Substrate, liquid discharge apparatus, inspection method, and article manufacturing method

Abstract

Provided is a technique which is advantageous for performing droplet discharge control with high accuracy. A substrate for metering fallen droplets is provided with a glass base material, a metal film disposed on the glass base material, and a liquid repellent film disposed on the metal film. The liquid-repellent film has a thickness of 5 [nm] or more, and contains a fluorine-containing resin. The fluorine-containing resin has, in a side chain, at least one type selected from the group consisting of an alkyl group having 4 or more carbon atoms in which all hydrogen atoms are substituted with fluorine atoms, an alkylene group having 4 or more carbon atoms in which all hydrogen atoms are substituted with fluorine atoms, and a polyoxyethylene group having 4 or more carbon atoms in which all hydrogen atoms are substituted with fluorine atoms.

Description

Technical Field

[0001] This disclosure relates to a substrate, a liquid discharge device, an inspection method, and a method for manufacturing an article. Background Technology

[0002] In manufacturing items such as panels incorporating organic EL (Electro Luminescence) elements, i.e., OLED (Organic Light Emitting Diode) panels (organic EL panels), a method is known to apply a solution (ink) to desired locations on a substrate using a liquid dispensing device. By applying the solution to the substrate, a solution film is formed on the substrate. The solution film, composed of a solution, is a film containing both a solute and a solvent. The solution film applied to the substrate is dried, and the dried film is fired as needed, thereby forming a functional film or other film (layer) on the substrate.

[0003] To fabricate functional components such as organic electroluminescent (EL) devices using liquid ejection systems, high-precision control of the solution coating amount is required. One known method for precisely controlling the solution coating amount involves feeding back information about droplets ejected from the inkjet nozzle and bounced off the substrate onto a control device, and determining ejection conditions based on this droplet information. The control device then uses these determined ejection conditions to control the ejection of the droplets.

[0004] Patent Document 1 discloses a method for determining the volume of a droplet by using the diameter and brightness information of the droplet mark obtained by drying a droplet that has bounced off a glass substrate. Patent Document 2 discloses a method for measuring the bounce position of a droplet, which involves bouncing a droplet off a substrate having a substrate, a light-reflecting layer disposed on the substrate, and a monomolecular water-repellent film disposed on the light-reflecting layer. The measurement is performed based on an image captured by a camera showing the positional relationship between a reference mark and the droplet, thus defining the bounce position of the droplet.

[0005] Existing technical documents

[0006] Patent documents

[0007] Patent Document 1: Japanese Patent Application Publication No. 2017-13000

[0008] Patent Document 2: Japanese Patent Application Publication No. 2010-117441 Summary of the Invention

[0009] The problem that the invention aims to solve

[0010] However, in devices for manufacturing large-screen displays, for example, the number of nozzles is large, and the number of droplets coated on the substrate is also large. Therefore, it can sometimes take a long time to complete the measurement of all droplets. If the pretreatment from when the droplets fall onto the substrate until the measurement of the droplets is completed or from when the droplets fall onto the substrate until the measurement of the droplets is completed takes a long time, the droplets that fall onto the substrate will wet and spread on the substrate. As a result, the diameter of the droplets may change over time, making it difficult to measure the state of the droplets with high precision.

[0011] Methods for solving problems

[0012] One aspect of this disclosure is a substrate for metering falling liquid droplets, characterized by comprising: a glass substrate, a metal film disposed on the glass substrate, and a liquid-repellent film disposed on the metal film, wherein the thickness of the liquid-repellent film is 5 nm or more, and the liquid-repellent film contains a fluorinated resin, wherein the fluorinated resin has at least one side chain selected from alkyl groups having 4 or more carbon atoms whose all hydrogen atoms are replaced by fluorine atoms, alkylene groups having 4 or more carbon atoms whose all hydrogen atoms are replaced by fluorine atoms, and polyoxyethylene groups having 4 or more carbon atoms whose all hydrogen atoms are replaced by fluorine atoms.

[0013] Another aspect of this disclosure is a substrate for measuring the falling droplets, characterized in that it comprises: a glass substrate having a first main surface and a second main surface, a metal film disposed on the first main surface side of the glass substrate, and a liquid-repellent film disposed on the second main surface side of the glass substrate. Attached Figure Description

[0014] Figure 1 (a) A top view (top view) schematically showing the configuration of the liquid discharge device in the first embodiment. (b) A side view schematically showing the configuration of the liquid discharge device in the first embodiment.

[0015] Figure 2 This is a plan view showing the discharge surface of the liquid discharge head according to the first embodiment.

[0016] Figure 3 This is a flowchart of a method for manufacturing an article according to the first embodiment.

[0017] Figure 4 This is a schematic cross-sectional view of the inspection substrate according to the first embodiment.

[0018] Figure 5 An explanatory diagram showing the general formula of perfluorohexyl in Example 1.

[0019] Figure 6 This is a schematic cross-sectional view of the inspection substrate according to the second embodiment.

[0020] Explanation of reference numerals in the attached figures

[0021] 1…Liquid discharge device, 3…Liquid discharge head, 5…Camera (measuring unit), 10…Substrate (object), 15…Calculation unit (measuring unit), 90…Control device (control unit), 100…Inspection substrate (substrate), 101…Substrate (glass substrate), 102…Metal film, 103…Liquid-repellent film Detailed Implementation

[0022] Referring to the accompanying drawings, the substrate, liquid discharge device, liquid discharge method, inspection method, and method for manufacturing an article using the liquid discharge device, etc., according to the embodiments will be described. It should be noted that the embodiments shown below are illustrative, and those skilled in the art can appropriately modify the details without departing from the spirit of the invention.

[0023] In the following description of the embodiments and examples, unless otherwise specified, elements indicated by the same reference numerals have the same function. In the accompanying drawings, when multiple identical elements are arranged, the assignment and description of reference numerals are sometimes omitted.

[0024] In addition, for the convenience of illustration and explanation, sometimes the accompanying drawings are used to represent the actual objects. Therefore, the shape, size, and arrangement of the elements shown in the drawings are not always strictly consistent with the actual objects.

[0025] Furthermore, in the following explanation, directions are represented using the XYZ coordinate system, which is an orthogonal coordinate system. The X-axis, Y-axis, and Z-axis are mutually orthogonal. The direction of the X-axis is also called the X-direction, the direction of the Y-axis is also called the Y-direction, and the direction of the Z-axis is also called the Z-direction. For example, when denoted as the positive direction of the X-axis, it refers to the same direction as the direction pointed to by the X-axis arrow in the illustrated coordinate system; when denoted as the negative direction of the X-axis, it refers to the direction 180° opposite to the direction pointed to by the X-axis arrow in the illustrated coordinate system. Furthermore, when abbreviated as the X-direction, it is independent of the difference between the direction pointed to by the X-axis arrow in the illustrated system and refers to the direction parallel to the X-axis. The same applies to the Y-axis and Z-axis, which are other than the X-axis. Additionally, for example, a plane containing the X-axis and Y-axis is represented as the XY plane.

