Etching device for manufacturing electronic device

Abstract

The invention belongs to the technical field of electronic device processing, and particularly discloses an etching device for electronic device manufacturing, which comprises an etching box, the two sides of the inner wall of the etching box are correspondingly connected with sliding seats through correspondingly arranged sliding clamping pieces, the upper ends of the two groups of sliding seats are jointly provided with a first ring frame, and a clamping rod is arranged outside the first ring frame; rotating pieces rotationally matched with the exterior of the first ring frame are arranged at the two ends of the interior of the clamping rod, a suspension column is inserted into the clamping rod in a penetrating mode, the two ends of the exterior of the suspension column are connected with two sets of folding baskets through arranged hoisting pieces, and connecting contraction bands are fixedly installed at the two ends of the sides, close to each other, of the two sets of folding baskets; according to the two-stage dynamic turbulent flow self-cleaning scraper mechanism, nondestructive fixation of workpieces is achieved through the silica gel soft frame folding basket, and by combining the two-stage dynamic turbulent flow driven by rotating centrifugal force and the self-cleaning scraper mechanism, the recovery rate of etching liquid is remarkably improved, and damage to the surfaces of the workpieces is remarkably reduced.

Description

Technical Field

[0001] This invention belongs to the field of electronic device processing technology, and specifically discloses an etching apparatus for manufacturing electronic devices. Background Technology

[0002] Etching equipment plays a central role in electronic device manufacturing. Its function is to selectively remove material and precisely transfer photolithographic patterns onto wafers or other substrates, thereby constructing circuit structures with nanoscale precision. Chemical etching, in essence, involves the selective oxidation, dissolution, and removal of material atoms in exposed areas within a liquid or plasma environment, and it plays a crucial role in electronic device manufacturing.

[0003] In existing technologies, when etching electronic devices using chemical etching, rigid metal fixtures are typically used to forcibly fix the workpiece with high-pressure point contact. This can easily cause cracks and scratches on flexible or brittle substrates. When etching different types of electronic devices, it is necessary to replace the corresponding metal fixtures, resulting in low efficiency.

[0004] Therefore, an etching apparatus for electronic device manufacturing is proposed to solve the above problems. Summary of the Invention

[0005] The purpose of this invention is to solve the problems existing in the background art, and to provide an etching apparatus for electronic device manufacturing, including an etching chamber. Both sides of the inner wall of the etching chamber are connected to sliding blocks via corresponding sliding locking components. A first ring frame is provided on the upper end of both sets of sliding blocks. A clamping rod is provided outside the first ring frame. Rotating components that rotatably engage with the outside of the first ring frame are provided at both ends of the clamping rod. A suspension column is inserted through the clamping rod. Two sets of stacking baskets are connected to both ends of the suspension column via lifting components. The two sets of stacking baskets are located on opposite sides. Both ends are fixedly installed with connecting shrink belts. A main frame rod is set between the two sets of symmetrically arranged connecting shrink belts. The outer frame of the stacking basket is made of silicone support soft frame and a filter screen is installed inside. The lower part of the etching box is connected to a second ring frame through a set support component. A rotating frame is rotatably set inside the second ring frame. Filter frames are fixedly installed on the upper surfaces of both sides of the rotating frame. A reinforcing rod is fixedly fitted in the middle of the outside of the clamping rod. A motor is set above the reinforcing rod. The output shaft of the motor passes through the reinforcing rod and the clamping rod in sequence. A fixed lifting assembly is set outside the motor.

[0006] In the above technical solution, the rotating component further includes a slot formed at one end inside the clamping rod, with balls symmetrically embedded on both sides of the inner wall of the slot, and the balls rolling and fitting against the outside of the first ring frame.

[0007] In the above technical solution, the lifting component further includes two sleeves that are staggered and rotated on both ends of the suspension column. The outer ends of the two sleeves that are far apart from each other are respectively connected to a corresponding locking block by a flexible lifting rod. The locking block is fixedly connected to the upper end face of the corresponding folding basket.

