Liquid precursor feeding system and method

Abstract

The invention particularly relates to a feeding system and method for a liquid precursor. The feeding system comprises a nitrogen protection assembly located above a raw material barrel and a feeding pipe assembly extending to the bottom of the raw material barrel. The nitrogen protection assembly comprises a metal cover with an isosceles trapezoid section, a carrier gas coil pipe is welded to the inner side of the metal cover, and gas holes are evenly distributed in the carrier gas coil pipe; the bottom of the metal cover is provided with a circular sucker. The side of the circular sucker is connected with a deflation valve. The feeding pipe assembly comprises a feeding pipe, a threaded shaft seal is installed on the upper portion of the feeding pipe, a three-way valve is installed on the side face of the feeding pipe, and a valve clack is installed at the bottom of the feeding pipe. According to the feeding method, before the barrel body is uncovered, nitrogen purging protection is conducted, it is guaranteed that the barrel cover opening operation is in an inert gas protection environment, and air is prevented from entering the barrel; air in an inner cavity of the feeding pipe is replaced through purging of the nitrogen pipe before material transferring, raw materials in the barrel are pressed into target equipment through pressure provided by the nitrogen pipe during feeding, and safety of feeding operation and product quality are guaranteed.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor technology, in particular to a liquid precursor feeding system and method. BACKGROUND

[0002] Semiconductor precursor is an important core material in semiconductor manufacturing process, which refers to a kind of substance carrying target elements, in gaseous or volatile liquid state, with chemical stability, and with corresponding reaction activity or physical properties. It is mainly used in thin film deposition processes such as chemical vapor deposition (CVD) and atomic layer deposition (ALD) to form various thin film layers meeting the requirements of semiconductor manufacturing, and can also be used in epitaxial growth, lithography, etching, ion implantation and other processes. Liquid precursor is a very important part of precursor. In the preparation process of the current liquid precursor, the purchased raw materials are transferred to the target equipment for processing to become high-purity target products meeting the requirements. Most of the liquid precursors are flammable and explosive, and are sensitive to air and moisture (such as TEOS, 4MS, 3DMAS, TMA, TEAl, etc.). Once in contact with moisture in the air, it may affect the product quality, or even cause a fire and explosion accident.

[0003] A hazardous liquid feeding system and method are disclosed in Chinese patent CN113171732B, which realizes the closed feeding of hazardous liquid by combining raw material barrel group, conveying pump, high-level tank and conveying valve group. This method can ensure the purging and replacement of air in the conveying pipeline before feeding and the fully closed conveying of materials during the feeding process. However, there is a possibility of contact between materials and air during the uncapping process of the raw material barrel and the insertion of the feeding pipe into the barrel bottom, which has certain design defects.

[0004] A chemical liquid feeding device is disclosed in Chinese utility model CN205965780U, which includes a material extraction pipe, a gland assembly, a nitrogen purging pipeline, a nitrogen protection pipeline and a material outlet assembly. The material extraction pipe is connected to the gland assembly and extends into a solvent barrel. The upper end of the material extraction pipe is connected to a ball valve. One end of the nitrogen purging pipeline is connected to the material extraction pipe above the gland assembly, and the other end is connected to the nitrogen protection pipeline through a T-shaped three-way joint on the nitrogen pipeline. One end of the nitrogen protection pipeline is connected to the material outlet assembly. The material extraction pipe is connected to the material outlet assembly through the ball valve. The material outlet assembly is connected to the feed pipeline of the reaction kettle. However, this design does not have a special uncapping protection device, and only relies on the gland assembly to seal the barrel opening (composed of a sealing ring and a spacer). During the uncapping process, the barrel cover is exposed to the air, which may cause air to enter the barrel. The gland assembly is only used to fix the material extraction pipe and does not cover the barrel cover area, so it cannot realize environmental isolation before uncapping.

[0005] Therefore, how to ensure the safety of the feeding process and the quality of the product during the preparation of the liquid precursor is a problem to be solved. SUMMARY

[0006] In order to improve the defects in the prior art, the application provides a feeding system and method for liquid precursor, which uses the purging replacement of the nitrogen protection cover before opening to make the barrel cover in an inert gas environment during the opening process, so as to prevent air from entering the barrel during the opening process; the air in the feeding pipe is discharged by the purging preparation work before the barrel is inserted into the feeding pipe; at the same time, after the feeding pipe is sealed with the barrel, the nitrogen supply pressure in the threaded shaft seal is used to realize the sealed conveying during the feeding process. The whole feeding operation is closely coordinated, which completely eliminates the possibility of air contacting the material, thereby ensuring the safety of the operation and the quality of the product.

