Dual track single tube take-up device for semiconductor equipment

Abstract

The present application belongs to the technical field of semiconductor integrated circuit processing, in particular to a double-track single-pipe material collecting device for semiconductor equipment; the track body comprises a first track and a second track, and a track cover plate is installed on the track body; a bend is installed on the fixed bottom plate, and a bend cover plate is installed on the bend; one end of the first track is installed on the fixed bottom plate and connected with the bend; two rows of sliding grooves are arranged in the bend and the first track; one end of the second track is installed on a material collecting rack, and one row of sliding grooves is arranged in the second track; a rotating sliding channel structure is arranged between the first track and the second track, and the rotating sliding channel structure transfers the products in the first track to the second track; a material pipe is installed at the end of the second track away from the rotating sliding channel structure; the products in the two sliding grooves of the first track are transferred to one sliding groove of the second track by rotation, and the two rows of mirror image products are arranged in the same direction of the material pipe.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor integrated circuit processing technology, and specifically relates to a dual-track single-tube receiving device for semiconductor equipment. Background Technology

[0002] Most integrated automatic lead cutting and forming machines for semiconductor integrated circuit punches adopt a single-track, single-tube receiving method. With the continuous increase in enterprise orders and tight delivery times, the layout of semiconductor product structures is also constantly being adjusted. For example, the original single-row, multi-column design has been changed to a symmetrical double-row, multi-column design, where the two rows of products are mirror images. In order to meet the production needs of different product structures, the receiving method also needs to be further changed. Therefore, this application proposes a double-track, single-tube receiving device for semiconductor equipment. Summary of the Invention

[0003] To address the aforementioned problems, this invention proposes a dual-track single-tube receiving device for semiconductor equipment, comprising a fixed base plate, a receiving frame, and a track body; the track body includes a first track and a second track, and a track cover plate is installed on the track body;

[0004] A curved track is installed on the fixed base plate, and a curved cover plate is installed on the curved track; one end of the first track is installed on the fixed base plate and connects with the curved track; two rows of sliding grooves are provided in both the curved track and the first track; one end of the second track is installed on the receiving machine frame, and a row of sliding grooves is provided in the second track;

[0005] A rotary slide structure is provided between the first track and the second track, which transfers the products in the first track to the second track; a material pipe is installed at the end of the second track away from the rotary slide structure.

[0006] Furthermore, the rotating slide structure includes a track connecting plate, a rotating track, and a drive assembly; both ends of the track connecting plate are fixedly connected to track one and track two, respectively; the fixed end of the drive assembly is mounted on the track connecting plate, and the drive end of the drive assembly passes through the track connecting plate and is fixedly connected to the rotating track; the rotating track is on the same plane as track one and track two, and a temporary storage groove and a flow groove are provided on the rotating track, and a rotating cover plate is installed on the rotating track;

[0007] Mounting plate 1 and mounting plate 2 are installed at the bottom of the first track; cylinder 1 is installed on mounting plate 1 and cylinder 2 is installed on mounting plate 2. Cylinder 2 is installed at the end of the first track near the rotating track, and cylinder 1 is located on the side of cylinder 2 near the curve; mounting block 1 is installed at the end of cylinder 2, and a stop pin is fixedly installed on mounting block 1.

[0008] Furthermore, the drive assembly includes a motor mounting plate and a rotating shaft; multiple mounting posts are installed between the bottom of the motor mounting plate and the track connecting plate, and a reducer and a first motor are sequentially installed on the bottom of the motor mounting plate; the output shaft of the reducer passes through the motor mounting plate and is connected to a transmission assembly, a photoelectric control assembly is installed on the transmission assembly, a rotating shaft is fixedly installed on the photoelectric control assembly, and the other end of the rotating shaft passes through the track connecting plate and is fixedly connected to the rotating track; a protective cover is installed around the track connecting plate and the motor mounting plate.

[0009] Furthermore, the transmission assembly includes a plunger mounting plate and a ball-head plunger; the plunger mounting plate is fixedly connected to the output shaft of the reducer, and ball-head plungers are installed on both sides of the plunger mounting plate; a photoelectric control assembly is installed at the end of the plunger mounting plate away from the output shaft of the reducer.

