Confocal microscopic image longitudinal distortion correction method based on electromagnetic drive MEMS micromirror

Abstract

The invention discloses a confocal microscopic image longitudinal distortion correction method based on an electromagnetic drive MEMS micromirror, and the method comprises the steps: sampling a piezoresistive feedback signal of a micromirror slow axis drive signal through a high-speed data collection card, fitting sampling data through a polynomial, carrying out the linear fitting of data points in a left-right interval of a midpoint of a sampling data time sequence, and carrying out the linear fitting of data points in a left-right interval of a midpoint of the sampling data time sequence; and mapping the polynomial fitting curve and the linear fitting curve according to the actual position of the corresponding micromirror, and finally realizing longitudinal distortion correction of the confocal microscopic image by utilizing upper computer imaging software through a mapping relation. According to the invention, the longitudinal distortion of the electromagnetic drive MEMS micromirror confocal microscope can be effectively corrected, and the image quality is improved.

Description

Technical Field

[0001] This invention belongs to the field of microscopy technology, and in particular to a method for correcting longitudinal distortion of confocal microscopic images based on electromagnetically driven MEMS micromirrors. Background Technology

[0002] Electromagnetic actuation is a common actuation mechanism used in MEMS micromirrors. Its core principle is as follows: a conductive coil is integrated onto the micromirror device. When current flows through the coil, a Lorentz torque is generated under the influence of an external magnetic field, according to the left-hand rule, causing the micromirror to deflect around its support axis. This method offers advantages such as high driving force, fast response speed, and high control precision, making it suitable for large-angle, high-frequency micromirror scanning applications. Compared to electrostatic actuation, electromagnetic actuation has lower driving voltage requirements, making it more suitable for low-voltage, high-power applications. Furthermore, its structural stability is stronger, making it suitable for applications such as laser scanning, spectral imaging, and 3D ranging.

[0003] Laser scanning confocal microscopy is one of the most widely used fluorescence imaging devices. By using conjugate pinholes, it effectively suppresses defocused light signals, significantly improving the image signal-to-noise ratio and endowing the system with optical tomographic imaging capabilities. Confocal imaging is typically achieved using point scanning, and a common approach to laser scanning is to employ a galvanometer scanning system consisting of a galvanometer mirror and a resonant mirror (see: Wang, Jiafu, et al., Engineering, 2015; Xu, Baoteng, et al., Optics Communications, 2022). However, traditional galvanometer systems suffer from large size and complex optomechanical adjustments, limiting their application in miniaturized and portable imaging devices. In contrast, micro-galvanometers based on MEMS technology offer advantages such as compact structure and ease of integration, effectively overcoming these shortcomings. There are already some studies on the application of MEMS micromirrors in confocal microscopy imaging systems (e.g., a handheld laser scanning confocal microscope based on MEMS, publication number: CN213715590U, publication date: July 16, 2021, application number: CN202022648855.9).

[0004] Although MEMS micromirrors can effectively reduce system size and assembly complexity, they are well known to introduce unique image distortions, similar to galvanometer assemblies. Typically, the main distortions produced by MEMS micromirrors include: fan-shaped geometric distortion caused by changes in the beam incident angle with position, and lateral stretching distortion caused by the fast-axis sinusoidal drive signal. However, in practical applications, the slow axis operating in quasi-static scanning mode should theoretically be driven by an ideal sawtooth wave. But due to limitations in the drive method, circuit board design, and system response, the actual drive signal often exhibits distortion, leading to longitudinal stretching distortion during the imaging process.

[0005] Therefore, it is necessary to propose a method for correcting longitudinal distortion of confocal microscopy images of electromagnetically driven MEMS micromirrors, in order to compensate for the longitudinal distortion caused by the non-ideal slow-axis drive of the micromirror, thereby achieving correction of longitudinal distortion. Summary of the Invention

[0006] The purpose of this invention is to address the shortcomings of the existing technology by providing a method for correcting longitudinal distortion of confocal microscopy images based on electromagnetically driven MEMS micromirrors. This method can realize confocal microscopy imaging using electromagnetic MEMS micromirrors and can effectively correct longitudinal distortion caused by imperfect slow-axis driving of MEMS micromirrors.

