In-situ radiation heating system of high-power electron beam physical vapor deposition equipment

Abstract

The invention relates to the technical field of electron beam physical vapor deposition, is applied to preparation of a thermal barrier coating of a turbine blade of an aero-engine, and particularly relates to an in-situ radiation heating system of high-power electron beam physical vapor deposition equipment, which comprises two heating units which are oppositely arranged and form a heating cavity, the heating unit comprises a shell integrated with a heating element, end covers are arranged at the two ends of the shell, the shell is connected with a driving device through the end covers, and the driving device is used for driving the two end covers to be relatively close to or away from each other. According to the in-situ radiation heating system provided by the invention, the product is heated on the outer side of the vapor deposition chamber, the product is preheated in advance, and vapor deposition treatment can be performed more quickly after the product enters the vapor deposition chamber, so that the effective utilization rate of the vapor deposition chamber can be improved while vapor deposition treatment is realized; and meanwhile, the flexibility and the treatment efficiency of vapor deposition treatment are also improved.

Description

Technical Field

[0001] This invention relates to the field of electron beam physical vapor deposition (EB-PVD) technology, and is applied to the preparation of thermal barrier coatings for aero-engine turbine blades. Specifically, it relates to an in-situ radiation heating system for a high-power electron beam physical vapor deposition equipment. Background Technology

[0002] Electron beam physical vapor deposition (EB-PVD) technology uses a high-energy-density electron beam to bombard, heat, and evaporate a target under high vacuum conditions, forming a thermal barrier coating with high bonding strength and excellent thermal shock resistance on the substrate. It is widely used in the field of protective coating preparation for aero-engine turbine blades.

[0003] Existing electron beam physical vapor deposition (EBPV) equipment mainly includes a deposition chamber, a loading chamber, and a feeding mechanism. The existing heating system heats the material within the deposition chamber, requiring space inside the chamber. Furthermore, the deposition equipment within the chamber is in a standby state during heating, adding an extra waiting period and reducing the chamber's utilization rate. Simultaneously, heating the product within the deposition chamber makes the heating equipment itself susceptible to high temperatures generated by the electron beam emitted from the electron gun, potentially producing impurity vapors that affect the cleanliness of the deposition chamber or the purity of the film formed on the product surface.

[0004] It is evident that existing heating schemes for vapor deposition systems have significant room for improvement and should be optimized to reduce the time occupied by the deposition chamber and increase its utilization rate. Simultaneously, the heating system itself should be protected against high-temperature damage or even direct evaporation caused by the electron beam, ensuring the cleanliness of the deposition chamber and the reliability of the deposited film. Therefore, a more reasonable technical solution is needed to address the existing technical problems. Summary of the Invention

[0005] To address some of the problems existing in the prior art, this invention discloses an in-situ radiation heating system for a high-power electron beam physical vapor deposition apparatus. By moving the heating system outside the loading chamber for preheating, the heating surface is expanded, enabling heating around the workpiece. A relatively independent heating chamber is formed by a supporting opening and closing mechanism to ensure the heating effect, while also achieving internal heat insulation of the system.

[0006] To achieve the above objectives, the heating system disclosed in this invention can adopt the following solution: An in-situ radiation heating system for a high-power electron beam physical vapor deposition apparatus includes two heating units arranged opposite each other to form a heating cavity. Each heating unit includes a housing with integrated heating elements. End caps are provided at both ends of the housing and connected to a driving device through the end caps. The driving device is used to drive the two end caps to move closer or further apart.

[0007] The aforementioned in-situ radiant heating system forms a fixed heating chamber through heating units. The heating units raise the temperature environment within the heating chamber, heating the product entering the chamber and thus achieving preheating treatment before vapor deposition. After preheating, the product can enter the vapor deposition chamber more quickly, greatly improving the efficiency of vapor deposition treatment. At the same time, the interior and exterior of the heating chamber are isolated, and the internal heating does not affect the external ambient temperature, ensuring the stability and reliability of external equipment and structures.