[0010] Furthermore, the photoelectric control component includes a light-blocking plate and a photoelectric sensor; the light-blocking plate is mounted on a plunger mounting plate; a sensor mounting plate is mounted on the end of the track connecting plate facing the light-blocking plate, and the photoelectric sensor is mounted on the sensor mounting plate, with the position of the photoelectric sensor corresponding to the position of the light-blocking plate.

[0011] Furthermore, a No. 1 bearing is installed inside the track connecting plate, and a bearing bushing is installed at the end of the track connecting plate away from the rotating track; a No. 2 bearing is installed in the middle of the bearing bushing; a locking ring is installed below the bearing bushing; a grinding shim is fixedly installed between the rotating shaft and the rotating track, and the rotating shaft passes through the No. 1 bearing, the No. 2 bearing and the locking ring in sequence from one end of the rotating track. A threaded section is provided on the end of the rotating shaft away from the locking ring and the rotating slide, and an adjusting nut is threadedly connected to the threaded section.

[0012] Furthermore, a second mounting block is installed on the rotating cover plate, and a third cylinder is installed on the second mounting block. The position of the third cylinder corresponds to one end of the temporary storage groove.

[0013] Furthermore, a grooved mounting block is installed at the end of the first track away from the rotating track; an adjustment plate is installed on the fixed base plate, and the adjustment plate is installed in conjunction with the grooved mounting hole.

[0014] The end of the second track away from the rotating track is fixedly connected to the receiving machine frame by a bolt assembly;

[0015] A limit block and a push-out cylinder are installed at the end of the second track away from the first track, and a push rod is installed on the push-out cylinder; a third mounting block is installed at the end of the track cover plate near the material pipe, and a vibration cylinder is installed on the third mounting block; a speed regulating valve is installed inside the push-out cylinder.

[0016] Furthermore, mounting plates No. 3 and No. 4 are sequentially installed on the No. 1 track, and an ion fan is installed on mounting plate No. 4; light sensors are installed at both ends and in the middle of the track body; a curved plate is installed on the end of the No. 1 cylinder away from the No. 2 cylinder on the No. 1 track, and a set of light sensors are installed on the curved plate.

[0017] Multiple air connectors are installed on the side of the track body.

[0018] Furthermore, the track cover plate includes a long cover plate and a short cover plate; both the long cover plate and the short cover plate are equipped with handles; the track body is equipped with a support plate at the rotating track position, one end of the support plate is fixedly connected to the long track, and the other end of the support plate is fixedly connected to the short track; a transparent cover plate is installed on the support plate.

[0019] Beneficial effects

[0020] The advantages of this invention over the prior art are as follows:

[0021] 1. This application uses a rotating slide structure to connect track 1 and track 2, and rotates the slides to transfer the products in the two chute of track 1 to one chute of track 2 for unloading; it also combines two rows of mirrored products with a row of products in the same direction of the feed pipe.

[0022] 2. This application achieves a simple structure and precise rotation angle through the synergistic effect of the light-blocking plate and photoelectric sensor, which can completely ensure the seamless connection between the sliding grooves of the rotating track, track one and track two. At the same time, the light-blocking plate also has the function of transmitting torque, making it a dual-purpose device that saves space and cost.

[0023] This application improves the continuity and linkage of the material unloading process by having cylinder one count and cylinder two stop during the rotation of the rotating track, and by rationally planning the time allocation.

[0024] Other features and advantages of the invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention may be realized and obtained by means of the structures pointed out in the description, claims and drawings. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 A schematic diagram of the overall structure in an embodiment of the present invention is shown.

[0027] Figure 2 A schematic diagram of the structure with the track cover plate and the curved cover plate removed in an embodiment of the present invention is shown.

[0028] Figure 3 A front view of the overall embodiment of the present invention is shown.

[0029] Figure 4 A top view of the overall embodiment of the present invention is shown.

[0030] Figure 5 A schematic diagram of the rotating slide structure in an embodiment of the present invention is shown.

[0031] Figure 6 A front view of the rotating slide structure in an embodiment of the present invention is shown.

[0032] Figure 7 A side view of the rotating slide structure in an embodiment of the present invention is shown.

[0033] Figure 8 A schematic diagram of the bottom of the rotating track in an embodiment of the present invention is shown.

[0034] Figure 9 A schematic diagram of the structure of cylinder No. 2 in an embodiment of the present invention is shown.

[0035] Figure 10 A schematic diagram of the rotation of the rotating slide structure in an embodiment of the present invention is shown.

[0036] Figure 11 A schematic diagram of the start and end positions of the light-blocking sheet in an embodiment of the present invention is shown.

