A high-power electron beam physical vapor deposition feed system for engine blades

Abstract

This invention relates to the field of electron beam vapor deposition technology, specifically to a feeding system for high-power electron beam physical vapor deposition of engine blades. The system includes: a rotating frame rotatably connected to several tooling seats, on which the engine blades are mounted and rotate synchronously; a revolution assembly including a revolution driver and a revolution rod, the revolution rod connecting to the rotating frame and driving the frame to revolution; a rotation assembly including a rotation driver and a rotation rod, the rotation rod coaxially passing through the revolution rod and cooperating with a transmission assembly; a traverse assembly including a traverse track, a traverse seat, and a traverse driver, the traverse driver causing the traverse seat to reciprocate along the traverse track; the revolution assembly moving synchronously with the traverse seat; and a support assembly spaced along the axial direction of the revolution rod, providing support for the revolution rod. By feeding and removing the product into and from the vapor deposition chamber, the system improves the attitude adjustment of the product during the vapor deposition process, facilitating better vapor deposition film formation and improving the uniformity and quality of the film formed on the engine blade surface.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of electron beam physical vapor deposition, and aims at performing vapor deposition treatment on engine blades, in particular to a feeding system for high-power electron beam physical vapor deposition of engine blades. BACKGROUND

[0002] The electron beam physical vapor deposition (EB-PVD) technology is to use high-energy density electron beam bombardment, heating and evaporation of target material under high vacuum conditions, and to form a thermal barrier coating with high bonding strength and excellent thermal shock resistance on the substrate, which is widely used in the field of protective coating preparation of aircraft engine turbine blades.

[0003] The existing electron beam physical vapor deposition equipment mainly includes a deposition chamber, a loading chamber and a feeding mechanism. The existing feeding system cannot realize stable and reliable long-distance feeding due to the limited feeding distance, so in the case of limited conveying distance, the heating of the product is completed in the deposition chamber. After the product is fed into the deposition chamber by the feeding mechanism, the product needs to be preheated first, and the vapor deposition is started only after the preset temperature condition is reached, which leads to the occupation of the deposition chamber, reduces the effective working time, and directly reduces the efficiency of the vapor deposition process. At the same time, after the product is fed into the vapor deposition chamber by the existing feeding mechanism, the product remains in a fixed posture in the vapor deposition chamber, or can only adjust the posture within a limited range, which is not conducive to uniform and effective film formation, thereby reducing the effect of the product vapor deposition treatment.

[0004] It can be seen that the feeding mechanism of the current vapor deposition system still needs to be improved, and the feeding mechanism needs to be adjusted to increase the moving distance of the product, improve the flexibility of the feeding process, and realize multi-angle free rotation of the product in the deposition chamber after the feeding mechanism carries the product, which facilitates more uniform vapor deposition film formation and reliable quality. Therefore, a more reasonable technical solution needs to be proposed to solve the technical problems existing in the prior art. SUMMARY

[0005] In view of the problems existing in the prior art, the present application discloses a feeding system for a high-power electron beam physical vapor deposition equipment for engine blades, which can realize the preheating of the product in the loading chamber by increasing the feeding distance and moving the heating system outside, and can realize multi-angle and multi-posture adjustment of the product while carrying the product, thereby facilitating better deposition film formation.

[0006] In order to achieve the above-mentioned purpose, the feeding system disclosed by the present application can adopt the following scheme:

[0007] A feeding system for high-power electron beam physical vapor deposition of engine blades, comprising:

[0008] A rotating frame is connected with several tool holders, and the engine blades are arranged on the tool holders and rotate synchronously with the tool holders;

[0009] A revolving assembly includes a revolving driver and a revolving rod, and the revolving rod is connected with the rotating frame and used to drive the rotating frame to revolve coaxially;

[0010] A rotating assembly includes a rotating driver and a rotating rod, and the rotating rod penetrates the revolving rod coaxially and cooperates with a transmission assembly arranged in the rotating frame; the transmission assembly includes several transmission shafts, and when the rotating rod rotates, the transmission assembly drives the tool holders to rotate synchronously;

[0011] A transverse moving assembly includes a transverse moving track, a transverse moving seat and a transverse moving driver, and the transverse moving driver provides a driving force to move the transverse moving seat along the transverse moving track; the revolving assembly is connected to the transverse moving seat and moves synchronously with the transverse moving seat;

[0012] A supporting assembly is arranged along the axial direction of the revolving rod and used to provide a supporting force for the revolving rod.