[0008] Furthermore, the specific structure of the heating element can be constructed in various forms and is not limited to a single one. Here, we optimize and propose one feasible option: the heating element includes a heating strip that is reciprocated inside the housing, with the first and second ends of the heating strip connected to an external power supply line. When adopting the above scheme, the heating strip can be made of graphite material, which can generate heat after being powered and used to heat the product; the heating strip made of graphite material is reciprocated in an S-shape inside the housing.

[0009] Furthermore, the mating structure between the heating element and the housing can adopt various schemes and is not limited to one. Here, we optimize and propose one feasible option: the heating element is connected to the housing via a fixing seat. When adopting the above scheme, the fixing seat can be made of various materials. Considering that the heating element generates heat during operation, a high-temperature resistant material, such as ceramic, is required. At the same time, the fixing seat can press the heating element into the housing, for example, the fixing seat can be set in the shape of a pressure plate and connected and fixed to the housing by fasteners such as connecting bolts.

[0010] Furthermore, when the heating element generates heat, it radiates heat in all directions. To concentrate the heat within the heating cavity and prevent the heating element's heat from affecting the external ambient temperature, a heat insulation structure can be installed to maintain the internal temperature environment of the heating cavity. This structure is not limited to a single one; here, we propose one feasible option: an insulation layer is formed inside the shell, and the heating element and shell form a clamping structure around the insulation layer. The insulation layer guides or reflects the heat generated by the heating element in a predetermined direction. When using this solution, the insulation layer adheres to and covers the inner wall of the shell, blocking and reflecting the heat from the heating element, keeping the heat within the heating cavity and reducing heat transfer to the outside.

[0011] Furthermore, since the housing, as the load-bearing component of the entire heating unit, bears the entire weight load of the heating unit, its structure is not uniquely limited. Here, optimization is proposed, and one feasible option is to form several reinforcing ribs on the exterior of the housing. When adopting the above solution, the reinforcing ribs are used to improve the overall structural strength of the housing and maintain its stability.

[0012] Furthermore, the end cap is movably mounted on the housing, sliding up and down relative to the housing to open or close the heating chamber. The mating structure between the end cap and the housing can employ various schemes; here, we optimize and propose one feasible option: the housing has several bearing seats, each with an axle connecting to rollers. The rollers contact and roll along the external guide surface. With this scheme, two bearing seats are provided on the housing corresponding to each end cap, and the two rollers roll in conjunction with the end cap, achieving smoother operation of the end cap.

[0013] Furthermore, when the product is fed into the heating chamber, it is fixed by a supporting feeding shaft that extends from the outside to the inside of the heating chamber. To accommodate the supporting feeding shaft, the structure of the end caps is modified. One feasible option is proposed here: a shaft groove is formed on the end cap to facilitate feeding. When two end caps are joined together, the shaft grooves are spliced ​​to form a shaft hole. In this scheme, the shaft groove is a semi-circular groove, which, after splicing, forms a circular shaft hole. This shaft hole, in conjunction with the supporting feeding shaft, achieves both the axial transport of the product into the heating chamber by the supporting feeding shaft and the insulation of the heating chamber.

[0014] Furthermore, when the supporting feeding shaft extends into the heating chamber, due to its relatively long extension length, strengthening the support can improve its stability. Its structure is not uniquely limited; here, an optimization is proposed, and one feasible option is: a support structure for supporting the feeding shaft is provided at the shaft groove. This support structure includes a support plate with at least two supporting balls or rollers. When the two end caps are joined together, the supporting feeding shaft is surrounded by the two support structures and rotates in cooperation with the supporting balls or rollers. With this solution, the support structure not only supports the feeding supporting shaft but also rolls with it during axial movement, improving the ease of operation and making the feeding action more stable and reliable.

[0015] Furthermore, the drive device works in conjunction with the end caps to achieve the lifting and lowering of the end caps, enabling the relative opening and closing of the end caps. Its structure can be constructed in various forms and is not limited to a single specific form. Here, we optimize and propose one feasible option: the drive device includes a telescopic cylinder, the telescopic end of which connects and cooperates with the end cap to drive the end cap in a reciprocating motion. In this scheme, the drive device and the end cap are arranged in a one-to-one correspondence, with one telescopic cylinder for each end cap.

