Active vibration isolation system

Abstract

The invention discloses an active vibration isolation system. The active vibration isolation system includes a plurality of vibration isolation devices and a diagnostic device. Each of the plurality of vibration isolation devices has an actuator and a state sensor. In the first determination process, the diagnostic device executes a dynamic diagnosis for individually determining the presence or absence of an abnormality in the state sensor for each of the plurality of vibration isolation devices by operating at the same time two or more actuators among the plurality of vibration isolation devices, and in the second determination process, the diagnostic device executes a dynamic diagnosis for determining the presence or absence of an abnormality in the state sensor. The diagnostic device individually determines the presence or absence of an abnormality in the actuator for each of the plurality of vibration isolation devices by sequentially operating the actuator one by one, and outputs the determination results of the first determination process and the second determination process to at least one of the external device and the notification unit. In an active vibration isolation system comprising a plurality of active vibration isolation devices, the presence or absence of an abnormality in element parts of each active vibration isolation device is more accurately determined.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to an active vibration isolation system. BACKGROUND

[0002] For example, Patent Literature 1 discloses a method of diagnosing a failure site of a control device. The control device includes a plurality of actuators that apply a force to an object, and a plurality of sensors that detect a state quantity of the object.

[0003] According to Patent Literature 1 described above, the method disclosed in this literature has: a first process of comparing a first signal with a second signal; and a second process of diagnosing a failure site based on a result of the comparison in the first process.

[0004] Here, the first signal is a signal that is respectively output from the plurality of sensors in a state where the plurality of actuators and the plurality of sensors are regarded as normal. The second signal is a signal that is respectively output from the plurality of sensors in a state where the control device is used.

[0005] Further, according to Patent Literature 1 described above, an initial state at the time of assembly of the control device is used as the state where the plurality of actuators and the plurality of sensors are regarded as normal.

[0006] PRIOR ART DOCUMENTS

[0007] PATENT LITERATURE

[0008] Patent Literature 1: Japanese Patent Application Laid-Open No. 2023-171052 SUMMARY

[0009] PROBLEMS TO BE SOLVED BY THE INVENTION

[0010] As described in Patent Literature 1 described above, it is considered that each active vibration isolation device that constitutes an active vibration isolation system includes an element component such as a sensor and an actuator. In this case, when any of the element components is abnormal, it is not easy to determine the element component that is abnormal.

[0011] Further, it is assumed that in a case where a plurality of active vibration isolation devices support an external device such as a semiconductor manufacturing device, it is required to quickly determine whether the external device is abnormal or the active vibration isolation system is abnormal. Otherwise, there is a possibility that a manufacturing delay due to the external device, or a failure of the external device due to the abnormality of the active vibration isolation system, will occur.

[0012] The present disclosure is made to solve the above problems, and aims to more accurately determine whether an element component of each active vibration isolation device is abnormal in an active vibration isolation system constituted by a plurality of active vibration isolation devices.

[0013] TECHNICAL SOLUTION FOR SOLVING THE PROBLEMS

[0014] A first aspect of the present disclosure relates to an active vibration isolation system including a plurality of active vibration isolation devices provided on a base and a diagnostic device that individually controls the plurality of active vibration isolation devices, an external device supported by a platform via the plurality of active vibration isolation devices, the external device configured to be able to receive an electric signal.

[0015] According to the above-described first aspect, the active vibration isolation system includes actuators and a plurality of state sensors, the actuators are respectively provided on the plurality of active vibration isolation devices and operate in a manner to excite vibration to the external device, the plurality of state sensors are used to detect vibration of the plurality of active vibration isolation devices or vibration of the base, the diagnostic device sequentially executes a first determination process and a second determination process, in the first determination process, the diagnostic device determines whether a sensing circuit including the state sensor has an abnormality based on a detection signal of the state sensor, the second determination process is executed after the first determination process ends, in the second determination process, the diagnostic device determines whether the actuator has an abnormality.

[0016] Further, in the first determination process, the diagnostic device inputs a control signal to the plurality of active vibration isolation devices to simultaneously operate two or more of the actuators, and based on the detection signal corresponding to the control signal, performs dynamic diagnosis individually determining whether each of the plurality of state sensors has an abnormality, in the second determination process, the diagnostic device inputs a control signal to the plurality of active vibration isolation devices to sequentially operate the actuators one by one, and based on the detection signal corresponding to the control signal, individually determines whether each of the plurality of active vibration isolation devices has an abnormality, the diagnostic device outputs the determination results of the first determination process and the second determination process to at least one of the external device and a notification portion of the diagnostic device.

[0017] Here, since the diagnostic device is able to control each active vibration isolation device, the term "diagnostic device" can also be referred to as "controller". Regardless of its name, the diagnostic device involved in the present disclosure generally includes a device capable of controlling the active vibration isolation device. The diagnostic device can be a controller for the vibration isolation table, other controllers connected to the active vibration isolation device via the controller, or a combination thereof.

[0018] Here, the "other controllers" generally include a device capable of indirectly controlling the active vibration isolation device via the controller for the vibration isolation table. The other controllers can be a controller for controlling the external device, a repeater between the controller for the vibration isolation table and the controller for the external device, or a combination thereof.

[0019] The plurality of active vibration isolators can be regarded as being connected via the platform and the external device. Therefore, even if an actuator of any of the plurality of active vibration isolators is abnormal, by operating the remaining actuators, it is possible to detect vibrations that occur in association with the operation using the plurality of state sensors. Furthermore, by individually determining or comparing the detection signals of the state sensors, it is possible to accurately determine the state sensor that is abnormal even when the plurality of active vibration isolators are used.

[0020] On the other hand, in the second determination processing performed after the above-described first determination processing (in particular, dynamic diagnosis), the actuators of the plurality of active vibration isolators are operated in turn. By operating the actuators in turn, it is possible to accurately determine the actuator that is abnormal.

[0021] In addition, since the above-described first determination processing and the above-described second determination processing are processing that is completed in the active vibration isolator alone, even when the external device is mounted on the active vibration isolator, it is possible to distinguish whether the external device is abnormal or the active vibration isolator is abnormal. Thus, when various abnormalities occur, it is possible to respond to the abnormality as quickly as possible, and it is possible to accurately suppress manufacturing delays due to the external device, malfunctions of the external device due to abnormalities in the active vibration isolation system, and the like.

[0022] In addition, according to the second aspect of the present disclosure, at least some of the plurality of state sensors can be provided on each of the plurality of active vibration isolators.

[0023] According to the above-described second aspect, in the case where a particular actuator is abnormal, the influence of the abnormality is strongly reflected in the detection signal of the state sensor corresponding to the actuator. Therefore, by using the detection signal of the state sensor corresponding to the particular actuator, it is possible to make a more accurate determination at the time of the second determination processing.

[0024] In addition, according to the third aspect of the present disclosure, in the case where it is determined that each of the plurality of state sensors is not abnormal, the diagnostic device can perform the second determination processing.

[0025] As is known in the art, for example, in the case where there is no significant difference in the signals output from each sensor at the time of sensor abnormality and at the time of actuator abnormality, a method of determining by comparing with the initial state is not able to determine whether the sensor is abnormal or the actuator is abnormal.

[0026] In this regard, according to the third aspect described above, it is possible to clearly distinguish between the abnormality determination with respect to the state sensor of each active vibration isolation device and the abnormality determination with respect to the actuator of the same active vibration isolation device. Thus, it is possible to achieve more accurate determination.

[0027] In addition, according to the fourth aspect of the present disclosure, the first determination processing can be configured to sequentially perform a static diagnosis that diagnoses the entire sensing circuit and the dynamic diagnosis, and the diagnosis device can determine whether there is an abnormality in the sensing circuit based on the detection signal of the state sensor of each of the plurality of actuators at a time when each of the actuators is not operating, at the time of the static diagnosis.

[0028] In general, among the operation abnormalities of the sensing circuit, there are the shift in the detection value of the state sensor caused by an abnormality in the element component such as an amplifier connected to each state sensor, or the shift in the detection value of the state sensor caused by a short circuit in the electrical wiring that constitutes each sensing circuit or the electrical wiring connected to each sensing circuit. The influence of such a shift is more an operation abnormality of the entire sensing circuit than an operation abnormality of the state sensor itself, and it is appropriate if it is handled separately from the dynamic diagnosis.

[0029] According to the fourth aspect described above, the diagnosis device performs the static diagnosis for determining the operation abnormality of the entire sensing circuit in addition to the dynamic diagnosis for determining the operation abnormality of the state sensor itself. Thus, it is possible to achieve more accurate determination.

[0030] In addition, according to the fifth aspect of the present disclosure, the state sensor can acquire a detection signal that shows at least one of the acceleration of the upper end portion of the active vibration isolation device and the displacement amount of the upper end portion with respect to the base, in the first determination processing, the diagnosis device can determine that there is an abnormality in at least a part of the sensing circuit when the magnitude of the detection value of the state sensor exceeds a predetermined static threshold value at the time of the static diagnosis, and the diagnosis device can determine that there is an abnormality in the state sensor when the magnitude of the detection value of the state sensor is lower than a predetermined dynamic threshold value at the time of the dynamic diagnosis, and in the second determination processing, the diagnosis device can determine that there is an abnormality in the actuator when the magnitude of the detection value of the state sensor is lower than a predetermined actuator threshold value.

[0031] In addition, according to the sixth aspect of the present disclosure, the magnitude of the detection value in the static diagnosis can refer to the average value of the detection value within a predetermined period, and the magnitude of the detection value in the dynamic diagnosis and the second determination processing can refer to the difference between the maximum value and the minimum value of the detection value within a predetermined period.

[0032] As known in the art, the method of determining by comparison with the initial state is a method premised on the initial state being normal, and cannot be used when the initial state is abnormal, so the scope of application of this method is limited.

[0033] In contrast, according to the fifth and sixth aspects described above, even without comparison with the initial state, it is possible to accurately determine the presence or absence of abnormality.

[0034] In addition, according to the seventh aspect of the present disclosure, it can also be that the dynamic threshold and the actuator threshold are each composed of a plurality of thresholds of different sizes, and in the case where it is determined that the state sensor or the actuator has an abnormality, the diagnostic device causes the output method of the determination result to differ depending on which of the plurality of thresholds is exceeded.

[0035] According to the seventh aspect described above, by preparing a plurality of thresholds, it is possible to impart variation to the output method, such as only giving a caution to the user, or giving an error notification of the level that the active vibration isolation system should be stopped, and the like. Thereby, it is possible to improve the use convenience of the active vibration isolation system.

[0036] In addition, according to the eighth aspect of the present disclosure, it can also be that the external device includes an external controller that is independent of the controllers that individually control the plurality of active vibration isolation devices, and a drive portion that is electrically connected to the external controller, the external controller controls the operation of the drive portion by inputting a control signal to the drive portion, and the external controller controls the operation of the drive portion or the operation of the actuator based on an electrical signal that shows the determination result of each of the first determination processing and the second determination processing.

[0037] According to the eighth aspect described above, it is possible to control the operation of the external device or the operation of each active vibration isolation device by the external controller. Thereby, it is possible to accurately cooperate each active vibration isolation device with the external device.

[0038] In addition, according to the ninth aspect of the present disclosure, it can also be that the active vibration isolation system includes a second state sensor that detects the vibration state on the platform, the second state sensor is composed of a different sensor from the state sensor, or is composed of the state sensor itself, and the external controller controls the operation of the drive portion or the operation of the actuator based on a detection signal of at least one of the state sensor and the second state sensor.

[0039] According to the ninth aspect described above, it is possible to control the operation of the external device or the operation of each active vibration isolation device by the external controller. Thereby, it is possible to accurately cooperate each active vibration isolation device with the external device.

