MEMS core multi-station integrated test tool

Abstract

The application discloses a kind of MEMS core multi-station integrated test tool, belong to MEMS core test technical field;Solve the problem of low efficiency of existing test mode testing;Specifically including general test platform and standard set flow frame module;General test platform includes pillar assembly, and the pillar assembly is provided with multiple layers of platform, and each layer of platform is installed with a standard set flow frame module;The end of platform is equipped with connector socket;Standard set flow frame module includes two baffle plates, one of which is equipped with connector plug, and the connector plug is inserted with connector socket;Square vent column is connected between the two baffle plates;Product connecting column is provided on the square vent column.In the application, the standard set flow frame module is designed in a modular way, the number of standard set flow frame modules can be increased or decreased according to the number of test products, the versatility of the integrated test tool is improved, the overall structure is efficiently integrated, the operation is convenient, and the test efficiency is greatly improved.

Description

Technical Field

[0001] This invention relates to the field of MEMS chip testing technology, and in particular to a multi-station integrated testing fixture for MEMS chips. Background Technology

[0002] MEMS chips are the core sensors of microelectromechanical systems (MEMS) sensors, responsible for converting physical changes into electrical signals. Their structural integrity and airtightness directly affect the performance and safety of aircraft. To ensure that MEMS chips can output stable and accurate electrical signals, airtightness tests must be conducted on them in high and low temperature environments (-55℃ to +175℃) to verify the impact of extreme temperature environments on material compatibility, thermomechanical stability, sensitivity, and durability. At the same time, the temperature compensation algorithm is optimized through test data to improve accuracy and ensure the reliability, stability, and adaptability of MEMS chips.

[0003] In existing technologies, MEMS chip testing involves mounting the MEMS chip on a testing fixture, placing the fixture inside a high-low temperature chamber, and then conducting airtightness tests at different temperature points and pressure values. This process is lengthy and limits the number of tests that can be performed. Furthermore, because each MEMS chip requires multiple signal lines to be led out of the chamber for connection, the large number of signal lines makes them difficult to distinguish, slows wiring speed, and increases the risk of wire detachment, hindering operation. To meet the needs of mass production of MEMS chips and improve production efficiency, the structure of the multi-station integrated testing fixture needs to be improved. Summary of the Invention

[0004] To address the shortcomings of existing technologies, this invention provides a multi-station integrated testing fixture for MEMS chips, which solves the problem of low testing efficiency in existing MEMS chip testing methods.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0006] A multi-station integrated testing fixture for MEMS chips includes a general-purpose testing platform and several standard current collector modules mounted on the platform. The general-purpose testing platform includes a support assembly with several platform layers, each with a corresponding standard current collector module. Connector sockets are provided at the ends of each platform. Each standard current collector module includes two baffles, one of which has a connector plug that engages with the connector socket. Two square ventilation columns are located between the two baffles. Each square ventilation column has several product connection posts. A wiring device is also provided between the two baffles.

[0007] In this design, the universal test platform is fixed inside the high and low temperature chamber during testing. Cables on the connector sockets are led out through the cable guide holes on the side wall of the chamber and connected to the test equipment. Products are connected to the product connector posts, with multiple leads on each product, which are connected to the wiring device. After the products are installed, each standard manifold module is installed on each platform, and the connector plugs are inserted into the connector sockets to achieve signal communication between them. This design allows multiple products to be installed on each standard manifold module for testing, and multiple standard manifold modules can be installed on the universal test platform. Therefore, a large number of products can be tested in the same batch, resulting in high testing efficiency and suitability for mass production.

[0008] Furthermore, the support assembly includes four fixed supports arranged in a rectangular shape; each platform has four mounting holes around its perimeter, and the four fixed supports pass through the four mounting holes to connect to the platform.

[0009] Several platforms are also connected to ventilation guide columns and guide columns; the ventilation guide columns and guide columns are arranged to pass through the square through slots on the several platforms in sequence; the ventilation guide columns are connected to two square ventilation columns; the ventilation guide columns and guide columns are located on both sides of the connector socket.

