A method for calibrating brightness of a cross furnace platform of a single crystal silicon growth furnace and a calibration device thereof

Abstract

The present application relates to the technical field of single crystal silicon growth furnace temperature detection, and relates to a single crystal silicon growth furnace cross furnace platform brightness calibration method and a calibration device thereof.The single crystal silicon growth furnace cross furnace platform brightness calibration method comprises a light source controller, the light source controller is electrically connected with a standard backlight plate through a data line, two mounting holes are symmetrically formed on the standard backlight plate, and a pressing locking mechanism is fixedly installed in the mounting hole.The present application realizes brightness calibration through cross furnace platform reference alignment and experience offset migration, converts manual temperature adjustment experience into transferable digital parameters, decouples brightness calibration and power control in the initial investment stage, breaks through the traditional trial-and-error mode, dynamically adjusts power parameters in combination with real-time brightness data, shortens the crystal growth difficulty period, realizes quick installation and disassembly of the standard backlight plate through the setting of the pressing locking mechanism, realizes suction heat dissipation, suction dust removal and the formation of negative pressure in the arc-shaped sleeve through the setting of the heat dissipation and dust removal mechanism, and improves the installation stability of the arc-shaped sleeve.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of single crystal silicon growth furnace calibration, and particularly relates to a single crystal silicon growth furnace cross-furnace platform brightness calibration method and a calibration device thereof. BACKGROUND

[0002] The single crystal silicon rod is an important raw material for the semiconductor and photovoltaic industries, and the use amount of the single crystal silicon rod is very large in the production of photovoltaic modules. At present, the main methods for producing the single crystal silicon rod are the Czochralski method and the zone melting method. The Czochralski method grows high-quality single crystal silicon rods from molten silicon, and has the advantages of high maturity and controllable cost, and is the dominant technology for preparing single crystal silicon. The main process flow of the Czochralski method includes charging and melting, seed crystal fusion, necking and crystal pulling, shoulder growth, diameter growth and tailing, and the furnace temperature needs to be accurately controlled in the preparation of the single crystal silicon rod by the Czochralski method. At present, the industry generally uses an industrial camera to capture the liquid surface brightness to indirectly deduce the furnace temperature, and the calibration and deduction process has the following defects:

[0003] 1. When the industrial camera is used to capture the liquid surface brightness to indirectly deduce the furnace temperature, the accuracy is limited by the light transmittance of the observation window quartz glass. The light transmittance of the quartz glass is irreversibly changed when the furnace is disassembled and cleaned. After the furnace is restarted, the light transmittance fluctuation of the camera and the power drift caused by the heat field cleaning are superimposed, the brightness-power double parameter is misaligned in the first investment stage, the brightness data benchmark drifts between different batches, and the brightness data cannot be directly used for temperature control model, which significantly reduces the crystal growth rate in the first investment.

[0004] 2. When the above method is used to detect the furnace surface temperature of the single crystal silicon growth furnace, the artificial dependence is strong. The initial temperature needs to be set based on the artificial experience, and the visual system is calibrated in reverse after the crystal growth. The process is usually implemented after the crystal pulling stage is completed. SUMMARY

[0005] The purpose of the application is to provide a single crystal silicon growth furnace cross-furnace platform brightness calibration method and a calibration device thereof which are simple in structure and reasonable in design.

[0006] The application achieves the above-mentioned purpose through the following technical solutions:

[0007] A single crystal silicon growth furnace cross-furnace platform brightness calibration device, comprising a light source controller, the light source controller is electrically connected with a standard backlight plate through a data line, two mounting holes are symmetrically formed on the standard backlight plate, a pressing and locking mechanism is fixedly installed in the mounting hole, a square fixing box is sleeved outside the standard backlight plate, an arc sleeve is fixedly installed on one side of the square fixing box, the arc sleeve and the square fixing box are communicated, and a heat dissipation and dust removal mechanism is arranged between the inner wall of the square fixing box and the standard backlight plate.

