Covering window, display device including the same, and method of manufacturing the covering window

Abstract

A cover window, a display device including the same, and a method of manufacturing the cover window are provided. The cover window includes: a window substrate; and a protective layer disposed on the window substrate, in which the protective layer includes an inorganic material including at least one of SiO2 and ZrO2 and a polymer resin including fluorine, a water contact angle of the protective layer is 105 DEG or more, and a surface hardness of the protective layer is 1 GPa or more.

Description

TECHNICAL FIELD

[0001] The disclosure relates to a cover window, a display device including the same, and a method of manufacturing a cover window. BACKGROUND

[0002] Electronic devices that provide images to users, such as, for example, smart phones, tablet personal computers (PCs), digital cameras, laptop computers, navigation devices, and smart TVs, include display devices for displaying images.

[0003] The display device can include a display panel that generates and displays images, and a cover window that covers the display panel. The cover window protects the display panel from foreign substances such as, for example, dust or water, as well as external impact and scratches. SUMMARY

[0004] Aspects of the disclosure provide a cover window having flexibility and durability and capable of being applied to a foldable display device, a display device including the same, and a method of manufacturing a cover window.

[0005] Aspects of the disclosure also provide a cover window having improved water resistance that supports preventing fingerprints of a user or foreign substances such as, for example, dust, from being left behind, a display device including the same, and a method of manufacturing a cover window.

[0006] However, aspects of the disclosure are not limited to the aspects set forth herein. The above and other aspects of the disclosure will become more apparent by describing in detail the disclosure according to the accompanying drawings given to provide a thorough understanding of the disclosure. The drawings shown below and the descriptions given below relate to aspects of the disclosure.

[0007] According to an aspect of the disclosure, a cover window includes a window base and a protective layer disposed on the window base, wherein the protective layer includes an inorganic material including at least one of SiO2 and ZrO2 and a polymer resin including fluorine, a water contact angle of the protective layer is 105° or more, and a surface hardness of the protective layer is 1 GPa or more.

[0008] In an embodiment, the polymer resin includes polytetrafluoroethylene (PTFE).

[0009] In an embodiment, a weight average molecular weight of the polymer resin is 20 g / mol to 1000 g / mol, and a glass transition temperature (Tg) of the polymer resin is 80℃ to 250℃.

[0010] In an embodiment, a thickness of the protective layer is 200 nm to 1500 nm.

[0011] In an embodiment, the inorganic material includes SiO2, and the protective layer includes an inorganic layer including SiO2 and a polymer layer including the polymer resin.

[0012] In an embodiment, the protective layer includes a first inorganic layer including SiO2, a first polymer layer disposed on the first inorganic layer and including a polymer resin including fluorine, a second inorganic layer disposed on the first polymer layer and including SiO2, and a second polymer layer disposed on the second inorganic layer and including a polymer resin including fluorine.

[0013] In an embodiment, the thickness of the first polymer layer and the thickness of the second polymer layer are different from each other.

[0014] In an embodiment, the thickness of the first polymer layer is less than the thickness of the second polymer layer.

[0015] In an embodiment, the thickness difference between the first inorganic layer and the first polymer layer is 2 nm to 100 nm.

[0016] In an embodiment, the inorganic material includes ZrO2, and the protective layer is a single layer in which the inorganic material and the polymer resin are mixed with each other.

[0017] In an embodiment, the atomic ratio of fluorine in the protective layer is 0.5 times to 50 times the atomic ratio of zirconium in the protective layer.

[0018] In an embodiment, the window substrate is formed of glass or plastic.

[0019] According to an aspect of the disclosure, a display device includes a display panel and a cover window disposed on the display panel, wherein the cover window includes a window substrate and a protective layer disposed on the window substrate, the protective layer includes an inorganic material including at least one of SiO2 and ZrO2 and a polymer resin including fluorine, a water contact angle of the protective layer is 105° or more, and a surface hardness of the protective layer is 1 GPa or more.

[0020] According to an aspect of the disclosure, a method of manufacturing a cover window includes preparing a first target and a second target in a chamber of a sputtering device, the first target including an inorganic material including at least one of SiO2 and ZrO2, and the second target including a polymer resin including fluorine, and depositing a protective layer on a target substrate by sputtering the first target and the second target.

[0021] In an embodiment, the step of depositing the protective layer on the target substrate by sputtering the first target and the second target includes sputtering the second target after sputtering the first target.

[0022] In an embodiment, the duration of sputtering the first target and the duration of sputtering the second target are equal to each other.

[0023] In an embodiment, the power applied to the first target is equal to or greater than the power applied to the second target.

[0024] In an embodiment, the method includes repeating sputtering the second target one or more times after sputtering the first target.

[0025] In an embodiment, the method includes increasing the power supplied to the second target while repeatedly sputtering the second target.

[0026] In an embodiment, the step of depositing the protective layer on the target substrate by sputtering the first target and the second target includes simultaneously sputtering the first target and the second target.

[0027] According to an aspect of the disclosure, an electronic device includes a display device configured to provide an image, a processor configured to provide an image data signal to the display device, a memory configured to store data information for operation, and a power module configured to generate power, wherein the display device includes a display panel and a cover window disposed on the display panel, wherein the cover window includes a window base and a protective layer disposed on the window base, the protective layer includes an inorganic material including at least one of SiO2 and ZrO2 and a polymer resin including fluorine, a water contact angle of the protective layer is 105° or more, and a surface hardness of the protective layer is 1 GPa or more.

[0028] According to an embodiment, by including the protective layer including both an inorganic material such as, for example, silicon dioxide (SiO2) and / or zirconium oxide (ZrO2) and an organic material including fluorine, the cover window can have excellent surface hardness and surface water repellency.

[0029] Effects of the disclosure are not limited to the aforementioned effects, and various other effects are included in the present specification. BRIEF DESCRIPTION OF DRAWINGS

[0030] The above and other aspects and features of the disclosure will become more apparent by describing in detail embodiments thereof with reference to the attached drawings, in which: Figure 1 is a perspective view of a display device according to an embodiment; Figure 2 is a cross-sectional view of a display member of Figure 1 Figure 3 is a cross-sectional view of a display panel of Figure 2 Figure 4 is a cross-sectional view of a cover window according to an embodiment; Figures 5 to 9 are cross-sectional views of a protective layer according to an embodiment, respectively; Figure 10 is a perspective view showing an unfolded state of a display device according to an embodiment; Figure 11 is a perspective view showing a folded state of a display device according to an embodiment; Figure 12 ​​is a schematic cross-sectional view showing a sputtering apparatus used in a manufacturing method of a display device according to an embodiment; Figures 13A to 13C 、 Figures 14A to 14D and Figures 15 to 17 shows the results of confirming the physical properties of the protective layer according to Example 1 of the present disclosure; Figure 18 、 Figures 19A to 19C and Figures 20 to 22 shows the results of confirming the physical properties of the protective layer according to Example 2 of the present disclosure; Figure 23 and Figure 24 shows the results of confirming the physical properties according to Comparative Example 1; Figure 25 and Figure 26 shows the results of confirming the physical properties according to Comparative Example 2; Figure 27 and Figure 28 shows the results of confirming the physical properties according to Comparative Example 3; Figure 29 is a block diagram of an electronic device according to one embodiment of the present disclosure; and Figure 30 is a schematic diagram of an electronic device according to various embodiments of the present disclosure. DETAILED DESCRIPTION

[0031] Embodiments supported by the present disclosure will now be described more fully hereinafter with reference to the accompanying drawings, in which example embodiments of the present disclosure are shown. Aspects supported by the present disclosure may, however, be embodied in different forms, and should not be construed as limited to the embodiments set forth herein. Rather, these example embodiments are provided so that the present disclosure will be thorough and complete, and will fully convey the scope of the example aspects of the present disclosure to those skilled in the art.

[0032] It will also be understood that when a layer is referred to as being "on" another layer or substrate, it can be directly on the other layer or substrate, or intervening layers can also be present. Throughout the specification, like reference numerals refer to like components.