[0007] The technical solution to achieve the purpose of this invention is as follows: On the one hand, a method for correcting longitudinal distortion of confocal microscopic images based on electromagnetically driven MEMS micromirrors is provided. The method effectively corrects the longitudinal distortion introduced by MEMS micromirrors by establishing a mapping relationship between the slow-axis piezoresistive feedback signal of the MEMS micromirror and each row of the image.

[0008] Furthermore, the method includes the following steps:

[0009] Step 1: Simultaneously acquire multiple frames of confocal microscopic image data and piezoresistive feedback data;

[0010] Step 2: Preprocess the multi-frame piezoresistive feedback data to obtain data for longitudinal distortion correction;

[0011] Step 3: Perform curve fitting on the data obtained in Step 2;

[0012] Step 4: Determine the target mapping interval based on the fitted curve;

[0013] Step 5: Establish a mapping relationship based on the target mapping interval;

[0014] Step 6: Correct the longitudinal distortion of the image according to the mapping relationship.

[0015] Furthermore, in step 1, a sampling rate of f is used. sThe high-speed data acquisition card uses the logical AND of the frame synchronization signal and the line synchronization signal output by the MEMS micromirror driver as the trigger condition for data acquisition.

[0016] Further, step 2 involves preprocessing the multi-frame piezoresistive feedback data to obtain data for longitudinal distortion correction. The specific process includes:

[0017] Step 2-1: Averaging the multi-frame piezoresistive feedback data to obtain the average frame data. The calculation formula is as follows:

[0018] ; In the formula, For average frame data, This represents the piezoresistive feedback data for the m-th frame, where M represents the total number of frames. This represents the average value across multiple frames for the nth data point in the hth row.

[0019] Step 2-2: Average all sampling points in each row to obtain the final data used for longitudinal distortion correction. The calculation formula is:

[0020]

[0021] In the formula, The h-th row contains data used for longitudinal distortion correction, where N represents the total number of sampled data points. This is the average value of all sampled data points in row h.

[0022] Furthermore, step 3, which involves curve fitting of the data obtained in step 2, specifically includes:

[0023] Step 3-1, for each row of data used for longitudinal distortion correction With row number h as the x-axis, the corresponding numerical value Use the vertical axis to plot a scatter plot;

[0024] Step 3-2: Fit a cubic function curve to all data. The fitted curve is denoted as [Formula omitted]. ;

[0025] Step 3-3: Apply linear fitting to the data points representing p% of the total data to the left and right of the center point. The fitted curve is denoted as... .

[0026] Furthermore, step 4, determining the target mapping interval based on the fitted curve, specifically includes:

[0027] Average value of all rows The maximum value in and minimum value As upper and lower bounds, determine the minimum number of rows corresponding to the linear function. With the maximum number of rows The specific formula is as follows:

[0028]

[0029] Then, the target interval for mapping is determined to be r ∈ [r min , r max ].

[0030] Furthermore, step 5, which involves establishing a mapping relationship based on the target mapping interval, specifically includes:

[0031] Step 5-1, based on the determined mapping target interval r ∈ [r min , r max Substitute each row of r into the fitted curve. To obtain the ideal value :

[0032]

[0033] Step 5-2, set the ideal value for the r-th row. As the fitted curve The output is used to calculate the original row number corresponding to the ideal value. :

[0034] .

