A high-power electron beam physical vapor deposition control system and method for engine blades

Abstract

The present application relates to the technical field of electron beam physical vapor deposition, and particularly relates to a high-power electron beam physical vapor deposition control system and method for engine blades, which comprises: an equipment layer, including a servo system, including at least two servo devices, used to alternately control the material in and out of a physical vapor deposition chamber; an electron gun system, including at least two electron gun modules and corresponding configured hot emission electron guns and field emission electron guns; and a detection system; a control layer, respectively controlling the equipment system of the equipment layer; an operation layer, used to send control instructions to the control module of the control layer; and a monitoring layer, used to obtain the detection signal of the detection system and perform display and recording. Through the control of the physical vapor deposition system, the engine blades are alternately processed in the physical vapor deposition chamber, the utilization rate and processing efficiency of the physical vapor deposition chamber are improved, the physical vapor deposition equipment operation is more automated and intelligent, and remote observation and data acquisition are also facilitated.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of electron beam physical vapor deposition (EB-PVD) technology, and is applied to the preparation of turbine blade thermal barrier coatings for aircraft engines. Specifically, it relates to a high-power electron beam physical vapor deposition control system and method for engine blades. BACKGROUND

[0002] Electron beam physical vapor deposition (EB-PVD) equipment, as an advanced surface treatment technology, has wide application prospects in high-end manufacturing fields such as aerospace, energy, and electronics. Its automatic control system plays a crucial role in ensuring the stability of EB-PVD process and the quality of the coating.

[0003] Currently, the international leading EB-PVD equipment automatic control system has the characteristics of high integration and intelligence. Products from companies such as PVATePla in the United States and CemeCon in Germany are representative. These systems use high-performance industrial computers and customized control software to achieve high-level coordinated control of electronic guns, vacuum systems, heating devices, and other components. Through high-precision sensors, real-time monitoring of electron beam and vacuum environment parameters is achieved, and based on intelligent algorithms, the working state of the electron gun is quickly adjusted to ensure stable emission and precise scanning of the electron beam, effectively reducing the "shadow effect" of complex-shaped workpieces. At the same time, it has perfect remote monitoring and fault diagnosis functions, which facilitates remote operation and maintenance by operators, and improves the availability of the equipment

[0004] In China, significant progress has been made in the field of EB-PVD equipment automatic control systems. Through technology introduction and independent innovation, some domestic enterprises and research institutions have gradually developed control systems with functions and performance close to international advanced levels, meeting the needs of general industrial applications, and continuously improving in intelligence and automation, such as introducing machine learning algorithms for intelligent prediction and control, and strengthening integration with robot technology to improve production automation. However, compared with foreign advanced levels, there is still a certain gap in stability and precision, and the market share in high-end application fields is small, and the depth and perfection of intelligent functions still need to be further improved.

[0005] In summary, the EB-PVD equipment automatic control system technology is continuously developing, but still faces some challenges and deficiencies. In order to meet the growing demand for high-end manufacturing, further research and innovation are urgently needed. Therefore, more reasonable technical solutions are needed to solve the technical problems existing in the prior art. SUMMARY

[0006] In view of the problems existing in the prior art, the application discloses a high-power electron beam physical vapor deposition control system and method for engine blades, adopts communication control of a system layer, realizes automatic control operation of a physical vapor deposition device, can improve the precision of physical vapor deposition, facilitates remote real-time monitoring and operation, understands the current state of each position in the physical vapor deposition system, facilitates timely regulation and control, and thus improves the safety and reliability of physical vapor deposition operation.

[0007] In order to achieve the above-mentioned purpose, the control system disclosed by the application can adopt the following scheme:

[0008] A high-power electron beam physical vapor deposition control system for engine blades comprises:

[0009] A device layer comprises a plurality of device systems: a servo system for controlling the entry and exit and posture adjustment of materials at a physical vapor deposition chamber, the servo system comprising at least two servo devices for alternately controlling the entry and exit of materials at the physical vapor deposition chamber; an electron gun system for controlling electron beam emission, the electron gun system comprising at least two electron gun modules and corresponding hot emission electron guns and field emission electron guns; and a detection system for monitoring the environment of materials;

[0010] A control layer comprises a plurality of control modules for controlling the device systems of the device layer;

[0011] An operation layer comprises a plurality of interactive modules for sending control instructions to the control modules of the control layer;

[0012] A monitoring layer comprises a plurality of monitoring modules for acquiring detection signals of the detection system and performing display and recording.

[0013] The physical vapor deposition control system disclosed above completes specific operations of physical vapor deposition by a specific device layer, including controlling the entry and exit of materials at a physical vapor deposition chamber, such as engine blades to be physically vapor deposited and target materials for forming vapor film deposition; and the hot emission electron guns and field emission electron guns provided in the device layer at the same time meet the physical vapor deposition processing under different process requirements, can effectively exert the attribute characteristics of the hot emission electron guns and field emission electron guns, and reduce the use loss of the electron guns, effectively increasing the service life of the electron guns. The control layer controls the operation of the device systems of the device layer through the control modules, realizes actions in the physical vapor deposition process. The operation layer sends control instructions to the control layer, can realize human-computer interaction to realize flexible and efficient control; the monitoring layer collects and processes the monitoring data at each position through the monitoring modules, performs visual display, and simultaneously performs storage.

[0014] Further, the above control system is mainly used to realize the automatic control of the gas deposition operation process, and realizes the specific operation process of the device on site. In actual use, at least the remote data viewing and obtaining requirements also need to be met, so adjustment is needed. Here, optimization is carried out and one of the feasible options is proposed: a management layer is also included, and the management layer includes a server and a plurality of terminal devices. The terminal device is used to obtain real-time data from the server and generate a data report. When the above scheme is adopted, the management layer can use a data server to obtain and store data from a remote end, view through a terminal computer, output a report through a printer, and connect more network devices through a switch to realize the supply of multiple terminals. Alternatively, a mobile terminal is connected to the data manager through a wireless network to view and obtain corresponding data.

[0015] Further, the servo device is used to cooperate with the gas deposition chamber to transport and take out materials. A variety of schemes can be used to realize it, and its structure is not uniquely limited. Here, optimization is carried out and one of the feasible options is proposed: the servo device includes a loading device, and the loading device includes two loading chambers that are in communication with the gas deposition chamber. The control module controls the two loading chambers to alternately transport and take out the engine blades to be processed into the gas deposition chamber. The loading chamber is provided with an operation door for loading and unloading the engine blades. When the above scheme is adopted, the two loading chambers are independent of each other and perform loading, pretreatment and unloading operations of the engine blades respectively. The two loading chambers can alternately transport and take out the engine blades into the gas deposition chamber, greatly improving the effective utilization rate of the gas deposition chamber, avoiding the idle time of the gas deposition chamber, and thus making the gas deposition operation more efficient and flexible.

