Vertical articulated robot

Abstract

The invention provides a vertical multi-joint robot capable of realizing weight reduction and space saving of a wrist unit while employing two hands. A vertical articulated robot includes: a wrist unit connected to a holding arm and to which a first hand and a second hand are attached; a fifth shaft that rotates the wrist unit; a sixth shaft and a seventh shaft that rotate the first hand and the second hand; a fifth-axis motor, a sixth-axis motor, and a seventh-axis motor housed in the holding arm and disposed in parallel; a first intermediate shaft disposed coaxially with the fifth shaft and receiving the driving force of the sixth shaft motor; a second gear attached to the sixth shaft and engaged with a first gear attached to the first intermediate shaft; a second intermediate shaft which is disposed coaxially with the fifth shaft and the first intermediate shaft and receives the driving force of the seventh shaft motor; and a fourth gear attached to the seventh shaft and engaged with a third gear attached to the second intermediate shaft.

Description

Technical Field

[0001] This invention relates to a vertical multi-jointed robot with two hands. Background Technology

[0002] In the past, horizontal articulated robots (SCARA robots) have been commonly used as robots for transporting substrates. In addition, end effectors such as hands that carry substrates are installed at the front end of the arm of the horizontal articulated robot (for example, Patent Document 1).

[0003] Patent Document 1 describes a so-called two-handed robot. In this two-handed robot, two hands are connected in two layers at the front end of the arm. Each hand can rotate independently around the rotation axis of the hand at the front end of the arm.

[0004] Existing technical documents

[0005] Patent documents

[0006] Patent Document 1: Japanese Patent Application Publication No. 2011-659 Summary of the Invention

[0007] The problem the invention aims to solve

[0008] However, Patent Document 1 only discloses a structure employing two hands in a horizontal articulated robot. Furthermore, horizontal articulated robots are often subject to limitations in their application, thus they are generally designed as specialized machines suitable for various purposes. However, the applications of specialized machines are limited, resulting in higher manufacturing costs compared to standard (general-purpose) vertical articulated robots.

[0009] Therefore, the case of using two hands in a vertical multi-joint robot is considered. However, vertical multi-joint robots have a structure with a wrist unit at the front end of the arm and a hand mounted on the wrist unit. In a horizontal multi-joint robot as shown in Patent Document 1, since the hand is mounted directly on the arm, it is easy to set up a rotation mechanism for the hand within the arm.

[0010] However, in vertical multi-joint robots, in order to make the two hands mounted on the rotating wrist unit rotate, it was previously necessary to configure the rotation mechanism of the two hands in the wrist unit, which caused the wrist unit to become very heavy.

[0011] In view of this problem, the present invention aims to provide a vertical multi-joint robot that can achieve lightweight and space-saving wrist units while employing both hands.

[0012] Solution for solving the problem

[0013] To address the aforementioned issues, the representative structure of the vertical multi-joint robot of the present invention is characterized by comprising: a first arm; a wrist unit connected to the first arm and equipped with a first hand and a second hand; a wrist axis that rotates the wrist unit in a direction inclined relative to the first arm; a first hand axis mounted on the wrist unit that rotates the first hand in a direction orthogonal to the rotation direction of the wrist unit; a second hand axis mounted on the wrist unit that rotates the second hand coaxially with the first hand axis; and wrist axis motors, first hand axis motors, and second hand axis motors. The drive sources for the wrist axis, the first hand axis, and the second hand axis are housed in the first arm and are arranged in parallel. A first intermediate shaft is arranged coaxially with the wrist axis and receives drive force from the first hand axis motor. A first gear is mounted on the first intermediate shaft. A second gear is mounted coaxially on the first hand axis and meshes with the first gear. A second intermediate shaft is arranged coaxially with the wrist axis and the first intermediate shaft and receives drive force from the second hand axis motor. A third gear is mounted coaxially on the second intermediate shaft. A fourth gear is mounted coaxially on the second hand axis and meshes with the third gear.

[0014] The effects of the invention

[0015] According to the present invention, a vertical multi-joint robot is provided that can achieve lightweight and space-saving wrist units while employing both hands. Attached Figure Description

[0016] Figure 1 This is a perspective view showing the overall structure of the vertical multi-joint robot in an embodiment of the present invention.

[0017] Figure 2 This is an explanation Figure 1 A partial sectional view of the main part of the retaining arm (first arm).

[0018] Figure 3 It is an enlarged representation Figure 2 A partial sectional view of the retaining arm (first arm).

