Device and method for measuring light output performance of ultraviolet light source system

Abstract

The invention belongs to the technical field of light source system detection equipment, and particularly discloses a device and a method for measuring the light output performance of an ultraviolet light source system. The device for measuring the light output performance of the ultraviolet light source system comprises a test board, a light outlet column, a cover plate, a three-axis displacement table and an ultraviolet radiometer, the testboard is connected with a light source mounting chamber of the light source system, the top of the light source mounting chamber is provided with a light outlet, the middle of the light outlet column is provided with a light passing channel, and the cover plate is provided with a test light port; the three-axis displacement table is arranged at the test light port, and the ultraviolet radiometer is provided with a probe. The three-axis displacement table can move a probe of the ultraviolet radiometer, so that the ultraviolet radiometer can detect the irradiance of a plurality of detection points, and the irradiance uniformity in the X-axis direction, the irradiance uniformity in the Y-axis direction and the average light output irradiance of the mercury lamp light source system can be obtained through calculation. The performance of the mercury lamp and the light source system thereof can be better tested and verified, the debugging and testing time is shortened, and the production efficiency is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of light source system measuring equipment, in particular to a device and method for measuring the light output performance of an ultraviolet light source system. BACKGROUND

[0002] The light source system of a photolithography machine is one of its core important components, which can provide the required specific wavelength light for the photolithography process, and these lights are the basis for achieving high-precision pattern transfer. Generally, the light source system of a photolithography machine adopts excimer lasers, mercury lamps and extreme ultraviolet (EUV) light sources, etc. for generating ultraviolet light (UV), deep ultraviolet light (DUV) or extreme ultraviolet light (EUV). The wavelength of the light source directly determines the process capability and resolution of the photolithography machine. With the continuous progress of chip manufacturing technology, the wavelength of the light source has gradually shortened from ultraviolet light to deep ultraviolet light, and then to extreme ultraviolet light, in order to meet the demand for higher resolution and smaller feature size. The performance of the light source system directly determines the resolution, exposure uniformity and production efficiency of the photolithography machine, and is a key factor for achieving high-precision pattern transfer.

[0003] The light source system of an i-line (365nm wavelength) photolithography machine mainly adopts a mercury lamp as the light source, and its light source system generally includes key components such as a mercury lamp light source, a driving power supply, a reflecting bowl and a cold mirror. In order to ensure the accuracy and overall performance of the photolithography machine, it is necessary to ensure that the light output performance of the mercury lamp light source system meets the stringent requirements of the photolithography system. However, there is currently no special measuring device for the light source system of an i-line photolithography machine on the market. This makes it necessary to debug and test the light source system multiple times after it is installed in the photolithography machine to ensure normal use, which not only consumes time and effort and affects production efficiency, but also brings difficulties to the mercury lamp light source manufacturers in conducting comprehensive testing and verification before the products are shipped, making it difficult to ensure product quality. SUMMARY

[0004] The purpose of the present application is to provide a device and method for measuring the light output performance of an ultraviolet light source, in order to solve the technical problem in the prior art that the ultraviolet light source system needs to be installed in a photolithography machine for debugging and testing, resulting in too long debugging time and affecting production efficiency. At the same time, it is also beneficial for mercury lamp light source manufacturers to conduct sufficient testing and verification before the products are shipped, to ensure product quality.

[0005] In order to achieve the above object, the present application provides a light output performance measuring device for an ultraviolet light source system, the light source system having a light source installation chamber, the light output performance measuring device comprising: a test table, an out-light column, a cover plate, a three-axis displacement table, and an ultraviolet radiation meter; the test table is connected to the light source installation chamber of the light source system, the top of the light source installation chamber is provided with an out-light opening, the middle of the out-light column has a light passing channel, the out-light column covers the out-light opening, and the bottom end of the light passing channel is in communication with the out-light opening; the cover plate is arranged on the top of the out-light column, and the cover plate is provided with a test light opening in communication with the light passing channel; the three-axis displacement table is arranged on the cover plate, the three-axis displacement table has a moving table, and the three-axis displacement table is used to drive the moving table to move along the X-axis, Y-axis and Z-axis; the moving table is located at the test light opening, and the ultraviolet radiation meter has a probe arranged on the lower side of the moving table.

