Robotic arms, semiconductor devices, and methods for adjusting robotic arms

Abstract

This application provides a robotic arm, a semiconductor device, and a method for adjusting the robotic arm, relating to the field of semiconductor technology. It solves the technical problem that the extension length of the adsorption part of the robotic arm cannot be flexibly adjusted. The robotic arm includes a moving part and a fixed part, which are sealed together. The moving part has a through groove, and the clamp has a receiving groove. The end of the moving part is provided with an adsorption end capable of adsorbing a substrate, and the adsorption end has an adsorption hole. The moving part forms a through first air channel, which communicates with the adsorption hole. The fixed part has a second air channel inside, which communicates with the first air channel and, through the first air channel, with the adsorption hole. The moving part can move relative to the fixed part to change its extension length, thereby flexibly adjusting the position of the adsorption end. This allows the outer convex wall of the receiving groove to extend into the through groove, enabling the moving part to align with the clamp and place or remove a substrate from the clamp. This method is convenient, time-saving, and labor-saving.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, specifically to a robotic arm, a semiconductor device, and a method for adjusting the robotic arm. Background Technology

[0002] In the semiconductor field, electroplating refers to the process of depositing a thin metal film on a substrate. In advanced packaging technology, electroplating is commonly used to form different structures such as copper pillars and solder joints on the substrate to achieve chip interconnection.

[0003] Electroplating equipment is semiconductor equipment used to perform electroplating processes. Electroplating equipment includes an electroplating chamber and fixtures, as well as a robotic arm capable of placing or removing substrates from the fixtures. After the robotic arm removes the substrate from the Equipment Front End Module (EFEM) or the cleaning structure, it places the substrate into the fixture. Once the fixture secures the substrate, the surface of the substrate to be electroplated is immersed in the electroplating solution within the electroplating chamber to perform the electroplating process. After electroplating is complete, the robotic arm removes the substrate from the fixture.

[0004] like Figure 1 , Figure 2 and Figure 3 As shown, the clamp 200 in the electroplating equipment generally has an openable structure. The upper structure 201 of the clamp 200 can move upward to form an opening 203 with the lower structure 202. The robot can place the substrate at the bottom of the lower structure 202 through the opening 203. Then, the upper structure 201 of the clamp 200 moves downward to contact the substrate and apply downward pressure, so that the edge of the downward-facing surface of the substrate to be electroplated is fixed on the annular sealing ring 204 at the bottom.

[0005] The lower structure 202 of the fixture 200 includes an annular wall, with an annular sealing ring 204 disposed below the wall and an annular protruding wall 2021 disposed above the wall. The protruding wall 2021 has a certain width and a certain height from the surface of the protruding wall 2021 to the surface of the annular sealing ring 204. When the robot arm places a substrate into or removes a substrate from the opening 203 of the fixture 200, two conditions must be met: first, the robot arm must not interfere with the protruding wall 2021; and second, the robot arm must be able to enter the bottom of the lower structure 202 to place or remove the substrate.

[0006] In existing related technologies, the adsorption part of the robotic arm is connected to a vacuum tube via a connector, and the vacuum tube is connected to a fixing part via another connector. The adsorption part includes an adsorption end capable of adsorbing a substrate. However, with this structure, if the position of the adsorption end needs to be adjusted, the required length of the new vacuum tube needs to be determined and the current vacuum tube replaced with a new one. Therefore, the adjustment process is relatively cumbersome, time-consuming, and labor-intensive. Furthermore, the method of connecting the two ends of the vacuum tube with connectors results in poor sealing and easy air leakage, which may cause the adsorption end to fail to adsorb the substrate, or cause the substrate adsorbed on the adsorption end to fall off. Summary of the Invention

[0007] To address the aforementioned technical problems, this application is proposed. Embodiments of this application provide a robotic arm, a semiconductor device, and a method for adjusting the robotic arm.

[0008] In a first aspect, one embodiment of this application provides a robotic arm disposed in a semiconductor device for placing a substrate into or removing a substrate from a fixture in the semiconductor device. The robotic arm includes a movable part and a fixed part, which are sealed together. The movable part has a through groove, and the fixture has a receiving groove. The outer convex wall of the receiving groove can partially extend into the through groove. The end of the movable part is provided with an adsorption end capable of adsorbing a substrate. The adsorption end is provided with an adsorption hole. The movable part forms a through first air channel, which communicates with the adsorption hole. The fixed part has a second air channel formed inside, which communicates with the first air channel and the adsorption hole through the first air channel, so that the second air channel, the first air channel, and the adsorption hole form a substrate adsorption channel for adsorbing the substrate. The movable part can move relative to the fixed part to change the extension length of the movable part, so that after the outer convex wall of the receiving groove extends into the through groove, the movable part and the fixture are matched to place or remove the substrate from the fixture. The substrate adsorption channel formed by the movable part and the fixed part is in a sealed state before and after the movable part moves relative to the fixed part.

