Excimer laser and lens replacement method thereof

Abstract

The invention relates to the technical field of excimer lasers, and discloses an excimer laser and a lens replacement method thereof.The excimer laser comprises a discharge cavity, and diaphragm assemblies are arranged at the two ends of the discharge cavity respectively; the device further comprises a lens frame fixing plate, a lens adjusting plate and a lens mounting plate, the lens frame fixing plate is fixedly arranged at one end of the discharge cavity corresponding to one of the diaphragm assemblies, and one side of the lens adjusting plate is connected with the lens frame fixing plate through an elastic assembly. The lens adjusting plate is arranged on the lens mounting plate, the relative position between the lens adjusting plate and the lens bracket fixing plate is adjusted through an adjusting assembly, an OC lens is arranged in the lens mounting plate, and one side of the lens mounting plate is fixedly connected with the other side of the lens adjusting plate. According to the invention, the relative position between the lens adjusting plate and the lens bracket fixing plate can be adjusted through the adjusting assembly, so that the position adjustment of the OC lens is realized, the replacement precision of the OC lens is ensured, and the output power and the light beam quality of the excimer laser are ensured.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of excimer laser, in particular to an excimer laser and a lens replacement method thereof. BACKGROUND

[0002] Excimer laser is a kind of gas laser device with excimer as working substance, which forms excimer state by strong electron beam excitation of inert gas and halogen gas in the laser cavity, and emits laser when excimer jumps to its ground state. Excimer laser is a kind of cold laser with short wavelength in ultraviolet band, which has strong directivity, high wavelength purity and large output power, and its photon energy wavelength range is 157nm-353nm. Therefore, excimer laser is widely used in integrated circuit lithography, ophthalmic surgery, micro-processing, laser annealing, display panel manufacturing and other fields.

[0003] However, due to the characteristics of excimer laser, its optical lens needs to be replaced frequently as consumables, and the OC lens (Output Coupler) plays a key role in the laser, which is mainly used to adjust the output power and beam quality of the laser, so how to ensure the position accuracy after replacement is very important. SUMMARY

[0004] To solve the above technical problems, the present application provides an excimer laser and a lens replacement method thereof, which ensures the replacement accuracy of the OC lens and the output power and beam quality of the excimer laser.

[0005] The technical scheme adopted by the present application to solve the technical problems is: An excimer laser, comprising a discharge cavity, wherein the inside of the discharge cavity is provided with a laser working substance, and the two ends of the discharge cavity are respectively provided with a window sheet assembly; Further comprising a lens holder fixing plate, a lens adjusting plate and a lens mounting plate, the lens holder fixing plate is fixed to one end of the discharge cavity corresponding to one of the window sheet assemblies, one side of the lens adjusting plate is connected to the lens holder fixing plate through an elastic assembly, and the relative position between the lens adjusting plate and the lens holder fixing plate is adjusted through an adjusting assembly, the lens mounting plate is provided with an OC lens, and one side of the lens mounting plate is fixedly connected to the other side of the lens adjusting plate.

[0006] Preferably, the adjusting assembly comprises a first adjusting assembly, a second adjusting assembly and a third adjusting assembly, wherein: The first adjusting assembly is used to realize the swing of the lens adjusting plate relative to the lens holder fixing plate around the first axis; The second adjusting assembly is used to realize the deflection of the lens adjusting plate relative to the frame fixing plate around the second axis direction. The third adjusting assembly is used to realize the deflection of the lens adjusting plate relative to the frame fixing plate around the third axis direction. The first axis direction, the second axis direction and the third axis direction are perpendicular to each other.

[0007] Preferably, the first adjusting assembly comprises two ball mounting seats arranged oppositely and balls, one end of the ball mounting seat is provided with a tapered hole, one end of the other ball mounting seat is connected with the lens adjusting plate, the other end of the other ball mounting seat is connected with the frame fixing plate, and the balls are arranged in the two tapered holes.

