Fixing device for LED sapphire substrate and fixing method thereof

Abstract

The application provides a fixing device for LED sapphire substrate and a fixing method thereof, which comprises a sapphire substrate arranged on a base cylinder, the base cylinder is a cylindrical open structure, and an installation inner cavity is arranged in the base cylinder, a fixing cylinder is rotatably arranged at the opening of the base cylinder, a plurality of positioning guide sliding rails are arranged on the inner wall of the fixing cylinder, a sliding rail plate is slidably connected in each of the positioning guide sliding rails, and a cover plate push block is slidably arranged on the surface of the positioning guide sliding rail; in the application, the edge stress problem caused by the traditional edge clamping mode is avoided, the substrate damage caused by stress is reduced, and the service life and stability of the substrate are improved; secondly, the device has a reasonable structure design and is simple to operate, the fixing can be completed by rotating the base cylinder and tightening the locking screw shaft, and the working efficiency is improved; thirdly, the components of the device are connected closely and flexibly, can adapt to sapphire substrates with different sizes, and have strong universality and practicality.

Description

TECHNICAL FIELD

[0001] The present application belongs to the field of semiconductor, in particular to a fixing device for LED sapphire substrate and a fixing method thereof. BACKGROUND

[0002] LED is light emitting diode, LED lamp has higher light efficiency, longer service life, smaller size and wider application compared with ordinary bulb. In semiconductor wafer manufacturing, sapphire has important value due to high insulation and thermal stability. In terms of high insulation, it can be used as an insulating layer between LED substrate and conductive layer to prevent leakage and signal interference between different conductive areas in complex semiconductor structure and ensure stable operation of circuit.

[0003] When the substrate is fixed, metal or ceramic furniture is usually used to clamp the edge of the substrate. This clamping method is suitable for clamping thicker substrates and has high reliability and stability. However, when clamping, the edge of the substrate is in contact with the clamp, and stress is generated due to the extrusion of the clamping force and the discontinuous deformation. This easily causes edge stress. If the clamping force on the edge is low, the friction between the substrate and the clamp decreases, which easily causes the substrate to loosen.

[0004] Therefore, the present application provides a fixing device for LED sapphire substrate and a fixing method thereof to solve the above problems. SUMMARY

[0005] In order to solve the above technical problems, the present application provides a fixing device for LED sapphire substrate and a fixing method thereof to solve the problems of stress caused by the extrusion of clamping force and discontinuous deformation, which easily causes edge stress.

[0006] A fixing device for LED sapphire substrate, comprising a sapphire substrate arranged on a base cylinder, the base cylinder is a cylindrical open structure, and an installation inner cavity is arranged in the inside, a fixing cylinder is rotatably arranged at the opening of the base cylinder, a plurality of positioning guide rails are arranged on the inner wall of the fixing cylinder, a sliding rail plate is slidably connected in each of the positioning guide rails, a cover plate push block is slidably arranged on the surface of the positioning guide rail, a substrate cover plate is arranged on the cover plate push block, a clamping block is arranged on the cover plate push block, a plurality of clamping grooves are equidistantly arranged on the sliding rail plate, the clamping block is inserted into the clamping groove, a guide shaft is vertically arranged in the middle of the installation inner cavity, a sliding sleeve seat is threadedly connected to the surface of the guide shaft, and the side walls of the sliding sleeve seat and the sliding rail plates are connected by linkage rods.

[0007] Further, the middle part of the positioning guide slide rail is a hollow structure, the bottom of the slide rail plate is provided with an adapter block one, the adapter block one penetrates the middle part of the positioning guide slide rail and is rotationally connected with one end of the linkage rod, the other end of the linkage rod is rotationally connected with an adapter block two, the adapter block two is fixedly connected to the surface of the slide sleeve seat and is arranged in an annular array.

[0008] Further, the cover plate push block is a "back" shaped structure, the slide rail plate penetrates the middle part through hole of the cover plate push block, the side wall of the cover plate push block is movably contacted with the side wall of the slide rail plate, the clamping block is mounted on the inner ring top wall of the cover plate push block, and the gap is arranged between the bottom wall of the cover plate push block and the bottom of the slide rail plate.

[0009] Further, the top of the cover plate push block is provided with a threaded inner groove and a limiting insertion hole, the threaded inner groove is arranged in the middle part of the cover plate push block, the limiting insertion hole is symmetrically arranged along the threaded inner groove, the bottom of the substrate cover plate is provided with a limiting insertion rod, the limiting insertion rod is slidably inserted into the limiting insertion hole, the substrate cover plate is provided with a locking screw shaft, one end of the locking screw shaft is movably penetrated through the substrate cover plate and is threadedly connected with the threaded inner groove.

