Layout visualization method and system for parasitic parameter extraction

Abstract

The invention relates to the technical field of electronic design automation, and provides a layout visualization method for parasitic parameter extraction, which comprises the following steps: acquiring layout information to be visualized and a corresponding process file; performing structure segmentation on the layout information based on the process file, and superposing manufacturing effect information on a segmented graph to generate a layout graph containing manufacturing characteristics; constructing a two-dimensional visual interface, and carrying out dyeing display on the layout graph according to the hierarchy or node information to which the layout graph belongs; in response to the operation of a user on a two-dimensional visual interface, a corresponding three-dimensional view is generated or a cross section is selected, so that combined analysis and visual output of layout data and process files are realized, a processed graphic structure and manufacturing effect characteristics thereof can be intuitively presented in the two-dimensional view, and the processing efficiency is improved. Understanding of the layout segmentation mode and the real manufacturing morphology is improved; and three-dimensional structure reconstruction and section display functions are provided, and three-dimensional restoration of a complex process structure is facilitated.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of electronic design automation, and in particular to a layout visualization method and system for parasitic parameter extraction. BACKGROUND

[0002] With the continuous progress of integrated circuit manufacturing process, chip design enters the nanometer scale, and the influence of parasitic effect on circuit performance is increasingly significant. In the chip back-end design process, parasitic parameter extraction (PEX) as an important part of physical sign-in, its accuracy directly determines the accuracy of timing analysis, power integrity analysis and signal integrity. In order to ensure the effectiveness of the parasitic extraction result, the designer usually needs to visualize the debugging and verification of the extraction input and output at the layout level.

[0003] The current mainstream layout visualization tools mainly include KLayout and Synopsys's Quview. Among them, KLayout is an open source two-dimensional layout viewer, which supports GDSII and OASIS formats, and is suitable for basic graphic viewing and script processing; Quview is used with Quantus extractor to visualize the geometric data generated by parasitic extraction, and supports two-dimensional and three-dimensional view switching. Although the above tools provide basic support in layout display, there are still significant limitations in the parasitic extraction debugging scenario.

[0004] On the one hand, the existing tools lack the ability to visualize the effects of manufacturing processes, and cannot intuitively display the specific effects of blocking layers, layer structures, process rules on graphic layout and parasitic paths; on the other hand, they usually cannot provide key auxiliary information in the parasitic parameter extraction process, such as nodes, networks, blocking areas, and process coordinates. In addition, the current tools have weak interactivity, lack flexible hierarchical filtering, three-dimensional view switching, layout cross-section display, node click query and other functions, and are difficult to meet the requirements of visualization depth and efficiency in modern parasitic extraction tool development and verification. SUMMARY

[0005] In view of the above problems that the manufacturing process cannot present the influence on the layout structure, the parasitic information and the physical graphics lack associated display, and the visualization interaction ability is insufficient, the present application provides a layout visualization method and system for parasitic parameter extraction, which aims to realize multi-angle visualization display of key data in the parasitic extraction process, including layers, networks, nodes, blocking information, etc., and provides two-dimensional and three-dimensional visual analysis capability linked with process files. In order to achieve the above purpose, the present application realizes the following technical solutions, This invention provides a layout visualization method for extracting parasitic parameters, comprising: Obtain the layout information to be visualized and the corresponding process documents; The layout information is structurally segmented based on the process documents, and manufacturing effect information is superimposed on the segmented graphics to generate a layout graphic containing manufacturing features. Construct a two-dimensional visualization interface and display the map graphics by color according to their hierarchical or node information, supporting basic interactive operations of the graphics; Responding to user actions on the 2D visualization interface, it generates corresponding 3D views or selected cross-sections for the visualization of three-dimensional structures.

[0006] Furthermore, it also includes functional units such as distance measurement, graphic zooming, and layer filtering to assist users in verifying and debugging key areas.

[0007] Furthermore, obtain the layout information to be visualized and the corresponding process documents, including, Load the layout information output by the parasitic parameter extraction tool and parse it into structured graphic data containing graphic layers, graphic structure, network, nodes, blocking information and corresponding geometric coordinates; Read the process file corresponding to the layout information and extract the corresponding process-related parameters, including process layer definition, inter-layer structural relationship, manufacturing rules, material properties, layer name and layer visualization attributes.