[0008] The heat dissipation dust removal mechanism comprises a suction box fixedly installed on the inner wall of the square fixed box, a hole corresponding to the inner cavity of the arc sleeve is formed in the center of the suction box, the inner part of the suction box is a cavity structure, two baffle plates are fixedly installed in the suction box in a symmetrical manner, and the two baffle plates divide the inner part of the suction box into two cavities.

[0009] Preferably, a plurality of heat dissipation fins are fixedly installed on the inner wall of the square fixed box in a symmetrical manner, a plurality of positioning grooves and communication holes are formed on the two sides of the standard backlight panel in a symmetrical manner, and the positioning grooves are in sliding connection with the heat dissipation fins.

[0010] Preferably, a plurality of suction holes are uniformly formed in the side wall of the central hole of the suction box close to the suction assembly, and a one-way valve is fixedly installed in the middle part of each baffle plate.

[0011] Preferably, the suction assembly comprises a micro motor fixedly installed on the bottom edge of the inner wall of the suction box, the output end of the micro motor is fixedly connected with the lower part of a rotating shaft close to the micro motor, a plurality of rotating shafts are rotatably connected to the bottom surface of the inner wall of the suction box in a uniform manner, a suction blade is fixedly sleeved on the upper part of each rotating shaft, a belt wheel is fixedly sleeved on the middle and lower parts of each rotating shaft, and the outer parts of the plurality of belt wheels are jointly meshed with a toothed belt.

[0012] Preferably, a plurality of exhaust holes are uniformly formed in one side edge of the top of the suction box, a plurality of air inlet holes are uniformly formed in the other side edge of the top of the suction box, and the exhaust holes and the air inlet holes one-to-one correspond to the positions of the communication holes.

[0013] Preferably, the pressing and locking mechanism comprises two clamping boxes fixedly installed on the top of the suction box in a symmetrical manner, the inner parts of the two clamping boxes are cavities, and a rectangular hole is formed in the center of the top of each clamping box, and a locking assembly is arranged in the inner part of each clamping box.

[0014] Preferably, the locking assembly comprises a locking block clamped in the inner part of the clamping box in a movable manner, a cylindrical body is fixedly installed on the top center of the locking block, a second fixing ring is rotatably sleeved on the lower part of the cylindrical body, the second fixing ring is fixedly installed on the inner wall of the mounting hole, a cam groove is formed in the outer wall of the cylindrical body, a movable ring is movably sleeved on the outer part of the cylindrical body, a fixing hole is formed in the movable ring, a first fixing ring is fixedly installed on the inner wall of the fixing hole, a guide rod is movably arranged in the cam groove and penetrates through the center of the first fixing ring in a movable manner, a mounting ring is fixedly sleeved on the middle part of the guide rod, a second spring is sleeved on the outer part of the guide rod, the second spring is arranged between the mounting ring and the first fixing ring, and one end of the guide rod is slidably arranged in the cam groove.

[0015] Preferably, a plurality of fixed rods are fixedly installed on the top of the movable ring, and a plurality of fixed rods are fixedly installed on the top of the movable ring.

[0016] Preferably, the button top end is out of the mounting hole top, a plurality of connecting blocks are fixedly installed in the upper inner wall of the mounting hole, a second fixing block is fixedly installed between the connecting blocks, and a first spring is fixedly installed between the second fixing block and the button.

[0017] A single crystal silicon growth furnace cross furnace platform brightness calibration method adopts the single crystal silicon growth furnace cross furnace platform brightness calibration device, and comprises the following steps:

[0018] S1, equipment assembly: first, install the standard backlight plate in the square fixed box, then, the arc sleeve is sleeved on the industrial camera observation window of the reference single crystal silicon growth furnace;

[0019] S2, dust removal and heat dissipation: the dust removal and heat dissipation mechanism is used for suction, which realizes dust removal and heat dissipation;

[0020] S3, reference furnace platform parameter calibration: before pre-fusion, the first standard brightness is obtained by using the cooperation of the light source controller and the screen brightness meter, the visual system parameters are read synchronously, and the first brightness offset value is recorded, then the furnace is fused, the optimal brightness and power relationship are determined by artificial temperature adjustment, the visual system parameters at this time are recorded, and the second brightness offset value is defined, then the experience offset amount is calculated according to the formula;

[0021] S4, target furnace platform parameter migration: when the target furnace platform parameters need to be calibrated, the same standard backlight plate is used by using the cooperation of the light source controller and the screen brightness meter, and the visual system parameters are dynamically adjusted, so that the measurement value is forced to match the first standard brightness, the experience offset amount is directly applied to the target furnace platform, the deviation parameter is inherited, and the final offset value of the target furnace platform is obtained by adding the current offset value and the experience offset amount.