[0009] In some embodiments, the fixed part has a first opening communicating with the second airway, the first airway including a first sub-airway and a second sub-airway; wherein, the movable part includes: a vacuum connector, at least partially extending into the second airway through the first opening, the vacuum connector having a first sub-airway and a second opening and a third opening communicating with the first sub-airway, the second opening being located within the second airway, the first sub-airway communicating with the second airway through the second opening; an adsorption assembly, the adsorption assembly having an adsorption hole, a second sub-airway and a connecting hole, the second sub-airway communicating with the adsorption hole and the connecting hole, one end of the adsorption assembly having the connecting hole being connected to one end of the vacuum connector having the third opening, the second sub-airway communicating with the first airway through the connecting hole and the third opening; wherein, the manipulator further includes: a first sealing member, disposed between the end face of the adsorption assembly having the connecting hole and the end face of the vacuum connector having the third opening, and surrounding the third opening, configured to seal the gap between the third opening and the connecting hole.

[0010] In some embodiments, the robotic arm further includes at least one second seal disposed between the inner wall of the second air passage and the outer side of the end of the vacuum connector having a second opening, configured to seal the gap between the inner wall of the second air passage and the vacuum connector.

[0011] In some embodiments, there are multiple second seals, which are arranged sequentially along the extension direction of the vacuum connector.

[0012] In some embodiments, the maximum distance the moving part moves away from the fixed part is the target distance between the second seal closest to the first opening and the end face of the fixed part having the first opening, wherein the target distance ranges from 0 mm to 30 mm.

[0013] In some embodiments, the vacuum connector includes: an extension portion extending at least partially into the second air passage through a first opening; and an abutment portion located on the side of the extension portion away from the fixing portion and between the adsorption assembly and the fixing portion, and connected to the extension portion; wherein, when the extension portion is entirely located in the second air passage and the abutment portion abuts against the fixing portion, the target distance is 30 mm; and when the second seal closest to the first opening and the end face of the fixing portion having the first opening are positioned in the same direction of extension of the vacuum connector, the target distance is 0 mm.

[0014] In some embodiments, the adsorption assembly includes: two clamping portions disposed on opposite sides of the end of the vacuum connector and the fixing portion having a first opening in a first direction; one clamping portion having at least one first through hole extending in the first direction, and the other clamping portion having at least one first threaded portion extending in the first direction, the first direction being parallel to the end face of the fixing portion having the first opening; at least one first screw connector passing through the first through hole and screwed to the first threaded portion; and an adsorption portion disposed on the side of the vacuum connector away from the fixing portion and connected to the two clamping portions, the adsorption portion having an adsorption hole, a second sub-gas passage, and a connecting hole.

[0015] In some embodiments, the adsorption part has at least one second threaded portion disposed adjacent to the connecting hole at one end, the second threaded portion extending along a second direction, a first sealing member disposed between the second threaded portion and the connecting hole, the second direction intersecting the first direction, and a vacuum connector having at least one second through hole extending along the second direction; wherein, the adsorption assembly further includes at least one second screw member, the second screw member passing through the second through hole and screwed to the second threaded portion.

[0016] In some embodiments, the end face of the vacuum connector having a third opening has a first annular groove disposed around the third opening, the first seal having an annular shape and being partially disposed in the first annular groove; and / or, the outer wall of the vacuum connector has a second annular groove disposed along the circumference of the vacuum connector, the second seal having an annular shape and being partially disposed in the second annular groove.

[0017] In a second aspect, one embodiment of this application provides a semiconductor device including at least one electroplating chamber assembly. The electroplating chamber assembly includes an electroplating chamber and a clamp disposed above the electroplating chamber. The clamp is capable of fixing a substrate and carrying the substrate to an electroplating solution in the electroplating chamber to perform an electroplating process. The device also includes a robotic arm, as described in any of the first aspects, capable of placing the substrate into the clamp or removing the substrate from the clamp.

[0018] Thirdly, one embodiment of this application provides a method for adjusting a robotic arm, applied to the robotic arm of any of the first aspects described above. The method for adjusting the robotic arm includes: moving the movable part of the robotic arm relative to the fixed part of the robotic arm to change the extension length of the movable part, so that the outer convex wall portion of the receiving groove of the clamp extends into the through groove of the movable part, thereby placing a substrate in the clamp or removing a substrate from the clamp after the movable part and the clamp are correspondingly matched; wherein, before and after the movable part moves relative to the fixed part, the substrate adsorption channel formed by the movable part and the fixed part is in a sealed state.

[0019] In some embodiments, the fixed part has a first opening communicating with a second airway, the first airway including a first sub-airway and a second sub-airway, the movable part including a vacuum connector and an adsorption assembly, the vacuum connector extending at least partially into the second airway through the first opening, the vacuum connector having a first sub-airway and a second opening and a third opening communicating with the first sub-airway, the second opening being located within the second airway, the first sub-airway communicating with the second airway through the second opening, the adsorption assembly having an adsorption hole, a second sub-airway and a connecting hole, the second sub-airway communicating with the adsorption hole and the connecting hole, one end of the adsorption assembly having the connecting hole being connected to one end of the vacuum connector having the third opening, the second sub-airway communicating with the first airway through the connecting hole and the third opening, the manipulator further including a first seal, the first seal being disposed between the end face of the adsorption assembly having the connecting hole and the end face of the vacuum connector having the third opening, and surrounding the third opening, configured to seal between the third opening and the connecting hole. The gap; wherein, the adsorption assembly includes two clamping parts, at least one first screwed member, and an adsorption part. The two clamping parts are disposed on both sides of the end of the vacuum connector and the fixing part having a first opening in a first direction. One clamping part has at least one first through hole extending in the first direction, and the other clamping part has at least one first threaded part extending in the first direction. The first direction is parallel to the end face of the fixing part having the first opening. The first screwed member passes through the first through hole and is screwed to the first threaded part. The adsorption part is disposed on the side of the vacuum connector away from the fixing part and is connected to the two clamping parts. The adsorption part has an adsorption hole, a second sub-air passage, and a connecting hole. The moving part of the manipulator relative to the fixing part of the manipulator includes: disassembling the first screwed member from the first through hole and the first threaded part; moving the vacuum connector, clamping part, and adsorption part relative to the fixing part in a direction perpendicular to the first opening; and causing the first screwed member to pass through the first through hole and be screwed to the first threaded part.