[0008] Preferably, the second adjusting assembly comprises a ball head mounting seat fixed on the frame fixing plate and a first threaded sleeve fixed on the lens adjusting plate, one end of the ball head mounting seat close to the lens adjusting plate is provided with a V-shaped groove, the first threaded sleeve is internally threadedly connected with a first ball head screw, and the ball head of the first ball head screw is accommodated in the V-shaped groove.

[0009] Preferably, the third adjusting assembly comprises an abutting seat fixed on the frame fixing plate and a second threaded sleeve fixed on the lens adjusting plate, one end of the abutting seat close to the lens adjusting plate is an abutting surface, the second threaded sleeve is internally threadedly connected with a second ball head screw, and the ball head of the second ball head screw abuts against the abutting surface.

[0010] Preferably, the frame fixing plate is provided with a first through hole, one side of the frame fixing plate away from the lens adjusting plate is provided with a first clamping groove in communication with the first through hole, the lens adjusting plate is provided with a second through hole, and one side of the lens adjusting plate away from the frame fixing plate is provided with a second clamping groove in communication with the second through hole. The elastic assembly comprises a first pin arranged in the first clamping groove and a second pin arranged in the second clamping groove, a spring is connected between the first pin and the second pin, and the spring is arranged in the first through hole and the second through hole.

[0011] Preferably, the middle part of the lens adjusting plate is provided with a third through hole corresponding to the window piece assembly, one side of the lens adjusting plate is provided with an air guide channel in communication with the third through hole, the air guide channel is provided with an air pipe for conveying protective gas, a first pipeline is connected between one side of the third through hole and the window piece assembly, a lens mounting plate is arranged on the other side of the third through hole, and a second pipeline is arranged on one side of the lens mounting plate away from the lens adjusting plate and corresponding to the OC lens.

[0012] Preferably, one end of the lens mounting plate is connected with the lens adjusting plate by a bolt, and the other end of the lens mounting plate is connected with the lens adjusting plate by a connecting assembly; The connecting assembly comprises a sliding block and a connecting column, the sliding block is internally provided with a clamping spring, one end of the connecting column passes through the clamping spring to connect the lens adjusting plate, and the end of the lens mounting plate is provided with a clamping groove which is clamped with the sliding block.

[0013] Preferably, the lens mounting plate is provided with a containing groove, a fixed frame is arranged on one side of the containing groove, the OC lens is arranged in the containing groove and abuts against the fixed frame, and a sealing ring is arranged between the OC lens and the fixed frame and between the OC lens and the bottom surface of the containing groove.

[0014] A lens replacement method of an excimer laser, comprising the following steps: Removing the second pipeline; Dismounting the lens mounting plate from the lens adjusting plate; Taking out the old OC lens; sequentially arranging a sealing ring, an OC lens, a sealing ring and a fixed frame into the containing groove, and then fixing them by a screw; Connecting the lens mounting plate with the lens adjusting plate; Adjusting the position of the OC lens by the adjusting assembly; Connecting the second pipeline on the lens mounting plate.

[0015] Compared with the prior art, the excimer laser and the lens replacement method thereof have the beneficial effects that: the OC lens is arranged in the lens mounting plate, one side of the lens mounting plate is fixedly connected with the lens adjusting plate, the lens adjusting plate is connected with the lens frame fixing plate through the elastic assembly, and the relative position between the lens adjusting plate and the lens frame fixing plate is adjusted through the adjusting assembly, so that the relative position between the lens adjusting plate and the lens frame fixing plate can be adjusted through the adjusting assembly after the OC lens is replaced, the position of the OC lens is adjusted, the OC lens is quickly replaced, the replacement precision of the OC lens is ensured, and the output power and the beam quality of the excimer laser are ensured. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is a schematic diagram of the excimer laser.

[0017] Figure 2 It is a schematic diagram of the structure of the excimer laser.

[0018] Figure 3 It is a schematic diagram of the structure of the excimer laser without a discharge cavity.