[0006] Preferably, the lower side of the moving table is provided with a probe fixing seat, and the probe is arranged on the lower side of the probe fixing seat.

[0007] Preferably, the light output performance measuring device further comprises: a light shield cover, the light shield cover is sleeved outside the probe and the probe fixing seat, and the light shield cover is used to cover the gap between the probe and the test light opening.

[0008] Preferably, the light shield cover has a straight cylinder part and a flange part, the flange part is arranged on the lower side of the straight cylinder part, the flange part is used to cover the gap between the probe and the test light opening, and the straight cylinder part is sleeved outside the probe and the probe fixing seat.

[0009] Preferably, the straight cylinder part is provided with a lead slot, the ultraviolet radiation meter has a connecting line connected to the probe, and the connecting line passes out from the lead slot.

[0010] Preferably, the probe and the probe fixing seat are both in a cylindrical shape, and the straight cylinder part is a cylindrical tube.

[0011] Preferably, the probe is located above the test light opening.

[0012] Preferably, the three-axis displacement table is arranged on the upper side of the cover plate.

[0013] Preferably, an ellipsoidal reflector bowl is arranged in the light source installation chamber, and the opening of the ellipsoidal reflector bowl faces the out-light opening.

[0014] The present application provides a light output performance measuring method, which uses the light output performance measuring device as described above, and comprises the following steps: The mercury lamp is placed in the light source installation chamber, and the power supply is started to light up the mercury lamp, and it is waited for 30-50 minutes until the mercury lamp light source reaches a steady state; The probe is moved along the X axis by using the three-axis displacement table, so that the probe sequentially passes through 5-9 X axis test points, and the irradiance of all X axis test points is measured by using the probe to obtain an average value ; The probe is moved along the Y axis by using the three-axis displacement table, so that the probe sequentially passes through 5-9 Y axis test points, and the irradiance of all Y axis test points is measured by using the probe to obtain an average value , and the average values of and are obtained as the average irradiance of the light output of the mercury lamp light source system; The maximum value and the minimum value of the irradiance of the X axis measurement point are extracted respectively, and the maximum value and the minimum value of the irradiance of the Y axis measurement point are extracted respectively, and the irradiance uniformity U x and U y in the X axis direction and the Y axis direction are calculated respectively according to the following formulae; X axis direction irradiance uniformity calculation formula: ; Y axis direction irradiance uniformity calculation formula: ; According to the X axis direction irradiance uniformity U x and the Y axis direction irradiance uniformity U y , the light output performance of the light source system is judged; if the X axis direction irradiance uniformity U x ≥95%, the Y axis direction irradiance uniformity U y ≥95%, the performance of the light source system is qualified.

[0015] Preferably, in the case of moving the probe along the X axis by using the three-axis displacement table, so that the probe sequentially passes through 5-9 X axis test points, the center point of the receiving surface of the probe is adjusted to the second focal point of the ellipsoidal reflector bowl of the light source system to obtain the first X axis test point, and then the remaining test points are symmetrically taken in the left and right directions of the X axis direction respectively to obtain 5-9 X axis test points.

[0016] Preferably, when the probe is moved along the Y-axis using a three-axis displacement stage so that the probe passes through 5 to 9 Y-axis test points in sequence, the center point of the receiving surface of the probe is adjusted to the second focus of the ellipsoidal reflector of the light source system to obtain the first Y-axis test point. Then, the remaining test points are symmetrically taken in the left and right directions along the Y-axis to obtain 5 to 9 Y-axis test points.

[0017] The light output performance measurement device and method provided by this invention have the following advantages: A mercury lamp is installed in the light source installation chamber. After the mercury lamp is turned on, the light emitted is collected and focused by an ellipsoidal reflector. Subsequently, the light passes sequentially through the light outlet, the light-passing channel of the light-emitting column, and the test light outlet, forming a light spot at the probe of the ultraviolet radiometer. The three-axis displacement stage can move the probe so that the center point of the probe's receiving surface is aligned with the second focal point of the ellipsoidal reflector. Moreover, the three-axis displacement stage's ability to move the probe allows the ultraviolet radiometer to detect the irradiance at multiple detection points. Through calculation, the irradiance uniformity in the X-axis direction, the irradiance uniformity in the Y-axis direction, and the average light output irradiance of the light source system can be obtained. Based on the irradiance uniformity in the X-axis direction, the irradiance uniformity in the Y-axis direction, and the average light output irradiance of the light source system, the performance of the mercury lamp and its light source system can be determined. Therefore, this method not only allows for better testing and verification of the performance of the mercury lamp and its light source system, ensuring the quality of the light source system products, but also significantly shortens the debugging and testing time when installing the light source system into the lithography machine, effectively improving production efficiency. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of the ultraviolet light source system light output performance measurement device according to an embodiment of the present invention; Figure 2 yes Figure 1 Enlarged structural diagram at point A; Figure 3 This is a schematic cross-sectional view of the ultraviolet light source system light output performance measurement device according to an embodiment of the present invention; Figure 4 yes Figure 3 A magnified structural diagram at point B in the middle.