[0016] Further, the servo device is composed of multiple devices and structures, the structure of which is not uniquely limited, and here an optimized and feasible option is proposed: the servo device comprises a feeding device, the feeding device comprises two feeding modules, the feeding modules are arranged one-to-one with the loading chambers and used to drive the engine blades to move back and forth between the loading chambers and the vapor deposition chambers; the feeding device comprises a feeding support rod, the feeding support rod extends into the loading chambers and connects the engine blades through a rotating frame, the feeding support rod performs a translational motion under the driving of a feeding driver, performs coaxial rotation with the rotating frame under the driving of a revolution driver, and drives the engine blades to rotate by a rotary clamp on the rotating frame under the driving of a rotation driver; the control module controls the start and stop of the two feeding modules. When the above scheme is adopted, the feeding device realizes horizontal reciprocating motion, realizes feeding and retreating in a straight line, and makes the engine blades advance into the vapor deposition chamber and retreat into the loading chamber; and at the same time, the feeding support rod can also rotate to realize the revolution of the engine blades. The feeding support rod is provided with an inner driving rod and a transmission rod, the rotation driver connects the inner driving rod and the transmission rod to rotate, and realizes the rotation of the engine blades by connecting the rotary clamp through bevel gears. By controlling the revolution and rotation of the engine blades, the film uniformity in the vapor deposition process can be improved, and the film forming effect can be improved.

[0017] Further, in the control process, some components perform reciprocating motion and need to be stably and accurately controlled, which can be realized by multiple schemes, the structure of which is not uniquely limited, and here an optimized and feasible option is proposed: it also comprises a gas path system used to provide pneumatic control, the gas path system comprises a gas source module, the gas source module delivers driving gas through a gas path and a distribution valve to control the extension and retraction of driving cylinders, the driving cylinders at least comprise a heating driving cylinder arranged in the loading chamber to drive the heating device, an isolation driving cylinder arranged between the loading chamber and the vapor deposition chamber to drive the isolation baffle, and a cooling driving cylinder arranged at the vapor deposition chamber to drive the water-cooled plugboard. When the above scheme is adopted, the gas source can adopt a compressed gas cylinder or an air compressor, the gas path comprises a gas delivery pipe, and the distribution valve can be selected according to actual needs, and synchronous gas supply or switching gas supply can be realized.

[0018] Further, before the engine blade enters the vapor deposition chamber, and before the target material enters the vapor deposition chamber, a pretreatment is needed to achieve the preliminary conditions for vapor deposition, such as heating treatment, so that the temperature of the engine blade and the target material reaches a set temperature value, facilitating rapid vapor deposition treatment after entering the vapor deposition chamber; this process can be achieved through various heating schemes and equipment, and the structure is not uniquely limited, and one of the feasible options is optimized and proposed here: a heating system for pretreating the material is also included, the heating system includes an in-situ radiation heating device arranged in the loading chamber, the in-situ radiation heating device is controlled by a heating drive cylinder to form a closed heating cavity and heat the engine blade, or the in-situ radiation heating device is controlled by the heating drive cylinder to open the heating cavity; the heating cavity is provided with a heat preservation structure and a heating element, and when the engine blade is in the heating cavity, the engine blade is heated by the heating element; the control module is used to control the start and stop of the in-situ radiation heating device. When the above scheme is adopted, the in-situ radiation heating device can be used to pretreat the engine blade in the loading chamber to increase the temperature of the engine blade. In addition, when the target material enters the vapor deposition chamber, the target material can be heated by the heating assembly at the target material deposition system, such as using a heating wire or a heating pipe, so that the target material is in a heated temperature environment, achieving heating of the target material, and the heating wire or the heating pipe can be controlled by the control module.

[0019] Further, the engine blade needs to meet certain vacuum conditions during the vapor deposition process, and the control system controls the vacuum degree to meet the conditions of vapor deposition, and one of the feasible options is optimized and proposed here: a vacuum system for controlling the vacuum degree of the environment where the material is located is also included, the vacuum system is in communication with the vapor deposition chamber and the loading chamber respectively, and is controlled by the control module to start and stop. When the above scheme is adopted, the vacuum system includes a vacuum pump, a vacuum pipeline and other structures, and is in communication with the vapor deposition chamber, the loading chamber and other structures that need vacuum treatment respectively.

[0020] Further, during actual operation, the current environmental parameters of each component are also monitored to determine the state of the equipment operation, and the corresponding data monitoring can be achieved through a detection system, and the structure is not uniquely limited, and one of the feasible options is optimized and proposed here: the detection system at least includes a vacuum degree detection assembly arranged in the vapor deposition chamber and the loading chamber, a temperature detection assembly arranged in the vapor deposition chamber and the loading chamber, and an image detection assembly arranged in the vapor deposition chamber, and the vacuum degree detection assembly, the temperature detection assembly and the image detection assembly are in communication with the monitoring module and transmit detection data. When the above scheme is adopted, the image monitoring assembly includes a camera, the temperature monitoring assembly includes a temperature sensor, and the vacuum degree detection assembly includes a barometer and the like.

[0021] Further, in the process of the electron gun emitting the electron beam, a large amount of heat is generated, in order to guarantee the stability of the electron gun and the corresponding structure, the temperature of the corresponding position needs to be controlled, and one of the feasible options is optimized and proposed: the cooling system includes water cooling components arranged at the electron gun system, the servo system and the vapor deposition chamber respectively, the cooling system is controlled to operate by the control module and control the temperature of the corresponding area in the set range.

[0022] The above disclosure discloses the composition of the control system, and the application also discloses the corresponding control method.

[0023] A kind of high-power electron beam physical vapor deposition control method for engine blade, using the high-power electron beam physical vapor deposition control system for engine blade described in the foregoing, including following vapor deposition process:

[0024] S01: the engine blade to be vapor deposited is placed in one side loading chamber, waits and carries out preheating treatment;

[0025] S02: the engine blade after preheating treatment enters the vapor deposition chamber, while the communication between the vapor deposition chamber and the outside is disconnected, the vacuum degree in the vapor deposition chamber is adjusted to the set value;

[0026] S03: open the electron gun system to bombard target material, start vapor deposition, make the evaporated target material form film on the surface of engine blade;Meanwhile, the temperature of the vapor deposition chamber and the electron gun system is monitored, and the cooling system is used to maintain the temperature of the corresponding area in the set range;

[0027] S04: make the original loading chamber in vacuum environment or inert gas environment, transfer the engine blade after vapor deposition to the loading chamber for cooling treatment;Meanwhile, the engine blade after preheating treatment in the other side loading chamber is sent into the vapor deposition chamber;

[0028] S05: repeat the above S02-S04.

[0029] According to the above control method, the continuous automatic operation of the control system can be realized, the engine blade is vapor deposited one by one, the utilization rate of the vapor deposition chamber is improved, and the overall control process efficiency is improved.