[0019] Figure 4 is a front view. Figure 3

[0020] Figure 5 is a cross-sectional view of A-A in Figure 4

[0021] Figure 6 is a cross-sectional view of B-B in Figure 4

[0022] Figure 7 is a cross-sectional view of C-C in Figure 4

[0023] Figure 8 is a connection diagram of the lens adjusting plate and the lens mounting plate of the application.

[0024] Figure 9 is a cross-sectional view of D-D in Figure 8

[0025] Figure 10 is a cross-sectional view of E-E in Figure 8

[0026] Wherein: 1-discharge cavity, 2-window piece assembly, 3-mirror frame fixing plate, 4-lens adjusting plate, 5-lens mounting plate, 51-clamping groove, 6-OC lens, 7-first adjusting assembly, 71-rolling ball mounting seat, 72-rolling ball, 8-second adjusting assembly, 81-ball head mounting seat, 82-first threaded sleeve, 83-first ball head screw, 9-third adjusting assembly, 91-abutment seat, 92-second threaded sleeve, 93-second ball head screw, 10-elastic assembly, 101-first pin, 102-second pin, 103-spring, 20-air pipe, 30-bolt, 40-connection assembly, 401-sliding block, 402-connection column, 403-clamping spring, 50-fixing frame, 60-sealing ring, 70-first pipeline, 80-second pipeline. DETAILED DESCRIPTION

[0027] The specific embodiments of the application will be further described in detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate the application, but not to limit the scope of the application.

[0028] Figure 1 ​​​​​​As shown in the schematic diagram of the excimer laser, window pieces are arranged at both ends of the discharge cavity, the HR mirror of the laser is a high reflection mirror (total reflection mirror), the OC mirror partially reflects and projects the laser, amplifies the laser in the oscillation cavity and then outputs, and the angle of the OC mirror (R2) affects the working efficiency of the laser. Therefore, the OC mirror of the excimer laser needs to be adjusted in angle to obtain higher working efficiency, and the OC mirror of the excimer laser needs to be replaced regularly. The excimer laser of the present application can effectively solve the angle adjustment problem after the OC mirror is replaced.

[0029] As shown in the schematic diagram of the excimer laser, window pieces are arranged at both ends of the discharge cavity, the HR mirror of the laser is a high reflection mirror (total reflection mirror), the OC mirror partially reflects and projects the laser, amplifies the laser in the oscillation cavity and then outputs, and the angle of the OC mirror (R2) affects the working efficiency of the laser. Therefore, the OC mirror of the excimer laser needs to be adjusted in angle to obtain higher working efficiency, and the OC mirror of the excimer laser needs to be replaced regularly. The excimer laser of the present application can effectively solve the angle adjustment problem after the OC mirror is replaced. Figures 2-4 The excimer laser of the preferred embodiment of the present application comprises a discharge cavity 1, the inside of the discharge cavity 1 is provided with a laser working substance, and both ends of the discharge cavity 1 are respectively provided with a window piece assembly 2, which is a prior art and will not be described here. The excimer laser of the preferred embodiment of the present application comprises a discharge cavity 1, the inside of the discharge cavity 1 is provided with a laser working substance, and both ends of the discharge cavity 1 are respectively provided with a window piece assembly 2, which is a prior art and will not be described here.

[0030] Based on the above technical features, by arranging the OC mirror 6 in the mirror mounting plate 5, and fixing one side of the mirror mounting plate 5 to the other side of the mirror adjusting plate 4, and connecting the mirror adjusting plate 4 to the mirror frame fixing plate 3 through the elastic assembly 10, and adjusting the relative position between the mirror adjusting plate 4 and the mirror frame fixing plate 3 through the adjusting assembly, the relative position between the mirror adjusting plate 4 and the mirror frame fixing plate 3 can be adjusted through the adjusting assembly after the OC mirror 6 is replaced, that is, the position of the OC mirror 6 is adjusted, so that the OC mirror 6 can be quickly replaced, and the replacement accuracy of the OC mirror 6 is ensured, so that the output power and beam quality of the excimer laser are ensured.