[0008] Based on the process layer definition, layer alias and visualization attributes in the process document, identify the process layer to which the graphic layer in the structured graphic data belongs, and establish the mapping relationship between the graphic layer and the process layer. Structured graphical data is bound to corresponding process layer information, visualization attributes, and material properties to construct a data model for visualization and attribute querying.

[0009] Furthermore, based on the process documents, the layout information is structurally segmented, and manufacturing effect information is overlaid on the segmented graphics to generate a layout graphic containing manufacturing features, including... Based on the definition of process layers and the structural relationship between layers, the graphic structure in the structured graphic data is classified into layers to form a graphic data structure with a layered structure. Based on material properties and manufacturing rules, corresponding manufacturing effect information is labeled in the graphic data structure. The manufacturing effect information includes graphic width shrinkage, graphic edge offset, graphic corner blunting, hole deformation, interlayer boundary expansion, and through hole ellipticization, which are used to characterize various geometric shape changes during the manufacturing process.

[0010] Furthermore, a two-dimensional visualization interface is constructed, and the map graphics are displayed with color according to their hierarchical or node information, supporting basic interactive operations on the graphics, including... Based on the graphic layer information in the structured graphic data and combined with the process layer definition, the graphics are classified into layers and each graphic layer is identified with a different color to complete the hierarchical coloring display of the graphics. Based on the network division and node identification in the inter-layer structure relationship, the graphical structures belonging to the same network or the same node are colored in the same color to help users identify the electrical connection relationship. In response to user clicks or hovering actions, display the attribute information of the selected graphic structure, including layer name, node number, network name, blockage information, and geometric coordinates.

[0011] Furthermore, in response to user actions on the two-dimensional visualization interface, a corresponding three-dimensional view or selected cross-section is generated for the visualization of the three-dimensional structure, including... In response to the user's selection of a two-dimensional graphic area, the system calls the corresponding graphic structure and process layer data, constructs a three-dimensional view model of the selected area, and provides interactive control functions for rotation and scaling. In response to a user-specified cross-sectional location, the system extracts the multi-layered graphic structure that traverses the cross-section and generates a cross-sectional view based on the actual stacking relationship. This view is used to determine the distribution of different process layers at the cross-sectional location.

[0012] Based on the same inventive concept, this invention also provides a layout visualization system for parasitic parameter extraction, employing the layout visualization method described above, including: The parsing module is used to obtain the layout information to be visualized and the corresponding process documents through parasitic parameter extraction tools; The feature annotation module is used to structurally segment the layout information based on the process document, and to overlay manufacturing effect information on the segmented graphics to generate a layout graphic containing manufacturing features. The two-dimensional visualization interaction module is used to build a two-dimensional visualization interface and display the map graphics by color according to their level or node information, and supports basic interactive operations of the graphics; The 3D visualization interaction module is used to respond to user operations on the 2D visualization interface and generate corresponding 3D views or selected cross-sections for the visualization of three-dimensional structures.

[0013] Furthermore, it also includes an auxiliary verification and analysis module, which provides functional units including distance measurement, graphic scaling, and layer filtering to assist users in verifying and debugging key areas.

[0014] Furthermore, the parsing module includes, The layout parsing unit is used to load the layout information output by the parasitic parameter extraction tool and parse it into structured graphic data containing graphic layers, graphic structures, networks, nodes, blocking information and corresponding geometric coordinates. The process parameter extraction unit is used to read the process file corresponding to the layout information and extract the corresponding process-related parameters, including process layer definition, inter-layer structural relationship, manufacturing rules, material properties, layer name and layer visualization attributes.

[0015] The layer mapping establishment unit is used to identify the process layer to which the graphic layer in the structured graphic data belongs, and to establish the mapping relationship between the graphic layer and the process layer, based on the process layer definition, layer alias and visualization attributes in the process file. The data model building unit is used to bind structured graphical data with corresponding process layer information, visualization attributes, and material attributes to build a data model for visualization and attribute query.

