MEMS triaxial gyroscope structure for vehicle

Abstract

The application provides a MEMS three-axis gyroscope structure for a vehicle, belonging to the technical field of gyroscopes, comprising a driving unit, a detecting unit and a first coupling unit, the driving unit comprises two groups of driving components, the two groups of driving components are spaced apart along the Y direction, the driving component comprises a driving mass and a driving module connected to the driving mass, the driving module drives the driving mass to move along the X direction under the action of electrostatic force, and the two groups of driving masses move in opposite directions; the detecting unit comprises a Z-axis detecting part and an X / Y-axis detecting part located between the two driving masses, the Z-axis detecting part is used for moving along the Y direction under the action of the driving mass, and the X / Y-axis detecting part is used for twisting around the X axis or the Y axis under the action of the driving mass; the first coupling unit is elastically connected between the two driving masses and is used for limiting the same-direction movement of the two driving masses along the X direction.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of gyro structure, and more particularly to a MEMS three-axis gyro structure for vehicles. BACKGROUND

[0002] Silicon-based MEMS gyroscopes have achieved wide application in the automotive electronics field due to their small size, light weight, low cost, and high reliability, and provide important motion state sensing support for key functions such as vehicle navigation, attitude control, automatic navigation, and safety systems. As an important form of silicon-based MEMS gyroscopes, three-axis gyroscopes have multi-dimensional and key applications in vehicles, providing core support for safe driving, precise control, and intelligent experience of vehicles.

[0003] However, the three-axis gyroscopes in the prior art have the defect of low integration. The sensing structures of each axis are often designed separately or combined simply, which makes it difficult to further reduce the overall volume, is not conducive to the rationalization of the layout of the vehicle body structure, and easily introduces errors during assembly, affecting the measurement consistency.

[0004] In addition, the existing three-axis gyroscopes have insufficient robustness and weak suppression ability to environmental disturbances such as vibration and temperature, which affects the measurement accuracy of the MEMS gyroscope when applied to vehicles. The driving conditions of vehicles are complex and changeable, especially when driving on bumpy roads, steep slopes, and waterlogged sections, etc. The MEMS gyroscope will be subjected to severe vibration and impact, which greatly reduces the stability and accuracy of the measurement data, and cannot meet the demand for high-precision motion sensing of automobiles in complex scenarios. SUMMARY

[0005] The purpose of the present application is to provide a MEMS three-axis gyro structure for vehicles, which aims to solve the problem of low integration and insufficient robustness of existing three-axis gyroscopes, which affects the detection accuracy when applied to vehicles.

[0006] To achieve the above-mentioned purpose, the technical solution adopted by the present application is:

[0007] A MEMS three-axis gyro structure for vehicles is provided, comprising:

[0008] A driving unit comprising two groups of driving components, the two groups of driving components being spaced apart along the Y direction, the driving component comprising a driving mass and a driving module connected to the driving mass, the driving module being used to receive an external input electrical signal, the driving module driving the driving mass to move along the X direction under the action of electrostatic force, and the two groups of driving masses moving in opposite directions;

[0009] a detection unit comprising a Z-axis detection part and an X / Y-axis detection part between the two driving masses, the Z-axis detection part being used to move along the Y direction under the action of the driving masses, and the X / Y-axis detection part being used to twist around the X axis or the Y axis under the action of the driving masses;

[0010] a first coupling unit elastically connected between the two driving masses, used to limit the same-direction movement of the two driving masses along the X direction.

[0011] In a possible implementation, the first coupling unit comprises a plurality of limiting blocks, each of which is connected between the two driving masses, the plurality of limiting blocks are distributed along the X direction, and the limiting blocks on the opposite sides in the Y direction are used to move along the X direction with the corresponding driving masses.

[0012] In a possible implementation, the Z-axis detection part comprises:

[0013] a first mass elastically connected with one of the driving masses;

[0014] a second mass elastically connected with the other driving mass, the second mass and the first mass being used to move along the X direction under the action of the driving masses, and having the freedom of reverse movement along the Y direction;

[0015] a Z-axis detection structure comprising two Z-axis masses distributed along the Y direction, one of the Z-axis masses being elastically connected with the first mass, and the other Z-axis mass being elastically connected with the second mass, and the two Z-axis masses being used to move reversely along the Y direction;

[0016] The MEMS three-axis gyroscope structure for vehicles further comprises a second coupling unit elastically connected between the two Z-axis masses, used to limit the same-direction movement of the two Z-axis masses along the Y direction.