[0031] In this embodiment, the adjusting assembly comprises a first adjusting assembly 7, a second adjusting assembly 8 and a third adjusting assembly 9, wherein: the first adjusting assembly 7 is used to realize the swinging of the mirror adjusting plate 4 relative to the mirror frame fixing plate 3 around a first axis; the second adjusting assembly 8 is used to realize the deflection of the mirror adjusting plate 4 relative to the mirror frame fixing plate 3 around a second axis; and the third adjusting assembly 9 is used to realize the deflection of the mirror adjusting plate 4 relative to the mirror frame fixing plate 3 around a third axis. The first axis, the second axis and the third axis are perpendicular to each other.

[0032] As shown in the schematic diagram of the excimer laser, window pieces are arranged at both ends of the discharge cavity, the HR mirror of the laser is a high reflection mirror (total reflection mirror), the OC mirror partially reflects and projects the laser, amplifies the laser in the oscillation cavity and then outputs, and the angle of the OC mirror (R2) affects the working efficiency of the laser. Therefore, the OC mirror of the excimer laser needs to be adjusted in angle to obtain higher working efficiency, and the OC mirror of the excimer laser needs to be replaced regularly. The excimer laser of the present application can effectively solve the angle adjustment problem after the OC mirror is replaced. Figure 5As shown, specifically, the first adjusting assembly 7 includes two ball seats 71 and balls 72 arranged oppositely, one end of the ball seat 71 is provided with a tapered hole, and the axial direction of the tapered hole is the first axial direction. One end of the ball seat 71 is connected to the lens adjusting plate 4, and the other end of the ball seat 71 is connected to the frame fixing plate 3. The ball 72 is arranged in the tapered hole, so that when the position of the lens adjusting plate 4 is adjusted, the lens adjusting plate 4 swings around the outer periphery of the ball 72, and the lens adjusting plate 4 swings around the first axial direction relative to the frame fixing plate 3.

[0033] As shown in the figure, Figure 6 The second adjusting assembly 8 includes a ball head seat 81 fixed on the frame fixing plate 3 and a first threaded sleeve 82 fixed on the lens adjusting plate 4. One end of the ball head seat 81 near the lens adjusting plate 4 is provided with a V-shaped groove, and the first threaded sleeve 82 is threadedly connected with a first ball head screw 83. The ball head of the first ball head screw 83 is accommodated in the V-shaped groove. When the first ball head screw 83 is rotated to drive the lens adjusting plate 4 to move, the lens adjusting plate 4 swings around the outer periphery of the ball 72 relative to the frame fixing plate 3, and the lens adjusting plate 4 deflects slightly around the second axial direction. At the same time, the ball head of the first ball head screw 83 slides along the direction of the V-shaped groove, and the V-shaped groove limits the ball head of the first ball head screw 83.

[0034] As shown in the figure, Figure 5 The third adjusting assembly 9 includes an abutting seat 91 fixed on the frame fixing plate 3 and a second threaded sleeve 92 fixed on the lens adjusting plate 4. One end of the abutting seat 91 near the lens adjusting plate 4 is an abutting surface, and the second threaded sleeve 92 is threadedly connected with a second ball head screw 93. The ball head of the second ball head screw 93 abuts against the abutting surface. When the second ball head screw 93 is rotated, the second ball head screw 93 drives the lens adjusting plate 4 to move, the lens adjusting plate 4 swings around the outer periphery of the ball 72 relative to the frame fixing plate 3, and the lens adjusting plate 4 deflects slightly around the third axial direction. At this time, the second ball head screw 93 slides on the abutting surface. When the first ball head screw 83 is rotated, the second ball head screw 93 vertically slides on the abutting surface.