[0013] The above disclosed feeding system connects the engine blades to be processed with the tool holders on the rotating frame, and when the tool holders are connected with the engine blades, the whole transverse movement of the engine blades can be realized under the driving of the transverse moving assembly, and the engine blades can enter and leave the vapor deposition chamber; during the vapor deposition process, the engine blades are continuously rotated and adjusted in posture by the rotating assembly and the revolving assembly, so that the uniform film formation on the surface of the engine blades can be realized, and thus the actual effect of the vapor deposition process can be improved.

[0014] Further, the revolving rod can be arranged in various schemes, and its structure is not uniquely limited, and one feasible scheme is optimized and proposed herein: the front end of the revolving rod is rotatably connected with the transverse moving seat, the revolving driver is connected with the revolving rod through a transmission structure, and the revolving driver drives the revolving rod to rotate when it is started; and the rear end of the revolving rod is coaxially connected with the rotating frame. When the above scheme is adopted, the revolving driver can be a motor, and the revolving driver and the revolving rod can adopt a gear pair as the transmission structure; the rotating frame is coaxially fixed to the revolving rod, and rotates synchronously with the revolving rod.

[0015] Further, since the revolving rod and the rotating frame enter the vapor deposition chamber, in order to avoid the damage of the revolving rod due to the excessively high temperature, the revolving rod is cooled, and one feasible scheme is optimized and proposed herein: a water cooling sleeve is arranged outside the revolving rod, and a water cooling gap is formed between the water cooling sleeve and the revolving rod and filled with a water cooling medium. When the above scheme is adopted, at least one water inlet and one water outlet are arranged on the water cooling sleeve, the water cooling medium is transported into the water cooling gap and circulated in the water cooling medium, and the heat of the revolving rod can be taken away by the circulating water cooling medium, so that the temperature of the revolving rod is maintained within a suitable range.

[0016] Further, when the revolution rod transversely transports products, the revolution rod as a whole is displaced in the horizontal direction, and needs to pass through a loading chamber before entering the vapor deposition chamber, and the loading chamber also needs to ensure a certain air tightness, so when the revolution rod enters the loading chamber, the matching part of the two needs to be air-tight, and the corresponding air-tight treatment can be realized by various structures, and one feasible option is optimized and proposed here: the water-cooled sleeve is further sleeved with an air-tight tube, and the two ends of the air-tight tube are air-tightly matched and form an air-tight space. When the above scheme is adopted, the air-tight tube can be a metal bellows, one end of the metal bellows is located on the revolution rod and is sealed and connected, and the other end is connected to the revolution rod inlet on the loading chamber, and the metal bellows forms a certain air-tight space between the revolution rod and the loading chamber, and maintains air tightness with the transverse movement of the revolution rod.

[0017] Further, the cooperation between the revolution rod and the rotation rod can be realized by various structures, which is not uniquely limited, and one feasible option is optimized and proposed here: the revolution rod is hollow inside and is provided with a plurality of bearings, the rotation rod is matched inside the revolution rod through the bearings, the rotation driver is connected and matched with the front end of the rotation rod and drives the rotation rod to rotate, and the rear end of the rotation rod is connected and matched with the transmission assembly. When the above scheme is adopted, the bearings are provided at least in two places to provide support for the relative rotation of the revolution rod and the rotation rod; the rotation driver can be an electric motor, which is connected and matched with the rotation rod through the output shaft of the speed reducer; the rear end of the rotation rod is connected and matched with the transmission assembly to transmit driving force to the tool seat on the rotating frame to drive the tool seat to rotate.