[0040] In addition, according to the tenth aspect of the present disclosure, the active vibration isolation system can further include an environment sensor that senses a setting environment of the active vibration isolation system, the diagnosis device can determine the setting environment of the active vibration isolation system based on a detection signal of the environment sensor, and the external controller can control the operation of the driving section or the operation of the actuator based on a determination result based on the environment sensor.

[0041] According to the tenth aspect described above, the active vibration isolation system performs a process that combines diagnosis of the active vibration isolation device and diagnosis of the setting environment of the system. Thus, in a case where a performance or the like of the external device is in an undesirable state, the cause can be traced from various viewpoints. In addition, since the cause can be easily traced even by an unskilled operator, user convenience is improved.

[0042] In addition, according to the eleventh aspect of the present disclosure, the active vibration isolation system can further include an external sensor that senses an operation state of the external device, the diagnosis device can determine the operation state of the external device based on a detection signal of the external sensor, and the external controller can control the operation of the driving section or the operation of the actuator based on a determination result based on the external sensor.

[0043] According to the eleventh aspect described above, the active vibration isolation system performs a process that combines diagnosis of the active vibration isolation device and diagnosis of the operation state of the external device. Thus, in a case where a performance or the like of the external device is in an undesirable state, the cause can be traced from various viewpoints, such as whether the cause is in the active vibration isolation device or in the external device itself. In addition, since the cause can be easily traced even by an unskilled operator, user convenience is improved.

[0044] In addition, according to the twelfth aspect of the present disclosure, the diagnosis device can acquire detection signals of the state sensor, the second state sensor, the environment sensor, and the external sensor in real time, respectively, and record the acquired contents based on determination results based on the detection signals of the state sensor, the second state sensor, the environment sensor, and the external sensor.

[0045] According to the twelfth aspect described above, since various sensors can be effectively utilized in combination to monitor the state of the entire active vibration isolation system, the external device can be operated on the basis of the active vibration isolation device, the external device, and the setting environment each being in a desirable state.

[0046] Furthermore, since the real-time acquired detection signals are used for various judgments, it is possible to quickly begin investigating the cause when external equipment fails to perform as expected. Because all detection signals are centralized in the diagnostic device, users can comprehensively monitor the active vibration isolation device, external equipment, and the entire installation environment. This improves user convenience, as even less experienced operators can easily trace the cause. Additionally, because the data from each sensor is recorded, even if a malfunction is missed, it is possible to analyze the timing and cause of that malfunction later.

[0047] Alternatively, according to the thirteenth aspect of this disclosure, the diagnostic device may have an input section for accepting user input, and the diagnostic device may change the determination criteria in the determination based on the detection signals of the state sensor, the second state sensor, the environmental sensor, and the external sensor based on the user input via the input section.

[0048] According to the thirteenth aspect mentioned above, users can easily change various judgment criteria, such as thresholds corresponding to each sensor, via the input section of the diagnostic device. Since even non-skilled operators can easily change the judgment criteria, it contributes to improved user convenience.

[0049] Furthermore, the system allows for flexible adjustments to the settings of the entire active vibration isolation system by changing the criteria used for the active vibration isolation device based on its type or installation environment. This also enhances user convenience.

[0050] Alternatively, according to the fourteenth aspect of this disclosure, the diagnostic device may be composed of at least one of a controller, an external controller, and a repeater, wherein the controller controls the plurality of active vibration isolation devices respectively, the external controller controls the external equipment, and the repeater is located between the controller and the external controller.

[0051] -The effects of the invention-

[0052] As explained above, according to this disclosure, in an active vibration isolation system consisting of multiple active vibration isolation devices, it is possible to more accurately determine whether there are any abnormalities in the components of each active vibration isolation device. Attached Figure Description

[0053] Figure 1 This is a diagram illustrating the structure of an active vibration isolation system;

[0054] Figure 2 This is a diagram illustrating the structure of a vibration isolation table;

[0055] Figure 3is a block diagram illustrating a structure of control related to a vibration isolation table;

[0056] Figure 4 is a flowchart showing an overall configuration of the first determination processing and the second determination processing;

[0057] Figure 5 is a flowchart illustrating a static diagnosis of the first determination processing;

[0058] Figure 6 is a flowchart illustrating a dynamic diagnosis of the first determination processing;

[0059] Figure 7 is a graph for explaining the static diagnosis;

[0060] Figure 8 is a graph for explaining the dynamic diagnosis;

[0061] Figure 9 is a flowchart illustrating the second determination processing;

[0062] Figure 10 is a block diagram illustrating a brief structure of an active vibration isolation system;

[0063] Figure 11 is a flowchart illustrating a notification processing using a controller itself;

[0064] Figure 12 is a flowchart illustrating a notification processing using an external controller;

[0065] Figure 13 is a table showing details of the first determination processing and the second determination processing;

[0066] Figure 14 is a corresponding view illustrating the second embodiment; Figure 10

[0067] Figure 15 is a flowchart illustrating other determination processing in the second embodiment;

[0068] Figure 16 is a flowchart illustrating a notification processing in the second embodiment.

[0069] SYMBOL EXPLANATION

[0070] ​S - active vibration isolation system; 1 - vibration isolation table; 3 - platform; 5 - active vibration isolation device; 73 - top plate (upper end portion); 8 - actuator; 9 - state sensor (sensing circuit); 91 - FB acceleration sensor (state sensor); 92 - FB displacement sensor (state sensor); 6 - second state sensor; 61 - FF acceleration sensor (state sensor, second state sensor); 62 - table vibration sensor (second state sensor); 10 - signal processing circuit (sensing circuit); 10a - amplifier; 10b - analog-digital converter; 11 - sensing circuit; 12 - environmental sensor; 13 - external sensor; 100 - controller (diagnosis device); 101 - notification section; 200 - repeater (diagnosis device); 201 - IO unit; 202 - control terminal; 221 - input section; 223 - storage section; 1000 - external device; 1001 - drive section; 1004 - drive position sensor (external sensor); 1100 - external controller; 1101 - external notification section; F - base. DETAILED DESCRIPTION

[0071] Hereinafter, a first embodiment (hereinafter, also simply referred to as "embodiment") of the present disclosure will be described based on the drawings. Note that the following description is merely an example.

[0072] <1. Overall structure>

[0073] Figure 1 is a diagram illustrating the structure of the active vibration isolation system S. In addition, Figure 10 is a block diagram illustrating the outline structure of the active vibration isolation system S. As Figure 1 and Figure 10 indicated, the active vibration isolation system S includes the vibration isolation table 1 and the external device 1000 configured to be able to receive an electric signal, and supported from below by the vibration isolation table 1.

[0074] The vibration isolation table 1 is provided on the base F. As will be described later, the vibration isolation table 1 includes the controller 100 and a plurality of actuators 8, and each actuator 8 is controlled by the controller 100. The vibration isolation table 1 cuts off the transmission of vibration from the base F toward the external device 1000 by this control. That is, the vibration isolation table 1 is configured to isolate the external device 1000 from the base F.

[0075] <2. External device>

[0076] As Figure 1As shown, the external device 1000 is set or mounted on the vibration isolation table 1. The external device 1000 includes an external controller 1100 independent of the controller 100 of the vibration isolation table 1 and a drive section 1001 electrically connected to the external controller 1100. The external controller 1100 controls the operation of the drive section 1001 by inputting a control signal to the drive section 1001.

[0077] Specifically, the external device 1000 is a manufacturing apparatus of a semiconductor, a liquid crystal panel, or an LED panel. The external device 1000 is an apparatus that supports various mount objects 1002 such as a silicon wafer of a semiconductor by a movable stage, and is capable of positioning the mount objects 1002 on the stage accurately and at high speed by moving the stage appropriately. In this case, the above-mentioned drive section 1001 can be the movable stage itself, or can be an element associated with the movable stage such as a linear motor for moving the stage.

[0078] Further, the external device 1000 can also be an electron microscope or an optical measuring apparatus. The external device 1000 is appropriate as long as it is an apparatus that requires to suppress the transmission of vibrations from the ground (base F) as much as possible. In the case where the external device 1000 is an electron microscope, the above-mentioned drive section 1001 can be, for example, a focus adjustment mechanism that adjusts the focus position of an optical system.

[0079] The relationship between the vibration isolation table 1 and the external device 1000 can also be referred to Figure 10 . As shown in Figure 10 , the external controller 1100 is connected to an external notification section 1101 constituted by a display, a plurality of lamps, a speaker, and the like. Similarly, the controller 100 of the vibration isolation table 1 is connected to a notification section 101 constituted by a display, a plurality of lamps, a speaker, and the like.

[0080] Further, a drive position sensor 1004 attached to the external device 1000 is provided. The drive position sensor 1004 detects, for example, the position of the stage. The detection signal of the drive position sensor 1004 is used by the external controller 1100 for the movement control of the stage. The movement control is feedback control based on the detection signal of the drive position sensor 1004. In the case where an electron microscope or an optical measuring apparatus is used as the external device 1000, the same feedback control can be performed on the focus position of the optical system.

[0081] <3. Vibration Isolation Table>

[0082] Figure 2 is a perspective view showing the structure of the vibration isolation table 1. As shown in Figure 1 and Figure 2As shown, the vibration isolation table 1 includes a platform 3, a plurality of active vibration isolation devices 5, a plurality of state sensors 9, and the above-described controller 100. The platform 3 is supported from below by the plurality of active vibration isolation devices 5, respectively. The vibration isolation table 1 supports the external device 1000 on the base F via the platform 3.

[0083] In the following description, a case where the number of the vibration isolation devices 5 is four as shown in the drawing is described in detail, but the number is not limited to four. In addition, for the sake of simplification of the description, each active vibration isolation device 5 is simply referred to as a vibration isolation device 5 hereinafter.

[0084] (3-1. Device structure of vibration isolation table)

[0085] The platform 3 is formed as a rectangular thick plate. The external device 1000 is carried on the upper surface of the platform 3. On the other hand, the four vibration isolation devices 5 that support the platform 3 from below are arranged on the lower surface of the platform 3. As shown, the four vibration isolation devices 5 are arranged at mutually different positions. Figure 2

[0086] Note that the structure of the platform 3 is not limited to a rectangular thick plate. Instead of the platform 3 as shown in the drawing, a worktable having a plurality of leg portions and carrying the external device 1000 on the upper surface thereof can be used. In the case of using the worktable, it is only necessary to support each leg portion of the worktable from below by each vibration isolation device 5. In addition, instead of using the platform 3, the worktable, or the like, the external device 1000 can be directly supported by the four vibration isolation devices 5.

[0087] Hereinafter, the length direction of the platform 3 is referred to as an "x direction", the width direction of the platform 3 is referred to as a "y direction", and the thickness direction of the platform 3 is referred to as a "z direction". The x direction and the y direction can also be collectively referred to as a horizontal direction. The z direction can also be referred to as an up-down direction. The same three directions are used for the layout of the four vibration isolation devices 5.

[0088] The four vibration isolation devices 5 are each provided on the base F. The base F related to the present embodiment has an upper surface that extends in the horizontal direction. The four vibration isolation devices 5 are provided on the upper surface of the base F. In the active vibration isolation system S related to the present embodiment, the external device 1000 is supported from below by the four vibration isolation devices 5. This support is performed via the platform 3.

[0089] The four vibration isolation devices 5 are each an active vibration isolation device. Each vibration isolation device 5 is capable of executing so-called "active vibration isolation control" constituted by at least one of vibration isolation feedback control and vibration isolation feedforward control. By executing the active vibration isolation control by each vibration isolation device 5, transmission of vibration from the base F toward the external device 1000 is cut off. Hereinafter, the word "feedback" is simply referred to as "FB", and the word "feedforward" is simply referred to as "FF". ​

[0090] The four vibration isolating devices 5 function as passive vibration isolating devices by elastically supporting the external device 1000 on the base F.