[0007] The technical scheme of the application is as follows:

[0008] In one aspect, the application provides a feeding system for liquid precursor, comprising: a nitrogen protection assembly located at the upper part of a raw material barrel and a feeding pipe assembly extending to the bottom of the raw material barrel.

[0009] The nitrogen protection assembly comprises a metal cover with an isosceles trapezoidal cross section, a carrier gas coil is welded on the inner side of the metal cover, and the carrier gas coil has uniformly distributed air holes.

[0010] A circular suction cup is installed at the bottom of the metal cover, and a gas release valve is connected to the side of the circular suction cup.

[0011] The feeding pipe assembly comprises a feeding pipe, a threaded shaft seal is installed at the upper part of the feeding pipe, a three-way valve is installed on the side of the feeding pipe, the three-way valve is connected to a nitrogen main pipe, a purging nitrogen pipe and a pressure building nitrogen pipe respectively, and a valve flap is installed at the bottom of the feeding pipe.

[0012] Preferably, the metal cover is made of any one of carbon steel, stainless steel, aluminum and aluminum alloy.

[0013] Preferably, the metal cover is made of aluminum alloy.

[0014] Preferably, the diameter of the upper hole of the metal cover is 2-4 times the diameter of the barrel cover of the raw material barrel, and the diameter of the lower hole is 2 / 3-3 / 4 of the diameter of the barrel body of the raw material barrel.

[0015] Preferably, the carrier gas coil is a metal coil welded on the inner side of the metal cover, the gas inlet end of the carrier gas coil is connected to a nitrogen source, and the other end is a blind plug; the diameter of the carrier gas coil is 6-15 mm, and the circular holes with a diameter of Φ0.5*0.5 mm are uniformly distributed on the pipe.

[0016] Preferably, the material of the circular suction cup is preferably silica gel material.

[0017] Preferably, the upper loading pipe upper part is provided with a threaded shaft seal at a proper position, which means that when the upper loading pipe is inserted into the actual barrel bottom, the upper loading pipe is matched with the raw material barrel mouth through the threaded shaft seal, and is tightly sealed after being screwed.

[0018] Preferably, the upper loading pipe side is provided with a three-way valve, which corresponds to a, b and c three interfaces, and the three-way valve has three states, which are a-b only, a-c only and a-b-c all not through in turn; the purging nitrogen pipe extends to the bottom of the upper loading pipe, and is 1-2 cm away from the bottom; the pressure building nitrogen pipe extends from the gap between the threaded shaft seal and the upper loading pipe, and the gas outlet is 1-2 cm away from the lower end surface of the threaded shaft seal.

[0019] Preferably, the upper loading pipe bottom is provided with a valve flap, which is a metal sprayed soft plastic, and when the upper loading pipe is in a vertical position, the valve flap is tightly attached to the inner wall of the upper loading pipe under the action of gravity.

[0020] In another aspect, the application provides a liquid precursor loading method, which comprises the following steps:

[0021] Step S1. Clean the foreign matter on the surface of the upper cover of the raw material barrel to be loaded, place a nitrogen protection cover above the raw material barrel, the center of the nitrogen protection cover coincides with the center of the barrel cover, close the air release valve, and empty the gas in the bottom suction disc, so that the nitrogen protection cover is attracted to the barrel body under the action of the bottom suction disc;

[0022] Step S2. Connect the gas inlet end of the carrier gas coil with the nitrogen source, open the nitrogen into the carrier gas coil, and the nitrogen escapes from each gas hole of the carrier gas coil, so that the air in the nitrogen protection cover is replaced, and the carrier gas coil inlet pressure is controlled to be 0.01-0.05 MPa, and continuous purging is provided before the assembly of the upper loading pipe assembly and the raw material barrel is completed;

[0023] Step S3. Connect the upper loading pipe assembly three-way valve gas inlet main pipe with the nitrogen source, open the a-b end of the three-way valve, continuously blow nitrogen, control the inlet pressure to be 0.01-0.05 MPa, and the valve flap is tightly attached to the inner wall of the upper loading pipe under the action of gravity and gas pressure, so that the air in the upper loading pipe cavity is replaced;