[0018] Further, the transmission assembly between the rotation rod and the tool seat can adopt various schemes, and the structure is not uniquely limited, and one feasible option is optimized and proposed here: the transmission assembly further includes a connecting pin, the connecting pin is coaxially connected with the rear end of the rotation shaft and rotates, the rear end of the connecting pin is matched with the transmission shaft through a transmission gear pair to drive the transmission shaft to rotate, and the transmission shaft is matched with the tool seat through a transmission gear pair to drive the tool seat to rotate synchronously. When the above scheme is adopted, the rotating frame is hollow inside and forms a bent channel, the transmission shaft is arranged in the channel and rotates through the bevel gear matching.

[0019] Further, during the vapor deposition process, the temperature at the rotating frame needs to be monitored, especially the temperature of each engine blade, so one feasible option is optimized and proposed here: a plurality of thermal sensing assemblies are further arranged on the rotating frame at intervals, and the thermal sensing assemblies are used to detect the temperature at the tool seat. When the above scheme is adopted, the thermal sensing assemblies can be thermocouples and are arranged between adjacent tool seats.

[0020] Further, the support assembly is used to provide support force to the revolving rod, so that the revolving rod can run stably and reliably under a larger span, and the structure is not uniquely limited, and one of the feasible options is optimized and proposed herein: the support assembly comprises a plurality of support upper end covers and support lower end covers, and a support driver is used to make the support upper end cover and the support lower end cover close or open, and the support upper end cover and the support lower end cover cooperate to support the revolving rod when they are closed. When the above scheme is adopted, the support driver can be a pneumatic cylinder, an electric cylinder or the like, and the support upper end cover and the support lower end cover correspondingly form an arc-shaped groove allowing the revolving rod to pass through, and a through hole can be formed after the support upper end cover and the support lower end cover are correspondingly matched, and the through hole is correspondingly matched with the revolving rod.

[0021] Further, in order to better provide support force, the structures at the upper end cover and the lower end cover can be constructed in other forms, and the structure is not uniquely limited, and one of the feasible options is optimized and proposed herein: the support upper end cover and the support lower end cover are further provided with a support portion for supporting the revolving rod, and the support portion comprises an arc-shaped support plate, and a plurality of support rollers or support balls are arranged on the inner surface of the support plate, and the support balls or the support rollers are rollingly matched with the surface of the revolving rod after the support portion is matched with the revolving rod. When the above scheme is adopted, the arc-shaped support plate can be matched to the support upper end cover and the support lower end cover through fasteners, or can be formed by welding or directly integrated.

[0022] Further, the driving transmission structure of the horizontal moving assembly can adopt various schemes, and the structure is not uniquely limited, and one of the feasible options is optimized and proposed herein: a threaded drive rod is arranged at the horizontal moving track, and a threaded hole is correspondingly arranged on the horizontal moving seat and matched with the threaded drive rod; when the horizontal moving driver drives the threaded drive rod to rotate, the horizontal moving seat moves along the extension direction of the horizontal moving track. When the above scheme is adopted, the horizontal moving track can be provided with a guide structure for guaranteeing the directional movement of the horizontal moving seat when the threaded drive rod provides driving force, and the guide structure includes but is not limited to guide rods, guide grooves and the like.

[0023] Compared with the prior art, some beneficial effects of the technical scheme disclosed in the application include:

[0024] By arranging the horizontal moving, revolving and rotating feeding structures, the products can be fed into and out of the vapor deposition chamber, the posture adjustment of the products in the vapor deposition process can be improved, the vapor deposition film can be better formed, the uniformity of the film formed on the surface of the engine blade can be improved, and the quality of the vapor deposition is improved as a whole. BRIEF DESCRIPTION OF DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly introduced as follows. It should be understood that the following drawings only represent some of the embodiments of the present application, and therefore should not be considered as a limitation to the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0026] Figure 1 It is a schematic diagram of the overall structure of the feeding system (the revolving rod is located at the initial position).