[0033] It will be understood that, although the terms "first", "second", etc. can be used herein to describe various elements, these elements should not be limited by these terms. These terms are used to distinguish one element from another. For example, a first element discussed below could be termed a second element without departing from the teachings of aspects supported by the present disclosure. Similarly, a second element could also be termed a first element.

[0034] The term "about" or "approximately," as used herein, includes the recited value and includes a suitable range of deviation from the particular value that would be determined by consideration of measures of measurement and error associated with the particular quantity measured by persons of ordinary skill in the art. For example, the term "about" or "approximately" can mean within one or more standard deviations, or within ± 30%, ± 20%, ± 10%, ± 5% of the recited value.

[0035] As used herein, the term "substantially" means approximately or virtually. The term "substantially equal" means approximately equal or virtually equal. The term "substantially the same" means approximately the same or virtually the same. The term "substantially perpendicular" means approximately perpendicular or virtually perpendicular. The term "substantially parallel" means approximately parallel or virtually parallel.

[0036] Each of the features of various embodiments of the present disclosure can be partially or wholly combined or associated with each other and can be technically interlocked and driven. Each embodiment can be implemented independently of each other or can be implemented together in association.

[0037] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings.

[0038] Figure 1 is a perspective view of a display device 10 according to an embodiment.

[0039] Hereinafter, a first direction X, a second direction Y, and a third direction Z are different directions and cross each other. The first direction X, the second direction Y, and the third direction Z can perpendicularly cross each other. For example, the first direction X can be a lateral direction, the second direction Y can be a longitudinal direction, and the third direction Z can be a thickness direction. The first direction X, the second direction Y, and / or the third direction Z can include two or more directions. For example, in a cross-sectional view, the third direction Z can include an upward direction and a downward direction. In this case, one surface of a member disposed to face the upward direction can be referred to as an upper surface, and the other surface of the member disposed to face the downward direction can be referred to as a lower surface. However, these directions are exemplary and are relative directions, and are not limited to the directions described herein.

[0040] The display device 10 is a device that displays a moving image or a still image, and can be used as a display screen of various products such as a television, a laptop computer, a monitor, a billboard, and an Internet of Things (IoT) device, and portable electronic devices such as a mobile phone, a smart phone, a tablet personal computer (PC), a smart watch, a watch phone, a mobile communication terminal, an electronic notebook, an electronic book, a portable multimedia player (PMP), a navigation device, and an Ultra-Mobile PC (UMPC).

[0041] The display device 10 can have a substantially rectangular shape in a plan view. For example, as shown in FIG. 1A, the display device 10 can have a short side in a first direction X and a long side in a second direction Y in a plan view. The corners of the display device 10 can be rounded. However, embodiments of the disclosure are not limited thereto, and the display device 10 can have other polygonal shapes, circular shapes, or elliptical shapes in a plan view. Figure 1

[0042] The display device 10 can be a rigid display device that is not foldable or bendable, but is not limited thereto. The display device 10 can include a foldable display device, a bendable display device, and a rollable display device.

[0043] The display device 10 can include a display area DA and a non-display area NDA.

[0044] The display area DA can display an image or a video. The display area DA can have a substantially rectangular shape in a plan view, but is not limited thereto. The display area DA can include a plurality of pixels.

[0045] The display area DA is disposed on an upper surface of the display device 10, but is not limited thereto. The display area DA can also be disposed on at least one of a lower surface of the display device 10 and a side surface of the display device 10 between the upper surface and the lower surface.

[0046] The display area DA can be parallel to the first direction X and the second direction Y, and can be substantially flat, but is not limited thereto. For example, at least a portion of the display area DA can be folded, bent, or curved such that the display area DA has a predetermined curvature.

[0047] The non-display area NDA can be disposed around the display area DA. The non-display area NDA can surround the display area DA. In an embodiment, the display area DA can be formed in a rectangular shape, and the non-display area NDA can be disposed around four edges of the display area DA, but embodiments of the disclosure are not limited thereto. A black matrix can be disposed in the non-display area NDA to prevent leakage of light emitted from adjacent pixels.

[0048] The display device 10 can include a display member DM and a support member SM.

[0049] The display member DM provides an image. The display area DA can be disposed on the display member DM. The display member DM can be, for example, a display module.

[0050] The display device 10 can include a display member DM and a support member SM. Figure 1 ​, a display member DM is shown as forming the upper surface of the display device 10 and having a plate shape, but the embodiments of the present disclosure are not limited thereto. The display member DM may be flexible and bend or fold into a shape corresponding to the type of the display device 10 (such as a curved display device, a foldable display device, a bendable display device, and a rollable display device). In this case, although not shown, the display member DM may also be provided on at least one of the side surface and the lower surface of the display device 10. A cover window CW (see FIG. 1 ) to be described later may be provided on the display device 10. Figure 2 ) may also be variously changed to a flat shape or a curved shape according to the type of the display device 10 and / or the arrangement of the display member DM as described herein.

[0051] The support member SM supports the display member DM. The support member SM may include members for mounting the display member DM (such as a frame, a cover, and a housing, for example). Although not shown, when the display device 10 is a foldable display device, the support member SM may also include a hinge connecting multiple frames (covers or housings) to each other.

[0052] Figure 2 yes Figure 1 sectional view of the display member DM. Figure 3 yes Figure 2 sectional view of the display panel 100.

[0053] Reference Figure 1 and Figure 2 , the display member DM may include a display panel 100 , an upper stack structure 200 stacked on the display panel 100 , and a lower stack structure 300 stacked under the display panel 100 .

[0054] The display panel 100 is a panel that displays a picture or image, and examples of the display panel 100 may include not only self-luminous display panels (such as an organic light-emitting display panel (OLED), an inorganic light-emitting display panel (inorganic EL), a quantum dot light-emitting display panel (QED), a micro LED display panel (micro LED), a nano LED display panel (nano LED), a plasma display panel (PDP), a field emission display panel (FED), and a cathode ray display panel (CRT) as examples), but also light-receiving display panels (such as a liquid crystal display panel (LCD) and an electrophoretic display panel (EPD) as examples).

[0055] The display panel 100 can further include a touch member. The touch member can be provided as a panel or a film separate from the display panel 100 and attached to the display panel 100, or can be provided inside the display panel 100 in the form of a touch layer. In the following embodiments, a case in which the touch member is provided inside the display panel 100 and included in the display panel 100 will be described by way of example, but embodiments of the disclosure are not limited thereto.

[0056] Referring to Figure 3 , the display panel 100 can include a substrate SUB, a circuit driving layer DRL disposed on the substrate SUB, an emission layer EML disposed on the circuit driving layer DRL, an encapsulation layer ENL disposed on the emission layer EML, and a touch layer TSL disposed on the encapsulation layer ENL.

[0057] The substrate SUB can be a flexible substrate including a flexible polymer material such as, for example, polyimide. Accordingly, the display panel 100 can be bent, folded, folded, or rolled. In some embodiments, the substrate SUB can include a plurality of sub-substrates stacked in a thickness direction with each other, and a barrier layer interposed between the stacked sub-substrates. In this case, each of the sub-substrates can be a flexible substrate.

[0058] The circuit driving layer DRL can be disposed on the substrate SUB. The circuit driving layer DRL can include a circuit that drives the emission layer EML of a pixel. The circuit driving layer DRL can include a plurality of thin film transistors.

[0059] The emission layer EML can be disposed on the circuit driving layer DRL. The emission layer EML can include an organic emission layer. The emission layer EML can emit light having various brightnesses according to a driving signal transmitted from the circuit driving layer DRL.

[0060] The encapsulation layer ENL can be disposed on the emission layer EML. The encapsulation layer ENL can include an inorganic film or a stacked film of an inorganic film and an organic film.

[0061] The touch layer TSL can be disposed on the encapsulation layer ENL. The touch layer TSL is a layer that senses a touch input, and can serve as a touch member. The touch layer TSL can include a plurality of sensing areas and sensing electrodes.

[0062] Referring again to Figure 2 , the upper stack structure 200 and the lower stack structure 300 can be disposed on the upper surface and the lower surface of the display panel 100, respectively.

