A control drive device, a control drive method, and an ion source system

Abstract

The application discloses a control driving device, a control driving method and an ion source system. The control driving device comprises a high-voltage power supply, a first switch module, a control module, n second switch modules and n filament power supplies. The input end of the filament power supply is electrically connected with the first end of the corresponding second switch module, and the output end of the filament power supply is electrically connected with the filament of the corresponding magnetron. The filament power supply is used for supplying power to the filament of the magnetron after the corresponding second switch module is turned on. The control module is electrically connected with the control end of the first switch module and the control end of each second switch module, and is used for controlling the on-off of the first switch module and each second switch module in cooperation, so that the magnetrons in the microwave generating system work in turn and individually. The application can realize that one high-voltage power supply supplies power to multiple magnetrons, and does not need to set a high-voltage-resistant switch module, thereby reducing the volume and cost of the control driving device.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a control drive device, control drive method, and ion source system. Background Technology

[0002] As a key device that efficiently converts electrical energy into microwave energy, the magnetron has important applications in semiconductor manufacturing processes.

[0003] In existing technologies, magnetrons typically generate microwaves under the drive of a high-voltage power supply. However, in practical applications, multiple magnetrons often need to work together to improve process efficiency or expand the processing area. Currently, the common approach is to configure a separate high-voltage power supply system for each magnetron. This not only results in complex equipment structures and large space requirements but also significantly increases system costs and maintenance difficulty.

[0004] As semiconductor manufacturing moves towards greater efficiency and integration, achieving stable and efficient power supply from a single high-voltage power source to multiple magnetrons has become a key technological bottleneck restricting the performance improvement and cost control of related equipment, and urgently needs to be addressed. Summary of the Invention

[0005] This invention provides a control drive device, control drive method, and ion source system, which can enable a single high-voltage power supply to power multiple magnetrons without the need for a high-voltage resistant switch module, thus reducing the size and cost of the control drive device.

[0006] According to one aspect of the present invention, a control drive device is provided, which is applied to a microwave generating system comprising at least n magnetrons, wherein n is an integer greater than or equal to 2;

[0007] The control and drive device includes: a high-voltage power supply, a first switch module, a control module, n second switch modules, and n filament power supplies; the filament power supplies are configured in a one-to-one correspondence with the magnetrons, and the second switch modules are configured in a one-to-one correspondence with the filament power supplies;

[0008] The input terminal of the high-voltage power supply is electrically connected to the first terminal of the first switching module, and the output terminal of the high-voltage power supply is electrically connected to the cathode of each of the magnetrons.

[0009] The input terminal of the filament power supply is electrically connected to the first terminal of its corresponding second switch module, and the output terminal of the filament power supply is electrically connected to the filament of its corresponding magnetron; the filament power supply is used to supply power to the filament of the magnetron after its corresponding second switch module is turned on.

[0010] The second terminal of the first switch module and the second terminal of each of the second switch modules are connected to the mains power.

[0011] The control module is electrically connected to the control terminal of the first switch module and the control terminals of each of the second switch modules, and is used to control the coordinated switching on and off of the first switch module and each of the second switch modules, so that the magnetrons in the microwave generating system work sequentially and individually.

[0012] Optionally, the control module is specifically used to: when starting the target magnetron, first control the second switch module corresponding to the target magnetron to be turned on, and after a first set time, control the first switch module to be turned on to connect the high-voltage power supply so that the target magnetron can start working; when stopping the target magnetron from working, first control the second switch module corresponding to the target magnetron to be turned off, and after a second set time, control the first switch module to be turned off; wherein, the target magnetron is any one of the multiple magnetrons in the microwave generating system.

[0013] Optionally, the range of the first set duration is 1s to 5s;

[0014] The second set duration is in the range of 2s to 3s.

[0015] Optionally, the microwave generating system includes a first magnetron and a second magnetron;

[0016] The control and drive device includes two second switch modules and two filament power supplies;

[0017] The control module is used to control the two second switch modules and the first switch module to operate in a preset sequence, so that the first magnetron and the second magnetron work alternately.

[0018] Optionally, the output voltage range of each of the filament power supplies is 2V~6V;

[0019] The output voltage range of the high-voltage power supply is -3000V to -10000V.