[0024] Step S4. Open the raw material barrel cover, slowly insert the upper loading pipe assembly into the barrel bottom and tightly connect with the barrel thread, after the purging nitrogen pipe purges for 3-5 min, close the a-b end of the three-way valve, stop purging nitrogen, and connect the upper loading pipe upper part discharge connection port with the target equipment loading hose;

[0025] Step S5. Open the a-c end of the three-way valve, blow nitrogen into the raw material barrel, the valve flap at the bottom of the upper loading pipe is opened upward under the action of pressure, the material in the barrel enters the upper loading pipe and is transferred upward into the target equipment.

[0026] The beneficial effects of the application are as follows:

[0027] 1. The nitrogen protective cover proposed in this application can be firmly fixed to the upper surface of the barrel using a bottom suction cup, avoiding displacement during operation and ensuring the stability of the feeding operation;

[0028] 2. The nitrogen protective cover proposed in this application utilizes the uniform purging of the side-mounted air coil to prevent air from entering the barrel during the opening process and causing adverse effects.

[0029] 3. The air supply system for the feeding pipe assembly proposed in this application utilizes the self-closing function of the valve at the bottom of the feeding pipe in conjunction with the purging function of the inner air pipe to achieve the removal of air inside the feeding pipe during the process of the feeding pipe entering the barrel.

[0030] 4. The air supply system for the feeding pipe assembly provided in this application provides the power air source required for feeding without increasing the barrel opening by using a threaded shaft seal with an internal air pipe. Attached Figure Description

[0031] Fig. 1 This is an overall diagram of the liquid precursor feeding system of this application;

[0032] Fig. 2 This is a partial enlarged view of the nitrogen protective cover of this application;

[0033] Fig. 3 This is a partial enlarged view of the feeding pipe assembly of this application.

[0034] Explanation of reference numerals in the attached diagram:

[0035] 1. Nitrogen protective cover; 2. Feeding pipe assembly; 3. Raw material barrel; 1-1. Metal cover; 1-2. Carrier gas coil; 1-3. Circular suction cup; 1-4. Main nitrogen pipe; 1-5. Venting valve; 2-1. Feeding pipe; 2-2. Threaded shaft seal; 2-3. Valve disc; 2-4. Three-way valve; 2-5. Purge nitrogen pipe; 2-6. Pressurized nitrogen pipe; 2-7. Discharge connection port. Detailed Implementation

[0036] To further illustrate the technical means and effects adopted by this application in order to achieve the intended purpose of the invention, the following detailed description of the specific implementation methods, structures, features and effects of this application is provided in conjunction with the accompanying drawings and preferred embodiments.

[0037] Device Example 1

[0038] This embodiment provides a liquid precursor feeding system, as shown in the attached figure. Figs. 1-3 As shown, it includes: a nitrogen protection assembly 1 located above the raw material tank 3 and a feeding pipe assembly 2 extending to the bottom of the raw material tank 3;

[0039] The nitrogen protection assembly 1 comprises a metal cover 1-1 with an isosceles trapezoidal cross section, a carrier gas coil 1-2 welded on the inner side of the metal cover 1-1, and uniformly distributed air holes on the carrier gas coil 1-2.

[0040] A circular suction disc 1-3 is mounted at the bottom of the metal cover 1-1, and a gas release valve 1-5 is connected to the side of the circular suction disc 1-3.

[0041] The feeding pipe assembly 2 comprises a feeding pipe 2-1, a threaded shaft seal 2-2 mounted on the upper part of the feeding pipe 2-1, a three-way valve 2-4 mounted on the side of the feeding pipe 2-1, a blowing nitrogen pipe 2-5 and a pressure building nitrogen pipe 2-6 connected to the three-way valve 2-4, and a valve flap 2-3 mounted at the bottom of the feeding pipe 2-1.

[0042] The metal cover 1-1 is made of any one of carbon steel, stainless steel, aluminum and aluminum alloy.

[0043] The metal cover 1-1 is made of aluminum alloy.

[0044] The upper hole of the metal cover 1-1 has a diameter of 2-4 times the diameter of the barrel cover of the raw material barrel 3, and the lower hole has a diameter of 2 / 3-3 / 4 of the barrel body of the raw material barrel 3.