[0026] Furthermore, the term "main component" in this specification, when there are multiple components (materials) constituting the object, refers to the component that is expressed by weight as the largest component, meaning that the component accounts for 50% or more by weight. Additionally, in the following description, weight percentage may sometimes be expressed as wt%.

[0027] Furthermore, in this specification, the liquid processed by the liquid discharge head is sometimes referred to as "ink." The ink involved in the embodiments is not limited to liquids containing recording materials used to form text and images. For example, ink may be a liquid containing functional materials used to form functional thin films such as electrodes and filters, functional elements such as organic EL elements, or a liquid containing insoluble solid components.

[0028] Furthermore, the act of applying liquid to an object is sometimes referred to as "recording," and this recording is not necessarily limited to recording text, images, or other information. For example, it also includes applying liquid to an object for the purpose of manufacturing functional films, functional components, three-dimensional objects, and other similar items. Additionally, the object to which liquid is applied is sometimes described as a "recording medium," which is not limited to media used for recording text, images, or other information, but also includes components (such as substrates) that serve as base materials for manufacturing functional films, functional components, three-dimensional objects, and other similar items.

[0029] [First Implementation Method]

[0030] Figure 1 (a) A top view schematically showing the configuration of the liquid discharge device 1 in the first embodiment. Figure 1 (b) A side view schematically showing the configuration of the liquid discharge device 1 in the first embodiment. It will be explained that... Figure 1 (a) and Figure 1 In (b), for ease of illustration, only a portion of the configuration of the liquid discharge device 1 is shown. The liquid discharge device 1 is, for example, a recording device. The liquid discharge device 1 includes a liquid discharge head 3 and a control device 90, which is an example of a control unit. The control device 90 is configured to control the entire liquid discharge device 1. For example, the control device 90 controls the liquid discharge head 3. Figure 2 This is a plan view showing the discharge surface of the liquid discharge head 3 according to the first embodiment.

[0031] The substrate 10, which is the object to be coated with the liquid discharged from the liquid discharge head 3, is positioned at a predetermined position on the platform 9, which serves as a substrate holding section. The platform 9 is arranged on the base 11 for scanning in the Y direction. At the predetermined position where the substrate 10 is positioned, an inspection substrate 100 can be provided instead of the substrate 10. The liquid discharge head 3 has a plurality of nozzles 20. The plurality of nozzles 20 are arranged opposite to the substrate 10. Droplets are discharged from each nozzle 20. The main scanning guide 7 extends in the X direction, which is the main scanning direction, and is supported by a support member 8. A main scanner 4, which can move along the main scanning guide 7 in the X direction, is mounted on the main scanning guide 7. A liquid discharge unit 2 is mounted on the main scanner 4. A liquid discharge head 3 is mounted on the liquid discharge unit 2. The liquid discharge head 3 is positioned at a height separated from the substrate 10 by a predetermined interval in the Z direction, and can scan freely along the main scanning guide 7 in the X direction.

[0032] Liquid is supplied from liquid tank 12 to liquid discharge head 3 through liquid supply path 13, and unused liquid is returned to liquid tank 12 through liquid discharge path 14.

[0033] The substrate 10 is a glass substrate. The liquid is, for example, ink used to form organic EL elements. A liquid discharge head 3 is equipped with a liquid discharge element, which applies pressure to the ink by, for example, the deformation of a piezoelectric element or the boiling generated by a heating element, thus discharging ink droplets (liquid droplets) from the nozzle 20. If the substrate 10 is placed at a predetermined position on the platform 9, the platform 9 scans in the Y direction, and the liquid discharge head 3 scans in the X direction along the main scanning guide 7. The platform 9 and the liquid discharge head 3 move until the liquid discharge head 3 reaches the droplet bounce area on the substrate 10. At the moment the liquid discharge head 3 reaches the droplet bounce area on the substrate 10, ink droplets (liquid droplets) are discharged from the liquid discharge head 3 onto the substrate 10.

[0034] The liquid discharge device 1 includes a camera 5 and a computing unit 15 as an example of a measuring unit. The computing unit 15 is an information processing device, such as a computer with a processor. When checking (measuring) the discharge status of droplets discharged from each nozzle 20 of the liquid discharge head 3, the inspection substrate 100 is placed at a predetermined position on the platform 9. The control device 90 controls the liquid discharge head 3 to discharge droplets onto the surface of the inspection substrate 100, and photographs the droplets that bounce off the surface of the inspection substrate 100 with the camera 5. The computing unit 15 acquires the image from the camera 5 via the communication unit 16, and measures the state of the droplets based on the image. The control device 90 obtains the measurement result of the droplets from the computing unit 15, determines the discharge conditions of the droplets based on the measurement result, and saves the discharge conditions in a memory. As for the control device 90, when the droplets are discharged onto the substrate 10 to form a solution film on the substrate 10, the discharge of droplets from each nozzle 20 of the liquid discharge head 3 is controlled according to the discharge conditions saved in the memory. Specifically, the control device 90 controls the discharge of droplets based on a signal applied to the liquid discharge element.

[0035] When droplets are bounced onto the designated droplet-bounce area of ​​the inspection substrate 100, the control device 90 uses the main scanning guide 7 and the platform 9 to adjust the relative position of the inspection substrate 100 and the camera 5, ejecting droplets from each nozzle 20 a specified number of times. If not all the bounced droplets are captured in a single image, the control device 90 changes the relative position of the inspection substrate 100 and the camera 5, taking images from multiple different relative positions in the camera 5.

[0036] When taking a picture in camera 5, the surface of the inspection substrate 100 is illuminated by an illumination device 6, such as coaxial incident illumination or diffuse illumination. When the surface of the inspection substrate 100 is photographed in camera 5 using coaxial incident illumination, the resulting image is a dark image of the dropped droplet and a bright image of the inspection substrate 100. When the surface of the inspection substrate 100 is photographed in camera 5 using diffuse illumination, the resulting image is a bright image of the dropped droplet and a dark image of the inspection substrate 100. Based on the brightness information in the image, the droplet is identified, and the shape, position, volume (size), and other states of the identified droplet are analyzed.

[0037] When using camera 5 for imaging, stopping the main scanning rail 7 and platform 9 at the imaging position each time takes time; therefore, it is preferable to scan and image simultaneously. To obtain an image that suppresses blurring caused by scanning and imaging, it is preferable to use a flash with a short illumination time. It is preferable to synchronize the flash illumination timing with the timing of camera 5 imaging using a trigger signal. Furthermore, to shorten imaging time, multiple cameras 5 can be arranged side-by-side.

[0038] The volume of the droplets discharged from the liquid discharge head 3 is preferably 0.5 [pl] or more and 10.0 [pl] or less.