[0020] The robotic arm and its adjustment method proposed in this application embodiment allow the moving part to move relative to the fixed part to change its extension length. Furthermore, the substrate adsorption channel formed by the moving part and the fixed part remains sealed before and after the moving part moves relative to the fixed part. Therefore, the robotic arm provided in this application embodiment can freely and flexibly adjust the extension length of the moving part, thereby flexibly adjusting the position of the adsorption end. This allows the outer convex wall portion of the receiving groove to extend into the through groove, enabling the moving part to align with the clamp and place or remove the substrate (through the adsorption end) into or from the clamp without needing to replace the vacuum tube. This makes adjustment convenient, time-saving, and labor-saving. Moreover, since the substrate adsorption channel formed by the moving part and the fixed part remains sealed before and after the moving part moves relative to the fixed part, the sealing performance of adjusting the extension length of the moving part is guaranteed. Attached Figure Description

[0021] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0022] Figure 1 The diagram shown is a structural schematic of a fixture provided in an exemplary embodiment of this application.

[0023] Figure 2 The diagram shown is a cross-sectional view of the fixture provided in an exemplary embodiment of this application.

[0024] Figure 3 The image shown is an exemplary embodiment of this application. Figure 2 The clamp shown is a magnified view of a portion of region D.

[0025] Figure 4 The diagram shown is a schematic diagram of the structure of a robotic arm provided in an exemplary embodiment of this application.

[0026] Figure 5 The image shown is a top view of a robotic arm provided in an exemplary embodiment of this application.

[0027] Figure 6 The image shown is an exemplary embodiment of this application. Figure 5 The image shows a cross-sectional view of the robotic arm along the AA direction.

[0028] Figure 7 The image shown is an exemplary embodiment of this application. Figure 6 The image shows a magnified view of the robotic arm in region B.

[0029] Figure 8 The image shown is an exemplary embodiment of this application. Figure 6 The image shows a magnified view of the robotic arm in region C.

[0030] Figure 9 The image shown is an exemplary embodiment of this application. Figure 7 The image shows a cross-sectional view of the robotic arm along the EE direction.

[0031] Figure 10 The diagram shown is a flowchart illustrating an exemplary embodiment of the present application of a robotic arm adjustment method.

[0032] Figure 11 The diagram shown is a flowchart illustrating a method for moving the movable part of a robot relative to the fixed part of a robot according to an exemplary embodiment of this application.

[0033] Figure 12 The diagram shown is a schematic diagram of the structure of a semiconductor device provided in an exemplary embodiment of this application.

[0034] Figure label:

[0035] 100. Robotic arm; 101. Moving part; 1011. Adsorption end; 10111. Adsorption hole; 1012. First air passage; 10121. First sub-air passage; 10122. Second sub-air passage; 1013. Vacuum connector; 10131. Second opening; 10132. Third opening; 10133. Second through hole; 10134. First annular groove; 10135. Second annular groove; 10136. Extension part; 10137. Abutment part; 1014. Adsorption assembly; 10141. Connecting hole; 10142. Clamping Tightening part; 101421, First threaded hole; 101422, First through hole; 10143, Adsorption part; 10144, Second screwed part; 102, Fixing part; 1021, Second air passage; 1022, First opening; 103, First seal; 104, Second seal; 200, Clamp; 201, Upper structure; 202, Lower structure; 203, Opening of clamp; 2021, Outer convex wall; 204, Annular sealing ring; 300, Semiconductor equipment; 301, Electroplating chamber assembly; 3011, Electroplating chamber. Detailed Implementation

[0036] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0037] Figure 1 The diagram shown is a structural schematic of a clamp provided in an exemplary embodiment of this application. Figure 2 The diagram shown is a cross-sectional view of the fixture provided in an exemplary embodiment of this application. Figure 3 The image shown is an exemplary embodiment of this application. Figure 2 The clamp shown is a magnified view of a portion of region D. Figure 4 The diagram shown is a structural schematic of a robotic arm provided in an exemplary embodiment of this application. Figure 5 The image shown is a top view of a robotic arm provided in an exemplary embodiment of this application. Figure 6 The image shown is an exemplary embodiment of this application. Figure 5 The cross-sectional view of the robotic arm shown is along the AA direction. Figure 7 The image shown is an exemplary embodiment of this application. Figure 6 The image shows a magnified view of the robotic arm in region B.