[0017] In a possible implementation, the second coupling unit comprises a plurality of coupling modules, the plurality of coupling modules being distributed along the X direction, and each of the coupling modules being connected between the two Z-axis masses.

[0018] In a possible implementation, the coupling module comprises:

[0019] a third mass elastically connected with one of the Z-axis masses;

[0020] a fourth mass elastically connected with the other Z-axis mass;

[0021] wherein the third mass and the fourth mass are elastically connected.

[0022] In a possible implementation, the driving mass has a driving part extending towards the Z-axis detection part, and the first mass and the second mass are respectively connected to the driving part of the driving mass.

[0023] In a possible implementation, the middle part of the Z-axis mass is provided with a plurality of feature rods and first detection electrodes, and each feature rod is provided with the first detection electrodes on opposite sides in the Y direction.

[0024] In a possible implementation, the X / Y-axis detection part comprises:

[0025] A biaxial mass is provided with a receiving through hole in the center, and the biaxial mass is elastically connected between the two driving masses;

[0026] An intermediate coupling structure is arranged in the receiving through hole, and the intermediate coupling structure is elastically connected to the biaxial mass.

[0027] In a possible implementation, the intermediate coupling structure comprises:

[0028] An outer coupling ring is arranged in the receiving through hole and is elastically connected to the biaxial mass in the X direction;

[0029] An inner coupling beam is elastically connected to the inner periphery of the outer coupling ring in the Y direction.

[0030] In a possible implementation, the driving module comprises a force adding module and a detection module.

[0031] The vehicle MEMS three-axis gyroscope structure provided by the application has the following advantages: compared with the prior art, the driving mass in the gyroscope structure needs to work in the reverse resonance mode, the first coupling unit is arranged to limit the same-direction movement of the two driving masses in the X direction, the driving mode can be forced to concentrate on the preset reverse resonance mode, the mode mixing is reduced, a stable reference vibration is provided for subsequent angular velocity detection, and the same-direction disturbance of the two driving masses caused by the vibration (impact, etc.) or the structural change caused by the temperature change in the external environment can be offset by the limiting effect of the first coupling unit on the same-direction movement of the two driving masses, and the anti-interference ability of the gyroscope structure to the environmental interference is significantly improved. BRIEF DESCRIPTION OF DRAWINGS

[0032] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments or prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without any creative effort based on these drawings.

[0033] Figure 1 A structural schematic diagram of a MEMS three-axis gyroscope structure for a vehicle provided by the embodiment of the present application;

[0034] Figure 2 A partial enlarged structural schematic diagram of a Z-axis mass block adopted by the embodiment of the present application;

[0035] Figure 3 A driving motion mode diagram of the MEMS three-axis gyroscope structure for a vehicle provided by the embodiment of the present application;

[0036] Figure 4 An X-axis detection mode diagram of the MEMS three-axis gyroscope structure for a vehicle provided by the embodiment of the present application;

[0037] Figure 5 A Z-axis detection mode diagram of the MEMS three-axis gyroscope structure for a vehicle provided by the embodiment of the present application;

[0038] Figure 6 A Y-axis detection mode diagram of the MEMS three-axis gyroscope structure for a vehicle provided by the embodiment of the present application.

[0039] In the drawings:

[0040] 11 - driving mass block; 111 - driving part; 12 - driving module; 121 - force adding module; 122 - detection module;

[0041] 21 - first mass block; 22 - second mass block; 23 - Z-axis mass block; 24 - coupling arm; 25 - characteristic rod;

[0042] 30 - X / Y-axis detection part; 31 - double-axis mass block; 32 - outer coupling ring; 33 - inner coupling beam;

[0043] 41 - limiting block;

[0044] 51 - third mass block; 52 - fourth mass block;

[0045] 60 - first detection electrode; 62 - second detection electrode. DETAILED DESCRIPTION

[0046] In order to make the technical problems, technical solutions and beneficial effects of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application and not to limit the present application.

[0047] In the claims, the specification, and the above drawings of the present application, unless otherwise clearly defined, the terms such as "first", "second" or "third" are used only to distinguish different objects, and are not used to describe a specific order.