[0030] Compared with the prior art, some beneficial effects of the technical scheme of the application include:

[0031] This invention controls the vapor deposition system for engine blades, enabling engine blades to alternately enter the vapor deposition chamber for processing. This improves the utilization rate of the vapor deposition chamber and the overall processing efficiency, while also increasing flexibility. Through system-level control and monitoring, the vapor deposition equipment becomes more automated, and processing data can be observed and acquired remotely, thus enhancing its intelligence. Attached Figure Description

[0032] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0033] Figure 1 This is a schematic diagram of the control system.

[0034] Figure 2 This is a flowchart illustrating the control method.

[0035] Figure 3 This is a top view schematic diagram of a vapor deposition equipment.

[0036] Figure 4 for Figure 3 A magnified schematic diagram of the local structure at point A.

[0037] Figure 5 for Figure 3 A magnified view of the local structure at point B.

[0038] Figure 6 This is a schematic diagram of the structure of the vapor deposition chamber, which is equipped with an electron gun and a vacuum system.

[0039] Figure 7 This is a front view schematic diagram of a vapor deposition equipment.

[0040] Figure 8 for Figure 7 A magnified schematic diagram of the local structure at point C.

[0041] Figure 9 for Figure 7 A magnified schematic diagram of the local structure at point D.

[0042] Figure 10 for Figure 9 A partial structural diagram of the transfer frame.

[0043] Figure 11 for Figure 7 A magnified schematic diagram of the local structure at point E in the middle.

[0044] Figure 12 Figure 1 is a schematic diagram of the overall structure of a target deposition system.

[0045] Figure 13 Figure 2 is a schematic diagram of the structure of a vapor deposition chamber when viewed from the side.

[0046] Figure 14 Figure 3 is a schematic diagram of the structure of the interior of a vapor deposition chamber.

[0047] Figure 15 Figure 4 is a schematic diagram of the structure of a target deposition system.

[0048] Figure 16 Figure 5 is a schematic diagram of a deflection closure structure.

[0049] Figure 17 Figure 6 is a schematic diagram of the structure of a heating unit of an in-situ radiation heating device.

[0050] In the above figures, the meanings of the respective reference numerals are as follows:

[0051] 1. Vapor deposition chamber; 101. Observation window; 102. Access door; 103. Mounting surface; 104. Target deposition port; 105. Vacuum connection hole; 106. Loading docking hole; 107. Deflection blade; 108. Deflection driver; 2. Electron gun; 201. Mating structure; 3. Vacuum system; 4. Loading chamber; 401. Heating driver; 402. Loading port; 403. Gas interface; 404. Gate valve; 405. Heating housing; 406. Heat insulation layer; 407. Heating element; 5. Feeding device; 501. Displacement track; 502. Displacement base; 503. Rotation driver; 504. Revolution driver; 505. Support shaft; 506. Air-tight tube; 507. Air-tight connection seat; 508. Inner drive shaft; 509. Turntable; 510. Transmission shaft; 511. Rotary clamp; 6. Emission power supply; 7. Cooling system; 8. Transformer; 9. Control system; 10. Operating platform support; 11. Isolation cabin door; 12. Main machine support; 13. Control cabinet area; 14. Operating area; 15. Target deposition system; 1501. Target sleeve assembly; 1502. Feeding device; 1503. Rotating device. DETAILED DESCRIPTION

[0052] The present embodiment will be further explained below in conjunction with the accompanying drawings and specific examples.

[0053] In view of the fact that the vapor deposition equipment in the prior art is not compatible and applicable when dealing with different working conditions and process requirements, and the fact that the automatic control degree is not high and the deposition effect is not good during the process, the following embodiments are optimized and overcome the defects in the prior art.

[0054] Embodiment 1

[0055] As Figure 1The embodiment shown discloses a high-power electron beam physical vapor deposition control system for engine blades, comprising:

[0056] A device layer comprising a plurality of device systems: a servo system for controlling the entry and exit of materials and adjusting the posture of the materials at the physical vapor deposition chamber, the servo system comprising at least two servo devices for alternately controlling the entry and exit of materials at the physical vapor deposition chamber; an electron gun system for controlling the emission of an electron beam, the electron gun system comprising at least two electron gun modules and corresponding hot emission electron guns and field emission electron guns; a detection system for monitoring the environment of the materials;

[0057] A control layer comprising a plurality of control modules for controlling the device systems of the device layer;

[0058] An operation layer comprising a plurality of interactive modules for sending control instructions to the control modules of the control layer;

[0059] A monitoring layer comprising a plurality of monitoring modules for obtaining detection signals of the detection system and displaying and recording the detection signals.

[0060] The physical vapor deposition control system disclosed by the embodiment completes the specific operation of physical vapor deposition by the specific device layer, including controlling the entry and exit of materials at the physical vapor deposition chamber, such as engine blades to be physically vapor deposited and target materials for forming vapor film deposition; the hot emission electron gun and the field emission electron gun provided in the device layer at the same time meet the physical vapor deposition processing under different process requirements, can effectively play the attribute characteristics of the hot emission electron gun and the field emission electron gun, and reduce the use and loss of the electron gun, effectively increase the service life of the electron gun. The control layer controls the operation of the device systems of the device layer through the control modules, and realizes the action in the physical vapor deposition process. The operation layer sends control instructions to the control layer, which can realize human-computer interaction and flexible and efficient control; the monitoring layer collects and processes the monitoring data at each position through the monitoring modules, visually displays, and stores.

[0061] Preferably, the number of servo devices in the embodiment is set according to actual control requirements, for controlling the entry, exit, rotation of engine blades, and the lifting and rotation of target materials.

[0062] Preferably, in the embodiment, the electron gun system further comprises an electron gun power supply, specifically including a hot emission power supply and a field emission power supply, wherein the hot emission power supply is used for supplying energy to the hot emission electron gun; and the field emission power supply is used for supplying energy to the field emission electron gun.

[0063] The control system is mainly used to realize the automation control of the gas deposition operation process, realizes the specific operation processing of the equipment field, and at least needs to meet the remote data viewing and obtaining requirements in actual use, so adjustment is needed, the embodiment is optimized and one of the feasible choices is adopted: a management layer is further included, the management layer includes a server and a plurality of terminal devices, the terminal devices are used to obtain real-time data from the server and generate data reports. When the above scheme is adopted, the management layer can adopt a data server to obtain and store data from the remote end, view through a terminal computer, output reports through a printer, and connect more network devices through a switch to realize the supply of multiple terminals; or connect the mobile terminal to the data manager through the wireless network to view and obtain the corresponding data.

[0064] The servo device is used to cooperate with the delivery and removal of the gas deposition chamber, and can be realized by various schemes, and its structure is not uniquely limited, the embodiment is optimized and one of the feasible choices is adopted: the servo device includes a loading device, the loading device includes two loading chambers that are in communication with the gas deposition chamber, and the control module controls the two loading chambers to alternately deliver and remove the engine blades in the gas deposition chamber; the loading chamber is provided with an operation door for loading and unloading the engine blades. When the above scheme is adopted, the two loading chambers are independent of each other and perform loading, pretreatment and unloading operations of the engine blades respectively, the two loading chambers can alternately deliver and remove the engine blades into the gas deposition chamber, greatly improving the effective utilization rate of the gas deposition chamber, avoiding the idle time of the gas deposition chamber, so that the gas deposition operation is more efficient and flexible.