[0008] In the above technical solution, the support member further includes a support base symmetrically fixedly installed inside the etching box at the bottom, and the lower end face of the second ring frame is fixedly installed on the upper end face of the two sets of support bases.

[0009] In the above technical solution, the fixed lifting assembly further includes a hanger fixedly sleeved on the outside of the motor. Lifting cylinders are provided on the lower end faces of both sides of the hanger. The lifting cylinders are fixedly installed above the etching box. An installation rod is fixedly connected to the upper end face of the slide block on the side close to the first ring frame. The upper end of the installation rod is connected to the lower end face of the hanger.

[0010] In the above technical solution, a slide is further provided inside the etching box and at the corresponding slide position, and the slide slide slides in conjunction with the slide base through a groove.

[0011] In the above technical solution, further, rotating rollers are rotatably installed on both sides and near the top inside the filter frame, a connecting rod is provided at the middle of the lower end of the rotating frame, and a magnetic chuck is fixedly installed on the lower end face of the connecting rod.

[0012] In the above technical solution, further, telescopic cylinders are symmetrically installed on one side of the etching box, and scrapers are fixedly installed on the telescopic ends of the telescopic cylinders. A collection box is installed on the side of the scraper away from the telescopic cylinder. A sealing box is installed inside the etching box on the side away from the telescopic cylinder. One end of the sealing box extends to the outside of the etching box and a sealing port is opened on the upper surface. A sealing plate is slidably inserted inside the sealing port. A drain pipe is installed on one side of the bottom of the etching box, and a solenoid valve is installed outside the drain pipe. A controller is installed on the upper edge of the etching box near one of the corners.

[0013] Compared with the prior art, the present invention has the following beneficial effects: 1. The stacking basket adopts a silicone support soft frame, which can adaptively deform according to the shape of the etched parts. With the flexible constraint of the connecting shrink belt and the main frame rod, it can not only firmly clamp etched parts of different sizes and shapes, but also avoid the limitation of the workpiece shape on the traditional rigid abutment plate. This solves the defect of the existing device that "only applies to workpieces with specific shapes". In addition, the cooperation between the connecting shrink belt and the main frame rod allows the stacking basket to be unfolded to increase the capacity during use, making it easier to pick up and put down workpieces, and taking into account both loading flexibility and operational efficiency.

[0014] 2. The motor drives the clamping rod to rotate outside the first ring frame, causing the collecting basket to make a circular motion in the etching solution. Under the drive of the lifting component, the collecting basket can be put into the filter frame, which synchronously drives the filter frame to rotate, which can increase the contact area between the etching solution and the etched parts. After etching is completed, the collecting basket can be lifted to ensure the etching effect.

[0015] 3. When the rotating frame rotates, it drives the magnetic metal chips at the lower end to rotate, causing the impurities to be thrown towards the outer edge of the etching box under centrifugal force. After etching is completed, the metal chips fall to the bottom of the etching box under their own gravity. In a static state, the magnetic chuck can efficiently adsorb metal impurities. Then, when the etching solution is drained, the telescopic cylinder drives the scraper to move to one side, so that the scraper can scrape and collect the metal impurities adsorbed on the lower end of the magnetic chuck until they enter the sealed box. Finally, the staff pulls out the sealing plate and cleans the metal impurities. After completion, the etching box is rinsed with clean water to ensure cleanliness for subsequent use. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is another schematic diagram of the overall structure of the present invention; Figure 3 This is a schematic diagram of the internal structure of the etching box of the present invention. Figure 4 This is a schematic diagram of the connection structure between the second ring frame and the connecting rod of the present invention; Figure 5 This is a schematic diagram of the connection structure between the stacking basket and the main frame rod of the present invention; Figure 6 This is another schematic diagram of the connection structure between the folding basket and the main frame rod of the present invention; Figure 7 This is a schematic diagram of the disassembled structure connecting the shrink belt, the stacking basket, and the main frame rod of the present invention; Figure 8 This is a schematic diagram of the connection structure between the first ring frame and the clamping rod of the present invention; Figure 9 For the present invention Figure 3 Schematic diagram of the connection structure at point A in the middle; Figure 10 For the present invention Figure 3 Schematic diagram of the connection structure at point B.