[0045] The carrier gas coil 1-2 is a metal coil welded on the inner side of the metal cover 1-1, with one end connected to a nitrogen source and the other end being a blind plug; the carrier gas coil 1-2 has a diameter of 6-15 mm, and the pipe is uniformly distributed with round holes with a diameter of Φ0.5×0.5 mm.

[0046] The lower hole of the metal cover 1-1 is provided with a circular suction disc 1-3, and the material of the circular suction disc 1-3 is preferably silica gel; a gas release valve 1-5 is connected to the side of the circular suction disc 1-3.

[0047] A threaded shaft seal 2-2 is mounted at an appropriate position on the upper part of the feeding pipe 2-1, and the appropriate position refers to the threaded shaft seal 2-2 of the feeding pipe 2-1 being matched with the threads of the barrel opening of the raw material barrel 3 when the feeding pipe 2-1 is inserted into the actual barrel bottom, and being tightly sealed after being screwed.

[0048] A three-way valve 2-4 is mounted on the side of the feeding pipe 2-1, and the three-way valve 2-4 has three interfaces a, b and c; the three-way valve 2-4 has three states: a-b only, a-c only, and none of a-b-c; the blowing nitrogen pipe 2-5 extends to the bottom of the feeding pipe 2-1 by 1-2 cm; the pressure building nitrogen pipe 2-6 extends from the gap between the threaded shaft seal 2-2 and the feeding pipe 2-1, and the gas outlet is 1-2 cm away from the lower end surface of the threaded shaft seal 2-2.

[0049] A valve flap 2-3 is mounted at the bottom of the feeding pipe 2-1, and the valve flap 2-3 is made of metal sprayed soft plastic; when the feeding pipe 2-1 is in a vertical position, the valve flap 2-3 is tightly attached to the inner wall of the feeding pipe 2-1 under the action of gravity.

[0050] Principle of device implementation:

[0051] Clean the foreign matter on the surface of the upper cover of the raw material barrel 3 to be fed, place the nitrogen protection assembly 1 above the raw material barrel 3, the center of the nitrogen protection assembly 1 coincides with the center of the barrel cover, close the gas exhaust valve 1-5, empty the gas in the bottom suction cup, and make the nitrogen protection assembly 1 suck the barrel body of the raw material barrel 3 under the action of the bottom suction cup;

[0052] Connect the gas inlet end of the carrier gas coil 1-2 with the nitrogen source, open the nitrogen into the carrier gas coil 1-2, and the nitrogen escapes from each gas hole of the carrier gas coil 1-2, replace the air in the nitrogen protection assembly 1, control the gas inlet pressure of the carrier gas coil 1-2 to be 0.01-0.05 MPa, and provide continuous purging before the assembly of the feeding pipe assembly 2 and the raw material barrel 3 is completed.

[0053] Connect the three-way valve 2-4 gas inlet main pipe of the feeding pipe assembly 2 with the nitrogen source, open the a-b end of the three-way valve 2-4, continuously purge nitrogen, control the gas inlet pressure to be 0.01-0.05 MPa, and the valve 2-3 is tightly combined with the inner wall of the feeding pipe 2-1 under the action of gravity and gas pressure, and the air in the inner cavity of the feeding pipe 2-1 is replaced.

[0054] Open the barrel cover of the raw material barrel 3, slowly insert the feeding pipe 2-1 assembly 2 into the barrel bottom and tightly connect with the barrel thread, purge the nitrogen gas pipe 2-5 for 3-5 min, close the a-b end of the three-way valve 2-4, stop purging nitrogen, and connect the upper feeding end of the feeding pipe 2-1 with the target equipment feeding hose.

[0055] Step S5. Open the a-c end of the three-way valve 2-4, purge nitrogen into the raw material barrel 3, the bottom valve 2-3 of the feeding pipe 2-1 opens upward under the action of pressure, the material in the barrel enters the feeding pipe 2-1 and turns upward into the target equipment.

