Conveying device and operation method thereof

Abstract

The invention relates to a conveying device and an operation method thereof. An apparatus for conveying according to an embodiment of the present disclosure includes: a transport vehicle that transports a container having an article therein, where the transport vehicle may include: a driving unit that includes a driving wheel and an angle sensor that senses a driving angle sensing value; a carriage sensor unit including a first carriage sensor disposed at a center of a front portion of the transport vehicle and sensing an object in front of the transport vehicle; and a control unit that controls at least one of the driving unit and the trolley sensor unit based on a driving angle sensing value of the angle sensor and a first trolley sensing value of the first trolley sensor.

Description

[0001] Cross-references to related applications

[0002] This application claims priority and benefit to Korean Patent Application No. 10-2024-0063594, filed with the Korean Intellectual Property Office on May 16, 2024, the entire contents of which are incorporated herein by reference. Technical Field

[0003] This disclosure relates to an apparatus for transmission and a method of operating the apparatus. Background Technology

[0004] Typically, to manufacture semiconductor devices, various types of processes (such as deposition, photolithography, and etching) are performed, and the apparatuses that perform these processes are arranged in a semiconductor production line. Items such as substrates (e.g., wafers and glass) are the objects to be processed in the semiconductor device manufacturing process, and they can be placed in containers such as FOUPs (front-opening wafer cassettes) and PODs at each semiconductor processing equipment. Additionally, processed items can be collected from each semiconductor processing equipment into containers, and the collected containers can be transported externally.

[0005] Containers are transported using transport vehicles such as overhead hoist transport apparatus (OHT). These transport vehicles deliver containers containing items to the loading ports of semiconductor processing equipment. Additionally, transport vehicles can pick up containers containing processed objects from the loading ports and transport them externally or transfer them to another semiconductor processing unit. Transport vehicles transport containers containing items along tracks mounted on the top plate of the semiconductor production line. These tracks can include straight sections and curved sections. Multiple transport vehicles travel along the straight and curved sections, and a transport vehicle can detect other transport vehicles when one is stationary in front of it. Upon detection of another transport vehicle, the transport vehicle can stop, thus preventing collisions. However, while detecting other transport vehicles ahead is not a problem when traveling along a straight section, when a transport vehicle enters a curved section, variations in sensor sensitivity and performance may cause it to fail to detect another transport vehicle ahead, leading to collisions. Summary of the Invention

[0006] The purpose of this invention is to provide a conveying device for efficiently transporting containers containing articles therein, and a method for operating the device.

[0007] The purpose of this invention is to provide a conveying device that can prevent collisions between transport vehicles in curved sections, and a method of operating the device.

[0008] The purpose of this disclosure is not limited thereto, and other purposes not mentioned will be clearly understood by those skilled in the art from the following description.

[0009] An exemplary embodiment of the present invention provides an apparatus for conveying, the apparatus comprising: a transport vehicle that transports a container having articles therein, wherein the transport vehicle includes: a drive unit including drive wheels and an angle sensor that senses a drive angle; a trolley sensor unit including a first trolley sensor disposed at the center of the front of the transport vehicle and sensing an object in front of the transport vehicle; and a control unit that controls at least one of the drive unit and the trolley sensor unit based on the drive angle sense value of the angle sensor and the first trolley sensor's first trolley sensor value.

[0010] According to an exemplary embodiment of the present invention, the trolley sensor unit may include an actuation unit that changes the sensing angle of the first trolley sensor.

[0011] According to an exemplary embodiment of the present invention, the actuation unit may include: a power transmission member connected to a first vehicle sensor; and a power supply member supplying power to the power transmission member.

[0012] According to an exemplary embodiment of the present invention, the control unit can control the actuation unit based on the driving angle sensing value, so that the driving angle and the sensing angle are matched.

[0013] According to an exemplary embodiment of the present invention, when the transport vehicle is traveling at a first speed on a straight section, the control unit determines whether the transport vehicle has entered a turning section based on the drive angle sensing value; when the transport vehicle enters the turning section, the control unit controls the drive unit to reduce the drive speed of the transport vehicle from the first speed to a second speed; and it can determine whether there is another transport vehicle in front of the transport vehicle based on the first vehicle sensing value.

[0014] According to an exemplary embodiment of the present invention, when another transport vehicle is present, the control unit can control the drive unit to stop the transport vehicle.

[0015] According to an exemplary embodiment of the present invention, the control unit can repeatedly determine whether another transport vehicle exists based on the sensing value of the first vehicle.