[0017] In the diagram: 1. Etching box; 2. Hanger; 3. Drain pipe; 4. Solenoid valve; 5. Telescopic cylinder; 6. Motor; 7. Lifting cylinder; 8. Controller; 9. First ring frame; 10. Reinforcing rod; 11. Slide seat; 12. Clamping rod; 13. Sealing box; 14. Sealing plate; 15. Slide frame; 16. Suspension column; 17. Stacking basket; 18. Filter frame; 19. Magnetic chuck; 20. Rotating frame; 21. Support seat; 22. Second ring frame; 23. Connecting rod; 24. Rotating roller; 25. Clamping block; 26. Flexible hanging rod; 27. Sleeve; 28. Main frame rod; 29. ​​Connecting shrink belt; 30. Mounting rod; 31. Slide groove; 32. Ball bearing; 33. Collection box; 34. Scraper. Detailed Implementation

[0018] To better understand the above-mentioned objectives, features, and advantages of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0019] Numerous specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and therefore the invention is not limited to the specific embodiments disclosed below.

[0020] like Figures 1-10 An etching apparatus for manufacturing electronic devices is shown, comprising an etching chamber 1. Slide seats 11 are connected to both sides of the inner wall of the etching chamber 1 via corresponding sliding locking components. A first ring frame 9 is provided at the upper end of both sets of slide seats 11. A clamping rod 12 is provided on the outside of the first ring frame 9. A slide bracket 15 is fixedly installed inside the etching chamber 1 at a position corresponding to the slide seat 11. The slide bracket 15 slides with the slide seat 11 through a groove 31. Rotating components are provided at both ends of the clamping rod 12, which rotate in conjunction with the outside of the first ring frame 9. Each rotating component includes a slot at one end of the clamping rod 12, and ball bearings 32 are symmetrically embedded on both sides of the inner wall of the slot, with the ball bearings 32 rolling against the outside of the first ring frame 9. A suspension column 16 is inserted through the inside of the clamping rod 12. Two sets of stacking baskets 17 are connected to both ends of the suspension column 16 by the set lifting parts. Connecting shrink belts 29 are fixedly installed on both ends of the two sets of stacking baskets 17 on the side that are close to each other. A main frame rod 28 is set between the two sets of connecting shrink belts 29 that are symmetrically arranged. The outer frame of the stacking basket 17 is made of silicone support soft frame and a filter screen is installed inside. A second ring frame 22 is connected to the bottom of the etching box 1 by the set support parts. A rotating frame 20 is rotatably set inside the second ring frame 22. Filter frames 18 are fixedly installed on the upper surfaces of both sides of the rotating frame 20. A controller 8 is installed on the upper edge of the etching box 1 and near one of the corners. like Figures 1-9As shown, with the connection of the slide block 11, the first ring frame 9 can be driven to move up and down in the vertical direction inside the slide groove 31. With the connection of the clamping rod 12, the suspension column 16 can drive the lower end of the stacking basket 17 and the connecting shrink belt 29 to be suspended inside the etching box 1. When the clamping rod 12 rotates later, the ball bearings 32 inside it rolls and contacts the inner and outer surfaces of the first ring frame 9, reducing hard friction and ensuring that the subsequent stacking basket 17 rotates more smoothly inside the etching box 1. The silicone support frame on the outside of the stacking basket 17 has rounded corners to avoid scratching the etched parts. The outer surface of the filter screen is coated with an anti-corrosion coating, allowing it to be used in chemical environments. The connecting shrink band 29 is made of spandex elastic fiber with a stable elongation rate. Both ends are fixed to the outer edge of the stacking basket 17 to ensure that the two sets of stacking baskets 17 open and close synchronously. The main frame rod 28 is made of PP material and connects to the other side of the two sets of connecting shrink bands 29. With the main frame rod 28 in place, the stacking baskets 17 on both sides can open and close to the sides through the connecting shrink bands 29, thus accommodating more etched parts. When cleaning the etched parts, the two sides of the stacking basket 17 are close to each other to wrap the etched parts and reduce hard contact.

