Pneumatic combined pressure device based on MCS production process

Abstract

The invention provides a pneumatic combined pressure device based on an MCS production process. The pneumatic combined pressure device comprises a pneumatic combined pressure base and a pneumatic combined pressure device, wherein the pneumatic combined pressure base is provided with a negative pressure cavity pipeline; the pneumatic combined pressure base plate is arranged on the pneumatic combined pressure base and is matched with the pneumatic combined pressure base to form a vacuum cavity through the negative pressure cavity pipeline; the pneumatic combined pressure end cover is fixedly connected with the pneumatic combined pressure base; the upper surface of the multi-layer composite body is in lap joint with the pneumatic combined pressure base, the lower surface of the multi-layer composite body is connected with a high-pressure cavity, and pneumatic combined pressure is conducted on the multi-layer composite body through cooperation of the vacuum cavity and the high-pressure cavity. The vacuum cavity is formed in one side of the multi-layer composite body, and the high-pressure cavity is formed in the other side of the multi-layer composite body, so that the elastomer raw material, the fusion material and the sensitive material are tightly bonded under the pressure of the high-pressure cavity during combined pressure in the multi-layer composite body, and the product percent of pass and the consistency of the performance of the pressure sensor core body are improved.

Description

Technical Field

[0001] This application relates to the field of sensor technology, and in particular to a pneumatic pressure device based on MCS manufacturing process. Background Technology

[0003] Currently, high-end pressure sensors are manufactured using a press-fit method, which involves a press-fit machine. This press-fit machine is a flat vacuum vulcanizing machine, and the pressurization method is a hydraulic system that uses a hydraulic cylinder rod to drive the flat plate for pressurization. However, errors exist in the hydraulic system during its stroke, and there are also errors in the parallelism between the upper and lower plates. These cumulative errors cause a slight plastic deformation of the elastic composite after press-fitting, increasing the stress within the elastic body. When machining blind holes, this slight plastic deformation will directly affect the diaphragm thickness of the elastic body. For small-range elastic bodies, the diaphragm thickness is thin, and even a slight error will affect the performance consistency of the entire core plate.

[0004] Meanwhile, when selecting the adhesive layer, liquid adhesive has stronger fluidity than solid adhesive. When using the pressure system, due to the stroke error between the platen and the hydraulic system, and the parallelism error between the pressure platen and the base plate, the pressure surface is not uniformly stressed, which will lead to a large inconsistency in the thickness of the adhesive layer, affecting the performance consistency of the entire batch of cores.

[0005] In view of this, the present invention is hereby proposed. Summary of the Invention

[0006] To address the aforementioned issues, this application provides a pneumatic pressure device based on the MCS production process. Its main purpose is to solve the problem that errors in the hydraulic system used in existing pressure machines lead to minute plastic deformation in the multilayer composite after pressure bonding. Furthermore, the machining of blind holes after pressure bonding causes these minute plastic deformations to directly affect the diaphragm thickness of the elastomer, thereby impacting the performance consistency of the core.

[0007] To achieve the objectives of this application, the following technical solution is provided:

[0008] In a first aspect, this application provides a pneumatic pressure-coupling device based on the MCS manufacturing process, which includes:

[0009] Pneumatic pressure base: Equipped with a negative pressure chamber pipeline;

[0010] Pneumatic pressure-connecting base plate: disposed on the pneumatic pressure-connecting base, and cooperates with the pneumatic pressure-connecting base to form a vacuum cavity through the negative pressure cavity pipeline;

[0011] Pneumatic pressure-connecting end cap: fixedly connected to the pneumatic pressure-connecting base;

[0012] Multilayer composite: The upper surface of the multilayer composite overlaps with the pneumatic pressure base, and the lower surface of the multilayer composite is connected to a high-pressure chamber. The multilayer composite is pneumatically pressured through the cooperation of the vacuum chamber and the high-pressure chamber.