[0016] Furthermore, during product preheating, the temperature inside the heating chamber needs to be monitored in real time to ensure the preheating effect. Temperature monitoring can be achieved through various methods; here, we optimize and propose one feasible option: the housing is also equipped with a temperature detection element to detect the temperature inside the heating chamber. When using the above method, the temperature monitoring element can be a temperature sensor.

[0017] Compared with the prior art, some of the beneficial effects of the technical solution disclosed in this invention include: The in-situ radiant heating system proposed in this invention heats the product outside the vapor deposition chamber, preheating it in advance. This allows for faster vapor deposition after the product enters the chamber, improving the effective utilization rate of the vapor deposition chamber and enhancing the flexibility and efficiency of the vapor deposition process. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the overall structure of the in-situ radiant heating device.

[0020] Figure 2 This is a schematic diagram of the upper heating unit structure of the in-situ radiant heating device (showing the drive device, temperature monitoring components, etc.).

[0021] Figure 3 This is a schematic diagram of the lower heating unit structure of the in-situ radiant heating device.

[0022] In the above attached figures, the meanings of each label are as follows: 1. Housing; 101. Shaft seat; 102. Axle; 2. End cover; 201. Shaft groove; 202. Limiting strip; 3. Roller; 4. Reinforcing rib; 5. Drive device; 6. Support plate; 7. Support ball; 8. Electrode seat; 9. Thermocouple; 10. Heating element; 11. Insulation layer; 12. Fixing base. Detailed Implementation

[0023] The following description, in conjunction with the accompanying drawings and specific embodiments, further illustrates this embodiment.

[0024] In the existing vapor deposition equipment, the product is preheated after being fed into the vapor deposition chamber, resulting in insufficient effective usage time of the vapor deposition chamber and low vapor deposition efficiency. The following embodiments optimize and overcome the defects of the existing technology.

[0025] Example like Figures 1-3 As shown, this embodiment provides an in-situ radiation heating system for a high-power electron beam physical vapor deposition apparatus, including two heating units arranged opposite each other to form a heating cavity. Each heating unit includes a housing 1 that integrates a heating element 10. End caps 2 are provided at both ends of the housing 1 and are connected to a driving device 5 through the end caps 2. The driving device 5 is used to drive the two end caps 2 to move closer or further apart.

[0026] Preferably, in this embodiment, the two heating units are engaged in the height direction, including an upper heating unit and a lower heating unit.

[0027] The in-situ radiant heating system disclosed in this embodiment forms a fixed heating chamber through a heating unit. The heating unit raises the temperature environment inside the heating chamber, heating the product entering the heating chamber, thereby achieving preheating treatment of the product before vapor deposition. After preheating, the product can enter the vapor deposition chamber more quickly, greatly improving the efficiency of the vapor deposition process. At the same time, the interior and exterior of the heating chamber are isolated, and the internal heating does not affect the external ambient temperature, ensuring the stability and reliability of external equipment and structures.

[0028] The heating element 10 can be constructed in various forms and is not limited to a single one. This embodiment optimizes and adopts one feasible option: the heating element 10 includes a heating strip that is reciprocated inside the housing 1, and the first and second ends of the heating strip are connected to an external power supply line. When the above scheme is adopted, the heating strip can be made of graphite material, which can generate heat after being powered and used to heat the product; the heating strip made of graphite material is reciprocated in an S-shape inside the housing 1.

[0029] Preferably, in this embodiment, the housing 1 is provided with an electrode holder 8, and the heating unit is connected to the Palace Museum electrode holder 8 and an external power supply line.