[0021] A reinforcing rod 10 is fixedly fitted onto the outside of the clamping rod 12. A motor 6 is installed above the reinforcing rod 10. The output shaft of the motor 6 passes through the reinforcing rod 10 and the clamping rod 12 in sequence. A fixed lifting assembly is installed outside the motor 6. The fixed lifting assembly includes a hanger 2 fixedly fitted onto the outside of the motor 6. Lifting cylinders 7 are installed on the lower ends of both sides of the hanger 2. The lifting cylinders 7 are fixedly installed above the etching box 1. An installation rod 30 is fixedly connected to the upper end of the slide block 11 on the side closest to the first ring frame 9. The upper end of the installation rod 30 is connected to the lower end of the hanger 2. The lifting components include staggered rotating sets fitted on the suspension. Two sleeves 27 at both ends of the column 16 are connected to each other by a flexible hanging rod 26 at the outer end of each sleeve 27. The corresponding slots 25 are fixedly connected to the upper end of the corresponding stacking basket 17. The support includes a support base 21 symmetrically fixedly installed inside the lower part of the etching box 1. The lower end of the second ring frame 22 is fixedly installed on the upper end of the two sets of support bases 21. Rollers 24 are rotatably installed on both sides and near the top inside the filter frame 18. A connecting rod 23 is provided at the middle of the lower end of the rotating frame 20. A magnetic chuck 19 is fixedly installed on the lower end of the connecting rod 23. like Figures 5-7As shown, before cleaning, the ferrule 27, flexible suspension rod 26, and ferrule 25 can suspend the stacking basket 17 above the inside of the etching box 1. In the initial state of connecting the shrinkage belt 29, the two sets of stacking baskets 17 are open to both sides. Then, the etched parts are placed inside the stacking basket 17. Subsequently, the lifting cylinder 7 drives the hanger 2 and the suspension column 16 to descend, causing the slide 11, the first ring frame 9, and the stacking basket 17 to move down synchronously until the outer surface of the stacking basket 17 rolls into contact with the roller 24 on the upper side of the filter frame 18. During the gradual descent, the stacking basket 17, the connecting shrinkage belt 29, and the flexible suspension rod 26 are squeezed by the roller 24, causing the stacking basket 17 to move closer to the main frame rod 28 and close up, thereby wrapping the etched parts inside. The controller 8 starts the motor 6 to rotate. Under the reinforcement of the reinforcing rod 10, the motor 6 stably drives the clamping rod 12 to rotate. The clamping rod 12 drives the suspension column 16, the stacking basket 17, and the filter frame 18 to rotate synchronously. The rotation of the filter frame 18 will drive the rotating frame 20 to rotate synchronously inside the second ring frame 22, so that the etched parts can fully contact the etching solution inside the etching box 1. With the support base 21 connected, the second ring frame 22 is stably set inside the lower part of the etching box 1, ensuring that the rotating frame 20 can stably cooperate with the filter frame 18 to rotate inside it; The rotation of the rotating frame 20 will drive the connecting rod 23 and the magnetic chuck 19 at the lower end to rotate. The magnetic chuck 19 can turbulent the etching liquid inside the etching box 1 to ensure the dynamic flow of the etching liquid. At the same time, it can also form a vortex to guide impurities to the inner wall of the etching box 1, ensuring the subsequent adsorption of metal impurities. After stopping, the magnetic chuck 19 can adsorb the metal impurities that have fallen off after cleaning inside the etching box 1.