[0091] The four vibration isolating devices 5 also function as "stands" for supporting the external device 1000. Therefore, in distinguishing the four vibration isolating devices 5, each vibration isolating device 5 can also be called a "first stand 5A", a "second stand 5B", a "third stand 5C", and a "fourth stand 5D".

[0092] Specifically, the four vibration isolating devices 5 each include one or more support bodies 7 and one or more actuators 8.

[0093] The support body 7 of each vibration isolating device 5 is constituted by a combination of an elastic body and / or a damper. For example, the support body 7 according to the present embodiment is constituted by an air spring that stretches and contracts in the vertical direction and supports a load in the vertical direction. The support body 7 includes a housing 70 arranged on the base F or the like with an upper end opening and a piston 72 that is airtightly inserted into the upper end opening to divide an air chamber within the housing 70.

[0094] The upper end of each support body 7 is joined to a ceiling 73 of the lower surface of the support platform 3. The ceiling 73 corresponds to the upper end portion of each vibration isolating device 5. This ceiling 73 is displaced in the vertical direction by the stretching and contraction of each support body 7.

[0095] The lower end of each support body 7 is joined to a floor 74 supported by the upper surface of the base F. The floor 74 corresponds to the lower end portion of each vibration isolating device 5.

[0096] In addition, each support body 7 can also be constituted by an air spring that stretches and contracts in the horizontal direction, for which illustration is omitted. In the case of being constituted in the manner as described above, the ceiling 73 is displaced in the horizontal direction by the air spring that stretches and contracts in the horizontal direction.

[0097] The actuator 8 of each vibration isolating device 5 is electrically connected to the controller 100, and the actuator 8 of each vibration isolating device 5 operates based on an electric signal from the controller 100. Each actuator 8 operates in a manner that excites the external device 1000. The vibration of the external device 1000 is suppressed in advance or after the fact by this excitation. This suppression is achieved by the platform 3 imparting a control force or displacement to the external device 1000 via the platform 3 by each actuator 8.

[0098] Specifically, each actuator 8 is constituted by a servo valve. Each support body 7 is connected to a pipe for supplying compressed air from a compressed air source outside the drawing. Each actuator 8 is constituted by a servo valve sandwiched on the pipe, and by changing the opening degree of the servo valve, the supply flow rate and the exhaust flow rate of the compressed air supplied to the corresponding air spring (support body 7) are adjusted.

[0099] By adjusting the supply flow rate and the exhaust flow rate, the internal pressure of the air spring is adjusted. Also, by controlling the internal pressure of the air spring, the control force like the vibration suppression is imparted to the vibration isolation table 1.

[0100] Note that each support body 7 can also be constituted by a coil spring. In addition, the actuator 8 does not necessarily have to be constituted by a servo valve. Instead of the servo valve, the actuator can also be constituted by a linear motor.

[0101] In addition, in the case where each support body 7 is constituted by combining air springs that are stretched and contracted in the horizontal direction, each vibration isolation device 5 can also include a second actuator for displacing the air springs in the horizontal direction, for which the illustration is omitted. The second actuator operates to impart the control force like the vibration suppression of the external device 1000 or the displacement to the external device 1000.

[0102] In addition, a plurality of state sensors 9 are electrically connected to the controller 100. The plurality of state sensors 9 respectively input detection signals for detecting the vibration of each of the plurality of vibration isolation devices 5 or the vibration of the base F to the controller 100. Note that the term "vibration state" includes state amounts such as acceleration, displacement amount, and the like that represent the vibration of each vibration isolation device 5.

[0103] At least a part of the plurality of state sensors 9 is provided on each of the plurality of vibration isolation devices 5. In the present embodiment, an FB acceleration sensor 91 and an FB displacement sensor 92 are provided on each vibration isolation device 5 as such a state sensor 9. In addition to the FB acceleration sensor 91 and the FB displacement sensor 92, the state sensor 9 is also constituted by an FF acceleration sensor 61 that detects the vibration state of the base F.

[0104] Furthermore, the vibration isolation table 1 includes a table vibration sensor 62 as a second state sensor 6, which detects the vibration state on the platform 3. Note that, instead of the table vibration sensor 62, at least one of the FB acceleration sensor 91, the FB displacement sensor 92, and the FF acceleration sensor 61 can be regarded as the second state sensor 6.

[0105] That is, the second state sensor 6 can be constituted by a sensor different from the state sensor 9, or can be constituted by the state sensor 9 itself. In the specific example described later, the table-top vibration sensor 62 and the FF acceleration sensor 61 are used as the second state sensor 6. The FF acceleration sensor 61 functions as both the state sensor 9 and the second state sensor 6. Further, the second state sensor 6 can be regarded as one element of the environmental sensor 12 described later, or can be regarded as one element of the external sensor 13 described later as well.

[0106] The FB acceleration sensor 91 detects the acceleration of the top plate 73 of each vibration isolation device 5, or the acceleration of the platform 3 at the support position of each vibration isolation device 5 (refer to P1 to P4 of FIG. 4). Figure 2 For example, the FB acceleration sensor 91 according to the present embodiment detects the acceleration of the top plate 73 (particularly, the acceleration in the up-down direction) as the vibration state of each vibration isolation device 5.

[0107] In the present embodiment, the FB acceleration sensor 91 is constituted by a piezoelectric element sensor, but the present disclosure is not limited to such a structure. The FB acceleration sensor 91 can also be an acceleration sensor that employs other means than a piezoelectric element. Instead of the FB acceleration sensor 91, the acceleration can also be calculated based on the detection signal of a velocity sensor or a displacement sensor.

[0108] The FB displacement sensor 92 detects the displacement amount of the top plate 73 or the above-described platform 3 with respect to the support position of the base F or the bottom plate 74 in each vibration isolation device 5. For example, the FB displacement sensor 92 according to the present embodiment detects the displacement amount of the top plate 73 with respect to the base F (particularly, the displacement amount in the up-down direction) for each vibration isolation device 5.

[0109] In the present embodiment, the FB displacement sensor 92 is constituted by an eddy current type displacement sensor, but the present disclosure is not limited to such a structure. The FB displacement sensor 92 can also be a displacement sensor that employs other means such as a Hall element sensor.

[0110] The FF acceleration sensor 61 is capable of detecting the acceleration of the bottom plate 74 of each vibration isolation device 5 (floor vibration). The FF acceleration sensor 61 detects the acceleration of the bottom plate 74 (particularly, the acceleration in the up-down direction) as the vibration state of each vibration isolation device 5.

[0111] The table-top vibration sensor 62 is capable of detecting the vibration state of the platform 3 or the external device 1000. The detection signal of the table-top vibration sensor 62 is used for cooperation with the external controller 1100 described later.

[0112] Note that, in the case where the air springs that expand and contract in the horizontal direction are combined as described above, the FB acceleration sensor 91 that detects the acceleration in the horizontal direction and the FB displacement sensor 92 that detects the displacement amount in the horizontal direction can be arranged on each vibration isolation device 5 in addition to the FB acceleration sensor 91 and the FB displacement sensor 92 described above.

[0113] In addition, in the case where only the air springs that expand and contract in the vertical direction are used, the FF acceleration sensor 61 that detects the acceleration in the horizontal direction can be arranged on any one of the four vibration isolation devices 5. On the other hand, in the case where the air springs that expand and contract in the horizontal direction are combined, the FF acceleration sensor 61 that detects the acceleration in the horizontal direction can be arranged on three or more of the four vibration isolation devices 5.

[0114] In addition, the detection signals of each state sensor 9 such as the FB displacement sensor 92 are input to the controller 100 via the signal processing circuit 10. The signal processing circuit 10 has an amplifier (AMP) 10a that amplifies the detection signals and an analog-digital converter (A / D) 10b that converts the amplified detection signals into digital signals. Each state sensor 9 and the corresponding signal processing circuit 10 constitute the "sensing circuit 11" in the present embodiment.

[0115] (3-2. Control structure of vibration isolation table)

[0116] Figure 3 is a block diagram illustrating an example of a control structure related to the vibration isolation table 1. The controller 100 has a CPU, a memory, and an input-output bus. The controller 100 is configured to control a plurality of vibration isolation devices 5 respectively. As Figure 10 indicated, the controller 100 is connected to the plurality of vibration isolation devices 5 respectively, and constitutes the "diagnosis device" in the present embodiment.

[0117] Hereinafter, the control of the vibration isolation table 1 via the actuators 8 will be described specifically. For convenience, only the control of the air springs in the vertical direction will be described, but the same control is performed also in the case where the air springs are provided in the horizontal direction.

[0118] Specifically, the controller 100 has a vibration isolation FB control section 100a, a vibration reduction FB control section 100b, a vibration isolation FF control section 100c, and the like, and the controller 100 is configured to impart a control force that suppresses the vibration of the vibration isolation table 1 to the vibration isolation table 1 by inputting a control signal to the actuators 8.

[0119] As Figure 3As shown, the input to the actuator 8 mainly includes: a vibration isolation feedback operation amount calculated by the vibration isolation FB control section 100a based on a signal from the FB acceleration sensor 91; a damping feedback operation amount calculated by the damping FB control section 100b based on an output from the FB displacement sensor 92; and a vibration isolation feedforward operation amount calculated by the vibration isolation FF control section 100c based on a signal from the FF acceleration sensor 61.

[0120] The vibration isolation FB control section 100a performs vibration isolation FB control. The so-called vibration isolation FB control is control for generating a control force that cancels the vibration of the platform 3 based on the detection value of the FB acceleration sensor 91, that is, the up-and-down direction acceleration of the top plate 73 or the platform 3, using the air spring. The vibration isolation FB control section 100a, for example, multiplies the detection value of the acceleration, the differential value thereof, and the integral value by feedback gains, respectively, adds them, and takes the inverse, as the control input to the actuator 8.

[0121] The damping FB control section 100b performs damping FB control. The damping FB control refers to control for suppressing the inclination of the platform 3 and / or the sway due to the inclination by controlling the internal pressure of the air spring in such a manner that the amount of change in the up-and-down position of the top plate 73 or the platform 3, that is, the detection value of the FB displacement sensor 92, becomes small. The damping FB control section 100b, for example, calculates the control input to the actuator 8 in accordance with the PID control rule after subtracting the detection value of the displacement from the target value (zero).

[0122] The vibration isolation FF control section 100c performs vibration isolation FF control. The so-called vibration isolation FF control is processing for generating a vibration in the opposite phase to the vibration state (floor vibration) of the base F based on the detection value of the FF acceleration sensor 61, that is, the vibration state of the base F, to cancel the vibration transmitted from the base F to the vibration isolation object (the platform 3) via the air spring unit 2. The vibration isolation FF control section 100c, for example, can calculate the control input to the actuator 8 using a digital filter. The characteristic of the digital filter is represented by the following expression. －1

[0123] In addition, the actuator 8 operates in response to the control input as described above, controls the internal pressure of each support body 7, and thereby imparts an appropriate control force to the platform 3 and the external device 1000. That is, with respect to the vibration transmitted from the base F, the transmission of the vibration is suppressed by the vibration isolation FF control, and with respect to the slight vibration that is still transmitted even so, the vibration is canceled by the vibration isolation FB control, and thereby a very high vibration isolation performance is obtained.

[0124] ​Moreover, for a relatively large vibration, i.e., a vibration (shaking) generated in the top plate 73 accompanying the operation of the external device 1000 or the like, in addition to the vibration isolation FB control described above, a vibration damping FB control is also performed, whereby the vibration is attenuated.

[0125] As shown in Figure 3 , the detection signal of the drive position sensor 1004 does not participate in the control cycle of the control performed by the controller 100. That is, the control cycle of the FB control realized by the external controller 1100 and the control cycle of the FB control of the vibration isolation stage 1 side constituted by the controller 100 are independent of each other.