[0016] Furthermore, the feature annotation module includes, The graphic classification unit is used to classify the graphic structure in the structured graphic data into layers based on the process layer definition and the inter-layer structural relationship, forming a graphic data structure with a layered structure. The manufacturing effect annotation unit is used to annotate the corresponding manufacturing effect information in the graphic data structure according to the material properties and manufacturing rules. The manufacturing effect information includes graphic width shrinkage, graphic edge offset, graphic corner blunting, hole deformation, interlayer boundary expansion, and through hole ellipticization, which are used to characterize various geometric shape changes during the manufacturing process.

[0017] Compared with the prior art, the present invention has at least one of the following beneficial effects: This invention enables the joint analysis and visualization output of layout data and process documents. It can intuitively present the graphic structure and manufacturing effect characteristics processed by the parasitic parameter extraction tool in a two-dimensional view, improving users' understanding of layout segmentation methods and actual manufacturing morphology. It supports interactive querying of graphic attribute information, including layers, nodes, networks, and blocking information, facilitating precise positioning and debugging. It provides three-dimensional structure reconstruction and cross-section display functions, which helps to three-dimensionally restore complex process structures. At the same time, it supports layer filtering, distance measurement, and zooming operations, enhancing the convenience of layout verification and analysis, thereby effectively improving the development efficiency and debugging accuracy of the parasitic parameter extraction process. Attached Figure Description

[0018] Figure 1 This is a flowchart of the layout visualization method for parasitic parameter extraction according to the present invention; Figure 2 This is a schematic diagram illustrating the working principle of the layout visualization method in this embodiment of the invention. Figure 3 This is a two-dimensional layout visualization diagram of dyeing based on the process layer in an embodiment of the present invention; Figure 4 This is a two-dimensional layout visualization diagram based on electrical nodes in an embodiment of the present invention; Figure 5 This is a schematic diagram of a three-dimensional hierarchical cross-sectional view of the layout structure in an embodiment of the present invention; Figure 6 This is a schematic diagram of a two-dimensional cross-section and top view of a key area of ​​the layout in an embodiment of the present invention; Figure 7 This is a three-dimensional layout structure model diagram in an embodiment of the present invention; Figure 8 This is a two-dimensional layout visualization diagram with graphic attribute information in an embodiment of the present invention. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0020] Those skilled in the art will understand that, unless specifically stated otherwise, the singular forms “a,” “an,” “the,” and “the” used herein may also include the plural forms. It should be further understood that the term “comprising” as used in this specification means the presence of the stated features, integers, steps, operations, elements, and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof.

[0021] First Embodiment In the integrated circuit design flow, parasitic parameter extraction plays a crucial role in chip performance analysis and post-simulation verification. While existing layout tools support basic 2D and 3D display and measurement functions, the following technical problems still exist when debugging parasitic parameter extraction tools: First, the lack of visualization of manufacturing effects makes it difficult to verify the extraction logic; second, the lack of ability to construct 3D structures and cross-sectional views makes it impossible to fully display the spatial relationships of multilayer interconnect structures; third, the inability to interactively click on graphics to view key parasitic parameter attributes (such as node and net information); and fourth, the lack of graphical support for process file structures makes it difficult to understand the process hierarchy.