[0035] Furthermore, step 6, which involves correcting the longitudinal distortion of the image based on the mapping relationship, specifically includes:

[0036] Given an original image with resolution p1×q1, the pixel value in row h and column i is... The pixel value in the r-th row and i-th column of the image without vertical distortion is ;

[0037] Based on the mapping relationship, the first image in the original image is selected using a Gaussian weighted average. The data in rows q above and below the point in column i are mapped to row r and column i of the image without vertical distortion, thus achieving vertical distortion correction. The specific formula is as follows:

[0038]

[0039] in,

[0040]

[0041] In the formula, Weights for the data points used in the interpolation; The original row number corresponding to the ideal value of row r+j.

[0042] On the other hand, a confocal microscopy image longitudinal distortion correction system based on an electromagnetically driven MEMS micromirror is provided, the system comprising:

[0043] The first module is used to simultaneously acquire multi-frame confocal microscopic image data and piezoresistive feedback data;

[0044] The second module is used to preprocess multi-frame piezoresistive feedback data to obtain data for longitudinal distortion correction.

[0045] The third module is used to perform curve fitting on the data obtained from the second module;

[0046] The fourth module is used to determine the target mapping interval based on the fitted curve;

[0047] The fifth module is used to establish mapping relationships based on the target mapping interval;

[0048] The sixth module is used to correct longitudinal distortion of the image based on the mapping relationship.

[0049] On the other hand, a computer device is provided, including a memory, a processor, and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, it implements the method for correcting longitudinal distortion of confocal microscopic images based on electromagnetically driven MEMS micromirrors.

[0050] Compared with the prior art, the significant advantages of this invention are:

[0051] (1) This method can compensate for longitudinal stretching distortion caused by non-ideal slow-axis scanning drive, significantly improve the geometric accuracy of the image and improve the imaging quality.

[0052] (2) This method is a software-level correction method that can be directly integrated into the image acquisition and processing flow, avoiding changes to the hardware design of existing imaging systems and facilitating its widespread application.

[0053] (3) This invention is the first to propose a mapping compensation correction method for longitudinal image distortion caused by non-ideal driving signals (such as sawtooth wave distortion) during the slow axis scanning process of electromagnetically driven MEMS micromirrors.

[0054] (4) This method has low computational complexity, is suitable for embedded platforms or edge processing systems, and can realize real-time correction during image acquisition, adapting to high-speed scanning requirements.

[0055] The present invention will now be described in further detail with reference to the accompanying drawings. Attached Figure Description

[0056] Figure 1 This is a flowchart of a method for correcting longitudinal distortion of confocal microscopic images based on electromagnetically driven MEMS micromirrors in one embodiment.

[0057] Figure 2 This is a graph showing the correspondence between the piezoresistive feedback signal and the row information acquired in one embodiment, which plots the linear fitting and cubic function fitting curves of the piezoresistive feedback signal.

[0058] Figure 3 This is a structural diagram of a confocal microscope system based on an electromagnetically driven MEMS micromirror in one embodiment.

[0059] Figure 4 This is a schematic diagram of the longitudinal distortion correction result of the MEMS confocal microscopy image using the method of the present invention in one embodiment, wherein... Figure 4 (a) in the image is the longitudinal distortion image when the system images the end face of the fiber bundle; Figure 4 (b) in the image shows the fiber core structure at the center of the MEMS micromirror scanning location; Figure 4 (c) in the image represents the fiber core structure located below the MEMS micromirror scanning area. Figure 4 (d) in the image is the image after longitudinal distortion correction; Figure 4 (e) in the figure represents the fiber core structure at the center of the MEMS micromirror scanning. Figure 4 (f) in the image represents the fiber core structure located below the MEMS micromirror scan. Detailed Implementation

[0060] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0061] It should be noted that if the embodiments of the present invention involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.

[0062] Furthermore, if the embodiments of this invention involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. If the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0063] In one embodiment, combined Figure 1 This paper provides a method for correcting longitudinal distortion of confocal microscopy images based on electromagnetically driven MEMS micromirrors. The method effectively corrects the longitudinal distortion introduced by MEMS micromirrors by establishing a mapping relationship between the slow-axis piezoresistive feedback signal of the MEMS micromirror and each row of the image.