[0027] Figure 2 It is a schematic diagram of the overall structure of the feeding system and an enlarged schematic diagram of the local structure (the revolving rod extends horizontally).

[0028] Figure 3 It is a top view schematic diagram of the feeding system.

[0029] Figure 4 It is a front view schematic diagram of the feeding system.

[0030] Figure 5 It is a Figure 3 schematic diagram of the sectional structure of the middle A-A section and an enlarged schematic diagram of the local structure.

[0031] Figure 6 It is a right view schematic diagram of the feeding system.

[0032] Figure 7 It is a schematic diagram of the overall structure of the feeding system after removing the rotating frame and an enlarged schematic diagram of the local structure.

[0033] Figure 8 It is a front view schematic diagram of the feeding system after removing the rotating frame and an enlarged schematic diagram of the local structure.

[0034] Figure 9 It is a left view schematic diagram of the feeding system after removing the rotating frame.

[0035] Figure 10 It is a Figure 9 schematic diagram of the sectional structure of the middle B-B section.

[0036] Figure 11 It is a schematic diagram of the overall structure of the rotating frame.

[0037] Figure 12 It is a top view schematic diagram of the rotating frame.

[0038] Figure 13 It is a schematic diagram of the transmission structure inside the expert.

[0039] Figure 14 It is a schematic diagram of the structure of a view angle of the supporting assembly.

[0040] Figure 15 Structure diagram of another perspective view of the supporting assembly.

[0041] In the above-mentioned drawings, the meanings of various marks are as follows:

[0042] 1, horizontal moving assembly; 101, horizontal moving driver; 101a, horizontal moving reducer; 102, horizontal moving seat; 103, horizontal moving rail; 104, threaded driving rod; 2, revolving assembly; 201, revolving driver; 201a, revolving reducer; 202, revolving rod; 203, water cooling sleeve; 204, pipe seat; 3, rotating assembly; 301, rotating driver; 301a, rotating reducer; 302, rotating rod; 303, bearing; 4, rotating frame; 401, tooling seat; 402, thermal induction assembly; 403, engine blade; 404, transmission shaft; 405, connecting pin; 5, supporting assembly; 501, supporting driver; 502, supporting upper end cover; 503, supporting part; 504, supporting ball; 505, supporting lower end cover; 506, arc-shaped groove. DETAILED DESCRIPTION

[0043] The present embodiment will be further explained in combination with the drawings and specific examples.

[0044] In view of the fact that in the prior art, after feeding in the vapor deposition treatment process, the posture of the product cannot be adjusted in multiple directions, resulting in poor vapor deposition effect of the product, the following embodiments are optimized and overcome the defects in the prior art.

[0045] EMBODIMENT

[0046] As shown in Figures 1-5 The present embodiment provides a high-power electron beam physical vapor deposition feeding system for engine blades 403, which can adjust the posture of the product in multiple directions while feeding and discharging the vapor deposition chamber, thereby improving the vapor deposition effect of the product.

[0047] The feeding system disclosed in the present embodiment connects the engine blades 403 to be treated through the tooling seat 401 on the rotating frame 4. When the tooling seat 401 connects the engine blades 403, the engine blades 403 can be moved horizontally as a whole under the driving of the horizontal moving assembly 1, so as to enter and leave the vapor deposition chamber. During the vapor deposition process, the engine blades 403 are continuously rotated and adjusted in posture through the rotating assembly 3 and the revolving assembly 2, which facilitates uniform film formation on the surface of the engine blades 403, and thus the actual effect of the vapor deposition treatment can be improved.