[0022] To address the shortcomings of existing parasitic parameter extraction tools, such as limited visualization dimensions, unclear manufacturing effects, and difficulty in obtaining graphical information during debugging and verification, the inventors propose a layout visualization debugging method for parasitic parameter extraction. This method involves loading the layout information output by the parasitic parameter extraction tool and reading the corresponding process file to parse structured graphical data and process layer parameters. Next, based on layer aliases and interlayer structural relationships in the process file, the graphical data is categorized and grouped. Combining material properties and manufacturing rules, manufacturing effect information is overlaid on the corresponding graphics to characterize the morphological changes of the graphics during actual processing. Then, a two-dimensional visualization interface is constructed, displaying the graphics according to layer or node information, and supporting zooming, filtering, and clicking to view key information such as network attributes and coordinates. Subsequently, responding to user operations, a layered view of the selected cross-section can be generated, displaying the graphical morphology within the corresponding cross-section. Furthermore, users can select a two-dimensional graphical area to construct a three-dimensional layout view, enabling the reconstruction of the graphic's three-dimensional structure and interactive operations. Finally, the method supports visual browsing of the process file structure, helping users understand the functional relationships and stacking structure of each layer, thereby improving the interpretability and verification efficiency of the parasitic parameter extraction results. It has the following functions: (1) It supports visualization of two-dimensional layouts from multiple angles, allowing coloring and filtering by layer or node; (2) It integrates manufacturing process effect annotation to show the possible actual shape changes of the graphic; (3) It provides graphic click interaction function, which can obtain the layer, node, net, blocking information and coordinate information of the graphic in each layer; (4) It allows users to select any area and build a three-dimensional layout view, supporting zoom, rotation and cross-sectional viewing; (5) It supports arbitrary cross-sectional selection and structural visualization of two-dimensional layouts to assist in observing the structural relationship between layers; (6) It supports graphical parsing and display of process documents to improve users' understanding of the relationship between process and layout; (7) It provides geometric distance measurement function between graphics for layout rule verification or parasitic path estimation. The specific implementation is as follows: like Figure 1 , 2 As shown, this invention provides a layout visualization method for parasitic parameter extraction, simplifying the development, debugging, analysis, and verification process of parasitic parameter extraction tools. A layout viewer with the above-mentioned functions helps users understand the generation mechanism of parasitic parameter features and verify the extraction results, as well as better understand the working process of parasitic parameter extraction tools. Furthermore, it is simpler to use and easier for users to understand and operate. Obtain the layout information to be visualized and the corresponding process documents; The layout information is structurally segmented based on the process documents, and manufacturing effect information is superimposed on the segmented graphics to generate a layout graphic containing manufacturing features. This map visualization tool constructs a two-dimensional visualization interface and displays the map graphics by color according to their hierarchical or node information, supporting basic interactive operations of the graphics; Responding to user actions on the 2D visualization interface, it generates corresponding 3D views or selected cross-sections for the visualization of three-dimensional structures.

[0023] Furthermore, it also includes functional units such as distance measurement, graphic zooming, and layer filtering to assist users in verifying and debugging key areas.

[0024] Furthermore, obtain the layout information to be visualized and the corresponding process documents, including, Load the layout information output by the parasitic parameter extraction tool and parse it into structured graphic data containing graphic layers, graphic structure, network, nodes, blocking information and corresponding geometric coordinates; Read the process file corresponding to the layout information and extract the corresponding process-related parameters, including process layer definition, inter-layer structural relationship, manufacturing rules, material properties, layer name and layer visualization attributes.

[0025] Based on the process layer definition, layer alias and visualization attributes in the process document, identify the process layer to which the graphic layer in the structured graphic data belongs, and establish the mapping relationship between the graphic layer and the process layer. Structured graphical data is bound to corresponding process layer information, visualization attributes, and material properties to construct a data model for visualization and attribute querying.

[0026] Furthermore, based on the process documents, the layout information is structurally segmented, and manufacturing effect information is overlaid on the segmented graphics to generate a layout graphic containing manufacturing features, including... Based on the definition of process layers and the structural relationship between layers, the graphic structure in the structured graphic data is classified into layers to form a graphic data structure with a layered structure. Based on material properties and manufacturing rules, corresponding manufacturing effect information is labeled in the graphic data structure. The manufacturing effect information includes graphic width shrinkage, graphic edge offset, graphic corner blunting, hole deformation, interlayer boundary expansion, and through hole ellipticization, which are used to characterize various geometric shape changes during the manufacturing process.

[0027] Furthermore, a two-dimensional visualization interface is constructed, and the map graphics are displayed with color according to their hierarchical or node information, supporting basic interactive operations on the graphics, including... Based on the graphic layer information in the structured graphic data and combined with the process layer definition, the graphics are classified into layers and each graphic layer is identified with a different color to complete the hierarchical coloring display of the graphics. Based on the network division and node identification in the inter-layer structure relationship, the graphical structures belonging to the same network or the same node are colored in the same color to help users identify the electrical connection relationship. like Figure 3 , 4 As shown, in Figure 3 In the layout diagram, graphics are colored according to layer (process layer) name, with the same layer displayed in the same color, making it easier for users to understand the process layer affiliation of each graphic. Figure 4 The mid-layout diagram is colored according to the node name to identify electrical connections during parasitic resistance extraction. Users can open any process file for a more intuitive understanding of the relationships between different layers.