[0065] The servo device is composed of multiple devices and structures, and the structure is not uniquely limited. The embodiment is optimized and one of the feasible options is adopted: the servo device includes a feeding device, the feeding device includes two feeding modules, and the feeding modules are arranged one by one in the loading chamber and used to drive the engine blades to move back and forth between the loading chamber and the vapor deposition chamber; the feeding device includes a feeding support rod, the feeding support rod extends into the loading chamber and connects the engine blades through a rotating frame, the feeding support rod performs a horizontal movement action under the driving of a feeding driver, performs coaxial rotation with the rotating frame under the driving of a revolution driver, and drives the engine blades to rotate by a rotary clamp on the rotating frame under the driving of a rotation driver; the control module controls the start and stop of the two feeding modules. When the above scheme is adopted, the feeding device realizes horizontal reciprocating motion, realizes feeding and retreating in a straight line, and makes the engine blades advance into the vapor deposition chamber and retreat into the loading chamber. Meanwhile, the feeding support rod can also rotate to realize the revolution of the engine blades. The inner driving rod and the transmission rod are arranged in the feeding support rod, the rotation driver connects the inner driving rod and the transmission rod to rotate, and the rotary clamp is connected through bevel gears to realize the rotation of the engine blades. By controlling the revolution and rotation of the engine blades, the film uniformity in the vapor deposition process can be improved, and the film forming effect can be improved.

[0066] In the control process, some components perform reciprocating motion and need to be stably and accurately controlled. Various schemes can be adopted, and the structure is not uniquely limited. The embodiment is optimized and one of the feasible options is adopted: a gas path system is further included to provide pneumatic control. The gas path system includes a gas source module, which delivers driving gas through a gas path and a distribution valve to control the extension and retraction of a driving cylinder. The driving cylinder at least includes a heating driving cylinder arranged in the loading chamber to drive the heating device, an isolation driving cylinder arranged between the loading chamber and the vapor deposition chamber to drive the isolation baffle, and a cooling driving cylinder arranged at the vapor deposition chamber to drive the water-cooled plugboard. When the above scheme is adopted, the gas source can adopt a compressed gas cylinder or an air compressor. The gas path includes a gas delivery pipe, and the distribution valve can be selected according to actual needs. The gas can be delivered synchronously or switched.

[0067] In the embodiment, the gas path system is also used to control the opening and closing action of the scissors baffle to realize the communication or isolation between the vapor deposition chamber and the loading chamber; the gas path system is also used to control the action of the water-cooled plugboard to control the heat exchange in the vapor deposition chamber.

[0068] Before the engine blades enter the vapor deposition chamber, and before the target material enters the vapor deposition chamber, pretreatment is required to achieve the preliminary conditions for vapor deposition, such as heating treatment to raise the temperature of the engine blades and the target material to a set temperature value, facilitating rapid vapor deposition treatment after entering the vapor deposition chamber; this process can be achieved through various heating schemes and equipment, and the structure is not uniquely limited, and one of the feasible options is optimized and adopted in this embodiment: a heating system for pretreating the material is also included, which includes an in-situ radiation heating device arranged in the loading chamber, the in-situ radiation heating device forms a closed heating cavity by controlling the action of the heating drive cylinder and heats the engine blades, or opens the heating cavity by controlling the action of the in-situ radiation heating device through the heating drive cylinder; the heating cavity is provided with a heat preservation structure and a heating element, and when the engine blades are in the heating cavity, the engine blades are heated by the heating element; the control module is used to control the start and stop of the in-situ radiation heating device. When the above scheme is adopted, the in-situ radiation heating device can be used to pretreat the engine blades in the loading chamber to increase the temperature of the engine blades. In addition, when the target material enters the vapor deposition chamber, the target material can be heated by the heating assembly at the target material deposition system, such as using heating wires or heating pipes, so that the target material is in a heated temperature environment, achieving heating of the target material, and the heating wires or heating pipes can be controlled by the control module.

[0069] The engine blades need to meet certain vacuum conditions during vapor deposition treatment, and the control system controls the vacuum degree to meet the conditions of vapor deposition, and one of the feasible options is optimized and adopted in this embodiment: a vacuum system for controlling the vacuum degree of the environment where the material is located is also included, which is in communication with the vapor deposition chamber and the loading chamber respectively, and is controlled by the control module to start and stop. When the above scheme is adopted, the vacuum system includes structures such as vacuum pumps and vacuum pipelines, and is in communication with structures such as the vapor deposition chamber and the loading chamber that need vacuum treatment.

[0070] During actual operation, the current environmental parameters of each component are also monitored to determine the state of the equipment operation, and the corresponding data monitoring can be achieved through a detection system, and the structure is not uniquely limited, and one of the feasible options is optimized and adopted in this embodiment: the detection system at least includes vacuum degree detection components arranged in the vapor deposition chamber and the loading chamber, temperature detection components arranged in the vapor deposition chamber and the loading chamber, and image detection components arranged in the vapor deposition chamber, and the vacuum degree detection components, the temperature detection components and the image detection components are in communication with the monitoring module and transmit detection data. When the above scheme is adopted, the image monitoring component includes a camera, the temperature monitoring component includes a temperature sensor, and the vacuum degree detection component includes a barometer, etc.

[0071] In the process of the electron gun emitting the electron beam, a large amount of heat is generated, in order to guarantee the stability of the electron gun and the corresponding structure, the temperature of the corresponding position needs to be controlled, the embodiment is optimized and one of the feasible options is adopted: a cooling system is further included, the cooling system includes water cooling components respectively arranged at the electron gun system, the servo system and the vapor deposition chamber, the cooling system is controlled to operate by the control module and control the temperature of the corresponding area to be within the set range. When the above scheme is adopted, the water cooling components at the electron gun system, the servo system and the vapor deposition chamber work independently.

[0072] In the embodiment, the monitoring layer includes several displays respectively used for system control interface display, video monitoring picture display, electron gun state display and the like; and a recorder is further included to record the equipment operation log.

[0073] In the embodiment, the operation layer includes several human-computer interaction devices, such as touch screens and control buttons and the like.

[0074] In the embodiment, the control layer includes a PLC control system and an industrial computer.

[0075] Embodiment 2

[0076] The above embodiment 1 discloses the composition of the control system, and the application further discloses a corresponding control method.