[0030] The mating structure between the heating element 10 and the housing 1 can adopt various schemes and is not limited to one. This embodiment optimizes and adopts one feasible option: the heating element 10 is connected and mated to the housing 1 via a fixing seat 12. When adopting the above scheme, the fixing seat 12 can be made of various materials. Considering that the heating element 10 generates heat during operation, a high-temperature resistant material, such as ceramic, is required. At the same time, the fixing seat 12 can press the heating element 10 into the housing 1. For example, the fixing seat 12 can be set in the shape of a pressure plate and connected and fixed to the housing 1 by fasteners such as connecting bolts.

[0031] When the heating element 10 generates heat, it radiates heat in all directions. To concentrate the heat within the heating cavity and prevent the heating element 10 from affecting the external ambient temperature, a heat insulation structure can be provided to maintain the internal temperature environment of the heating cavity. This structure is not limited to a single type; this embodiment optimizes and adopts one feasible option: a heat insulation layer 11 is formed inside the housing 1, and the heating element 10 and the housing 1 form a clamping structure around the heat insulation layer 11. The heat insulation layer 11 is used to guide or reflect the heat generated by the heating element 10 in a predetermined direction. When the above solution is adopted, the heat insulation layer 11 adheres to and covers the inner wall of the housing 1, blocking and reflecting the heat from the heating element 10, keeping the heat within the heating cavity and reducing the heat transferred to the outside.

[0032] As the load-bearing component of the entire heating unit, the housing 1 bears the entire weight load of the heating unit. Its structure is not uniquely limited. This embodiment optimizes and adopts one feasible option: several reinforcing ribs 4 are formed on the outside of the housing 1. When the above solution is adopted, the reinforcing ribs 4 are used to improve the overall structural strength of the housing 1 and maintain the stability of the housing 1.

[0033] The end cap 2 is movably mounted on the housing 1, sliding up and down relative to the housing 1 to open or close the heating chamber. The mating structure between the end cap 2 and the housing 1 can employ various schemes; this embodiment optimizes and adopts one feasible option: several bearing seats 101 are formed on the housing 1, and axles 102 connecting rollers 3 are provided at the bearing seats 101. The rollers 3 are used to contact and roll along the external guide surface. With the above scheme, two bearing seats 101 are provided on the housing 1 corresponding to each end cap 2. Through the rolling engagement of two rollers 3 with the end cap 2, the end cap 2 can move more smoothly.

[0034] Preferably, in this embodiment, the roller 3 is provided with a limiting groove, and the corresponding end cap 2 is provided with a limiting strip 202 embedded in the limiting groove.

[0035] When the product is fed into the heating chamber, it is fixed by a supporting feeding shaft that extends from the outside to the inside of the heating chamber. To accommodate the supporting feeding shaft, the structure of the end cap 2 is modified. This embodiment optimizes the design and adopts one feasible option: a shaft groove 201 is formed on the end cap 2 to facilitate feeding. After the two end caps 2 are joined together, the shaft grooves 201 are spliced ​​to form a shaft hole. In this design, the shaft groove 201 is a semi-circular groove, which, after splicing, forms a circular shaft hole. By engaging with the supporting feeding shaft through the shaft hole, the supporting feeding shaft can transport the product into the heating chamber while also ensuring the heat insulation of the heating chamber.

[0036] When the feeding shaft extends into the heating chamber, its stability can be improved by strengthening the support due to its relatively long extension length. The structure is not uniquely limited; this embodiment optimizes the design and adopts one feasible option: a support structure for supporting the feeding shaft is provided at the shaft groove 201. This support structure includes a support plate 6, on which at least two support balls 7 or support rollers 3 are formed. When the two end caps 2 are joined together, the feeding shaft is surrounded by the two support structures and rotates with the cooperation of the support balls 7 or support rollers 3. With this solution, the support structure not only supports the feeding shaft but also rolls with it during axial movement, improving the ease of operation and making the feeding action more stable and reliable.

[0037] The drive device 5 works in conjunction with the end cover 2 to achieve the lifting and lowering of the end cover 2, and to open and close the opposite end cover 2. Its structure can be constructed in various forms and is not limited to a single specific form. This embodiment optimizes and adopts one feasible option: the drive device 5 includes a telescopic cylinder, the telescopic end of which is connected and cooperates with the end cover 2 to drive the end cover 2 to reciprocate. In this scheme, the drive device 5 and the end cover 2 are arranged in a one-to-one correspondence, with one telescopic cylinder provided for each end cover 2.