[0048] In the claims, the specification, and the above drawings of the present application, unless otherwise clearly defined, the terms such as "fixedly connected" or "fixedly connected" should be understood broadly, that is, any connection mode between the two without displacement relationship and relative rotation relationship, that is, including non-detachable fixed connection, detachable fixed connection, integration and fixed connection through other devices or elements.

[0049] In the claims, the specification, and the above drawings of the present application, the terms such as "include", "have" and their variants are intended to mean "include but not limited to".

[0050] In the present application, Figure 1 The X direction marked in the figure is the +X direction, and the Y direction marked is the +Y direction. It is not difficult to obtain that the +Z direction is the direction outward of the paper, and the -Z direction is the direction inward of the paper.

[0051] Please refer to Figures 1 to 6 , the MEMS three-axis gyro structure for vehicle provided by the present application will be described. The MEMS three-axis gyro structure for vehicle comprises a driving unit, a detection unit and a first coupling unit. The driving unit comprises two groups of driving assemblies. The two groups of driving assemblies are spaced apart along the Y direction. The driving assembly comprises a driving mass 11 and a driving module 12 connected to the driving mass 11. The driving module 12 is used for receiving an external input electrical signal. Under the action of electrostatic force, the driving module 12 drives the driving mass 11 to move along the X direction, and the two driving masses 11 move in opposite directions. The detection unit comprises a Z-axis detection part and an X / Y-axis detection part 30 located between the two driving masses 11. The Z-axis detection part is used for moving along the Y direction under the action of the driving mass 11. The X / Y-axis detection part 30 is used for twisting around the X axis or the Y axis under the action of the driving mass 11. The first coupling unit is elastically connected between the two driving masses 11, and is used for limiting the same direction movement of the two driving masses 11 along the X direction.

[0052] The Z-axis detection part and the X / Y-axis detection part 30 are independently distributed along the X-axis, and the Z-axis detection part is elastically connected with the two driving mass blocks 11, and the X / Y-axis detection part 30 is also elastically connected with the two driving mass blocks 11, and the first coupling unit can be connected to the driving mass block 11 on the opposite sides in the X direction.

[0053] In the specific implementation, the three-axis gyro structure is mounted on a fixed detection layer, the three-axis gyro structure is located in a plane, and the fixed detection layer is located below the plane of the three-axis gyro structure (in the -Z direction). In the detection process, the Z-axis detection part changes the position in the Y direction, and the electrode in the Z-axis detection part (the electrode is in the same layer as the Z-axis detection part, but needs to be electrically connected with the fixed detection layer) identifies the position change of the Z-axis detection part, and calculates the angular velocity of the Z-axis detection part according to the capacitance value change caused by the position change. The X / Y-axis detection part 30 rotates around the X-axis or the Y-axis, and the fixed detection layer identifies the capacitance value change caused by the position change of the X / Y-axis detection part 30 through the corresponding electrodes of the fixed detection layer and the X / Y-axis detection part 30, so as to calculate the angular velocity of the X / Y-axis detection part 30.

[0054] Correspondingly, the driving mass block 11, the driving module 12, the Z-axis detection part, the X / Y-axis detection part 30 and the first coupling unit are elastically connected with the fixed detection layer.

[0055] It should be noted that the elastic connection in the present application is realized by using an elastic beam. For example, the elastic connection between the first coupling unit and the driving mass block 11 is realized by connecting one end of the elastic beam to the first coupling unit and the other end to the driving mass block 11. For another example, the elastic connection between the driving mass block 11 and the fixed detection layer is realized by connecting one end of the elastic beam to the fixed detection layer and the other end to the driving mass block 11. The point where the elastic beam is connected to the fixed detection layer is the support anchor point. However, the degrees of freedom provided by each elastic beam for the corresponding mass block are not the same. For example, the elastic beam corresponding to the driving mass block 11 allows the driving mass block 11 to have the freedom of movement along the X-axis, and the elastic beam corresponding to the first mass block 21 allows the first mass block 21 to have the freedom of movement along the Y-axis.