[0063] The upper stack structure 200 can include a polarizing member 210 and a cover window CW sequentially stacked upward from the display panel 100.

[0064] The polarization member 210 can be disposed on an upper surface of the display panel 100. The polarization member 210 can polarize light passing therethrough. The polarization member 210 can be used to reduce external light reflection.

[0065] The polarization member 210 can be a polarizing film. The polarizing film can include a polarization layer and protective substrates disposed on and under the polarization layer. The polarization layer can include a polyvinyl alcohol (PVA) film. The polarization layer can be stretched in a direction. The stretching direction of the polarization layer can be an absorption axis, and a direction perpendicular to the absorption axis can be a transmission axis. The protective substrates can be disposed on one surface and the other surface of the polarization layer, respectively. The protective substrates can be formed of a cellulose resin such as a triacetyl cellulose (TAC) resin, a polyester resin, etc., but are not limited thereto. Although not shown, the polarization member 210 can be replaced with a plurality of color filters and a black matrix disposed between the plurality of color filters.

[0066] The cover window CW can be disposed on an upper surface of the polarization member 210. The cover window CW is used to protect the display panel 100.

[0067] The cover window CW can be formed of a transparent material. In Figure 2 In the embodiment of the disclosure, the cover window CW has been shown as one layer, but the embodiment of the disclosure is not limited thereto. The cover window CW can include a plurality of layers. The detailed stack structure of the cover window CW will be described later with reference to Figure 4

[0068] The upper stack structure 200 can include upper bonding members 251 and 252 that bond respective members stacked adjacent to each other to each other. The upper bonding members 251 and 252 can be optically transparent. For example, the first bonding member 251 can be disposed between the polarization member 210 and the display panel 100 to bond the polarization member 210 and the display panel 100 to each other, and the second bonding member 252 can be disposed between the cover window CW and the polarization member 210 to bond the cover window CW and the polarization member 210 to each other.

[0069] The lower stack structure 300 can include a polymer film layer 310 and a heat dissipation member 320 sequentially stacked downward from the display panel 100.

[0070] ​The polymer film layer 310 may include a polymer film. For example, the polymer film layer 310 may include polyimide (PI), polyethylene terephthalate (PET), polycarbonate (PC), polyethylene (PE), polypropylene (PP), polysulfone (PSF), polymethyl methacrylate (PMMA), triacetyl cellulose (TAC), cycloolefin polymer (COP), and the like. The polymer film layer 310 may include a functional layer on at least one surface of the polymer film layer 310. The functional layer may include, for example, a light-absorbing layer. The light-absorbing layer may include a light-absorbing material (such as a black pigment or dye, for example). The light-absorbing layer may be formed from black ink and may be formed on the polymer film by coating or printing.

[0071] The heat dissipation member 320 may be provided under the polymer film layer 310. The heat dissipation member 320 serves to diffuse heat generated from the display panel 100 or other components of the display device 10. The heat dissipation member 320 may include a metal plate or a heat sink containing graphite or carbon nanotubes.

[0072] The lower stack structure 300 may include lower coupling members 351 and 352 for coupling respective adjacently stacked members. For example, the third coupling member 351 may be disposed between the display panel 100 and the polymer film layer 310 to couple the display panel 100 and the polymer film layer 310 to each other, and the fourth coupling member 352 may be disposed between the polymer film layer 310 and the heat dissipation member 320 to couple the polymer film layer 310 and the heat dissipation member 320 to each other.

[0073] Although not shown, the lower stack structure 300 may further include a buffer member. For example, the buffer member may be provided between the polymer film layer 310 and the heat dissipation member 320.

[0074] Each of the multiple layers constituting the display panel 100, the upper stack structure 200, and the lower stack structure 300 has been Figure 2 is shown as in Figure 2 , but the embodiments of the present disclosure are not limited thereto. Although not shown, when the display device 10 is a foldable display device, at least one of the multiple layers constituting the display panel 100, the upper stacked structure 200, and the lower stacked structure 300 may be configured to be separated based on a specific area. In this case, the bending stress of the display device 10 can be reduced. For example, the multiple heat dissipation members 320 may be configured so that two or more of the heat dissipation members 320 are separated from each other on the lower surface of the polymer film layer based on a specific area. In an example in which the display device 10 is a foldable display device, the specific area may be a folding area that bends when the display device 10 is folded or bent.

[0075] Figure 4is a cross-sectional view of a cover window CW according to an embodiment.

[0076] Reference Figures 1 to 4 , the cover window CW may include a window substrate WC and a protection layer 220 disposed on the window substrate WC.

[0077] Hereinafter, for convenience of explanation, a surface positioned in a direction along which an image is displayed will be referred to as one surface, and a surface opposite to the one surface will be referred to as another surface. The other surface may be a surface facing the display panel 100. Figure 4 As shown in , one surface and the other surface may be an upper surface and a lower surface, respectively, but are not limited thereto. In some aspects, hereinafter, "hardness" may refer to surface hardness, but is not limited thereto.

[0078] Both the window substrate WC and the protection layer 220 may be formed of a transparent material.

[0079] The window substrate WC may be formed of glass or plastic.

[0080] Example embodiments in which the window substrate WC is formed of plastic can support excellent flexibility characteristics (such as folding or bending, for example). Examples of plastics that can be applied to the cover window CW include, but are not limited to, polyimide, polyacrylate, polymethyl methacrylate (PMMA), polycarbonate (PC), polyethylene naphthalate (PEN), polyvinylidene chloride, polyvinylidene fluoride (PVDF), polystyrene, ethylene vinyl alcohol copolymer, polyethersulfone (PES), polyetherimide (PEI), polyphenylene sulfide (PPS), polyallyl compound, triacetyl cellulose (TAC), cellulose acetate propionate (CAP), etc. The cover window CW may include one or more of the plastic materials described herein. In an embodiment, the cover window CW may be formed of relatively freely foldable polyimide (PI), but is not limited thereto.

[0081] When the window substrate (WC) comprises glass, the glass may be ultra-thin glass (UTG) or thin glass. In examples where the glass is ultra-thin glass or thin glass, the glass may have flexible properties that allow it to bend, bend, fold, or curl. The glass of the window substrate (WC) may comprise soda-lime glass, alkali-aluminosilicate glass, borosilicate glass, or lithium-aluminosilicate glass. The glass of the window substrate (WC) may comprise chemically or thermally strengthened glass to provide high strength. Chemical strengthening may be achieved through an ion exchange treatment process in an alkali metal salt. The ion exchange treatment process may be performed two or more times.

[0082] In an embodiment, the thickness of the window base WC can be in the range of, for example, 10 µm to 1000 µm. As another example, the thickness of the window base WC can be 100 µm to 800 µm. The window base WC can have a thickness that is significantly greater than the thickness of the protective layer 220.

[0083] The protective layer 220 can be disposed on one surface of the window base WC. In an embodiment, the protective layer 220 can be in direct contact with the window base WC. One surface of the protective layer 220 can be exposed to the outside to form the appearance of the cover window CW, and the other surface of the protective layer 220 can face the window base WC. The protective layer 220 can be disposed on the upper surface of the display panel 100, and can have excellent light transmittance in the wavelength band (380 nm to 700 nm) of the visible light region.

[0084] The protective layer 220 can include both organic materials and inorganic materials to function to block water from the outside while enhancing the surface hardness of the cover window CW. Although the protective layer 220 includes both organic materials and inorganic materials, the protective layer 220 can be formed through a dry sputtering process, and thus can have excellent mass productivity.

