A connection structure applied to a semiconductor fluid control component and a fluid control component

Abstract

The application relates to a connecting structure applied to a semiconductor flow control component, which comprises a threaded hole arranged in the inside of a diaphragm seat and a guide hole extending to a side wall of the diaphragm seat and communicated with the threaded hole; a threaded part arranged on the side of a stem body of a valve stem and matched with the threaded hole and a guide convex edge located below the threaded part, in the matching process of the threaded part and the threaded hole, the guide convex edge is matched with the guide hole in interference and is embedded into the guide hole to realize guiding, and a first containing cavity is formed above the guide convex edge and is sealed to contain the particle impurities generated between the threaded part and the threaded hole. The connecting structure applied to the semiconductor flow control component has the advantages that the coaxially arranged threaded hole and the guide hole are matched with the guide convex edge to realize accurate positioning, the sealed cavity formed in the threaded matching process can effectively collect metal particles, the guide inclined surface and the radial limiting part cooperatively ensure the perpendicularity of the valve stem, and the connecting structure has the advantages of improving assembly precision, preventing pollution and prolonging service life.

Description

Technical Field

[0001] This invention relates to the field of semiconductor valve technology, and in particular to a connection structure and fluid control component used in semiconductor flow control components. Background Technology

[0002] Pressure reducing valves, as key components in fluid control, play a vital role in precision industries such as semiconductor manufacturing. They regulate the inlet pressure to the desired outlet pressure and maintain pressure stability by relying on the energy of the medium itself. From a fluid mechanics perspective, a pressure reducing valve is essentially a throttling element with variable local resistance. By changing the throttling area, it adjusts the flow velocity and fluid kinetic energy, thereby achieving pressure loss control. Currently, common pressure reducing valves on the market mainly include spring-loaded and diaphragm-welded types.

[0003] In diaphragm-welded pressure reducing valves, such as Figure 3 As shown, the traditional process involves welding the diaphragm seat to the diaphragm, while the valve stem passes through the diaphragm seat and is fixed by welding at the end. While this structure ensures the valve stem position and facilitates control of the pressure-reducing valve opening, it is not ideal.

[0004] However, existing pressure reducing valves have the following problems in the connection process between the diaphragm seat and the valve stem:

[0005] 1. Valve stem installation and positioning present significant challenges. Because the threaded connection begins at the bottom of the diaphragm seat, the lack of an effective guiding and positioning mechanism makes accurate alignment during assembly difficult, severely impacting assembly efficiency and quality.

[0006] 2. Valve stem perpendicularity is difficult to guarantee. During the thread tightening process, there is a lack of effective guiding constraints. Theoretically, welding the valve stem through the upper end of the diaphragm seat after thread tightening can ensure the perpendicularity of the valve stem relative to the diaphragm seat. However, in actual operation, the hot welding process easily causes valve stem deformation and positional displacement, resulting in the valve stem axis not being perpendicular to the diaphragm seat plane. This deviation directly affects the internal sealing performance of the pressure reducing valve, creating a risk of media leakage.

[0007] 3. Threaded connections pose a risk of seizing. Given the stringent cleanliness requirements of semiconductor manufacturing processes, lubricating grease is typically avoided during assembly. This direct contact and friction between the metal threads makes them highly susceptible to seizing, causing significant inconvenience for subsequent maintenance and replacement.

[0008] 4. Particulate Contamination Issues. Metal particles generated during the threaded connection process, as well as impurities produced in the threaded connection area and the welded area on top of the diaphragm seat due to direct contact with process gases under airflow pressure, will fall directly onto the valve stem surface. These contaminants not only cause internal leakage in the pressure reducing valve but may also enter the semiconductor manufacturing process with the process gases, severely impacting product yield. Existing structures lack effective particle collection and isolation mechanisms, failing to meet the stringent cleanliness requirements of the semiconductor industry. Summary of the Invention

[0009] Therefore, the technical problem to be solved by the present invention is to overcome the problem that the diaphragm seat and valve stem connection structure of the pressure reducing valve in the prior art is unreasonable and lacks effective guiding, sealing and anti-pollution structure.

[0010] To address the aforementioned technical problems, this invention provides a connection structure for a semiconductor flow control component. The flow control component regulates the pressure of a flowing medium and includes a diaphragm seat and a valve stem connected via the connection structure. The connection structure includes: a threaded hole inside the diaphragm seat and a guide hole communicating with the threaded hole and extending through one side wall of the diaphragm seat; the threaded hole and the guide hole are coaxially arranged; a threaded portion on the circumference of the valve stem and engaging with the threaded hole; and a guide flange located below the threaded portion. During the engagement of the threaded portion with the threaded hole, the guide flange is interference-fitted with the guide hole to achieve guidance, and a first receiving cavity is formed above the guide flange. The first receiving cavity is used to accommodate particulate impurities generated between the threaded portion and the threaded hole.