[0037] In the diagram, 1. Curve; 2. Fixed base plate; 3. Curved cover plate; 4. Track body;

[0038] 401. Track No. 1; 402. Track No. 2; 5. Track cover plate; 501. Long cover plate; 502. Short cover plate; 6. Handle; 7. Track connecting plate; 8. Slotted mounting block; 9. Adjusting plate; 10. Bolt assembly; 11. Cylinder No. 2; 12. Mounting plate No. 2; 13. Receiving frame; 14. Cylinder No. 1; 15. Mounting plate No. 1; 16. Mounting block No. 1; 17. Stop pin; 18. Mounting plate No. 3; 19. Mounting plate No. 4; 20. Light sensor; 21. Ion fan; 23. Bending plate; 24. Air connector; 25. Limit block; 26. Push cylinder; 27. Push rod; 28. 1. Mounting block No. 3; 29. ​​Vibration cylinder; 30. Speed ​​control valve; 31. Support plate; 32. Transparent cover plate; 33. Rotating track; 34. Rotating cover plate; 35. Mounting block No. 2; 36. Cylinder No. 3; 37. Grinding shim; 38. Rotating shaft; 39. Bearing No. 1; 40. Bearing bushing; 41. Bearing No. 2; 42. Locking ring; 43. Adjusting nut; 44. Light blocking plate; 45. Plunger mounting plate; 46. Ball plunger; 47. Motor mounting plate; 48. Reducer; 49. Motor No. 1; 50. Sensor mounting plate; 51. Photoelectric sensor; 52. Mounting column; 53. Protective cover. Detailed Implementation

[0039] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0040] This application provides a dual-track single-tube take-up device for semiconductor equipment, referenced... Figure 1 and Figure 3 It includes a fixed base plate 2, a receiving frame 13, and a track body 4; the track body 4 includes a first track 401 and a second track 402, and a track cover plate 5 is installed on the track body 4.

[0041] A bend 1 is installed on the fixed base plate 2, and a curved cover plate 3 is installed on the bend 1; one end of the first track 401 is installed on the fixed base plate 2 and connected to the bend 1; both the bend 1 and the first track 401 are provided with two rows of sliding grooves; one end of the second track 402 is installed on the receiving frame 13, and the second track is provided with a row of sliding grooves.

[0042] A rotary slide structure is provided between the first track 401 and the second track 402. The rotary slide structure transfers the products in the first track 401 to the second track 402. A material pipe is installed at the end of the second track 402 away from the rotary slide structure.

[0043] refer to Figure 2 and Figure 5 The rotating slide structure includes a track connecting plate 7, a rotating track 33, and a drive assembly; both ends of the track connecting plate 7 are fixedly connected to track 401 and track 402 respectively; the fixed end of the drive assembly is installed on the track connecting plate 7, and the drive end of the drive assembly passes through the track connecting plate 7 and is fixedly connected to the rotating track 33; the rotating track 33 is on the same plane as track 401 and track 402, and a rotating cover plate 34 is installed on the rotating track 33.

[0044] In one embodiment of the present invention, reference is made to Figure 3 and Figure 9 A first mounting plate 15 and a second mounting plate 12 are installed at the bottom of the first track 401; a first cylinder 14 is installed on the first mounting plate 15, and a second cylinder 11 is installed on the second mounting plate 12. The second cylinder 11 is installed at one end of the first track 401 near the rotating track 33, and the first cylinder 14 is located on the side of the second cylinder 11 near the bend 1; a first mounting block 16 is installed at the end of the second cylinder 11, and a stop pin 17 is fixedly installed on the first mounting block 16.

[0045] The product slides down along the two rows of grooves inside the bend 1. At the inlet of the bend 1, the groove is horizontal, and at the outlet of the bend 1, the groove is inclined. The product slides down from the inlet of the bend 1 to the outlet of the bend 1 by air blowing. A curved cover plate 3 is fixed on the bend 1 to prevent the product from leaving the track when sliding in the bend 1. The end of the bend 1 is connected to the track body 4, and the inclination angle of the track body 4 is consistent with the inclination angle of the outlet of the bend 1.

