Electrochemical ITO integrated flexible electrode and preparation method and application thereof

Abstract

The invention relates to the technical field of electrochemical analysis, and particularly discloses an electrochemical ITO integrated flexible electrode and a preparation method and application thereof. The electrochemical ITO integrated flexible electrode comprises a working electrode slice layer, a composite bonding slice layer and an auxiliary electrode slice layer which are sequentially distributed from bottom to top, the working electrode slice layer comprises a film base material and an ITO conductive layer, the auxiliary electrode slice layer comprises a flexible base material, a conductive pattern layer and an insulating layer, an electrolytic tank cavity area and a contact area are arranged on the flexible base material, and the conductive pattern layer is arranged on the flexible base material. The hollow-out circular area and the hollow-out square area penetrate through the auxiliary electrode slice layer, the hollow-out circular area is located in the electrolytic tank cavity area, the hollow-out square area is located in the contact area, the area, opposite to the hollow-out circular area, of the working electrode slice layer is an ITO working electrode, and the area, opposite to the hollow-out square area, of the working electrode slice layer is a contact of the ITO working electrode. According to the invention, the electrochemical reversibility of the ITO electrode integrated three-electrode system can be improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of electrochemical analysis, and in particular to an electrochemical ITO integrated flexible electrode and a preparation method and application thereof. BACKGROUND

[0002] The electrochemical analysis method is an analysis method established on the basis of the electrochemical properties of substances in solution and on electrodes. The conventional electrochemical analysis adopts a three-electrode system, including a working electrode, a reference electrode and a counter electrode. However, the use of a separate three-electrode system is inconvenient in practice and difficult to carry, so an integrated electrode emerges as the times require. The integrated electrode integrates the working electrode, the reference electrode and the counter electrode together by printing, and the size can be arbitrarily designed according to the use purpose, which greatly facilitates the electrochemical analysis operation in actual work.

[0003] In the three-electrode system, the working electrode generally adopts conductive materials such as glassy carbon, graphite and gold; the reference electrode generally adopts a silver chloride electrode or a mercury-mercury electrode; and the counter electrode generally adopts a platinum electrode or a carbon electrode. The material of the working electrode affects the electrochemical performance. Indium tin oxide (ITO) is a semiconductor material, which has very good electrical conductivity, visible light transmittance and chemical stability. It can be plated on a transparent carrier to form a conductive film. Among them, a layer of ITO conductive film is plated by using a magnetron sputtering method, which has high transmittance. At present, ITO electrodes are widely used in the construction of sensors, especially photoelectrochemical sensors and electrochemical sensors. However, the ITO electrode is mostly based on a glass carrier, and the ITO glass electrode is used as a working electrode in various electrochemical analysis fields, especially as a transparent electrode, which is particularly suitable for photoelectrochemical analysis.

[0004] However, as a working electrode, the ITO glass electrode has the problems of fragile glass, complex operation and the risk of glass scratching people in actual use. In addition, the use of separate reference electrodes and counter electrodes increases the operation steps and makes it more difficult to be portable, which limits the promotion of the ITO glass electrode in application analysis.

[0005] In the related art, CN101482534A integrates the ITO electrode into a three-electrode system to meet the application demand of easy operation, especially for the operation in the scene of field application. However, in CN101482534A, the conductive layer on the cut ITO conductive glass is etched into three electrodes by acid, and the counter electrode and the reference electrode are not conventional electrode materials, which makes the preparation relatively complex and is easy to cause electrode damage or scratching, resulting in poor electrochemical reversibility. Therefore, it is urgent to develop a novel three-electrode system to improve the electrochemical reversibility of the ITO electrode integrated three-electrode system. SUMMARY

[0006] In order to improve the electrochemical reversibility of the ITO electrode integrated three-electrode system, the application provides an electrochemical ITO integrated flexible electrode and a preparation method and application thereof.

[0007] In a first aspect, the application provides an electrochemical ITO integrated flexible electrode, which adopts the following technical scheme:

[0008] The electrochemical ITO integrated flexible electrode comprises, from bottom to top, a working electrode sheet layer, a composite adhesive sheet layer and an auxiliary electrode sheet layer. The working electrode sheet layer comprises a film substrate and an ITO conductive layer arranged on the film substrate. The auxiliary electrode sheet layer comprises, from bottom to top, a flexible substrate, a conductive pattern layer and an insulating layer. The flexible substrate is bonded to the ITO conductive layer through the composite adhesive sheet layer. The flexible substrate is provided with an electrolytic cell cavity area and a tab area, both of which are located outside the coverage range of the insulating layer. The flexible substrate is provided with a hollow circular area and a hollow square area penetrating through the auxiliary electrode sheet layer. The hollow circular area is located in the electrolytic cell cavity area, and the hollow square area is located in the tab area. The area of the working electrode sheet layer opposite to the hollow circular area is an ITO working electrode, and the area of the working electrode sheet layer opposite to the hollow square area is a tab of the ITO working electrode.