[0039] The ink discharged from the liquid discharge head 3 can be either aqueous or non-aqueous. In particular, for the manufacture of organic EL elements, non-aqueous ink is preferred. Examples of non-aqueous ink include solutions of various polymers and organic materials such as UV-curable resins and organic EL materials in which various pigments used for color filter formation are dispersed.

[0040] like Figure 2 As shown, the liquid discharge head 3 has multiple chips 40 with identical configurations. Each of the multiple chips 40 has two or more nozzles 20 and a temperature measuring section 50. In each chip 40, two or more nozzles 20 are arranged in one or more rows. Figure 2 The nozzles are arranged in two columns.

[0041] The temperature sensing unit 50 has a temperature sensor (not shown) disposed near the ink inside the corresponding chip. The temperature sensor can utilize various contact-type temperature sensors such as resistive temperature sensors or thermocouples, and preferably can accurately measure the set temperature under discharge conditions. By using the temperature sensor to adjust the temperature of the liquid discharge head 3, even when using non-aqueous ink, the ink viscosity can be suppressed according to temperature changes, ensuring a stable supply of ink to the liquid discharge head 3 and stable discharge of ink from the liquid discharge head 3.

[0042] Regarding the temperature sensor, if it is a resistive thermometer, a platinum resistance thermometer can measure temperature with high accuracy. As for the arrangement of the nozzles 20 of each chip 40, they are arranged in a manner that allows for overlapping portions in the X-direction between the chips. Figure 2 In this configuration, the temperature measuring unit 50 may be disposed in only one location in each chip 40, or it may be disposed in multiple locations in each chip 40. If each chip 40 includes multiple temperature measuring units 50, the temperature distribution within each chip 40 can be measured. When measuring the temperature distribution, it is preferable to arrange the multiple temperature measuring units 50 in the X direction.

[0043] Figure 3 This is a flowchart of a method for manufacturing an article according to the first embodiment. The method for manufacturing an article includes an inspection step, a pre-process, and a manufacturing step. First, the inspection step will be described. The inspection step is an example of an inspection method (measuring method).

[0044] In step S1, the control device 90 controls a conveying mechanism (not shown) to place the inspection substrate 100 on the conveying mechanism at a predetermined position on the platform 9.

[0045] In step S2, the control device 90 uses the main scanning guide 7 and the platform 9 to adjust the relative position of the inspection substrate 100 and the camera 5. If the liquid discharge head 3 reaches the designated droplet drop area on the inspection substrate 100, the control device 90 scans the liquid discharge head 3 along the main scanning guide 7 while discharging droplets from each nozzle 20 of the liquid discharge head 3. The control device 90 discharges droplets from each nozzle 20 a specified number of times.

[0046] In step S3, the control device 90 captures images of droplets that fall onto the inspection substrate 100 on the camera 5. The camera 5 scans along the main scanning guide 7 in the X direction together with the liquid discharge head 3, while capturing images of droplets that fall onto the surface of the inspection substrate 100 that are being scanned in the Y direction.

[0047] In step S4, the communication unit 16 and the computing unit 15 acquire a camera image from the camera 5, perform image analysis on the camera image, and measure the state of the droplet. The measurement result of the droplet is information about the state of the droplet. The information about the droplet includes at least one of the following: the volume (size) of the droplet, the position of the droplet, and the shape of the droplet. Steps S1 to S4 above constitute the inspection process.

[0048] Next, the preceding steps will be explained. First, in step S5, the control device 90 obtains information about the droplets as a metering result from the calculation unit 15. Based on the metering result, the control device 90 determines the discharge conditions of the liquid discharge head 3. The discharge conditions can be the optimal combination of all nozzles 20, or the discharge waveform and discharge timing of the signal applied to the liquid discharge element of each nozzle 20. Next, in step S6, the control device 90 controls a conveying mechanism (not shown) to remove the inspection substrate 100, which is set at a predetermined position on the platform 9, and to set the substrate 10 at the predetermined position on the platform 9. Steps S5 and S6 above constitute the preceding steps.

[0049] Next, the manufacturing process will be described. Step S7 is the manufacturing process. In step S7, the control device 90 discharges droplets from each nozzle 20 towards the dam on the substrate 10.

[0050] The inspection substrate 100 will be described below. Figure 4 This is a schematic cross-sectional view of the inspection substrate 100 according to the first embodiment. The inspection substrate 100 is a substrate for inspection (measuring). The inspection substrate 100 is a substrate with a different configuration than the substrate 10. The inspection substrate 100 is used for inspection of the liquid discharge device 1. That is, the inspection substrate 100 is a substrate that causes droplets discharged from the liquid discharge head 3 to fall off and be captured by the camera 5.

[0051] The inspection substrate 100 includes a substrate 101, a metal film 102, and a liquid-repellent film 103. The metal film 102 is arranged to overlap part or all (in the first embodiment, all) of the main surface 111 of the substrate 101 in a direction D1 perpendicular to the main surface 111. The inspection substrate 100 is rectangular in plan view (in direction D1). The liquid-repellent film 103 is disposed on the metal film 102. In the first embodiment, the substrate 101 and the metal film 102 are directly laminated, and the metal film 102 and the liquid-repellent film 103 are directly laminated. The liquid-repellent film 103 is the surface layer of the inspection substrate 100.

[0052] The surface of the substrate 100 is inspected as the surface 110 of the liquid-repellent film 103. It should be noted that an additional layer, such as an adhesive film, can be disposed between the substrate 101 and the metal film 102. The adhesive film is disposed to improve the adhesion between the substrate 101 and the metal film 102, and is made of a different material than the substrate 101 and the metal film 102. The liquid-repellent film 103 is a film with liquid-repellent properties.

[0053] The substrate 101 is a glass substrate using glass material. The glass material used for the substrate 101 preferably has a low coefficient of linear expansion and minimal shape change due to temperature variations. Examples of glass materials include quartz glass, borosilicate glass, and alkali-free glass. The thickness T1 of the substrate 101 is preferably 1 mm or less.

[0054] The metal film 102 preferably contains, for example, chromium, aluminum, and silver as a main component. More preferably, the metal film 102 contains chromium as a main component among chromium, aluminum, and silver.

[0055] The metal film 102 can be formed on the main surface 111 of the substrate 101 using methods such as vapor deposition or sputtering. Regarding the metal film 102, a portion of the surface may be oxidized, or a portion of the surface may be roughened. The thickness T2 of the metal film 102 is preferably 10 nm or more. If the thickness of the metal film 102 is less than 10 nm, the image may sometimes be projected through the opposite side of the substrate, potentially resulting in a less clear image.