[0016] According to an exemplary embodiment of the present invention, when the result is that there are no other transport vehicles, the control unit determines whether the transport vehicle has entered the straight section based on the drive angle sensing value; and when the transport vehicle enters the straight section, the control unit can control the drive unit to increase the drive speed of the transport vehicle from the second speed to the first speed.

[0017] According to an exemplary embodiment of the present invention, the trolley sensor unit may further include: a second trolley sensor disposed on one side of the front of the transport vehicle and sensing an object in front of the transport vehicle; and a third trolley sensor disposed on the other side of the front of the transport vehicle and sensing an object in front of the transport vehicle.

[0018] According to an exemplary embodiment of the present invention, the control unit can control the drive unit and the trolley sensor unit based on at least one of the drive angle sensing value, the first trolley sensing value, the second trolley sensor's second trolley sensing value, and the third trolley sensor's third sensing value.

[0019] According to an exemplary embodiment of the invention, the device may further include a track mounted on the top plate of a production line in which semiconductor processing equipment is continuously arranged; and a port configured to allow a container to be placed on the port.

[0020] An exemplary embodiment of the present invention provides a method for operating a conveying device, the method comprising: determining whether a transport vehicle has entered a turning section based on a drive angle sensing value sensed by an angle sensor; reducing the drive speed of the transport vehicle when it enters the turning section; determining whether another transport vehicle is ahead of the transport vehicle based on a trolley sensing value sensed by a trolley sensor; and stopping or continuing to travel at a reduced speed based on the presence of another transport vehicle, wherein the sensing value of the trolley sensor changes based on the drive angle sensing value.

[0021] According to an exemplary embodiment of the present invention, stopping or continuing to travel at a reduced speed based on the presence of other transport vehicles may include stopping when other transport vehicles are present.

[0022] According to an exemplary embodiment of the present invention, stopping or continuing to travel at a reduced speed based on the presence of other transport vehicles may include: when no other transport vehicles are available, determining again whether other transport vehicles are available.

[0023] According to an exemplary embodiment of the present invention, based on a preset number of times, the determination of whether there are other transport vehicles when no other vehicles exist can be repeated.

[0024] According to an exemplary embodiment of the present invention, stopping or continuing to travel at a reduced speed based on the presence of other transport vehicles may include: determining whether the transport vehicle has entered a straight section based on the drive angle sensing value sensed by the angle sensor when no other transport vehicle is present; and increasing the drive speed of the transport vehicle when it enters a straight section.

[0025] An exemplary embodiment of the present invention provides a conveying device, the device comprising: a track disposed along a top plate; a port configured to allow a container to be placed on the port; and a transport vehicle that travels along the track and transports the container to the port, wherein the transport vehicle includes: a drive unit having drive wheels; an angle sensor unit including an angle sensor that senses a drive angle; a trolley sensor unit including a first trolley sensor disposed at the center of the front of the transport vehicle and sensing an object in front of the transport vehicle; and a control unit that controls the drive unit and the trolley sensor based on the drive angle sensed value of the angle sensor and the first trolley sensed value of the first trolley sensor. At least one of the vehicle sensor units, wherein the vehicle sensor unit includes an actuation unit for changing the sensing angle of a first vehicle sensor, wherein the actuation unit includes: a power transmission member connected to the first vehicle sensor; and a power supply member supplying power to the power transmission member, wherein the control unit controls the actuation unit based on a drive angle sensing value such that the drive angle matches the sensing angle; determining whether the transport vehicle enters a turning segment based on the drive angle sensing value while the transport vehicle is traveling at a first speed on a straight segment; controlling the drive unit to reduce the drive speed of the transport vehicle from the first speed to a second speed when the transport vehicle enters the turning segment; and determining whether there is another transport vehicle in front of the transport vehicle based on the first vehicle sensing value.

[0026] According to an exemplary embodiment of the present invention, when another transport vehicle is present, the control unit can control the drive unit to stop the transport vehicle.

[0027] According to an exemplary embodiment of the present invention, the first vehicle sensing value control unit repeatedly determines whether there are other transport vehicles; when the determination result is that there are no other transport vehicles, it is determined whether the transport vehicle has entered a straight section based on the drive angle sensing value; and when the transport vehicle enters the straight section, the drive unit can be controlled to increase the drive speed of the transport vehicle from a second speed to a first speed.

[0028] According to an exemplary embodiment of the present invention, the trolley sensor unit further includes: a second trolley sensor disposed on one side of the front of the transport vehicle and sensing an object in front of the transport vehicle; and a third trolley sensor disposed on the other side of the front of the transport vehicle and sensing an object in front of the transport vehicle; and the control unit can control the drive unit and the trolley sensor unit based on at least one of the drive angle sensing value, the first trolley sensing value, the second trolley sensing value of the second trolley sensor, and the third trolley sensing value of the third trolley sensor.