[0064] Furthermore, in one embodiment, the method includes the following steps:

[0065] S1, synchronously acquires multiple frames of confocal microscopic image data and piezoresistive feedback data;

[0066] S2, preprocess the multi-frame piezoresistive feedback data to obtain data for longitudinal distortion correction;

[0067] S3, Perform curve fitting on the data obtained in step 2;

[0068] S4, determine the target mapping interval based on the fitted curve;

[0069] S5, Establish the mapping relationship based on the target mapping interval;

[0070] S6, Image longitudinal distortion correction is achieved according to the mapping relationship.

[0071] Furthermore, in one embodiment, in S1, a sampling rate of f is used. s The high-speed data acquisition card utilizes the logical AND of the frame synchronization signal and line synchronization signal output by the MEMS micromirror driver as the trigger condition for data acquisition. Each trigger event acquires a total of N data points. Assume each frame contains H line synchronization signals (corresponding to an image vertical resolution of H pixels). To achieve vertical distortion correction of the image, the system needs to continuously save M frames of acquired data.

[0072] Among them, the data at point n in row h of the original slow-axis piezoresistive feedback signal is denoted as The data of the m-th frame is denoted as Each frame of data is arranged in rows, forming an H×M row and column structure, which can be represented as follows:

[0073]

[0074] Furthermore, in one embodiment, the preprocessing of multi-frame piezoresistive feedback data described in S2 to obtain data for longitudinal distortion correction specifically includes:

[0075] S2-1, Average the multi-frame piezoresistive feedback data to obtain the average frame data. The calculation formula is as follows:

[0076]

[0077] In the formula, For average frame data, This represents the piezoresistive feedback data for the m-th frame, where M represents the total number of frames. This represents the average value across multiple frames for the nth data point in the hth row.

[0078] S2-2, average all sampling points in each row to obtain the final data used for longitudinal distortion correction. The calculation formula is:

[0079]

[0080] In the formula, The h-th row contains data used for longitudinal distortion correction, where N represents the total number of sampled data points. This is the average value of all sampled data points in row h.

[0081] Furthermore, in one embodiment, S3, which involves curve fitting of the data obtained in step 2, specifically includes:

[0082] S3-1, for each row of data used for longitudinal distortion correction With row number h as the x-axis, the corresponding numerical value Use the vertical axis to plot a scatter plot;

[0083] S3-2, Apply a cubic function curve fit to all data, and the fitted curve is denoted as... ;

[0084] S3-3, Apply linear fitting to the data points representing p% of the total data volume to the left and right of the center point. The fitted curve is denoted as... .

[0085] Preferably, p% is 5%.

[0086] Furthermore, in one embodiment, S4, determining the target mapping interval based on the fitted curve, specifically includes:

[0087] Average value of all rows The maximum value in and minimum value As upper and lower bounds, determine the minimum number of rows corresponding to the linear function. With the maximum number of rows The specific formula is as follows:

[0088]

[0089] Then, the target interval for mapping is determined to be r ∈ [r min , r max ].

[0090] Here, the decimal result is rounded up.

[0091] Furthermore, in one embodiment, the step S5 of establishing a mapping relationship based on the target mapping interval specifically includes:

[0092] S5-1, based on the determined mapping target interval r ∈ [r min , r max Substitute each row of r into the fitted curve. To obtain the ideal value :

[0093]

[0094] S5-2, the ideal value of the r-th row As the fitted curve The output is used to calculate the original row number corresponding to the ideal value. :

[0095] .

