Independent modular multi-stage error suppression transmission system and robot hand

Abstract

The application discloses an independent modular multi-stage error suppression transmission system and a mechanical hand, and relates to the field of semiconductor wafer transmission equipment. The application comprises an arm body, a plurality of transmission areas are distributed along the height direction of a chamber, at least two pulley groups, a plurality of transmission levels are distributed along the vertical direction, each transmission level is located in a different transmission area, and each pulley group comprises a plurality of pulley modules. A support assembly comprises independent support units corresponding to each transmission area, the support units comprise a positioning support part which is detachably connected to the inner circumferential side wall of a mounting shell. The pulley modules are rotatably arranged in the support units, the positioning support parts in different transmission areas are staggered in the vertical projection, and the support assembly is configured to isolate and disperse the radial load transmission of different pulley modules. The radial load and vibration between the pulley modules are dispersed and isolated.

Description

Technical Field

[0001] This invention relates to the field of semiconductor wafer transfer equipment technology, and more particularly to an independent modular multi-level error suppression transmission system and a robotic arm. Background Technology

[0002] In the semiconductor device manufacturing process, wafer transfer robots are key automated devices for achieving efficient and precise transfer of wafers between processing equipment. Their motion accuracy and structural stability directly determine wafer production efficiency and final product yield. In existing technologies, such robots typically employ a multi-joint arm structure, including a main arm, a forearm, and an end effector. To achieve independent rotational movement of each arm and end effector, multi-stage synchronous belt drive mechanisms are commonly used for power transmission. The main arm and forearm are often designed as a single unit, with bearings connecting and allowing relative rotation between the rotating axes.

[0003] However, existing robotic arms generally suffer from the following problems: First, the integrated arm structure design makes it difficult to modularly adjust or partially replace components according to different working conditions. When a part of the arm (such as a specific shaft section or connecting part) wears or is damaged, the entire arm assembly often needs to be replaced, significantly increasing equipment maintenance costs and downtime. Second, in multi-stage synchronous belt drive systems, the tension of the drive belt increases progressively with the number of transmission stages. This accumulated tension eventually concentrates on the axles of each stage of the drive belt pulleys, forming a large radial load. Excessive radial load can easily cause slight angular offsets or deformations in the axle support structure. Furthermore, these slight offsets or deformations are amplified progressively through multiple stages of transmission, ultimately affecting the positioning accuracy of the end effector and causing wafer placement deviations. In addition, existing pulley assemblies are usually directly connected in series with bearings on the same shaft system or adjacent support structures. This connection method means that when one pulley vibrates or displaces due to uneven belt tension, its own dynamic imbalance, or external excitation, the resulting disturbance is directly transmitted to other associated pulleys through the shared bearings and support structure, causing mutual interference, exacerbating the accumulation of errors in the entire transmission chain, and seriously affecting the dynamic stability of the wafer transport process.

[0004] Therefore, designing a robotic arm and transmission system that is easy to maintain and adjust and effectively prevents load accumulation, vibration interference, and error amplification between pulleys has become a key technical challenge that urgently needs to be overcome. Summary of the Invention

[0005] The purpose of this invention is to provide an independent modular multi-level error suppression transmission system and a robotic arm to solve the problems of difficult adjustment and maintenance of transmission systems in the prior art, and low positioning accuracy of the end effector due to small angular offset of the wheel axle.

[0006] To achieve the above objectives, the technical solution of the present invention is as follows:

[0007] First aspect

[0008] An independent modular multi-stage error suppression transmission system includes:

[0009] The arm body has a cavity and a wall surrounding the cavity, and multiple transmission areas are distributed along the height direction of the cavity;

[0010] A pulley assembly is disposed in the cavity. The pulley assembly has multiple vertically distributed transmission levels, each of which is located in a different transmission area. Each pulley assembly includes multiple pulley modules.

[0011] The support assembly includes independent support units corresponding to each of the transmission areas, each support unit including a positioning support portion, the positioning support portion being detachably connected to the wall surrounding the chamber;

[0012] The pulley module is rotatably mounted on the support unit, and the positioning support parts located in different transmission areas are staggered in the vertical projection. The support assembly is configured to isolate and disperse the radial load transmission of different pulley modules.