[0077] As shown in Figure 2 A large-power electron beam physical vapor deposition control method for engine blades, which adopts the large-power electron beam physical vapor deposition control system for engine blades described above, includes the following vapor deposition process:

[0078] S01: The engine blade to be vapor deposited is placed in one side loading chamber to wait and perform preheating treatment;

[0079] S02: The engine blade after the preheating treatment enters the vapor deposition chamber, meanwhile, the communication between the vapor deposition chamber and the outside is disconnected, and the vacuum degree in the vapor deposition chamber is adjusted to a set value;

[0080] S03: The electron gun system is started to bombard the target material, the vapor deposition is started, the evaporated target material is formed into a film on the surface of the engine blade; meanwhile, the temperature of the vapor deposition chamber and the electron gun system is monitored, and the cooling system is used to maintain the temperature of the corresponding area within the set range;

[0081] S04: The original loading chamber is in a vacuum environment or an inert gas environment, the engine blade after the vapor deposition is transferred to the loading chamber for cooling treatment; meanwhile, the engine blade after the preheating treatment in the other side loading chamber is sent into the vapor deposition chamber;

[0082] S05: The above S02-S04 is repeated.

[0083] According to the control method, continuous automatic operation of the control system can be realized, the engine blades are processed one by one by vapor deposition, the utilization rate of the vapor deposition chamber is improved, and the overall control process efficiency is improved.

[0084] Embodiment 3

[0085] As shown in Figures 3-17 , the embodiment provides a high-power electron beam physical vapor deposition device for engine blades, which can improve the processing requirements in different vapor deposition processes and improve the convenience and flexibility of vapor deposition processing.

[0086] The electron beam physical vapor deposition device disclosed in the embodiment can simultaneously meet the process requirements of various processing by simultaneously arranging a thermal emission electron gun and a field emission electron gun in the vapor deposition chamber 1. That is, the thermal emission electron gun is used in the scene where the vacuum degree requirement is high and the coating purity requirement is good, and the field emission electron gun is used in the scene where the reaction gas needs to be introduced or the vacuum degree requirement is not high. The two electron guns 2 can be enabled in the corresponding scene to realize vapor deposition processing on the surface of the product. In more cases, when the installation of the two electron guns 2 needs to be adjusted, the required thermal emission electron gun or field emission electron gun can be installed at the electron gun connection position. Since the two electron guns 2 are provided with the same matching structure 201, each electron gun connection position can be installed, thereby realizing convenient interchange. When the vapor deposition device is used, the appropriate electron gun 2 is selected according to the actual process requirement, which not only can effectively guarantee the processing effect of the product, but also can guarantee the effective service life of the electron gun 2.

[0087] As one of the structures of the vapor deposition device provided in the embodiment,

[0088] As shown in Figure 6 , Figure 12 , Figure 13 , Figure 14 , the deposition chamber system includes a vapor deposition chamber 1 provided with a mounting surface 103, at least two electron gun connection positions are arranged on the mounting surface 103, and a plurality of deflection closed structures are arranged in the vapor deposition chamber 1. At least two deflection closed structures correspond to the electron gun connection positions one by one and are used to close or open the wall surface structure of the vapor deposition chamber 1 including the electron gun connection position.

[0089] Preferably, as shown in Figure 14 , in the embodiment, the deposition chamber is hollow in the middle for electron beam physical vapor deposition of parts. The lower part of the deposition chamber has a corresponding target material supply port for connecting a target material automatic evaporation deposition system. The left and right sides have vacuum connection ports and loading docking ports, and corresponding flanges are installed, which are respectively connected to a vacuum pumping system 3 and a loading chamber 4.

[0090] In this embodiment, the sedimentation chamber is provided with an observation window 101 and an inspection door 102.

[0091] As shown in Figure 4, the electron gun connection position is used to connect and fix the thermal emission electron gun or the field emission electron gun. It can be constructed in various forms, and its structure is not limited to one specific type. This embodiment optimizes and adopts one feasible option: the electron gun connection position includes a connection hole provided on the inclined mounting surface 103, and a connection flange is provided at the connection hole; the mating structure 201 of the thermal emission electron gun and the field emission electron gun both include flange joints adapted to the connection flange. When the above scheme is adopted, the mounting surface 103 is an inclined surface, and its inclination angle is set according to requirements. After the electron gun 2 is installed, the electron beam can be emitted towards the designated target material by the set angle. When the target material is heated and evaporated, the evaporated material is deposited on the engine blades in the meteorological deposition chamber to form a film.

[0092] like Figure 14 , Figure 16 As shown, the deflection sealing structure is used to open or close structures within the vapor deposition chamber 1, such as mounting holes and connecting holes. When the electron gun 2 is connected to the vapor deposition chamber 1, its connection position can be controlled by the deflection sealing structure to open or close, thereby opening or closing the channel for the electron beam emitted by the electron gun 2. Various deflection sealing structures can be used, and the structure is not limited to a single one. This embodiment optimizes and adopts one feasible option: the deflection sealing structure includes a deflection blade 107, which is driven and deflected by a deflection driver 108. When the deflection blade 107 moves to the closed position, it closes the wall structure including the connecting hole; when the deflection blade 107 moves to the open position, it opens the wall structure including the connecting hole. In this scheme, the deflection driver 108 can be a motor. The motor's output shaft is eccentrically connected to the deflection blade 107, driving the deflection blade 107 to reciprocate, thereby enabling the deflection blade 107 to switch back and forth between the closed and open positions.

[0093] like Figure 12 , Figure 13 As shown, in this embodiment, the vapor deposition chamber 1 is provided with multiple perforated structures, including mounting holes for mounting monitoring components, vacuum connection holes 105 for docking with the vacuum system 3, and loading docking holes 106 for docking with the dual loading system. At some perforated structures where opening and closing need to be controlled, deflection sealing structures are used to control opening or closing.

[0094] like Figure 6 As shown, the second structure of the vapor deposition apparatus provided in this embodiment includes:

[0095] The electron gun 2 includes a thermal emission electron gun and a field emission electron gun that are fitted to the electron gun connection position. The thermal emission electron gun and the field emission electron gun are fitted to the electron gun connection position through the same fitting structure 201 and can be interchanged.

[0096] Preferably, the mounting surface 103 of the deposition chamber forms a 140° angle with the vertical plane. When the thermal emission electron gun and the field emission electron gun are fitted to the mounting surface 103, the electron gun 2 is connected and fixed and can be interchanged.

[0097] Preferably, in this embodiment, two electron gun connection positions are provided on the mounting surface 103, one for connecting a thermionic electron gun and the other for connecting a field electron gun.

[0098] In this embodiment, the electron gun 2 is a high-power electron gun 2 with a power of 250kW, which realizes single-gun multi-beam and high deposition rate.

[0099] like Figure 3 As shown, the third structure of the vapor deposition apparatus provided in this embodiment includes:

[0100] The transmitting power supply 6 includes a thermal emission power supply 6 for powering the thermal emission electron gun and a field emission power supply 6 for powering the field emission electron gun.

[0101] Preferably, the transmitting power supply 6 includes a transformer 8 to achieve efficient power conversion and isolation, support high-frequency response (such as filament heating), and improve the power stability and energy utilization of the electron beam system.

[0102] As the vapor deposition apparatus provided in this embodiment, its fourth structure includes:

[0103] Vacuum system 3 is connected to and cooperates with vapor deposition chamber 1 to adjust the vacuum level of vapor deposition chamber 1.