[0011] In one embodiment of the present invention, the guide protrusion is arranged around the rod body, and the side facing the threaded portion is a guide slope, which extends from the inside to the outside of the rod body in a direction away from the threaded portion.

[0012] In one embodiment of the present invention, a radial limiting portion is provided on the outer circumference of the end of the guide flange away from the rod body. The radial limiting portion is an annular protrusion on the outer circumference of the guide flange, and the radial limiting portion is embedded in the guide hole to radially limit the valve rod.

[0013] In one embodiment of the present invention, the axial cross section of the guide flange is trapezoidal and is arranged around the peripheral sidewall of the rod body. The end of the guide ramp away from the rod body extends axially with a predetermined thickness to form the radial limiting portion, so as to radially limit the valve stem.

[0014] In one embodiment of the present invention, the axial cross section of the guide protrusion is a right trapezoid, and the end of the guide slope away from the rod extends axially to form a preset thickness and then extends horizontally to intersect the rod.

[0015] In one embodiment of the present invention, the valve stem further includes a limiting boss disposed on the outer peripheral wall of its stem body. After the threaded portion is assembled into the threaded hole, the top surface of the limiting boss is tightly fitted with the bottom end surface of the diaphragm seat to achieve a seal on the guide hole.

[0016] In one embodiment of the present invention, a groove is formed inwardly on the top surface of the limiting boss that contacts the diaphragm seat. After assembly, a second receiving cavity is formed between the groove and the diaphragm seat to accommodate particulate impurities flowing out of the guide hole.

[0017] In one embodiment of the present invention, the groove is located at the inner circumference where the limiting boss connects to the rod body, so that at least a portion of the groove is disposed opposite to the guide hole.

[0018] In one embodiment of the present invention, the limiting boss has a preset width on its outer periphery outside the groove so that it fits against the bottom surface of the diaphragm seat after the threaded portion is screwed into the threaded hole.

[0019] In one embodiment of the present invention, the end of the guide hole opposite to the limiting boss is provided with a trumpet-shaped guide opening, the opening of the guide opening being no larger than the opening of the groove.

[0020] The present invention also provides a fluid control component, comprising: a valve body having a medium inlet and outlet flow channel, a valve stem for controlling the opening and closing of the flow channel, a diaphragm for sealing the flow channel, a diaphragm seat for mounting the diaphragm, and a valve seat cooperating with the valve stem to open and close the flow channel. One end of the valve stem is connected to the diaphragm seat and the other end passes through the valve seat and can form a surface seal connection with the valve seat to adjust the medium flow rate by driving the valve stem to move axially through the diaphragm seat. The component also includes the connection structure used in semiconductor flow control components, the connection structure being used to fix the diaphragm seat and the valve stem together.

[0021] The connection structure and fluid control component of the present invention applied to semiconductor flow control components have the following advantages compared with the prior art:

[0022] Precise positioning is achieved through a guide flange that mates with the threaded hole. During thread engagement, a sealed cavity is formed, effectively collecting metal particles or impurities. Therefore, grease can be used to improve assembly convenience without concerns about impurities. Furthermore, the guide ramp and radial limiting part work together to ensure valve stem perpendicularity, offering advantages such as improved assembly accuracy, prevention of contamination, and extended service life. Attached Figure Description

[0023] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the connection structure of the present invention applied to a semiconductor flow control component;

[0025] Figure 2 This is the invention Figure 1 A magnified view of a section at point A in the middle;

[0026] Figure 3 This is a structural diagram of an existing technical solution.

[0027] Explanation of reference numerals in the accompanying drawings: diaphragm seat 1, threaded hole 11, guide hole 12, first receiving cavity 121, second receiving cavity 122, valve stem 2, guide flange 22, guide slope 221, radial limiting part 222, limiting boss 23, groove 231, guide port 232, valve body 10, diaphragm 20, valve seat 30. Detailed Implementation

[0028] The embodiments of this application will now be described in detail with reference to the accompanying drawings.

[0029] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0030] It should be noted that the following description covers various aspects of embodiments within the scope of the appended claims. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any particular structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art will understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects set forth herein can be used to implement the device and / or practice the method. Additionally, this device and / or method can be implemented using structures and / or functionalities other than one or more of the aspects set forth herein.

[0031] It should also be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of this application. The drawings only show the components related to this application and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0032] Additionally, specific details are provided in the following description to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that practice can be carried out without these specific details.

[0033] In existing technologies, pressure reducing valves, as crucial components in fluid control, have long faced challenges such as difficulty in valve stem installation and positioning, insufficient verticality, and thread contamination. Traditional diaphragm-welded pressure reducing valves fix the valve stem and diaphragm seat via threaded connections. During assembly, the lack of radial positioning reference for the threads makes the valve stem prone to misalignment. Metal particles generated by thread friction directly enter the flow channel, causing sealing failure and media contamination. These problems are particularly prominent in semiconductor fluid control scenarios, where process gases have extremely high cleanliness requirements; even minute particles can lead to system malfunctions or damage downstream process products.