[0022] The beneficial effects of the present application are:

[0023] 1. The present application realizes brightness calibration by cross furnace platform reference alignment and experience offset migration, converts the artificial temperature adjustment experience into transferable digital parameters, so that the on-site personnel can obtain accurate and reliable brightness before feeding, the brightness calibration and power decoupling control are realized in the first feeding stage, the traditional trial and error mode is broken through, the power parameters are dynamically adjusted combined with real-time brightness data, the temperature adjustment frequency in the first feeding stage is effectively reduced, the crystallization difficulty period is significantly shortened, and the production efficiency is improved.

[0024] 2. The present application is installed into the square fixed box by pressing the locking mechanism, and the standard backlight panel can be disassembled by pressing the button again, which is simple to install and disassemble, and has higher stability compared with the direct placement into the square fixed box, and ensures the position of the standard backlight panel installed in the square fixed box, that is, the position of the standard backlight panel and the industrial camera is fixed, and the test error is reduced.

[0025] 3. The present application is installed into the square fixed box by pressing the locking mechanism, and the standard backlight panel can be disassembled by pressing the button again, which is simple to install and disassemble, and has higher stability compared with the direct placement into the square fixed box, and ensures the position of the standard backlight panel installed in the square fixed box, that is, the position of the standard backlight panel and the industrial camera is fixed, and the test error is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 is the overall structure of the present application;

[0027] Figure 2 is the local structure of the present application;

[0028] Figure 3 is the local structure of the present application;

[0029] Figure 4 is the square fixed box, the heat dissipation and dust removal mechanism and the heat dissipation fin of the present application;

[0030] Figure 5 is the local structure of the present application;

[0031] Figure 6 is the local structure of the present application; Figure 5 is the local structure of the present application;

[0032] Figure 7 is the local structure of the present application;

[0033] Figure 8 is the local structure of the present application; Figure 7 is the local structure of the present application;

[0034] Figure 9 is the local structure of the present application;

[0035] Figure 10 is the local structure of the present application; Figure 9 is the local structure of the present application;

[0036] Figure 11 is the method flow chart of the present application.

[0037] As shown in the figure, 1, light source controller; 2, arc sleeve; 3, square fixed box; 4, standard backlight panel; 5, press locking mechanism; 51, clamping box; 52, No. 1 spring; 53, button; 54, fixed rod; 55, locking assembly; 551, movable ring; 552, mounting ring; 553, No. 1 fixed ring; 554, guide rod; 555, cam groove; 556, cylinder; 557, locking block; 56, No. 2 fixed ring; 57, connecting block; 58, No. 2 fixed block; 6, heat dissipation and dust removal mechanism; 61, suction box; 62, suction assembly; 621, rotating shaft; 622, suction blade; 623, toothed belt; 624, pulley; 625, micro motor; 63, one-way valve; 64, exhaust hole; 65, air inlet hole; 66, partition; 67, suction hole; 7, heat dissipation fin; 8, positioning groove; 9, communication hole; 10, mounting hole. DETAILED DESCRIPTION

[0038] The application will be described in further detail below with reference to the drawings. It is necessary to point out here that the following detailed description is only used to further illustrate the application and cannot be understood as limiting the scope of protection of the application. Those skilled in the art can make some non-essential improvements and adjustments to the application according to the above application content.