[0028] In response to user clicks or hovering actions, display the attribute information of the selected graphic structure, including layer name, node number, network name, blockage information, and geometric coordinates.

[0029] like Figure 8 As shown, clicking on a rectangle in the 2D map will display the attribute information of all graphics at that location. If multiple graphics overlap in the z-axis direction, their attribute information will be displayed sequentially, including layer name, node ID, net name, and coordinate information. Figure 8 The left side displays graphic objects of different shapes and positions on multiple layers. Figure 8 The text on the right is a list of attribute information for each layer graphic, including the layer name (LVS layername), the number of the electric node to which it belongs (R node id), the network number (Net name), and the bounding box coordinate range (Position) of the graphic in three-dimensional space. Figure 8 This diagram illustrates the correspondence and spatial distribution between graphs and electrical nodes / networks in parasitic parameter extraction. It can be used to verify whether the graphs in the layout are correctly parsed and assigned to the correct electrical network, and to assist in troubleshooting assignment errors or geometric conflicts during the parameter extraction process.

[0030] Furthermore, in response to user actions on the two-dimensional visualization interface, a corresponding three-dimensional view or selected cross-section is generated for the visualization of the three-dimensional structure, including... In response to the user's selection of a two-dimensional graphic area, the system calls the corresponding graphic structure and process layer data, constructs a three-dimensional view model of the selected area, and provides interactive control functions for rotation and scaling. In response to a user-specified cross-sectional location, the system extracts the multi-layered graphic structure that traverses the cross-section and generates a cross-sectional view based on the actual stacking relationship. This view is used to determine the distribution of different process layers at the cross-sectional location.

[0031] like Figure 6 , 7 As shown in Figure 8, Figure 6 This is a two-dimensional process section view generated based on a user-specified cross-section. After receiving the user-specified cross-section location, it automatically extracts all layer graphic information that the location traverses, and combines this information with the interlayer stacking relationships, thickness information, and structural attributes defined in the process file to generate the graphic cross-section shown in the figure. Figure 6 The diagram illustrates the complete cross-sectional structure of the process, including the substrate, multiple metal interconnect layers, via structures, and patterned regions. This diagram helps users intuitively understand the spatial arrangement and connection paths of different process layers at this location, and can be used for parasitic parameter analysis, interconnect path verification, and process consistency checks. Figure 7 The system can not only generate a cross-sectional structural view of the user-specified location (left), but also simultaneously display the corresponding two-dimensional layout area (right). Through synchronous positioning and coordinate rulers, it helps users compare the actual distribution of the graphic in the plane and cross-sectional space. The left image shows the sectioning result at a certain cross-sectional location, presenting the structural stacking of multiple process layers and via connection paths; the right image shows the two-dimensional layout graphic of the area where the cross-section is located, used to locate the layout context corresponding to the cross-section. Enhancing the user's understanding of the layout space structure helps to accurately identify the relationship between the parasitic parameter extraction results and the actual geometric shape, and is especially suitable for debugging discontinuities in parasitic capacitance and resistance paths or identifying the effects of manufacturing process layer offsets. Figure 8 This demonstration showcases the construction of 3D structural graphics based on user-selected 2D layout areas. It automatically extracts hierarchical information, spatial dimensions, and connectivity relationships from the graphics and visualizes them as a 3D stereoscopic view. The 3D blocks in the view represent different levels of the graphic structure, and vertical connecting columns represent vias or through-holes traversing multiple process layers, accurately representing the 3D stacking and interconnection patterns in the actual layout. The view supports rotation and zoom operations.