[0013] This application sets up a vacuum chamber and a high-pressure chamber on both sides of a multilayer composite. During pneumatic pressure bonding, the elastomer raw materials, fusion materials and sensitive materials in the multilayer composite are tightly bonded by the pressure of the high-pressure chamber. This can improve the uniformity of stress on the elastomer raw materials, fusion materials and sensitive materials, reduce the uneven thickness of the fusion materials and the deformation of the elastomer caused by uneven stress, thereby improving the product qualification rate and the consistency of the pressure sensor core performance.

[0014] In one possible implementation, when the multilayer composite is a sheet material, a groove is formed on the pneumatic pressure base, the groove includes an upper groove and a lower groove, the diameter of the upper groove is larger than the diameter of the lower groove, the pneumatic pressure substrate is disposed in the lower groove, and the diameter of the pneumatic pressure substrate is equal to the diameter of the lower groove.

[0015] The upper surface of the multilayer composite overlaps with the pneumatic pressure substrate, and the multilayer composite, the pneumatic pressure substrate, and the pneumatic pressure base form a vacuum cavity.

[0016] In one possible implementation, the lower end of the pneumatic pressure-connecting end cap is provided with a mounting groove, the diameter of which is equal to the diameter of the multilayer composite. The multilayer composite is placed upside down in the mounting groove, and the high-pressure chamber pipeline is opened on the pneumatic pressure-connecting end cap and communicates with the mounting groove. The multilayer composite and the pneumatic pressure-connecting end cap form a high-pressure chamber.

[0017] In one possible implementation, a sealing groove is installed at the upper end of the pneumatic pressure base, and a negative pressure sealing ring is disposed in the sealing groove;

[0018] A high-pressure sealing ring is provided on the outer circumference of the multilayer composite.

[0019] In one possible implementation, when the multilayer composite is a bar stock, the pneumatic pressure end cap is provided with a mounting groove, the pneumatic pressure base plate includes an upper base plate and a lower base plate, the diameter of the lower base plate is smaller than the diameter of the upper base plate and smaller than the diameter of the mounting groove, and the upper base plate is connected to the pneumatic pressure end cap by bolts.

[0020] The lower surface of the lower substrate overlaps with the upper surface of the multilayer composite, and the pneumatic pressure base, the pneumatic pressure end cap, the pneumatic pressure substrate, and the multilayer composite form a vacuum cavity.

[0021] In one possible implementation, a pneumatic pressure piston is provided on the pneumatic pressure base, and the pneumatic pressure piston overlaps with the lower surface of the multilayer composite.

[0022] The high-pressure chamber pipeline is located on the pneumatic pressure base, and the pneumatic pressure base, the pneumatic pressure piston, and the multilayer composite form a high-pressure chamber.

[0023] In one possible implementation, when the multilayer composite is a bar stock, the bar stock is disposed on a composite substrate, and a threaded limiting block is disposed within the composite substrate. By adjusting the threaded connection position of the limiting block, the upper surface of the bar stock and the upper surface of the composite substrate are ensured to be in the same horizontal plane.

[0024] In one possible implementation, a sealing groove is installed at the upper end of the pneumatic pressure base, and a negative pressure sealing ring is disposed in the sealing groove;

[0025] A high-pressure sealing ring is provided on the outer circumferential surface of the composite substrate.

[0026] In one possible implementation, the combined base plate is fixed to the pneumatically pressurized piston by bolts.

[0027] In one possible implementation, the pneumatic pressure end cap is fixed to the pneumatic pressure base by bolts.

[0028] Compared with the prior art, this application has at least the following advantages:

[0029] 1. This application forms a vacuum cavity on one side of a multilayer composite and a high-pressure cavity on the other side. During pneumatic pressure bonding, the elastomer raw materials, fusion materials and sensitive materials in the multilayer composite are tightly bonded by the pressure of the high-pressure cavity. This can improve the uniformity of stress on the elastomer raw materials, fusion materials and sensitive materials, reduce the uneven thickness of the fusion materials and the deformation of the elastomer caused by uneven stress, thereby improving the product qualification rate and the consistency of the pressure sensor core performance. Attached Figure Description

[0030] The accompanying drawings are provided to further understand this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof.