[0039] Embodiment: please refer to Figure 1 , Figure 2 and Figure 3 , a single crystal silicon growth furnace cross furnace platform brightness calibration device, comprising a light source controller 1, the light source controller 1 is electrically connected with a standard backlight panel 4 through a data line, two mounting holes 10 are symmetrically formed on the standard backlight panel 4, a press locking mechanism 5 is fixedly installed inside the mounting hole 10, a square fixed box 3 is sleeved outside the standard backlight panel 4, an arc sleeve 2 is fixedly installed at the center of one side of the square fixed box 3, the arc sleeve 2 and the square fixed box 3 are communicated, and a heat dissipation and dust removal mechanism 6 is arranged between the inner wall of the square fixed box 3 and the standard backlight panel 4; a plurality of heat dissipation fins 7 are symmetrically fixedly installed on the inner wall of the square fixed box 3, a plurality of positioning grooves 8 and communication holes 9 are symmetrically formed on both sides of the standard backlight panel 4, the positioning grooves 8 are slidably connected with the heat dissipation fins 7, the model of the standard backlight panel 4 is FS-S-180X120W, which is used to provide uniform brightness, and the model of the light source controller 1 is FS-GWPX-24V-2H, which is used to provide reliable brightness driving for the standard backlight panel 4.

[0040] In use, the light source controller 1 is used to adjust the brightness of the standard backlight panel 4, the mounting hole 10 is used to install the pressing and locking mechanism 5, the pressing and locking mechanism 5 is used to realize the quick installation and removal of the standard backlight panel 4, and ensure that the standard backlight panel 4 is fixed in the installation position inside the square fixing box 3 each time. Compared with the fixed distance of the industrial camera, the arc sleeve 2 is used to fit onto the protective window of the industrial camera. The heat dissipation and dust removal mechanism 6 is used to perform suction and dust removal between the arc sleeve 2 and the protective window of the industrial camera, while ensuring heat dissipation of the standard backlight panel 4, and realizing negative pressure suction between the arc sleeve 2 and the protective window of the industrial camera, ensuring the installation stability of the arc sleeve 2 and the square fixing box 3 on it.

[0041] Please see Figure 2 , Figure 4 , Figure 7 , Figure 8 , Figure 9 and Figure 10 The pressing and locking mechanism 5 includes two snap-fit ​​boxes 51 symmetrically fixedly installed on the top of the suction box 61. Both snap-fit ​​boxes 51 are hollow inside, and each snap-fit ​​box 51 has a rectangular hole at its top center. A locking assembly 55 is installed inside each snap-fit ​​box 51. The locking assembly 55 includes a locking block 557 movably snapped into the snap-fit ​​box 51. A cylinder 556 is fixedly installed at the top center of the locking block 557. A second fixing ring 56 is rotatably sleeved on the lower part of the cylinder 556. The second fixing ring 56 is fixedly installed at the bottom of the inner wall of the mounting hole 10. A protrusion is formed on the outer wall of the cylinder 556. The wheel groove 555 and the cam groove 555 include a vertical section and an inclined section. The inclined section is deeper than the vertical section. A movable ring 551 is movably sleeved on the outside of the cylinder 556. A fixing hole is opened on the movable ring 551. A first fixing ring 553 is fixedly installed on the inner wall of the fixing hole. A guide rod 554 is movably passed through the center of the first fixing ring 553. An installation ring 552 is fixedly sleeved in the middle of the guide rod 554. A second spring is sleeved on the outside of the guide rod 554. The second spring is located between the installation ring 552 and the first fixing ring 553. One end of the guide rod 554 is slidably located inside the cam groove 555.

[0042] Please see Figure 8 , Figure 9 and Figure 10 Several fixing rods 54 are fixedly installed on the top of the movable ring 551. A button 53 is fixedly installed on the top of the multiple fixing rods 54. The top of the button 53 protrudes from the top of the mounting hole 10. Several connecting blocks 57 are fixedly installed on the upper inner wall of the mounting hole 10. A second fixing block 58 is fixedly installed between the multiple connecting blocks 57. A first spring 52 is fixedly installed between the second fixing block 58 and the button 53.