[0034] To address the aforementioned issues, a connection structure that can achieve both precise positioning and contaminant isolation is needed. Traditional threaded connections rely solely on the self-positioning of the threaded pair, failing to control radial offset during assembly. Establishing a guiding constraint before thread engagement can force the valve stem to maintain axial alignment. Simultaneously, particles generated by thread friction must be effectively collected to prevent them from entering the flow channel. Therefore, a key approach to solving these problems is to create a dual positioning structure by using a coaxial guide hole and a threaded hole, and forming a closed space above the threaded engagement area.

[0035] Reference Figure 1 and 2As shown, the connection structure of the present invention, applied to a semiconductor flow control component, includes: a diaphragm seat 1 and a valve stem 2. The diaphragm seat 1 has a coaxially communicating threaded hole 11 and a guide hole 12 inside. The valve stem 2 has a threaded portion that mates with the threaded hole 11 and a guide flange 22 located below the threaded portion. During assembly, the guide flange 22 is interference-fitted into the guide hole 12 to form a radial positioning reference, and a sealed first receiving cavity 121 can be formed above the guide flange 22.

[0036] The threaded hole 11 refers to a threaded structure formed inside the diaphragm seat 1 and extending coaxially with the guide hole 12. It can be implemented using metric threads or pipe threads and is used to form a detachable connection with the threaded portion of the valve stem 2. The guide hole 12 is a cylindrical channel extending from the bottom of the threaded hole 11 to the side wall of the diaphragm seat 1. Its inner diameter is slightly smaller than the outer diameter of the guide flange 22 to form an interference fit. The threaded portion on the valve stem 2 refers to the threaded structure located around the valve stem 2. It can be formed using thread parameters matching those of the threaded hole 11 and is used to transmit axial force. The guide flange 22 is an annular protrusion located below the threaded portion of the valve stem 2. Its outer diameter is larger than the inner diameter of the guide hole 12 to achieve an interference fit. The first receiving cavity 121 is a closed space enclosed by the guide flange 22 and the threaded hole 11. It can be formed by controlling the embedding depth of the guide flange 22 and is used to collect particulate impurities generated by thread friction.

[0037] Specifically, during assembly, the threaded portion of the valve stem 2 is first screwed into the threaded hole 11, achieving threaded alignment in a free state and establishing initial positioning, thus facilitating subsequent assembly. As the thread is screwed deeper, the interlocking force of the thread structure helps the guide flange 22 to embed into the guide hole 12. The radial constraint generated by the interference fit forces the valve stem 2 and the diaphragm seat 1 to remain coaxial. Furthermore, the guide flange 22 continuously provides radial positioning, preventing misalignment caused by uneven force on the threaded pair. The interference fit between the guide hole 12 and the guide flange 22 forms a physical seal, confining metal particles generated by friction between the threaded pairs within the first receiving cavity 121. The coaxial design of the threaded hole 11 and the guide hole 12 ensures that the valve stem 2 remains under axial constraint throughout the screwing process, significantly reducing the risk of thread seizure.

[0038] Compared to existing technologies, traditional threaded connections lack a positioning structure, requiring repeated adjustments to the valve stem 2 during installation. This invention establishes a positioning reference during threaded assembly through the interference fit between the guide hole 12 and the guide flange 22, significantly improving assembly efficiency. In existing technologies, thread friction particles directly enter the flow channel, while the first receiving cavity 121 formed by this invention effectively collects contaminants, preventing media contamination. Furthermore, the coaxial design of the threaded hole 11 and the guide hole 12, as well as the coaxial design of the valve stem 2 and the diaphragm seat 1, forms a dual positioning structure that eliminates uneven radial force distribution in the threaded pair, reducing perpendicularity deviation.

[0039] This invention achieves precise positioning of the valve stem 2 during assembly, ensuring that the axis of the assembled valve stem 2 is perpendicular to the diaphragm seat 1. Particulate impurities generated by thread friction are effectively isolated within the first receiving cavity 121, preventing contamination of the medium in the flow channel. The guiding structure establishes radial constraint during thread engagement, reducing the probability of thread seizure and improving assembly efficiency and reliability.

[0040] Furthermore, the present invention further proposes that the guide convex edge 22 is arranged around the rod body of the valve stem 2 and the side facing the threaded portion is a guide inclined surface 221, which extends from the inside to the outside of the rod body in a direction away from the threaded portion.

[0041] The guide flange 22 refers to a circumferential protrusion surrounding the valve stem 2. It can be achieved by machining or casting to form an annular boss on the stem surface. This structure engages with the guide hole 12 during assembly to provide radial constraint. The guide ramp 221 is an inclined surface located on the guide flange 22 near the threaded portion. It gradually extends outwards from the center of the valve stem 2, guiding the valve during screwing and reducing frictional resistance at the contact surface.