[0010] In this design, four fixed support pillars provide support for several platform layers; ventilation guide pillars pass through several platform layers in sequence and are connected to the square ventilation pillars of each standard manifold module, thus achieving air path connection for all standard manifold modules.

[0011] Furthermore, two limiting blocks are respectively provided at both ends of the ventilation guide column; the limiting block at the lower end of the ventilation guide column is supported on the top of the square through groove of the lowest platform used for installing the ventilation guide column, and the limiting block at the upper end of the ventilation guide column is supported on the bottom of the square through groove of the highest platform used for installing the ventilation guide column.

[0012] Two limiting blocks are also provided at both ends of the guide post; the limiting block at the lower end of the guide post is supported on the top of the square through slot of the lowest platform for installing the guide post, and the limiting block at the upper end of the guide post is supported on the bottom of the square through slot of the highest platform for installing the guide post.

[0013] Ventilation guide columns have vents spaced at equal intervals, corresponding to the number of platform layers. Guide columns also have guide holes spaced at equal intervals, corresponding to the number of platform layers. One end of one square ventilation column is connected to a ventilation hole via a guide ventilation nozzle, while one end of the other square ventilation column is sealed by a conical guide rod, the end of which is fixed inside a guide hole. The two square ventilation columns are connected by an air guide column. The ends of the two square ventilation columns furthest from the ventilation guide column are threaded together with air column plugs for sealing.

[0014] In this design, during testing, gas enters one square ventilation column through a guide column, and then flows through another square ventilation column, allowing for testing of products on both columns. The conical guide rod design ensures that when the square ventilation column connected to the guide nozzle moves towards the ventilation hole, the conical guide rod at the end of the other square ventilation column embeds into the guide hole, providing guidance and ensuring precise insertion of the guide nozzle into the ventilation hole.

[0015] Furthermore, a plug fixing threaded hole is provided on the side of the vent guide column opposite to the vent hole, and the plug fixing threaded hole corresponds one-to-one with the vent hole; a vent plug is installed in the plug fixing threaded hole, and an O-ring is provided on the vent plug.

[0016] In this solution, when the vent plug is tightened, the O-ring on the vent plug seals the vent hole. When using a single-layer platform or two-layer platforms, the remaining vent holes can be sealed by using the vent plug and O-ring, which facilitates testing when the number of products is small.

[0017] Furthermore, a U-shaped groove is provided at the end of the platform, and a U-shaped socket connection plate is installed inside the U-shaped groove by screws, with the connector socket installed inside the socket connection plate;

[0018] The platform has two rows of threaded holes on each side, and two guide blocks are installed on the two rows of threaded holes by screws. Two square vent columns are restricted between the two guide blocks. A positioning threaded hole is opened at the end of the platform away from the socket connection plate, and the locking screw at the end of the standard collector module is threaded to the positioning threaded hole.

[0019] In this solution, when installing the standard current collector module, the module is placed on the platform and slid towards the connector socket, allowing the connector plug to be inserted into the socket. The guide blocks ensure accurate sliding direction of the module between them, and the tapered guide rod and guide hole limit the connector plug to precisely engage with the socket. After insertion, the module is secured to the positioning threaded hole with locking screws to ensure reliability during use.

[0020] Furthermore, a rectangular through hole is formed in the middle of the two baffles, threaded holes are formed around the rectangular through hole, and mounting holes are formed at the bottom of the rectangular through hole;

[0021] The connector plug is fixed in the threaded hole of one of the baffles by a screw; the locking screw passes through the mounting hole of the other baffle and is threaded into the positioning threaded hole.