[0085] The water contact angle of the protective layer 220 can be 105° (degrees) or more. In the present disclosure, the water contact angle can be measured according to ASTM D5946. On one surface of the protective layer 220 (i.e., the surface of the protective layer 220 facing the outside of the display device 10), the water contact angle of the protective layer 220 with respect to a 5 µL water droplet can be measured in a region of 100 µm or less using a contact angle goniometer (DSA 100 available from A. Kruss Optronic GmbH). The higher the water repellency, the greater the water contact angle can be. The protective layer 220 can include an organic material to have water repellency. In an embodiment, the water contact angle of the protective layer 220 can be 105° or more, 107° or more, or 110° or more. In an embodiment, the water contact angle of the protective layer 220 can be 120° or less or 115° or less. In an example in which the water contact angle of the protective layer 220 is in the range of 105° or more and 120° or less, the protective layer 220 can prevent external water from penetrating into the display device 10 or prevent a user's fingerprint from being left on the surface of the display device 10.

[0086] The surface hardness of the protective layer 220 can be 1 GPa or more. In the disclosure, the surface hardness can be measured according to ISO 14577. On one surface of the protective layer 220 (i.e., a surface of the protective layer 220 facing the outside of the display device 10), the average value of the corresponding values after the surface hardness is measured 5 times at positions corresponding to each corner and a center point of an area of 1 cm2by using a nanoindentation hardness tester (Nano Test Vantage Platform available from Micro materials Inc.) under a constant load (1.5 mN) for 100 seconds can be determined as the surface hardness. In an embodiment, the surface hardness of the protective layer 220 can be 1 GPa or more or 1.05 GPa or more. In an embodiment, the surface hardness of the protective layer 220 can be 3.0 GPa or less or 2.50 GPa or less. In an example in which the surface hardness of the protective layer 220 is in a range of 1 GPa or more and 3.0 GPa or less, the cover window CW can have durability such that the cover window CW does not break or crack even when the display device 10 is folded or repeatedly subjected to external force and is deformed. 2 The surface hardness of the protective layer 220 can be 1 GPa or more. In the disclosure, the surface hardness can be measured according to ISO 14577. On one surface of the protective layer 220 (i.e., a surface of the protective layer 220 facing the outside of the display device 10), the average value of the corresponding values after the surface hardness is measured 5 times at positions corresponding to each corner and a center point of an area of 1 cm2by using a nanoindentation hardness tester (Nano Test Vantage Platform available from Micro materials Inc.) under a constant load (1.5 mN) for 100 seconds can be determined as the surface hardness. In an embodiment, the surface hardness of the protective layer 220 can be 1 GPa or more or 1.05 GPa or more. In an embodiment, the surface hardness of the protective layer 220 can be 3.0 GPa or less or 2.50 GPa or less. In an example in which the surface hardness of the protective layer 220 is in a range of 1 GPa or more and 3.0 GPa or less, the cover window CW can have durability such that the cover window CW does not break or crack even when the display device 10 is folded or repeatedly subjected to external force and is deformed.

[0087] The thickness of the protective layer 220 can be 200 nm to 1500 nm, 250 nm to 1000 nm, or 300 nm to 600 nm. Although the protective layer 220 has a small thickness, the protective layer 220 can provide functionality and durability to the cover window CW. In an example in which the protective layer 220 is formed as a single layer, the thickness of the single layer can be the thickness of the protective layer 220. In an example in which the protective layer 220 is formed as a plurality of layers, the total thickness of the plurality of layers can be the thickness of the protective layer 220.

[0088] The organic material of the protective layer 220 can be a polymer resin including fluorine. The polymer resin can include polytetrafluoroethylene (PTFE). In an embodiment, the weight average molecular weight (MW) of the polymer resin can be 20 g / mol to 1000 g / mol, 50 g / mol to 1000 g / mol, 50 g / mol to 500 g / mol, or 80 g / mol to 200 g / mol. In an example in which the weight average molecular weight (MW) of the polymer resin is in the above range, the polymer resin can be mixed with an inorganic material or deposited on an inorganic layer while having a hardness or a fingerprint prevention function suitable for folding. In an embodiment, the glass transition temperature (Tg) of the polymer resin can be 80℃ to 250℃ or 90℃ to 200℃. In an embodiment, the melting point (Tm) of the polymer resin can be 250℃ to 500℃ or 300℃ to 400℃.

[0089] The inorganic material of the protective layer 220 can include at least one of silicon dioxide (SiO2) and zirconium oxide (ZrO2). The protective layer 220 can have a large water contact angle and high transmittance in a visible light region by including silicon dioxide (SiO2) and zirconium oxide (ZrO2). The mixed form of the organic material and the inorganic material in the protective layer 220 can vary according to the type of the inorganic material.

[0090] Figures 5 to 9 are cross-sectional views of the protective layer 220, 220_1, 220_2, 220_3, 220_4 according to embodiments, respectively. Figures 5 to 8 Refers to a case where the inorganic layer 220A and the polymer layer 220B of the protective layer 220, 220_1, 220_2, 220_3 are formed separately, and Figure 9 Refers to a case where the protective layer 220_4 is an organic-inorganic hybrid layer 220C in which an inorganic material and an organic material are formed in one layer.

[0091] In an embodiment, the protective layer 220 can include silicon dioxide (SiO2) as an inorganic material, and the protective layer 220 can include an inorganic layer 220A including silicon dioxide (SiO2) and a polymer layer 220B including a polymer resin including fluorine. Referring to Figure 4 and Figure 5 A first inorganic layer 220A1 including silicon dioxide (SiO2) can be disposed on the window base WC, and a first polymer layer 220B1 including a polymer resin can be disposed on the first inorganic layer 220A1.

[0092] The protective layer 220 can have a multi-layer structure including a plurality of inorganic layers 220A and a plurality of polymer layers 220B, and the inorganic layers 220A and the polymer layers 220B can be alternately disposed. The number of inorganic layers 220A and the number of polymer layers 220B can be the same as each other. In an example in which the protective layer 220 has a multi-layer structure, the lowest layer (i.e., the layer closest to the window base WC) of the protective layer 220 can be an inorganic layer 220A including silicon dioxide (SiO2), and the uppermost layer (i.e., the layer farthest from the window base WC) of the protective layer 220 can be a polymer layer 220B including a polymer resin.

[0093] Referring to Figure 6 The inorganic layer 220A of the protective layer 220_1 can include a first inorganic layer 220A1 and a second inorganic layer 220A2, and the polymer layer 220B of the protective layer 220_1 can include a first polymer layer 220B1 and a second polymer layer 220B2. The first inorganic layer 220A1, the first polymer layer 220B1, the second inorganic layer 220A2, and the second polymer layer 220B2 can be sequentially disposed on the window base WC.

[0094] Referring to Figure 7 The inorganic layer 220A of the protective layer 220_2 can include a first inorganic layer 220A1, a second inorganic layer 220A2, and a third inorganic layer 220A3, and the polymer layer 220B of the protective layer 220_2 can include a first polymer layer 220B1, a second polymer layer 220B2, and a third polymer layer 220B3. The first inorganic layer 220A1, the first polymer layer 220B1, the second inorganic layer 220A2, the second polymer layer 220B2, the third inorganic layer 220A3, and the third polymer layer 220B3 can be sequentially disposed on the window base WC.

[0095] Referring to Figure 8 The inorganic layer 220A of the protective layer 220_3 can include a first inorganic layer 220A1, a second inorganic layer 220A2, a third inorganic layer 220A3, and a fourth inorganic layer 220A4, and the polymer layer 220B of the protective layer 220_3 can include a first polymer layer 220B1, a second polymer layer 220B2, a third polymer layer 220B3, and a fourth polymer layer 220B4. The first inorganic layer 220A1, the first polymer layer 220B1, the second inorganic layer 220A2, the second polymer layer 220B2, the third inorganic layer 220A3, the third polymer layer 220B3, the fourth inorganic layer 220A4, and the fourth polymer layer 220B4 can be sequentially disposed on the window base WC.