[0013] Furthermore, the arm body includes at least two arm segments, which are detachably connected. Each arm segment includes a mounting housing, and the inner peripheral sidewall of the mounting housing is provided with a plurality of positioning mounting grooves located in different transmission areas along the radial direction. The positioning support is located in the positioning mounting groove.

[0014] Furthermore, the mounting housing includes a bottom wall, and the positioning mounting groove extends from the bottom of the groove to the end face of the mounting housing opposite to the bottom wall, and penetrates the end face of the mounting housing opposite to the bottom wall.

[0015] Furthermore, the positioning mounting groove includes a positioning groove portion and a mounting groove portion that are interconnected. The positioning groove portion extends vertically from the bottom wall of the mounting groove portion. The positioning support portion is embedded in the positioning groove portion. The positioning groove portion penetrates the end face of the mounting housing opposite to the bottom wall. The positioning groove portion is located in only one of the transmission areas, and the mounting groove portion is located in at least one of the transmission areas.

[0016] Furthermore, the vertical projected area of ​​the positioning groove is less than or equal to that of the mounting groove.

[0017] Furthermore, at least two of the multiple positioning mounting slots in the same transmission area are arranged radially opposite each other, and the multiple positioning slots of the transmission area at different heights are staggered along the vertical projection.

[0018] Furthermore, the support unit includes an annular body, the positioning support portion is evenly distributed along the outer circumferential surface of the annular body and fixedly connected to the annular body, a support body is formed extending radially inward along the annular body, the support body has a support surface, an annular protrusion is formed extending vertically from the inner edge of the support body, the annular protrusion has an inner circumferential surface, the support surface and the inner circumferential surface surround to form a limiting groove, the support assembly also includes a roller bearing, the roller bearing is located between the annular body and the pulley module, and part of the roller bearing abuts in the limiting groove.

[0019] Furthermore, a transition reinforcing rib is formed extending inward from the inner peripheral edge of the annular body, and the transition reinforcing rib is located between the annular body and the annular protrusion.

[0020] Furthermore, the pulley assembly includes an input pulley assembly and an output pulley assembly. The input pulley assembly includes a first pulley module, a second pulley module, and a third pulley module. The output pulley assembly includes a fourth pulley module, a fifth pulley module, and a sixth pulley module. The first pulley module is drivenly connected to the fourth pulley module, the second pulley module is drivenly connected to the fifth pulley module, and the third pulley module is drivenly connected to the sixth pulley module.

[0021] Furthermore, the third pulley module and the sixth pulley module are pivotally connected to the bottom wall of the mounting housing, and the first pulley module, the second pulley module, the fourth pulley module and the fifth pulley module are connected to the inner peripheral sidewall of the mounting housing.

[0022] Furthermore, at least two boom segments include a first boom segment, a second boom segment, and a third boom segment that are detachably connected, with the input pulley assembly disposed within the first boom segment and the output pulley assembly disposed within the third boom segment.

[0023] Second aspect

[0024] The robotic arm, including the aforementioned independent modular multi-level error suppression transmission system, includes a first arm, a second arm pivotally connected to the end of the first arm, and an actuation component pivotally connected to the end of the second arm, wherein the independent modular multi-level error suppression transmission system is located in the first arm and the second arm.

[0025] Furthermore, the device has a shoulder joint axis, an elbow joint axis, and a wrist joint axis. One end of the first arm is rotatable about the shoulder joint axis, and one end of the second arm is rotatable about the elbow joint axis. The actuation component includes a first end effector and a second end effector. The first end effector and the second end effector are rotatable relative to each other about the wrist joint axis.

[0026] The beneficial effects of the independent modular multi-stage error suppression transmission system provided by this invention are as follows: First, by setting independent pulley groups within the arm body and distributing each transmission level in mutually isolated transmission areas, the cumulative superposition of multi-stage synchronous belt tension on the same shaft system is avoided, effectively reducing the concentrated effect of radial load on the wheel axle and weakening the formation of transmission errors from the source. Furthermore, each transmission area is supported by independent support units, and these support units are staggered in the vertical projection, dispersing and isolating the radial load and vibration between each pulley module. When a pulley module experiences disturbance due to uneven tension, unbalanced operation, or external excitation, the disturbance is confined to its own area and will not be transmitted to other pulley modules through the shared support structure, thus avoiding mutual interference of vibration and error. Simultaneously, the staggered arrangement of the support units makes the load-bearing points more evenly distributed in space, effectively dispersing the radial force on the mounting housing and preventing stress concentration from causing housing deformation and displacement.