[0009] In a specific implementable embodiment, the conductive pattern layer comprises a reference electrode, a counter electrode, an electrode rail and a rail tab arranged on the flexible substrate. The reference electrode and the counter electrode are connected to the electrode rail. The rail tab is connected to the end of the electrode rail. The insulating layer covers the electrode rail. The reference electrode and the counter electrode are located in the electrolytic cell cavity area, and the rail tab is located in the tab area.

[0010] In a specific implementable embodiment, the material of the film substrate is any one of polyethylene terephthalate, polyimide or polyethylene. The thickness of the film substrate is 50-200 μm. The material and size of the flexible substrate are the same as those of the film substrate. The thickness of the ITO conductive layer is 50-200 nm. The sheet resistance of the ITO conductive layer is ≤10 Ω / □.

[0011] In a specific implementable embodiment, the composite adhesive sheet layer is an ethylene-vinyl acetate copolymer hot melt adhesive layer or a polyamide hot melt adhesive layer. The thickness of the composite adhesive sheet layer is 20-100 μm.

[0012] In a specific implementable embodiment, the thickness of the conductive pattern layer is 5-20 μm.

[0013] In a second aspect, the application provides a preparation method of an electrochemical ITO integrated flexible electrode, which adopts the following technical scheme:

[0014] A preparation method of an electrochemical ITO integrated flexible electrode, comprising the following steps:

[0015] The film substrate is cleaned and dried, an ITO conductive layer is deposited on the film substrate, the thickness of the ITO conductive layer is controlled to be 50-200 nm, and an ITO flexible film is obtained;

[0016] The conductive ink is printed on the flexible substrate to form a reference electrode, a counter electrode, an electrode guide rail and a guide rail touch piece, respectively, the reference electrode, the counter electrode, the electrode guide rail and the guide rail touch piece form a conductive pattern layer, after the conductive pattern layer is dried, the insulating ink is printed on the conductive pattern layer to form an insulating layer, the electrolytic cell cavity area and the touch piece area are formed in the area outside the coverage range of the insulating layer on the flexible substrate, and the flexible substrate, the conductive pattern layer and the insulating layer form an auxiliary electrode sheet layer;

[0017] The hollow circular area is punched out in the electrolytic cell cavity area of the flexible substrate, and the hollow square area is punched out in the touch piece area of the flexible substrate;

[0018] The ITO flexible film is used as a working electrode sheet layer, the working electrode sheet layer is bonded to the flexible substrate of the auxiliary electrode sheet layer through hot melt adhesive, after hot pressing and compounding, the hot melt adhesive forms a composite bonding sheet layer, and after cutting, an electrochemical ITO integrated flexible electrode is obtained.

[0019] In a specific implementable embodiment, the temperature of the hot pressing and compounding is 80-150 DEG C, the pressure is 0.5-2 MPa, and the time is 5-10 minutes.

[0020] In a specific implementable embodiment, after the hot pressing and compounding, the temperature is 60-80 DEG C, the pressure is 0.5-1 MPa, and the holding time is 1-3 minutes, and then cutting is performed.

[0021] In a specific implementable embodiment, the ITO conductive layer is deposited on the film substrate by using a magnetron sputtering or electron beam evaporation process.

[0022] In a third aspect, the application provides an application of an electrochemical ITO integrated flexible electrode, and the following technical scheme is adopted:

[0023] The application of the electrochemical ITO integrated flexible electrode is applied in electrochemical detection.

[0024] In summary, the application has the following beneficial effects:

[0025] 1、The application composites the working electrode sheet layer and the auxiliary electrode sheet layer through the composite adhesive sheet layer to obtain the electrochemical ITO integrated electrode. The ITO working electrode provided by the working electrode sheet layer, the reference electrode and the counter electrode provided by the auxiliary electrode sheet layer, and the three-electrode system integrated with the ITO working electrode, the reference electrode and the counter electrode are constructed. Since the flexible substrate and the flexible film structure are adopted, the risk of breakage and scratching of the ITO electrode can be reduced. Moreover, the working electrode, the reference electrode and the counter electrode are integrated in the same flexible structure, the integration degree is high, the connection complexity between the electrodes is reduced, the stability and reliability of the detection system are improved, and the application field of the electrode is wide.