[0043] In use, first, the positioning groove 8 is aligned with the heat dissipation fin 7, then the standard backlight panel 4 is inserted into the square fixed box 3, the arrangement between the positioning groove 8 and the heat dissipation fin 7 ensures the accurate positioning and installation of the standard backlight panel 4, until the bottom of the standard backlight panel 4 is attached to the top of the heat dissipation and dust removal mechanism 6, while being inserted downward, the locking block 557 is inserted into the rectangular hole at the top of the clamping box 51, at this time, the button 53 is pressed downward, the fixed rod 54 and the movable ring 551 thereon are driven to move downward, the one-way spring 52 is compressed synchronously, the movable ring 551 synchronously drives the guide rod 554 to move downward, when the guide rod 554 moves downward, the guide rod 554 is extruded in the inclined section of the cam groove 555, the cylindrical body 556 and the locking block 557 thereon are driven to rotate by 90 degrees through extrusion, so that the locking block 557 is locked inside the clamping box 51, realizing the quick installation of the standard backlight panel 4, releasing the button 53, under the driving of the restoring force of the one-way spring 52, the button 53 and the fixed rod 54 thereon are synchronously driven to move upward, at the same time, the movable ring 551 and the guide rod 554 thereon are driven to move upward, at this time, the guide rod 554 moves upward along the vertical section of the cam groove 555 until it moves to the top, the depth of the inclined section gradually decreases from the top to the bottom until the depth of the inclined section is consistent with the depth of the vertical section, and there is a step between the top of the inclined section and the vertical section, which ensures that after the guide rod 554 rises to the top along the vertical section, it directly enters the next inclined section, the installation ring 552 and the guide rod 554 thereon protrude into the inclined section, facilitating the sliding of the guide rod 554 along the inclined section of the cam groove 555, pressing the button 53 again realizes the rotation of the locking block 557 by 90 degrees again, and the unlocking of the locking block 557 from the clamping box 51, realizing the release and quick disassembly of the standard backlight panel 4.

[0044] Please refer to Figure 3 , Figure 4 and Figure 5 , the heat dissipation and dust removal mechanism 6 includes a suction box 61 fixedly installed on the inner wall of the square fixed box 3, the suction box 61 is hollow inside, a hole corresponding to the inner cavity of the arc-shaped sleeve 2 is formed in the center of the suction box 61, two baffles 66 are fixedly installed inside the suction box 61, the two baffles 66 divide the inside of the suction box 61 into two cavities, a suction assembly 62 is arranged in one side cavity, a plurality of suction holes 67 are uniformly formed in the side wall of the center hole of the suction box 61 close to the suction assembly 62, a one-way valve 63 is fixedly installed in the middle of each baffle 66, the gas flows in one direction into the cavity where the suction assembly 62 is installed, the bottom edge of the standard backlight panel 4 is sealingly attached to the top of the suction box 61, avoiding the gas leakage between the standard backlight panel 4 and the suction box 61.

[0045] Please refer to Figure 5 and Figure 6The suction assembly 62 comprises a micro motor 625 fixedly installed on the bottom side of the inner wall of the suction box 61, the output end of the micro motor 625 is fixedly connected with the lower part of a rotating shaft 621 close to the micro motor 625, the bottom surface of the inner wall of the suction box 61 is uniformly connected with a plurality of rotating shafts 621, the upper part of each rotating shaft 621 is fixedly sleeved with a suction blade 622, the middle and lower part of each rotating shaft 621 is fixedly sleeved with a belt pulley 624, the outer part of each belt pulley 624 is jointly meshed with a toothed belt 623, a plurality of exhaust holes 64 are uniformly formed in one side edge of the top of the suction box 61, a plurality of air inlet holes 65 are uniformly formed in the other side edge of the top of the suction box 61, the exhaust holes 64 and the air inlet holes 65 one-to-one correspond to the positions of the communication holes 9, the suction blade 622 is located directly below the exhaust hole 64, which is convenient for exhaust through the exhaust hole 64, and the micro motor 625 is connected with a switch and a power supply (not shown in the figure) through wires, and the wires are drawn out from the exhaust hole 64.