[0019] In the diagram, 100 is the test platform; 110 is the light source mounting chamber; 111 is the light outlet; 120 is the ellipsoidal reflector; 200 is the light outlet column; 210 is the light transmission channel; 300 is the cover plate; 310 is the test light port; 400 is the three-axis displacement stage; 410 is the moving stage; 420 is the probe mounting base; 500 is the ultraviolet radiometer; 510 is the probe; 520 is the connecting cable; 600 is the light shield; 610 is the straight section; 620 is the flanged section; and 630 is the lead wire groove. Detailed Implementation

[0020] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0021] In the description of this invention, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc., are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0022] In the description of this invention, "multiple" means two or more; "greater than," "less than," and "exceeding" are understood to exclude the stated number; "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0023] In the description of this invention, unless otherwise explicitly defined, terms such as "set up," "install," and "connect" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this invention in conjunction with the specific content of the technical solution.

[0024] Please refer to the following: Figures 1 to 4 The light output performance measurement device for an ultraviolet light source system provided in this embodiment of the invention will now be described. The X-axis, Y-axis, and Z-axis directions are as follows: Figure 1 As shown, the light source system being measured has a light source mounting chamber 110.

[0025] like Figures 1 to 4As shown, the ultraviolet light source system light output performance measurement device of this invention includes: a test stage 100, a light-emitting column 200, a cover plate 300, a triaxial displacement stage 400, and an ultraviolet radiometer 500; the test stage 100 is connected to the light source mounting chamber 110 of the light source system, the top of the light source mounting chamber 110 is provided with a light-emitting port 111, the light-emitting column 200 has a light-passing channel 210 in the middle, the light-emitting column 200 covers the light-emitting port 111, and the bottom end of the light-passing channel 210 communicates with the light-emitting port 111; the cover plate 300... A plate 300 is disposed on top of the light-emitting column 200, and the cover plate 300 is provided with a test light port 310 communicating with the light-passing channel 210; a three-axis displacement stage 400 is disposed on the cover plate 300, and the three-axis displacement stage 400 has a moving stage 410, which is used to drive the moving stage 410 to move along the X-axis, Y-axis, and Z-axis; the moving stage 410 is located at the test light port 310, and the ultraviolet radiometer 500 has a probe 510, which is disposed on the lower side of the moving stage 410.

[0026] The light-emitting column 200 is a hollow column to allow light to pass through the light-passing channel 210. The light-emitting column 200 prevents stray light leakage from the light source system, avoiding harm to test personnel. The ultraviolet radiometer 500 is used to detect the irradiance of the ultraviolet spot at the probe 510. The light source mounting chamber 110 is used to install a mercury lamp. To facilitate light focusing, an ellipsoidal reflector 120 is provided in the light source mounting chamber 110. The opening of the ellipsoidal reflector 120 faces the light-emitting port 111, so that the light emitted by the mercury lamp is collected by the ellipsoidal reflector 120 and emitted towards the light-emitting port 111, forming a light spot on the probe 510. The three-axis displacement stage 400 has three slide rails, which are parallel to the X-axis, Y-axis, and Z-axis respectively. Each slide rail is slidably connected to a slide table for three-axis movement. In this embodiment, the Y-axis slide rail and Y-axis slide table are disposed on the X-axis slide table; the Z-axis slide table and Z-axis slide rail are disposed on the Y-axis slide table; and the moving stage 410 is disposed on the Z-axis slide table, so that the moving stage 410 can move along the X-axis, Y-axis, and Z-axis.