[0020] Optionally, the model number of the first switch module is the same as that of the second switch module;

[0021] The structure of the first switch module is the same as that of the second switch module.

[0022] According to another aspect of the present invention, a control driving method is provided, which is applied to the control driving device provided in any embodiment of the present invention;

[0023] The control driving method includes:

[0024] The first switching module and each of the second switching modules are controlled to switch on and off in a coordinated manner so that the magnetrons in the microwave generating system can work independently in sequence.

[0025] Optionally, controlling the coordinated switching on and off of the first switching module and each of the second switching modules to enable the magnetrons in the microwave generating system to operate sequentially and individually specifically includes:

[0026] The second switch module corresponding to the current target magnetron is turned on, and after a first set time, the first switch module is turned on to connect the high-voltage power supply and start the current target magnetron to work; wherein, the target magnetron is any one of the multiple magnetrons in the microwave generator system;

[0027] After the current target magnetron has been working for a third set time, the second switch module corresponding to the current target magnetron is first controlled to disconnect, and after the second switch module is disconnected for a second set time, the first switch module is then controlled to disconnect.

[0028] The process involves switching to another target magnetron, then returning to the control of the second switch module corresponding to the current target magnetron to conduct, and after a first set time, controlling the first switch module to conduct again to connect the high-voltage power supply and start the current target magnetron to work.

[0029] Optionally, the range of the first set duration is 1s to 5s;

[0030] The second set duration is in the range of 2s to 3s.

[0031] According to another aspect of the present invention, an ion source system is provided, the ion source system comprising: a microwave generating system, n plasma generating devices, and a control and driving device provided in any embodiment of the present invention;

[0032] The microwave generating system includes n magnetrons;

[0033] The magnetrons are connected to the plasma generating devices in a one-to-one correspondence.

[0034] This invention provides a control and drive device that powers all magnetrons in a microwave generator system with a single high-voltage power supply, enabling sequential operation of multiple magnetrons. This simplifies the structure of the control and drive device and reduces cost and size. Furthermore, this invention uses a second switch module connected between the filament power supply and the mains power. The control module controls the switching on and off of this second switch module to control the operation of the desired magnetron. Instead of placing a switch module between the high-voltage power supply and the magnetron cathode, this eliminates the need for a high-voltage-resistant switch module, allowing multiple magnetrons to operate alternately, further reducing the manufacturing cost of the control and drive device. In summary, the control and drive device provided by this invention allows a single high-voltage power supply to power multiple magnetrons without requiring a high-voltage-resistant switch module, thus reducing the size and cost of the control and drive device.

[0035] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of the present invention, nor is it intended to limit the scope of the invention. Other features of the invention will become readily apparent from the following description. Attached Figure Description

[0036] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0037] Figure 1 This is a schematic diagram of the structure of a control drive device connected to a microwave generating system according to an embodiment of the present invention;

[0038] Figure 2 This is a flowchart illustrating a control driving method according to an embodiment of the present invention;

[0039] Figure 3 This is a flowchart illustrating another control driving method provided according to an embodiment of the present invention;

[0040] Figure 4 This is a flowchart illustrating another control driving method provided according to an embodiment of the present invention;

[0041] Figure 5 This is a schematic diagram of an ion source system provided according to an embodiment of the present invention. Detailed Implementation

[0042] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0043] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0044] Figure 1 This is a schematic diagram of the connection between a control drive device and a microwave generating system according to an embodiment of the present invention. (Refer to...) Figure 1 The control and drive device 100 provided in this embodiment is applied to a microwave generation system 200 including at least n magnetrons 210, where n is an integer greater than or equal to 2.