[0032] Second Embodiment Based on the same inventive concept, this invention also provides a layout visualization system for parasitic parameter extraction, employing the layout visualization method described above, including: The parsing module is used to obtain the layout information to be visualized and the corresponding process documents through parasitic parameter extraction tools; The feature annotation module is used to structurally segment the layout information based on the process document, and to overlay manufacturing effect information on the segmented graphics to generate a layout graphic containing manufacturing features. The two-dimensional visualization interaction module is used to build a two-dimensional visualization interface and display the map graphics by color according to their level or node information, and supports basic interactive operations of the graphics; The 3D visualization interaction module is used to respond to user operations on the 2D visualization interface and generate corresponding 3D views or selected cross-sections for the visualization of three-dimensional structures.

[0033] Furthermore, it also includes an auxiliary verification and analysis module, which provides functional units including distance measurement, graphic scaling, and layer filtering to assist users in verifying and debugging key areas.

[0034] Furthermore, the parsing module includes, The layout parsing unit is used to load the layout information output by the parasitic parameter extraction tool and parse it into structured graphic data containing graphic layers, graphic structures, networks, nodes, blocking information and corresponding geometric coordinates. The process parameter extraction unit is used to read the process file corresponding to the layout information and extract the corresponding process-related parameters, including process layer definition, inter-layer structural relationship, manufacturing rules, material properties, layer name and layer visualization attributes.

[0035] The layer mapping establishment unit is used to identify the process layer to which the graphic layer in the structured graphic data belongs, and to establish the mapping relationship between the graphic layer and the process layer, based on the process layer definition, layer alias and visualization attributes in the process file. The data model building unit is used to bind structured graphical data with corresponding process layer information, visualization attributes, and material attributes to build a data model for visualization and attribute query.

[0036] Furthermore, the feature annotation module includes, The graphic classification unit is used to classify the graphic structure in the structured graphic data into layers based on the process layer definition and the inter-layer structural relationship, forming a graphic data structure with a layered structure. The manufacturing effect annotation unit is used to annotate the corresponding manufacturing effect information in the graphic data structure according to the material properties and manufacturing rules. The manufacturing effect information includes graphic width shrinkage, graphic edge offset, graphic corner blunting, hole deformation, interlayer boundary expansion, and through hole ellipticization, which are used to characterize various geometric shape changes during the manufacturing process.

[0037] The above description is merely a preferred embodiment of the present invention. The scope of protection of the present invention is not limited to the above embodiments. All technical solutions falling within the scope of the present invention's concept are within the scope of protection of the present invention. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principles of the present invention should also be considered within the scope of protection of the present invention.

[0038] It should be noted that the above embodiments can be freely combined as needed. The above description is only a preferred embodiment of the present invention. It should be pointed out that for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A layout visualization method for extracting parasitic parameters, characterized in that, include, Obtain the layout information to be visualized and the corresponding process documents; Based on the process document, the layout information is structurally segmented, and manufacturing effect information is superimposed on the segmented graphic to generate a layout graphic containing manufacturing features. A two-dimensional visualization interface is constructed, and the map graphics are displayed by coloring according to their respective levels or node information, supporting basic interactive operations of the graphics. In response to user actions on the two-dimensional visualization interface, a corresponding three-dimensional view or selected cross-section is generated for the visualization of the three-dimensional structure.

2. The map visualization method according to claim 1, characterized in that, It also includes functional units such as distance measurement, image scaling, and layer filtering to assist the user in verifying and debugging key areas.

3. The map visualization method according to claim 1, characterized in that, Obtain the layout information to be visualized and the corresponding process documents, including: Load the layout information output by the parasitic parameter extraction tool and parse it into structured graphic data containing graphic layers, graphic structures, networks, nodes, blocking information and corresponding geometric coordinates; Read the process file corresponding to the layout information and extract the corresponding process-related parameters, including process layer definition, inter-layer structural relationship, manufacturing rules, material properties, layer name and layer visualization attributes; Based on the process layer definition, layer alias and visualization attributes in the process document, identify the process layer to which the graphic layer in the structured graphic data belongs, and establish a mapping relationship between the graphic layer and the process layer; The structured graphical data is bound to the corresponding process layer information, the visualization attributes, and the material attributes to construct a data model for visualization and attribute query.

