Magnetic assembly for sputter ion pump
Through the design of magnetic components, the position of the cathode and magnet is fixed by magnetic force, which solves the problems of complex SIP assembly and inconvenient maintenance, and achieves the effect of simplifying assembly and reducing parts in a vacuum environment.
CN120731480APending Publication Date: 2025-09-30EDWARDS VACUUM LLC
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Patent Information
- Application Number
- CN202380094542.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2023-02-22
- Filing Date
- 2023-09-06
- Publication Date
- 2025-09-30
AI Technical Summary
Technical Problem
Existing sputtering ion pumps (SIPs) require additional steps and fixtures in a vacuum environment during assembly and maintenance, especially the inconvenience of replacing the cathode plate.
Method used
A magnetic assembly design is adopted, in which the cathode element is connected to the pole piece and the bracket element by the magnetic force of the magnet, and the position of the cathode and the magnet is fixed by magnetic force, avoiding additional fasteners and fixtures in the vacuum.
Benefits of technology
The SIP assembly process is simplified, the number of parts in the vacuum environment is reduced, and the fixing reliability and disassembly convenience of the cathode component are improved.
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Figure CN120731480A_ABST
Abstract
A magnetic assembly for a sputter ion pump (SIP), comprising a pole shoe, at least one magnet connected to the pole shoe by a magnetic force of the at least one magnet, at least one cathode element connected to the at least one magnet, and at least one carrier element connected to the at least one magnet by a magnetic force of the at least one magnet, the at least one carrier element fixes the position of the at least one cathode element.
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