[0029] According to an exemplary embodiment of the present invention, it is possible to efficiently transport containers containing articles therein.

[0030] According to an exemplary embodiment of the present invention, collisions between transport vehicles on turning sections can be prevented, and the processing costs and processing time required for transporting goods can be reduced.

[0031] The effects of this disclosure are not limited to those described above, and those skilled in the art will clearly understand from the specification and drawings any effects not mentioned. Attached Figure Description

[0032] Figure 1 This is a schematic plan view of a conveying apparatus according to an embodiment of the present disclosure, viewed from above.

[0033] Figure 2 This is a schematic plan view of a transport vehicle according to an embodiment of the present disclosure, viewed from the front.

[0034] Figure 3 This is a schematic plan view of a transport vehicle according to an embodiment of the present disclosure, viewed from the side.

[0035] Figure 4 This is a schematic plan view of a transport vehicle according to an embodiment of the present disclosure, viewed from above.

[0036] Figure 5 This is a schematic diagram illustrating a concept of a trolley sensor unit according to an embodiment of the present disclosure.

[0037] Figure 6 This is a flowchart illustrating a method of operating a transport vehicle according to an embodiment of the present disclosure.

[0038] Figure 7 This is a conceptual diagram illustrating a transportation method according to an embodiment of the present disclosure.

[0039] Figure 8 This is a schematic plan view of a transport vehicle according to another embodiment of the present disclosure, viewed from the front. Detailed Implementation

[0040] Hereinafter, exemplary embodiments of the invention will be described more fully with reference to the accompanying drawings, which illustrate exemplary embodiments of the invention. However, the invention may be implemented differently and is not limited to the following exemplary embodiments. In the following description of the invention, detailed descriptions of known functions and configurations incorporated herein are omitted to avoid obscuring the subject matter of the invention. Furthermore, throughout the drawings, the same reference numerals are used for components having similar functions and actions.

[0041] Unless explicitly stated otherwise, the word "include" shall be construed as implying the inclusion of the stated elements, but not excluding any other elements. It should be understood that the terms "including" and "having" are intended to indicate the presence of the features, quantities, operations, functions, constituent elements and components, or combinations thereof, described in the specification, and do not exclude the prior presence or addition of one or more other features, quantities, operations, functions, constituent elements and components, or combinations thereof.

[0042] The singular expressions used in this document include plural expressions unless they have a clearly contradictory meaning in the context. Therefore, for clarity, the shape and size of elements in the accompanying figures may be exaggerated.

[0043] The expression "and / or" includes each of the items mentioned and all combinations including one or more of these items. Furthermore, in this specification, "connection" refers not only to a direct connection between component A and component B, but also to an indirect connection between component A and component B via component C inserted between component A and component B.

[0044] The embodiments of this disclosure can be modified in various forms, and the scope of this disclosure should not be construed as limited to the embodiments described below. Embodiments are provided to describe the contents of this disclosure more completely to those skilled in the art. Therefore, the shapes of the components shown in the accompanying drawings are exaggerated to emphasize their clearer description.

[0045] Figure 1 This is a schematic plan view of a conveying apparatus according to an embodiment of the present disclosure, viewed from above.

[0046] refer to Figure 1According to embodiments of the present disclosure, the conveying device 1000 is capable of transporting containers 20 containing articles along a semiconductor production line, in which semiconductor processing equipment 10 is arranged sequentially. The conveying device 1000 may include a track 300, a transport carrier 500, and a port P, which will be described below. Port P may be a loading port provided in the semiconductor processing equipment 10, on which the container 20 is placed. Alternatively, port P may be a port provided in a container storage device (not shown) storing the container 20. Alternatively, port P may be a buffer frame mounted on the top plate of the semiconductor production line.

[0047] Track 300 provides a path along which the transport vehicle 500, described below, will travel. Track 300 can be fixedly mounted on the top plate of the semiconductor production line. Figure 1 Track 300 is shown as generally hexagonal, but this is only one embodiment; the shape of track 300 can be modified to be circular, rectangular, etc. Track 300 can be positioned along the top plate of the semiconductor production line and can be installed such that the semiconductor processing equipment 10 can be identified from above. The track 300 can be arranged over a wide area to allow observation of the entire semiconductor processing equipment 10. Track 300 may include straight sections 310 and turning sections 330. In this configuration, the turning section 330 may be a curved section.