[0038] like Figures 1-7 As shown, this application embodiment provides a robotic arm 100, which is disposed in a semiconductor device 300 and used to place a substrate into or remove a substrate from a clamp 200 of the semiconductor device 300. The robotic arm 100 includes a moving part 101 and a fixed part 102, which are sealed together. The moving part 101 has a through groove, and the clamp 200 has a receiving groove. The outer protruding wall 2021 of the receiving groove can partially extend into the through groove. The end of the moving part 101 is provided with an adsorption end 1011 capable of adsorbing a substrate. The adsorption end 1011 is provided with an adsorption hole 10111. The moving part 101 forms a through first air passage 1012, which communicates with the adsorption hole 10111. A second air passage 1021 is formed inside the fixing part 102. The second air passage 1021 communicates with the first air passage 1012 and with the adsorption hole 10111 through the first air passage 1012. The second air passage 1021, the first air passage 1012, and the adsorption hole 10111 form a substrate adsorption channel for adsorbing the substrate. The moving part 101 can move relative to the fixing part 102 to change the extension length of the moving part 101. After the outer convex wall 2021 of the receiving groove extends into the through groove, the moving part 101 is matched with the clamp 200 to place the substrate into the clamp 200 or remove the substrate from the clamp 200. Before and after the moving part 101 moves relative to the fixing part 102, the substrate adsorption channel formed by the moving part 101 and the fixing part 102 is in a sealed state.

[0039] For example, the substrate is a wafer.

[0040] For example, the movable part 101 and the fixed part 102 are sealed by a sealing ring.

[0041] For example, the second air passage 1021 can be connected to a vacuum pump. By drawing gas from the second air passage 1021, the vacuum pump can draw away the gas in the first air passage 1012 and the adsorption hole 10111, so that the adsorption hole 10111 generates suction to adsorb the substrate.

[0042] In the above embodiments, since the moving part 101 can move relative to the fixed part 102 to change the extension length of the moving part 101, and the substrate adsorption channel formed by the moving part 101 and the fixed part 102 is in a sealed state before and after the moving part 101 moves relative to the fixed part 102, the robot 100 provided in this application embodiment can freely and flexibly adjust the extension length of the moving part 101, thereby flexibly adjusting the position of the adsorption end 1011 so that after the outer convex wall 2021 of the receiving groove extends into the through groove, the moving part 101 and the clamp 200 can be matched accordingly and the substrate can be placed into or removed from the clamp 200 (through the adsorption end 1011) without replacing the vacuum tube, which is convenient, time-saving and labor-saving. Furthermore, since the substrate adsorption channel formed by the moving part 101 and the fixed part 102 can always be in a sealed state before and after the moving part 101 moves relative to the fixed part 102, the sealing performance of adjusting the extension length of the moving part 101 is guaranteed.

[0043] In some embodiments, such as Figure 6 and Figure 7As shown, the fixing part 102 has a first opening 1022 (located at the dotted line indicated by 1022) communicating with the second air passage 1021. The first air passage 1012 includes a first sub-air passage 10121 and a second sub-air passage 10122. The moving part 101 includes a vacuum connector 1013 and an adsorption assembly 1014. At least a portion of the vacuum connector 1013 extends into the second air passage 1021 through the first opening 1022. The vacuum connector 1013 has a first sub-air passage 10121 and a second opening 10131 and a third opening 10132 communicating with the first sub-air passage 10121. The second opening 10131 is located within the second air passage 1021, and the first sub-air passage 10121 communicates with the second air passage 1021 through the second opening 10131. The adsorption assembly 1014 has an adsorption hole 10111, a second sub-gas channel 10122, and a connecting hole 10141. The second sub-gas channel 10122 communicates with the adsorption hole 10111 and the connecting hole 10141. One end of the adsorption assembly 1014 with the connecting hole 10141 is connected to one end of the vacuum connector 1013 with the third opening 10132. The second sub-gas channel 10122 communicates with the first sub-gas channel 10121 through the connecting hole 10141 and the third opening 10132. That is, in a generally left-to-right direction, the adsorption hole 10111, the second sub-gas channel 10122, the connecting hole 10141, the third opening 10132, the first sub-gas channel 10121, the second opening 10131, and the second gas channel 1021 are sequentially connected to form a substrate adsorption channel. The robotic arm 100 also includes a first sealing member 103. The first sealing member 103 is disposed between the end face of the adsorption assembly 1014 having the connecting hole 10141 and the end face of the vacuum connector 1013 having the third opening 10132, and is disposed around the third opening 10132, and is configured to seal the gap between the third opening 10132 and the connecting hole 10141.

[0044] For example, the first seal 103 is an annular sealing ring.

[0045] In the above embodiments, by providing a first sealing member 103 between the end face of the adsorption component 1014 with the connecting hole 10141 and the end face of the vacuum connector 1013 with the third opening 10132, the gap between the third opening 10132 and the connecting hole 10141 can be sealed well to prevent air leakage.

[0046] In some embodiments, such as Figure 7 As shown, the robotic arm 100 further includes at least one second seal 104. The at least one second seal 104 is disposed between the inner wall of the second air passage 1021 and the outer side of the end of the vacuum connector 1013 having the second opening 10131, and is configured to seal the gap between the inner wall of the second air passage 1021 and the vacuum connector 1013.

[0047] For example, the second seal 104 is an annular sealing ring.

[0048] For example, there may be two, three or four second seals 104.

[0049] In the above embodiments, by providing a second sealing member 104 between the inner wall of the second air passage 1021 and the outer side of the end of the vacuum connector 1013 with the second opening 10131, the gap between the inner wall of the second air passage 1021 and the vacuum connector 1013 can be sealed well to prevent air leakage.