[0045] The control and drive device 100 provided in this embodiment includes: a high-voltage power supply 110, a first switch module 120, a control module 130, n second switch modules 140, and n filament power supplies 150; each filament power supply 150 is configured in a one-to-one correspondence with a magnetron 210, and each second switch module 140 is configured in a one-to-one correspondence with a filament power supply 150; the input terminal of the high-voltage power supply 110 is electrically connected to the first terminal of the first switch module 120, and the output terminal of the high-voltage power supply 110 is electrically connected to the cathode of each magnetron 210; the input terminal of each filament power supply 150 is electrically connected to the first terminal of its corresponding second switch module 140, and the filament... The output terminal of the power supply 150 is electrically connected to the filament of its corresponding magnetron 210; the filament power supply 150 is used to supply power to the filament of the magnetron 210 after its corresponding second switch module 140 is turned on; the second terminal of the first switch module 120 and the second terminal of each second switch module 140 are connected to the mains power; the control module 130 is electrically connected to the control terminal of the first switch module 120 and the control terminal of each second switch module 140, and the control module 130 is used to control the coordinated on and off of the first switch module 120 and each second switch module 140 so that the magnetron 210 in the microwave generating system works sequentially and individually.

[0046] Specifically, the number of second switch modules 140 is equal to the number of filament power supplies 150, and the number of filament power supplies 150 is equal to the number of magnetrons 210. Each magnetron 210 includes a filament, a cathode, and an anode. The anode is grounded. The cathode in the magnetron 210 is directly connected to the filament, which heats the cathode to cause it to emit electrons.

[0047] In this embodiment, the high-voltage power supply 110 is directly electrically connected to the cathodes of each magnetron 210, without any switching module in between. The high-voltage power supply 110 can output a negative high voltage to provide the necessary electrical energy to the cathodes of the magnetrons 210. The mains output voltage is, for example, 220V AC. After the first switching module 120 is turned on, the high-voltage power supply 110 boosts the mains voltage and can output, for example, a voltage of -4000V to the cathodes of each magnetron 210.

[0048] If the filament of the magnetron 210 is not working, the cathode cannot emit electrons, and the magnetron 210 cannot oscillate. Therefore, when the first switch module 120 is turned on and the second switch module 140 is turned off, the corresponding magnetron 210 will not work. The control module 130 regulates the working state of the magnetron 210 by controlling the on and off states of the first switch module 120 and each of the second switch modules 140. For example, in the initial state (when both the first switch module 120 and each of the second switch modules 140 are off), the control module 130 first turns on the second switch module 140 corresponding to the magnetron 210 that needs to work, and then turns on the first switch module 120, thereby enabling the magnetron to work independently.

[0049] The second switching module 140 only needs to withstand mains voltage (e.g., 220V), which significantly reduces its cost compared to a switching module that withstands high voltage (e.g., -4000V). Therefore, in this embodiment, by placing the second switching module 140 between the filament power supply 150 and the mains power, and using the control module 130 to control its on / off state, the operating state of the magnetron 210 can be controlled. There is no need to place a high-voltage switching module between the high-voltage power supply 110 and the cathode of the magnetron 210, which helps to reduce the overall cost of the control drive device 100.

[0050] Furthermore, in this embodiment, there is only one high-voltage power supply 110, which is connected to the cathodes of multiple magnetrons 210. Through time-division multiplexing control by the first switching module 120 and the second switching module 140, the multiple magnetrons 210 can operate sequentially and individually. Compared to equipping each magnetron 210 with an independent high-voltage power supply, this embodiment significantly simplifies the number of components in the control drive device 100, reducing cost and size.

[0051] This embodiment provides a control and drive device that supplies power to all magnetrons in a microwave generator system via a single high-voltage power supply, enabling sequential operation of multiple magnetrons. This simplifies the structure of the control and drive device and reduces cost and size. Furthermore, this embodiment uses a second switch module connected between the filament power supply and the mains power. The control module controls the on / off state of this second switch module to control the operation of the desired magnetron. Instead of placing a switch module between the high-voltage power supply and the cathode of the magnetron, this eliminates the need for a high-voltage-resistant switch module, allowing multiple magnetrons to operate alternately, further reducing the manufacturing cost of the control and drive device. In summary, the control and drive device provided in this embodiment allows a single high-voltage power supply to power multiple magnetrons without requiring a high-voltage-resistant switch module, thus reducing the size and cost of the control and drive device.

[0052] Optional, continue to refer to Figure 1 The control module 130 is specifically used to: when starting the target magnetron, first control the second switch module 140 corresponding to the target magnetron to be turned on, and after a first set time, control the first switch module 120 to be turned on to connect the high voltage power supply 110 so that the target magnetron can start working; when stopping the target magnetron, first control the second switch module 140 corresponding to the target magnetron to be turned off, and after a second set time, control the first switch module 120 to be turned off; wherein, the target magnetron is any magnetron 210 among the multiple magnetrons in the microwave generating system 200.