[0096] Furthermore, in one embodiment, step S6, which involves correcting the longitudinal distortion of the image based on the mapping relationship, specifically includes:

[0097] Given an original image with resolution p1×q1, the pixel value in row h and column i is... The pixel value in the r-th row and i-th column of the image without vertical distortion is ;

[0098] Based on the mapping relationship, the first image in the original image is selected using a Gaussian weighted average. The data in rows q above and below the point in column i are mapped to row r and column i of the image without vertical distortion, thus achieving vertical distortion correction. The specific formula is as follows:

[0099]

[0100] in,

[0101]

[0102] In the formula, Weights for the data points used in the interpolation; The original row number corresponding to the ideal value of row r+j.

[0103] Preferably, q is 3.

[0104] In one embodiment, a confocal microscopy system based on an electromagnetically driven MEMS micromirror is provided, which can apply the longitudinal distortion correction method for confocal microscopy images based on an electromagnetically driven MEMS micromirror. The confocal microscopy system should be based on the principle of reflection confocal imaging or fluorescence imaging. The confocal microscopy system includes:

[0105] A confocal microscope for confocal detection and imaging of samples;

[0106] A MEMS micromirror driving device is used to drive a MEMS micromirror and provides a piezoresistive feedback signal for triggering a MEMS slow axis drive signal.

[0107] A high-speed signal acquisition card for acquiring photoelectric signals;

[0108] A signal processor is used to process the data acquired by the acquisition card and to correct distortion using the confocal microscopy image longitudinal distortion correction method, and output an image.

[0109] Preferably, the confocal microscope employs, but is not limited to, one of the following: laser, photomultiplier tube / avalanche photodiode, or electromagnetically driven MEMS micromirror.

[0110] Preferably, the signal processor includes:

[0111] Continuously receive data output from the high-speed acquisition card;

[0112] Perform distortion correction on distorted images.

[0113] On the other hand, a confocal microscopy image longitudinal distortion correction system based on an electromagnetically driven MEMS micromirror is provided, the system comprising:

[0114] The first module is used to simultaneously acquire multi-frame confocal microscopic image data and piezoresistive feedback data;

[0115] The second module is used to preprocess multi-frame piezoresistive feedback data to obtain data for longitudinal distortion correction.

[0116] The third module is used to perform curve fitting on the data obtained from the second module;

[0117] The fourth module is used to determine the target mapping interval based on the fitted curve;

[0118] The fifth module is used to establish mapping relationships based on the target mapping interval;

[0119] The sixth module is used to correct longitudinal distortion of the image based on the mapping relationship.

[0120] Specific limitations regarding the longitudinal distortion correction system for confocal microscopy images based on electromagnetically driven MEMS micromirrors can be found in the limitations of the longitudinal distortion correction method for confocal microscopy images based on electromagnetically driven MEMS micromirrors mentioned above, and will not be repeated here. Each module in the aforementioned longitudinal distortion correction system for confocal microscopy images based on electromagnetically driven MEMS micromirrors can be implemented entirely or partially through software, hardware, or a combination thereof. These modules can be embedded in hardware or independent of the processor in a computer device, or stored in software in the memory of a computer device, so that the processor can call and execute the corresponding operations of each module.

[0121] In one embodiment, a computer device is provided, including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor, when executing the computer program, implements:

[0122] Step 1: Simultaneously acquire multiple frames of confocal microscopic image data and piezoresistive feedback data;

[0123] Step 2: Preprocess the multi-frame piezoresistive feedback data to obtain data for longitudinal distortion correction;

[0124] Step 3: Perform curve fitting on the data obtained in Step 2;

[0125] Step 4: Determine the target mapping interval based on the fitted curve;

[0126] Step 5: Establish a mapping relationship based on the target mapping interval;

[0127] Step 6: Correct the longitudinal distortion of the image according to the mapping relationship.

[0128] For specific limitations on each step, please refer to the limitations on the longitudinal distortion correction method of confocal microscopy images based on electromagnetically driven MEMS micromirrors mentioned above, which will not be repeated here.