[0027] The beneficial effects of the robotic arm provided by this invention are as follows: by applying an independent modular multi-level error suppression transmission system, not only is the load distributed and isolated at the structural mechanics level, but the transmission links of errors and vibrations are also weakened at the dynamic level. This significantly suppresses the accumulation and amplification of multi-level transmission errors, improves the overall stability of the transmission system and the positioning accuracy of the actuators in the robotic arm, thereby ensuring high-precision wafer transfer. Attached Figure Description

[0028] Figure 1 This is an exploded view of the independent modular multi-level error suppression transmission system structure according to an embodiment of the present invention;

[0029] Figure 2 This is an exploded view of the input pulley assembly or output pulley assembly according to an embodiment of the present invention;

[0030] Figure 3 This is a schematic diagram illustrating the cooperation between the pulley module and the support unit in an embodiment of the present invention;

[0031] Figure 4 This is a schematic diagram of the support unit structure according to an embodiment of the present invention;

[0032] Figure 5 This is a cross-sectional view of the support unit in an embodiment of the present invention;

[0033] Figure 6 This is a schematic diagram of the housing structure installed according to an embodiment of the present invention;

[0034] Figure 7 This is a top view of the pulley assembly structure according to an embodiment of the present invention;

[0035] Figure 8 This is a schematic diagram of the transmission cooperation between the input pulley group and the output pulley group in an embodiment of the present invention;

[0036] Figure 9 This is a schematic diagram of the power transmission of the pulley assembly in an embodiment of the present invention;

[0037] Figure 10 This is a schematic diagram of the power transmission of the output pulley assembly according to an embodiment of the present invention;

[0038] Figure 11 This is a schematic diagram of the robotic arm structure according to an embodiment of the present invention.

[0039] Reference numerals: 1. Arm body; 11. Mounting housing; 111. Positioning groove; 112. Mounting groove; 112a. Situation 1; 112b. Situation 2; 12. First arm segment; 13. Second arm segment; 14. Third arm segment; 15. Cover plate; 2. Input pulley assembly; 21. First pulley module; 22. Second pulley module; 23. Third pulley module; 24. Drive belt; 3. Output pulley assembly; 31. Fourth pulley module; 32. Fifth pulley module; 33. Sixth pulley module; 4. Support assembly; 41, Support unit; 411, Positioning support; 412, Ring-shaped body; 413, Support body; 4131, Support surface; 414, Annular protrusion; 4141, Inner circumferential surface; 415, Limiting groove; 416, Transition reinforcing rib; 42, Roller bearing; 5, First arm; 51, Shoulder joint axis; 6, Second arm; 61, Elbow joint axis; 7, Actuating assembly; 71, Wrist joint axis; 8, First transmission level; 9, Second transmission level; 10, Third transmission level. Detailed Implementation

[0040] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed after the word and its equivalents, but does not exclude other elements or objects.

[0041] The following is in conjunction with the appendix Figure 1 - Appendix Figure 11 The specific embodiments of the present invention will be further described in detail below.

[0042] First aspect:

[0043] Reference Figure 1 and Figure 2In some embodiments of the present invention, the independent modular multi-stage error suppression transmission system includes an arm body 1, a pulley group and a support assembly 4.