[0038] When preheating the product, the temperature inside the heating chamber needs to be monitored in real time to ensure the preheating effect. Temperature monitoring can be achieved through various methods; this embodiment optimizes and adopts one feasible option: the housing 1 is also equipped with a temperature detection element for detecting the temperature inside the heating chamber. When using the above method, the temperature monitoring element can be a temperature sensor.

[0039] Preferably, in this embodiment, the temperature sensor includes a thermocouple 9 disposed on the housing.

[0040] The above are the embodiments listed in this example; however, this example is not limited to the optional embodiments described above; those skilled in the art can arbitrarily combine the above methods to obtain other various embodiments; anyone can derive other various forms of embodiments under the guidance of this example. The above specific embodiments should not be construed as limiting the scope of protection of this example; the scope of protection of this example should be determined by the claims.

Claims

1. An in-situ radiation heating system for a high-power electron beam physical vapor deposition apparatus, characterized in that: The heating unit includes two heating units that are arranged opposite each other and form a heating chamber. Each heating unit includes a housing (1) that integrates a heating element (10). End caps (2) are provided at both ends of the housing (1) and a drive device (5) is connected through the end caps (2). The drive device (5) is used to drive the two end caps (2) to move closer or further apart.

2. The in-situ radiation heating system of the high-power electron beam physical vapor deposition apparatus according to claim 1, characterized in that: The heating element (10) includes a heating belt that is reciprocated inside the housing (1), with the beginning and end of the heating belt connected to an external power supply line.

3. The in-situ radiation heating system of the high-power electron beam physical vapor deposition equipment according to claim 2, characterized in that: The heating element (10) is connected to the housing (1) via a mounting base (12).

4. The in-situ radiation heating system of the high-power electron beam physical vapor deposition apparatus according to claim 2 or 3, characterized in that: The interior of the housing (1) forms a heat insulation layer (11), and the heating element (10) and the housing (1) form a clamping structure for the heat insulation layer (11). The heat insulation layer (11) is used to guide or reflect the heat generated by the heating element (10) in a set direction.

5. The in-situ radiation heating system of the high-power electron beam physical vapor deposition apparatus according to claim 1, characterized in that: Several reinforcing ribs (4) are formed on the outside of the shell (1).

6. The in-situ radiation heating system of the high-power electron beam physical vapor deposition apparatus according to claim 1, characterized in that: The housing (1) has several bearing seats (101) formed thereon, and the bearing seats (101) are provided with axles (102) for connecting rollers (3). The rollers (3) are used to contact and roll along the outer guide surface.

7. The in-situ radiation heating system of the high-power electron beam physical vapor deposition apparatus according to claim 1, characterized in that: The end cap (2) has a shaft groove (201) for feeding. When the two end caps (2) are joined together, the shaft groove (201) is spliced ​​to form a shaft hole.

8. The in-situ radiation heating system of the high-power electron beam physical vapor deposition apparatus according to claim 7, characterized in that: The shaft groove (201) is provided with a support structure for supporting the feeding shaft. The support structure includes a support plate (6). At least two support balls (7) or support rollers (3) are formed on the support plate (6). When the two end caps (2) are joined together, the feeding shaft is surrounded by the two support structures and rotates in cooperation with the support balls (7) or support rollers (3).

9. The in-situ radiation heating system of the high-power electron beam physical vapor deposition apparatus according to claim 1, characterized in that: The driving device (5) includes a telescopic cylinder, the telescopic end of which is connected and cooperates with the end cover (2) to drive the end cover (2) to reciprocate.

10. The in-situ radiation heating system of the high-power electron beam physical vapor deposition apparatus according to claim 1, characterized in that: The housing (1) is also provided with a temperature detection device for detecting the internal temperature of the heating chamber.

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