[0053] Specifically, the target magnetron can also be understood as the magnetron 210 that needs to work. After the second switch module 140 corresponding to the target magnetron is turned on, the first switch module 120 is turned on. The on-time of the first switch module 120 is the working time of the target magnetron. The on-time of the first switch module 120 can be recorded as the third set time. The third set time is set according to actual needs.

[0054] Before controlling the target magnetron to work, it is necessary to ensure that the first switch module 120 and each of the second switch modules 140 are in the off state.

[0055] In this embodiment, the control module 130 is specifically used to: when starting the target magnetron, turn on the second switch module 140 corresponding to the target magnetron, so that the filament power supply 150 connected to the turned-on second switch module 140 preheats the filament of the target magnetron, and keep the first switch module 120 in the off state; when the second switch module 140 is turned on for a first set time, turn on the first switch module 120, so that the high voltage power supply 110 applies high voltage to the cathode of the target magnetron, causing the target magnetron to generate microwaves; when it is necessary to stop the target magnetron from working, first turn off the corresponding second switch module 140 to cut off the filament power supply, and then, when the second switch module 140 is turned off for a second set time, turn off the first switch module 120 to remove the high voltage power supply 110 from supplying power to the target magnetron.

[0056] This embodiment employs a specific timing sequence for starting and stopping the target magnetron: during startup, the filament is preheated first, and high voltage is applied only after it is fully preheated; during shutdown, the filament is disconnected first, followed by the high voltage. This effectively avoids anode backflushing that might occur if the high voltage is disconnected before the filament, thus preventing cathode damage due to electron backflushing. This timing control ensures that the filament of the target magnetron is fully preheated before high voltage is applied, and effectively prevents anode backflushing when the target magnetron is shut down, greatly improving the magnetron's lifespan and system reliability.

[0057] Optionally, the first set duration ranges from 1s to 5s; the second set duration ranges from 2s to 3s.

[0058] For example, the first set duration can be 1s, 2s, 3s, 4s or 5s, etc., and the second set duration can be 2s, 2.5s or 3s, etc.

[0059] Setting the first preset duration to a range of 1s to 5s ensures that the filament of the target magnetron is fully preheated. Setting the second preset duration to a range of 2s to 3s ensures that the filament has sufficient time to cool down, preventing anode backfire from causing cathode electron emission and thus preventing the target magnetron from stopping work properly.

[0060] In summary, this embodiment sets the first set duration to a range of 1s to 5s and the second set duration to a range of 2s to 3s. This range ensures that most general-purpose magnetrons are fully preheated and cooled, thus ensuring both safety and lifespan while maintaining the system's operating efficiency.

[0061] Optional, continue to refer to Figure 1 The microwave generating system includes a first magnetron and a second magnetron; the control and driving device includes two second switching modules and two filament power supplies; the control module is used to control the two second switching modules and the first switching module to operate in a preset sequence, so that the first magnetron and the second magnetron work alternately.

[0062] Specifically, the first magnetron and the second magnetron each correspond to a second switch module.

[0063] The preset sequence can be as follows: the second switch module corresponding to the first magnetron is turned on, and after a first set time, the first switch module is turned on; after the first magnetron has been working for a third set time, the second switch module corresponding to the first magnetron is turned off, and after a second set time after the corresponding second switch module has been turned off, the first switch module is turned off again; then the second switch module corresponding to the second magnetron is turned on, and after a first set time, the first switch module is turned on to connect the high-voltage power supply so that the second target magnetron can start working; after the second magnetron has been working for a third set time, the second switch module corresponding to the second magnetron is turned off, and after a second set time after the corresponding second switch module has been turned off, the first switch module is turned off, and so on for cyclic control.

[0064] Optionally, the output voltage range of each filament power supply is 2V~6V; the output voltage range of the high voltage power supply is -3000V~-10000V.

[0065] For example, the output voltage of each filament power supply can be 3.3V, the output current can be 10A, and the voltage output of the high voltage power supply can be -4000V.