[0035] As shown in the figure, Figure 5 In this embodiment, the frame fixing plate 3 is provided with a first through hole, and the side of the frame fixing plate away from the lens adjusting plate is provided with a first clamping groove in communication with the first through hole. The lens adjusting plate 4 is provided with a second through hole, and the side of the lens adjusting plate 4 away from the frame fixing plate 3 is provided with a second clamping groove in communication with the second through hole, The elastic assembly 10 comprises a first pin 101 arranged in the first clamping slot and a second pin 102 arranged in the second clamping slot, a spring 103 is connected between the first pin 101 and the second pin 102, and the spring 103 is arranged in the first through hole and the second through hole. During installation, the first pin 101 is sleeved into one end of the spring 103, the spring 103 passes through the first through hole of the frame fixing plate 3, and the first pin 101 is clamped with the first clamping slot. The spring 103 is stretched, passes through the second through hole on the lens adjusting plate 4, then the second pin 102 is sleeved into the other end of the spring 103, and then the spring 103 is loosened to be locked, so that the second pin 102 is clamped into the second clamping slot.

[0036] When the first ball screw 83 and the second ball screw 93 are adjusted, the lens adjusting plate 4 is deflected and adjusted along the central axis of the light passing hole of the frame fixing plate 3.

[0037] As shown in the drawings, Figures 3-4 In this embodiment, the middle part of the lens adjusting plate 4 is provided with a third through hole corresponding to the window piece assembly, one side of the lens adjusting plate is provided with an air guide channel communicating with the third through hole, an air pipe 20 for conveying protective gas is arranged on the air guide channel, a first pipeline 70 is connected between the side of the third through hole and the window piece assembly, and a lens mounting plate 5 is attached to the other side of the third through hole. The side of the lens mounting plate 5 away from the lens adjusting plate 4 is provided with a second pipeline 80 corresponding to the OC lens 6. The first pipeline 70 and the second pipeline 80 are both corrugated pipes. Because the photon energy of excimer laser is large, the damage to optical lenses is large, which makes it necessary to seal and N2 protect the OC lens 6 in order to prolong the working time of the OC lens 6 and reduce the damage to the OC lens 6, so as to prolong the service life of the OC lens 6. The application can realize the protection of the OC lens 6 by conveying N2 through the air pipe. The axial direction of the first pipeline 70 coincides with the axial direction of the second pipeline 80, and both are the first axial direction.

[0038] At the same time, since the first pipeline 70 is connected to the third through hole, after N2 is injected from the air pipe 20, it is injected along the air guide channel on the lens adjusting plate 4, a positive pressure environment of N2 is formed between the OC lens 6 and the first pipeline 70 in the laser pipeline, air and dust can be discharged, pollutants can be prevented from entering the laser channel, the window piece assembly 2 can also be protected, and the OC lens 6 can also be cooled.

[0039] As shown in the drawings, Figure 7As shown in the drawings, in order to ensure the connection reliability and sealing of the OC lens 6, the lens mounting plate 5 is provided with a receiving groove, one side of the receiving groove is provided with a fixed frame 50, the OC lens 6 is arranged in the receiving groove and abuts against the fixed frame 50, and a sealing ring 60 is arranged between the OC lens 6 and the fixed frame 50 and between the OC lens and the bottom surface of the receiving groove. When the OC lens 6 needs to be replaced, the fixed frame 50 only needs to be disassembled.

[0040] As shown in the drawings, Figures 8-10 In the embodiment, one end of the lens mounting plate 5 is connected with the lens adjusting plate 4 through a bolt 30, and the other end of the lens mounting plate 5 is connected with the lens adjusting plate 4 through a connecting assembly 40. The connecting assembly 40 includes a sliding block 401 and a connecting column 402. The sliding block 401 is internally provided with a clamping spring 403. One end of the connecting column 402 penetrates through the clamping spring 403 and is connected with the lens adjusting plate 4. The end of the lens mounting plate 5 is provided with a V-shaped clamping groove 51, and the clamping groove 51 is clamped with the sliding block 401. The lens adjusting plate 4 is provided with a groove for mounting the lens mounting plate 5. After the OC lens 6 is mounted on the lens mounting plate 5, the clamping groove 51 is connected with the sliding block 401, and then the lens mounting plate 5 and the lens adjusting plate 4 are connected by using the bolt 30, so that the lens mounting plate 5 is fixed on the lens adjusting plate 4.