[0044] In some embodiments of the present invention, the arm body 1 includes at least two detachably connected arm segments, each arm segment having a chamber and a wall surrounding the chamber. In some specific embodiments, the arm segment includes a mounting housing 11, the inner peripheral sidewall of which has a plurality of transmission areas distributed vertically. At least two pulley sets are included in the embodiments, including at least an input pulley set 2 and an output pulley set 3, and the at least two pulley sets are respectively disposed in different arm segments. In other embodiments, an intermediate pulley set is also included, which is not limited here. Furthermore, specifically, the at least two arm segments include a detachably connected first arm segment 12, a second arm segment 13, and a third arm segment 14, the input pulley set 2 being disposed in the first arm segment 12, the output pulley set 3 being disposed in the third arm segment 14, and the transmission belt 24 passing through the first arm segment 12, the second arm segment 13, and the third arm segment 14. The detachable connection is achieved by riveting or threaded connection, etc. The design of the boom 1 described above enables modular disassembly and maintenance. When a section of the boom or a corresponding transmission component is damaged, only the corresponding module needs to be replaced, avoiding the high cost and long downtime of replacing the entire machine.

[0045] In some embodiments of the present invention, the pulley assembly has multiple vertically distributed transmission levels, each located within a different transmission region. Each pulley assembly includes multiple pulley modules, with adjacent pulley modules connected by a transmission belt 24, and the multiple pulley modules located at different transmission levels. Specifically, the input pulley assembly 2 includes a first pulley module 21, a second pulley module 22, and a third pulley module 23, and the output pulley assembly 3 includes a fourth pulley module 31, a fifth pulley module 32, and a sixth pulley module 33. The first pulley module 21 and the fourth pulley module 31 are connected by a transmission belt 24 to form a first transmission level; the second pulley module 22 and the fifth pulley module 32 are connected by a transmission belt 24 to form a second transmission level; and the third pulley module 23 and the sixth pulley module 33 are connected by a transmission belt 24 to form a third transmission level. This multi-level, distributed transmission structure avoids the offset problem caused by excessive tension in a single transmission path.

[0046] In some embodiments of the present invention, to reduce the cumulative effect of multi-stage transmission tension, the pulley modules are located in different levels of different transmission regions. Power is transmitted between adjacent pulley modules via independent transmission belts 24, and each transmission region is isolated by a support assembly 4. The support assembly 4 includes an independent support unit 41 corresponding to each transmission region. Each support unit 41 includes a positioning support part 411, which is detachably connected to the inner peripheral sidewall of the mounting housing 11. In some specific embodiments of the present invention, the positioning support parts 411 of different transmission regions are staggered in their vertical projection. The support assembly 4 is used to isolate and disperse the radial load transmission of different pulley modules. When one pulley module experiences disturbance due to uneven tension, unbalanced operation, or external excitation, and the disturbance is confined to this transmission region, it will not be transmitted to other pulley modules through the shared support structure, thereby avoiding mutual interference of vibration and error. Simultaneously, the staggered arrangement of the support units 41 makes the load-bearing points more evenly distributed in space, effectively dispersing the radial force on the mounting housing 11 and preventing stress concentration from causing housing deformation and displacement.

[0047] In some embodiments of the present invention, the inner peripheral sidewall of the mounting housing 11 is provided with multiple positioning mounting slots located in different transmission areas along the radial direction, and the positioning support part 411 is embedded in the positioning mounting slots, thereby achieving stable support for the pulley module. By using multiple independent slots to achieve fixed-point positioning of different pulley modules, the structural stability after installation can be significantly improved, and the risk of displacement of the pulley module due to load fluctuations during operation can be reduced.

[0048] In some specific embodiments of the present invention, to facilitate the installation of the support unit 41, the mounting housing 11 includes a bottom wall and a cover plate 15. The positioning mounting groove extends from the bottom of the groove towards the end face of the mounting housing 11 opposite to the bottom wall and penetrates the end face of the mounting housing 11 opposite to the bottom wall. The positioning mounting groove includes a positioning groove portion 111 and a mounting groove portion 112 that are interconnected. The positioning groove portion 111 extends vertically from the bottom wall of the mounting groove portion 112. The positioning support portion 411 is embedded in the positioning groove portion 111. The positioning groove portion 111 penetrates the end face of the mounting housing 11 opposite to the bottom wall. The positioning groove portion 111 is located only in one of the transmission areas, and the mounting groove portion 112 is located in at least one of the transmission areas. In some embodiments of the present invention, a fixing hole is provided on the bottom wall of the positioning groove portion 111 for fixing the positioning support portion 411 and the mounting housing 11. The above structural design allows the support unit 41 to be directly inserted into and quickly assembled from the end face of the mounting housing 11. Simultaneously, the positioning groove 111 is confined to a single transmission area, thus isolating different transmission areas. The mounting groove 112, however, can span at least one transmission area to provide greater installation and fixing space. This not only simplifies the assembly and disassembly process of the support unit 41 but also ensures stable positioning of the support unit 41 in different transmission areas.