[0066] Specifically, the output voltage range of each filament power supply is set to 2V~6V, and the output voltage range of the high voltage power supply is -3000V~-10000V. This allows the control and drive device provided in this embodiment to be applicable to magnetrons in various scenarios, control magnetrons in multiple scenarios to work alternately, and increase the application scenarios of the control and drive device.

[0067] Optionally, the model number of the first switch module is the same as that of the second switch module; the structure of the first switch module is the same as that of the second switch module.

[0068] Specifically, the first switch module and the second switch module can be completely identical and interchangeable. The model number of the first switch module is the same as that of the second switch module. The structure of the first switch module is the same as that of the second switch module. Therefore, in the manufacturing of the control drive device, there is no need to distinguish between the first switch module and the second switch module, which improves the manufacturing efficiency of the control drive device.

[0069] This embodiment also provides a control driving method, which can be applied to the control driving device provided in any embodiment of the present invention.

[0070] Figure 2 This is a flowchart illustrating a control driving method according to an embodiment of the present invention. (Refer to...) Figure 2 The control and driving method provided in this embodiment includes the following steps:

[0071] S110. The first switch module and each of the second switch modules are connected to the mains power.

[0072] Specifically, the second terminal of the first switch module and the second terminal of each of the second switch modules are connected to the mains power.

[0073] S120: Control the coordinated switching on and off of the first switching module and each of the second switching modules so that the magnetrons in the microwave generator system can work independently in sequence.

[0074] This embodiment provides a control and driving method that can enable a single high-voltage power supply to power all magnetrons in a microwave generator system by controlling the coordinated switching of the first switching module and each of the second switching modules. This achieves sequential individual operation of multiple magnetrons and flexible control of multiple magnetrons.

[0075] Optional, Figure 3 This is a flowchart illustrating another control driving method provided according to an embodiment of the present invention, with reference to... Figure 3 The control and driving method provided in this embodiment includes the following steps:

[0076] S210. The first switch module and each of the second switch modules are connected to the mains power.

[0077] Specifically, the content of step S210 is the same as that of step S110, and will not be repeated here. For a detailed description of step S210, please refer to the description of step S110.

[0078] S220: Control the second switch module corresponding to the current target magnetron to turn on, and after a first set time, control the first switch module to turn on to connect the high voltage power supply so that the current target magnetron can start working.

[0079] The target magnetron is any one of the multiple magnetrons in the microwave generator system.

[0080] Specifically, before executing step S220, it must be ensured that the first switch module and all second switch modules are disconnected. The target magnetron can also be understood as the magnetron that needs to operate. The first switch module is turned on only after the second switch module corresponding to the target magnetron is turned on.

[0081] S230. After the current target magnetron has been working for a third set time, first control the second switch module corresponding to the current target magnetron to disconnect, and after the corresponding second switch module has been disconnected for a second set time, control the first switch module to disconnect.

[0082] Specifically, the third set duration is the duration for which the target magnetron generates microwaves, and the third set duration can be set according to actual needs.

[0083] In this embodiment, when the target magnetron is started, the second switching module corresponding to the current target magnetron is first turned on so that the filament power supply connected to the turned-on second switching module preheats the filament of the current target magnetron, while keeping the first switching module in the off state; when the second switching module is turned on for a first set time, the first switching module is turned on so that the high voltage power supply applies high voltage to the cathode of the current target magnetron, causing the current target magnetron to generate microwaves; when it is necessary to stop the current target magnetron from working, the corresponding second switching module is first turned off to cut off the filament power supply, and then, when the second switching module is turned off for a second set time, the first switching module is turned off to remove the high voltage power supply to the current target magnetron.

[0084] In this embodiment, when the current target magnetron is working, the filament is preheated before high voltage is applied, and when the current target magnetron is stopped, the filament is cut off before the high voltage is turned off. This avoids the phenomenon of anode backfire causing cathode electron emission, which would occur if the high voltage power is turned off before the filament is cut off. This timing control ensures that the filament of the current target magnetron is fully preheated before the high voltage is applied, and effectively prevents anode backfire when the current target magnetron is turned off, greatly improving the working life of the magnetron and the reliability of the system.