[0048] The transport vehicle can be an overhead crane. The transport vehicle 500 can accommodate the container 20. The transport vehicle 500 can travel along a predetermined path on the track 300. The transport vehicle 500 can travel along the track 300 at a preset speed. A first speed, which is the preset speed for a straight section 310, can be faster than a second speed, which is the preset speed for a curved section. Furthermore, multiple transport vehicles 500 can be configured, and a subsequent transport vehicle 500-1 can sense the presence of a preceding transport vehicle 500-2 and stop when the preceding transport vehicle is present.

[0049] Figure 2 This is a schematic plan view of a transport vehicle according to an embodiment of the present disclosure, viewed from the front. Figure 3 This is a schematic plan view of a transport vehicle according to an embodiment of the present disclosure, viewed from the side. Figure 4 This schematically illustrates a plan view of a transport vehicle according to an embodiment of the present disclosure, viewed from above. Figure 5 This is a schematic diagram illustrating a concept of a trolley sensor unit according to an embodiment of the present disclosure.

[0050] refer to Figures 2 to 5According to the embodiments of this disclosure, the transport vehicle 500 may include a body 510, a drive unit 520, a steering unit 530, a frame 540, a neck 550, a slider 560, a lifting unit 570, a gripping unit 580, a trolley sensor unit 590, and a control unit 600.

[0051] The main body 510 can be located on the upper part of the transport vehicle 500. Multiple main bodies 510 can be installed, but for the sake of convenience, the transport vehicle 500 is described as consisting of a single main body 510.

[0052] The drive unit 520 may include a drive wheel 522, a drive actuation unit 524, and an angle sensor 526.

[0053] The drive wheel 522 can be rotatably coupled to the body 510. The drive wheel 522 can rotate in contact with the track 300. Multiple drive wheels 522 can be provided. The drive wheels 522 can be provided in pairs. Any one of the drive wheels 522 can be rotatably coupled to a first side of the body 510, while the other drive wheel 522 can be rotatably coupled to a second side of the body 510 opposite to the first side. The drive wheel 522 can travel on the track 300 by rotating in contact with the track 300. The track 522 can travel in straight sections 310 and curved sections 330.

[0054] When the drive wheel 522 travels in the straight section 310, the angle of the drive wheel 522 can remain constant. In this configuration, the angle of the drive wheel 522 can be its steering angle. When the drive wheel 522 travels in the turning section 330, the angle of the drive wheel 522 can be changed. That is, when the drive wheel 522 travels in the turning section 330, the angle of the drive wheel 522 can be changed in real time according to the position of the turning section 330.

[0055] The drive-actuator unit 524 can be disposed in the body 510. The drive-actuator unit 524 can rotate the drive wheel 522 by transmitting power to the drive wheel 522.

[0056] Angle sensor 526 can sense the angle of drive wheel 522. Angle sensor 526 can transmit the sensed drive angle value (i.e., the sensed angle of drive wheel 522) to control unit 600.

[0057] The steering unit 530 can be mounted on the main body 510. The steering unit 530 may include multiple steering wheels 532 and a steering track 534. The steering wheels 532 can be arranged in a direction parallel to the travel direction of the transport vehicle 500 when viewed from above. Additionally, the longitudinal direction of the steering track can also be parallel to a direction perpendicular to the travel direction of the transport vehicle 500 when viewed from above. Furthermore, the position of the steering wheels 532 can be changed in the longitudinal direction of the steering track 534.

[0058] The frame 540 may be disposed at the lower part of the transport vehicle 500. The frame 540 may have a cuboid shape with open sides and bottom. The frame 540 may have baffles at the front and rear. This prevents the container 20 contained in the transport vehicle 500 from swaying due to air resistance when the vehicle is in motion.

[0059] The neck 550 can be coupled to the body 510. The neck 550 can be configured to be rotatable relative to the body 510 and the frame 540. The frame 540 can be coupled to at least one or more bodies 510 via at least one or more necks 550. For example, there can be one frame 540, and two necks 550 can be coupled to one frame 540. Furthermore, the two necks 550 can be coupled to different bodies 510 respectively.

[0060] Slider 560 can be coupled to frame 540. The coupling of slider 560 allows its position to change relative to frame 540. Slider 560 can be disposed within the internal space of frame 540 and can be coupled to the bottom of frame 540. Slider 560 can be coupled to frame 540 so that its position can change to the left and right relative to the direction of travel of transport vehicle 500. Furthermore, slider 560 can be coupled to lifting unit 570, as described below. Therefore, by changing the position of slider 560, the position of lifting unit 570 can be changed.