[0049] In some specific embodiments of the present invention, the positioning support part 411 is in the shape of an isosceles triangle, and the apex is rounded to reduce the insertion force and avoid local stress concentration, thereby improving the smoothness of installation; at the same time, the positioning groove part 111 and the positioning support part 411 are adapted to each other to ensure the stable fitting of the support part after installation.

[0050] Referring to the figures, in some specific embodiments of the present invention, the vertical projection of the positioning mounting groove includes two scenarios. In scenario one, the vertical projection area of ​​the positioning groove 111 is smaller than that of the mounting groove 112, and the projection of the mounting groove 112 is rectangular with a larger projection area than the positioning groove 111, thus enabling quick insertion and installation during the installation of the positioning support 411. In scenario two, in other embodiments of the present invention, the vertical projection area of ​​the positioning groove 111 is equal to that of the mounting groove 112, both being approximately isosceles triangles, allowing the support to fit tightly within the groove, further improving positioning accuracy and installation stability. In some specific embodiments of the present invention, the vertical projection area of ​​the positioning groove 111 includes both cases where it is smaller than that of the mounting groove 112 and cases where it is equal to that of the mounting groove 112, thus balancing installation convenience and positioning accuracy in different application scenarios and improving the flexibility of structural design.

[0051] In some embodiments of the present invention, at least two of the multiple positioning mounting slots in the same transmission region are arranged radially opposite each other, and the multiple positioning slots 111 of the transmission region at different heights are staggered along their vertical projections. The radially opposite arrangement of the positioning mounting slots effectively disperses load concentration in a single direction, reducing wheel set misalignment caused by tension in the pulley module. This solution improves the stability and accuracy of the end effector during positioning, reduces transmission errors caused by positioning deviations, and ultimately ensures the high precision requirements of semiconductor devices during handling and processing.

[0052] In some embodiments of the present invention, the support unit 41 includes an annular body 412, positioning support portions 411 are evenly distributed along the outer circumferential surface of the annular body 412 and fixedly connected to the annular body 412, and a support body 413 extends radially inward along the annular body 412 to form a support body 413. The support body 413 has a support surface 4131, and an annular protrusion 414 extends vertically from the inner edge of the support body 413 to form an annular protrusion 414. The annular protrusion 414 has an inner circumferential surface 4141, and the support surface 4131 and the inner circumferential surface 4141 surround to form a limiting groove 415. The support assembly 4 also includes a roller bearing 42, which is located between the annular body 412 and the pulley module, and a portion of the roller bearing 42 abuts in the limiting groove 415. The roller bearing 42 includes an inner ring and an outer ring that can rotate relative to each other, wherein the inner ring is fastened to the pulley module, and the outer ring is fastened to the support unit 41.

[0053] In some specific embodiments of the present invention, a transition reinforcing rib 416 is formed extending inward from the inner peripheral edge of the annular body 412, and the transition reinforcing rib 416 is located between the annular body 412 and the annular protrusion 414. By providing the transition reinforcing rib 416, a transition support structure can be formed between the annular body 412 and the annular protrusion 414, effectively enhancing the overall rigidity and deformation resistance of the support unit 41, avoiding fracture or fatigue damage caused by localized stress concentration, thereby further improving the service life of the entire transmission system.

[0054] In some embodiments of the present invention, the third pulley module 23 and the sixth pulley module 33 are pivotally connected to the bottom wall of the mounting housing 11, and the first pulley module 21, the second pulley module 22, the fourth pulley module 31, and the fifth pulley module 32 are connected to the inner peripheral sidewall of the mounting housing 11. In some specific embodiments of the present invention, the support unit 41 of the third transmission region is integrally formed with the mounting housing 11, specifically, the support unit 41 is formed by the bottom wall of the mounting housing 11 protruding upward to support the third pulley module 23 and the sixth pulley module 33.