[0022] Furthermore, the wiring device includes a wire guide plate, with both ends of the wire guide plate being mounted on the top of two baffles by screws; an upper insulating plate and a lower insulating plate are respectively provided on the top and bottom of the wire guide plate, and mounting bolts are connected to mounting nuts by passing through mounting through holes in the upper insulating plate, the wire guide plate and the lower insulating plate in sequence; two rows of terminals are mounted on the wire guide plate by wiring screws, and the wiring screws are connected to the terminals by thread by passing through holes in the lower insulating plate, the wire guide plate and the upper insulating plate in sequence.

[0023] In this solution, after the product is connected to the product connection post, the product's lead wires are connected to the corresponding terminals. The holes on the lead wire guide plate for the wiring screws to pass through are larger than those on the upper and lower insulation plates. Therefore, the wiring screws do not contact the lead wire guide plate when passing through it, which provides good insulation and ensures the accuracy of the output signal during the test.

[0024] Furthermore, a spring and a spring washer are fitted onto the wiring screw, with the spring washer located below the spring. The wiring screw holds the spring and spring washer against the bottom surface of the lower insulating plate.

[0025] The wire guide plate bends downward on both sides to extend out side edges, and a package plate is installed between the two side edges by screws. A wire harness channel is formed between the wire guide plate and the package plate. One end of the wire harness is connected to a spring, and the other end of the wire harness is led out from the wire harness channel and connected to the connector socket.

[0026] In this solution, the wiring harness channel is isolated by the encapsulation board to prevent the wiring harness from being interfered with by the outside world. At the same time, the wiring harness is made more organized, avoiding the phenomenon of messy and difficult-to-manage wiring harness.

[0027] Furthermore, the upper surface of the square vent column is provided with several threaded mounting holes, and the product connecting column is threaded into the threaded mounting holes; the top of the product connecting column is also provided with a product plug, and a sealing ring is provided on the product plug.

[0028] In this solution, the sealing structure of the product plug is consistent with that of the product. When conducting preliminary tests or when the number of product tests is insufficient, the product plug can be installed on the product connecting column to ensure airtightness during the testing process.

[0029] Furthermore, an adapter is provided at the top of the ventilation guide column.

[0030] The beneficial effects of this invention are:

[0031] The MEMS chip multi-station integrated testing fixture provided by this invention includes several standard current collector modules installed on a general-purpose testing platform. These standard current collector modules employ a modular design, allowing the number of modules to be increased or decreased depending on the number of products being tested, thus improving the versatility of the integrated testing fixture and making testing more flexible. The vent holes on the vent guide column and the guide holes on the guide column are at the same height, and both are used to connect two square vent columns, enabling gas to be introduced into two square vent columns using only one vent guide column.

[0032] Two guide blocks are installed on the platform, with a conical guide rod connected to the end of one of the square venting columns. This ensures that the connector plug can accurately engage with the connector socket when the standard manifold module moves along the inner walls of the two guide blocks. Simultaneously, the guide venting nozzle precisely aligns with the venting hole on the venting guide column, resulting in highly integrated and convenient operation, significantly improving testing efficiency. The entire gas path is sealed, allowing for testing at different pressures and providing a wide testing range. Currently, high and low temperature testing at pressures from 0 to 6 MPa has been achieved.

[0033] The standard current collector module structure is applicable to testing other types of silicon piezoresistive cores. Simply changing the product mounting interface or adapter method allows for testing of other products. The universal test platform design provides a design approach for similar tests, and the number of layers can be increased by extending the structure according to the test space size, thereby increasing the number of standard current collector modules and the number of tests. Attached Figure Description

[0034] Figure 1 This is a schematic diagram of the structure of a multi-station integrated testing fixture for MEMS chips according to the present invention;

[0035] Figure 2 This is a perspective view of the general testing platform in this invention;

[0036] Figure 3 This is the front view of the general testing platform in this invention;

[0037] Figure 4 This is a perspective view of the standard collector module in this invention;

[0038] Figure 5 This is a top view of the standard collector module in this invention;

[0039] Figure 6 This is a schematic diagram of the ventilation guide column in this invention;

[0040] Figure 7 This is a schematic diagram of the guide post structure in this invention;

[0041] Figure 8This is a schematic diagram of the vent plug in this invention;

[0042] Figure 9 This is a top view of the standard collector module in this invention;

[0043] Figure 10 for Figure 9 Cross-sectional view of section AA;

[0044] Figure 11 This is a schematic diagram of the structure of the spring and the spring pad in this invention;

[0045] Figure 12 This is a schematic diagram of the structure of the MEMS chip multi-station integrated testing fixture fixed in the high and low temperature chamber in this invention.