[0096] The optical or surface properties of the protective layer 220 can be adjusted by adjusting the thicknesses of the inorganic layer 220A and the polymer layer 220B. In an example in which the power applied to the target in the sputtering process is adjusted, the thickness of the formed inorganic layer 220A or polymer layer 220B can be adjusted. The plurality of inorganic layers 220A can respectively have different thicknesses T11, T12, T13, and T14, and the plurality of polymer layers 220B can respectively have different thicknesses T21, T22, T23, and T24. By increasing or decreasing the thickness of the inorganic layer 220A or the polymer layer 220B as the distance from the window base WC increases, embodiments of the disclosure support providing a gradient function. The water contact angle of the protective layer 220 can increase, or the friction of the surface of the protective layer 220 can decrease. In an embodiment, the thickness T21 of the first polymer layer 220B1 can be less than the thickness T22 of the second polymer layer 220B2, the thickness T22 of the second polymer layer 220B2 can be less than the thickness T23 of the third polymer layer 220B3, and the thickness T23 of the third polymer layer 220B3 can be less than the thickness T24 of the fourth polymer layer 220B4.

[0097] The inorganic layer 220A and the polymer layer 220B adjacent to each other can have different thicknesses, and a difference in thickness between the inorganic layer 220A and the polymer layer 220B adjacent to each other can be 2 nm to 100 nm. The inorganic layer 220A and the polymer layer 220B adjacent to each other can refer to the first inorganic layer 220A1 and the first polymer layer 220B1; the first polymer layer 220B1 and the second inorganic layer 220A2; the second inorganic layer 220A2 and the second polymer layer 220B2; the second polymer layer 220B2 and the third inorganic layer 220A3; the third inorganic layer 220A3 and the third polymer layer 220B3; the third polymer layer 220B3 and the fourth inorganic layer 220A4; or the fourth inorganic layer 220A4 and the fourth polymer layer 220B4.

[0098] In an embodiment, the protective layer 220 can include zirconium oxide (ZrO2) as an inorganic material, and can be a single layer in which the zirconium oxide (ZrO2) and a polymer resin are mixed with each other. Referring to FIG. 2A, the protective layer 220_1 can be a single layer in which the zirconium oxide (ZrO2) and the polymer resin are mixed with each other. Figure 9 The protective layer 220_4 can be an organic-inorganic hybrid layer 220C in which an inorganic material and an organic material are formed in one layer. Within the organic-inorganic hybrid layer 220C, zirconium in the zirconium oxide (ZrO2) and fluorine in the polymer resin can form a bond.

[0099] The atomic ratio of fluorine in the protective layer 220_4 can be 0.5 times to 50 times or 1 times to 20 times of the atomic ratio of zirconium in the protective layer 220_4. In an example in which the atomic ratio of fluorine in the protective layer 220_4 is within the above range, the protective layer 220_4 having excellent water resistance can be obtained through a sputtering process. The atomic ratio can be obtained through energy dispersive x-ray spectroscopy (EDS) component analysis.

[0100] Figure 10 FIG. 1 is a perspective view illustrating a folded state of a display device 10 according to an embodiment, Figure 11 FIG. 2A is a perspective view illustrating an unfolded state of the display device 10 according to an embodiment.

[0101] In embodiments, the display device 10 may be a foldable device. As used herein, the term "foldable device" refers to a device that can be folded and is intended to encompass not only foldable devices but also devices that can have both a folded state and an unfolded state. In some aspects, folding may include, but is not limited to, folding at an angle of approximately 180°. The display device may be considered folded when the folding angle exceeds 180° or is less than 180° (e.g., 90° or greater and less than 180°, or 120° or greater and less than 180°). In some aspects, when the display device is in a curved state other than the unfolded state, even if the display device is not fully folded, the curved state may be referred to as the folded state. For example, even if the display device is curved at an angle of 90° or less, the maximum folding angle of 90° or greater may be used to distinguish the display device from the unfolded state. The radius of curvature of the display device when folded may be 5 mm or less, preferably within the range of 1 mm to 2 mm, or approximately 1.5 mm, but is not limited thereto.

[0102] In an embodiment, the display device 10 can be maintained in both the folded state and the unfolded state. Figure 11 As shown in , the display device 10 can be folded in an inner-folding manner in which the display area DA is provided inside. In an example in which the display device 10 is folded in the inner-folding manner, the upper surfaces of the display devices 10 can face each other. As another example, the display device 10 can be folded in an outer-folding manner in which the display area DA is provided outside. In an example in which the display device 10 is folded in the outer-folding manner, the lower surfaces of the display devices 10 can face each other.

[0103] In an embodiment, the display device 10 may include a folding area FDA, a first non-folding area NFA1, and a second non-folding area NFA2. The folding area FDA may be a folded area of ​​the display device 10, and the first non-folding area NFA1 and the second non-folding area NFA2 may be areas of the display device 10 that are not folded.

[0104] The first non-folding area NFA1 may be provided on one side (eg, upper side) of the folding area FDA. The second non-folding area NFA2 may be provided on the other side (eg, lower side) of the folding area FDA. The folding area FDA may be a region curved with a predetermined curvature.

[0105] In an embodiment, the folding area FDA of the display device 10 may be designated at a specific location. The number of folding areas FDA designated at specific locations in the display device 10 may be one or two or more. In another embodiment, the location of the folding area FDA is not designated in the display device 10 and may be freely set in various areas.

[0106] In an embodiment, the display device 10 can be folded in the second direction Y. Accordingly, the length of the display device 10 in the second direction Y can be reduced by about half, and thus, the user can conveniently carry the display device 10.

[0107] In an embodiment, the direction in which the display device 10 is folded is not limited to the second direction Y. For example, the display device 10 can be folded in the first direction X. In this case, the length of the display device 10 in the first direction X can be reduced by about half.

[0108] In Figure 10 and Figure 11 It has been shown in the display area DA and each of the non-display areas NDA overlap with the folding area FDA, the first non-folding area NFA1, and the second non-folding area NFA2, but embodiments of the present disclosure are not limited thereto. For example, each of the display area DA and the non-display area NDA can overlap with at least one of the folding area FDA, the first non-folding area NFA1, and the second non-folding area NFA2.

[0109] The display member DM of the display device 10, which is a foldable device, can include the cover window CW described herein. The cover window CW is the same as described herein, and thus, a repeated description of the cover window CW is omitted.

[0110] Next, a cover window manufacturing method will be described.

[0111] It can be difficult to form a thin film including both organic and inorganic materials through a wet process, and in some cases, it can be possible to form a thin film including both organic and inorganic materials through a sputtering process.

[0112] Figure 12 is a schematic cross-sectional view showing a sputtering device SPT used in a manufacturing method of the display device 10 according to an embodiment.

[0113] In the description of the methods and processes herein, the operations can be performed in a different order than the order shown and / or described, or the operations can be performed at different times, or with different operations. Certain operations can also be left out of the flowcharts, one or more operations can be repeated, or other operations can be added. The description of "may be provided" and "may be formed" of elements, etc. according to the example aspects described herein includes methods, processes, and techniques for providing, forming, positioning, and adjusting elements, etc.

[0114] The method can include disposing a platform STG in the chamber CHB, and disposing a target substrate TSUB on the platform STG. The method can include preparing a first target TG1 and a second target TG2 in the same vacuum chamber CHB. The first target TG1 can be a target including an inorganic material such as, for example, silicon dioxide or zirconium oxide. The second target TG2 can be a target including an organic material, and can include a fluorine-containing polymer resin described herein. The first target TG1 and the second target TG2 can face the target substrate TSUB. The target substrate TSUB can be a window substrate WC described herein.

[0115] The method can include depositing a protective layer 220 on the target substrate TSUB by sputtering the first target TG1 and the second target TG2. In this case, the method can include depositing the protective layer 220 by alternately sputtering the respective targets TG1 and TG2 or by simultaneously sputtering both of the targets TG1 and TG2.

[0116] The method can include applying a power of 25 W to 200 W to the respective targets TG1 and TG2, and the method can include depositing the protective layer 220 at room temperature. The method can include injecting argon (Ar) as a plasma generation gas and performing a radio frequency (RF) sputtering process.

[0117] In an example, the first target TG1 includes silicon dioxide (Si02), and the method can include forming an inorganic layer 220A on the target substrate TSUB by first applying a power to the first target TG1 to generate a plasma. Thereafter, the method can include forming a polymer layer 220B on the inorganic layer 220A by stopping the application of the power to the first target TG1 and applying a power to the second target TG2. In some aspects, a duration (time) of sputtering the first target TG1 and a duration of sputtering the second target TG2 can be equal to each other. In some embodiments, the duration (time) of sputtering the respective targets TG1 and TG2 can be 15 minutes to 60 minutes, and a total deposition time for forming the protective layer 220 can be 2 hours to 3 hours.