[0055] In some specific embodiments of the present invention, the first pulley module 21 is drivenly connected to shaft T1; the second pulley module 22 is drivenly connected to shaft T2; and the third pulley module 23 is drivenly connected to shaft T3; wherein shafts T1, T2, and T3 are coaxially arranged and together constitute a power input shaft. The fourth pulley module 31 is drivenly connected to shaft T4; the fifth pulley module 32 is drivenly connected to shaft T5; and the sixth pulley module 33 is drivenly connected to shaft T6; wherein shafts T4, T5, and T6 are coaxially arranged and together constitute a power output shaft.

[0056] The working principle of the independent modular multi-stage error suppression transmission system provided by this invention is as follows: By designing the boom body as a split structure, each boom segment can be installed and replaced independently, solving the problems of difficult maintenance and high modification costs of traditional integral booms. Each boom segment is equipped with a pulley group, and graded transmission is achieved through multiple vertically distributed transmission areas. The pulley modules are connected by transmission belts 24 to form a step-by-step transmission link. To avoid the accumulation of tension and off-center loads generated by multiple pulleys in the same plane, the mounting housing 11 is arranged with multiple independent transmission areas at different heights. Each transmission area is supported by an independent support unit 41, and these support units 41 are staggered in the vertical projection. During operation, when a certain pulley module is subjected to synchronous belt tension or external disturbance, its radial load is independently absorbed and dispersed by the corresponding support unit 41, preventing the load and vibration from being transmitted to other pulley levels through shared components. At the same time, the staggered arrangement of the support units 41 forms a balanced load-bearing layout in space, which not only disperses the radial load and prevents stress concentration and housing deformation, but also achieves error and vibration isolation between different pulley modules. This ensures that the mounting housing 11 remains stable under stress, thereby guaranteeing the transmission accuracy of each transmission level. Consequently, the transmission errors of multiple stages no longer accumulate and amplify, thus significantly improving the positioning accuracy and transmission stability of the end effector.

[0057] Second aspect

[0058] This invention provides a robotic arm, including the aforementioned independent modular multi-level error suppression transmission system, comprising a first arm 5, a second arm 6 pivotally connected to the end of the first arm 5, and an execution component 7 pivotally connected to the end of the second arm 6. The independent modular multi-level error suppression transmission system is located in the first arm 5 and the second arm 6.

[0059] In some specific embodiments of the present invention, the robotic arm has a shoulder joint axis 51, an elbow joint axis 61 and a wrist joint axis 71. One end of the first arm 5 is rotatable about the shoulder joint axis 51, and one end of the second arm 6 is rotatable about the elbow joint axis 61. The actuation component 7 includes a first end effector and a second end effector. The first end effector and the second end effector are rotatable relative to each other about the wrist joint axis 71.

[0060] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the present invention. Furthermore, the present invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. A modular, multi-stage error mitigation drive system, comprising: The application relates to an arm body (1) with a cavity and a wall surrounding the cavity, a plurality of transmission areas being distributed along the height direction of the cavity; a pulley set arranged in the cavity, the pulley set having a plurality of vertical transmission levels, each transmission level being located in a different transmission area, and each pulley set comprising a plurality of pulley modules; and a support assembly (4) comprising independent support units (41) corresponding to the transmission areas, the support units (41) comprising positioning support portions (411) which are detachably connected to the wall surrounding the cavity. The pulley modules are rotatably arranged in the support units (41), the positioning support portions (411) in different transmission areas are staggered in vertical projection, and the support assembly (4) is configured to isolate and disperse the radial load transmission of different pulley modules. The arm body (1) comprises at least two arm segments which are detachably connected, the arm segments comprising mounting housings (11), the inner circumferential side walls of the mounting housings (11) being provided with a plurality of positioning installation grooves in different transmission areas along the radial direction, and the positioning support portions (411) being located in the positioning installation grooves. The mounting housings (11) comprise bottom walls, the positioning installation grooves extend from groove bottoms to the end faces of the mounting housings (11) away from the bottom walls, and penetrate through the end faces of the mounting housings (11) away from the bottom walls. The positioning installation grooves comprise positioning groove portions (111) and installation groove portions (112) which are in communication with each other, the positioning groove portions (111) vertically extend from the bottom walls of the installation groove portions (112), the positioning support portions (411) are embedded in the positioning groove portions (111), the positioning groove portions (111) penetrate through the end faces of the mounting housings (11) away from the bottom walls, the positioning groove portions (111) are located in only one transmission area, and the installation groove portions (112) are located in at least one transmission area.