[0022] A telescopic cylinder 5 is symmetrically installed on one side of the etching box 1. A scraper 34 is fixedly installed on the telescopic end of the telescopic cylinder 5. A collection box 33 is installed on the side of the scraper 34 away from the telescopic cylinder 5. A sealing box 13 is installed inside the side of the etching box 1 away from the telescopic cylinder 5. One end of the sealing box 13 extends to the outside of the etching box 1 and a sealing port is opened on the upper end. A sealing plate 14 is slidably inserted inside the sealing port. A drain pipe 3 is installed on one side of the bottom of the etching box 1. A solenoid valve 4 is installed outside the drain pipe 3. like Figure 1 , Figure 2 and Figure 10As shown, the controller 8 can control the solenoid valve 4 to discharge the etching solution inside the etching box 1. The etching solution is stored in an external storage tank and then filtered by external equipment to make full use of the etching solution. The telescopic cylinder 5 can drive the scraper 34 and the collection box 33 to move to one side of the sealed box 13. The collection box 33 can scrape the impurities at the bottom of the etching box 1. The impurities are pushed and scraped by the outer wall of one side of the collection box 33. The impurities that overflow to the height of one side of the collection box 33 fall directly into the collection box 33. The scraper 34 scrapes the metal impurities adsorbed by the lower end face of the magnetic chuck 19. The scraped impurities fall into the collection box 33. Finally, the sealing plate 14 is pulled out to clean the metal impurities. After completing the etching and cleaning operation, inject clean water into the etching chamber 1 to clean the chamber. This device significantly expands the application range of etched parts and solves the problem of poor adaptability to fixed rigid structures and easy damage to the surface of etched parts, thus fully improving the product quality of etched parts.

[0023] Working principle: The etched parts to be cleaned are placed into the collecting basket 17. The silicone support frame adapts to the shape of the workpiece, ensuring that the workpiece is flexibly wrapped. At this time, the lifting cylinder 7 is in the extended state, and the collecting basket 17 is suspended above the inside of the etching box 1, waiting for cleaning. After the etched parts are placed in, the controller 8 starts the lifting cylinder 7, driving the hanger 2 to move the slide 11 down along the slide groove 31 inside the slide 15, so that the collecting basket 17 is immersed in the etching solution inside the etching box 1 and falls into the filter frame 18. During the gradual descent of the collecting basket 17 in its initial unfolded state, the outer surface of the collecting basket 17 gradually rolls and adheres to the rotating roller 24, causing the collecting basket 17 and the connecting shrinkage belt 29 to gather towards the center of the main frame 28. The flexible suspension rod 26 adapts to the folding angle of the stacking basket 17, and the ferrule 27 rotates outside the suspension column 16 according to the deformation of the flexible suspension rod 26, so that the lower edges of both sides of the stacking basket 17 contact the upper edge of the filter frame 18 and are placed inside the filter frame 18. Then, the motor 6 drives the clamping rod 12 to rotate around the first ring frame 9. The rolling engagement of the ball bearing 32 with the outside of the first ring frame 9 ensures that the clamping rod 12 can reduce friction and vibration when it rotates. When the clamping rod 12 drives the stacking basket 17 to rotate, the filter frame 18 also drives the rotating frame 20 and the magnetic chuck 19 to rotate below. The magnetic chuck 19 can turbulent the flow inside the etching box 1 to ensure that the etching solution can be fully mixed, so that the etching solution can fully contact the etched parts. After cleaning, the lifting cylinder 7 raises the stacking basket 17 above the etching box 1, the controller 8 opens the solenoid valve 4 on the drain pipe 3 to discharge the etching liquid, and the telescopic cylinder 5 pushes the scraper 34 and the collection box 33 from one side of the etching box 1 to the side of the sealed box 13. The scraper 34 can remove the metal impurities adsorbed at the bottom of the magnetic chuck 19, and the lower end of the collection box 33 scrapes away the impurities at the bottom of the etching box 1. After completion, the inside of the etching box 1 can be cleaned with water for subsequent use.

[0024] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed invention.