[0031] Figure 1 This is an isometric view of the pressure sensor core provided in the embodiments of this application;

[0032] Figure 2 This is a schematic diagram of the elastomer raw material for the sheet metal provided in Embodiment 1 of this application;

[0033] Figure 3This is a schematic diagram of the multilayer composite provided in Embodiment 1 of this application;

[0034] Figure 4 This is an isometric view of the core before it is cut after etching, as provided in Embodiment 1 of this application;

[0035] Figure 5 This is a cross-sectional view of the pneumatic pressure device provided in Embodiment 1 of this application;

[0036] Figure 6 This is a schematic diagram of the elastomer raw material for the bar stock provided in Embodiment 2 of this application;

[0037] Figure 7 This is a schematic diagram of the combined substrate provided in Embodiment 2 of this application;

[0038] Figure 8 This is a schematic diagram of the multilayer composite provided in Embodiment 2 of this application;

[0039] Figure 9 for Figure 8 A magnified view of a portion of the image;

[0040] Figure 10 This is a cross-sectional view of the pneumatic pressure device provided in Embodiment 2 of this application.

[0041] in:

[0042] 1-Stainless steel plate; 2-Sensitive material; 3-Fusion material; 4-Combined substrate; 41-Bar stock; 5-Limiting block; 6-First pneumatic pressure end cap; 7-First pneumatic pressure substrate; 8-First pneumatic pressure base; 9-First high-pressure chamber pipeline; 10-First negative pressure chamber pipeline; 11-First vacuum sealing ring; 12-First high-pressure sealing ring; 13-Second pneumatic pressure end cap; 14-Second pneumatic pressure substrate; 15-Second pneumatic pressure base; 16-Second high-pressure chamber pipeline; 17-Second negative pressure chamber pipeline; 18-Second vacuum sealing ring; 19-Second high-pressure sealing ring; 20-Pneumatic pressure piston; 21-Bolt; 22-Core. Detailed Implementation

[0043] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0044] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature; in the description of this application, unless otherwise stated, "multiple" means two or more.

[0045] Example 1

[0046] Figure 1-5 This application provides a first pneumatic pressure device based on MCS manufacturing process. The device mainly includes a first pneumatic pressure base 8, a first pneumatic pressure substrate 7, a first pneumatic pressure end cap 6, a high-pressure chamber, a first high-pressure chamber pipeline 9, a negative pressure chamber, and a first negative pressure chamber pipeline 10. By setting the first high-pressure chamber pipeline 9 and the first negative pressure chamber pipeline 10, a vacuum is drawn through the first negative pressure chamber pipeline 10, and pressure is applied through the first high-pressure chamber pipeline 9. The multilayer composite formed by the elastomer raw material, sensitive material 2, and fusion material 3 is vacuumed and pressurized. The multilayer composite is formed by pneumatic pressure. During pressure application, the elastomer raw material, sensitive material 2, and fusion material 3 are tightly bonded by the pressure of the high-pressure chamber, improving the uniformity of stress on the elastomer raw material, sensitive material 2, and fusion material 3.

[0047] In this embodiment, the elastomer raw material is selected as sheet material, such as... Figure 5 As shown, the first negative pressure chamber pipeline 10 is opened on the first pneumatic pressure base 8, and the first high pressure chamber pipeline 9 is opened on the first pneumatic pressure end cap 6. A groove is provided on the first pneumatic pressure base 8. The groove is inverted U-shape and includes an upper groove and a lower groove. The diameter of the lower groove is smaller than the diameter of the upper groove. The first pneumatic pressure base plate 7 is a cylinder. The diameter of the first pneumatic pressure base plate 7 is equal to the diameter of the lower groove. A sealing groove is provided at the upper end of the first pneumatic pressure base plate 7. A first vacuum sealing ring 11 is disposed in the sealing groove.