[0056] The liquid-repellent film 103 is formed directly on the metal film 102. The liquid-repellent film 103 contains a fluorinated resin as an organic compound. The fluorinated resin has at least one side chain selected from alkyl groups with 4 or more carbon atoms whose entire hydrogen atoms are replaced by fluorine atoms, alkylene groups with 4 or more carbon atoms whose entire hydrogen atoms are replaced by fluorine atoms, and polyethylene oxides with 4 or more carbon atoms whose entire hydrogen atoms are replaced by fluorine atoms. When the number of carbon atoms is 3 or less, the fluorine in the side chains does not aggregate on the surface of the substrate being inspected, resulting in insufficient liquid repellency.

[0057] The side chains of the fluorinated resin are preferably alkyl, alkylene, and polyethylene oxide. Alkyl groups readily aggregate on the surface 110 of the liquid-repellent membrane 103, thereby increasing the fluorine / carbon elemental ratio of the surface 110 of the liquid-repellent membrane 103, as described later.

[0058] The carbon number is preferably in the range of 6 or more and 8 or less. If the carbon number is in the range of 6 or more and 8 or less, the water repellency and adhesion of the liquid-repellent film 103 become sufficient. If the carbon number is 5 or less, if a highly hydrophobic solvent is used in the ink, sufficient liquid repellency may not be obtained in the liquid-repellent film 103. On the other hand, if the carbon number is 9 or more, the hydrophobicity is excessively increased, and depending on the type of metal film 102 used as the substrate, the adhesion of the liquid-repellent film 103 may become insufficient.

[0059] The main chain of the fluorinated resin is not particularly limited as long as it is an organic structure, but is preferably selected from at least one of polyacrylate, polymethacrylate, polyvinyl ether, and polyolefin. The fluorinated groups in the side chains have the effect of improving the liquid repellency of the surface 110. The soft organic structure of the main chain makes it easy for the fluorinated groups to aggregate on the surface 110 of the liquid-repellent film 103 during film formation, thereby further improving the liquid repellency of the surface 110.

[0060] Regarding the main chain of the fluorinated resin, among the aforementioned polyacrylate, polymethacrylate, polyvinyl ether, and polyolefin, polyacrylate and polymethacrylate are more preferred. This is because the side chains are densely provided with fluorinated groups, and the oxygen atoms in the main chain contribute to improved adhesion to the metal layer serving as the substrate.

[0061] When the weight of the liquid-repellent membrane 103 is set to 100%, the content of the fluorinated resin in the liquid-repellent membrane 103 is preferably 70% by weight or more. If the content of the fluorinated resin is less than 70% by weight, the liquid-repellent properties of the fluorinated groups in the side chains are sometimes not sufficiently obtained. The content of the fluorinated resin in the liquid-repellent membrane 103 is more preferably 90% by weight or more.

[0062] Regarding the liquid-repellent film 103, a solution of liquid-repellent resin is applied to the metal film 102 by appropriate known methods such as spraying, dipping, or coating using a dispenser.

[0063] The thickness T3 of the liquid-repellent film 103 is 5 nm or more. If the thickness T3 of the liquid-repellent film 103 is less than 5 nm, the liquid-repellent film 103 does not cover the surface of the metal film 102 with sufficient thickness, and cannot suppress the wetting and spreading of droplets.

[0064] The thickness T3 of the liquid-repellent film 103 is preferably 7.5 nm or more. If the thickness T3 is 7.5 nm or more, the surface of the metal film 102 can be covered with the liquid-repellent film 103 with sufficient thickness, and the fluorinated groups of the side chains on the surface 110 of the liquid-repellent film 103 are easy to aggregate, thereby improving the effect of inhibiting the wetting and spreading of droplets.

[0065] The thickness T3 of the liquid-repellent membrane 103 is preferably less than 100 nm. If the thickness T3 of the liquid-repellent membrane 103 is less than 100 nm, the focus deviation is small, which can reduce brightness unevenness, obtain an image with a clear outline of the droplet, and enable high-precision image measurement.

[0066] The thickness T3 of the liquid-repellent film 103 is preferably 50 nm or less. If the thickness T3 is 50 nm or less, the thickness unevenness of the liquid-repellent film 103 can be reduced even when the size of the inspection substrate 100 is large.

[0067] The fluorine / carbon elemental ratio of the surface 110 of the liquid-repellent film 103 is preferably 2 or more. If the fluorine / carbon elemental ratio of the surface 110 of the liquid-repellent film 103 is 2 or more, the liquid repellency and its stability can be further improved by the fluorine-containing groups in the side chains aggregated on the surface 110.

[0068] The contact angle of the droplet at the surface 110 of the liquid-repellent film 103 is preferably 70° or more. If the contact angle is 70° or more, the thickness around the droplet profile increases, thereby effectively suppressing wetting spread.

[0069] When light with a wavelength in the range of 380 nm or more and 780 nm or less is irradiated onto the inspection substrate 100 from the liquid-repellent membrane 103 side, the average reflectivity of the light is preferably 10% or more. If the average reflectivity of the inspection substrate 100 is 10% or more, the contrast between the droplet on the inspection substrate 100 and its surrounding area is increased, and image measurement can be performed with high precision.

[0070] In order to ensure that all the droplets discharged from the multiple nozzles 20 of the liquid discharge head 3 bounce off the inspection substrate 100, the length of one side of the inspection substrate 100 is preferably 1 [m] or more.

[0071] Based on the above-described inspection substrate 100, in Figure 3 During the inspection process, it is possible to suppress the wetting and expansion of droplets that bounce off the inspection substrate 100, and to suppress the change in droplet diameter over time. Therefore, in Figure 3 During the inspection process, the computing unit 15 can accurately measure the state of the droplets from the camera images. Therefore, in Figure 3 In the preceding processes, the discharge conditions can be determined with high precision. Figure 3In the manufacturing process, the control device 90 is capable of highly precise control of droplet discharge based on discharge conditions. Thus, according to the first embodiment, a technique advantageous for highly precise droplet discharge control is provided.

[0072] [Example]

[0073] Hereinafter, Examples 1 and 2 and Comparative Example 1, which represent the experimental results, will be described.

[0074] (1) Thickness measurement

[0075] Using a spectroscopic ellipsometer (VASE manufactured by Japan Co., Ltd.), measurements were taken at 1 nm intervals from wavelength 380 nm to 800 nm. The measurement results were analyzed, and the thickness was determined from these results.

[0076] (2) Measurement of reflectance

[0077] The absolute reflectance was measured at wavelengths from 380 nm to 780 nm using a reflectance meter (USPM-RU manufactured by Olympus Corporation), and the average reflectance was calculated.

[0078] (3) Evaluation of contact angle

[0079] The contact angle of a droplet of ink [2 μl] in contact with the substrate surface was measured using a fully automatic contact angle meter (DM-701 manufactured by Kyowa Interface Co., Ltd.) at 23°C and 40% RH.

[0080] (4) Determination of the fluorine / metal element ratio on the substrate surface

[0081] Using an X-ray photoelectron spectrometer (QuanteraII manufactured by Alback Fai Co., Ltd.), the atomic weights of fluorine and carbon on the substrate surface were measured by the detection intensity at beam conditions of 100 μm, 25 W, and 15 kV, and the elemental ratio of fluorine to carbon was determined.