[0046] The rotating slide structure divides the track body 4 into two parts: track 1 401 and track 2 402. Track 1 401 is longer, while track 2 402 is shorter. Track 2 402 is located at the end of the material conveying system and connects to the material pipe. Track 1 401, like the curve 1, has two chutes, distinguished by inner and outer chutes. Figure 2 The outer slide is located at the right end, and the inner slide is located at the left end. Track 402 has only one slide, and the centers of the two outer slides coincide.

[0047] Cylinder 14 primarily functions as a counter, counting once for each upward movement to determine the number of times the product falls into the feed tube and whether the feed tube needs to be replaced. Cylinder 11 acts as a stop, keeping the product on track 401 and controlling the orderly falling of the product. The distance between cylinders 14 and 11 can be designed according to actual needs. After the product falls into track 401 from bend 1, cylinder 11 extends at the end of track 401, intercepting the product on the long track. All products are arranged sequentially, and then cylinder 14 extends to intercept the product directly above it. One product rests on the track cover 5, then the second cylinder 11 retracts; all products between the first cylinder 14 and the second cylinder 11 fall, ensuring that the number of products in both rows is consistent when entering the rotating track 33; during unloading, both rows of products slide down simultaneously, the outer (right) products pass through the outer chute of the first track 401 and the flow chute of the rotating track 33 in sequence to the outer chute of the second track 402 and enter the material pipe, the material pipe is inserted into the end interface of the chute of the second track 402 for collection; while the inner products slide into the temporary storage chute of the rotating track 33 for storage, and a baffle is set at the end of the temporary storage chute ( Figure 2 (Point b in the diagram) is used to prevent products from rushing out of the temporary storage chute; once all products inside the flow chute of the rotating track 33 have slid out of the flow chute, the drive assembly is activated to rotate the rotating track 33 180° clockwise (see reference). Figure 10 The products in the temporary storage chute of the rotating track 33 also flow into the material pipe through the second track 402. Then the drive component drives the rotating track 33 to rotate 180° counterclockwise to return to the initial position. Two rotations constitute one cycle of work.

[0048] During the two rotations of the rotating track 33, cylinder 11 of track 401 extends to stop, and cylinder 14 of track 1 retracts after counting and extends again to hold the product. All products between cylinder 14 of track 1 and cylinder 11 of track 2 wait for the next cycle. This ensures that when the rotating track 33 returns to its initial position, the material dropping action can be performed directly. When cylinder 11 of track 2 counts to the set number and there are no products on rotating track 33 and track 402 of track 2, it can be determined that the material tube is full, and then the material tube is automatically replaced, reducing the time for manual material tube replacement. The set time difference between reaching the set number of times and starting the automatic material tube replacement is used to give sufficient time for material dropping.

[0049] This application uses a rotating slide structure to connect track 401 and track 402, and rotates the slides to transfer the products in the two chute of track 401 to one chute of track 402 for feeding; it also arranges two rows of mirrored products and makes one row of products with the same feed pipe direction.

[0050] In one embodiment of the present invention, reference is made to Figure 5 , Figure 6 and Figure 7 The drive assembly includes a motor mounting plate 47 and a rotating shaft 38; multiple mounting posts 52 are installed between the bottom of the motor mounting plate 47 and the track connecting plate 7; a reducer 48 and a first motor 49 are sequentially installed on the bottom of the motor mounting plate 47; the output shaft of the reducer 48 passes through the motor mounting plate 47 and is connected to a transmission assembly; a photoelectric control assembly is installed on the transmission assembly; a rotating shaft 38 is fixedly installed on the photoelectric control assembly; the other end of the rotating shaft 38 passes through the track connecting plate 7 and is fixedly connected to the rotating track 33; a protective cover 53 is installed around the track connecting plate 7 and the motor mounting plate 47;

[0051] The transmission assembly includes a plunger mounting plate 45 and a ball plunger 46; the plunger mounting plate 45 is fixedly connected to the output shaft of the reducer 48, and ball plungers 46 are installed on both sides of the plunger mounting plate 45; a photoelectric control assembly is installed at the end of the plunger mounting plate 45 away from the output shaft of the reducer 48.

[0052] refer to Figure 8 and Figure 11 The photoelectric control component includes a light-blocking plate 44 and a photoelectric sensor 51; the light-blocking plate 44 is mounted on a plunger mounting plate 45; a sensor mounting plate 50 is mounted on one end of the track connecting plate 7 facing the light-blocking plate 44, and the photoelectric sensor 51 is mounted on the sensor mounting plate 50, with the position of the photoelectric sensor 51 corresponding to the position of the light-blocking plate 44.