[0048] As shown in Figures 11-13 As one of the structures of the feeding system disclosed in the present embodiment, it includes:

[0049] The rotating frame 4 is rotatably connected to several tooling seats 401. The engine blades 403 are set on the tooling seats 401 and rotate synchronously with the tooling seats 401.

[0050] Preferably, in this embodiment, the rotating frame 4 includes a U-shaped frame.

[0051] During the vapor deposition process, it is necessary to monitor the temperature at the rotating frame 4, especially the temperature of each engine blade 403. Therefore, this embodiment optimizes the process and adopts one feasible option: the rotating frame 4 is also equipped with several thermal sensing components 402 at intervals. The thermal sensing components 402 are used to detect the temperature at the tooling base 401. When adopting the above solution, the thermal sensing components 402 can be thermocouples and are arranged between adjacent tooling bases 401.

[0052] Preferably, in this embodiment, there are 10 tooling seats 401 arranged on a rotating frame 4, 5 on each side, with a spacing of 100mm between each, and a thermocouple arranged in the middle for temperature measurement with a spacing of 100mm, for a total of 10. The rotating frame 4 body and tooling are both made of high-temperature alloy, which effectively avoids high-temperature deformation.

[0053] like Figures 1-10 As shown, the second structure of the feeding system disclosed in this embodiment includes:

[0054] The revolution component 2 includes a revolution driver 201 and a revolution rod 202, wherein the revolution rod 202 is connected to the rotating frame 4 and is used to drive the rotating frame 4 to revolve coaxially.

[0055] The orbital rod 202 can be configured in various ways, and its structure is not limited to a single one. This embodiment optimizes and adopts one feasible option: the front end of the orbital rod 202 is rotatably fitted onto the transverse support 102, and the orbital driver 201 is connected to the orbital rod 202 through a transmission structure. When the orbital driver 201 is started, it drives the orbital rod 202 to rotate; the rear end of the orbital rod 202 is coaxially connected to the rotating frame 4. When the above scheme is adopted, the orbital driver 201 can be a motor, and the orbital driver 201 and the orbital rod 202 can use a gear pair as the transmission structure; after the rotating frame 4 is coaxially fixed to the orbital rod 202, it rotates synchronously with the rotation of the orbital rod 202.

[0056] Preferably, in this embodiment, the revolution driver 201 is driven by the revolution reducer 201a in cooperation with the revolution rod 202.

[0057] Since the revolving rod 202 and the rotating frame 4 will enter the vapor deposition chamber, in order to avoid the temperature of the revolving rod 202 being too high and being damaged, the revolving rod 202 is cooled, and in the embodiment, a water cooling sleeve 203 is arranged outside the revolving rod 202, a water cooling gap is formed between the water cooling sleeve 203 and the revolving rod 202, and the water cooling gap is filled with a water cooling medium. When the above scheme is adopted, at least one water inlet and one water return are arranged on the water cooling sleeve, the water cooling medium is transported into the water cooling gap and circulates in the water cooling medium, the heat at the revolving rod 202 can be taken away by the circulating water cooling medium, and the temperature at the revolving rod 202 is kept in a suitable range.

[0058] When the revolving rod 202 transversely transports the product, the revolving rod 202 moves in the horizontal direction as a whole, needs to pass through a loading chamber before entering the vapor deposition chamber, and the loading chamber also needs to ensure a certain air tightness. Therefore, when the revolving rod 202 enters the loading chamber, the matching part of the revolving rod 202 and the loading chamber needs to be air tightly treated, and the air tightness treatment can be realized by various structures. In the embodiment, a feasible selection is adopted: the water cooling sleeve 203 is further sleeved with an air tight pipe, and the two ends of the air tight pipe are air tightly matched and form an air tight space. When the above scheme is adopted, the air tight pipe can be a metal bellows, one end of the metal bellows is located on the revolving rod 202 and is sealingly connected, and the other end is connected to the revolving rod 202 inlet on the loading chamber. The metal bellows forms a certain air tight space between the revolving rod 202 and the loading chamber, and keeps the air tightness with the transverse movement of the revolving rod 202.