[0085] It should be noted that the third set duration for each execution of step S230 can be set according to actual needs and is not a fixed value.

[0086] S240, switch to another target magnetron, and then return to step S220.

[0087] Specifically, the other target magnetron is another magnetron that needs to emit microwaves.

[0088] By repeatedly executing steps S220 to S240, multiple magnetrons in the microwave generator system can operate independently in sequence. The control module can stop controlling the first switch module and each of the second switch modules according to actual needs to avoid the system entering an infinite loop.

[0089] Optionally, the first set duration ranges from 1s to 5s; the second set duration ranges from 2s to 3s.

[0090] For example, the first set duration can be 1s, 2s, 3s, 4s or 5s, etc., and the second set duration can be 2s, 2.5s or 3s, etc.

[0091] Specifically, setting the first preset duration to a range of 1s to 5s ensures sufficient preheating of the target magnetron filament. Setting the second preset duration to a range of 2s to 3s ensures sufficient time for the filament to cool down, preventing anode backfire that could cause cathode electron emission and prevent the target magnetron from fully stopping operation. In summary, this embodiment sets the first preset duration to a range of 1s to 5s and the second preset duration to a range of 2s to 3s. This range ensures sufficient preheating and cooling for most general-purpose magnetrons, guaranteeing both safety and lifespan while maintaining system efficiency.

[0092] Optionally, this embodiment also provides another control driving method, which can be applied to a control driving device including two second switch modules, two filament power supplies, a first switch module, a high-voltage power supply and a control module, so as to control the first magnetron and the second magnetron in the microwave generating system to work alternately. Figure 4 This is a flowchart illustrating another control driving method provided according to an embodiment of the present invention, with reference to... Figure 4 The control and driving method provided in this embodiment includes the following steps:

[0093] S310. The first switch module and each of the second switch modules are connected to the mains power.

[0094] Specifically, the content of step S310 is the same as that of step S110, and will not be repeated here. For a description of step S310, please refer to the description of step S110.

[0095] S320: Control the second switch module corresponding to the first magnetron to turn on. After a first set time, control the first switch module to turn on again to connect the high voltage power supply so that the first target magnetron can start working.

[0096] Specifically, before executing step S320, it is necessary to ensure that the first switch module and each of the second switch modules are disconnected.

[0097] S330. After the first magnetron has been working for a third set time, the second switch module corresponding to the first magnetron is first controlled to disconnect, and after the second switch module has been disconnected for a second set time, the first switch module is then controlled to disconnect.

[0098] S340: Control the second switch module corresponding to the second magnetron to turn on, and after a first set time, control the first switch module to turn on to connect the high voltage power supply so that the second target magnetron can start working.

[0099] S350: After the second magnetron has been working for a third set time, first control the second switch module corresponding to the second magnetron to disconnect, and after the second switch module has been disconnected for a second set time, control the first switch module to disconnect, and then return to step S320.

[0100] By repeatedly executing steps S320 to S350, the first magnetron and the second magnetron in the microwave generator system can work alternately and cyclically. The control module can stop controlling the first switch module and each of the second switch modules according to actual needs to avoid the system entering a dead loop.

[0101] It should be noted that the third set duration in step S330 and the third set duration in step S350 may be the same or different.

[0102] Figure 5 This is a schematic diagram of an ion source system according to an embodiment of the present invention, with reference to... Figure 5 The ion source system provided in this embodiment includes: a microwave generating system 200, n plasma generating devices 300, and a control and drive device 100 provided in any embodiment of the present invention; the microwave generating system 200 includes n magnetrons 210; the magnetrons 210 are connected to the plasma generating devices 300 in a one-to-one correspondence.

[0103] Specifically, the microwaves generated by the magnetron can be transmitted to the plasma generation device, where they ionize the process gas to produce plasma. The ion source system provided in this embodiment can use a single high-voltage power supply to enable multiple plasma generation devices to alternately generate plasma.

[0104] The ion source system provided in this embodiment includes the control and drive device provided in any embodiment of the present invention. Therefore, the ion source system including the control and drive device has the beneficial effect.