[0050] In some embodiments, such as Figure 7 As shown, there are multiple second seals 104, which are arranged sequentially along the extension direction of the vacuum connector 1013.

[0051] For example, there are two second seals 104, and two second seals 104 are arranged sequentially along the extension direction of the vacuum connector 1013.

[0052] In the above embodiments, by providing multiple second seals 104, the sealing performance between the inner wall of the second air passage 1021 and the vacuum connector 1013 can be improved. The more second seals 104 provided, the better the sealing performance between the inner wall of the second air passage 1021 and the vacuum connector 1013.

[0053] Figure 8 The image shown is an exemplary embodiment of this application. Figure 6 The image shows a magnified view of the robotic arm in region C.

[0054] In some embodiments, such as Figure 8 As shown, the maximum distance that the moving part 101 moves away from the fixed part 102 is the target distance between the second seal 104 closest to the first opening 1022 and the end face of the fixed part 102 having the first opening 1022, wherein the target distance ranges from 0 mm to 30 mm. Correspondingly, the maximum distance that the moving part 101 moves closer to the fixed part 102 is from 0 mm to 30 mm.

[0055] For example, the target distance is 10 mm, 20 mm or 30 mm.

[0056] In the above embodiments, by making the target distance range from 0 mm to 30 mm, the extension length of the moving part 101 can be flexibly adjusted so that the adsorption end 1011 can be inserted into the appropriate position in the clamp 200 to place or remove the substrate.

[0057] It should be understood that the above distance values ​​are set in conjunction with the actual application field of the semiconductor device 300 in this embodiment. In different application fields, the position of the second seal 104 can be set according to the actual situation to change the target distance. For example, the target distance can be adjusted to different data such as 0 mm to 50 mm depending on the actual application.

[0058] In some embodiments, such as Figure 7 and Figure 8 As shown, the vacuum connector 1013 includes an insertion portion 10136 and an abutment portion 10137. The insertion portion 10136 extends at least partially into the second air passage 1021 through the first opening 1022. The abutment portion 10137 is located on the side of the insertion portion 10136 away from the fixing portion 102, and is located between the adsorption assembly 1014 and the fixing portion 102, and is connected to the insertion portion 10136. When the insertion portion 10136 is entirely within the second air passage 1021, and the abutment portion 10137 abuts against the fixing portion 102, the target distance is 30 mm. When the second sealing member 104 closest to the first opening 1022 and the end face of the fixing portion 102 having the first opening 1022 are positioned at the same position in the extending direction of the vacuum connector 1013, the target distance is 0 mm.

[0059] Specifically, in order for the second seal 104 to function as a seal, the second seal 104 cannot detach from the second air passage 1021 and must always remain between the inner wall of the second air passage 1021 and the vacuum connector 1013. Furthermore, if the abutting part 10137 abuts against the fixing part 102, the moving part 101 cannot move towards the fixing part 102. Therefore, when the inserting part 10136 is completely located in the second air passage 1021 and the abutting part 10137 abuts against the fixing part 102, the target distance is at its maximum (i.e., 30 mm). When the second seal 104 closest to the first opening 1022 and the end face of the fixing part 102 with the first opening 1022 are positioned in the same direction as the extension of the vacuum connector 1013, i.e., when the second seal 104 is about to detach from the second air passage 1021, the target distance is at its minimum (i.e., 0 mm). Correspondingly, the maximum distance that the moving part 101 can move towards the fixing part 102 is at its maximum (i.e., 30 mm).

[0060] In some embodiments, such as Figures 5-7As shown, the adsorption assembly 1014 includes: two clamping portions 10142, at least one first screwed member, and an adsorption portion 10143. The two clamping portions 10142 are respectively disposed on both sides of the end of the vacuum connector 1013 and the fixing portion 102 having a first opening 1022 in a first direction (i.e., the X direction in the figure). One clamping portion 10142 has at least one first through hole 101422 extending along the first direction, and the other clamping portion 10142 has at least one first threaded portion extending along the first direction, which is parallel to the end face of the fixing portion 102 having the first opening 1022. The first screwed member passes through the first through hole 101422 and is screwed to the first threaded portion. The adsorption portion 10143 is disposed on the side of the vacuum connector 1013 away from the fixing portion 102 and is connected to the two clamping portions 10142. The adsorption portion 10143 has an adsorption hole 10111, a second sub-air passage 10122, and a connecting hole 10141.

[0061] For example, the first direction is a horizontal direction that is perpendicular to the extension direction of the vacuum connector 1013.

[0062] For example, another clamping part 10142 has at least one first threaded hole 101421 extending in a first direction, the first threaded part being the thread within the first threaded hole 101421.

[0063] For example, the first threaded component is a screw or bolt.

[0064] For example, there are multiple first through holes 101422, which are arranged sequentially along a second direction (i.e., the Y direction in the figure) and / or, the multiple first through holes 101422 are arranged sequentially along a third direction (i.e., the Z direction in the figure). The first direction, the second direction, and the third direction intersect each other, such as the first direction, the second direction, and the third direction (such as the vertical direction) are perpendicular to each other. Correspondingly, there are multiple first threaded portions, which are arranged sequentially along the second direction and / or, the multiple first threaded portions are arranged sequentially along the third direction.