[0046] Figure label:

[0047] 1. General testing platform; 11. Support assembly; 111. Fixed support; 112. Ventilation guide column; 113. Guide column; 114. Limiting block; 115. Guide hole; 116. Air column plug; 117. Ventilation plug; 118. O-ring seal; 119. Adapter; 12. Platform; 13. Connector socket; 2. Standard manifold module; 21. Baffle; 22. Square vent column; 221. Guide vent nozzle; 222. Conical guide rod; 223. Guide... 23. Air column; 24. Connector plug; 25. Wiring device; 26. Wire guide plate; 27. Encapsulation plate; 28. Upper insulating plate; 29. ​​Lower insulating plate; 20. Terminal post; 20. Terminal screw; 21. Spring; 22. Spring washer; 23. Wire harness channel; 244. Mounting bolt; 25. Product connecting post; 26. Product plug; 27. Sealing ring; 28. Socket connecting plate; 29. ​​Guide block; 20. Positioning threaded hole; 20. Locking screw; Detailed Implementation

[0048] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. Specific embodiments of the present invention are described below to facilitate understanding by those skilled in the art. However, it should be understood that the present invention is not limited to the scope of the specific embodiments. For those skilled in the art, various modifications are obvious as long as they fall within the spirit and scope of the present invention as defined and determined by the appended claims. All inventions utilizing the concept of the present invention are protected.

[0049] like Figure 1As shown, this embodiment provides a MEMS chip multi-station integrated test fixture. This MEMS chip multi-station integrated test fixture has strong design versatility, is easy to operate, and can improve the testing efficiency of products. Specifically, it includes: a general test platform 1 and several standard current collector modules 2 installed on the general test platform 1.

[0050] The general-purpose test platform 1 includes a support assembly 11, a platform 12, and a connector socket 13; such as Figure 2 and Figure 3 As shown, the support assembly 11 is provided with several layers of platforms 12, and a standard collector module 2 is installed on each layer of platform 12; each end of the platform 12 is provided with a connector socket 13.

[0051] The standard manifold module 2 includes two baffles 21, a connector plug 23, two square vent columns 22, a wiring device 24, and a product connection post 25; such as Figure 4 and Figure 5 As shown, one of the baffles 21 is equipped with a connector plug 23, which is plugged into the connector socket 13; there are two square vent columns 22 between the two baffles 21, which are connected by a guide column 223; each square vent column 22 is equipped with several product connection columns 25; a wiring device 24 is also provided between the two baffles 21.

[0052] During testing, the universal test platform 1 is fixed inside the high and low temperature chamber. The cables on the connector socket 13 are led out through the wire passage holes on the side wall of the high and low temperature chamber and connected to the test equipment. The products are connected to the product connection posts 25. Each product has multiple leads, which are connected to the wiring device 24. After the products are installed, each standard current collector module 2 is installed on each platform 12. The installation allows the connector plug 23 to be inserted into the connector socket 13, thus enabling signal communication between the connector plug 23 and the connector socket 13. This design allows multiple products to be installed on each standard current collector module 2 for testing. Since multiple standard current collector modules 2 are installed on the universal test platform 1, more products can be tested in the same batch, resulting in high testing efficiency and suitability for mass production.