[0126] In addition, the controller 100 according to the present embodiment is configured to sequentially execute a first determination process and a second determination process based on the detection signal of the state sensor 9. Both the first determination process and the second determination process are processes for self-diagnosing the vibration isolation stage 1, which are executed by the controller 100. That is, the vibration isolation stage 1 according to the present embodiment is able to diagnose its own state without the need for an external installation of a diagnosis device.

[0127] Both the first determination process and the second determination process are processes for self-diagnosing the component parts of the vibration isolation stage 1. Here, the first determination process is a process for determining whether or not the sensing circuit 11 is abnormal. In addition, the second determination process is a process for determining whether or not the actuator 8 is abnormal, which is executed after the first determination process ends.

[0128] Moreover, the first determination process is constituted by dynamic diagnosis of diagnosing the state sensor 9 of each sensing circuit 11 and static diagnosis of diagnosing the entire sensing circuit 11 including the signal processing circuit 10.

[0129] <4. Details of the first determination process and the second determination process>

[0130] Figure 4 is a flowchart showing the overall structure of the first determination process and the second determination process. Figure 5 is a flowchart showing the static diagnosis of the first determination process. Figure 6 is a flowchart showing the dynamic diagnosis of the first determination process. The details of the first determination process and the second determination process can also be referred to the table shown in Figure 13 .

[0131] (4-1. First determination process)

[0132] First, in step S1 of Figure 4 , the controller 100 executes the static diagnosis of the first determination process based on the detection signal of the state sensor 9. The details of this static diagnosis are shown in Figure 5 .

[0133] During static diagnostics, the controller 100 determines whether there is an abnormality in the sensing circuit 11 based on the detection signals from the state sensors 9 of the four actuators 8 when they are not in operation. This determination is performed separately for each of the four vibration isolation devices 5.

[0134] First, in step S101, the controller 100 reads the detection signal from the state sensor 9. The state sensor 9, which is the object of the detection signal reading, includes the FB acceleration sensor 91, the FB displacement sensor 92, and the FF acceleration sensor 61. This detection is performed when the actuators 8 are not working, that is, when there is no vibration of the platform 3 and the external device 1000.

[0135] In addition, in step S101, the controller 100 reads the detection signals multiple times within a specified period. The controller 100 reads multiple detection signals from the FB accelerometer 91, multiple detection signals from the FB displacement sensor 92, and multiple detection signals from the FF accelerometer 61.

[0136] In the next step S102, the controller 100 calculates the magnitude of the detected value for each vibration isolation device 5, including the FB acceleration sensor 91, the FB displacement sensor 92, and the FF acceleration sensor 61.

[0137] In this embodiment, the controller 100 calculates the average value of multiple detection signals, or the average value of the acceleration or displacement corresponding to each detection signal, for each vibration isolation device 5, including the FB acceleration sensor 91, the FB displacement sensor 92, and the FF acceleration sensor 61. The average value referred to here is the time average value calculated for each sensor.

[0138] In the next step S103, the controller 100 determines whether the magnitude (e.g., the absolute value of the average value) of the detected value calculated in step S102 in one of the FB acceleration sensor 91, FB displacement sensor 92, and FF acceleration sensor 61 of each vibration isolation device 5 exceeds a predetermined static threshold.

[0139] Figure 7 It is a graph used to illustrate static diagnosis. Figure 7 The vertical axis shows the voltage value of the detection signal corresponding to the acceleration or displacement. Figure 7 The horizontal axis represents time. Additionally, Figure 7 The dashed line Lt in the figure represents the aforementioned static threshold. The static threshold is a fixed value in the time direction. The static threshold can also be different in each sensor that constitutes state sensor 9.

[0140] Here, a case where the state sensor 9 is normal (a case where the state sensor 9 has no abnormality) is considered. If it is considered that this is a non-excitation time, the detection value in this case varies around zero. Therefore, the average value of the detection value is considered to be approximately zero as indicated by the solid line Ll of FIG. 10. Figure 7

[0141] On the other hand, a case where the state sensor 9 has an abnormality is considered. Among the abnormalities assumed in this case, there are conceivable the malfunction of the element connected to the FB acceleration sensor 91, the FB displacement sensor 92, or the FF acceleration sensor 61 in the sensing circuit 11, and a short circuit in the circuit connected to the state sensor 9. Hereinafter, these abnormalities, that is, abnormalities occurring in at least a part of the sensing circuit 11, are collectively referred to as "first abnormality".

[0142] In the table of FIG. 9, the malfunction of the FB acceleration sensor 91 and the malfunction of the element connected to the FB acceleration sensor 91 are collectively referred to as "FB acceleration sensor". The same applies to other sensors associated with the first abnormality. Figure 13

[0143] In the first abnormality, the abnormal operation of the element can cause a shift in the detection value. The short circuit in the electronic circuit can cause the detection value to be fixed at the power supply voltage. In either case, the average value of the detection value when the first abnormality occurs is considered to deviate from zero as indicated by the solid line L2 of FIG. 10. The shift in the detection value is particularly noticeable in the FB acceleration sensor 91 and the FF acceleration sensor 61. The case where the detection value is fixed at the power supply voltage is noticeable in the FB acceleration sensor 91, the FB displacement sensor 92, and the FF acceleration sensor 61. Figure 7

[0144] Therefore, by performing the determination as in step S103, it is possible to determine the presence or absence of the first abnormality for each sensing circuit 11. Thus, the sensing circuit 11 in which the first abnormality occurs is determined for each sensing circuit 11. Note that the static threshold value is set to a value smaller than at least the power supply voltage, as can be understood from the cause of the occurrence of the first abnormality.

[0145] Specifically, in a case where the determination in step S103 is "Yes", the controller 100 causes the control program to proceed to step S104. In step S104, the controller 100 determines that an abnormality has occurred in the sensing circuit 11 including the sensor whose determination in step S103 is "Yes". The controller 100 determines that there is the first abnormality in the specific sensing circuit 11 and determines the sensing circuit 11 in which the abnormality has occurred from among the plurality of sensing circuits 11. In this case, it is possible to determine that an abnormality has occurred in at least a part of the specific sensing circuit 11.

[0146] ​​​In the case where the determination in step S103 is "No", the controller 100 causes the control program to proceed to step S105. In this case, the controller 100 determines that there is "no first abnormality" in all of the sensing circuits 11. In this case, it can be determined that there is no abnormality in all of the sensing circuits 11.

[0147] If Figure 5 the flow ends, the controller 100 causes the control program to proceed from Figure 4 step S1 to step S2. In this step S2, the controller 100 performs dynamic diagnosis of the first determination processing based on the detection signal of the state sensor 9. Details of this dynamic diagnosis are as shown in Figure 6 .

[0148] In the dynamic diagnosis, the controller 100 inputs a control signal to the four vibration isolation devices 5 so as to simultaneously operate two or more of the four actuators 8 (all of the four actuators 8 in the present embodiment). Also, in the dynamic diagnosis, the controller 100 individually determines whether or not there is an abnormality in each of the plurality of state sensors 9 based on the detection signal detected in correspondence with the control signal.

[0149] First, in step S201, the controller 100 operates each of the actuators 8 of all of the vibration isolation devices 5. By this, vibration is applied to the platform 3 and the external device 1000.

[0150] In the following step S202, the controller 100 reads in the detection signal of the state sensor 9. The state sensor 9 that becomes the read-in object of the detection signal includes both the FB acceleration sensor 91 and the FB displacement sensor 92. This detection is performed while all of the actuators 8 are operating, that is, while the platform 3 and the external device 1000 are being excited.

[0151] Also, in step S202, the detection signal is read in by the controller 100 a plurality of times over a prescribed period. The controller 100 reads in a plurality of detection signals of each of the FB acceleration sensor 91 and the FB displacement sensor 92.

[0152] In the following step S203, the controller 100 calculates the magnitude of the detection value for each of the FB acceleration sensor 91 and the FB displacement sensor 92.

[0153] In the present embodiment, the controller 100 calculates the magnitude of the difference between the maximum value and the minimum value (= |maximum value - minimum value|) of the plurality of detection signals for each of the FB acceleration sensor 91 and the FB displacement sensor 92 of each of the vibration isolation devices 5.

[0154] In the next step S204, the controller 100 determines whether the difference calculated in step S203 between one of the FB acceleration sensor 91 and the FB displacement sensor 92 of each vibration isolation device 5 is lower than a predetermined dynamic threshold (especially the first dynamic threshold). The dynamic threshold may also vary depending on each sensor constituting the state sensor 9.

[0155] Figure 8 It is a graph used to illustrate dynamic diagnosis. Figure 8 The vertical axis shows the voltage value of the detection signal corresponding to the acceleration or displacement. Figure 8 The horizontal axis represents time. Additionally, Figure 8 The plotted points Smax and Smin in the figure show the maximum and minimum voltage values, respectively.

[0156] Here, we consider the case where state sensor 9 is functioning normally (state sensor 9 is in a normal state). If we consider that this is during excitation, the detected value in this case would be as follows: Figure 8 As shown by the solid line L21 in the diagram, it oscillates significantly around 0. Furthermore, the magnitude of the difference in this case (=|maximum value-minimum value|) is as follows: Figure 8 As shown by ΔS, it is considered to be a value significantly larger than zero.

[0157] On the other hand, consider the possibility of a malfunction in the state sensor 9. Among the conceivable malfunctions in this case are malfunctions of the FB acceleration sensor 91 or the FB displacement sensor 92 itself, and short circuits, open circuits, or disconnections in the electrical wiring connected to the FB acceleration sensor 91 or the FB displacement sensor 92. These malfunctions will be collectively referred to as the "second malfunction" below. The second malfunction is as follows... Figure 8 As illustrated by the solid line L22, it can impede the vibration of the detected value. This second anomaly can be classified into at least two categories based on its severity.

[0158] Therefore, by performing the determination as described in step S204 above, it is possible to determine whether a second abnormality exists for each vibration isolation device 5. Thus, the state sensor 9 is determined to have experienced a second abnormality. Furthermore, the dynamic threshold is composed of multiple thresholds of different magnitudes. In this embodiment, the dynamic threshold is composed of a first dynamic threshold and a second dynamic threshold that is closer to zero than the first dynamic threshold. In step S204 above, the determination is performed using the first dynamic threshold.

[0159] Specifically, in the case where the determination in step S204 is "Yes", the controller 100 causes the control program to proceed to step S205. In step S205, the controller 100 determines that an abnormality has occurred in the state sensor 9 for which the determination in step S204 is "Yes". The controller 100 determines that "a second abnormality (severity: small) exists" in the specific state sensor 9, and specifies the state sensor 9 in which an abnormality has occurred from among the plurality of state sensors 9 of the respective vibration isolation devices 5.

[0160] In the case where the determination in step S204 is "No", the controller 100 causes the control program to proceed to step S206. In this case, the controller 100 determines that "no second abnormality (severity: small) exists" in all of the state sensors 9.

[0161] The contents of the following step S207, step S208, and step S209 are substantially the same as those of the above-described step S204, step S205, and step S206, respectively, except for the following points.

[0162] That is, in step S207, the controller 100 performs a determination using a second dynamic threshold value (< first dynamic threshold value and > 0) instead of using the first dynamic threshold value. In the case where this determination is "Yes", in step S208, it is determined that "a second abnormality (severity: large) exists" in the specific state sensor 9. On the other hand, in the case where the determination in step S207 is "No", in step S209, it is determined that "no second abnormality (severity: large) exists" in all of the state sensors 9.

[0163] Note that the processing of steps S207 to S209 can be performed before the processing of steps S204 to S206, or the processing of steps S207 to S209 and the processing of steps S204 to S206 can be performed simultaneously in parallel.

[0164] If Figure 6 the flow ends, the controller 100 causes the control program to proceed from step S2 of Figure 4 to step S3. In this step S3, the controller 100 determines whether all of the sensing circuits 11 are normal based on the diagnosis result of the first determination processing.