[0019] Explanation of reference numerals in the attached figures

[0020] 100. Vertical multi-joint robot; 108. Base; 109. Mounting surface; 110. First axis; 112. Rotating frame; 114. Second axis; 116. Lower arm; 118. Third axis; 120. Upper arm; 122, 126, 128. Side of base; 124. Connector; 129. Front end of lower arm; 130. Connecting arm; 132. Holding arm (first arm part); 134. Fourth axis; 136. Wrist unit; 138. Fifth axis (wrist axis); 140. Sixth axis (first hand axis); 142. First hand; 144. Seventh axis (second hand axis); 146. Second hand; 148. Fifth axis motor (wrist axis) Motors; 150, 6th axis motor (1st hand shaft motor); 152, 7th axis motor (2nd hand shaft motor); 148a, 150a, 152a, motor shafts; 154, 156, 158, synchronous belts; 160, 1st intermediate shaft; 162a, 1st gear; 162b, 2nd gear; 164, 2nd intermediate shaft; 166a, 3rd gear; 166b, 4th gear; 168, 169, plates; 170, 180, 190, wave reducers; 172, 182, 192, bearings; 174, 184, 194, flexible gears (external gears); 176, 186, 196, rigid gears (internal gears). Detailed Implementation

[0021] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The dimensions, materials, and other specific values ​​shown in these embodiments are merely illustrative for ease of understanding of the invention and are not intended to limit the invention unless otherwise stated. Furthermore, in this specification and the accompanying drawings, elements having substantially the same function or structure are omitted from repeated description by using the same reference numerals; additionally, illustrations are omitted for elements not directly related to the present invention.

[0022] Figure 1 This is a perspective view showing the overall structure of a vertical articulated robot 100 according to an embodiment of the present invention. The vertical articulated robot 100 is an industrial robot, used for example in the case of handling workpieces (such as substrates).

[0023] For the vertical joint robot 100 in this embodiment, to provide a concise explanation, the rotation direction of the first axis of a typical vertical joint robot differs from that of a conventional vertical joint robot, with the main range of motion of the lower arm and upper arm set upwards. The vertical joint robot 100 is, for example, a 7-axis robot, comprising a base 108, a first axis 110, a rotating frame 112, a second axis 114, a lower arm 116, a third axis 118, and an upper arm 120. Furthermore, the upper arm 120 includes a connecting arm 130, a fourth axis 134, and a holding arm (first arm portion) 132, which rotate as a whole using the third axis 118 and the fourth axis 134; these details will be described later.

[0024] The base 108 is installed on the ground in a factory or similar location. A connector 124 for connecting wire harnesses is mounted on the side 122 of the base 108. In addition, the connector 124 can also be mounted on other sides 126, 128 of the base 108, taking into account the lead-out direction of the wire harness.

[0025] When the base 108 is placed on the ground, the first shaft 110 is supported in a direction parallel to the mounting surface 109 (hereinafter referred to as the horizontal direction). The rotating frame 112 rotates using the first shaft 110. The second shaft 114 is supported on the rotating frame 112 in a direction orthogonal to the first shaft 110. The lower arm 116 rotates using the second shaft 114. In other words, the direction of rotation of the second shaft 114 is the direction in which the angle between the lower arm 116 and the first shaft 110 changes. The third shaft 118 is supported parallel to the second shaft 114 at the end of the lower arm 116 opposite to the second shaft 114, i.e., the front end 129.

[0026] The upper arm 120 has a connecting arm 130, a fourth axis 134, and a retaining arm 132, which rotate as a whole using a third axis 118 and a fourth axis 134. The connecting arm 130 is connected in a manner that allows it to rotate relative to the lower arm 116 via the third axis 118. The retaining arm 132 is rotatably connected relative to the connecting arm 130 via a fourth axis 134 extending along the length of the retaining arm 132, in a manner that allows it to twist about the fourth axis 134.

[0027] A wrist unit 136 is connected to the front end of the retaining arm 132. The wrist unit 136 rotates in an inclined direction relative to the retaining arm 132 via a fifth axis (wrist axis) 138, rather than in a torsional direction relative to the retaining arm 132. Furthermore, a first hand 142 and a second hand 146, for example serving as end effectors for loading workpieces, are mounted on the wrist unit 136. Thus, a so-called two-handed robot is employed in the vertical multi-joint robot 100.