[0027] Understandably, when installing the mercury lamp, it is installed inside the light source mounting chamber 110, and the center of the distance between the anode and cathode of the mercury lamp is adjusted to the first focal point of the ellipsoidal reflector bowl 120. The three-axis displacement stage 400 can move the center point of the receiving surface of the probe 510 to the second focal point of the ellipsoidal reflector bowl 120, so that after the mercury lamp is turned on, a light spot is formed at the probe 510.

[0028] The operating procedure is as follows: Install the mercury lamp in the light source installation chamber 110 and turn it on. The light generated by the mercury lamp passes through the light outlet 111, the light channel 210, and the test light port 310, forming a light spot on the probe 510. After 30 to 50 minutes, the mercury lamp light source reaches a stable state, at which point the probe 510 can obtain the irradiance of the second focal point. Subsequently, use a three-axis displacement stage 400 to move the probe 510 along the X-axis, so that the probe 510 sequentially passes through 5 to 9 X-axis test points, i.e., detect the irradiance of 5 to 9 X-axis test points, and calculate the average value. Similarly, the irradiance at 5 to 9 Y-axis test points is measured, and the average value is calculated. and find and average As the average irradiance of light output in a mercury lamp light source system; It should be noted that the method for selecting the X-axis test points and Y-axis test points is as follows: take the first test point at the second focus of the ellipsoidal reflector bowl 120, and then take the remaining test points symmetrically in the left and right directions of the X-axis or Y-axis.

[0029] Finally, the maximum irradiance values ​​at the X-axis measurement points are extracted. and minimum value and the maximum irradiance at the Y-axis measurement point. and minimum value Calculate the irradiance uniformity U in the X-axis and Y-axis directions using the following formulas. x and U y ; Formula for calculating the uniformity of irradiance in the X-axis direction: ; Formula for calculating the uniformity of irradiance in the Y-axis direction: .

[0030] Therefore, through the above operations, the average irradiance of the light output of the mercury lamp's light source system, as well as the irradiance uniformity U, can be obtained. x and U y And based on the uniformity of irradiance U x and U y To determine the light output performance of the light source system, the light output performance test of the mercury lamp light source system is completed. Specifically, if the irradiance uniformity U along the X-axis direction... x ≥95% irradiance uniformity in the Y-axis direction U y The light source system performance is qualified if the efficiency is ≥95%.

[0031] In this embodiment, the mercury lamp is installed in the light source mounting chamber 110. After the mercury lamp is turned on, the light will pass through the light outlet 111, the light passage 210 of the light outlet column 200, and the test light outlet 310, and form a light spot at the probe 510 of the ultraviolet radiometer 500. The three-axis displacement stage 400 can move the probe 510 so that the center point of the receiving surface of the probe 510 is aligned with the second focal point of the ellipsoidal reflector bowl 120. Moreover, the three-axis displacement stage 400 can move the probe 510 so that the ultraviolet radiometer 500 can detect the irradiance at multiple detection points. After calculation, the irradiance uniformity in the X-axis direction, the irradiance uniformity in the Y-axis direction, and the average irradiance of the light output of the mercury lamp light source system can be obtained, so as to better test and verify the performance of the mercury lamp and its light source system, ensure the quality of the light source product, and greatly shorten the debugging and testing time of installing the light source system into the lithography machine, effectively improving production efficiency.

[0032] In some embodiments of the present invention, reference is made to... Figures 2 to 4 A probe holder 420 is provided on the lower side of the moving stage 410, and the probe 510 is disposed on the lower side of the probe holder 420. The probe holder 420 is used to fix the probe 510 so that the probe 510 faces downward, which facilitates the probe 510 to detect the light output irradiance of the light source system.

[0033] In some embodiments of the present invention, reference is made to... Figures 2 to 4 It also includes: a light shield 600; the light shield 600 is sleeved on the outside of the probe 510 and the probe mounting base 420, the light shield 600 is used to cover the gap between the probe 510 and the test light port 310, the light shield 600 can prevent stray light from leaking out from the gap between the probe 510 and the cover plate 300 of the ultraviolet radiometer 500, thereby reducing light leakage and avoiding stray light from causing harm to the test personnel and affecting the test data of the probe 510.