[0041] As shown in the drawings, Figure 8 In order to ensure the positioning accuracy and installation convenience during the replacement of the OC lens 6, the bolt 30 and the matching structure are designed in a delicate manner. The structure of the bolt 30 includes a nut, a cylindrical rod, a tapered angle and a threaded column. The lens adjusting plate 4 is provided with a circular hole. The nut is matched with a platform on the circular hole to press the lens mounting plate. The cylindrical rod and the circular hole on the lens adjusting plate 4 are matched in a relatively precise manner, so that the positioning between the bolt 30 and the lens mounting plate 5 is relatively accurate.

[0042] The hole structure on the lens adjusting plate 4 includes a cylindrical hole, a tapered angle and a threaded column. The tapered angle on the bolt 30 can play a guiding role when the bolt is inserted into the hole, which can realize fast and accurate installation in a narrow space. The tapered angle in the hole can play a guiding role when the threaded column of the bolt is installed with the hole thread, so as to realize fast and accurate installation in a narrow space. The cylindrical rod of the bolt 30 and the cylindrical hole of the hole are matched in a relatively precise manner, so that the lens adjusting plate and the lens mounting plate are accurately positioned.

[0043] In order to solve the above technical problems, the application also provides a lens replacement method of an excimer laser, which comprises the following steps: Step one, loosen the screw of the second pipe 80, and move the second pipe 80 to the side away from the lens mounting plate 5 to remove the second pipe 80; Step two, remove the lens mounting plate 5 from the lens adjusting plate 4, remove the bolt 30 first, then gently lift the lens mounting plate 5, and finally make the clamping groove 51 of the lens mounting plate 5 disengage from the sliding block 401 to achieve the extraction of the lens mounting plate 5; Step three, disassemble the fixed frame 50, and take out the old OC lens 6 from the containing groove; Step four, put the sealing ring 60, OC lens 6, sealing ring 60, and fixed frame 50 into the containing groove in turn, and then fix them with screws; Step five, connect the lens mounting plate 5 to the lens adjusting plate 4; Step six, adjust the position of the OC lens 6 through the adjusting assembly. The laser beam is perpendicular to the light passing surface of the OC lens 6. When the laser beam passes through the OC lens 6, part of it is reflected back to the discharge cavity 1, amplified by oscillation in the discharge cavity 1, and part of it is emitted externally after passing through the OC lens 6. Only when the light reflected by the OC lens 6 (partial mirror) and the HR mirror (total reflection mirror) can repeatedly oscillate can the laser be fully amplified, and the best output efficiency of the laser can be ensured. Since the frame itself cannot guarantee that the above two mirrors are completely perpendicular, and the precision of the lens itself cannot guarantee that the new OC lens 6 after replacement is still consistent with the original lens state, the working efficiency of the OC lens 6 needs to be restored by fine-tuning its light receiving surface angle after replacement. At the same time, limited by the need to frequently replace the OC lens 6 and the narrow space of the laser, a convenient adjusting mechanism and adjusting method are needed to achieve this, and this scheme is to solve the above problems.

[0044] After replacing the OC lens 6, turning the first ball head screw 83 with an internal hex wrench can drive the position of the first ball head screw 83 on the lens adjusting plate 4 to move perpendicular to the frame fixing plate 3. At this time, the lens adjusting plate 4 takes the connecting line (along the second axis) of the ball mounting seat 71 and the second ball head screw 93 as the rotation axis, and by turning the first ball head screw 83 clockwise or counterclockwise, the OC lens 6 can be deflected around the second axis. Turning the second ball head screw 93 with an internal hex wrench can drive the position of the second ball head screw 93 on the lens adjusting plate 4 to move perpendicular to the frame fixing plate 3. At this time, the lens adjusting plate 4 takes the connecting line (along the third axis) of the first ball head screw 83 and the ball mounting seat 71 as the rotation axis, and by turning the second ball head screw 93 clockwise or counterclockwise, the OC lens 6 can be deflected around the third axis. An energy meter (or other test tool) is added outside the laser, and by turning the first ball head screw 83 and the second ball head screw 93, the deflection angle of the OC lens 6 is fine-tuned. When the energy meter meets the requirements, the adjustment of the OC lens 6 is completed.