[0059] Preferably, in order to ensure the stability of the connection and matching of the revolving rod 202, a pipe seat 204 is further arranged, the revolving rod 202 or the water cooling sleeve 203 is connected and matched to the pipe seat 204 and is supported and limited by the pipe seat 204, and the stability of the revolving is kept reliable.

[0060] Preferably, the outer diameter of the water cooling sleeve 203 is 100 mm, the inner diameter is 80 mm, and the maximum cooling liquid volume is 8.11 m3. Since the cantilever of the revolving rod 202 is long, a reinforcing rib plate is arranged on the transverse moving seat 102 to assist in fixing the revolving rod 202.

[0061] As shown in Figures 1-10 , the structure of the feeding system disclosed in the embodiment includes:

[0062] The rotating assembly 3 includes a rotating driver 301 and a rotating rod 302, the rotating rod 302 coaxially passes through the revolving rod 202 and is matched with a transmission assembly arranged in the rotating frame 4; the transmission assembly includes a plurality of transmission shafts 404, and when the rotating rod 302 rotates, the transmission assembly drives the tool seat 401 to synchronously rotate.

[0063] The cooperation between the revolving rod 202 and the rotating rod 302 can be realized by various structures, which are not uniquely limited, and the embodiment is optimized and adopts one of the feasible options: the revolving rod 202 is hollow and is provided with a plurality of bearings 303, the rotating rod 302 is cooperated in the revolving rod 202 through the bearings 303, the rotating driver 301 is connected and cooperated with the front end of the rotating rod 302 and drives the rotating rod 302 to rotate, and the rear end of the rotating rod 302 is connected and cooperated with the transmission assembly. When the above scheme is adopted, the bearings 303 are provided at least in two places to provide support for the relative rotation between the revolving rod 202 and the rotating rod 302; the rotating driver 301 can adopt a motor which is connected and cooperated with the rotating rod 302 through the output shaft of the speed reducer; the rear end of the rotating rod 302 is connected and cooperated with the transmission assembly to transmit the driving force to the tool holder and drive the tool holder 401 on the rotating frame 4 to rotate.

[0064] Preferably, in the embodiment, the rotating driver 301 is cooperated and driven with the rotating rod 302 through the rotating speed reducer 301a.

[0065] The transmission assembly between the rotating rod 302 and the tool holder 401 can adopt various schemes, and the structure is not uniquely limited, and the embodiment is optimized and adopts one of the feasible options: the transmission assembly further includes a connecting pin 405 which is coaxially connected and rotates with the rear end of the rotating shaft, the rear end of the connecting pin 405 is cooperated with the transmission shaft 404 through a transmission gear pair and drives the transmission shaft 404 to rotate, and the transmission shaft 404 is cooperated with the tool holder 401 through a transmission gear pair and drives the tool holder 401 to rotate synchronously. When the above scheme is adopted, the rotating frame 4 is hollow and forms a bent channel, the transmission shaft 404 is arranged in the channel and rotates through the bevel gear cooperation.

[0066] Preferably, in the embodiment, the rotating rod 302 is a solid rod with a diameter of 20 mm and is sleeved with the revolving rod 202 through four bearings 303.

[0067] As shown in Figure 2 , Figures 5-7 , the structure of the feeding system disclosed in the embodiment includes:

[0068] The horizontal moving assembly 1 includes a horizontal moving rail 103, a horizontal moving seat 102 and a horizontal moving driver 101, the horizontal moving driver 101 provides driving force to make the horizontal moving seat 102 move back and forth along the horizontal moving rail 103; and the revolving assembly 2 is connected to the horizontal moving seat 102 and moves synchronously with the horizontal moving seat 102.