[0042] Specifically, during the process of the valve stem 2 being screwed into the diaphragm seat 1, the circumferentially evenly distributed guide flange 22 constrains the valve stem 2 in all directions, preventing deflection caused by uneven local force. When the guide bevel 221 contacts the inner wall of the guide hole 12, the inclined surface converts the axial screwing force into a radial component force, forcing the valve stem 2 to automatically adjust to a coaxial state with the threaded hole 11. The extension direction of the bevel of the guide bevel 221 is complementary to the screwing direction. During the gradual engagement of the threads, the bevel of the guide bevel 221 continuously provides guidance until it is fully embedded in the guide hole 12. At the same time, the bevel structure of the guide bevel 221 reduces the contact area between the guide flange 22 and the guide hole 12, effectively reducing frictional resistance and preventing thread seizure in the absence of lubrication.

[0043] Compared to existing technologies, traditional threaded connections lack a guiding structure, making the valve stem 2 prone to misalignment during installation. This invention, however, utilizes a circumferentially oriented guide flange 22 and a guide ramp 221 to gradually establish precise guidance during thread engagement, ensuring assembly coaxiality. In existing technologies, the frictional resistance generated by direct thread contact can easily lead to seizing. This invention reduces contact pressure through ramp guidance, improving assembly smoothness while maintaining positioning accuracy.

[0044] This invention achieves automatic centering during valve stem 2 installation, effectively solving the problems of positioning difficulties and insufficient perpendicularity. The inclined structure of the guide slope 221 reduces frictional resistance while providing progressive guidance, avoiding thread seizing. The circumferentially evenly distributed guide protrusions 22 ensure balanced force on the valve stem 2, enabling reliable assembly even without lubrication.

[0045] The present invention further proposes that a radial limiting part 222 is provided on the outer circumference of the guide flange 22 away from the valve stem 2. The radial limiting part 222 is an annular protrusion on the outer circumference of the guide flange 22. The radial limiting part 222 is embedded in the guide hole 12 to radially limit the valve stem 2.

[0046] The radial limiting part 222 refers to an annular protrusion structure provided on the outer circumference of the guide protrusion 22. Specifically, it can be implemented by a continuous flange that forms an interference fit with the inner wall of the guide hole 12. This structure can uniformly bear radial loads. The annular protrusion refers to a protrusion that is continuously distributed along the circumferential direction. By forming a full-circumferential limiting surface, it is beneficial to eliminate local stress concentration.

[0047] Specifically, during the process of screwing the threaded portion of the valve stem 2 into the threaded hole 11, the guide protrusion 22 achieves initial positioning by contacting the guide hole 12 through the guide inclined surface 221. When the annular protrusion enters the guide hole 12, its outer circumferential surface forms a surface contact with the inner wall of the guide hole 12, and the full circumferential contact constraint forces the axis of the valve stem 2 to remain coaxial with the axis of the guide hole 12. Due to the interference fit between the annular protrusion and the guide hole 12, a uniform radial constraint force is generated during assembly, effectively limiting any possible radial displacement of the valve stem 2. This continuous annular structure avoids the risk of local deformation inherent in traditional point-contact limiting methods, ensuring that the valve stem 2 remains vertical throughout the tightening process.

[0048] Compared to existing technologies, traditional threaded connection structures lack effective radial limiting devices. Relying solely on threaded fit is insufficient to guarantee the perpendicularity of valve stem 2. Therefore, in actual operation, the valve stem is prone to deformation and positional displacement due to hot welding, resulting in the valve stem axis not being perpendicular to the diaphragm seat plane. This deviation directly affects the internal sealing performance of the pressure reducing valve, creating a risk of media leakage. In contrast, the annular protrusion forms a continuous circumferential limiting surface that evenly distributes assembly stress, eliminates the risk of localized deformation, and fundamentally solves the problem of insufficient perpendicularity of valve stem 2.

[0049] This invention achieves automatic alignment during the assembly of the valve stem 2, effectively eliminating radial offset caused by thread clearance. The fit and constraint between the annular protrusion and the guide hole 12 ensure that the axis of the valve stem 2 is strictly coaxial with the axis of the guide hole 12 of the diaphragm seat 1, preventing poor contact between the valve core and the valve seat at the other end due to valve stem 2 tilting, which could lead to seal failure. The continuously distributed limiting structure improves assembly stability, prevents valve stem 2 positional offset caused by vibration during operation, and ensures the sealing reliability of the pressure reducing valve during long-term operation.

[0050] The present invention further proposes that the axial cross section of the guide convex edge 22 is trapezoidal and is arranged around the peripheral side wall of the valve stem 2. The guide inclined surface 221 extends axially with a predetermined thickness away from the valve stem 2 to form a radial limiting part 222 to radially limit the valve stem 2.