[0104] Preferably, in this embodiment, the vacuum system 3 consists of pipes, valves, a vacuum pump, and a vacuum gauge.

[0105] As the vapor deposition apparatus provided in this embodiment, its fifth structure includes:

[0106] like Figure 12 , Figure 15 As shown, the target deposition system 15 is used to provide a target to the vapor deposition chamber 1. The target is bombarded by an electron beam and evaporates to form a film on the surface of the engine blade.

[0107] The gas deposition chamber 1 is used to realize the surface deposition process of the engine blade. During the deposition operation, the target material in the gas deposition chamber 1 is heated by the electron beam bombardment to evaporate and form a film on the surface of the engine blade. The supply structure of the target material can adopt various schemes, which are not uniquely limited. In this embodiment, one of the feasible options is optimized and adopted: the gas deposition chamber 1 is provided with a target deposition port 104, which is controlled to be closed or opened by a deflection closed structure corresponding to the target deposition port 104; the target deposition system 15 includes a target sleeve assembly 1501 in communication with the target deposition port 104 and maintaining airtightness, a free end of the target sleeve assembly 1501 is connected and matched with a rotating device 1503, and the rotating device 1503 is used to drive the target material in the target sleeve assembly 1501 to rotate along the shaft; the target deposition system 15 further includes a feeding device 1502 matched with the target sleeve assembly 1501, and the feeding device 1502 is used to drive the target material to enter or exit the gas deposition chamber 1. When the above scheme is adopted, the target sleeve assembly 1501 at least includes an inner pipe for transmitting the target material. Due to the driving of the feeding device 1502, the target material is transmitted to the gas deposition chamber 1 through the inner pipe and rotates under the driving of the rotating device 1503, so that uniform heating and evaporation can be realized, and the uniformity of target consumption can be maintained. An outer pipe is further arranged outside the inner pipe, the outer pipe can adopt a telescopic bellows and is used to realize airtight sealing. When the target material is transmitted in the lifting process, the outer pipe can guarantee the airtightness of the gas deposition chamber 1 and maintain the vacuum degree in the gas deposition process.

[0108] In order to better solve the above technical problems and achieve the above purposes, the following structural improvements are made in the gas deposition equipment scheme of the embodiment:

[0109] As Figure 3 , Figure 5 , Figures 7-11As shown, during the engine blade deposition process, if the parts to be processed only enter and leave the vapor deposition chamber 1 from one loading position, there is a waiting time for pre-treatment and cooling after treatment. If the parts occupy the entry and exit position all the time, it will affect the efficiency of the whole treatment process. Therefore, optimization can be carried out to reduce or avoid waiting time, improve the use efficiency of the vapor deposition chamber 1, thereby improving the efficiency of the whole vapor deposition. This can be achieved by various methods, which are not uniquely limited. The embodiment is optimized and one of the feasible options is adopted: a double loading chamber system for loading and pre-treating engine blades is also included. The double loading chamber system includes two loading chambers 4 and is arranged on both sides of the vapor deposition chamber 1. The communication between the loading chamber 4 and the vapor deposition chamber 1 is provided with an isolation door 11 for controlling the opening and closing. The loading chamber 4 is connected with the vacuum system 3 and the inflation assembly, which is used to adjust the air pressure in the loading chamber 4. The in-situ radiation heating device is also arranged in the loading chamber 4 to preheat the engine blades. When the above scheme is adopted, the two loading chambers 4 are independent of each other and perform loading, pre-treatment, entering and leaving the vapor deposition chamber 1, and unloading of the parts to be processed. Since the isolation door 11 between the two loading chambers 4 and the vapor deposition chamber 1 forms airtight cooperation, when the vapor deposition operation in the airtight deposition chamber is completed, the parts return to the original chamber for subsequent treatment. The parts pre-treated in the other loading chamber 4 can be sent to the vapor deposition chamber 1, and the required vapor deposition treatment can be started quickly, avoiding the waiting process of occupying the vapor deposition chamber 1 for subsequent treatment, thereby improving the continuous working efficiency of the vapor deposition chamber 1.

[0110] Preferably, the loading chamber 4 is provided with a loading port 402 for opening and closing the loading chamber 4 to realize loading and unloading of the parts to be processed. The loading chamber 4 is also provided with a gas interface 403 for connecting the vacuum system 3 and the inflation assembly.

[0111] The in-situ radiation heating device can preheat the engine blade products to be processed to meet the requirements of subsequent vapor deposition treatment. The in-situ radiation heating device can adopt various schemes to achieve the purpose of heating the engine blades, and its structure is not uniquely limited. The embodiment is optimized and one of the feasible options is adopted: as shown in the figure, the in-situ radiation heating device includes a radiation heating device 401 and a heating chamber 402. The heating chamber 402 is arranged in the loading chamber 4 and is connected with the radiation heating device 401. The radiation heating device 401 is arranged on the side wall of the heating chamber 402 and is connected with the power supply system 5. The power supply system 5 is used to supply power to the radiation heating device 401 to realize the preheating of the engine blades in the loading chamber 4. Figure 17As shown, the in-situ radiation heating device includes two oppositely arranged heating units, which are driven by the heating driver 401 to approach or move away from each other; the heating unit includes a group of gate valves 404 connected with the heating driver 401 and synchronized to act, the gate valve 404 is connected with and synchronously drives the heating shell 405 to act, the heating shell 405 is provided with a heat preservation layer 406 and a heating element 407; when the two heating units approach, the gate valve 404 is folded to form a heating cavity, and the heating element 407 heats the engine blade in the heating cavity. When the above scheme is adopted, the gate valve 404 can reciprocate under the action of the heating driver 401 and drive the heating shell 405 to fold or open; when the engine blade is located at the preheating position, the heating shell 405 covers the engine blade after folding, and the internal heating element 407 works to heat up, thereby realizing the heating of the engine blade. The heat preservation layer 406 can make the heat stay in the in-situ radiation heating device more, and better heating effect is achieved.