[0056] In the specific use process of the vehicle MEMS three-axis gyro structure, the driving mass block 11 is elastically connected with the first coupling unit on the opposite sides of the X-axis. The corresponding first coupling unit has small stiffness in the X direction and large stiffness in the Y direction, so the driving mass block 11 has the freedom in the X direction. When the driving module 12 applies force, one of the driving mass blocks 11 is subjected to the driving force in the +X direction, and the other driving mass block 11 is subjected to the driving force in the -X direction, so the two driving mass blocks 11 move towards each other (see Figure 3), half a period later, the force is reversed, and the two driving masses 11 finally oscillate periodically in the X direction, when there is an angular velocity input in the Z direction (see Figure 5 ), the Z-axis detection part changes in Y direction, and the corresponding electrode in the Z-axis detection part detects the change in the corresponding capacitance gap of the Z-axis detection part to realize differential detection; when there is an angular velocity input in the X direction (see Figure 4 ), the X / Y-axis detection part 30 twists around the Y axis under the action of the Coriolis force, and the fixed detection layer detects the change in the corresponding capacitance gap of the X / Y-axis detection part 30 to realize differential detection; when there is an angular velocity input in the Y direction (see Figure 6 ), the X / Y-axis detection part 30 twists around the X axis under the action of the Coriolis force, and the fixed detection layer detects the change in the corresponding capacitance gap of the X / Y-axis detection part 30 to realize differential detection.

[0057] It should be noted that when the two driving masses 11 move reversely in the X direction, the X / Y-axis detection part 30 and the Z-axis detection part connected with the two driving masses 11 have corresponding motion postures, which are defined as initial motion states, and the position change of the Z-axis detection part in the Y direction is a Y direction position change based on the initial motion state, and similarly, the twisting of the X / Y-axis detection part 30 is also in the initial motion state.

[0058] The vehicle MEMS three-axis gyroscope structure provided by the application compared with the prior art, the driving mass 11 in the gyroscope structure needs to work in the reverse resonance mode, the first coupling unit is arranged to limit the same direction motion of the two driving masses 11, the driving mode can be forced to concentrate on the preset reverse resonance mode, the mode mixing is reduced, and a stable reference vibration is provided for subsequent angular velocity detection; the vibration (impact, etc.) in the external environment or the structural change caused by temperature change will cause the same disturbance to the two driving masses 11, and the limitation of the first coupling unit to the same direction motion of the two driving masses 11 can offset this common mode disturbance, and the anti-interference ability of the gyroscope structure to environmental interference is significantly improved.

[0059] In some embodiments, referring to Figure 1 , the first coupling unit includes a plurality of limiting blocks 41, each limiting block 41 is connected between the two driving masses 11, the plurality of limiting blocks 41 are distributed along the X direction, and the limiting blocks 41 are located on opposite sides in the Y direction to move with the corresponding driving mass 11 in the X direction.

[0060] Taking the first coupling unit including two limiting blocks 41 as an example, the two limiting blocks 41 extend along the Y direction, and the two limiting blocks 41 are connected to opposite sides of the driving mass 11 in the X direction (that is, each of the opposite sides of the two driving masses in the X direction is connected to a limiting block 41), and the middle part of the limiting block 41 is elastically connected to the fixed detection layer.

[0061] The driving mass 11 and the fixed detection layer are connected through an elastic beam, and the elastic beam has small rigidity in the X direction and large rigidity in the Y direction, so that the driving mass 11 has a degree of freedom in the X direction; in the process of driving the limiting block to move, the limiting block 41 extends along the Y axis and is connected between the two driving masses 11, and the limiting block 41 is supported by the anchor point of the middle part connected to the fixed detection layer, and swings with the two driving masses 11.

[0062] In the embodiment, the limiting blocks 41 are symmetrically arranged in the X direction, can synchronously constrain the X direction movement of the driving mass 11 from both sides, the limiting effect is more balanced, and the structural unbalanced load caused by unilateral constraint is avoided; the middle part of the limiting block 41 is connected to the fixed detection layer, so that when the driving mass 11 moves reversely, the limiting block 41 can swing adaptively with the reverse displacement, and does not hinder the effective movement; the symmetric arrangement of the limiting block 41 can make the driving unit bear more balanced force, reduce the parasitic stress caused by asymmetric constraint, and enhance the structural stability during long-term work.