[0129] In one embodiment, a computer-readable storage medium is provided having a computer program stored thereon, the computer program being implemented when executed by a processor:

[0130] Step 1: Simultaneously acquire multiple frames of confocal microscopic image data and piezoresistive feedback data;

[0131] Step 2: Preprocess the multi-frame piezoresistive feedback data to obtain data for longitudinal distortion correction;

[0132] Step 3: Perform curve fitting on the data obtained in Step 2;

[0133] Step 4: Determine the target mapping interval based on the fitted curve;

[0134] Step 5: Establish a mapping relationship based on the target mapping interval;

[0135] Step 6: Correct the longitudinal distortion of the image according to the mapping relationship.

[0136] For specific limitations on each step, please refer to the limitations on the longitudinal distortion correction method of confocal microscopy images based on electromagnetically driven MEMS micromirrors mentioned above, which will not be repeated here.

[0137] As a specific example, the invention will be further verified and illustrated in one embodiment.

[0138] The collected piezoresistive feedback signal data is as follows Figure 2 As shown, the original data and the linear fitting curve were plotted. ) and cubic function fitting curve ( (and mark the main data points).

[0139] Confocal microscopy systems based on electromagnetically driven MEMS micromirrors, such as Figure 3 As shown, the light emitted from laser 1 is reflected after passing through dichroic mirror 3 and then incident on MEMS micromirror 4. Through two-dimensional scanning by MEMS micromirror 4, the laser can scan the sample within the objective-sample module 5. The sample-reflected light passes through dichroic mirror 3 via the original path and is detected by photodetector 2. MEMS micromirror driving circuit 6 drives the MEMS micromirror and outputs the MEMS micromirror motion synchronization signal and driving voltage feedback signal. Data acquisition card 7 receives the photodetector signal during imaging and receives the slow-axis drive feedback signal when obtaining the longitudinal distortion correction lookup table. Signal processor 8 performs image reconstruction and image distortion correction functions.

[0140] The specific correction results using the method of this invention are as follows: Figure 4 As shown. Figure 4 (a) and Figure 4 (d) shows the images with and without longitudinal distortion correction, respectively. The lower half, which was severely stretched longitudinally, has returned to normal after correction. Figure 4 (b) and Figure 4Image (e) is a magnified view of the fiber core at the center of the image, showing that it has a uniform circular structure. Figure 4 (c) and Figure 4 Image (f) shows magnified views of the fiber core at the location of significant image distortion before and after correction. It can be seen that before correction, the fiber core was noticeably elongated longitudinally; after correction, it regained its regular circular shape. This demonstrates the effectiveness of the distortion correction method of this invention.

[0141] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention without departing from its spirit and scope should be included within the protection scope of the present invention.

Claims

1. A method for correcting longitudinal distortion of confocal microscopic images based on electromagnetically driven MEMS micromirrors, characterized in that, The method effectively corrects the longitudinal distortion introduced by MEMS micromirrors by establishing a mapping relationship between the slow-axis piezoresistive feedback signal of the MEMS micromirror and each row of the image.

2. The method for correcting longitudinal distortion of confocal microscopic images based on electromagnetically driven MEMS micromirrors according to claim 1, characterized in that, The method includes the following steps: Step 1: Simultaneously acquire multiple frames of confocal microscopic image data and piezoresistive feedback data; Step 2: Preprocess the multi-frame piezoresistive feedback data to obtain data for longitudinal distortion correction; Step 3: Perform curve fitting on the data obtained in Step 2; Step 4: Determine the target mapping interval based on the fitted curve; Step 5: Establish a mapping relationship based on the target mapping interval; Step 6: Correct the longitudinal distortion of the image according to the mapping relationship.

3. The method for correcting longitudinal distortion of confocal microscopic images based on electromagnetically driven MEMS micromirrors according to claim 2, characterized in that, In step 1, a sampling rate of f is used. s The high-speed data acquisition card uses the logical AND of the frame synchronization signal and the line synchronization signal output by the MEMS micromirror driver as the trigger condition for data acquisition.