[0082] [Example 1]

[0083] As substrate 101, an alkali-free glass substrate with a thickness of 0.5 mm and a diameter of 6 cm × 6 cm is prepared. On the main surface 111 of substrate 101, a chromium film with a thickness of 50 nm is formed as a metal film 102, the surface of which has been oxidized.

[0084] A hydrofluoroether (HFE) solution with a concentration of 1 wt% and a main chain of polymethacrylate and a side chain of perfluorohexyl groups was prepared. The HFE solution was coated onto a chromium film using a slot coater (MIKASA Corporation 1H-DV2) to form a liquid-repellent film 103 with a thickness of 10 nm, thereby fabricating an inspection substrate 100.

[0085] Film formation was carried out at room temperature of 25°C. Regarding the rotation conditions of the slot coater, the rotation speed was set to 3000 rpm and the rotation time to 20 seconds.

[0086] Figure 5 An explanatory diagram illustrating the general formula of perfluorohexyl in Example 1 is provided. Using a UV-curable resin ink containing white pigment, the contact angle of the inspection substrate 100, measured using a contact angle meter, is 80°. The average reflectance of the inspection substrate 100 is 20%. Furthermore, the fluorine / metal element ratio of the surface 110 of the liquid-repellent film 103 is 8.

[0087] Five [pl] of UV-curable resin ink was dispensed from the droplet droplet area on the inspection substrate 100. Coaxial epi-illumination and a camera 5 were used to measure the droplets that fell onto the inspection substrate 100. The diameter of the droplets at the time of droplet droplet drop was 30.2 [μm]. The wetting spread of the droplet diameter after 1 minute was measured to an effective measurement accuracy of 0.1 [μm] or less, and the change in volume was 1% or less.

[0088] [Example 2]

[0089] In Example 2, the inspection substrate 100 was prepared using the same method as in Example 1, except that the concentration of the hydrofluoroether (HFE) solution of polymethacrylate with perfluorohexyl group was set to 0.8 [wt%].

[0090] The thickness of the liquid-repellent film 103 is 8 nm. Using a UV-curable resin ink containing white pigment, the contact angle of the inspection substrate 100, measured using a contact angle meter, is 79°. The average reflectance of the inspection substrate 100 is 20%. Furthermore, the fluorine / metal element ratio of the surface 110 of the liquid-repellent film 103 is 6.

[0091] Five plc of UV-curable resin ink was dispensed from the droplet droplet area on the inspection substrate 100. Coaxial epi-illumination and a camera 5 were used to measure the droplets dropped onto the inspection substrate 100. The diameter of the droplets at the time of droplet droplet droplet droplet droplet droplet droplet droplet diameter was 30.5 μm. After 1 minute, the droplet diameter of the droplet droplet droplet droplet droplet droplet diameter increased by 0.3 μm, which translates to a volume change of 3%.

[0092] [Comparative Example 1]

[0093] In Comparative Example 1, the inspection substrate was prepared using the same method as in Example 1, except that the concentration of the hydrofluoroether (HFE) solution of polymethacrylate containing perfluorohexyl was set to 0.1 [wt%].

[0094] The thickness of the liquid-repellent film is 2 nm. Using a UV-curable resin ink containing white pigment, the contact angle of the inspection substrate, measured with a contact angle meter, is 69°. The average reflectance of the inspection substrate is 20%. Furthermore, the fluorine / metal element ratio on the surface of the liquid-repellent film is 0.8.

[0095] Five [pl] of UV-curable resin ink was dispensed from the droplet droplet area on the inspection substrate of Comparative Example 1. Coaxial epi-illumination and a camera were used to measure the droplets dropped onto the inspection substrate. The diameter of the droplets at the time of droplet droplet droplet droplet drop was 32.7 [μm]. One minute after droplet drop, the wetting expansion of the droplet diameter was 1 [μm], which, converted to volume, represents a change of over 10%.

[0096] On the inspection substrate 100 fabricated in Examples 1 and 2, the size change of the droplet from its initial impact to its wetting and expansion within one minute is less than 1 μm, and the resulting volume change is also only a few percent, having little impact on measurement accuracy. On the other hand, on the inspection substrate fabricated in Comparative Example 1, the size change of the droplet exceeds 1 μm, and the volume change exceeds 10%. Therefore, it is confirmed that the inspection substrate 100 fabricated in Examples 1 and 2 is superior to the inspection substrate of Comparative Example 1.

[0097] [Second Implementation]

[0098] The second embodiment will be described below. Hereinafter, elements marked with reference numerals common to the first embodiment will have substantially the same structure and function as those described in the first embodiment, unless otherwise specified, and the description will focus on the parts that differ from the first embodiment.

[0099] The following describes the inspection substrate 100B. Figure 6 This is a schematic cross-sectional view of the inspection substrate 100B according to the second embodiment. The inspection substrate 100B is a substrate for inspection (measuring). The inspection substrate 100B has a different configuration than the substrate 10. The inspection substrate 100B is used for inspection of the liquid discharge device 1. That is, the inspection substrate 100B is the substrate from which liquid droplets discharged from the liquid discharge head 3 are bounced off and captured by the camera 5.

[0100] The inspection substrate 100B includes a substrate 101, a metal film 102, and a liquid-repellent film 103B. The metal film 102 is arranged to overlap part or all (in the second embodiment, all) of the main surface 112 of the substrate 101 in a direction D2 perpendicular to the main surface 112 of the substrate 101. The main surface 111 is an example of a first main surface, and the main surface 112 is an example of a second main surface. The main surface 112 is the main surface opposite to the main surface 111. The liquid-repellent film 103B is disposed on the main surface 111 side of the substrate 101, and the metal film 102 is disposed on the main surface 112 side of the substrate 101. The inspection substrate 100B is rectangular in plan view (in direction D1). The liquid-repellent film 103B is arranged to overlap part or all (in the second embodiment, all) of the main surface 111 of the substrate 101 in a direction D1 perpendicular to the main surface 111 of the substrate 101. In the second embodiment, the substrate 101 is directly laminated with the metal film 102, and the substrate 101 is directly laminated with the liquid-repellent film 103B. The liquid-repellent film 103B is the surface layer of the inspection substrate 100B.

[0101] The surface of substrate 100B is inspected as surface 110 of the liquid-repellent film 103B. It should be noted that additional layers, such as adhesive films, may be disposed between substrate 101 and metal film 102, and between substrate 101 and liquid-repellent film 103B. These adhesive films are disposed to improve adhesion to substrate 101 and metal film 102, or to substrate 101 and liquid-repellent film 103B, and are made of a different material than substrate 101 and metal film 102. Liquid-repellent film 103B is a liquid-repellent film.