[0028] The first hand 142 rotates via the sixth axis (first hand axis) 140 in a direction orthogonal to the rotation direction of the wrist unit 136 (the direction of twisting). The second hand 146 rotates via the seventh axis (second hand axis) 144, which is coaxial with the sixth axis 140, in a direction orthogonal to the rotation direction of the wrist unit 136. Furthermore, the fifth axis 138, the sixth axis 140, and the seventh axis 144 are supported on the wrist unit 136 in a direction orthogonal to the fourth axis 134.

[0029] Thus, the vertical multi-joint robot 100 is configured such that the first axis 110 is arranged horizontally, and the rotary frame 112 rotates approximately vertically relative to the mounting surface 109. As a result, the shaft and arm behind the second axis 114 can perform approximately vertical circular motion using the first axis 110 relative to the mounting surface 109.

[0030] Figure 2 This is an explanation Figure 1 A partial sectional view of the main part of the retaining arm (first arm) 132. Figure 3 It is an enlarged representation Figure 2 A partial cross-sectional view of the retaining arm (first arm) 132. The internal structure of the retaining arm 132 and wrist unit 136 of the vertical multi-joint robot 100 is shown in the figure.

[0031] like Figure 2 As shown, the vertical multi-joint robot 100 includes a fifth-axis motor (wrist axis motor) 148, a sixth-axis motor (first hand axis motor) 150, and a seventh-axis motor (second hand axis motor) 152 within the holding arm 132. The fifth-axis motor 148 has a motor shaft 148a and is the drive source for the fifth axis 138; the sixth-axis motor 150 has a motor shaft 150a and is the drive source for the sixth axis 140; and the seventh-axis motor 152 has a motor shaft 152a and is the drive source for the seventh axis 144.

[0032] These three motors, namely the fifth-axis motor 148, the sixth-axis motor 150, and the seventh-axis motor 152, are housed in the retaining arm 132 as shown in the figure. Furthermore, the three motors, including motor shafts 148a, 150a, and 152a, are arranged in parallel on the overall interior surface.

[0033] The driving force of the fifth-axis motor 148 is transmitted to the fifth-axis 138 via the timing belt 154. The timing belt 154 is configured to support the motor shaft 148a of the fifth-axis motor 148 and the fifth-axis 138 that rotates the wrist unit 136. Thus, by driving the fifth-axis motor 148, the fifth-axis 138 can be rotated.

[0034] As described above, the fifth axis 138 is driven to rotate by the fifth axis motor 148, and thus, while being decelerated by the wave reducer 170, the driving force is transmitted to the wrist unit 136. Consequently, the wrist unit 136 rotates relative to the holding arm 132 while being decelerated by the fifth axis 138 and the wave reducer 170. Furthermore, in Figure 2 and Figure 3 In the diagram, shaded lines are marked for each component that moves together with axis 5 138.

[0035] like Figure 3As shown, the wave reducer 170 has a bearing 172, a flexible gear (external gear) 174, and a rigid gear (internal gear) 176. In the wave reducer 170, the outer rigid gear 176 is fixed, and the flexible gear 174, which is disposed inside the rigid gear 176, rotates as a wrist unit 136.

[0036] The driving force of the sixth axis motor 150 is transmitted to the first intermediate shaft 160 via the timing belt 156. The first intermediate shaft 160 is coaxially arranged with the fifth axis 138. The timing belt 156 is configured to support the motor shaft 150a of the sixth axis motor 150 and the first intermediate shaft 160.

[0037] The first gear 162a is a bevel gear mounted on the first intermediate shaft 160. The second gear 162b is a bevel gear mounted coaxially on the sixth shaft 140 and meshes with the first gear 162a. Therefore, when the sixth shaft motor 150 is driven, the first gear 162a rotates together with the first intermediate shaft 160, and the second gear 162b, which meshes with the first gear 162a, rotates together with the sixth shaft 140. Thus, by driving the sixth shaft motor 150, the sixth shaft 140 can be rotated.

[0038] The sixth axis 140 transmits driving force to the plate 168 while being slowed down by the wave reducer 180. A first hand 142 is mounted on the plate 168. Thus, the first hand 142 rotates in a direction orthogonal to the rotation direction of the wrist unit 136. Furthermore, in Figure 2 and Figure 3 In the diagram, the components that move together with axis 6 140 are marked with shaded lines.

[0039] like Figure 3 As shown, the wave reducer 180 has a bearing 182, a flexible gear (external gear) 184, and a rigid gear (internal gear) 186. In the wave reducer 180, the flexible gear 184 is fixed to the wrist unit 136, and the rigid gear 186, which is disposed outside the flexible gear 184, rotates as a sixth axis 140.