[0053] The support assembly 11 includes four fixed supports 111, ventilation guide columns 112, and guide columns 113. The four fixed supports 111 are arranged in a rectangular pattern. Each platform 12 has four mounting holes around its perimeter, and the four fixed supports 111 pass through these holes to connect to the platform 12, providing support for the multiple platforms 12. Ventilation guide columns 112 and guide columns 113 are also connected to the multiple platforms 12. The ventilation guide columns 112 and guide columns 113 are sequentially arranged through square through slots on the multiple platforms 12. The ventilation guide columns 112 communicate with two square ventilation columns 22. The ventilation guide columns 112 and guide columns 113 are located on both sides of the connector socket 13. An adapter 119 is provided at the top of the ventilation guide column 112.

[0054] like Figure 6 As shown, two limiting blocks 114 are respectively provided at both ends of the ventilation guide column 112; the limiting block 114 at the lower end of the ventilation guide column 112 is supported on the top of the square through slot of the lowest platform 12 for installing the ventilation guide column 112, and the limiting block 114 at the upper end of the ventilation guide column 112 is supported on the bottom of the square through slot of the uppermost platform 12 for installing the ventilation guide column 112. Figure 7 As shown, two limiting blocks 114 are also provided at both ends of the guide post 113; the limiting block 114 at the lower end of the guide post 113 is supported on the top of the square through slot of the lowest platform 12 for installing the guide post 113, and the limiting block 114 at the upper end of the guide post 113 is supported on the bottom of the square through slot of the uppermost platform 12 for installing the guide post 113.

[0055] Ventilation guide columns 112 have vents spaced at equal intervals, the same number as the number of layers in platform 12. Guide columns 113 have guide holes 115 spaced at equal intervals, the same number as the number of layers in platform 12. One end of one square ventilation column 22 is connected to a ventilation hole via a guide ventilation nozzle 221, and one end of the other square ventilation column 22 is sealed by a conical guide rod 222, the end of which is fixed inside the guide hole 115. The ends of the two square ventilation columns 22 furthest from the ventilation guide column 112 are threadedly connected to air column plugs 116 for sealing. During testing, gas enters one square ventilation column 22 through the ventilation guide column 112, and then enters the other square ventilation column 22 through the air guide column 223, thus enabling testing of the product on the two square ventilation columns 22. The design of the conical guide rod 222 is such that when the square vent column 22 connected to the guide vent nozzle 221 moves to one side of the vent hole, the conical guide rod 222 at the end of the other square vent column 22 is embedded in the guide hole 115 to play a guiding role, so that the guide vent nozzle 221 can be accurately inserted into the vent hole.

[0056] A plug fixing threaded hole is also provided on the side of the vent guide column 112 opposite to the vent hole, and the plug fixing threaded hole corresponds one-to-one with the vent hole; a vent plug 117 is installed in the plug fixing threaded hole, such as Figure 8 As shown, an O-ring 118 is provided on the vent plug 117. When the vent plug 117 is tightened, the O-ring 118 on the vent plug 117 seals the vent hole. When using a single-layer platform 12 or two of the platform 12, the remaining vent holes can be sealed by using the vent plug 117 and the O-ring 118, thus achieving a sealed air passage, which is convenient for testing when the number of products is small.

[0057] Specifically, the platform 12 has a U-shaped groove at its end, and a U-shaped socket connection plate 26 is installed inside the U-shaped groove by screws. The connector socket 13 is installed inside the socket connection plate 26. There are two rows of threaded holes on both sides of the platform 12, and two guide blocks 27 are installed on the two rows of threaded holes by screws. Two square vent columns 22 are restricted between the two guide blocks 27. A positioning threaded hole 28 is opened at the end of the platform 12 away from the socket connection plate 26, and the locking screw 29 at the end of the standard collector module 2 is threaded into the positioning threaded hole 28. When installing the standard collector module 2, place the standard collector module 2 on the platform 12 and slide it towards one side of the connector socket 13 so that the connector plug 23 is inserted into the connector socket 13. The guide block 27 ensures that the standard collector module 2 slides accurately between the two guide blocks 27. At the same time, under the limiting action of the conical guide rod 222 and the guide hole 115, the connector plug 23 can be accurately inserted into the connector socket 13. After the insertion is completed, use the locking screw 29 to fix the standard collector module 2 in the positioning threaded hole 28 to ensure the reliability of the use process.