[0102] The substrate 101 is a glass substrate using glass material. The glass material used for the substrate 101 preferably has a low coefficient of linear expansion and minimal shape change due to temperature variations. Examples of glass materials include quartz glass, borosilicate glass, and alkali-free glass. The thickness T1 of the substrate 101 is preferably 1 mm or less.

[0103] The metal film 102 preferably contains, for example, chromium, aluminum, and silver as a main component. More preferably, the metal film 102 contains chromium as a main component among chromium, aluminum, and silver.

[0104] The metal film 102 can be formed on the main surface 112 of the substrate 101 using methods such as vapor deposition or sputtering. Regarding the metal film 102, a portion of the surface may be oxidized, or a portion of the surface may be roughened. The thickness T2 of the metal film 102 is preferably 10 nm or more. If the thickness of the metal film 102 is less than 10 nm, the opposite side of the substrate may sometimes transmit through and project into the photographic image, potentially resulting in a less clear image.

[0105] The liquid-repellent membrane 103B is formed directly on the main surface 111 of the substrate 101. The liquid-repellent membrane 103B is preferably a polymer membrane or a monolayer containing a fluoropolymer resin as an organic compound.

[0106] When the liquid-repellent film 103B is a polymer film containing fluoropolymer, a solution of the liquid-repellent resin is applied to the main surface 111 of the substrate 101 by a suitable known method such as spraying, dipping, or coating using a dispenser. Examples of polymer films include acrylic fluoropolymers and fluorinated silane coupling agents.

[0107] When the liquid-repellent membrane 103B is a monomolecular membrane containing a fluorinated resin, it is coated onto the main surface 111 of the substrate 101 using a known method. The monomolecular membrane preferably contains fluorine atoms in its side chains. Examples of monomolecular membranes include 1H, 1H, 2H, 2H-perfluorooctyltriethoxysilane and trimethoxy(1H, 1H, 2H, 2H-heptadecyl)silane.

[0108] There is no particular limitation on the thickness T3 of the liquid-repellent film 103B, but it is preferably 5 nm or more. If the thickness T3 of the liquid-repellent film 103B is less than 5 nm, the liquid-repellent film 103B may not cover the main surface 111 of the substrate 101 with sufficient thickness, which may not be able to suppress the wetting and spreading of droplets.

[0109] The thickness T3 of the liquid-repellent film 103B is preferably 7.5 nm or more. If the thickness T3 is 7.5 nm or more, the main surface 111 of the substrate 101 can be covered with the liquid-repellent film 103B with sufficient thickness, and the fluorinated groups of the side chains on the surface 110 of the liquid-repellent film 103B are easy to aggregate, thereby improving the effect of inhibiting the wetting and spreading of droplets.

[0110] The thickness T3 of the liquid-repellent membrane 103B is preferably less than 100 nm. If the thickness T3 of the liquid-repellent membrane 103B is less than 100 nm, the focus deviation is small, which can reduce brightness unevenness, obtain an image with a clear droplet outline, and enable high-precision image measurement.

[0111] The thickness T3 of the liquid-repellent film 103B is preferably 50 nm or less. If the thickness T3 is 50 nm or less, even if the size of the inspection substrate 100B is large, the thickness unevenness of the liquid-repellent film 103B can be reduced.

[0112] The fluorine / carbon elemental ratio of the surface 110 of the liquid-repellent film 103B is preferably 2 or more. If the fluorine / carbon elemental ratio of the surface 110 of the liquid-repellent film 103B is 2 or more, the liquid repellency and its stability can be further improved by the fluorine-containing groups in the side chains aggregated on the surface 110.

[0113] The contact angle of the droplet at the surface 110 of the liquid-repellent film 103B is preferably 70° or more. If the contact angle is 70° or more, the thickness around the droplet profile increases, thereby effectively suppressing wetting spread.

[0114] When light with a wavelength in the range of 380 nm or more and 780 nm or less is irradiated onto the inspection substrate 100B from the liquid-repellent membrane 103B side, the average reflectivity of the light is preferably 10% or more. If the average reflectivity of the inspection substrate 100B is 10% or more, the contrast between the droplet on the inspection substrate 100B and its surrounding area is increased, enabling high-precision image measurement.

[0115] In order to ensure that all the droplets discharged from the multiple nozzles 20 of the liquid discharge head 3 bounce off the inspection substrate 100B, the length of one side of the inspection substrate 100B is preferably 1 [m] or more.

[0116] Based on the above-described inspection substrate 100B, in Figure 3 During the inspection process, it is possible to suppress the wetting and expansion of droplets that bounce off the inspection substrate 100B onto the inspection substrate 100B, and to suppress changes in the droplet diameter over time. Furthermore, since the metal film 102 is disposed on the main surface 112 of the substrate 101, the brightness of the periphery of the droplets discharged from the surface 110 of the liquid-repellent film 103B is increased. This increased brightness at the droplet periphery improves the contrast between the droplet and its periphery. Therefore, in Figure 3 During the inspection process, the calculation unit 15 can accurately measure the state of the droplets using the camera image. Therefore, in Figure 3 In the preceding processes, the discharge conditions can be determined with high precision. Figure 3 In the manufacturing process, the control device 90 is capable of highly precise control of droplet discharge based on discharge conditions. Thus, according to the second embodiment, a technique advantageous for highly precise droplet discharge control is provided.

[0117] [Example]

[0118] Hereinafter, Examples 3 to 5 and Comparative Examples 2 and 3, which represent the experimental results, will be described.

[0119] (1) Thickness measurement

[0120] Using a spectroscopic ellipsometer (VASE manufactured by Japan Co., Ltd.), measurements were taken at 1 nm intervals from wavelength 380 nm to 800 nm, and the thickness was determined by analyzing the measurement results.

[0121] (2) Measurement of reflectance

[0122] The absolute reflectance was measured at wavelengths from 380 nm to 780 nm using a reflectance meter (USPM-RU manufactured by Olympus Corporation), and the average reflectance was calculated.

[0123] (3) Evaluation of contact angle

[0124] The contact angle of a droplet of ink [2 μl] in contact with the substrate surface was measured using a fully automatic contact angle meter (DM-701 manufactured by Kyowa Interface Co., Ltd.) at 23°C and 40% RH.

[0125] (4) Determination of the fluorine / metal element ratio on the substrate surface

[0126] Using an X-ray photoelectron spectrometer (QuanteraII manufactured by Alback Fai Co., Ltd.), the atomic weights of fluorine and carbon on the substrate surface were measured by the detection intensity at beam conditions of 100 μm, 25 W, and 15 kV, and the elemental ratio of fluorine to carbon was determined.

[0127] (5) Measurement of droplet diameter

[0128] Using a telecentric lens (4x magnification) and a camera (2560×1920 pixels, 0.638 μm / pixel resolution), droplets bouncing off a substrate were photographed using coaxial incident illumination. Image processing was employed to measure the droplet diameter.