[0010] Further, the clamping groove is an "L" shaped structure, the clamping block is matched with the right angle surface of the clamping groove, and the gap is arranged between the side, away from the right angle surface, of the clamping block and the clamping groove.

[0011] Further, the side surface of the substrate cover plate, close to the middle part of the fixed cylinder, is an arc structure, and the sapphire substrate is arranged between the substrate cover plate and the positioning guide slide rail.

[0012] Further, the open end of the base cylinder is provided with an annular clamping groove, one end of the fixed cylinder is movably inserted into the annular clamping groove, the surface of the fixed cylinder is provided with an anti-skid sleeve ring, the anti-skid sleeve ring is arranged above the base cylinder, the surface of the base cylinder is provided with an anti-skid edge groove, and the bottom of the base cylinder is provided with a plurality of ventilation holes.

[0013] A fixing method of a fixing device for an LED sapphire substrate, comprising the following steps:

[0014] Step one: the sapphire substrate is placed on the surface of the positioning guide slide rail, the anti-skid sleeve ring on the surface of the fixed cylinder is held by hand, the base cylinder is rotated, the base cylinder is rotated relative to the fixed cylinder, and then the guide shaft is rotated relative to the slide sleeve seat;

[0015] Step two: when the slide sleeve seat moves downward, one end of the linkage rod is pulled to move downward, and then the other end of the linkage rod pulls the slide rail plate to slide in the positioning guide slide rail, so that the cover plate push block is pulled to be close to the sapphire substrate;

[0016] Step three: when the cover plate push block moves to one side of the sapphire substrate and contacts the side wall, the locking screw shaft is rotated by the hexagonal bolt, the locking screw shaft moves into the threaded inner groove, pushes the substrate cover plate to move downward, and presses on the surface of the sapphire substrate for fixation.

[0017] Compared with the prior art, the present application has the following beneficial effects:

[0018] 1、The present application realizes the effective fixation of the LED sapphire substrate by designing the base cylinder, the fixing cylinder, the positioning guide sliding rail, the sliding rail plate, the cover plate push block, the substrate cover plate and other components, which cooperate with each other. In the fixation process, the guide shaft is rotated relative to the sliding sleeve seat by rotating the base cylinder, the sliding sleeve seat is moved, the sliding rail plate and the cover plate push block are pulled by the linkage rod, the substrate cover plate is pushed by the locking screw shaft to press the sapphire substrate for fixation. The edge of the sapphire substrate is no longer clamped, the sapphire substrate can be stably fixed, the position of the cover plate push block can be adjusted according to the different sizes of the sapphire substrate, and the substrate cover plate can match the surface of the sapphire substrate that is pressed.

[0019] 2、In the present application, the edge stress problem caused by the traditional edge clamping method is avoided, the substrate damage caused by stress is reduced, and the service life and stability of the substrate are improved. Secondly, the device structure design is reasonable, the operation is simple, the fixation can be completed by rotating the base cylinder and tightening the locking screw shaft, and the working efficiency is improved. Furthermore, the connection between the components of the device is tight and flexible, which can adapt to sapphire substrates of different sizes, has strong universality and practicality.

[0020] 3、The present application can effectively improve the air circulation inside the device through the design of the ventilation hole, reduce the influence of heat accumulation on the sapphire substrate, and ensure the stability of its working performance. The setting of the anti-skid sleeve ring and the anti-skid edge groove facilitates the operation of the operator, avoids sliding when rotating the base cylinder or the fixing cylinder, improves the safety and convenience of the operation. Moreover, the cooperation of the clamping block and the clamping groove enables the cover plate push block to be accurately positioned during sliding, ensuring the accuracy of the substrate cover plate pressing on the sapphire substrate. At the same time, the combination of the fixing device and the fixing method provides an efficient, stable and reliable solution for the fixation of LED sapphire substrates in the semiconductor field, which helps to promote the development of related industries and improve the quality and competitiveness of products. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 is a perspective view of the present application;

[0022] Figure 2 is an internal cross-sectional perspective view of the present application;

[0023] Figure 3 is a perspective view of the linkage rod of the present application;

[0024] Figure 4 is the cover plate pusher split diagram of the application;

[0025] Figure 5 is the internal perspective view of the application's clamping groove;

[0026] Figure 6 is the perspective view of the application's positioning guide slide rail;

[0027] Figure 7 is the perspective view of the application's installation inner cavity.