[0061] A lifting unit 570 may be disposed between the body 510 and the gripping unit 580. The lifting unit 570 moves the gripping unit 580 vertically. The lifting unit 570 can move the gripping unit 580 up and down. The lifting unit 570 may include a lifting actuator 571 and a belt 572. The lifting unit 570 may be referred to as a lifting device. The lifting actuator 571 can change the length of the suspension belt 572 by winding or unwinding the belt 572. For example, when the lifting actuator 571 unwinds the belt 572, the length of the belt 572 can be increased, and when the lifting actuator 571 winds the belt 572, the length of the belt 572 can be decreased. Furthermore, multiple belts 572 may be provided. One end of each of the multiple belts 572 may be connected to the gripping unit 580.

[0062] The gripping unit 580 can hold the container 20. When the gripping unit 580 is closed, it can hold the container 20. When the gripping unit 580 is open, it can release the container 20. That is, the gripping unit 580 can hold the container 20 in a detachable manner. The gripping unit 580 can unload the container 20 onto or from port P, such as a loading port of a semiconductor processing device.

[0063] The trolley sensor unit 590 can also be mounted on the main body 510. The trolley sensor unit 590 can be located at the center of the front part of the main body 510. Although it is described that the trolley sensor unit 590 is located at the lower part of the front part of the main body 510, this is merely an example and is not a limitation.

[0064] The trolley sensor unit 590 may include a trolley sensor 592 and an actuation unit 594. The trolley sensor unit 592 can sense objects in front of the transport vehicle 500. The trolley sensor 592 can sense other transport vehicles 500 in front. The trolley sensor 592 can sense objects within a sensing angle of the objects in front. The sensing angle can be adjusted based on the direction or angle towards which the trolley sensor 592 is facing. The trolley sensor 592 may include, but is not limited to, proximity sensors, infrared sensors, ultrasonic sensors, acceleration sensors, angular acceleration sensors, and light sensors. The trolley sensor 592 can transmit the trolley sensing value, i.e., the sensing value of the object in front, to the control unit 600.

[0065] Actuation unit 594 can be connected to trolley sensor 592. Actuation unit 594 can change the sensing angle of trolley sensor 592. Actuation unit 594 may include a power transmission member 594a connected to trolley sensor 592 and a power supply member 594b supplying power to power transmission member 594a. For example, power transmission member 594a may be a gear member, pulley member, or toothed member, while power supply member 594b may be a motor, but is not limited thereto. Power supply member 594b can supply power to power transmission member 594a, and power transmission member 594a can rotate by the supplied power, thereby changing the sensing angle of trolley sensor 592.

[0066] The control unit 600 may be located in the main body 510. The control unit 600 may control at least one of the drive unit 520, slider 560, lifting unit 570 and trolley sensor unit 590.

[0067] The control unit 600 can receive drive angle sensing values ​​from angle sensor 526 and trolley sensing values ​​from trolley sensor 592. The control unit 600 can control at least one of drive-actuator unit 524 and actuation unit 594 based on the drive angle sensing values ​​and trolley sensing values.

[0068] The control unit 600 can obtain the driving angle of the drive wheel 521 based on the driving angle sensing value, and can obtain the sensing angle of the trolley sensor 592 based on the trolley sensing value.

[0069] The control unit 600 can command the actuation unit 594 to change the sensing angle of the trolley sensor 592, so that the drive angle matches the sensing angle of the trolley sensor 592. When the transport vehicle 500 is traveling in the turning section 330, the drive angle of the drive wheel 521 can be changed in real time. The control unit 600 can command the actuation unit 594 to change the sensing angle, thereby matching the real-time changing drive angle. In this way, by changing the sensing angle to match the drive angle, the possibility of collisions between transport vehicles 500 can be reduced.

[0070] The control unit 600 can determine whether the transport vehicle 500 is traveling on a straight section 310 or a turning section 330 based on the drive angle. The control unit 600 can also determine whether the transport vehicle 500 has entered the turning section 330.

[0071] For example, if the drive angle is within a preset range, the control unit 600 can determine that the transport vehicle 500 is traveling on the straight section 310; if the drive angle is outside the preset range, the control unit 600 can determine that the transport vehicle 500 is traveling on the turning section 330. When the drive angle changes from within the preset range to outside the preset range, the control unit 600 can determine that the transport vehicle 500 has entered the turning section 330. Furthermore, when the drive angle changes from outside the preset range to within the preset range, the control unit 600 can determine that the transport vehicle 500 has entered the straight section 310.

