A kind of excimer lamp collaborative control method based on multi-source data fusion

By using a multi-source data fusion method, and employing Tukey's double-weight function and generalized cross-validation to update the noise covariance matrix, the singularity problem of the Kalman filter in the excimer lamp system was solved, ensuring the uniformity and stability of the light field.

CN120909203BActive Publication Date: 2025-12-23SUZHOU HUI YING OPTICAL TECH CO LTD
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Patent Information

Application Number
CN202511430222.1
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-10-09
Publication Date
2025-12-23
Estimated Expiration
2045-10-09

AI Technical Summary

Technical Problem

In the prior art, the cooperative control method of the excimer lamp system relies on noise prior information, which leads to singular or ill-conditioned problems in the Kalman filter during the iteration process, affecting the uniformity and stability of the output light field.

Method used

A multi-source data fusion-based approach is adopted to generate a Sigma point set through unscented transformation. Combined with the M-estimation of the Tukey double-weight function and generalized cross-validation, the covariance matrix of process and measurement noise is updated, the Kalman gain is calculated, and the operating instructions of the excimer lamp are generated.

Benefits of technology

It effectively suppressed abnormal interference, ensured the numerical stability of Kalman gain, and improved the uniformity and stability of the output light field of a multi-excimer lamp system.

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Abstract

The application relates to the technical field of control, in particular to a kind of excimer lamp cooperative control method based on multi-source data fusion.The method comprises the following steps: obtaining the multi-source sensing data of excimer lamp system, initializing system state vector, state covariance matrix and the inverse Wishart distribution prior parameter of process and measurement noise covariance matrix, obtaining predicted state mean and predicted covariance matrix based on posterior state estimation, calculating innovation, updating process and measurement noise covariance matrix, calculating state-measurement mutual covariance matrix and measurement innovation covariance matrix, determining optimal gihonov regularization parameter and calculating kalman gain, updating state estimation and state covariance matrix, and generating operation instruction of each excimer lamp based on the updated state.The scheme of the application can overcome the limitations of standard unscented kalman filter, ensure the reliability of kalman gain, and thus improve the uniformity and stability of system output light field.
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