[0028] In the figure:

[0029] 1, base cylinder; 2, fixed cylinder; 3, sapphire substrate; 4, substrate cover plate; 5, linkage rod; 6, guide shaft; 7, sliding sleeve seat; 8, positioning guide slide rail; 9, slide rail plate; 10, ventilation hole; 11, clamping groove; 12, adapter block one; 13, locking screw shaft; 14, cover plate pusher; 15, clamping block; 16, threaded inner groove; 17, limiting plug; 18, limiting hole; 19, anti-skid sleeve ring; 20, installation inner cavity; 21, annular clamping groove. DETAILED DESCRIPTION

[0030] The embodiments of the application will be further described in conjunction with the drawings and examples. The following examples are used to illustrate the application, but cannot be used to limit the scope of the application.

[0031] As shown in Figures 1-7 , the application provides a fixing device for LED sapphire substrate, which comprises a sapphire substrate 3 arranged on a base cylinder 1, the base cylinder 1 is a cylindrical open structure, and an installation inner cavity 20 is arranged inside, a fixed cylinder 2 is arranged on the opening of the base cylinder 1, a plurality of positioning guide slide rails 8 are arranged on the inner wall of the fixed cylinder 2, a slide rail plate 9 is respectively connected in sliding mode inside the positioning guide slide rail 8, a cover plate pusher 14 is arranged in sliding mode on the surface of the positioning guide slide rail 8, a substrate cover plate 4 is arranged on the cover plate pusher 14, a clamping block 15 is arranged on the cover plate pusher 14, a plurality of clamping grooves 11 are arranged equidistantly on the slide rail plate 9, the clamping block 15 is inserted into the clamping groove 11, a guide shaft 6 is vertically arranged in the middle of the installation inner cavity 20, a sliding sleeve seat 7 is threadedly connected to the surface of the guide shaft 6, and the side wall of the sliding sleeve seat 7 is connected with the slide rail plate 9 through a linkage rod 5.

[0032] As an embodiment of the present application, the middle part of the positioning guide slide rail 8 is a hollow structure, the bottom of the slide rail plate 9 is provided with an adapter block one 12, the adapter block one 12 penetrates the middle part of the positioning guide slide rail 8, and is rotationally connected with one end of the linkage rod 5, the other end of the linkage rod 5 is rotationally connected with an adapter block two, the adapter block two is fixedly connected on the surface of the sliding sleeve seat 7, and is arranged in an annular array.

[0033] As Figures 2-3 , the linkage rod 5 drives the two adapter blocks to move, when the end of the linkage rod 5 close to the sliding sleeve seat 7 moves downward, the other end of the linkage rod 5 pulls the slide rail plate 9 to slide in the guide slide rail 8, the slide rail plate 9 is close to the middle part of the base cylinder 1, and when the sliding sleeve seat 7 moves upward, the slide rail plate 9 moves reversely.

[0034] As an embodiment of the present application, the cover plate push block 14 is a "back" shaped structure, the slide rail plate 9 penetrates the middle part through hole of the cover plate push block 14, the side wall of the cover plate push block 14 is movably contacted with the side wall of the slide rail plate 9, the clamping protrusion 15 is installed on the inner ring top wall of the cover plate push block 14, and the gap is arranged between the bottom wall of the cover plate push block 14 and the bottom of the slide rail plate 9.

[0035] As Figures 4-5 , the clamping protrusion 15 is arranged on the top of the slide rail plate 9, the cover plate push block 14 can slide along the length direction of the slide rail plate 9, and the cover plate push block 14 can slide up and down due to the gap between the upper and lower of the slide rail plate 9.

[0036] As an embodiment of the present application, the top of the cover plate push block 14 is provided with a threaded inner groove 16 and a limiting insertion hole 18, the threaded inner groove 16 is arranged in the middle part of the cover plate push block 14, the limiting insertion hole 18 is symmetrically arranged along the threaded inner groove 16, the bottom of the substrate cover plate 4 is provided with a limiting insertion rod 17, the limiting insertion rod 17 is slidably inserted into the limiting insertion hole 18, the substrate cover plate 4 is provided with a locking screw shaft 13, one end of the locking screw shaft 13 is movably penetrated through the substrate cover plate 4 and is threadedly connected with the threaded inner groove 16.