[0046] In use, after the standard backlight panel 4 is installed inside the square fixed box 3, the arc sleeve 2 on the square fixed box 3 is sleeved on the industrial camera protective window at this time, the industrial camera protective window corresponds in shape to the arc sleeve 2, at this time, the micro motor 625 is started, the micro motor 625 drives the rotating shaft 621 and the belt pulley 624 thereon to rotate, in turn synchronously drives the toothed belt 623 to rotate, and at the same time realizes the synchronous rotation of the plurality of suction blades 622, and uses the plurality of suction blades 622 to suck, when sucking, the air between the arc sleeve 2 and the industrial camera protective window is sucked out, realizing the suction and dust removal between the arc sleeve 2 and the industrial camera protective window, which is conducive to the suction and dust removal of the industrial camera protective window, and at the same time after suction, realizing the negative pressure suction inside the arc sleeve 2, ensuring that the arc sleeve 2 is stably installed on the industrial camera protective window, and at the same time of suction, the cold air in the outside world flows into the air inlet hole 65 from the communication hole 9, then enters the suction box 61, in turn, the cold air takes away the heat on the standard backlight panel 4, then the air unidirectionally flows into the cavity at the position of the suction assembly 62 from the one-way valve 63, and immediately the cold air is discharged from the exhaust hole 64, realizing the cooling and heat dissipation of the standard backlight panel 4.

[0047] It should be noted that the single crystal silicon growth furnace cross furnace platform brightness calibration device, in use, first align the positioning groove 8 with the heat dissipation fin 7, then insert the standard backlight plate 4 into the square fixed box 3, the positioning groove 8 and the heat dissipation fin 7 are provided to ensure the accurate positioning and installation of the standard backlight plate 4, until the bottom of the standard backlight plate 4 is attached to the top of the heat dissipation and dust removal mechanism 6, then press the button 53 in the pressing locking mechanism 5, use the pressing locking mechanism 5 to clamp and lock the clamping box 51, press the button 53 in the pressing locking mechanism 5 again, then the pressing locking mechanism 5 is unlocked, the standard backlight plate 4 is convenient to disassemble, the standard backlight plate 4 is quickly installed and disassembled, and the pressing locking mechanism 5 is provided to ensure that the installation position of the standard backlight plate 4 is fixed each time, so as to ensure the position fixation of the standard backlight plate 4 and the industrial camera, reduce the detection accuracy, after installation, start the micro motor 625, the micro motor 625 drives the rotating shaft 621 and the belt wheel 624 thereon to rotate, in turn synchronously drive the toothed belt 623 to rotate, at the same time, realize the synchronous rotation of the plurality of suction blades 622, use the plurality of suction blades 622 to suck, during suction, realize the stable installation of the arc sleeve 2 to the industrial camera protection window, at the same time of suction, realize the negative pressure in the arc sleeve 2, ensure the stability of the installation of the arc sleeve 2.

[0048] Please refer to Figure 11 A single crystal silicon growth furnace cross furnace platform brightness calibration method, using the single crystal silicon growth furnace cross furnace platform brightness calibration device, the single crystal silicon growth furnace cross furnace platform brightness calibration method comprises the following steps:

[0049] S1, equipment assembly: first, use the pressing locking mechanism 5 to install the standard backlight plate 4 into the square fixed box 3, after installation, ensure that the standard backlight plate 4 is attached to the heat dissipation and dust removal mechanism 6, then sleeve the arc sleeve 2 to the industrial camera observation window on the reference single crystal silicon growth furnace.

[0050] S2, dust removal and heat dissipation: after sleeving, use the heat dissipation and dust removal mechanism 6 to suck, realize dust removal and heat dissipation, after suction, the arc sleeve 2 and the industrial camera observation window form a negative pressure, realize the stable installation of the arc sleeve 2, the square fixed box 3 and the standard backlight plate 4.