[0165] In the case where the determination in step S3 is "No", the controller 100 causes the control program to proceed from step S3 of Figure 4 to step S6. The processing in the case where step S6 is entered will be described later.

[0166] On the other hand, if the determination in step S3 is "yes", the controller 100 causes the control program to proceed to step S4 and execute the second determination process. That is, the controller 100 in this embodiment is configured to execute the second determination process when it is determined that the multiple state sensors 9 are not abnormal. Details of the second determination process are as follows... Figure 9 As shown.

[0167] It should be noted that when entering based on Figure 9 Before explaining the second determination process, a second anomaly in the FF acceleration sensor 61 will be further explained. The aforementioned second anomaly may also occur in the FF acceleration sensor 61. However, since the actuator 8 is configured to excite a weight supported by a spring, such as platform 3, it is not convenient to perform the same dynamic diagnostics as the FB acceleration sensor 91 and FB displacement sensor 92. On the other hand, compared to the FB acceleration sensor 91 and FB displacement sensor 92, the FF acceleration sensor 61 is more suitable for detecting floor vibrations.

[0168] Therefore, as Figure 13 As shown, during static diagnosis, the controller 100 of this embodiment detects both a first anomaly and a second anomaly in the FF accelerometer 61. Except for the absence of processing corresponding to step S201, the static diagnosis for detecting the second anomaly in the FF accelerometer 61 is performed in accordance with... Figure 6 The process shown is the same. The controller 100 determines whether there is a second anomaly in the FF acceleration sensor 61 and the severity of it by using floor vibration instead of the vibration generated by the operation of the actuator 8.

[0169] (4-2. Second Decision Processing)

[0170] In the second determination process, the controller 100 inputs control signals to the four vibration isolation devices 5 so that the actuators 8 of each vibration isolation device 5 operate sequentially one by one. Moreover, in the second determination process, the controller 100 determines whether there is any abnormality in the actuator 8 of each of the four vibration isolation devices 5 based on the detection signals detected corresponding to the control signals.

[0171] First, in step S301, the controller 100 selects one of the actuators 8 from the four vibration isolation devices 5. Then, the controller 100 activates the selected actuator 8. This applies vibration to the platform 3 and the external equipment 1000.

[0172] In the next step S302, the controller 100 reads the detection signal from the state sensor 9. The state sensor 9, which is the object of the read-in detection signal, includes an FB accelerometer 91. This detection is performed when an actuator 8 is operating, i.e., when the platform 3 and external device 1000 are excited. Since the excitation force in the second determination process is small, the use of the FB accelerometer 91 facilitates reliable detection of the vibration accompanying the excitation. Depending on the magnitude of the excitation force, an FB displacement sensor 92 may also be used for detection.

[0173] Additionally, in step S302, the controller 100 reads the detection signals multiple times within a specified period. The controller 100 reads multiple detection signals from each FB acceleration sensor 91.

[0174] In the next step S303, the controller 100 calculates the magnitude of the detected value for each FB acceleration sensor 91.

[0175] In this embodiment, the controller 100 calculates the difference between the maximum and minimum values ​​of multiple detection signals (=|maximum value-minimum value|) for each vibration isolation device 5's FB acceleration sensor 91.

[0176] In the next step S304, the controller 100 determines whether the difference calculated in step S303 in the FB acceleration sensors 91 of each vibration isolation device 5 is lower than a predetermined actuator threshold. The actuator threshold may be the same as or different from the dynamic threshold used for the state sensor 9 described above.

[0177] Apart from determining the anomalies involved in the state sensor 9, or determining the anomalies involved in the actuator 8 corresponding to each state sensor 9, the basic concept of the second determination process is the same as the dynamic diagnosis of the first determination process.

[0178] In other words, consider the case where the actuator 8, which was activated in step S301, is functioning normally (each actuator 8 is operating normally). If we consider that this is during excitation, the detection value in this case would be as follows: Figure 8 As shown by the solid line L21 in the diagram, it oscillates significantly around 0. Furthermore, the magnitude of the difference in this case (=|maximum value-minimum value|) is as follows: Figure 8 As shown by ΔS, it is considered to be a value significantly larger than zero.

[0179] On the other hand, consider the case where the actuator 8, which has been activated in step S301, malfunctions. Among the conceivable malfunctions in this case are a faulty operation of the actuator 8 itself, and a short circuit, open circuit, or disconnection in the electrical wiring connected to the actuator 8. This malfunction is essentially equivalent to the "second malfunction" described above. The second malfunction is as follows... Figure 8as shown by the solid line L22, the vibration of the detection value is hindered. As described above, the second abnormality is classified into at least two categories according to the magnitude of the severity thereof.

[0180] Therefore, by performing the determination in step S304 as described above, it is possible to determine whether or not the second abnormality is present in the actuator 8 that has been activated. Thus, the actuator 8 in which the second abnormality has occurred is determined. Further, the actuator threshold is constituted by a plurality of thresholds that differ in magnitude. In the present embodiment, the actuator threshold is constituted by a first actuator threshold and a second actuator threshold that is closer to zero than the first actuator threshold. In step S304 described above, the determination using the first actuator threshold is performed.

[0181] Specifically, in the case where the determination in step S304 is "Yes", the controller 100 causes the control program to proceed to step S305. In step S305, the controller 100 determines that the abnormality has occurred in the actuator 8 selected in step S301. The controller 100 determines that the "second abnormality (severity: small) is present in the actuator 8 that has been activated, and determines the actuator 8 in which the abnormality has occurred from among the plurality of actuators 8 of the respective vibration isolation devices 5.

[0182] In the case where the determination in step S304 is "No", the controller 100 causes the control program to proceed to step S306. In this case, the controller 100 determines that the "second abnormality (severity: small) is not present in the actuator 8 selected and activated in step S301.

[0183] The contents of the following step S307, step S308, and step S309 are substantially the same as those of the above-described step S304, step S305, and step S306, respectively, except for the following points.

[0184] That is, in step S307, the controller 100 performs the determination using the second actuator threshold (< first actuator threshold and > 0) instead of the first actuator threshold. In the case where the determination is "Yes", in step S308, it is determined that the "second abnormality (severity: large) is present in the actuator 8 that has been activated. On the other hand, in the case where the determination in step S307 is "No", in step S309, it is determined that the "second abnormality (severity: large) is not present in the actuator 8 that has been activated.

[0185] Note that the processing of steps S307 to S309 can be performed before the processing of steps S304 to S306, or the processing of steps S307 to S309 and the processing of steps S304 to S306 can be performed simultaneously in parallel.

[0186] In step S310 following step S308 and step S309, the controller 100 determines whether the operation of all of the actuators 8 has ended. In the case where the determination is "No", the controller 100 returns the control program to step S301. The controller 100 selects an actuator 8 different from the one selected last time and causes it to operate.

[0187] If Figure 9 the flow ends, the controller 100 causes the control program to proceed from step S4 of Figure 4 to step S5. In this step S5, the controller 100 determines whether all of the actuators 8 are normal based on the diagnosis result of the second determination processing.

[0188] In the case where the determination in step S5 is "Yes", the controller 100 ends the flow shown in Figure 4 In this case, it is determined that the sensor circuit 11 and the actuators 8 that constitute the vibration isolation table 1 are all normal.

[0189] On the other hand, in the case where the determination in step S5 is "No", the controller 100 causes the control program to proceed to step S6. The case of proceeding to step S6 corresponds to a case where at least one of the sensor circuit 11 and the actuators 8 that constitute the vibration isolation table 1 is abnormal. In this case, the controller 100 performs a notification processing.

[0190] (4-3. Notification Processing)

[0191] Figure 11 is a flowchart exemplifying the notification processing using the controller 100 itself. Figure 12 is a flowchart exemplifying the notification processing using the external controller 1100.

[0192] In the notification processing, the controller 100 outputs the determination results of the first determination processing and the second determination processing to at least one of the external device 1000 and the notification section 101 of the controller 100 (in this embodiment, both of them).

[0193] [4-3-1. Example Using the Controller Itself]

[0194] Such output is exemplified as shown in Figure 11 and Figure 12 First, in step S601 of Figure 11 , the controller 100 inputs the self-diagnosis result of the vibration isolation table 1 (the determination results of the first determination processing and the second determination processing) to the notification section 101. The notification section 101 is, for example, a plurality of indicators (LEDs).

[0195] In the next step S602, the controller 100 refers to the self-diagnosis result referred to in step S601, and determines whether the first abnormality or the second abnormality has occurred in at least one of the plurality of sensor circuits 11 and the plurality of actuators 8 that constitute the vibration isolation table 1. In the case where the determination is "No", the controller 100 ends the process. Figure 11 The control program illustrated in the drawing.

[0196] On the other hand, in the case where the determination in step S602 is "Yes", the controller 100 causes the control program to proceed to step S603. In step S603, the controller 100 notifies the abnormality site of the vibration isolation table 1 and the kind of the abnormality, for example, by causing a plurality of indicators arranged on the surface of the controller 100 to light up. The controller 100 also performs a notification showing that each of the element components of the vibration isolation table 1 is normal in conjunction with the notification.

[0197] Further, as described above, in the case where a plurality of dynamic thresholds and a plurality of actuator thresholds are prepared, the controller 100 can also cause the output mode of the determination result to differ depending on which one of the plurality of thresholds is exceeded. Specifically, the controller 100 causes the input signal input to the notification section 101 to reflect the magnitude of the severity of each abnormality (two kinds in the present embodiment). The controller 100 is configured to perform a notification showing a caution, a warning, in the case where the "severity: small" as described above, and a notification showing an error, in the case where the "severity: large".

[0198] On the other hand, as for the static threshold associated with the flow of Figure 5 Although only one value is prepared, the determination of the first abnormality can be performed a plurality of times (two times in the present embodiment), and the content of the notification via the notification section 101 can be caused to differ based on each determination result.

[0199] For example, in the case where the first abnormality is detected in the first determination (the case where step S104 is reached), the controller 100 determines that it is likely that the first abnormality has occurred, and notifies a warning as in the case of "severity: small". Then, the controller 100 performs the second determination based on the flow of Figure 5 In the case where the first abnormality is not detected in the second determination (the case where step S105 is reached), the controller 100 determines that the element component related to the first abnormality is normal, and performs a notification showing normal. On the other hand, in the case where the first abnormality is again detected in the second determination (the case where step S104 is again reached), the controller 100 determines that the element component has the first abnormality, and performs a notification showing an error as in the case of "severity: large".

[0200] Further, in a case where the first abnormality is not detected in the first determination (in a case where Step S105 is reached), the controller 100 determines that the element component related to the first abnormality is normal, and executes notification indicating normality.

[0201] For example, consider a case where the number of FB acceleration sensors 91, FB displacement sensors 92, and actuators 8 is four, and the number of FF acceleration sensors 61 is one. Figure 13

[0202] In this case, for the four FB acceleration sensors 91, five kinds of determination, "normal", "first abnormality (first detection)", "first abnormality (second detection)", "second abnormality (severity: small)", and "second abnormality (severity: large)", are conceivable. The same applies to the four FB displacement sensors 92 and the one FF acceleration sensor 61. Further, for the four actuators 8, three kinds of determination, "normal", "second abnormality (severity: small)", and "second abnormality (severity: large)", are conceivable.

[0203] Taking the above factors into consideration, it is only necessary to set the lighting pattern of the indicators in a manner that indicates "4-5+4-5+5+4-3=57" kinds of events. At this time, indicators corresponding to a part of the sensors such as the FF acceleration sensor 61 can be prepared separately. By doing so, the operator who handles the external device 1000 can immediately grasp whether it is normal or abnormal.