[0129] [Example 3]

[0130] As substrate 101, an alkali-free glass substrate with a thickness of 0.5 mm and a diameter of 6 cm × 6 cm was prepared. An aluminum film with a thickness of 100 nm was formed on the main surface 112 of substrate 101.

[0131] A hydrofluoroether (HFE) solution with a concentration of 1 wt% and a main chain of polymethacrylate and perfluorohexyl groups as side chains was prepared. The HFE solution was applied to the main surface 111 of the substrate 101 using a slot coater to form a liquid-repellent film 103B with a thickness of 5 nm, thereby fabricating the inspection substrate 100B.

[0132] Film formation was carried out at room temperature of 25°C. Regarding the rotation conditions of the slot coater, the rotation speed was set to 3000 rpm and the rotation time to 20 seconds.

[0133] Using a UV-curable resin ink containing white pigment, the contact angle of the inspection substrate 100B, measured with a contact angle meter, is 80°. The average reflectance of the inspection substrate 100B is 20%. Furthermore, the fluorine / carbon element ratio of the surface 110 of the liquid-repellent film 103B is 10.

[0134] Five [pl] of UV-cured resin ink was dispensed from the droplet droplet area on the inspection substrate 100B. Coaxial epi-illumination and a camera 5 were used to measure the droplets that fell onto the inspection substrate 100B. The diameter of the droplets at the time of droplet droplet drop was 30.2 [μm]. The wetting spread of the droplet diameter after 1 minute was within an effective measurement accuracy of 0.1 [μm] or less, and the change in volume was less than 1%.

[0135] [Example 4]

[0136] As substrate 101, an alkali-free glass substrate with a thickness of 0.5 mm and a diameter of 6 cm × 6 cm was prepared. A chromium film with a thickness of 100 nm was formed on the main surface 112 of substrate 101.

[0137] An inspection substrate 100B was fabricated by exposing the main surface 111 of the substrate 101 to vapors of 1H, 1H, 2H, 2H-perfluorooctyltriethoxysilane to form a monomolecular film of liquid-repellent film 103B with a film thickness of 5 [nm].

[0138] Substrate 101 and a vial containing 1H, 1H, 2H, 2H-perfluorooctyltriethoxysilane are placed in a sealable container. The container is capped and heated in an oven at 180°C for 1 hour, exposing the main surface 111 of substrate 101 to the vapor of 1H, 1H, 2H, 2H-perfluorooctyltriethoxysilane, thereby forming a monolayer serving as liquid-repellent membrane 103B.

[0139] Using a UV-curable resin ink containing white pigment, the contact angle of the inspection substrate 100B, measured with a contact angle meter, is 100°. The average reflectance of the inspection substrate 100B is 20%. Furthermore, the fluorine / carbon element ratio of the surface 110 of the liquid-repellent film 103B is 6.

[0140] 5 [pl] of UV-cured resin ink was dispensed from the droplet droplet area on the inspection substrate 100B. Coaxial epi-illumination and camera 5 were used to measure the droplets dropped onto the inspection substrate 100B. The diameter of the droplets at the time of droplet droplet drop was 30.5 [μm]. The wetting spread of the droplet diameter after 1 minute was within an effective measurement accuracy of 0.1 [μm] or less, and the change in volume was less than 1%.

[0141] [Example 5]

[0142] As substrate 101, an alkali-free glass substrate with a thickness of 0.5 mm and a diameter of 6 cm × 6 cm was prepared. A chromium film with a thickness of 100 nm was formed on the main surface 112 of substrate 101.

[0143] A hydrofluoroether (HFE) solution with a concentration of 1 wt% and a main chain of polymethacrylate and perfluorohexyl groups as side chains was prepared. The HFE solution was applied to the main surface 111 of the substrate 101 using a slot coater to form a liquid-repellent film 103B with a thickness of 5 nm, thereby fabricating the inspection substrate 100B.

[0144] Film formation was carried out at room temperature of 25°C. Regarding the rotation conditions of the slot coater, the rotation speed was set to 3000 rpm and the rotation time to 20 seconds.

[0145] Using a UV-curable resin ink containing white pigment, the contact angle of the inspection substrate 100B, measured with a contact angle meter, is 80°. The average reflectance of the inspection substrate 100B is 20%. Furthermore, the fluorine / carbon element ratio of the surface 110 of the liquid-repellent film 103B is 10.

[0146] 5 [pl] of UV-cured resin ink was dispensed from the droplet droplet area on the inspection substrate 100B. Coaxial epi-illumination and a camera 5 were used to measure the droplets that dropped onto the inspection substrate 100B. The diameter of the droplets at the time of droplet droplet drop was 30.2 [μm]. The wetting spread of the droplet diameter after 1 minute was within an effective measurement accuracy of 0.2 [μm] or less, and the change in volume was less than 1%.

[0147] [Comparative Example 2]

[0148] Except for forming an aluminum film with a thickness of 100 nm on the surface of the alkali-free glass plate, an inspection substrate was fabricated using the same method as in Example 3.

[0149] Using a UV-curable resin ink containing white pigment, the contact angle of the inspection substrate, measured with a contact angle meter, was 60°. The average reflectance of the inspection substrate was 20%. Furthermore, the fluorine / metal element ratio of the liquid-repellent film 103B was 1.0.

[0150] Five [pl] of UV-curable resin ink was applied to the droplet droplet area on the inspection substrate. Coaxial illumination and a camera 5 were used to measure the droplets dropped onto the substrate. The results showed that the diameter of the droplets at the time of droplet drop was 32.7 [μm]. After one minute, the droplet diameter underwent a wetting expansion of more than 1 [μm], which, when converted to volume, exceeded 10%. The maximum error in the droplet position was more than 1 [μm].

[0151] In Examples 3-5, the size of the droplet that bounced off the inspection substrate 100B and expanded within one minute was less than 1 μm. Consequently, the volume change and the maximum error in the droplet's position were only a few percent, having little impact on measurement accuracy. On the other hand, in Comparative Example 2, the droplet size change on the inspection substrate exceeded 1 μm, and the volume change and the maximum error in the droplet's position also exceeded 10%. Therefore, it can be confirmed that the inspection substrates prepared in Examples 3-5 are superior.

[0152] [Comparative Example 3]

[0153] As the substrate, an alkali-free glass substrate with a thickness of 0.5 mm and a diameter of 6 cm × 6 cm was prepared.

[0154] A hydrofluoroether (HFE) solution with a concentration of 1 wt% and a main chain of polymethacrylate and perfluorohexyl groups as side chains was prepared. The HFE solution was applied to the main surface 111 of the substrate 101 using a slot coater to form a liquid-repellent film 103B with a thickness of 5 nm, thereby fabricating an inspection substrate.

[0155] Using a UV-curable resin ink containing white pigment, the contact angle of the inspection substrate, measured with a contact angle meter, was 80°. The average reflectance of the inspection substrate was 10%. Furthermore, the fluorine / carbon elemental ratio of the surface 110 of the liquid-repellent film 103B was 1.0.