[0065] For example, one clamping part 10142 has two first through holes at one end in the third direction and two first through holes at the other end in the third direction. The two first through holes at the same end of the clamping part 10142 in the third direction are spaced apart along a second direction. Correspondingly, another clamping part 10142 has two first threaded portions at one end in the third direction and two first threaded portions at the other end in the third direction. The two first threaded portions at the same end of the other clamping part 10142 in the third direction are spaced apart along a second direction.

[0066] In the above embodiments, the moving part 101 and the fixed part 102 can be fastened together by the two clamping parts 10142 and at least one first screw connector.

[0067] Figure 9 The image shown is an exemplary embodiment of this application. Figure 7 The image shows a cross-sectional view of the robotic arm along the EE direction.

[0068] In some embodiments, such as Figure 9 As shown, the adsorption part 10143 has at least one second threaded portion adjacent to the connecting hole 10141 at one end. The second threaded portion extends along a second direction. A first sealing member 103 is disposed between the second threaded portion and the connecting hole 10141. The second direction intersects the first direction. The vacuum connector 1013 has at least one second through hole 10133 extending along the second direction. The adsorption assembly 1014 further includes at least one second screw connector 10144. The second screw connector 10144 passes through the second through hole 10133 and is screwed onto the second threaded portion.

[0069] For example, one end of the adsorption part 10143 having a connecting hole 10141 has at least one second threaded hole disposed adjacent to the connecting hole 10141, and the second threaded part is the thread inside the second threaded hole.

[0070] For example, the second screw connector 10144 is a screw or bolt.

[0071] For example, there are multiple second threaded portions, which are arranged around the first seal 103.

[0072] For example, the number of second threaded portions may be 2, 3, or 4.

[0073] In the above embodiments, the adsorption part 10143 and the vacuum connector 1013 can be fixed to each other by means of the second threaded part and the second screw connector 10144. By placing the first sealing member 103 between the second threaded part and the connecting hole 10141, instead of placing the second threaded part between the first sealing member 103 and the connecting hole 10141, air leakage at the location of the second threaded part can be avoided.

[0074] In some embodiments, the end face of the vacuum connector 1013 having a third opening 10132 has a first annular groove 10134 disposed around the third opening 10132, and the first seal 103 has an annular shape and is partially disposed in the first annular groove 10134.

[0075] In the above embodiments, by providing a first annular groove 10134 to accommodate at least a portion of the first seal 103, the first seal 103 can be securely fixed.

[0076] In some embodiments, the outer wall of the vacuum connector 1013 has a second annular groove 10135 disposed circumferentially along the vacuum connector 1013, and the second seal 104 is annular in shape and is partially disposed in the second annular groove 10135.

[0077] For example, if there are multiple second seals 104, and the multiple second seals 104 are arranged sequentially along the extension direction of the vacuum connector 1013, correspondingly, there are multiple second annular grooves 10135, and the multiple second annular grooves 10135 are arranged sequentially along the extension direction of the vacuum connector 1013, so that each second annular groove 10135 can accommodate at least a portion of a corresponding second seal 104.

[0078] In the above embodiments, by providing a second annular groove 10135 to accommodate at least a portion of the second seal 104, the second seal 104 can be securely fixed.

[0079] Figure 12 The diagram shown is a schematic diagram of the structure of a semiconductor device provided in an exemplary embodiment of this application. The semiconductor device 300 includes an electroplating device.

[0080] Based on the same concept, such as Figure 12 As shown, this application embodiment also provides a semiconductor device 300, which includes at least one electroplating chamber assembly 301. The electroplating chamber assembly 301 includes an electroplating chamber 3011 and a clamp 200 disposed above the electroplating chamber 3011. The clamp 200 is capable of fixing a substrate and carrying the substrate to the electroplating solution in the electroplating chamber 3011 to perform the electroplating process. The semiconductor device 300 also includes a robot arm 100 as described in the above embodiment, which is capable of placing a substrate in the clamp 200 or removing a substrate from the clamp 200.

[0081] Figure 10 The diagram shown is a flowchart illustrating an exemplary embodiment of the present application of a robotic arm adjustment method.

[0082] Based on the same concept, such as Figure 10 As shown, this application embodiment also provides a method for adjusting a robotic arm, which is applied to the robotic arm in any of the above embodiments. The method for adjusting a robotic arm provided in this application embodiment includes the following steps 1001.

[0083] Step 1001: Move the moving part of the robot relative to the fixed part of the robot to change the extension length of the moving part so that the outer convex wall part of the receiving groove of the fixture extends into the through groove of the moving part, so that the moving part and the fixture correspond and match, and then place the substrate into the fixture or remove the substrate from the fixture.

[0084] In this process, before and after the moving part moves relative to the fixed part, the substrate adsorption channel formed by the moving part and the fixed part is in a sealed state.

[0085] Figure 11 The diagram shown is a flowchart illustrating a method for moving the movable part of a robot relative to the fixed part of a robot according to an exemplary embodiment of this application.