[0069] The driving transmission structure of the horizontal moving assembly 1 can adopt various schemes, which are not uniquely limited. The embodiment is optimized and adopts one of the feasible options: a threaded driving rod 104 is arranged at the horizontal moving track 103, and a threaded hole is correspondingly arranged on the horizontal moving seat 102 and matched with the threaded driving rod 104; when the horizontal moving driver 101 drives the threaded driving rod 104 to rotate, the horizontal moving seat 102 moves along the extension direction of the horizontal moving track 103. When the above scheme is adopted, a guide structure can be arranged on the horizontal moving track 103, which is used to guarantee the directional movement of the horizontal moving seat 102 when the threaded driving rod 104 rotates to provide driving force. The guide structure includes but is not limited to guide rods, guide grooves, etc.

[0070] Preferably, in the embodiment, the horizontal moving driver 101 is matched and driven with the threaded driving rod 104 through a horizontal moving speed reducer 101a.

[0071] As shown in Figure 14 , Figure 15 , the feeding system disclosed in the embodiment has the following five structures:

[0072] The support assembly 5 is arranged in the axial direction of the revolving rod 202 to provide support force to the revolving rod 202.

[0073] The support assembly 5 is used to provide support force to the revolving rod 202 to make the revolving rod 202 run stably and reliably under a large span. The structure of the support assembly 5 is not uniquely limited. The embodiment is optimized and adopts one of the feasible options: the support assembly 5 includes a plurality of support upper end covers 502 and support lower end covers 505, and a support driver 501 is used to make the support upper end covers 502 and the support lower end covers 505 close or open, and the support upper end covers 502 and the support lower end covers 505 are matched to support the revolving rod 202 when the support upper end covers 502 and the support lower end covers 505 are closed. When the above scheme is adopted, the support driver 501 can adopt a pneumatic cylinder or an electric cylinder, and the support upper end covers 502 and the support lower end covers 505 are correspondingly formed with arc-shaped grooves 506 allowing the revolving rod 202 to pass through. When the support upper end covers 502 and the support lower end covers 505 are correspondingly matched, a through hole is formed and matched with the revolving rod 202.

[0074] In order to provide better support, the structure at the upper end cover and the lower end cover can be configured in other forms, and the structure is not limited to be unique. The embodiment is optimized and one of the feasible options is adopted: the support upper end cover 502 and the support lower end cover 505 are further provided with a support part 503 for supporting the revolute rod 202. The support part 503 includes an arc-shaped support plate, and the inner surface of the support plate is provided with a plurality of support rollers or support balls 504. When the support part 503 cooperates with the revolute rod 202, the support balls 504 or the support rollers roll and cooperate with the surface of the revolute rod 202. When the above scheme is adopted, the arc-shaped support plate can be fastened to the support upper end cover 502 and the support lower end cover 505, or can be formed by welding or directly integrated.

[0075] Preferably, in the embodiment, the feeding system can be transversely elongated to 2500 mm at most. In order to ensure the cantilever distance, the distance between the support structure and the conveying device is 1227 mm, and the distance between the two support structures is 760 mm.

[0076] The above is the embodiment listed in the embodiment; but the embodiment is not limited to the above optional embodiment; those skilled in the art can obtain other various embodiments by arbitrarily combining the above embodiments; anyone can obtain other various forms of embodiments under the inspiration of the embodiment. The above specific embodiments should not be understood as limiting the protection scope of the embodiment; the protection scope of the embodiment should be defined by the claims.

Claims

1. A feeding system for high-power electron beam physical vapor deposition of engine blades, characterized in that, include: A rotating frame (4) is rotatably connected to several tooling seats (401). The engine blades (403) are mounted on the tooling seats (401) and rotate synchronously with the tooling seats (401). The orbital assembly (2) includes an orbital driver (201) and an orbital rod (202), wherein the orbital rod (202) is connected to the rotating frame (4) and is used to drive the rotating frame (4) to orbit coaxially; The self-rotating component (3) includes a self-rotating driver (301) and a self-rotating rod (302). The self-rotating rod (302) coaxially passes through the revolution rod (202) and cooperates with the transmission component set in the rotating frame (4). The transmission component includes several transmission shafts (404). When the self-rotating rod (302) rotates, the transmission component drives the tooling seat (401) to rotate synchronously. The transverse component (1) includes a transverse track (103), a transverse seat (102), and a transverse driver (101). The transverse driver (101) provides driving force to make the transverse seat (102) reciprocate along the transverse track (103). The orbital component (2) is connected to the transverse seat (102) and moves synchronously with the transverse seat (102). Several support components (5) are provided at intervals along the axial direction of the revolution rod (202) to provide support force to the revolution rod (202).