[0072] When the transport vehicle 500 enters the turning section 330, the control unit 600 can command the drive-actuator 524 to control the drive wheels 522, thereby reducing the driving speed of the transport vehicle 500. For example, the control unit 600 can command the drive-actuator 524 to control the drive wheels 522 to reduce the speed of the transport vehicle 500 from a first speed to a second speed.

[0073] Furthermore, when the transport vehicle 500 enters the turning section 330, the control unit 600 can determine whether there is another transport vehicle 500 in front of it based on the trolley sensing value. The control unit 600 can determine whether there is another transport vehicle 500 in front of it based on a preset number of times. When another transport vehicle 500 is determined to be present within the preset number of times, the control unit 600 can command the drive-actuator 524 to control the drive wheel 522 to stop the transport vehicle 500. By repeatedly determining whether there is another transport vehicle 500 as described above, the control unit 600 can reduce the possibility of collisions between the transport vehicles 500.

[0074] When the transport vehicle 500 enters the straight section 310, the control unit 600 can command the drive-actuator 524 to control the drive wheel 522, thereby increasing the drive speed of the transport vehicle 500. For example, the control unit 600 can command the drive-actuator 524 to control the drive wheel 522, thereby increasing the speed of the transport vehicle 500 from a second speed to a first speed.

[0075] Figure 6 This is a flowchart illustrating a method of operating a transport vehicle according to an embodiment of the present disclosure. Figure 7 This is a conceptual diagram illustrating a transportation method according to an embodiment of the present disclosure.

[0076] refer to Figure 6 The transport vehicle can obtain the drive angle of the drive wheels (S610). The transport vehicle 500 can sense the drive angle of the drive wheels 522 through the angle sensor 526.

[0077] The transport vehicle can determine whether it has entered a turning section (S620). The transport vehicle 500 can determine whether it has entered a turning section (330) based on the sensed drive angle. When the drive angle is within a preset range, the transport vehicle 500 can determine that it has not entered the turning section 330, and when the drive angle is outside the preset range, the transport vehicle 500 can determine that it has entered the turning section 330.

[0078] When it is determined that the transport vehicle 500 has not entered the turning segment 330 ("No" in S620), it can be determined that the transport vehicle 500 is traveling on the straight segment 310, and the presence of other transport vehicles 500 ahead can be detected. Further, the transport vehicle 500 can return to S610 and obtain the drive angle of the drive wheels 522.

[0079] When it is determined that the transport vehicle 500 has entered the turning section 330 ("Yes" in S620), the transport vehicle 500 can reduce its drive speed (S630). For example, the transport vehicle 500 can reduce its drive speed from a first speed to a second speed. Furthermore, the transport vehicle 500 can change the sensing angle of the trolley sensor 592 to match the drive angle of the drive wheel 522.

[0080] The transport vehicle 500 can determine whether there is another transport vehicle 500 located in front of the target transport vehicle 500 (S640). The transport vehicle 500 can acquire sensing values ​​through the trolley sensor 592 and can determine whether there is another transport vehicle in front of the target transport vehicle 500 based on the acquired sensing values.

[0081] When another transport vehicle is located in front of the identified subject transport vehicle 500 ("Yes" in S640), the subject transport vehicle 500 can be stopped (S650). The subject transport vehicle 500 can stop the drive wheels 522 via the drive-actuation unit 524.

[0082] When it is determined that there is no transport vehicle in front of the target transport vehicle 500 ("No" in S640), the transport vehicle 500 can re-determine whether there is another transport vehicle in front of it (S660). The transport vehicle 500 can re-acquire the sensing value through the trolley sensor 592, and can re-determine whether there is another transport vehicle in front of it based on the re-acquired sensing value. At this time, the transport vehicle 500 can move at a constant speed. Step S660 can be repeated.

[0083] When it is determined again that there is another transport vehicle in front of the object transport vehicle 500 ("Yes" in S660), the transport vehicle 500 can stop (S670).

[0084] When there is no transport vehicle in front of the object transport vehicle 500 ("Yes" in S660), the transport vehicle 500 can obtain the drive angle of the drive wheel 522 through the angle sensor 526 (S680).

[0085] The transport vehicle can determine whether it has entered the straight section (S690). When it is determined that the transport vehicle 500 has not entered the straight section 310 ("No" in S690), the transport vehicle 500 can return to S680 and sense the drive angle of the drive wheel 522.

[0086] When it is determined that the transport vehicle 500 has entered the straight section 310 ("Yes" in S690), the transport vehicle 500 may reduce its driving speed (S700). The transport vehicle 500 may increase its driving speed from the second speed to the first speed.