[0058] Specifically, a rectangular through hole is opened in the middle of the two baffles 21, threaded holes are opened around the rectangular through hole, and a mounting hole is opened at the bottom of the rectangular through hole; the connector plug 23 is fixed in the threaded hole of one of the baffles 21 by screws; the locking screw 29 passes through the mounting hole of the other baffle 21 and is threaded onto the positioning threaded hole 28.

[0059] Specifically, the upper surface of the square vent column 22 is provided with several threaded mounting holes, and the product connecting column 25 is threadedly connected to the threaded mounting holes; the top of the product connecting column 25 is also provided with a product plug 251, and a sealing ring 252 is provided on the product plug 251. The sealing structure of the product plug 251 is consistent with the product. When conducting preliminary testing or when the number of product tests is insufficient, the product plug 251 can be installed on the product connecting column 25 to ensure airtightness during the testing process.

[0060] like Figure 9 and Figure 10As shown, the wiring device 24 includes a wire guide plate 241, an encapsulation plate 242, mounting bolts 250, an upper insulating plate 243, wiring screws 246, terminal blocks 245, springs 247, and spring washers 248. The two ends of the wire guide plate 241 are respectively mounted on the tops of two baffles 21 by screws. The top and bottom of the wire guide plate 241 are respectively provided with an upper insulating plate 243 and a lower insulating plate 244. The mounting bolts 250 pass through the mounting through holes on the upper insulating plate 243, the wire guide plate 241, and the lower insulating plate 244 in sequence and are connected to the mounting nuts. Two rows of terminal blocks 245 are mounted on the wire guide plate 241 by wiring screws 246. The wiring screws 246 pass through the holes on the lower insulating plate 244, the wire guide plate 241, and the upper insulating plate 243 in sequence and are threaded to the terminal blocks 245. The hole on the wire guide plate 241 through which the wiring screw 246 passes is larger than the holes on the upper insulating plate 243 and the lower insulating plate 244 through which the wiring screw 246 passes. Therefore, the wiring screw 246 does not contact the wire guide plate 241 when it passes through it, which can play a good insulating role and ensure the accuracy of the output signal during the test.

[0061] like Figure 11 As shown, a spring plate 247 and a spring washer 248 are also fitted onto the wiring screw 246. The spring washer 248 is located below the spring plate 247. The wiring screw 246 holds the spring plate 247 and the spring washer 248 against the bottom surface of the lower insulating plate 244. The wire guide plate 241 bends downward on both sides to extend out side edges. An encapsulation plate 242 is installed between the two side edges by screws, forming a wire harness channel 249 between the wire guide plate 241 and the encapsulation plate 242. One end of the wire harness is connected to the spring plate 247, and the other end of the wire harness is led out from the wire harness channel 249 and connected to the connector socket 13. The encapsulation plate 242 isolates the wire harness channel 249, preventing the wire harness from being interfered with by external factors. At the same time, it improves the neatness of the wire harness, avoiding the phenomenon of messy and difficult-to-manage wire harnesses.

[0062] As a preferred embodiment, a set of standard manifold modules 2 can hold 16 products, and a general-purpose test platform 1 can hold 5 sets of standard manifold modules 2. When production increases, the number of general-purpose test platforms 1 and standard manifold modules 2 can be increased according to the volume of the high and low temperature chamber, with the two numbers increasing in a 1:5 ratio, thereby improving testing efficiency. Each square ventilation column 22 is provided with 8 product connection posts 25, and the 8 product connection posts 25 are marked with Arabic numerals, such as 1, 2, 3... The wire guide plate 241 is provided with two rows of terminals 245, with 40 terminals 245 in each row; each group of 5 terminals 245 is a group, and each group of terminals 245 corresponds to one product connection post 25; the 5 terminals 245 in each group are marked with "red, black, green, white, and blue" respectively, and the color of the marking corresponds to the color of the lead wire on the product, which facilitates wiring during testing.