[0037] As Figure 4 , the one end of the locking screw shaft 13 is provided with an internal hexagonal hole, the one end of the locking screw shaft 13 is rotated by using a hexagonal bolt, the one end of the locking screw shaft 13 is threadedly connected with the threaded inner groove 16, the limiting insertion rod 17 is driven to be deeply inserted into the limiting insertion hole 18, the substrate cover plate 4 moves downward, is close to the surface of the sapphire substrate 3, and is pressed on the surface of the sapphire substrate 3.

[0038] As an embodiment of the present application, the clamping groove 11 is an "L" shaped structure, the clamping protrusion 15 is arranged to match the right angle surface of the clamping groove 11, and the side away from the right angle surface of the clamping protrusion 15 is provided with a spacing from the clamping groove 11.

[0039] As Figure 5 , the clamping block 15 can slide left and right in the clamping groove 11, and when the clamping block 15 is fixed, the clamping block 15 can be conveniently inserted into the clamping groove 11 from the top of the clamping groove 11, and then the cover pushing block 14 is moved downward, at which time the clamping block 15 is in matching contact with the right-angled end of the clamping groove 11.

[0040] As an embodiment of the present application, the side surface of the substrate cover plate 4 near the middle of the fixed cylinder 2 is arc-shaped, and the sapphire substrate 3 is arranged between the substrate cover plate 4 and the positioning guide slide rail 8.

[0041] As Figure 7 , the sapphire substrate 3 is supported by the positioning guide slide rail 8 and is fixed by being pressed from the top by the substrate cover plate 4 which can move up and down.

[0042] As an embodiment of the present application, the open end of the base cylinder 1 is provided with an annular clamping groove 21, one end of the fixed cylinder 2 is movably inserted into the annular clamping groove 21, the surface of the fixed cylinder 2 is provided with an anti-skid sleeve ring 19, the anti-skid sleeve ring 19 is arranged above the base cylinder 1, the surface of the base cylinder 1 is provided with an anti-skid edge groove, and the bottom of the base cylinder 1 is provided with a plurality of ventilation holes 10.

[0043] A fixing method of a fixing device for an LED sapphire substrate, comprising the following steps:

[0044] Step one: the sapphire substrate 3 is placed on the surface of the positioning guide slide rail 8, the anti-skid sleeve ring 19 on the surface of the fixed cylinder 2 is held by hand, the base cylinder 1 is rotated, the base cylinder 1 rotates relative to the fixed cylinder 2, and then the guide shaft 6 rotates relative to the sliding sleeve base 7;

[0045] Step two: when the sliding sleeve base 7 moves downward, one end of the linkage rod 5 is pulled to move downward, and then the other end of the linkage rod 5 pulls the slide rail plate 9 to slide in the positioning guide slide rail 8, so as to pull the cover pushing block 14 close to the sapphire substrate 3;

[0046] Step three: when the cover pushing block 14 moves to one side of the sapphire substrate 3 and contacts the side wall, the locking shaft 13 is rotated by a hexagonal bolt, the locking shaft 13 moves into the threaded inner groove 16, pushes the substrate cover plate 4 to move downward, and presses on the surface of the sapphire substrate 3 for fixation.

[0047] As Figure 5 , when the sapphire substrate 3 is fixed, the length of the guide shaft 6 is limited, which limits the moving range of the cover pushing block 14, and the cover pushing block 14 can be moved back and forth on the surface of the positioning guide slide rail 8 to increase the fixing range of the cover pushing block 14;

[0048] The cover plate push block 14 is moved upward, the clamping block 15 of the cover plate push block 14 is away from the clamping slot 11, then is moved to above another clamping slot 11, the clamping block 15 is inserted into the clamping slot 11, is slid to the side of the side wall of the fixed cylinder 2, the inner right angle end of the clamping block 15 is matched with the right angle end of the clamping slot 11, and the slide rail plate 9 is moved again, and adjustment can be carried out.

[0049] The embodiments of the present application are given for example and description, although the embodiments of the present application have been shown and described above, it can be understood that the above-mentioned embodiments are exemplary, and cannot be understood as limiting the present application, and the ordinary skilled in the art can change, modify, replace and modify the above-mentioned embodiments within the scope of the present application.