[0118] In some embodiments, the method can include repeating the forming of the inorganic layer 220A and the forming of the polymer layer 220B, which can result in a protective layer 220 in which the inorganic layer 220A and the polymer layer 220B are alternately arranged. In some aspects, the method can include adjusting the power applied to the first target TG1 or the second target TG2, which can correspondingly adjust the thickness of the inorganic layer 220A or the polymer layer 220B. In examples in which the power applied to the second target TG2 is increased, the thickness of the polymer layer 220B can be increased. In some aspects, the power applied to the first target TG1 can be equal to or greater than the power applied to the second target TG2. For example, the method can include applying 100 W to 200 W of power to the first target TG1 and 50 W to 100 W of power to the second target TG2.

[0119] In an example, the first target TG1 includes zirconium oxide (Zr02), and the method can include forming an organic-inorganic hybrid layer 220C on the target substrate TSUB by simultaneously applying power to the first target TG1 and the second target TG2. The deposition duration (time) of the organic-inorganic hybrid layer 220C can be 1 hour to 2 hours. The power applied to the first target TG1 and the power applied to the second target TG2 can be the same as or different from each other, and can be 25 W to 200 W.

[0120] Hereinafter, examples will be described in detail in order to more completely describe the present disclosure. However, the examples according to the present disclosure can be modified in various other forms, and should not be interpreted as limiting the scope of the present disclosure to the examples to be described in detail below. The examples according to the present disclosure are provided in order to more completely describe the present disclosure to one of ordinary skill in the art.

[0121] [Evaluation of Physical Properties of Cover Window] (1) Water Contact Angle On one surface of the protective layer 220 (i.e., the surface of the protective layer 220 facing the outside of the display device 10), the water contact angle of the protective layer 220 with respect to a 5-μL water droplet was measured in a region within 100 μm using a contact angle goniometer (DSA 100 available from A. Kruss Optronic GmbH).

[0122] (2) Surface Hardness (Average Hardness) On one surface of the protective layer 220 (i.e., the surface of the protective layer 220 facing the outside of the display device 10), the average hardness of the protective layer 220 was measured by keeping a stylus under a constant load (1.5 mN) for 100 seconds at a distance of 1 cm from the center of the protective layer 220 using a nanoindentation hardness tester (Nano Test Vantage Platform available from Micro materials Inc.). 2The average of the corresponding values measured 5 times at the positions corresponding to each corner and the center point of the area of 1 mm x 1 mm of the surface hardness is determined as the surface hardness.

[0123] (3) Surface scanning electron microscope (SEM) An image of the upper surface of the protective layer 220 or the thin film was captured with a scanning electron microscope (SEM). In this case, the magnification was 50,000.

[0124] (4) Cross-sectional SEM The sample was cooled with liquid nitrogen and fractured, an image of the side surface of the sample was captured with a scanning electron microscope (SEM), and the thickness was measured. In this case, the magnification was 50,000 or 100,000.

[0125] (5) Light transmittance The light transmittance of the sample was measured at a temperature of 85°C and a relative humidity of 85%.

[0126] (6) X-ray photoelectron spectroscopy (XPS) analysis X-ray photoelectron spectroscopy (XPS) analysis was performed using a K-alpha available from Thermo Fisher Scientific Inc. under the following conditions: X-ray: mono Al kα 1486.6 eV, 100 mm, exit angle = 45°, reference: C 1s (at low B.E.) = 285 eV.

[0127] (7) Energy dispersive x-ray spectroscopy (EDS) analysis The content of inorganic material components and organic material components, particularly the content of elements, of the sample can be analyzed by energy dispersive x-ray spectroscopy (EDS). EDS analysis was performed using an Osiris 200 kV TEM (FEI)-4 EDS detector available from Bruker Corporation.

[0128] [Manufacture of protective layer] A first target TG1 including an inorganic material and a second target TG2 including polytetrafluoroethylene (PTFE) were installed in a chamber of an RF sputtering device, and a glass substrate was set. In this case, the weight average molecular weight of the polytetrafluoroethylene was 100.02 g / mol, the glass transition temperature (Tg) of the polytetrafluoroethylene was 100°C to 130°C, and the melting point of the polytetrafluoroethylene was 327°C. The atmosphere of the chamber was set to a low vacuum of 5 x 10 -2 Torr and a high vacuum of 5 x 10 -5 Torr, 50 sccm of Ar was injected, and the process pressure was maintained at 10 mTorr.

[0129] In the case of alternating deposition in which the inorganic layer 220A and the polymer layer 220B are separately formed by alternately applying power to the first target TG1 and the second target TG2, power is alternately applied to the respective targets TG1 and TG2 for N minutes and the protective layer 220 is formed for a total of 2 hours. N minutes is 15 minutes, 20 minutes, or 30 minutes.

[0130] In the case of simultaneous deposition in which the organic-inorganic hybrid layer 220C is formed by simultaneously applying power to the first and second targets TG1 and TG2 , the protective layer 220 is formed by applying power to the respective targets TG1 and TG2 for 1 to 2 hours.

[0131] [Example 1] The protective layer 220 is formed by alternately depositing an inorganic layer formed of silicon dioxide (SiO 2 ) and a polymer layer formed of polytetrafluoroethylene (PTFE). The first target TG1 includes silicon dioxide (SiO 2 ), and the second target TG2 includes polytetrafluoroethylene (PTFE).

[0132] Figures 13A to 13C is an image of the upper surface of the protective layer 220 of Example 1 captured with a SEM (magnification: 50,000), Figures 14A to 14D is an image of a cross section of the protective layer 220 of Example 1 captured with a SEM (magnification: 100,000). Figure 15 The measurement results of the water contact angle of Example 1 are shown. Figure 16 The measurement results of light transmittance of Example 1 are shown. Figure 17 The confirmation results of the visible light transmittance of Example 1 are shown.

[0133] The surface hardness of the protective layer 220 of Example 1 was measured and shown in Table 1.

[0134] [Table 1]

[0135] The first target TG1 is formed by applying a power of 200 W and the second target TG2 is formed by applying a power of 100 W. Figures 13A to 13C The time for applying power to the corresponding targets TG1 and TG2 is Figure 13A 15 minutes in Figure 13B 20 minutes in Figure 13C The deposition time is 30 minutes, and the total deposition time for the protective layer 220 is 2 hours. Referring to the surface SEM, it can be seen that the protective layer 220 is fully formed by deposition.

[0136] The first target TG1 was formed by alternately applying a power of 150 W for 20 minutes and a power of 50 W for 20 minutes to the second target TG2. Figure 14Athe protective layer 220. The protective layer 220 was formed by alternately applying 200 W of power for 20 minutes to the first target TG1 and 75 W of power for 20 minutes to the second target TG2 Figure 14B the protective layer 220. The protective layer 220 was formed by alternately applying 200 W of power for 20 minutes to the first target TG1 and 100 W of power for 20 minutes to the second target TG2 Figure 14C the protective layer 220. The protective layer 220 was formed by alternately applying 200 W of fixed power for 20 minutes to the first target TG1 and power that was sequentially increased at 50 W, 100 W, and 150 W for 20 minutes to the second target TG2 Figure 14D Referring to FIG. 7, Figures 14A to 14D It can be confirmed that the surface of the protective layer 220 is flat, and the inorganic layer 220A and the polymer layer 220B are alternately formed. In some aspects, it can be confirmed that the thickness of the polymer layer 220B increases as the power applied to the second target TG2 increases.