[0063] The working principle of this embodiment is as follows:

[0064] During testing, the general-purpose test platform 1 is fixed inside the high and low temperature chamber, such as... Figure 12 As shown. The cable on the connector socket 13 is led out through the wire hole on the side wall of the high and low temperature chamber and connected to the test equipment; the product connection is fixed on the product connection post 25. There are multiple leads on one product, which are installed at the corresponding positions of the terminal posts 245 on the wire guide plate 241 according to the lead color. After the product is installed, the standard manifold module 2 is placed on the platform 12 with the end of the connector plug 23 facing the connector socket 13. Then, the standard manifold module 2 is moved along the guide block 27 towards the connector socket 13, and pushed until the guide vent nozzle 221 and the conical guide rod 222 are inserted into the vent hole and guide hole 115 respectively. At the same time, the connector plug 23 is inserted into the connector socket 13. Then, the locking screw 29 is fixed in the positioning thread hole 28 on the platform 12 through the two mounting holes on the baffle 21 to fix the standard manifold module 2 and prevent it from moving back and forth. This avoids the risk of displacement of the standard manifold module 2 when the pressure is too high during the test, which would affect the test data.

[0065] Those skilled in the art will recognize that the embodiments described herein are intended to help the reader understand the principles of the invention and should be understood as not limiting the scope of protection of the invention to such specific statements and embodiments. Those skilled in the art can make various other specific modifications and combinations based on the technical teachings disclosed herein without departing from the spirit of the invention, and these modifications and combinations are still within the scope of protection of the invention.

Claims

1. A MEMS die multi-site integrated test tool, characterized by: The utility model provides a standard set flow frame module (2) and a universal test platform (1) are installed, the universal test platform (1) includes support assembly (11), and the support assembly (11) is provided with a plurality of layers of platform (12), and each layer of platform (12) is correspondingly installed with a standard set flow frame module (2), and the end of platform (12) is provided with connector socket (13), and the standard set flow frame module (2) includes two baffle (21), and one of baffle (21) is provided with connector plug (23), and connector plug (23) is inserted with connector socket (13), and two baffle (21) between two square ventilation columns (22), and each square ventilation column (22) is provided with a plurality of product connecting columns (25), and two baffle (21) between still be provided with wiring device (24), a plurality of layers of platform (12) are also connected with ventilation guide column (112) and guide column (113), and ventilation guide column (112) and guide column (113) are sequentially through the square through slot on a plurality of layers of platform (12) setting, and ventilation guide column (112) and guide column (113) are located on the both sides of connector socket (13) respectively, the equal interval of ventilation guide column (112) is provided with the ventilation hole of the same layer of platform (12), and the equal interval of guide column (113) is provided with the guide hole (115) of the same layer of platform (12), and one end of one square ventilation column (22) is communicated with ventilation hole through guide ventilation connector (221), and the other end of square ventilation column (22) is blocked through taper guide rod (222), and the end of taper guide rod (222) is fixed in guide hole (115), and two square ventilation columns (22) are communicated through air guide column (223), and the end of two square ventilation columns (22) away from ventilation guide column (112) is threadedly connected with air column plug (116).

2. The MEMS die multi-site integrated test fixture of claim 1, wherein: The support assembly (11) includes four fixed pillars (111), and the four fixed pillars (111) are distributed in a rectangular shape, four mounting round holes are formed around each layer of platform (12), and the four fixed pillars (111) are connected with the platform (12) by penetrating the four mounting round holes.