4. The map visualization method according to claim 3, characterized in that, Based on the process document, the layout information is structurally segmented, and manufacturing effect information is superimposed on the segmented graphic to generate a layout graphic containing manufacturing features, including... Based on the process layer definition and the inter-layer structure relationship, the graphic structure in the structured graphic data is classified into layers to form a graphic data structure with a layered structure. According to the material properties and the manufacturing rules, the corresponding manufacturing effect information is marked in the graphic data structure. The manufacturing effect information includes graphic width shrinkage, graphic edge offset, graphic corner blunting, hole deformation, interlayer boundary expansion, and through hole ellipticization, which are used to characterize various geometric shape changes during the manufacturing process.

5. The map visualization method according to claim 4, characterized in that, A two-dimensional visualization interface is constructed, and the map graphic is displayed with color according to its hierarchical or node information, supporting basic interactive operations of the graphic, including... Based on the graphic layer information in the structured graphic data and the process layer definition, the graphics are classified into layers and each graphic layer is identified with a different color to complete the hierarchical coloring display of the graphics. Based on the network division and node identification in the inter-layer structure relationship, the graphical structures belonging to the same network or the same node are colored using a uniform color to assist the user in identifying electrical connection relationships; In response to the user's click or hover operation, the attribute information of the selected graphic structure is displayed, including the layer name, the node number, the network name, the blocking information, and the geometric coordinates.

6. The map visualization method according to claim 5, characterized in that, In response to user actions on the 2D visualization interface, a corresponding 3D view or selected cross-section is generated for the visualization of the three-dimensional structure. include, In response to the user's operation of selecting a two-dimensional graphic area, the corresponding graphic structure and process layer data are called to construct a three-dimensional view model of the selected area and provide rotation and scaling interactive control functions. In response to a user-specified cross-sectional location, the system extracts the multi-layered graphic structure that traverses the cross-section and generates a cross-sectional view based on the actual stacking relationship. This view is used to determine the distribution of different process layers at the cross-sectional location.

7. A layout visualization system for extracting parasitic parameters, employing the layout visualization method as described in any one of claims 1 to 6, characterized in that, include, The parsing module is used to obtain the layout information to be visualized and the corresponding process documents through parasitic parameter extraction tools; The feature annotation module is used to perform structural segmentation of the layout information based on the process document, and to overlay manufacturing effect information on the segmented graphic to generate a layout graphic containing manufacturing features; The two-dimensional visualization interaction module is used to construct a two-dimensional visualization interface and display the map graphics by coloring according to their respective levels or node information, and supports basic interactive operations of the graphics; The 3D visualization interaction module is used to respond to the user's operation on the 2D visualization interface and generate the corresponding 3D view or selected cross-section for the visualization of three-dimensional structures.

8. The map visualization system according to claim 7, characterized in that, It also includes an auxiliary verification and analysis module, which provides functional units including distance measurement, image scaling, and layer filtering to assist the user in verifying and debugging key areas.

9. The map visualization system according to claim 8, characterized in that, The parsing module includes, The layout parsing unit is used to load the layout information output by the parasitic parameter extraction tool and parse it into structured graphic data containing graphic layers, graphic structures, networks, nodes, blocking information and corresponding geometric coordinates. The process parameter extraction unit is used to read the process file corresponding to the layout information and extract the corresponding process-related parameters, including process layer definition, inter-layer structural relationship, manufacturing rules, material properties, layer name and layer visualization attributes. The layer mapping establishment unit is used to identify the process layer to which the graphic layer in the structured graphic data belongs based on the process layer definition, the layer alias and the visualization attributes in the process file, and to establish a mapping relationship between the graphic layer and the process layer. The data model building unit is used to bind the structured graphical data with the corresponding process layer information, the visualization attributes and the material attributes to build a data model for visualization and attribute query.

10. The map visualization system according to claim 9, characterized in that, The feature annotation module includes, The graphic classification unit is used to classify the graphic structures in the structured graphic data into layers based on the process layer definition and the inter-layer structure relationship, so as to form a graphic data structure with a layered structure. The manufacturing effect annotation unit is used to annotate the corresponding manufacturing effect information in the graphic data structure according to the material properties and the manufacturing rules. The manufacturing effect information includes graphic width shrinkage, graphic edge offset, graphic corner blunting, hole deformation, interlayer boundary expansion, and through hole ellipticization to characterize various geometric shape changes during the manufacturing process.

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