[0063] In some embodiments, referring to Figure 1 , the Z-axis detection part includes a first mass 21, a second mass 22, and a Z-axis detection structure, the first mass 21 is elastically connected to one of the driving masses 11; the second mass 22 is elastically connected to the other driving mass 11, and the second mass 22 and the first mass 21 are used to move along the X direction under the action of the driving mass 11 and have a degree of freedom of reverse movement along the Y direction; the Z-axis detection structure includes two Z-axis masses 23 spaced apart along the Y direction, one of the two Z-axis masses 23 is elastically connected to the first mass 21, and the other Z-axis mass 23 is elastically connected to the second mass 22, and the two Z-axis masses 23 are used to move reversely along the Y direction;

[0064] The vehicle MEMS three-axis gyroscope structure further includes a second coupling unit elastically connected between the two Z-axis masses 23, used to limit the same direction movement of the two Z-axis masses 23 along the Y direction.

[0065] The Z-axis detection structure is located between the first mass 21 and the second mass 22, the Z-axis mass 23 is elastically connected to the fixed detection layer, and the second coupling unit can be elastically connected to opposite sides of the Z-axis detection structure in the X direction.

[0066] When the two drive masses 11 move in the opposite direction in the X direction, the first mass 21 and the second mass 22 move in the opposite direction with the two drive masses 11, and when there is an input of angular velocity in the Z direction, the Z-axis mass 23 is subjected to a Coriolis force in the Y direction, and the elastic beam between the Z-axis mass 23 and the fixed detection layer has great rigidity in the Y direction, so the first mass 21 and the second mass 22 drive the two Z-axis masses 23 to move in the Y direction, and the electrodes in the Z-axis detection part detect the position change of the Z-axis mass 23 in the Y direction, and the differential detection is realized according to the change of the capacitance gap.

[0067] The Z-axis detection depends on the differential mode motion of the Z-axis mass 23 in the Y direction, and by introducing the second coupling unit, the co-directional motion of the Z-axis mass 23 in the Y direction is limited, which can significantly reduce the zero drift error of the Z-axis measurement; the two Z-axis masses 23 correspond to two drive assemblies respectively, and cooperate with the constraint of the second coupling unit, so that the differential mode signal of the Z-axis detection is more accurate.

[0068] In some embodiments, referring to Figure 1 , the second coupling unit includes a plurality of coupling modules, and the plurality of coupling modules are distributed along the X direction, and each coupling module is connected between the two Z-axis masses 23.

[0069] Specifically, the coupling module can be provided with two, and the Z-axis mass 23 is provided with a coupling arm 24 on the opposite sides in the X direction, the coupling arm 24 extends along the X direction, and the coupling arms 24 on the same side of the two Z-axis masses 23 form a coupling mounting part, and each coupling module is mounted in the coupling mounting part and located between the two coupling arms 24 in the corresponding coupling mounting part.

[0070] The coupling module is located between the two coupling arms 24, so that the structure of the Z-axis detection part is compact, the overall volume can be reduced, and the demand for miniaturization of vehicle devices is met; the coupling arm 24 provides a clear mounting boundary for the coupling module, avoiding weakening of the suppression effect due to position deviation.

[0071] In some embodiments, referring to Figure 1 , the coupling module includes a third mass 51 and a fourth mass 52, the third mass 51 is elastically connected with one of the Z-axis masses 23; and the fourth mass 52 is elastically connected with the other Z-axis mass 23.

[0072] Among them, the third mass 51 and the fourth mass 52 are elastically connected and are elastically connected with the fixed detection layer.

[0073] The third mass 51 and the fourth mass 52 limit the same direction movement of the two Z-axis masses 23 in the Y direction, do not obviously hinder the opposite differential mode movement of the Z-axis mass 23, ensure the complete transmission of the Z-axis angular velocity signal, and the third mass 51 and the fourth mass 52 are symmetrically distributed with the X axis as the symmetry axis, can balance the stress caused by thermal expansion and cold contraction, and reduce the influence of temperature drift on the Z-axis detection.

[0074] In some embodiments, referring to Figure 1 , the driving mass 11 has a driving part 111 extending towards the Z-axis detection part, and the first mass 21 and the second mass 22 are respectively connected to the driving part 111 of the corresponding driving mass 11.