[0051] The axial cross-section being trapezoidal refers to a cross-section formed by cutting along the axis of the stem, resulting in a geometric shape with inclined sides. This can be achieved using symmetrical or asymmetrical trapezoidal structures, with the inclined surface reducing assembly resistance. The circumferential sidewall surrounding the valve stem 2 refers to the continuously distributed protruding structures around the outer circumference of the valve stem 2, used to evenly distribute assembly stress. The guide inclined surface 221 extending axially with a predetermined thickness refers to the inclined surface extending at its end towards the axis of the valve stem 2, forming a vertical wall of a certain height.

[0052] Specifically, during the assembly of valve stem 2, after the threaded connection is initially tightened (the threaded structure has been connected at a preset distance), the guide slope 221 of the trapezoidal section contacts the inner wall of the guide hole 12, and progressive centering is achieved through the sliding of the guide slope 221. As the thread is screwed in deeper, the radially extending limiting part 222 gradually embeds into the guide hole 12, and its vertical wall surface forms an interference fit with the inner wall of the guide hole 12, thereby limiting the offset of valve stem 2 in the radial plane. The symmetry of the trapezoidal structure ensures that the valve stem 2 bears uniform constraint force at all points in the circumference, avoiding skewing caused by unilateral contact.

[0053] Compared to existing technologies, traditional valve stems rely solely on threaded engagement for positioning, lacking independent guiding and limiting structures. This invention, through a combination of a trapezoidal cross-section and an axial extension, establishes a precise guiding reference in the initial stages after threaded alignment, effectively eliminating axial misalignment during the initial assembly phase. The rigid limiting surface formed by the axial extension replaces the radial constraint function of traditional threaded pairs, preventing insufficient perpendicularity caused by thread engagement deviations.

[0054] This invention establishes a precise guiding benchmark at the initial stage of thread assembly (when the threaded structure has already been fitted with a preset distance), ensuring that the axis of the valve stem 2 remains perpendicular to the diaphragm seat 1. The axially extending radial limiting part 222 continuously constrains the radial displacement of the valve stem 2 during thread tightening, preventing abnormal wear of the threaded pair due to misalignment. The symmetrical trapezoidal cross-section structure ensures uniform distribution of assembly contact stress, avoiding the impact of local deformation on guiding accuracy, ultimately controlling the perpendicularity error of the valve stem 2 within the required process range.

[0055] The present invention further proposes that the axial cross section of the guide convex edge 22 is a right trapezoid, and the guide inclined surface 221 extends axially away from the rod body of the valve stem 2 to form a preset thickness and then extends horizontally to intersect with the rod body.

[0056] The right-angled trapezoidal axial section refers to the cross-sectional shape of the guide flange 22 having a right-angled side, which is perpendicular to the axial extension direction, forming a stepped limiting support structure. The right-angled side is used to construct the rigid support surface of the radial limiting part. The horizontal extension part refers to the guide inclined surface 221 extending axially to a predetermined thickness and then extending in a direction perpendicular to the axial direction to connect with the rod body of the valve stem 2. This can be achieved by increasing the material thickness or setting a flange structure. The horizontal extension part is used to increase the contact area with the rod body of the valve stem 2, enhancing the stability of the radial limiting.

[0057] Specifically, during the process of the valve stem 2 being screwed into the diaphragm seat 1, the guide ramp 221 guides the guide flange 22 to embed into the guide hole 12. The right-angled trapezoidal axial section allows the axial extension portion to form a preset thickness, providing structural strength for radial limiting. After the horizontal extension portion intersects with the body of the valve stem 2, it limits the radial displacement of the valve stem 2 by increasing the contact area, ensuring the perpendicularity of the valve stem 2 and the diaphragm seat 1. The right-angled trapezoidal stepped support structure reduces the friction area between the guide flange 22 and the inner wall of the guide hole 12, reducing particulate impurities generated by friction, while avoiding the risk of thread seizure caused by assembly stress concentration.

[0058] Compared with existing technologies, traditional threaded connections lack an effective radial limiting structure, making it difficult to ensure the perpendicularity of the valve stem 2 during installation, and the particles generated by friction can easily contaminate the fluid. This invention achieves stepped limiting during installation through the combination of a right-angled trapezoidal cross-section and a horizontally extending structure, which not only ensures perpendicularity but also reduces the risk of particle contamination by reducing the friction area.

[0059] This invention solves the problem of insufficient perpendicularity caused by threaded connection during valve stem 2 installation. By improving the structure of the guide flange 22, more stable radial limiting is achieved, avoiding sealing failure. At the same time, it reduces particulate impurities generated during the screwing process and reduces the risk of fluid contamination.

[0060] The present invention further proposes to provide a limiting boss 23 on the outer peripheral wall of the valve stem 2. After the threaded part of the valve stem 2 is assembled into the threaded hole 11, the top surface of the limiting boss 23 is tightly fitted with the bottom end surface of the diaphragm seat 1 to achieve sealing of the guide hole 12.