[0026] 2、The preparation method of the application adopts printing, stamping and hot pressing composite processes, is simple to operate, is suitable for batch production, and reduces the production cost.

[0027] 3、The electrochemical ITO integrated flexible electrode of the application can be applied in electrochemical detection, meets the application requirement of easy operation, and is especially suitable for the operation of the scene application. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 is a structural schematic diagram of the electrochemical ITO integrated electrode in embodiment 1 of the application.

[0029] Figure 2 is a sectional view of the electrochemical ITO integrated electrode in embodiment 1 of the application.

[0030] Figure 3 is a preparation process schematic diagram of the electrochemical ITO integrated electrode in embodiment 1 of the application.

[0031] Figure 4 is the electrochemical potassium ferricyanide cyclic voltammetry scanning diagram of the electrochemical ITO integrated flexible electrode in embodiment 1 of the application.

[0032] The drawings show that: 1, the working electrode sheet layer; 2, the composite adhesive sheet layer; 3, the auxiliary electrode sheet layer; 4, the conductive layer; 5, the insulating layer; 6, the film substrate; 7, the ITO conductive layer; 8, the ITO working electrode; 9, the reference electrode; 10, the counter electrode; 11, the electrode guide rail; 12, the guide rail contact piece; 13, the electrolytic cell cavity area; 14, the contact piece area; 15, the hollow circular area; 16, the hollow square area; 17, the flexible substrate. DETAILED DESCRIPTION

[0033] The application will be further described in detail in combination with the embodiments and comparative examples.

[0034] EMBODIMENT

[0035] EMBODIMENT 1

[0036] AsFigures 1-3 As shown in the drawings, the embodiment provides an electrochemical ITO integrated flexible electrode, which comprises, from bottom to top, a working electrode sheet layer 1, a composite adhesive sheet layer 2 and an auxiliary electrode sheet layer 3. The working electrode sheet layer 1 is an ITO flexible film, and the working electrode sheet layer 1 is compounded together with the auxiliary electrode sheet layer 3 through the composite adhesive sheet layer 2.

[0037] The working electrode sheet layer 1 comprises a film substrate 6 and an ITO conductive layer 7 arranged on the film substrate 6. The auxiliary electrode sheet layer 3 comprises, from bottom to top, a flexible substrate 17, a conductive pattern layer 4 and an insulating layer 5. The composite adhesive sheet layer 2 is located between the ITO conductive layer 7 and the flexible substrate 17. The conductive pattern layer 4 comprises a reference electrode 9, a counter electrode 10, electrode tracks 11 and track pads 12 arranged on the flexible substrate 17, the electrode tracks 11 and the track pads 12 are both two, and the track pads 12 are connected to one end of the electrode tracks 11. One end of one of the electrode tracks 11 away from the track pads 12 is connected to the reference electrode 9, and one end of the other electrode track 11 away from the track pads 12 is connected to the counter electrode 10. The track pads 12 are used to connect an electrochemical workstation (not shown in the drawings). The flexible substrate 17 is provided with an electrolytic cell cavity area 13 and a pad area 14, the electrolytic cell cavity area 13 and the pad area 14 are located outside the coverage range of the insulating layer 5, and the insulating layer 5 covers the electrode tracks 11. The reference electrode 9 and the counter electrode 10 are both located in the electrolytic cell cavity area 13, and the two track pads 12 are both located in the pad area 14.

[0038] The electrolytic cell cavity area 13 of the flexible substrate 17 is provided with a hollow circular area 15 penetrating through the entire auxiliary electrode sheet layer 3, and the pad area 14 of the flexible substrate 17 is provided with a hollow square area 16 penetrating through the auxiliary electrode sheet layer 17, and the hollow square area 16 is located between the two track pads 12. The area of the working electrode sheet layer 1 opposite to the hollow circular area 15 is an ITO working electrode 8, and the area of the working electrode sheet layer 1 opposite to the hollow square area 16 is a pad of the ITO working electrode 8.