[0075] Specifically, each driving mass 11 has two driving parts 111 distributed at intervals on one side thereof towards the Z-axis detection part, the driving parts 111 extend in the Y direction, the first mass 21 is mounted between the two driving parts 111 of one driving mass 11, and the second mass 22 is mounted between the two driving parts 111 of the other driving mass 11.

[0076] The elastic beams between the first mass 21 and the driving part 111 are located at the four corners of the first mass 21, and similarly, the elastic beams between the second mass 22 and the driving part 111 are located at the four corners of the second mass 22, the elastic beams on the first mass 21 and the second mass 22 have greater rigidity in the X direction and smaller rigidity in the Y direction, so as to ensure the movement of the first mass 21 and the second mass 22 in the Y direction, and the driving part 111 can provide a clear mounting boundary for the first mass 21 and the second mass 22, avoiding detection errors caused by position deviation.

[0077] In some embodiments, referring to Figures 1 to 2 , the middle part of the Z-axis mass 23 is provided with a plurality of feature rods 25 and first detection electrodes 60, and each feature rod 25 is provided with first detection electrodes 60 distributed on opposite sides in the Y direction.

[0078] In this embodiment, the first detection electrodes 60 and the feature rods 25 are located at the same layer, i.e., the same Z-axis height, and the first detection electrodes 60 need to be electrically connected with the fixed detection layer to realize the transmission of the capacitance signal.

[0079] The feature rods 25 extend in the X direction, a plurality of feature rods 25 are distributed at intervals in the Y direction, and each feature rod 25 corresponds to two first detection electrodes 60, when the Z-axis mass 23 is displaced in the Y direction, the first detection electrodes 60 detect the position change of the corresponding feature rod 25, realizing differential detection; each feature rod 25 on the Z-axis mass 23 is provided with a plurality of feature rods 25, which can improve the sensitivity of the first detection electrodes 60.

[0080] In some embodiments, referring toFigure 1 The X / Y axis detection unit 30 comprises a biaxial mass 31 and an intermediate coupling structure. The biaxial mass 31 is provided with a receiving through hole in the center thereof, and is elastically connected between the two driving masses 11 (specifically, the biaxial mass 31 is elastically connected to the two driving masses 11 on the opposite sides in the Y direction). The intermediate coupling structure is arranged in the receiving through hole and is elastically connected to the biaxial mass 31.

[0081] The intermediate coupling structure is elastically connected to the fixed detection layer, and the fixed detection layer is provided with a second detection electrode 62 located in the lower layer of the biaxial mass 31.

[0082] The biaxial mass 31 is driven by the driving unit and can simultaneously respond to the angular velocities in the X and Y directions. The biaxial mass 31 does not need a separate structure, which improves the integration and reduces the volume. The intermediate coupling structure connects the biaxial mass 31 and the fixed detection layer, which can isolate the mutual interference of the X and Y directions and ensure the independence of the X and Y axis detection. The intermediate coupling structure in the receiving through hole makes the support of the biaxial mass 31 more balanced, reduces the parasitic vibration caused by the center offset, and improves the repeatability of the X and Y axis measurement.

[0083] In some embodiments, referring to Figure 1 The intermediate coupling structure comprises an outer coupling ring 32 and an inner coupling beam 33. The outer coupling ring 32 is arranged in the receiving through hole and is elastically connected to the biaxial mass 31 in the X direction. The inner coupling beam 33 is elastically connected to the inner periphery of the outer coupling ring 32 in the Y direction.

[0084] The opposite sides of the inner coupling beam 33 in the X direction are elastically connected to the fixed detection layer.

[0085] The intermediate coupling structure can match the independence of the X and Y axis movements. The outer coupling ring 32 is connected to the opposite sides of the biaxial mass 31 (in the receiving through hole) in the X direction. The outer coupling ring 32 has low stiffness in the X direction and high stiffness in the Y direction, which can adapt to the X direction wobble and suppress interference. The inner coupling beam 33 is connected to the opposite sides of the outer coupling ring 32 (inner periphery) in the Y direction. The inner coupling beam 33 has low stiffness in the Y direction and high stiffness in the X direction, which reduces the cross interference through the differential design of the stiffness.

[0086] In some embodiments, referring to Figure 1 The driving module 12 comprises a force adding module 121 and a detection module 122.