[0053] When the rotating track 33 rotates, specifically by starting the No. 1 motor 49, the plunger mounting plate 45 fixed at the shaft end of the reducer 48 rotates. Since the ball head plunger 46 presses against the light-blocking plate 44, the plunger mounting plate 45 transmits torque to the light-blocking plate 44 through the ball head plunger 46. The light-blocking plate 44 then transmits torque to the rotating shaft 38. The plunger mounting plate 45 drives the light-blocking plate 44 to rotate, so the rotating shaft 38 on the light-blocking plate 44 also rotates, and the rotating shaft 38 drives the rotating track 33 to rotate.

[0054] During the rotation of the light-blocking plate 44, the power supply to the two photoelectric sensors 51 is continuously controlled, for reference. Figure 8 and Figure 11 The starting and ending positions of the rotation of the rotating track 33 are determined by the coordinated action of the light-blocking plate 44 and the two photoelectric sensors 51. The light-blocking plate 44 is a circular plate, in which half of the diameter of the circular plate is larger than that of the other half. The area of ​​the circular plate with the larger half of the diameter can block the photoelectric sensor 51, thereby controlling the on and off of the photoelectric sensor 51 to perform a coarse positioning of the rotating track 33. After detecting the blockage, the parameters of the first motor 49 are adjusted to perform a fine positioning of the rotating track 33.

[0055] In one embodiment of the present invention, reference is made to Figure 6The track connecting plate 7 is provided with a first bearing 39 inside, and a bearing bushing 40 is installed at the end of the track connecting plate 7 away from the rotating track 33; a second bearing 41 is provided in the middle of the bearing bushing 40; a locking ring 42 is installed below the bearing bushing 40; a grinding shim 37 is fixedly installed between the rotating shaft 38 and the rotating track 33, and the rotating shaft 38 passes through the first bearing 39, the second bearing 41 and the locking ring 42 in sequence from one end of the rotating track 33. The rotating shaft 38 is provided with a threaded section at the end of the locking ring 42 away from the rotating slide, and an adjusting nut 43 is threadedly connected to the threaded section.

[0056] By adjusting the thickness of the grinding shim 37, the groove on the rotating track 33 can be aligned with the groove surfaces on track 401 and track 402. The rotating shaft 38 and the grinding shim 37 pass through point a on the rotating shaft 38 (see reference). Figure 8 The locking ring 42 is locked below the bearing bushing 40 to prevent the second bearing 41 from falling off; the adjusting nut 43 is locked in the threaded section, and the side thread of the adjusting nut 43 (see reference) Figure 6 (Not shown) is used to lock the set screw to prevent it from loosening. The round hole in the middle of the light-blocking plate 44 is used to pass through the thin shaft end of the rotating shaft 38. The light-blocking plate 44 also has threaded holes on its side (see reference). Figure 6 (Unmarked) is used to lock the set screw, which rests on the rotating shaft 38.

[0057] In one embodiment of the present invention, reference is made to Figure 5 and Figure 7 The rotating cover plate 34 is equipped with a second mounting block 35, and the second mounting block 35 is equipped with a third cylinder 36, which corresponds to one end of the temporary storage groove.

[0058] Meanwhile, during the rotation of the rotating track 33, in order to prevent the products in the temporary storage chute from being thrown out, the third cylinder 36 extends to block the products; after the positions of the temporary storage chute and the flow chute of the rotating track 33 are exchanged, the third cylinder 36 retracts, and the products in the temporary storage chute flow from the rotating track 33 into the outer chute of the second track 402 and then into the material pipe; then the rotating track 33 rotates 180° counterclockwise to return to the initial position, which is one working cycle.

[0059] In one embodiment of the present invention, a grooved mounting block 8 is installed at the end of the first track 401 away from the rotating track 33; an adjustment plate 9 is installed on the fixed base plate 2, and the adjustment plate 9 is installed in conjunction with the grooved mounting hole.

[0060] The end of the second track 402 away from the rotating track 33 is fixedly connected to the receiving frame 13 by bolt assembly 10;

[0061] The second track 402 is equipped with a limit block 25 and a push cylinder 26 at the end away from the first track 401. A push rod 27 is installed on the push cylinder 26. The track cover plate 5 is equipped with a third mounting block 28 at the end near the material pipe. A vibration cylinder 29 is installed on the third mounting block 28. A speed regulating valve 30 is installed inside the push cylinder 26.