[0045] In the adjustment mode, the first ball screw 83 and the second ball screw 93 are adjusted by the internal hex wrench, the movement of the top wire, and the frame adjustment plate 302 as a lever, twice magnifying the adjustment accuracy, effectively ensuring the realization of the fine adjustment of the OC lens angle. The structure is compact, the components are few, and the space is saved. Through the tension of the spring and the self-locking of the threaded pair, the stability of the work after the adjustment is completed is ensured.

[0046] Step seven, connecting the second pipe 80 on the lens mounting plate 5.

[0047] In summary, the present application has the following advantages: 1. The structure of the present application is simple and compact, the cost is low, and the technical requirements such as adjustment of the OC lens 6, replacement of the window piece, and protection of the optical path gas can be realized.

[0048] 2. The simple structure of the present application reduces the tooling amount of the assembly personnel, simplifies the work content, and reduces the workload.

[0049] 3. The present application is convenient for disassembly and replacement of the OC lens 6, the OC lens 6 is installed stably and firmly, and meets the requirements of long-term stable operation of the laser; the replacement operation is simple, there is a foolproof mechanism, and the requirements for debugging equipment and personnel are reduced.

[0050] 4. The technical solution can meet the angle fine adjustment of the OC lens 6 in each direction along the center axis; and through the rotation force of the internal hex wrench force rod-top wire, the movement is converted into a lever, three times magnifying the adjustment accuracy, effectively ensuring the realization of the fine adjustment of the OC lens angle; at the same time, through the tension of the spring and the self-locking of the threaded pair, the stability of the work after the adjustment is completed is ensured.

[0051] 5. The technical solution of the present application seals and protects the light barrier where the OC lens 6 is located by N2 gas, effectively improving the service life of the OC lens 6.

[0052] 6. The first pipe 70 and the second pipe 80 of the technical solution adopt corrugated pipes, which have good flexibility and are convenient for cooperation with other devices before and after the OC lens 6 adjustment device, and convenient for disassembly, debugging and adjustment of the OC lens 6 adjustment device and other devices before and after.

[0053] 7. The machining requirements of the parts are greatly reduced, the technical requirements of the assembly and adjustment personnel are greatly reduced, the requirements for the debugging equipment are reduced, and the installation and debugging efficiency is greatly improved. The above saves the cost and improves the efficiency.

[0054] The above only describes the preferred embodiments of the present application, and it should be pointed out that for ordinary skilled persons in the technical field, without departing from the technical concept of the present application, a number of improvements and replacements can be made, which should also be considered as the protection range of the present application.

Claims

1. An excimer laser comprising a discharge chamber, the interior of which is provided with a laser-active substance, characterized in that: Two ends of the discharge cavity are respectively provided with window sheet assemblies; Further comprising a frame fixing plate, a lens adjusting plate and a lens mounting plate, the frame fixing plate is fixed to one end of the discharge cavity corresponding to one of the window sheet assemblies, one side of the lens adjusting plate is connected to the frame fixing plate through an elastic assembly, and the relative position between the lens adjusting plate and the frame fixing plate is adjusted through an adjusting assembly, and the lens mounting plate is internally provided with an OC lens, and one side of the lens mounting plate is fixedly connected to the other side of the lens adjusting plate.