2. The feeding system for high-power electron beam physical vapor deposition of engine blades according to claim 1, characterized in that: The front end of the orbital rod (202) is rotatably fitted on the transverse seat (102). The orbital drive (201) and the orbital rod (202) are connected and fitted through a transmission structure. When the orbital drive (201) is started, it drives the orbital rod (202) to rotate. The rear end of the orbital rod (202) is coaxially connected to the rotating frame (4).

3. The feeding system for high-power electron beam physical vapor deposition of engine blades according to claim 1 or 2, characterized in that: A water-cooled sleeve (203) is provided outside the revolution rod (202), and a water-cooled gap is formed between the water-cooled sleeve (203) and the revolution rod (202) and filled with water-cooling medium.

4. The feeding system for high-power electron beam physical vapor deposition of engine blades according to claim 3, characterized in that: The water-cooled jacket (203) is also fitted with an airtight tube, and both ends of the airtight tube are airtightly fitted to form an airtight space.

5. The feeding system for high-power electron beam physical vapor deposition of engine blades according to claim 1, characterized in that: The revolution rod (202) is hollow inside and has several bearings (303). The rotation rod (302) is fitted inside the revolution rod (202) through the bearings (303). The rotation driver (301) is connected to the front end of the rotation rod (302) and drives the rotation rod (302) to rotate. The rear end of the rotation rod (302) is connected to the transmission assembly.

6. The feeding system for high-power electron beam physical vapor deposition of engine blades according to claim 5, characterized in that: The transmission assembly also includes a connecting pin (405), which is coaxially connected to the rear end of the rotating shaft and rotates. The rear end of the connecting pin (405) cooperates with the transmission shaft (404) through a transmission gear pair and drives the transmission shaft (404) to rotate. The transmission shaft (404) cooperates with the tooling seat (401) through a transmission gear pair and drives the tooling seat (401) to rotate synchronously.

7. The feeding system for high-power electron beam physical vapor deposition of engine blades according to claim 1, characterized in that: The rotating frame (4) is also provided with several thermal sensing components (402) at intervals, which are used to detect the temperature at the tooling base (401).

8. The feeding system for high-power electron beam physical vapor deposition of engine blades according to claim 1, characterized in that: The support assembly (5) includes several upper support covers (502) and lower support covers (505). The support driver (501) causes the upper support covers (502) and the lower support covers (505) to close or open. When the upper support covers (502) and the lower support covers (505) are closed, they cooperate with the support rotator rod (202).

9. The feeding system for high-power electron beam physical vapor deposition of engine blades according to claim 8, characterized in that: The upper support cover (502) and the lower support cover (505) are also provided with a support part (503) for supporting the revolution rod (202). The support part (503) includes an arc-shaped support plate. The inner surface of the support plate is provided with a plurality of support rollers or support balls (504). When the support part (503) cooperates with the revolution rod (202), the support balls (504) or support rollers roll in cooperation with the surface of the revolution rod (202).

10. The feeding system for high-power electron beam physical vapor deposition of engine blades according to claim 1, characterized in that: A threaded drive rod (104) is provided at the transverse track (103), and a threaded hole is provided on the transverse seat (102) to cooperate with the threaded drive rod (104); when the transverse driver (101) drives the threaded drive rod (104) to rotate, the transverse seat (102) moves along the extension direction of the transverse track (103).

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