4. The method for correcting longitudinal distortion of confocal microscopic images based on electromagnetically driven MEMS micromirrors according to claim 3, characterized in that, Step 2 involves preprocessing the multi-frame piezoresistive feedback data to obtain data for longitudinal distortion correction. The specific process includes: Step 2-1: Averaging the multi-frame piezoresistive feedback data to obtain the average frame data. The calculation formula is as follows: ； In the formula, For average frame data, This represents the piezoresistive feedback data for the m-th frame, where M represents the total number of frames. This represents the average value across multiple frames for the nth data point in the hth row. Step 2-2: Average all sampling points in each row to obtain the final data used for longitudinal distortion correction. The calculation formula is: ； In the formula, The h-th row contains data used for longitudinal distortion correction, where N represents the total number of sampled data points. This is the average value of all sampled data points in row h.

5. The method for correcting longitudinal distortion of confocal microscopic images based on electromagnetically driven MEMS micromirrors according to claim 4, characterized in that, Step 3, which involves curve fitting of the data obtained in step 2, specifically includes: Step 3-1, for each row of data used for longitudinal distortion correction With row number h as the x-axis, the corresponding numerical value Use the vertical axis to plot a scatter plot; Step 3-2: Fit a cubic function curve to all data. The fitted curve is denoted as [Formula omitted]. ; Step 3-3: Apply linear fitting to the data points representing p% of the total data to the left and right of the center point. The fitted curve is denoted as... .

6. The method for correcting longitudinal distortion of confocal microscopic images based on electromagnetically driven MEMS micromirrors according to claim 5, characterized in that, Step 4, which involves determining the target mapping interval based on the fitted curve, specifically includes: Average value of all rows The maximum value in and minimum value As upper and lower bounds, determine the minimum number of rows corresponding to the linear function. With the maximum number of rows The specific formula is as follows: ； Then, the target interval for mapping is determined to be r ∈ [r min , r max ].

7. The method for correcting longitudinal distortion of confocal microscopic images based on electromagnetically driven MEMS micromirrors according to claim 6, characterized in that, Step 5, which involves establishing a mapping relationship based on the target mapping interval, specifically includes: Step 5-1, based on the determined mapping target interval r ∈ [r min , r max Substitute each row of r into the fitted curve. To obtain the ideal value : ； Step 5-2, set the ideal value for the r-th row. As the fitted curve The output is used to calculate the original row number corresponding to the ideal value. : 。 8. The method for correcting longitudinal distortion of confocal microscopic images based on electromagnetically driven MEMS micromirrors according to claim 7, characterized in that, Step 6, which describes the vertical distortion correction of the image based on the mapping relationship, specifically includes: Given an original image with resolution p1×q1, the pixel value in row h and column i is... The pixel value in the r-th row and i-th column of the image without vertical distortion is ; Based on the mapping relationship, the first image in the original image is selected using a Gaussian weighted average. The data in rows q above and below the point in column i are mapped to row r and column i of the image without vertical distortion, thus achieving vertical distortion correction. The specific formula is as follows: ； in, ； In the formula, Weights for the data points used in the interpolation; The original row number corresponding to the ideal value of row r+j.

9. A confocal microscopy image longitudinal distortion correction system based on the method of any one of claims 1 to 8, characterized in that, The system includes: The first module is used to simultaneously acquire multi-frame confocal microscopic image data and piezoresistive feedback data; The second module is used to preprocess multi-frame piezoresistive feedback data to obtain data for longitudinal distortion correction. The third module is used to perform curve fitting on the data obtained from the second module; The fourth module is used to determine the target mapping interval based on the fitted curve; The fifth module is used to establish mapping relationships based on the target mapping interval; The sixth module is used to correct longitudinal distortion of the image based on the mapping relationship.

10. A computer device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that, When the processor executes the computer program, it implements the method according to any one of claims 1 to 8.

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