[0112] Before the vapor deposition treatment, the engine blade is sent into the vapor deposition chamber 1, in order to improve the utilization rate of the vapor deposition chamber 1 and reduce the time of stopping deposition, the engine blades to be treated and the engine blades that have been treated can be separated by setting multiple matching structures 201, and orderly enter the vapor deposition chamber 1, so as to reduce the time of interrupting the work of the vapor deposition chamber 1, which can be realized by various schemes, and the structure is not uniquely limited, and the embodiment is optimized and one of the feasible choices is adopted: as shown in the figure Figure 3 、 Figure 7As shown, the engine blade loading device further comprises a double feeding system for driving the engine blade to move and adjust the posture, the double feeding system comprises two feeding devices 5 and is located outside the two loading chambers 4 respectively; the feeding device 5 comprises a linear displacement assembly for driving the support shaft 505 to move between the loading chamber 4 and the vapor deposition chamber 1, the support shaft 505 and the swing frame 509 at the front end of the support shaft 505 are driven to rotate coaxially by the revolution driver 504; the swing frame 509 is provided with a swing clamp 511 for connecting the engine blade, the support shaft 505 is provided with an inner driving shaft 508 and is driven by the rotation driver 503, the swing frame 509 is provided with a plurality of transmission shafts 510, the swing clamp 511 is rotationally matched with the transmission shaft 510, and when the rotation driver 503 is started, the swing clamp 511 is rotated by the inner driving shaft 508 and the transmission shaft 510. When the above scheme is adopted, the support shaft 505 drives the swing frame 509 to move forward, backward and overturn synchronously, and the revolution of the entire support shaft 505 and the swing frame 509 is realized after the revolution driver 504 is started. The revolution driver 504 can adopt a motor and is matched with the support shaft 505 through a transmission belt, a transmission gear and the like. At the same time, the rotation driver 503 is connected and matched with the inner driving shaft 508 and drives the inner driving shaft 508 to rotate, realizes the revolution of the inner driving shaft 508 in the support shaft 505, and the inner driving shaft 508 can be matched and driven with the transmission shaft 510 through a bevel gear and the like, the transmission shaft 510 is also matched and driven with the swing clamp 511 through a bevel gear and the like, and then the synchronous revolution of the swing clamp 511 is realized, and the engine blade revolves synchronously with the swing clamp 511 in this process.

[0113] Preferably, in the embodiment, the part of the support shaft 505 outside the loading chamber is sleeved with an airtight tube 506, the airtight tube 506 can adopt a bellows, is matched and connected with the loading chamber, can be compressed when the support shaft 505 enters the loading chamber, or can be elongated when the support shaft 505 exits the loading chamber, and the airtight tube 506 can keep the airtightness of the loading chamber through the matching. The loading chamber 4 is provided with an airtight connecting seat 507, and the airtight tube 506 is connected to the airtight connecting seat 507.

[0114] Preferably, the linear displacement assembly comprises a displacement track 501 and a displacement base 502 arranged on the track, and the support shaft 505 is connected to the displacement base 502 and moves synchronously and reciprocally.

[0115] In the process of carrying out the vapor deposition treatment, the temperature of some parts of the equipment rises obviously, and some areas even become high-temperature areas. In order to avoid causing the instability of the operation of the equipment or the damage of the adjacent structure caused by the excessively high temperature, the temperature inside the equipment needs to be controlled, especially the parts and areas working at high temperature. The temperature can be controlled in multiple ways. The embodiment is optimized and one of the feasible options is adopted: a cooling system 7 is further included, which is at least matched with the electron gun 2, the deposition chamber system, the double loading system and the double feeding system and used to provide cooling. When the above scheme is adopted, the electron gun 2 and the vapor deposition chamber 1 are both high-temperature areas. The electron gun 2 itself generates high temperature in the working process, and the vapor deposition chamber 1 also presents a high-temperature phenomenon. The double loading system is adjacent to the vapor deposition chamber 1 and needs to be pretreated by the in-situ radiation heating device, so it also generates temperature rise. The double feeding system is adjacent to the double loading system and also generates temperature rise due to heat conduction. According to the arrangement of the cooling system 7, the heat accumulation can be effectively reduced, and the temperature of the high-temperature area can be effectively controlled.

[0116] In the embodiment, a water-cooled jacket is arranged on the deposition chamber, which is matched with a water-cooling system to realize cooling and temperature reduction, so as to control the temperature of the deposition chamber.

[0117] The cooling requirements of different parts are different. According to the actual working parts, the corresponding settings can be made, and the overall temperature can be effectively controlled according to the structure adaptation. The structure is not uniquely limited. The embodiment is optimized and one of the feasible options is adopted: the cooling system 7 includes a water-cooled assembly matched with the electron gun 2. The water-cooled assembly at least covers the cathode area, the anode area and the secondary focusing area of the thermionic electron gun. At the same time, the water-cooled assembly at least covers the cathode area, the anode area, the gas ionization reaction area and the optical waveguide beam area of the field emission electron gun. When the above scheme is adopted, the water-cooled assembly cools the electron gun 2, so that the heat generated by the electron gun 2 in the opening and running process is effectively transferred, the performance of some parts is not weakened due to the temperature rise, the emission path of the electron beam is not affected, and the internal environment is not affected by the vapor generated by the bombardment of some parts by the electron beam. When the cooling is performed in this way, the emission power of the electron gun 2 can be effectively improved, for example, the emission power of the electron gun 2 can reach 250kW.

[0118] Preferably, when the hot emission electron gun is used, the temperature stability of the cathode can be accurately ensured by water cooling temperature control on the cathode emission area, so as to form a stable electron emission source. The probability of phenomena such as temperature abrupt change, beam current instability, discharge arc and the like caused by long-time power output is greatly reduced. By water cooling design on the anode part, the temperature of the anode is ensured to be in a relatively low state for a long time, so that the anode will not be melted by electron bombardment to cause a large amount of metal vapor excitation under any condition, thereby protecting the cleanliness inside the electron gun 2, greatly prolonging the maintenance period of the electron gun 2 and reducing the maintenance cost. By water cooling temperature control monitoring on the beam guide channel of the secondary focusing area, the beam guide channel is also ensured not to be melted by electron bombardment to cause a large amount of metal vapor excitation under any condition, thereby protecting the cleanliness inside the electron gun 2. And through real-time monitoring of the temperature, the position of the beam waist and the focusing state of the beam current can be intuitively fed back.

[0119] Preferably, when the field emission electron gun is used, the temperature stability of the cathode can be accurately ensured by water cooling temperature control on the cathode emission area, so as to form a stable electron emission source. The probability of phenomena such as temperature abrupt change, beam current instability, discharge arc and the like caused by long-time power output is greatly reduced. By water cooling temperature control on the hydrogen-oxygen gas mixed ionization area, the temperature of the ionization reaction area is ensured to be controllable, so that a large temperature loss is not caused, thereby ensuring that the ionization reaction is continuously and stably carried out.

[0120] By water cooling design on the anode part, the temperature of the anode is ensured to be in a relatively low state for a long time, so that the anode will not be melted by electron bombardment to cause a large amount of metal vapor excitation under any condition, thereby protecting the cleanliness inside the electron gun 2, greatly prolonging the maintenance period of the electron gun 2 and reducing the maintenance cost.

[0121] By water cooling temperature control monitoring on the beam guide channel of the secondary focusing area, the beam guide channel is also ensured not to be melted by electron bombardment to cause a large amount of metal vapor excitation under any condition, thereby protecting the cleanliness inside the electron gun 2.