[0087] Figure 8 This is a schematic plan view of a transport vehicle according to another embodiment of the present disclosure, viewed from the front.

[0088] refer to Figures 8 to 5 According to another embodiment of this disclosure, the transport vehicle 5000 may include a body 510, a drive unit 520, a steering unit 530, a frame 540, a neck 550, a slider 560, a lifting unit 570, a gripping unit 580, a trolley sensor unit 5900, and a control unit 600.

[0089] The transport vehicle may include: a first vehicle sensor 5910, which is disposed at the center of the front of the main body 510 and is used to sense objects in front of the transport vehicle 5000; a second vehicle sensor 5910, which is disposed on one side of the front of the main body 510 and is used to sense objects in front of the transport vehicle 5000; and a third vehicle sensor 5930, which is disposed on the other side of the front of the main body 510 and is used to sense objects in front of the transport vehicle 5000. In this configuration, the first vehicle sensor 5910, the second vehicle sensor 5920, and the third vehicle sensor 5930 can be connected with... Figure 2 The trolley sensor 592 shown is the same. On the other hand, at least one of the first trolley sensor 5910, the second trolley sensor 5920, and the third trolley sensor 5930 can be... Figure 2 The trolley sensor 590 shown is the same. The sensing values ​​of the first trolley sensor 5910, the second trolley sensor 5920, and the third trolley sensor 5930 can be transmitted to the control unit 600.

[0090] The control unit 600 can receive sensing values ​​from the first vehicle sensor 5910, the second vehicle sensor 5920, and the third vehicle sensor 5930. The control unit 600 can control the drive unit 520 and the vehicle sensor unit 5900 based on at least one of the drive angle sensing value, the sensing value of the first vehicle sensor 5710, the sensing value of the second vehicle sensor 5720, and the sensing value of the third vehicle sensor 5730.

[0091] The foregoing detailed description illustrates the present invention. Furthermore, the foregoing has shown and described exemplary embodiments of the invention, and the invention can be used in various other combinations, variations, and environments. That is, modifications or alterations can be made to the foregoing within the scope of the inventive concept disclosed herein, its equivalents, and / or within the scope of knowledge or skill of the art. The foregoing exemplary embodiments describe the optimal state for carrying out the technical spirit of the invention, and various changes are possible in specific fields and uses of the invention. Therefore, the foregoing detailed description of the invention is not intended to limit the invention to the disclosed exemplary embodiments. Furthermore, the appended claims should be interpreted to include other exemplary embodiments as well.

Claims

1. A device for conveying, wherein, The apparatus includes a transport vehicle that transports a container containing articles therein, wherein the transport vehicle includes: The drive unit includes a drive wheel and an angle sensor that senses the drive angle. A trolley sensor unit, comprising a first trolley sensor disposed at the center of the front of the transport vehicle and sensing an object in front of the transport vehicle; and A control unit that controls at least one of the drive unit and the vehicle sensor unit based on the drive angle sensing value of the angle sensor and the first vehicle sensing value of the first vehicle sensor.

2. The apparatus according to claim 1, wherein, The trolley sensor unit includes an actuation unit that changes the sensing angle of the first trolley sensor.

3. The apparatus according to claim 2, wherein, The actuation unit includes: A power transmission component, the power transmission component being connected to the first vehicle sensor; and A power supply component that supplies power to the power transmission component.

4. The apparatus according to claim 2, wherein, The control unit controls the actuation unit based on the driving angle sensing value, so that the driving angle and the sensing angle are matched.

5. The apparatus according to claim 1, wherein, The control unit When the transport vehicle is traveling at a first speed on a straight section, it is determined whether the transport vehicle has entered a turning section based on the drive angle sensing value; When the transport vehicle enters the turning section, the drive unit is controlled to reduce the drive speed of the transport vehicle from the first speed to the second speed; as well as The presence of another transport vehicle in front of the first vehicle is determined based on the sensor value of the first vehicle.

6. The apparatus according to claim 5, wherein, When the other transport vehicle is present, the control unit controls the drive unit to stop the transport vehicle.

7. The apparatus according to claim 5, wherein, Based on the sensor value of the first vehicle, the control unit repeatedly determines whether the other transport vehicle exists.

8. The apparatus according to claim 7, wherein, The control unit If the result indicates that there are no other transport vehicles, it is determined whether the transport vehicle enters the straight segment based on the drive angle sensing value; as well as When the transport vehicle enters the straight section, the drive unit is controlled to increase the drive speed of the transport vehicle from the second speed to the first speed.