[0039] The embodiment also provides a preparation method of the electrochemical ITO integrated flexible electrode, which comprises the following steps:

[0040] Any one of polyethylene terephthalate material, polyimide material or polyethylene material can be used as the film substrate 6 and the flexible substrate 17. In the embodiment, polyethylene terephthalate material is selected as the film substrate 6 and the flexible substrate 17. The film substrate 6 and the flexible substrate 17 are cleaned with ethanol and deionized water respectively, and then dried for standby. The thickness of the film substrate 6 and the flexible substrate 17 can be 50-200 μm, and the thickness of the film substrate 6 and the flexible substrate 17 in the embodiment is 120 μm.

[0041] The film substrate 6 is placed into a magnetron sputtering device or an electron beam evaporation process device to deposit an ITO conductive layer 7 on the film substrate 6, and the thickness of the ITO conductive layer 7 can be 50-200 nm. In this embodiment, the thickness of the ITO conductive layer 7 is 100 nm, and the square resistance is ≤10 Ω / □. The film substrate 6 and the ITO conductive layer 7 form an ITO flexible film.

[0042] The conductive ink is printed on the flexible substrate 17 by using a screen printing process to form a reference electrode 9, a counter electrode 10, an electrode guide rail 11, and a guide rail contact piece 12, which constitute a conductive layer 4. After the conductive layer 4 is dried, the insulating ink is printed on the conductive layer 4 to form an insulating layer 5. The electrolytic cell cavity area 13 and the contact piece area 14 are formed on the flexible substrate 17 outside the coverage range of the insulating layer 5. The flexible substrate 17, the conductive layer 4, and the insulating layer 5 constitute an auxiliary electrode sheet layer 3. The thickness of the conductive layer 4 can be 5-20 μm. In this embodiment, the thickness of the conductive layer 4 is 12 μm. The width of the electrode guide rail 11 is 0.8 mm, and the size of the guide rail contact piece 12 is length × width = 4 mm × 2 mm. The insulating layer 5 covers the electrode guide rail 11. The reference electrode 9 and the counter electrode 10 are located in the electrolytic cell cavity area 13, and the guide rail contact piece 12 is located in the contact piece area 14. In this embodiment, the reference electrode 9 is an Ag / AgCl electrode, and the counter electrode 10 is a carbon electrode.

[0043] The hollow circular area 15 is punched out on the insulating layer 5, and the diameter of the hollow circular area 15 is 4 mm. The hollow circular area 15 penetrates through the entire auxiliary electrode sheet layer 3, and the hollow circular area 15 is located in the electrolytic cell cavity area 13. The hollow square area 16 is punched out on the flexible substrate 17, and the size of the hollow square area 16 is the same as that of the guide rail contact piece 12. The hollow square area 16 penetrates through the entire auxiliary electrode sheet layer 3, and the hollow square area 16 is located in the contact piece area 14. Moreover, the hollow square area 16 is located between the two guide rail contact pieces 12.

[0044] The ITO flexible film is used as the working electrode sheet layer 1, and the working electrode sheet layer 1 is bonded to the flexible substrate 17 of the auxiliary electrode sheet layer 3 by using any one of ethylene-vinyl acetate copolymer hot melt adhesive or polyamide hot melt adhesive. In this embodiment, the ethylene-vinyl acetate copolymer hot melt adhesive is selected. The area of the working electrode sheet layer 1 opposite to the hollow circular area 15 is an ITO working electrode 8, and the area of the working electrode sheet layer 1 opposite to the hollow square area 16 is a contact piece of the ITO working electrode 8.

[0045] The working electrode sheet layer 1 and the auxiliary electrode sheet layer 3 bonded together are subjected to hot-pressing compounding by a hot press. The temperature of the hot-pressing compounding can be 80-150°C, the pressure can be 0.5-2 MPa, and the time can be 5-10 minutes. The temperature of the hot-pressing compounding in this embodiment is 115°C, the pressure is 1.2 MPa, and the time is 7.5 minutes. After the hot-pressing compounding, the ethylene-vinyl acetate copolymer hot-melt adhesive forms the composite bonding sheet layer 2 under the conditions of 60-80°C and 0.5-1 MPa for 1-3 minutes. The thickness of the composite bonding sheet layer 2 can be 20-100 μm, and the thickness of the composite bonding sheet layer 2 in this embodiment is 60 μm. Then the composite material is cut, and the electrochemical ITO integrated flexible electrode is obtained.