[0061] The limiting boss 23 is an annular protrusion surrounding the outer peripheral wall of the valve stem 2. Its axial height is configured to form a surface contact with the bottom surface of the diaphragm seat 1 when the threaded portion of the valve stem 2 is fully screwed into the threaded hole 11. This structure limits the axial displacement range of the valve stem 2 while providing a sealing contact surface. "Tight fit" means that the top surface of the limiting boss 23 and the bottom surface of the diaphragm seat 1 form a gapless contact state, resulting in a physical sealing interface after assembly.

[0062] When the threaded portion of the valve stem 2 is fully screwed into the threaded hole 11, the top surface of the limiting boss 23 contacts the bottom surface of the diaphragm seat 1, at which point the guide hole 12 is completely covered by the limiting boss 23. Since there is no gap between the limiting boss 23 and the bottom surface of the diaphragm seat 1, particulate impurities cannot escape through the guide hole 12. Simultaneously, the limiting boss 23 provides a rigid constraint on the axial position of the valve stem 2, ensuring that the mating depth between the threaded portion of the valve stem 2 and the threaded hole 11 is within a preset range, preventing structural deformation due to excessive screwing.

[0063] Compared with existing technologies, traditional threaded connection structures lack an independent sealing interface, and particulate impurities can easily leak into the fluid channel from the thread gap or guide hole. This invention achieves sealing through direct contact between the limiting boss 23 and the bottom end face of the diaphragm seat 1. Without the need for additional sealing rings or lubricants, it utilizes the component's own structure to form a closed barrier, simplifying the assembly process and avoiding the risk of contamination introduced by additional sealing materials.

[0064] This invention effectively blocks the path of particulate impurities generated during the threaded connection process from the guide hole 12 to the inside of the fluid control component, solving the problem of metal debris contaminating the process medium. At the same time, the axial limiting function improves the assembly accuracy and structural reliability.

[0065] The present invention further proposes to form a groove 231 by recessing the top surface of the limiting boss 23 in contact with the diaphragm seat 1. After assembly, a second receiving cavity 122 is formed between the groove 231 and the diaphragm seat 1 to receive particulate impurities flowing out from the guide hole 12.

[0066] The groove 231 refers to the recessed area machined on the top surface of the limiting boss 23. Specifically, it can be implemented using an annular groove or a partial recessed structure. After assembly, this recessed structure forms a closed space with the bottom surface of the diaphragm seat 1. The second receiving cavity 122 refers to the cavity formed by the groove 231 and the bottom surface of the diaphragm seat 1. Its volume is determined by the groove depth and contact area, and it is used to receive residual particles overflowing from the guide hole 12.

[0067] Specifically, during the process of the threaded portion of the valve stem 2 being screwed into the threaded hole 11, particulate impurities in the guide hole 12 that were not captured by the first receiving cavity 121 move downwards along the channel. When the top surface of the limiting boss 23 is fully engaged with the bottom surface of the diaphragm seat 1, the groove 231 and the outlet of the guide hole 12 form a communication path, and the remaining particles fall into the groove 231 under the action of gravity. The groove 231 is located on the inner circumference of the limiting boss 23, so that at least a portion of it faces the outlet of the guide hole 12, forming a directional collection channel. The contact area retained on the outer periphery of the limiting boss 23 achieves a planar seal, preventing particles from diffusing outwards, while the internal space of the groove 231 forms a second-level interception structure, achieving double protection.

[0068] Compared with existing technologies, traditional structures rely solely on the gap at the threaded connection to accommodate particles, which cannot prevent impurities from overflowing along the guide hole. This invention adds a groove 231 structure to the sealing surface of the limiting boss 23, forming an independent accommodating space that communicates with the guide hole 12. While maintaining the sealing performance of the contact surface, it provides a directional collection path for overflowing particles, preventing them from entering the fluid channel.

[0069] This invention effectively solves the problem of particulate impurities overflowing from the guide hole 12 during threaded connection or subsequent use. The second receiving cavity 122 and the first receiving cavity 121 form a stepped interception system, confining residual particles inside the groove 231 and preventing them from contaminating the internal environment of the fluid control component. The integrated design of the limiting boss 23 and the groove 231 achieves both sealing and contaminant collection, avoiding the need for additional anti-fouling structures.

[0070] The present invention further proposes that the groove 231 be located at the inner circumference of the connection between the limiting boss 23 and the valve stem 2, so that at least a portion of the groove 231 is positioned opposite to the guide hole 12. The inner circumference refers to the annular region of the limiting boss 23 near the axis of the valve stem 2, which can be achieved by machining an annular groove at the connection between the limiting boss 23 and the valve stem 2. This positioning design ensures that the opening of the groove 231 and the outlet of the guide hole 12 form a spatial correspondence, ensuring that particulate impurities directly enter the groove 231 when moving axially. The opposite arrangement means that the opening area of ​​the groove 231 overlaps with the outlet of the guide hole 12 axially, which can be achieved by adjusting the radial position and opening size of the groove 231. This arrangement allows particulate impurities to be captured by the opening of the groove 231 after detaching from the guide hole 12, preventing impurities from diffusing to the outer edge of the limiting boss 23.