[0048] In this embodiment, since the elastomer raw material is a sheet, a first high-pressure sealing ring 12 is assembled on the elastomer raw material. The lower end of the first pneumatic pressure end cap 6 is provided with an installation groove, the diameter of which is equal to the diameter of the elastomer raw material. Therefore, the sealing environment between the first pneumatic pressure base 8, the first pneumatic pressure base plate 7, and the elastomer raw material forms a negative pressure chamber, which is connected to a vacuum pump through the first negative pressure chamber pipeline 10. A high-pressure chamber is formed between the elastomer raw material and the first pneumatic pressure end cap 6, which is connected to a high-pressure fluid tank through the first high-pressure chamber pipeline 9.

[0049] A threaded hole is provided on the first pneumatic pressure base 8, and a threaded through hole is provided on the first pneumatic pressure end cover 6. The first pneumatic pressure end cover 6 and the first pneumatic pressure base 8 are fixedly connected by bolts 13.

[0050] This embodiment also provides an MCS manufacturing process method, which uses the aforementioned pneumatic pressure device for production. The elastomer raw material used in this method is sheet metal, and the processed pressure sensor core 22 is suitable for medium and low precision requirements. To more clearly illustrate the content of this application, in this embodiment, the sheet metal is selected as 17-4PH stainless steel plate 1, the sensitive material 2 is selected as constantan foil, and the fusion material 3 is selected as epoxy resin film. The process includes the following steps:

[0051] 1. Take a stainless steel plate 1 and machine blind holes to form a pressure-sensitive diaphragm array (e.g. Figure 2 (as shown)

[0052] 2. The stainless steel plate 1 is heat-treated at 330-360℃ for 3-5 hours. In this embodiment, the stainless steel plate 1 is heat-treated at 350℃ for 4 hours to eliminate residual stress from machining.

[0053] 3. Wipe the surface of stainless steel plate 1 with a lint-free cloth dampened with anhydrous ethanol to perform surface cleaning and purification treatment; perform chemical roughening treatment with a roughening solution (the roughening solution is prepared by mixing ferric chloride and hydrochloric acid); after treatment, place it for use;

[0054] 4. Place a piece of constantan foil in a drying oven and dry it at 300-350℃ for 11-13 hours. In this embodiment, it is selected to dry it at 330℃ for 12 hours. After drying, wipe the surface with a lint-free cloth dipped in anhydrous ethanol to clean the surface. After cleaning, place it for use.

[0055] 5. Set the first high-pressure sealing ring 12 on the outer circumference of the stainless steel plate 1 processed in step 3 and set the first vacuum sealing ring 11 in the sealing groove on the first pneumatic pressure base 8. Place the first pneumatic pressure base plate 7 into the lower groove in the first pneumatic pressure base 8 and install the stainless steel plate 1 into the mounting groove on the inverted first pneumatic pressure end cover 6.

[0056] 6. Take a piece of epoxy resin film and lay it on the surface of the stainless steel plate 1 installed in step 5. Then, lay the constantan foil prepared in step 4 flat on the epoxy resin film to form a multi-layer composite.

[0057] 7. Place the first pneumatic pressure end cap 6 upright and slowly install it onto the first pneumatic pressure base 8. Install the first pneumatic pressure end cap 6 into the threaded hole by passing the bolt 13 through the threaded through hole. Fix the first pneumatic pressure end cap 6 to the first pneumatic pressure base 8. Note that the bolt 13 needs to be tightened with a torque wrench during this process.

[0058] 8. The vacuum pump evacuates the vacuum chamber to a vacuum through the first negative pressure chamber pipeline 10, and the high pressure fluid tank forms a high pressure chamber through the first high pressure chamber pipeline 9. The multilayer composite is pneumatically pressurized at 2-5MPa and 150-300℃ for 2-10 hours. In this embodiment, the multilayer composite is pneumatically pressurized at 3MPa and 250℃ for 7 hours.