[0137] Figure 15 (A) in FIG. 6 relates to the protective layer 220 formed by alternately applying 200 W of power for 20 minutes to the first target TG1 and 100 W of power for 20 minutes to the second target TG2, and it was measured that the water contact angle was 113°. Figure 15 (B) in FIG. 6 relates to the thin film formed by applying only 200 W of power to the first target TG1, and it was measured that the water contact angle was 32°. Referring to FIG. 7, Figure 15 It can be seen that the inclusion of the polymer layer 220B can improve the water resistance of the protective layer 220.

[0138] Figure 16 and Figure 17 relate to the protective layer 220 formed by applying 200 W of power to the first target TG1 and 100 W of power to the second target TG2, in which (A) is a case of alternately applying 200 W of power for 15 minutes to the first target TG1 and 100 W of power for 15 minutes to the second target TG2, and (B) is a case of alternately applying 200 W of power for 20 minutes to the first target TG1 and 100 W of power for 20 minutes to the second target TG2. Figure 16 shows the initial transmittance of the protective layer 220 and the transmittance of the protective layer 220 after 24 hours (24 h) at a temperature of 85℃ and a relative humidity of 85%. Referring to FIG. 7, Figure 16 It can be seen that the transmittance of the protective layer 220 is excellent in the visible light region, and the optical properties of the protective layer 220 are maintained regardless of heat and humidity. Referring to FIG. 7, Figure 17 It can be seen that the letters disposed below the protective layer 220 are clearly visible, and thus the transmittance of the protective layer 220 is excellent in the visible light region.

[0139] The protective layer 220 of Table 1 relates to a case where power is alternately applied for 20 minutes under the above deposition conditions. It can be seen that the hardness of Example 1 is much higher than that of PTFE (0.32 GPa).

[0140] [Example 2] The protective layer 220 was formed by simultaneously depositing zirconium oxide (ZrO2) and polytetrafluoroethylene (PTFE). The first target TG1 included zirconium oxide (ZrO2), the second target TG2 included polytetrafluoroethylene (PTFE), and zirconium oxide (ZrO2) and polytetrafluoroethylene (PTFE) were deposited for 1 hour to 2 hours.

[0141] Figure 18 XPS structural analysis relating to Example 2, Figures 19A to 19C is an image of a cross section of the protective layer 220 of Example 2 captured with a SEM (magnification: 50,000). Figure 20 Measurement results of the water contact angle of Example 2 are shown, Figure 21 Measurement results of the light transmittance of Example 2 are shown, Figure 22 Confirmation results of the visible light transmittance of Example 2 are shown.

[0142] The surface hardness of the protective layer 220 of Example 2 was measured and is shown in Table 2.

[0143] [Table 2]

[0144] The content ratio of zirconium (Zr), oxygen (O), carbon (C), and fluorine (F) was measured by EDS analysis of the protective layer 220 of Example 2, and the relative ratio of the atomic ratio of zirconium and fluorine was calculated and is shown in Table 3.

[0145] [Table 3]

[0146] Figure 18 relating to a case where power of 200 W was applied to the first target TG1 for 20 minutes, (A) relates to a case where power of 200 W was applied to the second target TG2 for 20 minutes, (B) relates to a case where power of 150 W was applied to the second target TG2 for 20 minutes, (C) relates to a case where power of 100 W was applied to the second target TG2 for 20 minutes, and (D) relates to a case where no power was applied to the second target TG2. Refer to Figure 18 It can be confirmed that (A) to (C) in which power was applied to the second target TG2 showed different peaks from (D), and thus zirconium and fluorine were bonded to each other.

[0147] The protective layer 220 was formed by applying power of 200 W to the first target TG1 for 20 minutes and applying power of 100 W to the second target TG2 for 20 minutes. Figure 19AThe protective layer 220 is formed by applying a power of 200 W to the first target TG1 for 20 minutes and applying a power of 200 W to the second target TG2 for 20 minutes. Figure 19B The protective layer 220 is formed by applying a power of 150 W to the first target TG1 for 20 minutes and applying a power of 150 W to the second target TG2 for 20 minutes. Figure 19C The protective layer 220. Figures 19A to 19C , it can be seen that the surface of the protection layer 220 is flat.

[0148] Figure 20 (A) in the figure relates to the protective layer 220 formed by applying a power of 100 W to the first target TG1 for 20 minutes and a power of 200 W to the second target TG2 for 20 minutes, and a water contact angle of 110° was measured. Figure 20 (B) in the figure relates to the protective layer 220 formed by applying a power of 150 W to the first target TG1 and the second target TG2 for 20 minutes, and the water contact angle was measured to be 107°. Figure 20 (C) in the figure relates to the protective layer 220 formed by applying a power of 200 W to the first target TG1 and the second target TG2 for 20 minutes, and a water contact angle of 110° was measured. Figure 20 (D) relates to a thin film formed by applying a power of 200 W to the first target TG1 for 20 minutes only, and the water contact angle was measured to be 37°. Figure 20 , it can be seen that the protection layer 220 has improved waterproofness by including PTFE.

[0149] Figure 21 The diagrams show a case where a power of 100 W is applied to the first target TG1 for 20 minutes, (A) shows a case where a power of 100 W is applied to the second target TG2 for 20 minutes, (B) shows a case where a power of 150 W is applied to the second target TG2 for 20 minutes, and (C) shows a case where a power of 200 W is applied to the second target TG2 for 20 minutes. Figure 22 The protective layer 220 is formed by applying a power of 100 W to the first target TG1 for 20 minutes and applying a power of 150 W to the second target TG2 for 20 minutes. Figure 21 and Figure 22 , it can be seen that the transmittance of the protective layer 220 is excellent in the visible light region. The terms "apply power to" and "supply power to" are used interchangeably herein.

[0150] Referring to Table 2, it can be seen that the hardness of Example 2 is much higher than the hardness of PTFE (0.32 GPa).

[0151] Referring to Table 3, it can be seen that as the power applied to the second target TG2 increases, the atomic ratio of fluorine to zirconium increases, and it can be inferred that zirconium is bonded to oxygen atoms and fluorine atoms.

[0152] [Comparative Example 1] A thin film was formed by simultaneously depositing titanium dioxide (TiO2) and polytetrafluoroethylene (PTFE). A first target TG1 included titanium dioxide (TiO2), a second target TG2 included polytetrafluoroethylene (PTFE), and titanium dioxide (TiO2) and polytetrafluoroethylene (PTFE) were deposited for 1 hour.

[0153] Figure 23 is an image of a cross section of the thin film of Comparative Example 1, captured with an SEM, Figure 24 refers to an XPS structural analysis of Comparative Example 1.

[0154] A thin film of Figure 23 was formed by applying a power of 100 W to the first target TG1 and the second target TG2 for 20 minutes. Referring to Figure 23 , it can be seen that the surface of the thin film is not flat, and the thickness of the thin film is significantly small.

[0155] Figure 24 (A) in Figure 24 is an XPS analysis result of a thin film of an inorganic material formed by applying a power of 200 W to only the first target TG1 for 20 minutes, Figure 24 (B) in is an XPS analysis result of a thin film formed by applying a power of 200 W to the first target TG1 and the second target TG2 for 20 minutes. Referring to Figure 24 , it can be seen that when titanium dioxide (TiO2) and polytetrafluoroethylene (PTFE) are simultaneously deposited, titanium (Ti) is changed to TiF4 having high sublimation properties through a plasma chemical reaction, and does not participate in the formation of the thin film.

[0156] [Comparative Example 2] A thin film was formed by simultaneously depositing aluminum oxide (Al2O3) and polytetrafluoroethylene (PTFE). A first target TG1 included aluminum oxide (Al2O3), a second target TG2 included polytetrafluoroethylene (PTFE), and aluminum oxide (Al2O3) and polytetrafluoroethylene (PTFE) were deposited for 1 hour.

[0157] Figure 25 is an image of a cross section of the thin film of Comparative Example 2, captured with an SEM, Figure 26 shows a measurement result of a water contact angle of Comparative Example 2.

[0158] A thin film of Figure 25 and a thin film of Figure 26 were formed by applying a power of 200 W to the first target TG1 and the second target TG2 for 20 minutes. Referring to Figure 25 , it can be seen that the thin films are uniformly formed, but the thickness of the thin films is significantly small.