2. The excimer laser of claim 1, wherein: The adjusting assembly comprises a first adjusting assembly, a second adjusting assembly and a third adjusting assembly, wherein: The first adjusting assembly is used to realize the swing of the lens adjusting plate relative to the frame fixing plate around a first axis; The second adjusting assembly is used to realize the deflection of the lens adjusting plate relative to the frame fixing plate around a second axis; The third adjusting assembly is used to realize the deflection of the lens adjusting plate relative to the frame fixing plate around a third axis; The first axis, the second axis and the third axis are perpendicular to each other.

3. The excimer laser of claim 2, wherein: The first adjusting assembly comprises two oppositely arranged ball mounting seats and balls, one end of the ball mounting seat is provided with a tapered hole, one end of one of the ball mounting seats is connected to the lens adjusting plate, the other end of the other ball mounting seat is connected to the frame fixing plate, and the balls are arranged in the two tapered holes.

4. The excimer laser of claim 2, wherein: The second adjusting assembly comprises a ball head mounting seat fixed to the frame fixing plate and a first threaded sleeve fixed to the lens adjusting plate, one end of the ball head mounting seat close to the lens adjusting plate is provided with a V-shaped groove, the first threaded sleeve is internally threadedly connected with a first ball head screw, and the ball head of the first ball head screw is accommodated in the V-shaped groove.

5. The excimer laser of claim 2, wherein: The third adjusting assembly comprises an abutting seat fixed to the frame fixing plate and a second threaded sleeve fixed to the lens adjusting plate, one end of the abutting seat close to the lens adjusting plate is an abutting surface, the second threaded sleeve is internally threadedly connected with a second ball head screw, and the ball head of the second ball head screw abuts against the abutting surface.

6. An excimer laser as claimed in any one of claims 1-5, characterized in that: The frame fixing plate is provided with a first through hole, and one side of the frame fixing plate away from the lens adjusting plate is provided with a first clamping groove in communication with the first through hole, the lens adjusting plate is provided with a second through hole, and one side of the lens adjusting plate away from the frame fixing plate is provided with a second clamping groove in communication with the second through hole, The elastic assembly comprises a first pin arranged in the first clamping groove and a second pin arranged in the second clamping groove, a spring is connected between the first pin and the second pin, and the spring is arranged in the first through hole and the second through hole.

7. An excimer laser as claimed in any of claims 1-5, characterized in that: The middle part of the lens adjusting plate is provided with a third through hole corresponding to the window sheet assembly, one side of the lens adjusting plate is provided with an air guide channel communicated with the third through hole, an air pipe for conveying protective gas is arranged on the air guide channel, a first pipeline is connected between one side of the third through hole and the window sheet assembly, and a lens mounting plate is attached to the other side of the third through hole, and the lens mounting plate is provided with a second pipeline corresponding to the OC lens on the side away from the lens adjusting plate.

8. The excimer laser of any of claims 1-5, wherein: One end of the lens mounting plate is connected with the lens adjusting plate through a bolt, and the other end of the lens mounting plate is connected with the lens adjusting plate through a connecting assembly. The connecting assembly comprises a sliding block and a connecting column, the inside of the sliding block is provided with a clamping spring, one end of the connecting column passes through the clamping spring to connect the lens adjusting plate, and the end of the lens mounting plate is provided with a clamping groove, and the clamping groove is clamped with the sliding block.

9. An excimer laser as claimed in any one of claims 1-5, characterized in that: The lens mounting plate is provided with a containing groove, one side of the containing groove is provided with a fixed frame, the OC lens is arranged in the containing groove and abuts against the fixed frame, and a sealing ring is arranged between the OC lens and the fixed frame and between the OC lens and the bottom surface of the containing groove.

10. The mirror replacement method of an excimer laser as claimed in any one of claims 1 through 9, wherein: The method comprises the following steps: Remove the second pipeline; Remove the lens mounting plate from the lens adjusting plate; Take out the old OC lens; Put the sealing ring, OC lens, sealing ring, fixed frame into the containing groove in sequence, and then fix them with screws; Connect the lens mounting plate with the lens adjusting plate; Adjust the position of the OC lens through the adjusting assembly; Connect the second pipeline on the lens mounting plate.

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