shaped waveguide slot (405) and the second straight waveguide slot (401).

4. A dual-axis integrated MIM waveguide optical accelerometer based on a T-shaped sensitive beam structure according to claim 1, 2 or 3, characterized in that: The substrate (1) is a silicon substrate; the metal filling layer is a silver filling layer.

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