[0087] The force adding module 121 provides electrostatic force driving, and the detection module 122 monitors the motion state of the driving mass 11 to form feedback adjustment, which ensures that the driving mode is stably at the resonance point and reduces the driving frequency deviation caused by environmental changes. The detection module 122 can compensate for the driving error in real time, ensure that the reverse motion of the two driving masses 11 is strictly symmetrical, and provide a stable reference vibration for subsequent angular velocity detection.

[0088] The above description is only the preferred embodiment of the present application, and is not intended to limit the present application. Any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A MEMS three-axis gyroscope structure for vehicles, characterized in that, include: The driving unit includes two sets of driving components, which are spaced apart along the Y direction. Each driving component includes a driving mass block and a driving module connected to the driving mass block. The driving module is used to receive externally input electrical signals. Under the action of electrostatic force, the driving module drives the driving mass block to move along the X direction, and the two sets of driving mass blocks move in opposite directions. The detection unit includes a Z-axis detection unit and an X / Y-axis detection unit located between the two driving mass blocks. The Z-axis detection unit is used to move along the Y direction under the action of the driving mass blocks, and the X / Y-axis detection unit is used to twist around the X-axis or around the Y-axis under the action of the driving mass blocks. The first coupling unit is elastically connected between the two driving mass blocks and is used to restrict the two driving mass blocks from moving in the same direction along the X direction. The Z-axis detection unit includes: The first mass block is elastically connected to one of the driving mass blocks; The second mass block is elastically connected to the other driving mass block. The second mass block and the first mass block are used to move along the X direction under the action of the driving mass block and have the degree of freedom to move in the opposite direction along the Y direction. The Z-axis detection structure includes two Z-axis mass blocks spaced apart along the Y direction. One of the Z-axis mass blocks is elastically connected to the first mass block, and the other Z-axis mass block is elastically connected to the second mass block. The two Z-axis mass blocks are used to move in opposite directions along the Y direction. The vehicle-mounted MEMS three-axis gyroscope structure also includes a second coupling unit, which is elastically connected between the two Z-axis mass blocks to limit the two Z-axis mass blocks from moving in the same direction along the Y-axis.

2. The vehicle-mounted MEMS three-axis gyroscope structure as described in claim 1, characterized in that, The first coupling unit includes multiple limiting blocks, each of which is connected between two driving mass blocks. The multiple limiting blocks are distributed at intervals along the X direction, and the limiting blocks are located on opposite sides in the Y direction for moving along the X direction with the corresponding driving mass block.

3. The vehicle-mounted MEMS three-axis gyroscope structure as described in claim 1, characterized in that, The second coupling unit includes multiple coupling modules, which are spaced apart along the X-axis, and each coupling module is connected between two Z-axis mass blocks.

4. The vehicle-mounted MEMS three-axis gyroscope structure as described in claim 3, characterized in that, The coupling module includes: The third mass block is elastically connected to one of the Z-axis mass blocks; The fourth mass block is elastically connected to another Z-axis mass block; The third mass block and the fourth mass block are elastically connected.

5. The vehicle-mounted MEMS three-axis gyroscope structure as described in claim 1, characterized in that, The driving mass block has a driving part extending toward the Z-axis detection part, and the first mass block and the second mass block are respectively connected to the driving part corresponding to the driving mass block.

6. The vehicle-mounted MEMS three-axis gyroscope structure as described in claim 1, characterized in that, The Z-axis mass block is provided with multiple feature rods and a first detection electrode in the middle, and the first detection electrode is distributed on both sides of each feature rod along the Y direction.

7. The vehicle-mounted MEMS three-axis gyroscope structure as described in claim 1, characterized in that, The X / Y axis detection unit includes: A dual-axis mass block has a centrally located through-hole, and the dual-axis mass block is elastically connected between two driving mass blocks; An intermediate coupling structure is disposed within the accommodating through hole, and the intermediate coupling structure is elastically connected to the biaxial mass block.

8. The vehicle-mounted MEMS three-axis gyroscope structure as described in claim 7, characterized in that, The intermediate coupling structure includes: An external coupling ring is disposed within the accommodating through hole and is elastically connected to the biaxial mass block along the X direction; The inner coupling beam is elastically connected to the inner circumference of the outer coupling ring along the Y direction.

9. The vehicle-mounted MEMS three-axis gyroscope structure as described in claim 1, characterized in that, The drive module includes a force application module and a detection module.

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