[0051] S3, reference furnace platform parameter calibration: before pre-fusion, use the cooperation of the light source controller 1 and the screen brightness meter to adjust the standard backlight plate 4 to the specified brightness, use the brightness of the standard backlight plate 4 as the measurement value of the industrial camera, record as the first standard brightness, synchronously read the visual system parameters, record as the first brightness offset value, then perform the furnace melting of the single crystal silicon growth furnace, determine the optimal brightness and power relationship by artificial temperature adjustment, record the visual system parameters at this time, define as the second brightness offset value, then calculate the empirical offset according to the formula, that is, empirical offset = second brightness offset value - first brightness offset value;

[0052] S4, target furnace parameter migration: when the target furnace parameter needs to be calibrated, the standard backlight 4 is adjusted to the same specified brightness in the above steps by using the cooperation of the light source controller 1 and the screen brightness meter, the visual system parameter is dynamically adjusted, the measured value is forced to match the first standard brightness, at this time the same brightness value as the first brightness offset value in the above steps can be obtained, the brightness value is used as the current offset value, the experience offset is directly applied on the target furnace to perform the deviation parameter inheritance, at this time the current offset value and the experience offset are added to obtain the final offset value of the target furnace, that is, the final offset value = current offset value + experience offset, the temperature of the single crystal silicon growth furnace is calculated according to the brightness data of the final offset value, and the power parameter of the single crystal silicon growth furnace is corrected in real time based on the brightness data.

[0053] The above-described embodiments only express several embodiments of the present application, which are described in detail and specifically, but cannot be understood as the limitation of the patent scope of the present application. It should be noted that for ordinary skilled persons in the art, several modifications and improvements can be made without departing from the concept of the present application, which are all within the protection scope of the present application.

Claims

1. A single crystal silicon growth furnace cross bench brightness calibration device, comprising a light source controller (1), characterized in that: The light source controller (1) is electrically connected with the standard backlight plate (4) through a data line, two mounting holes (10) are symmetrically formed on the standard backlight plate (4), a pressing locking mechanism (5) is fixedly installed in the mounting hole (10), a square fixing box (3) is arranged outside the standard backlight plate (4), an arc sleeve (2) is fixedly installed on one side of the square fixing box (3), the arc sleeve (2) and the square fixing box (3) are communicated, and a heat dissipation and dust removal mechanism (6) is arranged between the inner wall of the square fixing box (3) and the standard backlight plate (4). The heat dissipation and dust removal mechanism (6) comprises a suction box (61) fixedly installed on the inner wall of the square fixing box (3), a hole corresponding to the inner cavity of the arc sleeve (2) is formed in the center of the suction box (61), the suction box (61) is a hollow structure, two baffle plates (66) are symmetrically fixedly installed in the suction box (61), and the suction box (61) is divided into two cavities by the two baffle plates (66).

2. The brightness calibration device for a cross-chamber stage of a single crystal silicon growth furnace according to claim 1, characterized in that: A plurality of heat dissipation fins (7) are symmetrically fixedly installed on the inner wall of the square fixing box (3), a plurality of positioning grooves (8) and communication holes (9) are symmetrically formed on the two sides of the standard backlight plate (4), and the positioning grooves (8) are in sliding connection with the heat dissipation fins (7).

3. The brightness calibration device for a cross-chamber stage of a single crystal silicon growth furnace according to claim 2, characterized in that: A plurality of suction holes (67) are uniformly formed in the side wall of the central hole of the suction box (61) close to the suction assembly (62), and a one-way valve (63) is fixedly installed in the middle of each baffle plate (66).

4. The brightness calibration device for a cross-chamber stage of a single crystal silicon growth furnace according to claim 3, characterized in that: The suction assembly (62) comprises a micro motor (625) fixedly installed on the bottom surface of the inner wall of the suction box (61), the output end of the micro motor (625) is fixedly connected with the lower part of a rotating shaft (621) close to the micro motor (625), a plurality of rotating shafts (621) are uniformly rotatably connected to the inner wall of the suction box (61), a suction blade (622) is fixedly sleeved on the upper part of each rotating shaft (621), a belt wheel (624) is fixedly sleeved on the middle and lower parts of each rotating shaft (621), and a toothed belt (623) is meshed with the plurality of belt wheels (624).