[0059] 9. Coat the constantan foil on the multilayer composite after the pneumatic pressure is completed in step 8 with photoresist, pre-baking and then exposure, post-baking after exposure, development, hardening after development, and then etching (the etching solution is ferric chloride) to form the sensitive grid pattern of the strain gauge pressure sensor.

[0060] 10. Divide the multilayer composite in step 9 to form the pressure sensor core 22.

[0061] Example 2

[0062] Figure 1 , 6 -10 provides a pneumatic pressure device based on MCS production process according to an embodiment of this application. The device mainly includes a second pneumatic pressure base 15, a second pneumatic pressure substrate 14, a second pneumatic pressure end cap 13, a high-pressure chamber, a second high-pressure chamber pipeline 9, a negative pressure chamber, and a second negative pressure chamber pipeline 17. By setting the second high-pressure chamber pipeline 9 and the second negative pressure chamber pipeline 17, vacuum is drawn through the second negative pressure chamber pipeline 17, and pressurization is applied through the second high-pressure chamber pipeline 9. Vacuuming and pressurization are applied to the multilayer composite formed by the elastomer raw material, sensitive material 2, and fusion material 3 to form a multilayer composite. During pressure bonding, the elastomer raw material, sensitive material 2, and fusion material 3 are tightly bonded by the pressure of the high-pressure chamber, improving the uniformity of stress on the elastomer raw material, sensitive material 2, and fusion material 3.

[0063] In this embodiment, the elastomer raw material is selected as rod material 41, such as... Figure 10 As shown, the lower end of the second pneumatic pressure end cap 13 is provided with a mounting groove, and the second pneumatic pressure base plate 14 is disposed in the mounting groove. The second pneumatic pressure base plate 14 includes an upper base plate and a lower base plate, wherein the diameter of the lower base plate is smaller than the diameter of the upper base plate and smaller than the diameter of the mounting groove. The upper base plate and the lower base plate are coaxially arranged. A base threaded hole is opened on the lower base plate, and a matching end cap threaded hole is opened at the top of the mounting groove. The second pneumatic pressure base plate 14 and the second pneumatic pressure end cap 13 are fixed by bolts.

[0064] Since the elastomer raw material in this embodiment is a bar stock 41, during the manufacturing process, the bar stock 41 needs to be machined with blind holes and boss structures and then assembled onto the composite substrate 4. The second high-pressure sealing ring 19 is installed on the outer circumferential surface of the composite substrate 4, and the second vacuum sealing ring 18 is installed on the second pneumatic pressure base 15 (the operation is the same as in Embodiment 1).

[0065] Meanwhile, a pneumatic pressure piston 20 is provided on the second pneumatic pressure base 15. The combined base plate 4 is installed on the pneumatic pressure piston 20 by bolts to perform pneumatic pressure operation.

[0066] Meanwhile, a second negative pressure chamber pipeline 17 and a second high pressure chamber pipeline 9 are provided on the second pneumatic pressure base 15. The second pneumatic pressure base 15, the second pneumatic pressure base plate 14, the second pneumatic pressure end cap 13 and the combined base plate 4 form a negative pressure chamber, which is connected to a vacuum pump through the second negative pressure chamber pipeline 17. The second pneumatic pressure base 15, the pneumatic pressure piston 20 and the combined base plate 4 form a high pressure chamber, which is connected to a high pressure fluid tank through the second high pressure chamber pipeline 9 to perform vacuum high pressure treatment on the combined base plate 4.

[0067] A threaded hole is provided on the second pneumatic pressure base 15, and a threaded through hole is provided on the second pneumatic pressure end cap 13. The second pneumatic pressure end cap 13 and the second pneumatic pressure base 15 are fixedly connected by bolts 21.

[0068] This embodiment also provides an MCS manufacturing process method, which uses the aforementioned pneumatic pressure device for production. The elastomer raw material used in this method is rod stock 41, and the pressure sensor core 22 processed from it is suitable for high-precision requirements. To more clearly illustrate the content of this application, in this embodiment, the sensitive material 2 is selected as constantan foil, and the fusion material 3 is selected as epoxy resin film. The process includes the following steps:

[0069] 1. The elastomer raw material of bar stock 41 is divided into sections, and the individual elastomer raw materials are machined to form blind holes and boss structures.