[0204] Note that in a case where an air spring that stretches and contracts in the horizontal direction is used, the number of various sensors and actuators 8 is multiplied. In this case, it is only necessary to increase the number of indicators and add the lighting pattern thereof.

[0205] For example, in a case where an air spring that stretches and contracts in the horizontal direction is used, the degree of freedom is doubled, and therefore, it is equivalent to arranging two FB acceleration sensors 91 and two FB displacement sensors 92, and two actuators 8 for each vibration isolation device 5. Further, taking the three-dimensional degree of freedom of floor vibration into consideration, the FF acceleration sensor 61 is arranged on three of the four vibration isolation devices 5. In a case of the example of Figure 10 In this case, the three vibration isolation devices 5 other than the fourth support 5D each have the FF acceleration sensor 61.

[0206] In this case, based on the same study as the above lighting pattern, it is only necessary to set the lighting pattern of the indicators in a manner that indicates "8-5+8-5+3-5+8-3=119" kinds of events.

[0207] ​Then, in step S604, the controller 100 stops the vibration isolation table 1. At the time of stopping the vibration isolation table 1, the controller 100 can stop supplying air to each air spring by controlling each actuator 8, thereby causing the platform 3 to land on each support body 7, or can stop the vibration isolation FF control and the vibration isolation FB control, thereby causing passive vibration isolation and damping by the four vibration isolation devices 5.

[0208] [4-3-2. Example using an external controller]

[0209] Next, a case where the processing of Figure 11 is performed instead of the processing of Figure 12 , or a case where the processing of Figure 11 is performed in addition to the processing of Figure 12 will be described.

[0210] As described below, the controller 100 inputs an electric signal showing the determination result of each of the first determination processing and the above-described second determination processing to the external controller 1100. Then, the external controller 1100 controls the operation of the drive section 1001 or the actuator 8 on the basis of the electric signal showing the determination result of each of the first determination processing and the second determination processing.

[0211] Specifically, first, in step S611 of Figure 12 , the controller 100 inputs the self-diagnosis result of the vibration isolation table 1 (the determination result of the first determination processing and the second determination processing) to the external controller 1100.

[0212] Here, as shown in Figure 12 , in addition to the self-diagnosis result of the vibration isolation table 1, the controller 100 inputs a detection signal of the FF acceleration sensor 61 showing the floor vibration and a detection signal of the table vibration sensor 62 showing the vibration on the platform 3 (table vibration) to the external controller 1100.

[0213] In the next step S612, the external controller 1100 refers to each signal input in step S611, and determines whether or not the first abnormality or the second abnormality has occurred in at least one of the plurality of sensing circuits 11 and the plurality of actuators 8 constituting the vibration isolation table 1. In addition to or instead of this determination, the external controller 1100 determines whether or not at least one of the magnitude of the floor vibration and the magnitude of the table vibration is equal to or greater than a prescribed value (second state threshold value).

[0214] In the case where the determination in step S602 is "No", the external controller 1100 ends the control program exemplified in Figure 12 . On the other hand, in the case where the determination in step S612 is "Yes", the external controller 1100 causes the control program to proceed to step S613.

[0215] In step S613, the external controller 1100 notifies the abnormal position of the vibration isolation table 1 and the kind of the abnormality, or notifies that an abnormality has occurred in the floor vibration, or notifies that an abnormality has occurred in the table vibration, for example, by controlling the display method (for example, the display content on the display) in the external notification section 1101.

[0216] Then, in step S614, the external controller 1100 inputs a control signal to each vibration isolation device 5 via the controller 100, and stops the vibration isolation table 1. At the time of stopping the vibration isolation table 1, the external controller 1100 can stop supplying air to each air spring by controlling each actuator 8, thereby causing the platform 3 to land on each support body 7, or can stop the vibration isolation FF control and the vibration isolation FB control, thereby causing passive vibration isolation and vibration reduction by the four vibration isolation devices 5.

[0217] In addition to or instead of such processing, the external controller 1100 can input a control signal to the drive section 1001 of the external device 1000, and stop the drive section 1001 from operating. For example, the drive section 1001 of the external device 1000 can be stopped based on the information of the floor vibration detected by the FF acceleration sensor 61. Thereby, excellent cooperative performance between the vibration isolation table 1 and the external device 1000 can be achieved.

[0218] Further, it is also possible to change the setting of the values of the static threshold value, the dynamic threshold value, and the actuator threshold value used in the first determination processing and the second determination processing via the external controller 1100. By being configured in the above-described manner, the use convenience of the vibration isolation table 1 can be improved.

[0219] In addition, the external notification section 1101 of the external controller 1100 can also display the waveforms exemplified in FIGS. 10A to 10C. Figure 7 and Figure 8 Thereby, when the values of the threshold values are set as described above, the use convenience thereof can be improved.

[0220] In addition, the connection between the controller 100 and the external controller 1100 can be a wired connection as schematically shown in FIG. 11A, or can be a wireless connection. The connection method can be appropriately changed depending on the type of the external device 1000. Figure 10

[0221] <5. Second Embodiment>

[0222] In the above-described embodiments, the controller 100 performs self-diagnosis, and the external controller 1100 performs determination based on the detection signal of the second state sensor 6, but the present disclosure is not limited to this structure. For example, the external controller 1100 can also perform self-diagnosis of the vibration isolation table 1. ​

[0223] Further, in the above-described embodiment, the controller 100 executes the process involved in the active vibration isolation control and the process involved in the self-diagnosis, but the present disclosure is not limited to this structure. For example, as in the second embodiment described below, the constituent elements that execute the two kinds of processes can be made independent of each other.

[0224] Hereinafter, the structure of the active vibration isolation system S involved in the second embodiment of the present disclosure will be described. In the structure of the active vibration isolation system S, the description of the structure common to the active vibration isolation system S involved in the first embodiment will be omitted.

[0225] Figure 14 is a corresponding view illustrating the second embodiment of the present disclosure. The active vibration isolation system S includes, in addition to the vibration isolation table 1 and the external device 1000, the repeater 200, the environment sensor 12, and the external sensor 13 illustrated in Figure 10 Figure 14

[0226] The vibration isolation table 1 involved in the second embodiment includes the controller 100 that controls the plurality of vibration isolation devices 5, respectively. The controller 100 executes the control described with reference to Figure 3

[0227] At least one of the following two kinds of signals is input to the controller 100: the detection signal of the table vibration sensor 62; and the detection signal of the FB acceleration sensor 91, the FB displacement sensor 92, and the FF acceleration sensor 61 for controlling each vibration isolation device 5. The controller 100 inputs each detection signal to the repeater 200 in real time. Note that each detection signal can also be input to the repeater 200 without passing through the controller 100.

[0228] The external device 1000 involved in the second embodiment includes the drive section 1001 configured in the same manner as in the above-described embodiment, and the external controller 1100 that controls the operation of the drive section 1001. The external controller 1100 inputs a control signal to the controller 100 via the repeater 200, whereby the operation (for example, the operation of the actuator 8) of the vibration isolation table 1 can be controlled via the controller 100.

[0229] The environment sensor 12 is arranged around the active vibration isolation system S. The environment sensor 12 senses the setting environment of the active vibration isolation system S and inputs a detection signal corresponding to the sensing result to the repeater 200 in real time. As one example, the environment sensor 12 can be configured from one or more of a magnetic field sensor, an air pressure sensor, a temperature sensor, and an environmental sound microphone.

[0230] ​​​The external sensor 13 is arranged inside or outside the external device 1000. The external sensor 13 senses a motion state of the external device 1000, and inputs a detection signal corresponding to the sensed result to the repeater 200 in real time. As one example, the external sensor 13 can be constituted by Figure 1 The drive position sensor 1004 exemplified is constituted.

[0231] The repeater 200 is interposed between the controller 100 and the external controller 1100. The repeater 200 includes an IO unit 201 that relays an electrical connection between the controller 100 and the external controller 1100, and a control terminal 202 that is connected to the controller 100 and the external controller 1100 via the IO unit 201.

[0232] The repeater 200 is connected to each vibration isolation device 5 via the controller 100, and the repeater 200 can control each vibration isolation device 5 via the controller 100. Since each vibration isolation device 5 can be indirectly controlled, the repeater 200 can be regarded as a constituent element equivalent to the "controller" involved in the first embodiment. The repeater 200 constitutes a "diagnostic device" in the second embodiment. Not limited to this example, the diagnostic device can also be constituted by at least one of the controller 100, the external controller 1100, and the repeater 200.

[0233] The IO unit 201 acquires detection signals of the state sensor 9, the second state sensor 6, the environment sensor 12, and the external sensor 13 in real time, and inputs each detection signal to the control terminal 202. The IO unit 201 also relays transmission and reception of electrical signals between the external controller 1100, the controller 100, and the control terminal 202.

[0234] The control terminal 202 performs various processes based on the detection signals of the state sensor 9, the second state sensor 6, the environment sensor 12, and the external sensor 13. The control terminal 202 generates an electrical signal based on the processes, and inputs the electrical signal to the external controller 1100 or the controller 100 via the IO unit 201.

[0235] As one example, the control terminal 202 is constituted by a computer such as a desktop computer or a laptop computer, and the control terminal 202 has an input unit 221, a display unit 222, and a storage unit 223.

[0236] The input unit 221 accepts user input. The input unit 221 is constituted by, for example, a keyboard and / or a pointing device. The display unit 222 visualizes and displays various information. The storage unit 223 stores various information.

[0237] In detail, the storage section 223 stores, in addition to the above-mentioned static threshold value, the first dynamic threshold value, the second dynamic threshold value, the first actuator threshold value, the second actuator threshold value, and the second state threshold value, an environmental threshold value and an external threshold value to be described later. These values are the determination criteria in each determination based on the detection signals of the state sensor 9, the second state sensor 6, the environmental sensor 12, and the external sensor 13. The control terminal 202 can change the values of the determination criteria stored in the storage section 223 based on a user input via the input section 221.

[0238] In the second embodiment, the repeater 200 performs the first determination processing, the second determination processing, and the notification processing instead of the controller 100. As with the above-described embodiment, these processes are roughly performed according to the flowcharts shown in Figure 4 The repeater 200 as a diagnosis device inputs control signals to the plurality of vibration isolation devices 5 via the controller 100 in order to sequentially perform the first determination processing and the second determination processing. Note that the details of the first determination processing and the second determination processing are the same as those of the first embodiment except as specifically described.

[0239] (5-1. First determination processing)

[0240] First, in the static diagnosis of the first determination processing exemplified in Figure 5 The repeater 200 reads the detection signals of the state sensors 9 via the controller 100 (see step S101). Unlike the first embodiment, the processes of the following step S102 and step S103 are performed by the repeater 200, for example, the control terminal 202.

[0241] As for the processes of the remaining step S104 and step S105, they can be performed by the repeater 200 or by the controller 100. In the case of being performed by the controller 100, the repeater 200 can also generate an electric signal corresponding to the frequency or the number of times of determination of "Yes" in step S103 and input the electric signal to the controller 100.

[0242] Next, in the dynamic diagnosis of the first determination processing exemplified in Figure 6 The repeater 200 causes all the actuators 8 to operate via the controller 100 (see step S201). In the following step S202, the repeater 200 reads the detection signals of the respective state sensors 9 via the controller 100. The processes of the following step S203, step S204, and step S207 are performed by the repeater 200.

[0243] The remaining steps S205, S206, S208, and S209 can be executed by either the repeater 200 or the controller 100. If executed by the controller 100, the repeater 200 can also generate an electrical signal corresponding to the frequency or number of times the judgments in steps S204 and S207 are "yes," and input this electrical signal to the controller 100.

[0244] Furthermore, during static and dynamic diagnostics, the repeater 200 displays the determination results of steps S103, S204, and S207 on the display unit 222. Thus, the determination results based on the static threshold, the first dynamic threshold, and the second dynamic threshold are visualized.