5. The brightness calibration device for a crossbar of a single crystal silicon growth furnace according to claim 4, characterized in that: A plurality of exhaust holes (64) are uniformly formed in one side edge of the top of the suction box (61), a plurality of air inlet holes (65) are uniformly formed in the other side edge of the top of the suction box (61), and the exhaust holes (64) and the air inlet holes (65) correspond to the positions of the communication holes (9) one by one.

6. The brightness calibration device for a crossbar of a single crystal silicon growth furnace according to claim 1, characterized in that: The pressing locking mechanism (5) comprises two clamping boxes (51) fixedly installed on the top of the suction box (61), the interiors of the two clamping boxes (51) are hollow, rectangular holes are formed in the centers of the tops of the two clamping boxes (51), and a locking assembly (55) is arranged in the clamping box (51).

7. The brightness calibration device for a cross-chamber stage of a single crystal silicon growth furnace according to claim 6, characterized in that: The locking assembly (55) includes a locking block (557) movably clamped in the clamping box (51), a cylinder (556) is fixedly installed at the top center of the locking block (557), a No. 2 fixed ring (56) is rotatably sleeved at the lower part of the cylinder (556), the No. 2 fixed ring (56) is fixedly installed on the inner wall of the bottom of the mounting hole (10), a cam groove (555) is formed on the outer wall of the cylinder (556), a movable ring (551) is movably sleeved on the outer part of the cylinder (556), a fixed hole is formed on the movable ring (551), a No. 1 fixed ring (553) is fixedly installed on the inner wall of the fixed hole, a guide rod (554) is movably penetrated through the center of the No. 1 fixed ring (553), an installation ring (552) is fixedly sleeved on the middle part of the guide rod (554), a second spring is sleeved on the outer part of the guide rod (554), the second spring is arranged between the installation ring (552) and the No. 1 fixed ring (553), and one end of the guide rod (554) is slidably arranged in the cam groove (555).

8. The brightness calibration device for a cross-chamber stage of a single crystal silicon growth furnace according to claim 7, characterized in that: A plurality of fixed rods (54) are fixedly installed on the top of the movable ring (551), and a plurality of fixed rods (54) are fixedly installed on the top of the movable ring (551).

9. The brightness calibration device for a crossbar of a single crystal silicon growth furnace according to claim 8, characterized in that: The top end of the button (53) penetrates out of the top of the mounting hole (10), a plurality of connecting blocks (57) are fixedly installed on the inner wall of the upper part of the mounting hole (10), a No. 2 fixed block (58) is fixedly installed between the plurality of connecting blocks (57), and a No. 1 spring (52) is fixedly installed between the No. 2 fixed block (58) and the button (53).

10. A method for calibrating the brightness of a cross-lane stage of a single crystal silicon growth furnace, using the brightness calibration device for the cross-lane stage of the single crystal silicon growth furnace according to any one of claims 1-9, characterized in that: The single crystal silicon growth furnace cross furnace platform brightness calibration method comprises the following steps: S1, equipment assembly: first, install the standard backlight panel (4) in the square fixed box (3), then sleeve the arc sleeve (2) on the industrial camera observation window of the reference single crystal silicon growth furnace; S2, dust removal and heat dissipation: use the dust removal and heat dissipation mechanism (6) to suck and achieve dust removal and heat dissipation; S3, reference furnace platform parameter calibration: before preheating, use the light source controller (1) and the screen brightness meter together to obtain the first standard brightness, read the visual system parameters at the same time, record the first brightness offset value, then heat the furnace and the material, determine the optimal brightness and power relationship by manual temperature adjustment, record the visual system parameters at this time, define as the second brightness offset value, then calculate the experience offset according to the formula: experience offset = second brightness offset value - first brightness offset value; S4, target furnace platform parameter migration: when the target furnace platform parameter needs to be calibrated, use the light source controller (1) and the screen brightness meter together, use the same standard backlight panel (4), and dynamically adjust the visual system parameters to make the measured value match the first standard brightness, apply the experience offset on the target furnace platform to inherit the deviation parameters, at this time, add the current offset value to the experience offset to obtain the final offset value of the target furnace platform.

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