[0070] 2. Assemble the processed multiple elastomer raw materials onto the combined substrate 4 respectively. At the same time, adjust the threads on the limiting block 5 on the combined substrate 4 so that the upper surface of the elastomer raw material and the upper surface of the combined substrate 4 are on the same horizontal plane.

[0071] 3. Wipe the upper surface of the elastomer raw material with a lint-free cloth soaked in anhydrous ethanol to perform surface cleaning and purification treatment; perform chemical roughening treatment using a roughening solution (the roughening solution is prepared by mixing ferric chloride and hydrochloric acid); after treatment, set aside for use;

[0072] 4. Place a piece of constantan foil in a drying oven at 330℃ for 12 hours to dry it. Then, use a lint-free cloth dipped in anhydrous ethanol to wipe the surface to clean it. After cleaning, set it aside for use.

[0073] 5. Install the second high-pressure sealing ring 19 and the second pneumatic pressure base 15 on the outer circumferential surface of the combined substrate 4 in step 3, assemble the second vacuum sealing ring 18, invert the second pneumatic pressure end cap 13, fix the second pneumatic pressure substrate 14 to the second pneumatic pressure end cap 13 with bolts, and then assemble the pneumatic pressure piston 20 onto the second pneumatic pressure base 15.

[0074] 6. Mount the composite substrate 4 onto the pneumatic pressure piston 20 with bolts. Take an epoxy resin film and lay it on the upper surface of the rod 41 on the installed composite substrate 4. Then, lay the constantan foil processed in step 4 flat on the epoxy resin film to form a multilayer composite.

[0075] 7. Place the second pneumatic pressure end cap 13 upright and slowly install it onto the second pneumatic pressure base 15. Install the second pneumatic pressure end cap 13 into the threaded hole by passing the bolt 21 through the threaded through hole. Fix the second pneumatic pressure end cap 13 to the second pneumatic pressure base 15. Note that the bolt 21 needs to be tightened with a torque wrench during this process.

[0076] 8. The vacuum pump evacuates the vacuum chamber to a vacuum through the second negative pressure chamber pipeline 17, and the high pressure fluid tank forms a high pressure chamber through the second high pressure chamber pipeline 9, and pneumatically pressurizes the multilayer composite at 3MPa and 250℃ for 7 hours.

[0077] 9. Coat the constantan foil on the multilayer composite after the pneumatic pressure is completed in step 8 with photoresist, pre-baking and then exposure, post-baking after exposure, development, hardening after development, and then etching (the etching solution is ferric chloride) to form the core 22 of the strain gauge pressure sensor.

[0078] The beneficial effects of using the embodiments of this application are as follows:

[0079] 1. This application uses high-pressure fluid instead of fixed pressure to press the multilayer composite. The high-pressure fluid acts directly on the elastomer to form uniform pressure, which makes the elastomer, fusion material 3 and sensitive material 2 fit together more tightly and uniformly.

[0080] 2. This application avoids the impact of machining residual stress on the finished product by first performing machining, then eliminating residual stress through heat treatment, and finally performing pressure bonding and photolithography, thus ensuring the excellent performance of the finished product.

[0081] Example 3

[0082] The specific implementation method is the same as that in Example 2, except that the elastomer raw material is replaced with sheet material.

[0083] In the embodiments provided in this application, it should be understood that the disclosed systems, modules, and methods can be implemented in other ways. For example, the module embodiments described above are merely illustrative; for instance, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be through some interfaces, or indirect coupling or communication connection between modules or units, and may be electrical, mechanical, or other forms.

[0084] The above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit it. This application is not limited to the exact structures described above and illustrated in the accompanying drawings, and it should not be considered that the specific implementation of this application is limited to these descriptions. For those skilled in the art, various changes and modifications made without departing from the concept of this application should be considered to fall within the protection scope of this application.