[0040] Additionally, the sixth axis 140 is cylindrical as shown in the figure, and the seventh axis 144 is coaxially disposed inside it. Furthermore, the sixth axis 140 and the seventh axis 144 are mounted on the wrist unit 136.

[0041] The driving force of the 7th axis motor 152 is transmitted to the second intermediate shaft 164 via the timing belt 158. The second intermediate shaft 164 is coaxially arranged with the 5th axis 138 and the 1st intermediate shaft 160. The timing belt 158 ​​is configured to support the motor shaft 152a of the 7th axis motor 152 and the second intermediate shaft 164.

[0042] The third gear 166a is a bevel gear mounted coaxially on the second intermediate shaft 164, and is coaxial with the first gear 162a. The fourth gear 166b is a bevel gear mounted coaxially on the seventh shaft 144, and is coaxial with the second gear 162b, and meshes with the third gear 166a.

[0043] Therefore, when the 7th axis motor 152 is driven, the 3rd gear 166a rotates together with the 2nd intermediate shaft 164, and the 4th gear 166b, which meshes with the 3rd gear 166a, rotates together with the 7th axis 144. Thus, by driving the 7th axis motor 152, the 7th axis 144 can be rotated.

[0044] The seventh shaft 144 transmits driving force to the plate 169 while being slowed down by the wave reducer 190. A second hand 146 is mounted on the plate 169. Thus, the second hand 146 rotates coaxially with the first hand 142. Furthermore, in Figure 2 and Figure 3 In the diagram, the components that move together with axis 7 144 are marked with shaded lines.

[0045] like Figure 3 As shown, the wave reducer 190 has a bearing 192, a flexible gear (external gear) 194, and a rigid gear (internal gear) 196. In the wave reducer 190, the flexible gear 194 is fixed, and the rigid gear 196, which is disposed outside the flexible gear 194, rotates as a seventh shaft 144.

[0046] Thus, in the vertical multi-joint robot 100, three motors, namely the fifth-axis motor 148, the sixth-axis motor 150, and the seventh-axis motor 152, are respectively housed in parallel within the retaining arm 132.

[0047] Furthermore, in the wrist unit 136, a first intermediate shaft 160, a second intermediate shaft 164, a first gear 162a, and a third gear 166a are arranged coaxially with the fifth shaft 138. Moreover, in the wrist unit 136, a sixth shaft 140, a seventh shaft 144, a second gear 162b, and a fourth gear 166b are arranged coaxially.

[0048] Therefore, according to the vertical multi-joint robot 100, by arranging the components as described above, three motors can be housed in the retaining arm (first arm) 132. Thus, even when using two hands with the first hand 142 and the second hand 146 mounted on the wrist unit 136, the wrist unit 136 can be made lightweight and space-saving.

[0049] The preferred embodiments of the present invention have been described above with reference to the accompanying drawings. However, it is self-evident that the present invention is not limited to substrate handling applications. The present invention is a versatile vertical articulated robot that can be used in operations and loading applications within confined spaces. It is obvious that those skilled in the art will conceive of various modifications or alterations within the scope of the claims, and these modifications or alterations naturally fall within the technical scope of the present invention.

[0050] Industrial availability

[0051] This invention can be used as a vertical multi-jointed robot with two hands.

Claims

1. A vertical multi-joint robot, characterized in that, This vertical multi-joint robot has the following features: 1st arm; A wrist unit, which is connected to the first arm and is equipped with a first hand and a second hand; A wrist pivot that causes the wrist unit to rotate in a direction that is tilted relative to the first arm. The first hand shaft is mounted on the wrist unit, causing the first hand to rotate in a direction orthogonal to the rotation direction of the wrist unit; The second hand axis is mounted on the wrist unit and rotates the second hand coaxially with the first hand axis; A wrist axis motor, a first hand axis motor, and a second hand axis motor are the drive sources for the wrist axis, the first hand axis, and the second hand axis, respectively, housed in the first arm and arranged in parallel. The first intermediate shaft, which is coaxially configured with the wrist shaft, receives driving force from the first hand shaft motor; The first gear is mounted on the first intermediate shaft; The second gear is mounted coaxially on the first hand shaft and meshes with the first gear; The second intermediate shaft, which is coaxially configured with the wrist shaft and the first intermediate shaft, receives driving force from the second hand shaft motor; The third gear, which is coaxially mounted on the second intermediate shaft; and The fourth gear is mounted coaxially on the second hand shaft and meshes with the third gear.

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