Claims

1. A fixing device for LED sapphire substrates, comprising a sapphire substrate (3) disposed on a base cylinder (1), characterized in that, The base cylinder (1) is a cylindrical open structure with an internal installation cavity (20). A fixed cylinder (2) is rotatably installed at the open end of the base cylinder (1). Multiple positioning guide slide rails (8) are installed on the inner wall of the fixed cylinder (2). Slide rail plates (9) are slidably connected inside the positioning guide slide rails (8). A cover plate pusher (14) is slidably installed on the surface of the positioning guide slide rails (8). A base cover plate (4) is installed on the cover plate pusher (14). A locking protrusion (15) is installed on the cover plate pusher (14). Multiple locking grooves (11) are equally spaced on the slide rail plate (9). The locking protrusion (15) is inserted into the locking groove (11). A guide shaft (6) is vertically installed in the middle of the installation cavity (20). A sliding sleeve seat (7) is threadedly connected to the surface of the guide shaft (6). The side wall of the sliding sleeve seat (7) is divided into The positioning guide slide rail (8) is connected to the slide rail plate (9) by a linkage rod (5). The middle part of the positioning guide slide rail (8) is hollow. The bottom of the slide rail plate (9) is equipped with a first adapter block (12). The first adapter block (12) passes through the middle of the positioning guide slide rail (8) and is rotatably connected to one end of the linkage rod (5). The other end of the linkage rod (5) is rotatably connected to a second adapter block. The second adapter block is fixedly connected to the surface of the sliding sleeve seat (7) and arranged in a ring array. The cover plate push block (14) is a "U" shaped structure. The slide rail plate (9) passes through the middle through hole of the cover plate push block (14). The side wall of the cover plate push block (14) is in contact with the side wall of the slide rail plate (9). The locking protrusion (15) is installed on the inner ring top wall of the cover plate push block (14). There is a gap between the bottom wall of the cover plate push block (14) and the bottom of the slide rail plate (9).

2. The fixing device for LED sapphire substrate as described in claim 1, characterized in that, The top of the cover plate push block (14) is provided with a threaded inner groove (16) and a limiting insertion hole (18). The threaded inner groove (16) is located in the middle of the cover plate push block (14). The limiting insertion hole (18) is symmetrically arranged along the threaded inner groove (16). A limiting insertion rod (17) is installed at the bottom of the substrate cover plate (4). The limiting insertion rod (17) is slidably inserted into the limiting insertion hole (18). A locking screw (13) is provided on the substrate cover plate (4). One end of the locking screw (13) moves through the substrate cover plate (4) and is threadedly connected to the threaded inner groove (16).

3. The fixing device for LED sapphire substrate as described in claim 1, characterized in that, The slot (11) has an "L" shaped structure. The slot protrusion (15) is matched with the right angle surface of the slot (11). There is a gap between the side of the slot protrusion (15) away from the right angle surface and the slot (11).

4. The fixing device for LED sapphire substrate as described in claim 1, characterized in that, The side of the substrate cover plate (4) near the middle of the fixed cylinder (2) is arc-shaped, and the sapphire substrate (3) is disposed between the substrate cover plate (4) and the positioning guide rail (8).

5. The fixing device for LED sapphire substrate as described in claim 1, characterized in that, The base cylinder (1) has an annular groove (21) at its opening. One end of the fixing cylinder (2) is movably inserted into the annular groove (21). The surface of the fixing cylinder (2) is fitted with an anti-slip ring (19). The anti-slip ring (19) is positioned above the base cylinder (1). The surface of the base cylinder (1) is provided with an anti-slip side groove. The bottom of the base cylinder (1) has multiple ventilation holes (10).

6. A fixing method for a fixing device for an LED sapphire substrate as described in any one of claims 1-5, characterized in that, Includes the following steps: Step 1: Place the sapphire substrate (3) on the surface of the positioning guide slide rail (8), hold the anti-slip collar (19) on the surface of the fixed cylinder (2), rotate the base cylinder (1), the base cylinder (1) rotates relative to the fixed cylinder (2), and then the guide shaft (6) rotates relative to the slide seat (7). Step 2: When the sliding sleeve seat (7) moves downward, pull one end of the linkage rod (5) down, and then pull the slide plate (9) to slide in the positioning guide slide rail (8), thereby pulling the cover plate push block (14) closer to the sapphire substrate (3). Step 3: When the cover plate pusher (14) moves to one side of the sapphire substrate (3) and comes into contact with the side wall, the locking screw (13) is rotated by the hexagonal bolt. The locking screw (13) moves into the inner groove (16) of the thread, pushing the substrate cover plate (4) downward and pressing it against the surface of the sapphire substrate (3) to fix it.

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