Claims

1. A pneumatic pressure-coupling device based on MCS manufacturing process, characterized in that, include: Pneumatic pressure base: Equipped with a negative pressure chamber pipeline; Pneumatic pressure-connecting base plate: disposed on the pneumatic pressure-connecting base, and cooperates with the pneumatic pressure-connecting base to form a vacuum cavity through the negative pressure cavity pipeline; Pneumatic pressure-connecting end cap: fixedly connected to the pneumatic pressure-connecting base; Multilayer composite: The upper surface of the multilayer composite overlaps with the pneumatic pressure base, and the lower surface of the multilayer composite is connected to a high-pressure chamber. The multilayer composite is pneumatically pressured through the cooperation of the vacuum chamber and the high-pressure chamber.

2. The pneumatic pressure device according to claim 1, characterized in that, When the multilayer composite is a sheet material, a groove is provided on the pneumatic pressure base. The groove includes an upper groove and a lower groove. The diameter of the upper groove is larger than the diameter of the lower groove. The pneumatic pressure substrate is disposed in the lower groove, and the diameter of the pneumatic pressure substrate is equal to the diameter of the lower groove. The upper surface of the multilayer composite overlaps with the pneumatic pressure substrate, and the multilayer composite, the pneumatic pressure substrate, and the pneumatic pressure base form a vacuum cavity.

3. The pneumatic pressure device according to claim 2, characterized in that, The lower end of the pneumatic pressure-connecting end cap is provided with an installation groove, the diameter of which is equal to the diameter of the multilayer composite. The multilayer composite is placed upside down in the installation groove. The high-pressure chamber pipeline is opened on the pneumatic pressure-connecting end cap and communicates with the installation groove. The multilayer composite and the pneumatic pressure-connecting end cap form a high-pressure chamber.

4. The pneumatic pressure device according to claim 3, characterized in that, The upper end of the pneumatic pressure base is equipped with a sealing groove, and a negative pressure sealing ring is disposed in the sealing groove; A high-pressure sealing ring is provided on the outer circumference of the multilayer composite.

5. The pneumatic pressure device according to claim 1, characterized in that, When the multilayer composite is a bar stock, the pneumatic pressure end cap is provided with an installation groove. The pneumatic pressure base plate includes an upper base plate and a lower base plate. The diameter of the lower base plate is smaller than the diameter of the upper base plate and smaller than the diameter of the installation groove. The upper base plate is connected to the pneumatic pressure end cap by bolts. The lower surface of the lower substrate overlaps with the upper surface of the multilayer composite, and the pneumatic pressure base, the pneumatic pressure end cap, the pneumatic pressure substrate, and the multilayer composite form a vacuum cavity.

6. The pneumatic pressure device according to claim 5, characterized in that, A pneumatic pressure piston is provided on the pneumatic pressure base, and the pneumatic pressure piston overlaps with the lower surface of the multilayer composite. The high-pressure chamber pipeline is located on the pneumatic pressure base, and the pneumatic pressure base, the pneumatic pressure piston, and the multilayer composite form a high-pressure chamber.

7. The pneumatic pressure device according to claim 5, characterized in that, When the multilayer composite is a bar stock, the bar stock is placed on the composite substrate, and the composite substrate is provided with a threaded limiting block. By adjusting the threaded connection position of the limiting block, the upper surface of the bar stock and the upper surface of the composite substrate are ensured to be in the same horizontal plane.

8. The pneumatic pressure device according to claim 7, characterized in that, The upper end of the pneumatic pressure base is equipped with a sealing groove, and a negative pressure sealing ring is disposed in the sealing groove; A high-pressure sealing ring is provided on the outer circumferential surface of the composite substrate.

9. The pneumatic pressure device according to claim 7, characterized in that, The combined base plate and the pneumatic pressure piston are fixed together by bolts.

10. The pneumatic pressure device according to claim 1, characterized in that, The pneumatic pressure end cap is fixed to the pneumatic pressure base by bolts.

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