9. The apparatus according to claim 1, wherein, The trolley sensor unit also includes: A second vehicle sensor, disposed on one side of the front of the transport vehicle, senses objects in front of the transport vehicle; and A third vehicle sensor is located on the other side of the front of the transport vehicle and senses objects in front of the transport vehicle.

10. The apparatus according to claim 9, wherein, The control unit controls the drive unit and the vehicle sensor unit based on at least one of the drive angle sensing value, the first vehicle sensing value, the second vehicle sensing value of the second vehicle sensor, and the third vehicle sensor.

11. The apparatus according to claim 1, wherein, The device further includes: Tracks, which are mounted on the top plate of a production line where semiconductor processing equipment is continuously arranged; and A port, which is configured to allow the container to be placed on the port.

12. A method of operating a means for transmitting, wherein, The method includes: The vehicle is determined to enter a turning section based on the drive angle sensing value detected by the angle sensor. When the transport vehicle enters the turning section, the driving speed of the transport vehicle is reduced; Based on the trolley sensing values ​​detected by the trolley sensors, it is determined whether there is another transport vehicle in front of the transport vehicle; and Depending on whether there are other transport vehicles available to stop or continue traveling at a reduced speed. The sensing value of the trolley sensor changes based on the driving angle sensing value.

13. The method according to claim 12, wherein, The decision to stop or continue traveling at a reduced speed based on the presence of other transport vehicles includes: stopping when other transport vehicles are available.

14. The method according to claim 12, wherein, The decision to stop or continue traveling at a reduced speed based on the presence of other transport vehicles includes: if no other transport vehicle is available, then determining again whether other transport vehicles are available.

15. The method according to claim 14, wherein, Based on a preset number of times, the process of determining whether there are other transport vehicles is repeated when no other vehicles are available.

16. The method according to claim 12, wherein, The availability of other transport vehicles to stop or continue traveling at a reduced speed includes: When no other transport vehicle is present, the determination of whether the transport vehicle has entered a straight segment is based on the drive angle sensing value detected by the angle sensor; and When the transport vehicle enters the straight section, the driving speed of the transport vehicle is increased.

17. A device for conveying, wherein, The device includes: The track is provided along the top plate; A port, the port being configured to allow a container to be placed on the port; and A transport vehicle travels along the track and transports the container to the port. The transport vehicle includes: A drive unit, the drive unit having a drive wheel; An angle sensor unit, the angle sensor unit including an angle sensor that senses and drives angle sensing values; A trolley sensor unit, comprising a first trolley sensor disposed at the center of the front of the transport vehicle and sensing an object in front of the transport vehicle; and A control unit that controls at least one of the drive unit and the vehicle sensor unit based on the drive angle sensing value of the angle sensor and the first vehicle sensing value of the first vehicle sensor. The trolley sensor unit includes an actuation unit that changes the sensing angle of the first trolley sensor. The actuation unit includes: A power transmission component, the power transmission component being connected to the first vehicle sensor; and A power supply component that supplies power to the power transmission component. The control unit The actuation unit is controlled based on the driving angle sensing value, so that the driving angle and the sensing angle are matched. When the transport vehicle is traveling at a first speed on a straight section, it is determined whether the transport vehicle has entered a turning section based on the drive angle sensing value; As the transport vehicle enters the turning section, the drive unit is controlled to reduce the drive speed of the transport vehicle from the first speed to the second speed; and The presence of another transport vehicle in front of the first vehicle is determined based on the sensor value of the first vehicle.

18. The apparatus according to claim 17, wherein, When the other transport vehicle is present, the control unit controls the drive unit to stop the transport vehicle.

19. The apparatus according to claim 17, wherein, The control unit The presence of other transport vehicles is repeatedly determined based on the sensor values ​​of the first vehicle. If the result indicates that there are no other transport vehicles, it is determined whether the transport vehicle enters the straight segment based on the drive angle sensing value; as well as When the transport vehicle enters the straight section, the drive unit is controlled to increase the drive speed of the transport vehicle from the second speed to the first speed.

20. The apparatus according to claim 17, wherein, The trolley sensor unit also includes: A second vehicle sensor, disposed on one side of the front of the transport vehicle, senses objects in front of the transport vehicle; and A third vehicle sensor, located on the opposite side of the front of the transport vehicle, senses objects in front of the transport vehicle. The control unit controls the drive unit and the vehicle sensor unit based on at least one of the drive angle sensing value, the first vehicle sensing value, the second vehicle sensing value of the second vehicle sensor, and the third vehicle sensor.

Images