[0062] Bolt assembly 10 includes bolts, washers and nuts; limit block 25 limits ejection cylinder 26, ejection cylinder 26 pushes in the direction of material drop, ejection cylinder when the material tube is full of product; when product is stuck at the opening of material tube, vibration cylinder 29 is started to run; speed regulating valve 30 is installed in all cylinders to make the cylinder speed run at a moderate level.

[0063] In one embodiment of the present invention, reference is made to Figure 1 The first track 401 is sequentially equipped with a third mounting plate 18 and a fourth mounting plate 19, and an ion fan 21 is installed on the fourth mounting plate 19; light sensors 20 are installed at both ends and in the middle of the track body 4; a bent plate 23 is installed on the end of the first cylinder 14 away from the second cylinder 11 on the first track 401, and a set of light sensors 20 are installed on the bent plate 23;

[0064] Multiple air connectors 24 are installed on the side of the track body 4.

[0065] The ion fan 21 is used to eliminate the effects of static electricity in the first track 401. The light sensor 20 is installed at various positions of the track body 4 to detect whether there is a product at each position. The light sensor 20 is fixed to the track body 4 by a corresponding fixing plate. The bending plate 23 is used to fix the sensor wire harness. The light sensor 20 located at the bending plate 23 emits light from both above and below. When a product is detected, the first cylinder 14 will extend and push the product onto the long cover plate 501. Multiple air connectors 24 are also set on the track body 4 to prevent the product from getting stuck by blowing air.

[0066] In one embodiment of the present invention, the track cover 5 includes a long cover 501 and a short cover 502; both the long cover 501 and the short cover 502 are equipped with handles 6; the track body 4 is equipped with a support plate 31 at the position of the rotating track 33, one end of the support plate 31 is fixedly connected to the long track, and the other end of the support plate 31 is fixedly connected to the short track; Reference Figure 4 A transparent cover plate 32 is installed on the support plate 31 to protect the rotating slide structure.

[0067] The long cover plate 501 is fixed to the first track 401 by the handle 6, and the end cover plate is fixed to the second track 402; the transparent cover plate 32 protects the rotating track 33 and the operator during the rotation of the rotating track 33.

[0068] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A dual-track single-tube take-up device for semiconductor equipment, characterized in that, It includes a fixed base plate (2), a receiving frame (13), and a track body (4); the track body (4) includes a first track (401) and a second track (402), and a track cover plate (5) is installed on the track body (4); A bend (1) is installed on the fixed base plate (2), and a curved cover plate (3) is installed on the bend (1); one end of the first track (401) is installed on the fixed base plate (2) and connected to the bend (1); two rows of sliding grooves are provided in both the bend (1) and the first track (401); one end of the second track (402) is installed on the receiving frame (13), and a row of sliding grooves is provided in the second track; A rotary slide structure is provided between the first track (401) and the second track (402), which transfers the product in the first track (401) to the second track (402); a material pipe is installed at the end of the second track (402) away from the rotary slide structure. The rotating slide structure includes a track connecting plate (7), a rotating track (33), and a drive assembly; the two ends of the track connecting plate (7) are fixedly connected to the first track (401) and the second track (402) respectively; the fixed end of the drive assembly is installed on the track connecting plate (7), and the drive end of the drive assembly passes through the track connecting plate (7) and is fixedly connected to the rotating track (33); the rotating track (33) is on the same plane as the first track (401) and the second track (402), and a temporary storage groove and a flow groove are provided on the rotating track (33), and a rotating cover plate (34) is installed on the rotating track (33). The bottom of the first track (401) is equipped with a first mounting plate (15) and a second mounting plate (12); a first cylinder (14) is installed on the first mounting plate (15), and a second cylinder (11) is installed on the second mounting plate (12). The second cylinder (11) is installed at one end of the first track (401) near the rotating track (33), and the first cylinder (14) is located on the side of the second cylinder (11) near the curve (1); a first mounting block (16) is installed at the end of the second cylinder (11), and a stop pin (17) is fixedly installed on the first mounting block (16).