2. The modular, multi-stage error mitigation drive system of claim 1, wherein, The vertical projection area of the positioning groove portions (111) is less than or equal to that of the installation groove portions (112).

3. The modular, multi-stage error mitigation drive system of claim 2, wherein, At least two positioning installation grooves in the same transmission area are arranged in radial opposition, and the vertical projection of the positioning groove portions (111) in different height transmission areas is staggered.

4. The modular, multi-stage error mitigation drive system of claim 3, wherein, ​ 5. The modular, multi-stage error mitigation drive system of claim 4, wherein, ​ 6. The modular, multi-stage error mitigation drive system of claim 4, wherein, ​ 7. The modular, multi-stage error mitigation drive system of claim 1, wherein, The support unit (41) comprises a ring body (412), the positioning support portions (411) are uniformly distributed along the outer circumferential surface of the ring body (412) and are fixedly connected with the ring body (412), a support body (413) is formed by extending radially inward along the ring body (412), the support body (413) has a support surface (4131), a ring-shaped protrusion (414) is formed by protruding vertically from the inner edge of the support body (413), the ring-shaped protrusion (414) has an inner circumferential surface (4141), the support surface (4131) and the inner circumferential surface (4141) form a limiting groove (415), and the support assembly (4) further comprises a roller bearing (42), the roller bearing (42) is located between the ring body (412) and the belt wheel module, and part of the roller bearing (42) abuts in the limiting groove (415).

8. The modular, multi-stage error mitigation drive system of claim 7, wherein, A transition reinforcing rib (416) is formed by protruding inward from the inner circumferential edge of the ring body (412), and the transition reinforcing rib (416) is located between the ring body (412) and the ring-shaped protrusion (414).

9. The modular, multi-stage error mitigation drive system of claim 2, wherein, The belt wheel group comprises an input belt wheel group (2) and an output belt wheel group (3), the input belt wheel group (2) comprises a first belt wheel module (21), a second belt wheel module (22) and a third belt wheel module (23), the output belt wheel group (3) comprises a fourth belt wheel module (31), a fifth belt wheel module (32) and a sixth belt wheel module (33), the first belt wheel module (21) is in transmission connection with the fourth belt wheel module (31), the second belt wheel module (22) is in transmission connection with the fifth belt wheel module (32), and the third belt wheel module (23) is in transmission connection with the sixth belt wheel module (33).

10. The modular, multi-stage error mitigation drive system of claim 9, wherein, The third belt wheel module (23) and the sixth belt wheel module (33) are respectively in pivotal connection with the bottom wall of the mounting shell (11), and the first belt wheel module (21), the second belt wheel module (22), the fourth belt wheel module (31) and the fifth belt wheel module (32) are connected with the inner circumferential side wall of the mounting shell (11).

11. The modular, multi-stage error mitigation drive system of claim 9, wherein, The at least two arm sections comprise a first arm section (12), a second arm section (13) and a third arm section (14) which are detachably connected, the input belt wheel group (2) is arranged in the first arm section (12), and the output belt wheel group (3) is arranged in the third arm section (14).

12. A robot comprising a modular multi-stage error mitigation transmission system according to any one of claims 1-11, characterized in that, The independent modular multi-stage error suppression transmission system comprises a first arm (5), a second arm (6) which is pivotally connected to the end of the first arm (5), and an execution assembly (7) which is pivotally connected to the end of the second arm (6), and is located in the first arm (5) and the second arm (6).

13. The robot of claim 12, wherein, having a shoulder joint axis (51), an elbow joint axis (61) and a wrist joint axis (71), one end of the first arm (5) being rotatable about the shoulder joint axis (51), one end of the second arm (6) being rotatable about the elbow joint axis (61), the effector assembly (7) comprising a first end effector and a second end effector; the first end effector and the second end effector being relatively rotatable about the wrist joint axis (71).

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