[0159] Referring toFigure 26 , the film showed superhydrophilicity, making it impossible to measure the water contact angle of the film. The film included an organic material such as polytetrafluoroethylene, but the water contact angle and water repellency of the film did not improve at all.

[0160] [Comparative Example 3] The thin film was formed by simultaneously depositing zinc oxide (ZnO) and polytetrafluoroethylene (PTFE). The first target TG1 included zinc oxide (ZnO), and the second target TG2 included polytetrafluoroethylene (PTFE). The zinc oxide (ZnO) and polytetrafluoroethylene (PTFE) were deposited for 1 hour.

[0161] Figure 27 The measurement results of the light transmittance of Comparative Example 3 are shown. Figure 28 The confirmation results of the visible light transmittance of Comparative Example 3 are shown.

[0162] Figure 27 The diagrams show a case where a power of 200 W is applied to the first target TG1 for 20 minutes, (A) shows a case where a power of 100 W is applied to the second target TG2 for 20 minutes, (B) shows a case where a power of 150 W is applied to the second target TG2 for 20 minutes, and (C) shows a case where a power of 200 W is applied to the second target TG2 for 20 minutes. Figure 28 This relates to a thin film formed by applying a power of 200 W to the first target TG1 and the second target TG2 for 20 minutes. Figure 27 and Figure 28 , it can be seen that the transmittance of the protective layer 220 is low in the visible light region, making the protective layer 220 unsuitable for covering a window.

[0163] The embodiments of the present disclosure have been described above with reference to the accompanying drawings, but it will be understood by those skilled in the art that various modifications and changes may be made without departing from the technical spirit or technical features of the present disclosure. Therefore, it will be understood that the embodiments described herein are illustrative in all aspects and are not restrictive.

[0164] The display device according to one embodiment of the present disclosure can be applied to various electronic devices. The electronic device according to one embodiment of the present disclosure includes the display device described above, and may further include a module or device having additional functions in addition to the display device.

[0165] Figure 29 is a block diagram of an electronic device according to one embodiment of the present disclosure.

[0166] Reference Figure 29 According to one embodiment of the present disclosure, the electronic device 1 may include a display module 11 , a processor 12 , a memory 13 , and a power module 14 .

[0167] The processor 12 can include at least one of a central processing unit (CPU), an application processor (AP), a graphics processing unit (GPU), a communication processor (CP), an image signal processor (ISP), and a controller.

[0168] The memory 13 can store data information necessary for the operation of the processor 12 or the display module 11. When the processor 12 executes an application stored in the memory 13, an image data signal and / or an input control signal are transmitted to the display module 11, which can process the received signal and output image information through a display screen.

[0169] The power module 14 can include a power supply module such as a power adapter or a battery, and a power conversion module that converts power supplied by the power supply module to generate power necessary for the operation of the electronic device 1.

[0170] At least one of the components of the electronic device 1 according to one embodiment of the disclosure can be included in the display device 10 according to an embodiment of the disclosure. In addition, some of the respective modules functionally included in one module can be included in the display device 10, and the other modules can be provided separately from the display device 10. For example, the display device 10 can include the display module 11, and the processor 12, the memory 13, and the power module 14 can be provided in the form of other devices within the electronic device 1 rather than the display device 10.

[0171] Figure 30 is a schematic view of an electronic device according to various embodiments of the disclosure.

[0172] Referring to Figure 30 Various electronic devices to which the display device 10 according to an embodiment of the disclosure is applied can not only include image display electronic devices such as a smartphone 10_1a, a tablet PC (Personal Computer) 10_1b, a laptop computer 10_1c, a TV 10_1d, and a desktop monitor 10_1e, but also include wearable electronic devices including a display module such as a smartglasses 10_2a, a head-mounted display 10_2b, and a smartwatch 10_2c, and vehicle electronic devices 10_3 including a display module such as a CID (Central Information Display) and an interior mirror display arranged on a center fascia and an instrument panel of a car.

[0173] In summarizing the detailed description, those skilled in the art will understand that many changes and modifications can be made to the example embodiments without substantially departing from the principles supported by the aspects of the disclosure. Accordingly, the disclosed example embodiments of the disclosure are for general and descriptive purposes, not for limiting purposes.

Claims

1. A cover window, the cover window comprising: a window base; and a protective layer provided on the window base, wherein: the protective layer includes: an inorganic material including at least one of SiO2 and ZrO2; and a polymer resin including fluorine, a water contact angle of the protective layer is 105° or more, and a surface hardness of the protective layer is 1 GPa or more. the polymer resin includes polytetrafluoroethylene.

2. The cover window of claim 1, wherein, 3. The cover window according to claim 2, wherein: a weight average molecular weight of the polymer resin is 20 g / mol to 1000 g / mol, and a glass transition temperature of the polymer resin is 80°C to 250°C. a thickness of the protective layer is 200 nm to 1500 nm.

4. The cover window of claim 1, wherein, 5. The cover window according to claim 1, wherein: the inorganic material includes SiO2, and the protective layer includes: an inorganic layer including SiO2; and a polymer layer including the polymer resin. the protective layer includes:

6. The cover window of claim 5, wherein, a first inorganic layer including SiO2; a first polymer layer provided on the first inorganic layer and including the polymer resin including the fluorine; a second inorganic layer provided on the first polymer layer and including SiO2; and a second polymer layer provided on the second inorganic layer and including the polymer resin including the fluorine. a thickness of the first polymer layer and a thickness of the second polymer layer are different from each other.

7. The cover window of claim 6, wherein, the thickness of the first polymer layer is smaller than the thickness of the second polymer layer.

8. The cover window of claim 7, wherein, a thickness difference between the first inorganic layer and the first polymer layer is 2 nm to 100 nm.

9. The cover window of claim 6, wherein, 10. The cover window according to claim 1, wherein: the inorganic material includes ZrO2, and the protective layer is a single layer in which the inorganic material and the polymer resin are mixed with each other. an atomic ratio of fluorine in the protective layer is 0.5 times to 50 times an atomic ratio of zirconium in the protective layer.

11. The cover window of claim 10, wherein, the window base is formed of glass or plastic.

12. The cover window of claim 1, wherein, 13. A display device, the display device comprising: a display panel; and a cover window provided on the display panel, wherein: the cover window includes: a window base; and a protective layer provided on the window base, the protective layer includes: an inorganic material including at least one of SiO2 and ZrO2; and a polymer resin including fluorine, a water contact angle of the protective layer is 105° or more, and a surface hardness of the protective layer is 1 GPa or more.

14. A method of manufacturing a cover window, the method comprising the steps of: preparing a first target and a second target in a chamber of a sputtering device, the first target including an inorganic material including at least one of SiO2 and ZrO2, and the second target including a polymer resin including fluorine; and depositing a protective layer on a target base by sputtering the first target and the second target. the step of depositing the protective layer on the target base by sputtering the first target and the second target includes sputtering the second target after sputtering the first target. a duration of sputtering the first target and a duration of sputtering the second target are equal to each other.

15. The method of claim 14, wherein, ​ 16. The method of claim 15, wherein, ​ 17. The method of claim 15, wherein, The power applied to the first target is equal to or greater than the power applied to the second target.

18. The method of claim 15, further comprising repeating sputtering the second target one or more times after sputtering the first target.

19. The method of claim 18, further comprising increasing the power supplied to the second target while repeating sputtering the second target.

20. The method of claim 14, wherein, The step of depositing the protective layer on the target substrate by sputtering the first target and the second target includes simultaneously sputtering the first target and the second target.

21. An electronic device comprising: a display device configured to provide an image; a processor configured to provide an image data signal to the display device; a memory configured to store data information for operation; and a power module configured to generate power, wherein the display device includes a display panel and a cover window disposed on the display panel, wherein: the cover window includes a window substrate and a protective layer disposed on the window substrate, the protective layer includes an inorganic material including at least one of SiO2 and ZrO2 and a polymer resin including fluorine, a water contact angle of the protective layer is 105° or more, and a surface hardness of the protective layer is 1 GPa or more. ​

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