[0122] The entire device is controlled to run by an automatic system when in operation, and can be realized by various schemes. In the embodiment, one of the feasible options is optimized and adopted, as shown in FIGS. 8 and 9. Figure 3 , Figure 7 As shown in FIGS. 8 and 9, the control system 9 is further included for monitoring and automatically controlling the start and stop of the deposition chamber system, the electron gun 2, the double loading system, the double feeding system and the cooling system 7. When the above scheme is adopted, the corresponding monitoring elements can be arranged to obtain the working parameters at each position, and the working parameters are sent to the control system 9. When the control system 9 obtains the data obtained by each monitoring element, the corresponding control instructions can be generated by data processing, so as to realize the automatic operation of the entire device.

[0123] Preferably, the control system 9 comprises a main control cabinet. The main control cabinet integrates a numerical control platform, centrally controls the vacuum system 3, the feeding system and the parameters of the electron gun 2, and realizes intelligent operation.

[0124] In this embodiment, a main support 12 is further included. The main support 12 is used to carry the deposition chamber, the vacuum system 3 and other core components, to guarantee the overall stability of the equipment through rigid frame design, and to optimize the anti-vibration performance through dynamic simulation.

[0125] In this embodiment, an operation platform support 10 is further included. The operation platform support 10 comprises a control cabinet area 13 and an operation area 14. The operation platform support 10 is used to provide a modular support structure, to facilitate the deployment of operation interfaces, sensor interfaces and maintenance channels, and to ensure the convenience of human-computer interaction. In this embodiment, the operation platform support 10 is provided with a guardrail.

[0126] The above is the embodiment listed in this embodiment; however, this embodiment is not limited to the above optional embodiments; those skilled in the art can obtain other various embodiments by arbitrarily combining the above embodiments; anyone can obtain other various forms of embodiments under the inspiration of this embodiment. The above specific embodiments should not be understood as limiting the protection scope of this embodiment; the protection scope of this embodiment should be defined by the claims.

Claims

1. A high-power electron beam physical vapor deposition control system for engine blades, characterized by, The application relates to a gas phase deposition engine blade processing system, which comprises the following parts: a device layer, which comprises a plurality of device systems: a servo system used for controlling the feeding and discharging of materials and the posture adjustment of the materials at a gas phase deposition chamber, the servo system comprising at least two servo devices used for alternately controlling the feeding and discharging of materials at the gas phase deposition chamber; an electron gun system used for controlling the emission of an electron beam, the electron gun system comprising at least two electron gun modules and corresponding electron guns; a detection system used for monitoring the environment of the materials; a control layer, which comprises a plurality of control modules used for controlling the device systems of the device layer; an operation layer, which comprises a plurality of interaction modules used for sending control instructions to the control modules of the control layer; a monitoring layer, which comprises a plurality of monitoring modules used for acquiring the detection signals of the detection system and performing display and recording; a management layer, which comprises a server and a plurality of terminal devices used for acquiring real-time data from the server and generating data reports; the servo device comprises a feeding device, the feeding device comprises two feeding modules, the feeding modules are arranged in one-to-one correspondence with loading chambers and are used for driving the engine blades to move back and forth between the loading chambers and the gas phase deposition chamber; the feeding device comprises a feeding support rod, the feeding support rod extends into the loading chamber and is connected with the engine blades through a rotating frame, the feeding support rod performs a translational motion under the driving of a feeding driver, performs coaxial rotation with the rotating frame under the driving of a revolution driver, and drives the engine blades to rotate through a rotary clamp on the rotating frame under the driving of a rotation driver; the control modules control the start and stop of the two feeding modules.

2. The high power e-beam physical vapor deposition control system for engine blades of claim 1, wherein: the servo device comprises loading devices, the loading devices comprise two loading chambers which are communicated with the gas phase deposition chamber and are matched with the gas phase deposition chamber, the control modules control the two loading chambers to alternately transport and take out the engine blades to be processed into the gas phase deposition chamber; the loading chambers are provided with operation doors used for loading and unloading the engine blades.

3. The high power e-beam physical vapor deposition control system for engine blades of claim 1, wherein: a gas path system used for providing pneumatic control, the gas path system comprises a gas source module, the gas source module transports driving gas through a gas path and a distribution valve to control the expansion and contraction of driving cylinders, the driving cylinders at least comprise heating driving cylinders arranged in the loading chambers to drive heating devices, isolation driving cylinders arranged between the loading chambers and the gas phase deposition chamber to drive isolation baffles, and cooling driving cylinders arranged at the gas phase deposition chamber to drive water-cooled plugboards.

4. The high power e-beam physical vapor deposition control system for engine blades of claim 3, wherein: a heating system used for pre-treating materials, the heating system comprises in-situ radiation heating devices arranged in the loading chambers, the in-situ radiation heating devices form a closed heating cavity under the control of the heating driving cylinders and heat the engine blades, or the in-situ radiation heating devices are controlled by the heating driving cylinders to open the heating cavity; the heating cavity is provided with a heat preservation structure and a heating element, when the engine blades are in the heating cavity, the engine blades are heated by the heating element; the control modules are used for controlling the start and stop of the in-situ radiation heating devices.

5. The high power e-beam physical vapor deposition control system for engine blades of claim 2, wherein: a vacuum system used for controlling the vacuum degree of the environment of the materials, the vacuum system is communicated with the gas phase deposition chamber and the loading chamber respectively and is controlled to start and stop by the control modules.

6. The high power e-beam physical vapor deposition control system for engine blades of claim 2, wherein: The detection system at least comprises a vacuum degree detection assembly arranged in the vapor deposition chamber and the loading chamber, a temperature detection assembly arranged in the vapor deposition chamber and the loading chamber, and an image detection assembly arranged in the vapor deposition chamber, and the vacuum degree detection assembly, the temperature detection assembly and the image detection assembly are respectively communicated with a monitoring module and transmit detection data.

7. The high power e-beam physical vapor deposition control system for engine blades of claim 1, wherein: The cooling system comprises water cooling assemblies arranged at the electron gun system, the servo system and the vapor deposition chamber respectively, and the cooling system is controlled to operate and control the temperature of the corresponding regions within a set range by the control module.

8. A method for controlling a high-power electron beam physical vapor deposition for an engine blade, using the high-power electron beam physical vapor deposition control system for an engine blade according to any one of claims 1 to 7, characterized by, The vapor deposition process comprises the following steps: S01: placing the engine blade to be vapor deposited in one side loading chamber to wait and perform preheating treatment; S02: the engine blade after the preheating treatment enters the vapor deposition chamber, and the communication between the vapor deposition chamber and the outside is disconnected, and the vacuum degree in the vapor deposition chamber is adjusted to a set value; S03: the electron gun system is started to bombard the target material, vapor deposition is started, the evaporated target material is deposited on the surface of the engine blade, and the temperature of the vapor deposition chamber and the electron gun system is monitored, and the cooling system is used to maintain the temperature of the corresponding regions within a set range; S04: the original loading chamber is in a vacuum environment or an inert gas environment, the engine blade after the vapor deposition is transferred to the loading chamber for cooling treatment, and the engine blade after the preheating treatment in the other side loading chamber is sent into the vapor deposition chamber; S05: repeating the above steps S02-S04.

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