Claims

1. An etching apparatus for manufacturing electronic devices, comprising an etching chamber (1), characterized in that: Both sides of the inner wall of the etching box (1) are connected to slide blocks (11) by corresponding sliding locking parts. The upper ends of the two sets of slide blocks (11) are provided with a first ring frame (9). The first ring frame (9) is provided with a clamping rod (12) on the outside. Both ends of the clamping rod (12) are provided with rotating parts that rotate with the outside of the first ring frame (9). A suspension column (16) is inserted through the clamping rod (12). Both ends of the suspension column (16) are connected to two sets of stacking baskets (17) by a lifting part. Both ends of the two sets of stacking baskets (17) are fixedly installed with connecting shrink belts (29) on the side of the two sets of stacking baskets (17) that are close to each other. The two sets of connecting shrink belts (29) are symmetrically arranged. A main frame rod (28) is provided between 29). The outer frame of the stacking basket (17) is made of silicone support soft frame and a filter screen is installed inside. The second ring frame (22) is connected to the lower part of the etching box (1) through the set support. A rotating frame (20) is rotatably set inside the second ring frame (22). Filter frames (18) are fixedly installed on the upper surfaces of both sides of the rotating frame (20). A reinforcing rod (10) is fixedly fitted in the middle of the outside of the clamping rod (12). A motor (6) is set above the reinforcing rod (10). The output shaft of the motor (6) passes through the reinforcing rod (10) and the clamping rod (12) in sequence. A fixed lifting assembly is set outside the motor (6).

2. The etching apparatus for manufacturing electronic devices according to claim 1, characterized in that: The rotating component includes a slot at one end of the clamping rod (12), and ball bearings (32) are symmetrically embedded on both sides of the inner wall of the slot, and the ball bearings (32) roll and fit against the outside of the first ring frame (9).

3. The etching apparatus for manufacturing electronic devices according to claim 1, characterized in that: The lifting component includes two sleeves (27) that are alternately rotated and fitted at both ends of the suspension column (16). The outer ends of the two sleeves (27) that are far apart from each other are respectively connected to a corresponding locking block (25) by a flexible lifting rod (26). The locking block (25) is fixedly connected to the upper surface of the corresponding stacking basket (17).

4. The etching apparatus for manufacturing electronic devices according to claim 1, characterized in that: The support includes a support base (21) symmetrically fixedly installed inside the etching box (1) and the lower end face of the second ring frame (22) is fixedly installed on the upper end face of the two sets of support bases (21).

5. The etching apparatus for manufacturing electronic devices according to claim 1, characterized in that: The fixed lifting assembly includes a hanger (2) fixedly sleeved outside the motor (6). Lifting cylinders (7) are provided on both lower ends of the hanger (2). The lifting cylinders (7) are fixedly installed above the etching box (1). An installation rod (30) is fixedly connected to the upper end of the slide (11) on the side close to the first ring frame (9). The upper end of the installation rod (30) is connected to the lower end of the hanger (2).

6. The etching apparatus for manufacturing electronic devices according to claim 1, characterized in that: A slide (15) is fixedly installed inside the etching box (1) at the position corresponding to the slide (11). The slide (15) slides in conjunction with the slide (11) through a groove (31).

7. The etching apparatus for manufacturing electronic devices according to claim 1, characterized in that: The filter frame (18) has rotating rollers (24) installed on both sides and near the top inside. A connecting rod (23) is provided at the middle of the lower end of the rotating frame (20). A magnetic chuck (19) is fixedly installed on the lower end face of the connecting rod (23).

8. The etching apparatus for manufacturing electronic devices according to claim 1, characterized in that: A telescopic cylinder (5) is symmetrically installed on one side of the etching box (1). A scraper (34) is fixedly installed on the telescopic end of the telescopic cylinder (5). A collection box (33) is installed on the side of the scraper (34) away from the telescopic cylinder (5). A sealing box (13) is installed inside the side of the etching box (1) away from the telescopic cylinder (5). One end of the sealing box (13) extends to the outside of the etching box (1) and a sealing port is opened on the upper surface. A sealing plate (14) is slidably inserted inside the sealing port. A drain pipe (3) is installed on one side of the bottom of the etching box (1). A solenoid valve (4) is installed outside the drain pipe (3). A controller (8) is installed on the upper edge of the etching box (1) and near one of the corners.

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