[0056] Example 2

[0057] Based on the precursor feeding system provided in example 1, a precursor feeding method is provided, the specific operation is as follows:

[0058] Step S1. Clean the foreign matter on the surface of the upper cover of the raw material barrel 3 to be fed, place the nitrogen protection assembly 1 above the raw material barrel 3, the center of the nitrogen protection assembly 1 coincides with the center of the barrel cover, close the gas exhaust valve 1-5, slightly press the nitrogen protection assembly 1, empty the gas in the circular suction cup 1-3, make the nitrogen protection assembly 1 suck the barrel body of the raw material barrel 3 under the action of the bottom suction cup, and avoid the nitrogen protection assembly 1 moving around during the feeding operation.

[0059] Step S2. Connect the gas inlet end of the carrier gas coil 1-2 with the gas source, open the nitrogen gas into the carrier gas coil 1-2, and the nitrogen gas escapes from the gas holes of the carrier gas coil 1-2 to displace the air in the nitrogen gas protection assembly 1, and control the gas inlet pressure of the carrier gas coil 1-2 to be 0.01-0.05 MPa to provide continuous purging before the assembly of the feeding pipe 2-1 assembly 2 and the raw material barrel 3 is completed.

[0060] Step S3. Connect the feeding pipe assembly 2 three-way valve 2-4 gas inlet main pipe with the gas source, open the a-b end of the three-way valve 2-4, and continuously purge the nitrogen gas, control the gas inlet pressure to be 0.01-0.05 MPa, and the valve 2-3 is tightly attached to the inner wall of the feeding pipe 2-1 under the action of gravity and gas pressure, and the air in the inner cavity of the feeding pipe 2-1 is displaced.

[0061] Step S4. Open the barrel cover of the raw material barrel 3, slowly insert the feeding pipe assembly 2 into the barrel bottom from the barrel opening and tightly connect with the barrel threads, and after purging for 3-5 min through the purging nitrogen gas pipe 2-5, close the a-b end of the three-way valve 2-4, stop purging the nitrogen gas, and tightly connect the upper discharge connection port 2-7 of the feeding pipe 2-1 with the target equipment feeding hose.

[0062] Step S5. Open the a-c end of the three-way valve 2-4, purge nitrogen gas into the raw material barrel 3, and the bottom valve 2-3 of the feeding pipe 2-1 opens upward under the action of pressure, and the material in the raw material barrel 3 can enter the feeding pipe 2-1 and turn upward, and the nitrogen gas pressure is controlled to make the feeding speed in a suitable range. The raw material in the barrel is fed into the target equipment until the entire feeding operation is completed.

[0063] The feeding method of the liquid precursor in the embodiment, through the purging protection of the nitrogen gas protection assembly 1 before the barrel is opened, ensures that the opening of the barrel cover is in a nitrogen gas protection environment, avoiding the entry of air into the barrel during the opening process; before the material is transferred, the nitrogen gas pipe in the feeding pipe 2-1 is purged and replaced, the air in the inner cavity of the feeding pipe 2-1 is replaced clean, and when the feeding starts, the pressure provided by the nitrogen gas pipe on the side of the threaded shaft seal 2-2 presses the raw material in the barrel into the target equipment. Thus, the possibility of air entering during the entire opening and feeding process of the raw material barrel 3 is completely avoided, and the safety of the precursor raw material feeding operation and the quality of the product are ensured.

[0064] The above is only a preferred embodiment of the present application, and does not limit the present application in any form. Although the preferred embodiment has been disclosed as above, it is not intended to limit the present application. Any person skilled in the art can make some changes or modifications to the above disclosed technical content without departing from the scope of the technical solution of the present application, and any equivalent embodiments with equivalent changes and modifications are equivalent to the above embodiments, but as long as they do not deviate from the technical solution of the present application, any modification, equivalent change and modification of the above embodiments according to the technical essence of the present application are still within the scope of the technical solution of the present application.

Claims

1. A liquid precursor feeding system, characterized by, The application relates to a nitrogen protection assembly and a feeding pipe assembly for a raw material barrel. The nitrogen protection assembly comprises a metal cover (1-1) with an isosceles trapezoidal cross section, a carrier gas coil (1-2) welded to the inner side of the metal cover (1-1), and a plurality of gas holes uniformly distributed on the carrier gas coil (1-2). A circular suction disc (1-3) is arranged at the bottom of the metal cover (1-1), and a gas release valve (1-5) is connected to the side of the circular suction disc (1-3). The feeding pipe assembly comprises a feeding pipe (2-1), a threaded shaft seal (2-2) arranged at the upper portion of the feeding pipe (2-1), and a valve flap (2-3) arranged at the bottom of the feeding pipe (2-1). The metal cover (1-1) is made of carbon steel, stainless steel, aluminum or aluminum alloy.