[0046] Performance detection test

[0047] For example 1, the following performance detection is carried out:

[0048] The electrochemical ITO integrated electrode prepared in example 1 is used for cyclic voltammetry scanning of electrochemical potassium ferricyanide: the electrode is inserted into the electrode interface of Chenhua electrochemical workstation (CHI660E), and cyclic voltammetry scanning (CV) is used for detection. 5 mM potassium ferricyanide and 0.1 M PBS buffer solution (pH 7.4) are added dropwise in the electrode electrolytic cell cavity area, and CV scanning is carried out, as shown in Figure 4

[0049] In combination with example 1 and in combination with Figure 4 It can be seen that the electrochemical ITO integrated electrode prepared in example 1 has good electrochemical reversibility. This can be because the ITO conductive layer with the above thickness and sheet resistance is deposited by magnetron sputtering or electron beam evaporation process. This low resistance characteristic reduces the ohmic loss of the electrode itself, ensures the rapid transfer of electrons on the electrode surface, helps to reduce the potential difference between the oxidation and reduction peaks, and improves the reversibility. ITO has excellent chemical stability in the common electrochemical window and is not easy to corrode or oxidize on the surface, which can reduce side reactions and electrode degradation, make the reaction repeatable, and further support the reversible reaction. The working electrode sheet layer is exposed in the hollow circular area to form an ITO working electrode, which ensures the uniformity of the electrochemically active area and avoids edge effect or uneven current distribution, thereby improving the reaction reversibility.

[0050] ​The auxiliary electrode sheet layer integrates a reference electrode (Ag / AgCl), a counter electrode (carbon electrode), an electrode rail and a rail contact, all components are screen-printed on the same flexible substrate. This design places all electrodes in close proximity to the electrolyte cavity area, reducing the solution resistance and connection impedance in traditional separate electrodes. The reference electrode (Ag / AgCl) provides a stable reference potential, and the counter electrode (carbon electrode) is electrochemically inert, which together ensures the potential control and reaction balance of the working electrode. The insulating layer covers the conductive layer, but the electrolyte cavity area exposes the working electrode, reference electrode and counter electrode, while the electrode rail is located outside the cavity area. This layout prevents short circuits and current leakage, while making the electric field distribution uniform and reducing stray current interference. The reference electrode and counter electrode are both located in the cavity area, ensuring the stability of the reaction system.

[0051] The contact area and rail contact of the ITO working electrode are located outside the insulating layer coverage area, achieving low resistance electrical connection, reducing external contact impedance, and facilitating fast and stable signal transmission.

[0052] The film substrate and flexible substrate of the above material have excellent thermoplasticity and chemical inertness, and do not participate in the reaction in the electrochemical environment, avoiding interface contamination.

[0053] The conditions of the above-defined hot pressing and the treatment conditions after hot pressing are designed based on the material properties, which helps to avoid substrate thermal damage, ensure firm bonding between electrode layers, and maintain electron transfer efficiency. After hot pressing, the temperature and pressure are maintained for a period of time, which eliminates internal stress and micro-bubbles, ensures uniform distribution of the adhesive layer, and forms a tight and defect-free interface. Therefore, the electrochemical ITO integrated flexible electrode of the present application integrates all components on a flexible substrate, reduces the wiring and assembly errors of traditional electrodes, and makes the electrode more stable in testing. Especially in dynamic applications, it can buffer stress and maintain consistent electrochemical performance.

[0054] The specific embodiments are only an explanation of the present application, which is not a limitation of the present application, and those skilled in the art can make modifications to the embodiments without creative contribution after reading the specification, but as long as it is within the scope of the claims of the present application, it is protected by the patent law.