[0071] Specifically, when the threaded portion of the valve stem 2 is screwed into the threaded hole 11, particulate impurities generated in the guide hole 12 are discharged outwards during the thread engagement process. Since the groove 231 is located within the inner circumferential region of the limiting boss 23 and its partial opening faces the outlet of the guide hole 12, impurities fall directly into the second receiving cavity 122 formed between the groove 231 and the diaphragm seat 1 during axial movement. The design of the inner circumferential position of the groove 231 prevents impurities from accumulating between the outer edge of the limiting boss 23 and the contact surface of the diaphragm seat 1, while ensuring that the opening of the groove 231 and the outlet of the guide hole 12 form the shortest receiving path, reducing the risk of impurity rebound or retention. The remaining area of ​​the contact surface between the limiting boss 23 and the diaphragm seat 1 remains completely sealed, preventing impurities from entering critical areas of the fluid control components.

[0072] Compared to existing technologies, the traditional structure lacks a groove 231 corresponding to the outlet of the guide hole 12, causing particulate impurities to easily overflow from the gap between the limiting boss 23 and the diaphragm seat 1, contaminating the fluid control components. This invention, through a directional receiving groove structure, achieves targeted collection of impurities while maintaining sealing performance, thus solving the impurity diffusion problem.

[0073] This invention can effectively intercept and contain particulate impurities flowing out of the guide hole 12, preventing impurities from entering the sealing area of ​​the fluid control component or the process gas flow channel, thereby reducing the risk of seal failure or gas contamination caused by contamination and improving the operational reliability of the fluid control component.

[0074] This application further proposes that the limiting boss 23 has a preset width on its outer periphery outside the groove 231, so that it can fit against the bottom surface of the diaphragm seat 1 after being screwed into the threaded hole 11 at the threaded part of the valve stem 2.

[0075] Specifically, when the threaded part is screwed into the threaded hole, the preset width area of ​​the outer periphery of the limiting boss 23 is pressed against the bottom end face of the diaphragm seat 1. The contact surface covers the outlet edge of the guide hole 12 to form a continuous sealing ring, preventing particulate impurities in the first receiving cavity 121 from leaking through the gap between the guide hole 12 and the limiting boss 23. The preset width annular contact surface also disperses the assembly pressure, avoiding sealing failure caused by local deformation.

[0076] Traditional structures achieve axial positioning by welding the upper end of the threaded connection. However, hot welding easily causes valve stem deformation and displacement during the welding process, leading to localized sealing failure. Furthermore, during use, airflow enters through the threaded hole and comes into contact with the welded and threaded connection points, easily causing particulate contamination of the fluid under airflow impact. This invention utilizes a pre-defined width annular contact surface that cooperates with the first receiving cavity 121 to form a double-sealing structure: the first sealing surface at the threaded connection and the second sealing surface of the limiting boss 23 work together to effectively block the particle leakage path.

[0077] This invention solves the sealing failure problem caused by threaded assembly and welding positioning at the top of the valve stem, and prevents metal particles generated by thread friction from entering the fluid channel. The uniform pressure distribution on the contact surface avoids deformation of the sealing surface caused by local stress concentration, while providing stable radial support for the valve stem 2, ensuring the perpendicularity and coaxiality of the assembled structure.

[0078] The present invention further proposes to provide a trumpet-shaped guide opening 232 at the end opposite to the limiting boss 23 of the guide hole 12, wherein the opening of the guide opening 232 is no larger than the opening of the groove 231. The trumpet-shaped guide opening 232 refers to an opening structure that gradually expands outward from the end of the guide hole 12, which can guide particulate impurities to move along the inclined surface. The opening of the guide opening 232 being no larger than the opening of the groove 231 means that the maximum outer diameter of the guide opening 232 is less than or equal to the width of the opening of the groove 231. This dimensional relationship ensures that the opening of the groove 231 completely covers the particle path flowing out of the guide opening 232.

[0079] During the threaded connection process, metal debris generated by thread friction is pushed into the guide hole 12 as the valve stem rotates. When particulate impurities reach the end of the guide hole 12, the gradually expanding slope of the trumpet-shaped guide orifice 232 guides the particles towards the groove 231. Since the opening of the guide orifice 232 is confined within the opening range of the groove 231, the particulate impurities fall directly into the groove 231 under the guidance of gravity and the slope, preventing the particles from sliding down the surface of the valve stem 2 into the fluid channel. The assembly relationship between the groove 231 and the limiting boss 23 forms a closed space, confining the particles within the receiving cavity and preventing them from diffusing outward.

[0080] Traditional structures lack the mating structure between the guide port 232 and the groove 231, allowing particles generated by the threads to easily overflow from the gap between the guide hole 12 and the valve stem 2, directly entering the fluid control area. This invention, through the guiding effect of the guide port 232 and the dimensional constraint of the opening of the groove 231, forms a directional collection channel, altering the trajectory of particulate impurities and achieving physical isolation.