2. The liquid precursor feeding system of claim 1, wherein: The metal cover (1-1) is made of aluminum alloy.

3. The liquid precursor feeding system of claim 3, wherein: The upper hole diameter of the metal cover (1-1) is 2-4 times the diameter of the barrel cover, and the lower hole diameter is 2 / 3-3 / 4 the diameter of the barrel body.

4. The liquid precursor feeding system of claim 1, wherein: The carrier gas coil (1-2) is a metal coil welded to the inner side of the metal cover (1-1), the gas inlet end of the carrier gas coil (1-2) is connected to a nitrogen source through a nitrogen main pipe (1-4), and the other end is a blind plug; the diameter of the carrier gas coil (1-2) is 6-15 mm, and the carrier gas coil (1-2) is uniformly provided with a circular hole with a diameter of 0.5*0.5 mm.

5. The liquid precursor feeding system of claim 1, wherein: The feeding pipe (2-1) is provided with a three-way valve (2-4) on the side, the three-way valve (2-4) has three interfaces a, b and c, and the three-way valve (2-4) has three states, namely only a-b is connected, only a-c is connected, and a-b-c is not connected; the purge nitrogen pipe (2-5) extends to the bottom of the feeding pipe (2-1) and is 1-2 cm away from the bottom; the pressure building nitrogen pipe (2-6) extends from the gap between the threaded shaft seal (2-2) and the feeding pipe (2-1), and the gas outlet is 1-2 cm away from the lower end surface of the threaded shaft seal (2-2).

6. The liquid precursor feeding system of claim 1, wherein: The valve flap (2-3) is made of metal sprayed soft plastic, and when the feeding pipe (2-1) is in a vertical position, the valve flap (2-3) is attached to the inner wall of the feeding pipe (2-1) under the action of gravity.

7. The liquid precursor feeding system of claim 1, wherein: The application further discloses a method for feeding a raw material barrel.

8. A method of feeding a liquid precursor, the method being performed by the liquid precursor feeding system according to any one of claims 1 to 7, wherein Step S1: foreign matters on the upper cover of the raw material barrel (3) to be fed are cleaned, the nitrogen protection cover (1) is placed above the raw material barrel (3), the center of the nitrogen protection cover (1) is coincided with the center of the barrel cover, the gas release valve (1-5) is closed, the gas in the bottom suction disc (1-3) is exhausted, and the nitrogen protection cover (1) is adsorbed to the barrel body of the raw material barrel (3) under the action of the bottom suction disc (1-3). ​ Step S2. Connect the gas inlet end (1-4) of the carrier gas coil (1-2) with the nitrogen source, open the nitrogen to enter the carrier gas coil (1-2), the nitrogen escapes from the air holes of the carrier gas coil (1-2), the air in the nitrogen protection cover (1) is replaced, the carrier gas coil (1-2) inlet pressure is controlled to be 0.01-0.05 MPa, and continuous purging is provided before the assembly of the feeding pipe assembly (2) and the raw material barrel (3) is completed; Step S3. Connect the inlet main pipe of the three-way valve (2-4) of the feeding pipe assembly (2) with the nitrogen source, open the a-b end of the three-way valve (2-4), continuously blow nitrogen, control the inlet pressure to be 0.01-0.05 MPa, and the valve (2-3) is combined with the inner wall of the feeding pipe (2-1) under the action of gravity and gas pressure, and the air in the inner cavity of the feeding pipe (2-1) is replaced; Step S4. Open the barrel cover of the raw material barrel (3), insert the feeding pipe assembly (2) into the barrel bottom from the barrel opening and connect it with the barrel thread, blow the nitrogen purge pipe (2-5) for 3-5 min, then close the a-b end of the three-way valve (2-4), stop blowing nitrogen, and connect the upper discharge connection port (2-7) of the feeding pipe (2-1) with the target equipment feeding hose; Step S5. Open the a-c end of the three-way valve (2-4), blow nitrogen into the raw material barrel (3), the valve (2-3) at the bottom of the feeding pipe (2-1) opens upward under the action of pressure, the material in the raw material barrel (3) enters the feeding pipe (2-1) and is transferred upward into the target equipment.

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