[0245] (5-2. Second Decision Processing)

[0246] Next, in Figure 9 In the second determination process described in the example, the repeater 200 activates an actuator 8 via the controller 100 (step S301). In the next step S302, the repeater 200 reads the detection signals from each state sensor 9 via the controller 100. The subsequent steps S303, S304, and S307 are executed by the repeater 200.

[0247] The remaining steps S305, S306, S308, S309, and S310 can be performed by the repeater 200 or the controller 100. If performed by the controller 100, the repeater 200 can also generate an electrical signal corresponding to the frequency or number of times the judgment in steps S204 and S207 is "yes," and input this electrical signal to the controller 100.

[0248] Furthermore, during the second determination process, the repeater 200 displays the determination results of steps S304 and S307 on the display unit 222. Therefore, each determination result based on the first actuator threshold and the second actuator threshold is visualized.

[0249] (5-3. Other judgment and handling)

[0250] Figure 15 This is a flowchart illustrating other decision-making processes in the second embodiment. This decision-making process is repeatedly executed in real time during and before and after the active vibration isolation control is implemented. It should be noted that the series of processes from step S81 to step S82, the series of processes from step S83 to step S84, and the series of processes from step S85 to step S86 can be performed in a different order than in the illustration, or multiple processes can be performed simultaneously.

[0251] First of all,Figure 15 In step S81, the repeater 200 acquires the detection signal of the environment sensor 12 via the IO unit 201. The acquired detection signal is input, for example, to the control terminal 202 in real time.

[0252] In the next step S82, the repeater 200 determines the setting environment of the active vibration isolation system S based on the detection signal of the environment sensor 12. As one example, in step S82, the control terminal 202 compares the detection signal acquired in step S81 and the environment threshold value corresponding to the category of the environment sensor 12. The control terminal 202 determines, based on the comparison result, whether there is an abnormality in the setting environment of the active vibration isolation system S.

[0253] As a further example, in the case where a temperature sensor is used as the environment sensor 12, the control terminal 202 can also determine whether the detected temperature of the environment sensor 12 converges within the allowable range prescribed in correspondence with the above-described environment threshold value. In this case, in the case where the detected temperature is within the allowable range, the control terminal 202 determines that there is "no" abnormality, and in the case where the detected temperature is outside the allowable range, the control terminal 202 determines that there is "an" abnormality. The same applies in the case where one or more of a magnetic field sensor, an air pressure sensor, and an environmental sound microphone is used as the environment sensor 12.

[0254] In the next step S83, the repeater 200 acquires the detection signal of the external sensor 13 via the IO unit 201. The acquired detection signal is input, for example, to the control terminal 202 in real time.

[0255] In the next step S84, the repeater 200 determines the operation status of the external device 1000 based on the detection signal of the external sensor 13. As one example, in step S84, the control terminal 202 compares the detection signal acquired in step S83 and the external threshold value corresponding to the category of the external sensor 13. The control terminal 202 determines, based on the comparison result, the operation status of the external device 1000.

[0256] As a further example, in the case where the drive position sensor 1004 is used as the external sensor 13, the control terminal 202 can also determine whether the detected position of the drive position sensor 1004 converges within the allowable range prescribed in correspondence with the above-described external threshold value. In this case, in the case where the detected position is within the allowable range, the control terminal 202 determines that there is "no" abnormality, and in the case where the detected position is outside the allowable range, the control terminal 202 determines that there is "an" abnormality. The same applies in the case where another sensor is used as the external sensor 13.

[0257] The processes involved in the next step S85, step S86, and step S87 are the same as part of the processes involved in steps S611 and S612 in Figure 12 In step S85, the relay 200 acquires the detection signal of the second state sensor 6 instead of the external controller 1100.

[0258] In step S86, the relay 200 determines whether there is an abnormality in the floor vibration and / or the table vibration on the basis of the detection signal of the second state sensor 6. This determination is performed by comparing the detection signal of the second state sensor 6 with the second state threshold value. In this case, the control terminal 202 determines that there is "no" abnormality in the case where the magnitude of the floor vibration and / or the table vibration is smaller than the second state threshold value, and determines that there is "an" abnormality in the case where the magnitude of the floor vibration and / or the table vibration is equal to or larger than the second state threshold value.

[0259] In the next step S87, the relay 200 determines whether there is an abnormality (an abnormality) in one or more of the above-described setting environment, the above-described operation condition, and the floor vibration and / or the table vibration. In the case where this determination is "yes", the control terminal 202 causes the control program to proceed to step S88. On the other hand, in the case where this determination is "no", the control terminal 202 ends the control program. Figure 15 The control program exemplified in Fig. 6.

[0260] In the case where the process proceeds from step S87 to the next step S88, the control terminal 202 performs the notification process involved in the second embodiment.

[0261] (5-4. Notification process)

[0262] As in the above-described first embodiment, the notification process involved in the second embodiment is configured to output the self-diagnosis result of the vibration isolation table 1 to at least one of the external device 1000 and the notification section of the relay 200 which is a diagnosis device. As one example, the notification process involved in the second embodiment is performed by the relay 200. The relay 200 performs various notifications via the external controller 1100. Note that the "notification section of the relay 200" includes one or more of the combination of the notification section 101 connected to the relay 200 via the controller 100, the external notification section 1101 connected to the relay 200 via the external controller 1100, and the display section 222 of the relay 200.

[0263] Figure 16 is a flowchart exemplifying the notification process in the second embodiment. These processes are performed in step S6 of Fig. 1 or step S88 of Fig. 6. Figure 4 Figure 15 ​​

[0264] First, in step S621, the relay 200 records at least one of the detection signals (acquired contents) of the state sensor 9, the second state sensor 6, the environment sensor 12, and the external sensor 13 acquired in real time, according to the determination result based on the detection signals of the respective sensors.

[0265] In detail, the relay 200 stores the detection signal of the state sensor 9, the second state sensor 6, the environment sensor 12, and the external sensor 13, which becomes the trigger to start the notification processing, in the storage section 223 of the control terminal 202. For example, in the case where the notification processing is started as a trigger in the case where the average value related to the state sensor 9 exceeds the static threshold (the case where the determination of step S103 is "Yes"), the relay 200 saves the data showing the detection signal of each state sensor 9 as a log for a prescribed period including the time when the average value exceeds the static threshold.

[0266] Next, in step S622, the relay 200 inputs the determination result of the floor vibration and / or the table vibration, and the determination result based on the environment sensor 12 and the external sensor 13, to the external controller 1100. These inputs are performed in real time regardless of whether the active vibration isolation control is performed or not.

[0267] In addition, in the case where the self-diagnosis of the vibration isolation table 1 is performed while the active vibration isolation control is in the stopped state, the relay 200 inputs the self-diagnosis result of the vibration isolation table 1 to the external controller 1100 in addition to the above-described determination result, or instead of the determination result. Note that the self-diagnosis result can be input to the controller 100 instead of being input to the external controller 1100, or the self-diagnosis result can be input to the controller 100 in addition to being input to the external controller 1100. In this case, the same processing as the control program illustrated in FIG. 12 is performed by the controller 100. Figure 11

[0268] In the following steps S623 to S625, the external controller 1100 controls the operation of the drive section 1001 or the operation of the actuator 8, based on the detection signal of at least one of the state sensor 9, the second state sensor 6, the environment sensor 12, and the external sensor 13 (for example, the determination result based on the detection signal).

[0269] In detail, in step S623, the external controller 1100 determines whether there is an abnormality in the self-diagnosis result of the vibration isolation table 1, the floor vibration and / or the table vibration determination result, the setting environment of the active vibration isolation system S, or the operation status of the external device 1000, based on the determination result read in step S622.

[0270] ​In detail, for the setting environment of the active vibration isolation system S, the external controller 1100 accepts the determination result of the repeater 200. On the other hand, for the determination result other than the setting environment, the external controller 1100 comprehensively determines whether or not there is an abnormality that should be notified to the outside based on the determination result of the repeater 200.

[0271] As one example, consider a case where a determination result showing that the detection signal of the external sensor 13 exceeds the external threshold value is input to the external controller 1100. In this case, the external controller 1100 determines whether or not there is an abnormality that should be notified to the outside by analyzing the determination result. This determination is performed, for example, based on the number of times, frequency, or the like that the detection signal of the external sensor 13 exceeds the external threshold value.

[0272] In the case where the determination of step S623 is "Yes", the external controller 1100 causes the control program to proceed to step S624. In step S624, the external controller 1100 notifies whether or not there is an abnormality in the active vibration isolation system S by controlling the display mode in the external notification section 1101, similarly to the above-described step S613. In addition to the notification via the external notification section 1101, notification can also be made via the notification section 101 of the controller 100. In the case where the determination of step S623 is "No", the external controller 1100 ends the control program. Figure 16 The control program exemplified above.

[0273] Then, in step S625 following step S624, the external controller 1100 inputs a control signal to the actuators 8 of each vibration isolation device 5 via the repeater 200 and the controller 100, and stops the vibration isolation table 1. The details of the stopping method of the vibration isolation table 1 are the same as in the above-described embodiment.

[0274] In step S625, in addition to the stopping of each vibration isolation device 5, or instead of the stopping, the external controller 1100 can also input a control signal to the driving section 1001 of the external device 1000 to stop the operation of the driving section 1001.

[0275] Note that the stopping of the driving section 1001 can be performed, for example, based on the determination result of the second state sensor 6, the environmental sensor 12, or the external sensor 13, in the case where the determination of the above-described step S623 is "Yes".

[0276] As Figure 16As shown in the flowchart, until the determination in step S623 is "No", the active vibration isolation system S does not allow the operation of the vibration isolation table 1 and / or the external device 1000. The operation of the vibration isolation table 1 and / or the external device 1000 is allowed only in the case where the determination is that the entire active vibration isolation system S is normal, whereby even a user who is not skilled can safely operate the external device 1000. In addition, by appropriately saving a log as exemplified in step S621, even if a bad situation is assumed to have occurred, the bad situation can be appropriately dealt with.

[0277] <6. Effects, etc.>

[0278] As exemplified in steps S601 to S623, the active vibration isolation system S is configured to include the vibration isolation table 1 and the external device 1000. The vibration isolation table 1 is configured to include the four vibration isolation devices 5, the four state sensors 9, and the four vibration isolation device controllers 7. The external device 1000 is configured to include the four actuators 8, the four state sensors 9, and the four external device controllers 6. Figure 1 and Figure 2 As exemplified in steps S601 to S623, the active vibration isolation system S is configured to include the vibration isolation table 1 and the external device 1000. The vibration isolation table 1 is configured to include the four vibration isolation devices 5, the four state sensors 9, and the four vibration isolation device controllers 7. The external device 1000 is configured to include the four actuators 8, the four state sensors 9, and the four external device controllers 6. Figure 6 As exemplified in steps S601 to S623, the active vibration isolation system S is configured to include the vibration isolation table 1 and the external device 1000. The vibration isolation table 1 is configured to include the four vibration isolation devices 5, the four state sensors 9, and the four vibration isolation device controllers 7. The external device 1000 is configured to include the four actuators 8, the four state sensors 9, and the four external device controllers 6.

[0279] On the other hand, as explained using Figure 9 As exemplified in steps S601 to S623, the active vibration isolation system S is configured to include the vibration isolation table 1 and the external device 1000. The vibration isolation table 1 is configured to include the four vibration isolation devices 5, the four state sensors 9, and the four vibration isolation device controllers 7. The external device 1000 is configured to include the four actuators 8, the four state sensors 9, and the four external device controllers 6.

[0280] In addition, since the above-described first determination processing and the above-described second determination processing are each processing that is completed in the vibration isolation table 1 alone, even in the case where the external device 1000 is mounted on the vibration isolation table 1, it is possible to distinguish whether the external device 1000 or the vibration isolation table 1 has an abnormality. Thus, at the time of occurrence of various abnormalities, it is possible to respond to the abnormality as quickly as possible, and it is possible to accurately suppress a manufacturing delay due to the external device 1000, a malfunction of the external device 1000 due to an abnormality of the active vibration isolation table 1, and the like.