[0086] In some embodiments, the fixing part 102 has a first opening 1022 communicating with the second airway 1021. The first airway 1012 includes a first sub-airway 10121 and a second sub-airway 10122. The moving part 101 includes a vacuum connector 1013 and an adsorption assembly 1014. The vacuum connector 1013 extends at least partially into the second airway 1021 through the first opening 1022. The vacuum connector 1013 has a first sub-airway 10121 and a second opening 10131 and a third opening 10132 communicating with the first sub-airway 10121. The second opening 10131 is located inside the second airway 1021. The first sub-airway 10121 communicates with the second airway 1021 through the second opening 10131. The adsorption assembly 1014 has an adsorption hole 10111, a second... The second sub-gas channel 10122 is connected to the adsorption hole 10111 and the connecting hole 10141. One end of the adsorption assembly 1014 with the connecting hole 10141 is connected to one end of the vacuum connector 1013 with the third opening 10132. The second sub-gas channel 10122 is connected to the first sub-gas channel 10121 through the connecting hole 10141 and the third opening 10132. The robot also includes a first sealing member 103, which is disposed between the end face of the adsorption assembly 1014 with the connecting hole 10141 and the end face of the vacuum connector 1013 with the third opening 10132, and surrounds the third opening 10132. It is configured to seal the gap between the third opening 10132 and the connecting hole 10141. The adsorption assembly 1014 includes two clamping parts 10142, at least one first screwed member, and an adsorption part 10143. The two clamping parts 10142 are respectively disposed on both sides of the end of the vacuum connector 1013 and the fixing part 102 having a first opening 1022 in a first direction. One clamping part 10142 has at least one first through hole 101422 extending in the first direction, and the other clamping part 10142 has at least one first threaded portion extending in the first direction. The first direction is parallel to the end face of the fixing part 102 having the first opening 1022. The first screwed member passes through the first through hole 101422 and is screwed to the first threaded portion. The adsorption part 10143 is disposed on the side of the vacuum connector 1013 away from the fixing part 102 and is connected to the two clamping parts 10142. The adsorption part 10143 has an adsorption hole 10111, a second sub-air passage 10122, and a connecting hole 10141. For the specific structure here, please refer to the content in the aforementioned embodiments, which will not be repeated here.

[0087] Among them, such as Figure 11 As shown, when the moving part 101 of the robot arm is moved relative to the fixed part 102 of the robot arm, the following steps 1101 to 1103 can be performed.

[0088] Step 1101: Disassemble the first screw connector from the first through hole and the first threaded part.

[0089] Step 1101 allows the entire assembly consisting of vacuum connector 1013, clamping part 10142, and adsorption part 10143 to be released from fixing part 102.

[0090] Step 1102: Move the vacuum connector, clamping part and adsorption part relative to the fixed part in a direction perpendicular to the first opening.

[0091] For example, the direction perpendicular to the first opening 1022 can be the same as the aforementioned second direction and the extension direction of the vacuum connector 1013.

[0092] Step 1103: Pass the first screwed part through the first through hole and screw it into the first threaded part.

[0093] Step 1103 can fix the whole assembly consisting of vacuum connector 1013, clamping part 10142 and adsorption part 10143 to fixing part 102.

[0094] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0095] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0096] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0097] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0098] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A robotic arm disposed in a semiconductor device for placing a substrate into or removing the substrate from a fixture of the semiconductor device, characterized in that: The robotic arm includes a movable part and a fixed part, the movable part and the fixed part are sealed together, wherein the movable part has a through groove, the clamp has a receiving groove, and the outer convex wall of the receiving groove can partially extend into the through groove; The moving part is provided with an adsorption end capable of adsorbing the substrate at its end. The adsorption end is provided with an adsorption hole. The moving part forms a through first air channel, which is connected to the adsorption hole. The fixing part has a second air channel inside, which is connected to the first air channel and is connected to the adsorption hole through the first air channel, so that the second air channel, the first air channel and the adsorption hole form a substrate adsorption channel for adsorbing the substrate. The movable part can move relative to the fixed part to change the extension length of the movable part, so that after the outer convex wall portion of the receiving groove extends into the through groove, the movable part can be matched with the clamp to place the substrate into the clamp or remove the substrate from the clamp. Specifically, before and after the moving part moves relative to the fixed part, the substrate adsorption channel formed by the moving part and the fixed part is in a sealed state.

2. The robotic arm according to claim 1, characterized in that, The fixing part has a first opening communicating with the second airway, and the first airway includes a first sub-airway and a second sub-airway. The moving part includes: A vacuum connector, at least partially extending into the second air passage through the first opening, the vacuum connector having a first sub-air passage and a second opening and a third opening communicating with the first sub-air passage, the second opening being located within the second air passage, the first sub-air passage communicating with the second air passage through the second opening; An adsorption assembly having an adsorption hole, a second sub-gas channel, and a connecting hole, the second sub-gas channel communicating with the adsorption hole and the connecting hole, one end of the adsorption assembly having the connecting hole being connected to one end of the vacuum connector having the third opening, and the second sub-gas channel communicating with the first sub-gas channel through the connecting hole and the third opening; The robotic arm also includes: A first sealing element is disposed between the end face of the adsorption assembly having the communicating hole and the end face of the vacuum connector having the third opening, and is disposed around the third opening, and is configured to seal the gap between the third opening and the communicating hole.

3. The robotic arm according to claim 2, characterized in that, Also includes: At least one second seal is disposed between the inner wall of the second air passage and the outer side of the end of the vacuum connector having the second opening, and is configured to seal the gap between the inner wall of the second air passage and the vacuum connector.