[0081] This invention effectively blocks the path of particulate impurities generated during threaded connection into the fluid channel, solving the problem of metal debris contaminating the process medium. The particles are confined within the closed space formed by the groove 231, preventing valve stem 2 from jamming or sealing surface wear due to impurity accumulation, thus ensuring the long-term operational reliability of the fluid control components.

[0082] A fluid control component manufactured using the connection structure of the semiconductor flow control component of the present invention includes: a valve body 10 having a medium inlet and outlet flow channel, a valve stem for controlling the opening and closing of the flow channel, a diaphragm 20 for sealing the flow channel, a diaphragm seat for mounting the diaphragm 20, and a valve seat 30 cooperating with the valve stem to open and close the flow channel. One end of the valve stem is connected to the diaphragm seat and the other end passes through the valve seat 30, forming a surface seal connection with the valve seat 30. This allows the diaphragm seat to drive the valve stem to move axially, thereby regulating the medium flow rate. The connection structure is used to achieve a fixed connection between the diaphragm seat and the valve stem. Through this connection structure, on the one hand, it ensures that the connection structure between the valve stem and the diaphragm seat prevents the generation of particulate impurities that could contaminate the process medium during assembly or use; on the other hand, it ensures the perpendicularity of the valve stem after it is connected to the diaphragm seat, thereby ensuring the sealing effectiveness between the valve stem and the valve seat 30.

[0083] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

Claims

1. A connection structure applied to a semiconductor fluid control component, the fluid control component being used for pressure regulation of a medium flowing therethrough, comprising a diaphragm seat and a valve stem connected by the connection structure, characterized in that, The connecting structure comprises: a threaded hole arranged in the diaphragm seat and a guide hole extending to a side wall of the diaphragm seat and communicating with the threaded hole, the threaded hole and the guide hole being coaxially arranged; a threaded part arranged on the periphery of the stem of the valve rod and matched with the threaded hole and a guide protrusion arranged below the threaded part, in the matching process of the threaded part and the threaded hole, the guide protrusion is inserted into the guide hole to realize the guidance, and a first accommodating cavity is formed above the guide protrusion to accommodate the particle impurities generated between the threaded part and the threaded hole; the guide protrusion is arranged around the stem, and the side of the guide protrusion facing the threaded part is a guide slope, the guide slope extends from the stem to the outside in the direction away from the threaded part; the outer periphery of the end of the guide protrusion away from the stem is provided with a radial limiting part, the radial limiting part is an annular protrusion on the outer periphery of the guide protrusion, the radial limiting part is inserted into the guide hole to radially limit the valve rod; the axial section of the guide protrusion is trapezoidal and annularly arranged on the peripheral wall of the stem, the end of the guide slope away from the stem extends in the axial direction by a predetermined thickness to form the radial limiting part to radially limit the valve rod; the valve rod further comprises a limiting boss arranged on the peripheral wall of the stem, after the threaded part is assembled into the threaded hole, the top surface of the limiting boss tightly abuts the bottom end surface of the diaphragm seat to realize the sealing of the guide hole; the top surface of the limiting boss in contact with the diaphragm seat is recessed inward to form a groove, after assembly, a second accommodating cavity is formed between the groove and the diaphragm seat to accommodate the particle impurities flowing out of the guide hole.

2. The connection structure for a semiconductor fluidic component according to claim 1, characterized by: The axial section of the guide protrusion is a right trapezoid, and after the end of the guide slope away from the stem extends in the axial direction to form a predetermined thickness, it further extends in the horizontal direction to intersect with the stem.

3. The connection structure for a semiconductor fluidic component according to claim 1, characterized by: The groove is located at the inner periphery position where the limiting boss is connected with the stem, so that at least one part of the groove is oppositely arranged with the guide hole.

4. The connection structure for a semiconductor fluidic component according to claim 3, characterized by: The outer periphery of the limiting boss outside the groove has a predetermined width to abut to the bottom end surface of the diaphragm seat after the threaded part is screwed into the threaded hole.

5. The connection structure for a semiconductor fluidic component according to claim 4, characterized by: The end of the guide hole opposite to the limiting boss is provided with a horn-shaped guide port, and the opening of the guide port is not larger than the opening of the groove.

6. A fluid control component comprising: The valve body provided with a medium inlet and outlet flow channel, the valve rod for controlling the opening and closing of the flow channel, the diaphragm for sealing the flow channel, the diaphragm seat for mounting the diaphragm, and the valve seat matched with the valve rod to open and close the flow channel, one end of the valve rod is connected to the diaphragm seat and the other end passes through the valve seat and can form a face seal connection with the valve seat to drive the valve rod to axially displace to adjust the medium flow, characterized in that: further comprising the connecting structure applied to the semiconductor flow control component according to any one of claims 1-5, the connecting structure is used to realize the fixed connection of the diaphragm seat and the valve rod.

Images