Claims

1. An electrochemical ITO integrated flexible electrode, comprising, from bottom to top, a working electrode sheet layer (1), a composite adhesive sheet layer (2), and an auxiliary electrode sheet layer (3), wherein the working electrode sheet layer (1) comprises a film substrate (6) and an ITO conductive layer (7) disposed on the film substrate (6), the auxiliary electrode sheet layer (3) comprises, from bottom to top, a flexible substrate (17), a conductive pattern layer (4), and an insulating layer (5), the flexible substrate (17) is bonded to the ITO conductive layer (7) through the composite adhesive sheet layer (2), the flexible substrate (17) is provided with an electrolytic cell cavity area (13) and a tab area (14), both the electrolytic cell cavity area (13) and the tab area (14) are located outside the coverage range of the insulating layer (5), the flexible substrate (17) is provided with a hollow circular area (15) and a hollow square area (16) penetrating through the auxiliary electrode sheet layer (3), the hollow circular area (15) is located in the electrolytic cell cavity area (13), the hollow square area (16) is located in the tab area (14), the area of the working electrode sheet layer (1) opposite to the hollow circular area (15) is an ITO working electrode (8), and the area of the working electrode sheet layer (1) opposite to the hollow square area (16) is a tab of the ITO working electrode (8). The conductive pattern layer (4) comprises a reference electrode (9), a counter electrode (10), an electrode rail (11), and a rail tab (12) disposed on the flexible substrate (17), the reference electrode (9) and the counter electrode (10) are connected to the electrode rail (11), the rail tab (12) is connected to the end of the electrode rail (11), the insulating layer (5) covers the electrode rail (11), the reference electrode (9) and the counter electrode (10) are located in the electrolytic cell cavity area (13), and the rail tab (12) is located in the tab area (14). The film substrate (6) is made of any one of polyethylene terephthalate, polyimide, or polyethylene, the thickness of the film substrate (6) is 50-200 μm, the material and size of the flexible substrate (17) are the same as those of the film substrate (6), the thickness of the ITO conductive layer (7) is 50-200 nm, and the sheet resistance of the ITO conductive layer (7) is ≤10 Ω / □. The composite adhesive sheet layer (2) is an ethylene-vinyl acetate copolymer hot melt adhesive layer or a polyamide hot melt adhesive layer, and the thickness of the composite adhesive sheet layer (2) is 20-100 μm. The thickness of the conductive pattern layer (4) is 5-20 μm. The method comprises the following steps: cleaning and drying the film substrate (6), depositing the ITO conductive layer (7) on the film substrate (6), and controlling the thickness of the ITO conductive layer (7) to be 50-200 nm to obtain an ITO flexible film.

2. The electrochemical ITO integrated flexible electrode according to claim 1, wherein, ​ 3. The electrochemical ITO integrated flexible electrode according to claim 1, wherein, ​ 4. The electrochemical ITO integrated flexible electrode according to claim 3, wherein, ​ 5. The electrochemical ITO integrated flexible electrode according to claim 1, wherein, ​ 6. A method of manufacturing an electrochemical ITO integrated flexible electrode according to any one of claims 1 to 5, characterized in that, ​ ​ The conductive ink is printed on the flexible substrate (17) to form a reference electrode (9), a counter electrode (10), an electrode guide (11) and a guide touch piece (12) respectively, the reference electrode (9), the counter electrode (10), the electrode guide (11) and the guide touch piece (12) forming a conductive layer (4), after the conductive layer (4) is dried, the insulating ink is printed on the conductive layer (4) to form an insulating layer (5), the electrolytic cell cavity area (13) and the touch piece area (14) are formed in the area outside the coverage range of the insulating layer (5) on the flexible substrate (17), and the flexible substrate (17), the conductive layer (4) and the insulating layer (5) form an auxiliary electrode sheet layer (3); The hollow circular area (15) is punched in the electrolytic cell cavity area (13) of the flexible substrate (17), and the hollow square area (16) is punched in the touch piece area (14) of the flexible substrate (17); The ITO flexible film is used as the working electrode sheet layer (1), the working electrode sheet layer (1) is bonded to the flexible substrate (17) of the auxiliary electrode sheet layer (3) through hot melt glue, after hot pressing and compounding, the hot melt glue forms a composite bonding sheet layer (2), and after cutting, the electrochemical ITO integrated flexible electrode is obtained.

7. The method of claim 6, wherein the method further comprises the step of: 7-1) applying a conductive layer on the ITO layer. The temperature of the hot pressing and compounding is 80-150 DEG C, the pressure is 0.5-2 MPa, and the time is 5-10 minutes.

8. The method of claim 7, wherein the method further comprises the step of: After the hot pressing and compounding, the temperature is 60-80 DEG C, the pressure is 0.5-1 MPa, and the time is 1-3 minutes, and then cutting is carried out.

9. The method of claim 6, wherein the method further comprises the step of: 9-1) applying a conductive layer on the ITO layer. The ITO conductive layer (7) is deposited on the film substrate (6) by using a magnetron sputtering or electron beam evaporation process.

10. Use of an electrochemical ITO integrated flexible electrode according to any one of claims 1 to 5, characterized in that, The electrochemical ITO integrated flexible electrode is applied in electrochemical detection.

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