4. The robotic arm according to claim 3, characterized in that, There are multiple second seals, which are arranged sequentially along the extension direction of the vacuum connector.

5. The robotic arm according to claim 3 or 4, characterized in that, The maximum distance the moving part can move away from the fixed part is the target distance between the second seal closest to the first opening and the end face of the fixed part having the first opening, wherein the target distance is in the range of 0 mm to 30 mm.

6. The robotic arm according to claim 5, characterized in that, The vacuum connector includes: The insertion portion extends at least partially into the second airway through the first opening; The abutting portion is located on the side of the extending portion away from the fixing portion, and is located between the adsorption assembly and the fixing portion, and is connected to the extending portion; Wherein, when the entire extension portion is located in the second airway and the contact portion abuts against the fixing portion, the target distance is 30 mm; The target distance is 0 mm when the second seal closest to the first opening and the end face of the fixing part having the first opening are positioned at the same position in the extending direction of the vacuum connector.

7. The robotic arm according to any one of claims 2 to 4, characterized in that, The adsorption component includes: Two clamping parts are respectively disposed on both sides of the end of the vacuum connector and the fixing part having the first opening in a first direction. One clamping part has at least one first through hole extending in the first direction, and the other clamping part has at least one first threaded part extending in the first direction. The first direction is parallel to the end face of the fixing part having the first opening. At least one first screwed member, which passes through the first through hole and is screwed to the first threaded portion; An adsorption section is disposed on the side of the vacuum connector away from the fixing section and is connected to the two clamping sections. The adsorption section has the adsorption hole, the second sub-gas channel and the connecting hole.

8. The robotic arm according to claim 7, characterized in that, The adsorption part has at least one second threaded portion at one end with the connecting hole, which is adjacent to the connecting hole. The second threaded portion extends along a second direction. The first sealing member is disposed between the second threaded portion and the connecting hole. The second direction intersects the first direction. The vacuum connector has at least one second through hole extending along the second direction. The adsorption component further includes: At least one second screw connector, which passes through the second through hole and is screwed into the second threaded portion.

9. The robotic arm according to claim 3 or 4, characterized in that, The vacuum connector has a first annular groove surrounding the third opening on its end face, and the first seal has an annular shape and is partially disposed in the first annular groove. And / or, the outer wall of the vacuum connector has a second annular groove disposed circumferentially along the vacuum connector, and the second seal is annular in shape and partially disposed in the second annular groove.

10. A semiconductor device comprising at least one electroplating chamber assembly, the electroplating chamber assembly including an electroplating chamber and a clamp disposed above the electroplating chamber, the clamp being capable of fixing a substrate and carrying the substrate to an electroplating solution in the electroplating chamber for electroplating process, characterized in that, It also includes a robotic arm as described in any one of claims 1-9, capable of placing a substrate into or removing the substrate from the fixture.

11. A method for adjusting a robotic arm, characterized in that, The robotic arm applied to any one of claims 1 to 9 comprises: The moving part of the robot is moved relative to the fixed part of the robot to change the extension length of the moving part, so that after the outer convex wall part of the receiving groove of the clamp extends into the through groove of the moving part, the moving part is matched with the clamp and then the substrate is placed in the clamp or removed from the clamp. Specifically, before and after the moving part moves relative to the fixed part, the substrate adsorption channel formed by the moving part and the fixed part is in a sealed state.

12. The adjustment method for the robotic arm according to claim 11, characterized in that, The fixed part has a first opening communicating with the second airway. The first airway includes a first sub-airway and a second sub-airway. The movable part includes a vacuum connector and an adsorption assembly. The vacuum connector extends at least partially into the second airway through the first opening. The vacuum connector has the first sub-airway and a second opening and a third opening communicating with the first sub-airway. The second opening is located inside the second airway. The first sub-airway communicates with the second airway through the second opening. The adsorption assembly has an adsorption hole, the second sub-airway, and a connecting hole. The second sub-airway communicates with the adsorption hole and the connecting hole. One end of the adsorption assembly with the connecting hole is connected to one end of the vacuum connector with the third opening. The second sub-airway communicates with the first sub-airway through the connecting hole and the third opening. The manipulator also includes a first sealing member. The first sealing member is disposed between the end face of the adsorption assembly with the connecting hole and the end face of the vacuum connector with the third opening, and is disposed around the third opening. It is configured to seal the gap between the third opening and the connecting hole. The adsorption assembly includes two clamping parts, at least one first screw connector, and an adsorption part. The two clamping parts are located on both sides of the end of the vacuum connector and the fixing part having the first opening in a first direction. One clamping part has at least one first through hole extending in the first direction, and the other clamping part has at least one first threaded part extending in the first direction. The first direction is parallel to the end face of the fixing part having the first opening. The first screw connector passes through the first through hole and is screwed to the first threaded part. The adsorption part is located on the side of the vacuum connector away from the fixing part and is connected to the two clamping parts. The adsorption part has the adsorption hole, the second sub-gas passage, and the connecting hole. The step of moving the movable part of the robotic arm relative to the fixed part of the robotic arm includes: Disassemble the first screwed member from the first through hole and the first threaded portion; The vacuum connector, the clamping part, and the adsorption part are moved relative to the fixing part in a direction perpendicular to the first opening; The first screwed member passes through the first through hole and is screwed onto the first threaded portion.

Images