[0281] In addition, in the case where an abnormality occurs in a specific actuator 8, the influence of the abnormality is strongly reflected in the detection signal of the state sensor 9 corresponding to the actuator 8. Therefore, by using the detection signal of the state sensor 9 corresponding to the specific actuator 8, it is possible to make a more accurate determination at the time of the second determination processing.

[0282] Furthermore, as previously known, when there is no significant difference between the signals output from each sensor when the sensor malfunctions and when the actuator malfunctions, the method of determining whether there is an abnormality by comparing it with the initial state cannot determine whether the sensor or the actuator is malfunctioning.

[0283] In contrast, according to the first embodiment and the second embodiment described above, by configuring the process after the first determination process, ... Figure 4 Step S3 proceeds to the second determination process, thereby clearly distinguishing between the determination of abnormalities in the status sensors 9 of each vibration isolation device 5 and the determination of abnormalities in the actuators 8 of the same vibration isolation device 5. This enables more accurate determinations.

[0284] Generally, conceivable causes of malfunctions in the sensing circuit 11 include: deviations in the detection values ​​of the state sensors 9 caused by malfunctions in components such as the AMP10a connected to each state sensor 9; or deviations in the detection values ​​of the state sensors 9 caused by short circuits in the electrical wiring constituting or connected to each sensing circuit 11. The effect of such deviations is less due to malfunctions in the state sensors 9 themselves, but rather to malfunctions in the entire sensing circuit 11. If it is possible to... Figure 6 The example of handling dynamic diagnostics separately is appropriate.

[0285] Therefore, as Figure 5 As illustrated, in addition to performing dynamic diagnostics to determine abnormalities in the operation of the state sensor 9 itself, the controller 100 also performs static diagnostics to determine abnormalities in the operation of the entire sensing circuit 11. This enables more accurate determinations.

[0286] Furthermore, as is known in the past, the method of determining the initial state by comparison is based on the premise that the initial state is normal. It cannot be used when the initial state is abnormal, thus limiting the applicability of this method.

[0287] In contrast, such as using Figure 7 and Figure 8 As explained, based on the first determination process and the second determination process involved in this embodiment, it is possible to accurately determine whether there is an anomaly even without relying on comparison with the initial state.

[0288] In addition, such as Figure 6 and Figure 9 As shown in the figures, by preparing multiple thresholds, the output method can be varied, such as simply issuing a warning to the user or issuing an error notification indicating that the active vibration isolation system S should be stopped. This improves the ease of use of the active vibration isolation system S.

[0289] In addition, as exemplified in Figure 12 , the action of the external device 1000 or the action of each vibration isolation device 5 can be controlled by the external controller 1100. Thus, each vibration isolation device 5 can be accurately cooperated with the external device 1000.

[0290] In addition, as explained with reference to Figure 15 steps S81 and S82, the active vibration isolation system S performs a process in which a diagnosis of the setting environment of the system S is combined in the self-diagnosis of the vibration isolation table 1. Thus, in the case where a bad situation occurs in the performance or the like of the external device 1000, the cause thereof can be traced from various viewpoints. In addition, since the cause can be easily traced even by a non-professional operator, user convenience is improved.

[0291] In addition, as explained with reference to Figure 15 steps S83 and S84, the active vibration isolation system S performs a process in which a diagnosis of the action state of the external device 1000 is combined in the self-diagnosis of the vibration isolation table 1. Thus, in the case where a bad situation occurs in the performance or the like of the external device 1000, the cause thereof can be traced from various viewpoints, such as whether the cause is in the vibration isolation table 1 or in the external device 1000 itself. In addition, since the cause can be easily traced even by a non-professional operator, user convenience is improved.

[0292] In addition, as explained with reference to Figure 15 and Figure 16 , since various sensors such as the state sensor 9 can be effectively used to monitor the state of the entire active vibration isolation system S, the external device 1000 can be operated on the basis that the vibration isolation table 1, the external device 1000, and the setting environment are respectively brought to ideal states.

[0293] In addition, since the detection signals acquired in real time are used for various determinations, in the case where the external device 1000 does not exhibit a desired performance, the cause thereof can be quickly started to be traced. Since each detection signal is concentrated in the diagnosis device, the user can comprehensively monitor the vibration isolation table 1, the external device 1000, and the entire setting environment. Since the cause can be easily traced even by a non-professional operator, user convenience is improved. In addition, since the contents acquired from each sensor are recorded, even if a bad situation is assumed to be missed, the occurrence time and the cause of the bad situation can be analyzed later.

[0294] In addition, by using Figure 14The input unit 221 of the example thus enables flexible change of the setting of the entire active vibration isolation system S, such as enabling change of the determination criterion (e.g., a static threshold) involved in the vibration isolation table 1 according to the category of the external device 1000, or change of the determination criterion (e.g., an external threshold) of the external device 1000 according to the category or setting environment of the vibration isolation table 1, and the like. This also contributes to improvement of the convenience of the user.

[0295] In addition, the active vibration isolation system S according to the first embodiment and the second embodiment can contribute to achievement of Goal 9 "Build resilient infrastructure and promote inclusive and sustainable industrialization" of the Sustainable Development Goals (SDGs) that are international goals for a sustainable and better world by 2030, as described in the 2030 Agenda for Sustainable Development that was unanimously adopted by member countries at the United Nations Summit in September 2015.

[0296] <7. Other Embodiments>

[0297] In the above embodiments, the same state sensor 9 is used in the first determination processing and the second determination processing, but the present disclosure is not limited to such a structure. For example, in the case where a linear motor is used as the actuator 8, a current generated in conjunction with driving of the linear motor can also be input to the controller 100, and the second determination processing can be executed based on the current. In this case, circuitry that inputs the current generated in conjunction with driving of the linear motor to the controller 100 functions as a state sensor unique to the second determination processing.

Claims

1. An active vibration isolation system including a plurality of active vibration isolation devices provided on a base and a diagnostic device that individually controls the plurality of active vibration isolation devices, an external device being supported via a platform by the plurality of active vibration isolation devices, the external device being configured to be able to receive an electric signal, characterized in that: the active vibration isolation system includes actuators and a plurality of state sensors, the actuators are respectively provided on the plurality of active vibration isolation devices and operate in a manner that excites the external device, the plurality of state sensors are used to detect vibration of each of the plurality of active vibration isolation devices or vibration of the base, the diagnostic device sequentially executes first determination processing and second determination processing, in the first determination processing, the diagnostic device determines whether a sensing circuit including the state sensors has an abnormality based on a detection signal of the state sensors, the second determination processing is executed after the first determination processing ends, in the second determination processing, the diagnostic device determines whether the actuators have an abnormality, in the first determination processing, the diagnostic device inputs a control signal to the plurality of active vibration isolation devices so that two or more of the actuators simultaneously operate, and based on the detection signal corresponding to the control signal, for each of the plurality of state sensors, the diagnostic device executes dynamic diagnosis that individually determines whether the state sensor has an abnormality, in the second determination processing, the diagnostic device inputs a control signal to the plurality of active vibration isolation devices so that the actuators sequentially operate one by one, and based on the detection signal corresponding to the control signal, for each of the plurality of active vibration isolation devices, the diagnostic device individually determines whether the actuators have an abnormality, the diagnostic device outputs a determination result of the first determination processing and the second determination processing to at least one of the external device and a notification portion of the diagnostic device.

2. The active vibration isolation system according to claim 1, characterized in that: at least a part of the plurality of state sensors is provided on each of the plurality of active vibration isolation devices.

3. The active vibration isolation system according to claim 1, characterized in that: in a case where it is determined that each of the plurality of state sensors does not have an abnormality, the diagnostic device executes the second determination processing.

4. The active vibration isolation system according to claim 1, characterized in that: the first determination processing is configured to sequentially execute static diagnosis that diagnoses the entire sensing circuit and the dynamic diagnosis, in the static diagnosis, the diagnostic device determines whether the sensing circuit has an abnormality based on a detection signal of the state sensor at a time when each of the plurality of actuators is not operating.

5. The active vibration isolation system according to claim 4, characterized in that: the state sensor acquires a detection signal that shows at least one of an acceleration of an upper end portion of the active vibration isolation device and a displacement amount of the upper end portion with respect to the base, in the first determination processing, ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ In the static diagnosis, the diagnosis device determines that at least a part of the sensing circuit is abnormal when the magnitude of the detection value of the state sensor exceeds a prescribed static threshold value, In the dynamic diagnosis, the diagnosis device determines that the state sensor is abnormal when the magnitude of the detection value of the state sensor is lower than a prescribed dynamic threshold value, In the second determination processing, In the second determination processing, the diagnosis device determines that the actuator is abnormal when the magnitude of the detection value of the state sensor is lower than a prescribed actuator threshold value.

6. The active vibration isolation system according to claim 5, wherein: the magnitude of the detection value in the static diagnosis refers to an average value of the detection value within a prescribed period, the magnitude of the detection value in the dynamic diagnosis and the second determination processing refers to a difference between a maximum value and a minimum value of the detection value within a prescribed period.

7. The active vibration isolation system according to claim 5, wherein: the dynamic threshold value and the actuator threshold value are each composed of a plurality of threshold values having different magnitudes, in a case where it is determined that the state sensor or the actuator is abnormal, the diagnosis device makes the output mode of the determination result different depending on which one of the plurality of threshold values is exceeded.

8. The active vibration isolation system according to any one of claims 1 to 7, wherein: the external device includes an external controller and a drive section, the external controller is independent of a controller that individually controls the plurality of active vibration isolation devices, the drive section is electrically connected to the external controller, the external controller controls the operation of the drive section by inputting a control signal to the drive section, the external controller controls the operation of the drive section or the operation of the actuator based on the determination result of each of the first determination processing and the second determination processing.

9. The active vibration isolation system according to claim 8, wherein: the active vibration isolation system includes a second state sensor that detects a vibration state on the platform, the second state sensor is composed of a sensor different from the state sensor or is composed of the state sensor itself, the external controller controls the operation of the drive section or the operation of the actuator based on a detection signal of at least one of the state sensor and the second state sensor.

10. The active vibration isolation system according to claim 9, wherein: the active vibration isolation system includes an environment sensor that senses a detection of a setting environment of the active vibration isolation system, the diagnosis device determines the setting environment of the active vibration isolation system based on a detection signal of the environment sensor, the external controller controls the operation of the drive section or the operation of the actuator in accordance with the determination result based on the environment sensor.

11. The active vibration isolation system according to claim 10, wherein: the active vibration isolation system includes an external sensor that senses a detection of an operation state of the external device, The diagnostic device determines an operation state of the external device on the basis of a detection signal of the external sensor, The external controller controls an operation of the drive section or an operation of the actuator on the basis of a determination result based on the external sensor.

12. The active vibration isolation system according to claim 11, wherein The diagnostic device acquires detection signals of the state sensor, the second state sensor, the environment sensor, and the external sensor in real time, respectively, and records the acquired contents on the basis of determination results based on the detection signals of the state sensor, the second state sensor, the environment sensor, and the external sensor.

13. The active vibration isolation system according to claim 12, wherein The diagnostic device has an input section that accepts a user input, The diagnostic device changes a determination criterion in the determination based on the detection signals of the state sensor, the second state sensor, the environment sensor, and the external sensor on the basis of the user input via the input section.

14. The active vibration isolation system according to claim 1, wherein The diagnostic device is constituted by at least one of a controller, an external controller, and a repeater, The controller controls the plurality of active vibration isolation devices, respectively, The external controller controls the external device, The repeater is interposed between the controller and the external controller.

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