[0156] Five [pl] of UV-curable resin ink was applied to the droplet droplet area on the inspection substrate. Coaxial illumination and a camera 5 were used to measure the droplets dropped onto the inspection substrate. The diameter of the droplets at the time of droplet drop was 30.2 [μm]. After one minute, the wetting spread of the droplet diameter showed an effective measurement accuracy of 0.9 [μm] or more, which, when converted to volume, exceeded 10%. The maximum error in the droplet position was 1 [μm] or more.

[0157] On the inspection substrate 100B fabricated in Examples 3-5, the measurement accuracy of the drop position and drop diameter was less than 1%, while on the inspection substrate fabricated in Comparative Example 2, the measurement accuracy of the drop position and drop diameter exceeded 1%. It can be confirmed that the inspection substrates fabricated in Examples 3-5 are superior.

[0158] [Implementation method of the item manufacturing method]

[0159] In the first and second embodiments, articles are manufactured using the liquid discharge device described above. The articles can be intermediate or final products. In the article manufacturing methods of the first and second embodiments, for example, the liquid discharge device is preferably used to manufacture articles such as organic EL (OLED) panels. The article manufacturing methods of the first and second embodiments include: a step of obtaining a coated substrate by applying or coating a solution film (a solution containing solute and solvent for forming an organic film) on a substrate using a printing method employing the liquid discharge device (coating step). It also includes: a step of drying the solution film on the coated substrate to obtain a dried substrate with a dried film formed (drying step). Furthermore, this manufacturing method includes other known steps (firing, cooling, dehumidification, drying and cleaning, electrode formation, sealing film formation, etc.). Regarding the article manufacturing methods of the first and second embodiments, compared with conventional methods, they are advantageous in at least one aspect of article performance, quality, productivity, and production cost.

[0160] This disclosure is not limited to the embodiments described above, and numerous modifications can be made within the technical concept of this disclosure. Furthermore, the effects described in this embodiment are merely examples of the most preferred effects produced by the embodiments of this disclosure and are not limited to the effects described in this embodiment.

[0161] In the above embodiments, the example described is of using an inspection substrate 100 whose entire surface 110 is a droplet droplet area to perform the inspection process, but it is not limited to this. For example, the inspection substrate 100 has a region in which a metal film 102 and a liquid-repellent film 103 are formed on a portion of the main surface 111 of the substrate 101, and the inspection process can be performed in this region. In addition, the substrate 10, which is the object, has a region in which a metal film 102 and a liquid-repellent film 103 are formed, and the inspection process can be performed in this region. In addition, the inspection substrate 100B has a region in which a metal film 102 is formed on a portion of the main surface 112 of the substrate 101 and a liquid-repellent film 103B is formed on a portion of the main surface 111, and the inspection process can be performed in this region.

[0162] According to this disclosure, a technique is provided that is advantageous for the high-precision control of droplet discharge.

Claims

1. A substrate for measuring the falling liquid droplets, characterized in that, have: Glass substrate, The metal film disposed on the glass substrate, and A liquid-repellent membrane disposed on the metal film, The thickness of the liquid-repellent membrane is 5 nm or more. The liquid-repellent membrane contains fluorinated resin. The fluorinated resin has at least one of the following side chains: an alkyl group having 4 or more carbon atoms in which all hydrogen atoms are replaced by fluorine atoms, an alkylene group having 4 or more carbon atoms in which all hydrogen atoms are replaced by fluorine atoms, and a polyoxyethylene group having 4 or more carbon atoms in which all hydrogen atoms are replaced by fluorine atoms.

2. The substrate according to claim 1, characterized in that, The thickness of the liquid-repellent membrane is 7.5 nm or more.

3. The substrate according to claim 1, characterized in that, The thickness of the liquid-repellent membrane is less than 100 nm.

4. The substrate according to claim 3, characterized in that, The thickness of the liquid-repellent membrane is less than 50 nm.

5. The substrate according to claim 1, characterized in that, The number of carbon atoms is 6 or more and 8 or less.

6. The substrate according to claim 1, characterized in that, The main chain of the fluorinated resin is selected from at least one of polyacrylate, polymethyl methacrylate, polyvinyl ether and polyolefin.

7. The substrate according to claim 6, characterized in that, The main chain of the fluorinated resin is the polyacrylate or the polymethacrylate.

8. The substrate according to claim 1, characterized in that, The content of the fluorinated resin in the liquid-repellent membrane is 70% by weight or more.

9. A substrate for measuring the falling liquid droplets, characterized in that, have: A glass substrate having a first main surface and a second main surface The metal film disposed on the first main surface side of the glass substrate, and A liquid-repellent film disposed on the second main surface side of the glass substrate.

10. The substrate according to claim 9, characterized in that, The liquid-repellent membrane is a polymer membrane or monolayer containing fluorinated resin.

11. The substrate according to claim 1, characterized in that, The metal film contains any one of chromium, aluminum, and silver as its main components.

12. The substrate according to claim 11, characterized in that, The metal film contains chromium as its main component.

13. The substrate according to claim 1, characterized in that, The average reflectance of light when light of wavelengths in the range of 380 nm or higher and 780 nm or lower is irradiated from the liquid-repellent membrane side onto the substrate is 10% or higher.

14. The substrate according to claim 1, characterized in that, The contact angle of the droplet on the surface of the liquid-repellent membrane is greater than 70°.

15. The substrate according to claim 1, characterized in that, The fluorine / carbon elemental ratio on the surface of the liquid-repellent membrane is 2 or higher.

16. The substrate according to claim 1, characterized in that, The droplets are ink droplets ejected from the nozzle of the liquid discharge head.

17. The substrate according to claim 1, characterized in that, The substrate is rectangular when viewed from above. The length of one side of the substrate is 1 m or more.

18. The substrate according to claim 1, characterized in that, The substrate has an adhesive film. The glass substrate, the sealing film, the metal film, and the liquid-repellent film are sequentially and directly stacked.

19. A liquid discharge device, characterized in that, have: A liquid discharge head with a nozzle that discharges droplets; A substrate holding portion of any one of claims 1 to 18 that retains and bounces droplets discharged from the nozzle; Measuring section for measuring droplets that bounce off the substrate; and The control unit determines the discharge conditions of the liquid discharge head based on the measurement results of the metering unit and controls the liquid discharge head according to the discharge conditions.

20. The liquid discharge device according to claim 19, characterized in that, The volume of the droplets discharged from the nozzle is 0.5 [pl] or more and 10.0 [pl] or less.

21. An inspection method, characterized in that, Measuring the droplets that bounce off the substrate according to any one of claims 1 to 18.

22. A method for manufacturing an article, characterized in that, The liquid discharge device according to claim 19 is used to discharge droplets onto an object. Articles are manufactured by processing the liquid contained in the droplets that fall from the object.

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