3. The MEMS die multi-site integrated test fixture of claim 2, wherein: Two limit blocks (114) are arranged at the two ends of the ventilation guide column (112), and the limit block (114) at the lower end of the ventilation guide column (112) is supported on the top of the square through slot of the lowermost platform (12) for installing the ventilation guide column (112), and the limit block (114) at the upper end of the ventilation guide column (112) is supported on the bottom of the square through slot of the uppermost platform (12) for installing the ventilation guide column (112), Two limiting blocks (114) are arranged at both ends of the guide column (113); the limiting block (114) at the lower end of the guide column (113) is supported on the top of the square through slot of the lowermost platform (12) for installing the guide column (113), and the limiting block (114) at the upper end of the guide column (113) is supported on the bottom of the square through slot of the uppermost platform (12) for installing the guide column (113).

4. The MEMS die multi-site integrated test fixture of claim 3, wherein: A plug fixing threaded hole is further arranged on the side of the ventilation guide column (112) away from the ventilation hole, and the plug fixing threaded hole corresponds to the ventilation hole; a ventilation plug (117) is arranged in the plug fixing threaded hole; and an O-shaped sealing ring (118) is arranged on the ventilation plug (117).

5. The MEMS die multi-site integrated test fixture of claim 1, wherein: A U-shaped groove is arranged at the end of the platform (12), and a socket connecting plate (26) in a U-shaped structure is arranged in the U-shaped groove through a screw; Two rows of threaded holes are arranged on both sides of the platform (12), and two guide blocks (27) are arranged in the two rows of threaded holes through screws; the two square ventilation columns (22) are limited between the two guide blocks (27); and a positioning threaded hole (28) is arranged at the end of the platform (12) away from the socket connecting plate (26), and a locking screw (29) at the end of the standard current collecting frame module (2) is threadedly connected to the positioning threaded hole (28).

6. The MEMS die multi-site integrated test fixture of claim 5, wherein: A rectangular through hole is arranged in the middle of each of the two baffles (21), threaded holes are arranged around the rectangular through hole, and an installation hole is arranged at the bottom of the rectangular through hole; The connector plug (23) is fixed in the threaded hole of one of the baffles (21) through a screw; and the locking screw (29) penetrates through the installation hole of the other baffle (21) and is threadedly connected to the positioning threaded hole (28).

7. The MEMS die multi-site integrated test fixture of claim 1, wherein: The wiring device (24) comprises a wire guide plate (241), and the two ends of the wire guide plate (241) are arranged at the top of the two baffles (21) through screws; an upper insulating plate (243) and a lower insulating plate (244) are arranged at the top and the bottom of the wire guide plate (241) respectively, and mounting bolts (250) are connected with mounting nuts in sequence through mounting through holes in the upper insulating plate (243), the wire guide plate (241) and the lower insulating plate (244); two rows of wiring posts (245) are arranged on the wire guide plate (241) through wiring screws (246), and the wiring screws (246) are threadedly connected with the wiring posts (245) in sequence through holes in the lower insulating plate (244), the wire guide plate (241) and the upper insulating plate (243).

8. The MEMS die multi-site integrated test fixture of claim 7, wherein: A spring sheet (247) and an elastic pad (248) are further arranged on the wiring screw (246), the elastic pad (248) is located below the spring sheet (247), and the wiring screw (246) adheres the spring sheet (247) and the elastic pad (248) to the bottom surface of the lower insulating plate (244). The two sides of the wire guide plate (241) are bent downward to extend out side edges, and a sealing plate (242) is installed between the side edges of the two sides by screws, a wire harness channel (249) is formed between the wire guide plate (241) and the sealing plate (242); one end of the wire harness is connected to the spring sheet (247), and the other end of the wire harness is led out from the wire harness channel (249) and connected to the connector socket (13).

9. The multi-site integrated test tool for MEMS dies as claimed in any one of claims 1 to 8, wherein: The upper end face of the square ventilation column (22) is further provided with a plurality of threaded mounting holes, and the product connecting column (25) is threaded on the threaded mounting holes; The top of the product connecting column (25) is further provided with a product plug (251), and the product plug (251) is provided with a sealing ring (252).

10. The multi-site integrated test tool for MEMS dies as recited in any of claims 2-4, wherein: The top of the ventilation guide column (112) is provided with an adapter (119).

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