[0105] Optionally, the ion source system provided in this embodiment also includes n impedance matching devices, each corresponding to a plasma generating device. The impedance matching devices are used to achieve impedance matching between the magnetron and its corresponding plasma generating device.

[0106] Specifically, the impedance matching device can be a three-pin impedance matching device.

[0107] It should be understood that the various forms of processes shown above can be used, with steps reordered, added, or deleted. For example, the steps described in this invention can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution of this invention can be achieved, and this is not limited herein.

[0108] The specific embodiments described above do not constitute a limitation on the scope of protection of this invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A control drive apparatus characterized by comprising: The application is applied to a microwave generating system comprising n magnetrons, wherein n is an integer greater than or equal to 2; The control driving device comprises a high-voltage power supply, a first switch module, a control module, n second switch modules and n filament power supplies; the filament power supplies are arranged in one-to-one correspondence with the magnetrons, and the second switch modules are arranged in one-to-one correspondence with the filament power supplies; An input end of the high-voltage power supply is electrically connected with a first end of the first switch module, and an output end of the high-voltage power supply is electrically connected with cathodes of the magnetrons; An input end of the filament power supply is electrically connected with a first end of the corresponding second switch module, and an output end of the filament power supply is electrically connected with a filament of the corresponding magnetron; the filament power supply is used to supply power to the filament of the magnetron after the corresponding second switch module is turned on; A second end of the first switch module and a second end of each second switch module are connected with commercial power; The control module is electrically connected with a control end of the first switch module and control ends of the second switch modules, and is used to control the on-off of the first switch module and the second switch modules to make the magnetrons in the microwave generating system work individually in turn; The control module is specifically used to: when starting a target magnetron, first control the second switch module corresponding to the target magnetron to be turned on, and then control the first switch module to be turned on after a first set time period, so as to connect the high-voltage power supply and make the target magnetron start working; when stopping the target magnetron from working, first control the second switch module corresponding to the target magnetron to be turned off, and then control the first switch module to be turned off after a second set time period; wherein the target magnetron is any one of the magnetrons in the microwave generating system.

2. The control drive apparatus according to claim 1, characterized by The first set time period ranges from 1s to 5s; The second set time period ranges from 2s to 3s.

3. The control drive apparatus according to claim 1, characterized by The microwave generating system comprises a first magnetron and a second magnetron; The control driving device comprises two second switch modules and two filament power supplies; The control module is used to control the two second switch modules and the first switch module to act in a preset order, so that the first magnetron and the second magnetron work alternately.

4. The control drive apparatus according to claim 1, characterized by An output voltage of each filament power supply ranges from 2V to 6V; An output voltage of the high-voltage power supply ranges from -3000V to -10000V.

5. The control drive apparatus according to any one of claims 1 to 4, characterized in that, The first switch module and the second switch module are of the same type; The first switch module and the second switch module are of the same structure.

6. A control drive method characterized by, The application is applied to the control driving device of any one of claims 1-5; The control driving method comprises: controlling the on-off of the first switch module and the second switch modules to make the magnetrons in the microwave generating system work individually in turn; The control of the on-off of the first switch module and the second switch modules to make the magnetrons in the microwave generating system work individually in turn specifically comprises: controlling the second switch module corresponding to the current target magnetron to be turned on, and after a first set time, controlling the first switch module to be turned on to connect the high-voltage power supply to make the current target magnetron start working; wherein the target magnetron is any magnetron in a plurality of magnetrons in a microwave generating system; after the current target magnetron works for a third set time, first controlling the second switch module corresponding to the current target magnetron to be turned off, and after the second switch module corresponding to the current target magnetron is turned off for a second set time, controlling the first switch module to be turned off; switching another target magnetron, and then returning to the step of controlling the second switch module corresponding to the current target magnetron to be turned on, and after a first set time, controlling the first switch module to be turned on to connect the high-voltage power supply to make the current target magnetron start working.

7. The control drive method according to claim 6, wherein The first set time ranges from 1s to 5s. The second set time ranges from 2s to 3s.

8. An ion source system, comprising: The microwave generating system, n plasma generating devices, and the control and driving device of any one of claims 1-5; The microwave generating system comprises n magnetrons. The magnetrons are connected to the plasma generating devices one by one. ​

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