2. The dual-track single-tube receiving device for semiconductor equipment according to claim 1, characterized in that, The drive assembly includes a motor mounting plate (47) and a rotating shaft (38); multiple mounting posts (52) are installed between the bottom of the motor mounting plate (47) and the bottom of the track connecting plate (7); a reducer (48) and a first motor (49) are installed sequentially on the bottom of the motor mounting plate (47); the output shaft of the reducer (48) passes through the motor mounting plate (47) and is connected to a transmission assembly; a photoelectric control assembly is installed on the transmission assembly; a rotating shaft (38) is fixedly installed on the photoelectric control assembly; the other end of the rotating shaft (38) passes through the track connecting plate (7) and is fixedly connected to the rotating track (33); a protective cover (53) is installed around the track connecting plate (7) and the motor mounting plate (47).

3. A dual-track single-tube receiving device for semiconductor equipment according to claim 2, characterized in that, The transmission assembly includes a plunger mounting plate (45) and a ball plunger (46); the plunger mounting plate (45) is fixedly connected to the output shaft of the reducer (48), and ball plungers (46) are installed on both sides of the plunger mounting plate (45); a photoelectric control assembly is installed at the end of the plunger mounting plate (45) away from the output shaft of the reducer (48).

4. A dual-track single-tube receiving device for semiconductor equipment according to claim 2, characterized in that, The photoelectric control component includes a light-blocking plate (44) and a photoelectric sensor (51); the light-blocking plate (44) is mounted on a plunger mounting plate (45); a sensor mounting plate (50) is mounted on one end of the track connecting plate (7) facing the light-blocking plate (44), and the photoelectric sensor (51) is mounted on the sensor mounting plate (50), with the position of the photoelectric sensor (51) corresponding to the position of the light-blocking plate (44).

5. A dual-track single-tube take-up device for semiconductor equipment according to claim 2, characterized in that, The track connecting plate (7) is provided with a first bearing (39) inside, and a bearing bushing (40) is installed at the end of the track connecting plate (7) away from the rotating track (33); a second bearing (41) is provided in the middle of the bearing bushing (40); a locking ring (42) is installed below the bearing bushing (40); a grinding shim (37) is fixedly installed between the rotating shaft (38) and the rotating track (33), and the rotating shaft (38) passes through the first bearing (39), the second bearing (41) and the locking ring (42) in sequence from one end of the rotating track (33). The rotating shaft (38) is provided with a threaded section at the end of the locking ring (42) away from the rotating slide, and an adjusting nut (43) is threadedly connected to the threaded section.

6. A dual-track single-tube take-up device for semiconductor equipment according to claim 2, characterized in that, The rotating cover plate (34) is equipped with a second mounting block (35), and the second mounting block (35) is equipped with a third cylinder (36). The third cylinder (36) corresponds to the position of one end of the temporary storage chute.

7. A dual-track single-tube take-up device for semiconductor equipment according to claim 6, characterized in that, A grooved mounting block (8) is installed at the end of the first track (401) away from the rotating track (33); an adjustment plate (9) is installed on the fixed base plate (2), and the adjustment plate (9) is installed in conjunction with the grooved mounting block (8); The end of the second track (402) away from the rotating track (33) is fixedly connected to the receiving frame (13) by a bolt assembly (10); The second track (402) is equipped with a limit block (25) and a push cylinder (26) at the end away from the first track (401). A push rod (27) is installed on the push cylinder (26). The track cover plate (5) is equipped with a third mounting block (28) at the end near the material pipe. A vibration cylinder (29) is installed on the third mounting block (28). A speed regulating valve (30) is installed inside the push cylinder (26).

8. A dual-track single-tube take-up device for semiconductor equipment according to claim 7, characterized in that, Mounting plate number 3 (18) and mounting plate number 4 (19) are installed sequentially on the first track (401), and an ion fan (21) is installed on the mounting plate number 4 (19); light sensors (20) are installed at both ends and in the middle of the track body (4); a bent plate (23) is installed on the end of the first cylinder (14) away from the second cylinder (11) on the first track (401), and a set of light sensors (20) is installed on the bent plate (23); Multiple air connectors (24) are installed on the side of the track body (4).

9. A dual-track single-tube take-up device for semiconductor equipment according to claim 1, characterized in that, The track cover plate (5) includes a long cover plate (501) and a short cover plate (502); both the long cover plate (501) and the short cover plate (502) are equipped with handles (6); the track body (4) is equipped with a support plate (31) at the position of the rotating track (33), one end of the support plate (31) is fixedly connected to the first track (401), and the other end of the support plate (31) is fixedly connected to the second track (402); a transparent cover plate (32) is installed on the support plate (31).

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