[0034] Based on the above, and referring to Figures 2 to 4The light shield 600 has a straight cylindrical portion 610 and a flanged portion 620. The flanged portion 620 is disposed on the lower side of the straight cylindrical portion 610 and is used to cover the gap between the probe 510 and the test light port 310. The straight cylindrical portion 610 is sleeved on the outside of the probe 510 and the probe mounting base 420, that is, the flanged portion 620 covers the gap. The lower side of the flanged portion 620 is horizontal to avoid collision or friction between the light shield 600 and the cover plate 300, so that the three-axis displacement stage 400 can move the probe 510 along the X-axis and Y-axis. Specifically, in some preferred embodiments, for ease of installation, the probe 510 and the probe mounting base 420 are both cylindrical, and the straight cylindrical portion 610 is a cylindrical tube. In addition, the probe 510 and the probe mounting base 420 can be regular shapes such as square columns, and the corresponding straight cylindrical portion 610 can be regular shapes such as square tubes.

[0035] In some embodiments of the present invention, reference is made to... Figures 2 to 4 To facilitate wiring, the straight cylindrical part 610 is provided with a lead wire groove 630, and the ultraviolet radiometer 500 is also provided with a connecting wire 520. The connecting wire 520 passes through the lead wire groove 630 and connects the ultraviolet radiometer 500 to the probe 510 so that the ultraviolet radiometer 500 can measure the irradiance of the light spot at the second focal point in a timely manner, thereby detecting the light output performance of the light source system.

[0036] In some embodiments of the present invention, reference is made to... Figures 2 to 4 To facilitate installation and testing, the probe 510 is located above the test optical port 310, and the triaxial displacement stage 400 is set on the upper side of the cover plate 300. This assembly method makes it easier for testers to adjust the position of the probe 510 and makes operation more convenient.

[0037] This embodiment also provides a method for measuring optical output performance, using the optical output performance measuring device described above; it includes the following steps: The mercury lamp is placed in the light source mounting chamber 110, which contains an ellipsoidal reflector bowl 120. The center of the distance between the anode and cathode of the mercury lamp is adjusted to the first focal point of the ellipsoidal reflector bowl 120. Then, a three-axis displacement stage 400 is used to move the center point of the receiving surface of the probe 510 to the second focal point of the ellipsoidal reflector bowl 120. The mercury lamp is then turned on, and the light source is allowed to reach a stable state for 30-50 minutes, so that the light emitted by the mercury lamp forms a light spot at the probe 510. The probe 510 is moved along the X-axis using a triaxial displacement stage 400, so that the probe 510 sequentially passes through 5 to 9 X-axis test points. The irradiance of all X-axis test points is measured using the probe 510, and the average value is calculated. ; The probe 510 is moved along the Y-axis using a triaxial displacement stage 400, so that the probe 510 passes through 5 to 9 Y-axis test points in sequence. The irradiance of all Y-axis test points is measured using the probe 510, and the average value is calculated. and find and average As the average irradiance of light output in a mercury lamp light source system; Extract the maximum irradiance values ​​at the X-axis measurement points respectively. and minimum value and the maximum irradiance at the Y-axis measurement point. and minimum value Calculate the irradiance uniformity U in the X-axis and Y-axis directions using the following formulas. x and U y ; Formula for calculating the uniformity of irradiance in the X-axis direction: ; Formula for calculating the uniformity of irradiance in the Y-axis direction: .

[0038] According to the uniformity of irradiance in the X-axis direction U x Irradiance uniformity U in the Y-axis direction y Determine the light output performance of the light source system; if the irradiance uniformity U in the X-axis direction x ≥95% irradiance uniformity in the Y-axis direction U y The light source system performance is qualified if the efficiency is ≥95%.

[0039] It should be noted that the method for selecting the X-axis test point or Y-axis test point is as follows: the center point of the receiving surface of the probe is adjusted to the second focal point of the ellipsoidal reflector bowl 120 to take the first test point, and then the remaining test points are taken symmetrically in the left and right directions of the X-axis or Y-axis.

[0040] Specifically, when the probe 510 is moved along the X-axis using a triaxial displacement stage 400, so that the probe 510 sequentially passes through 5 to 9 X-axis test points, the center point of the receiving surface of the probe 510 is adjusted to the second focal point of the ellipsoidal reflector bowl 120 of the light source system to obtain the first X-axis test point. Then, the remaining test points are symmetrically taken in the left and right directions along the X-axis to obtain 5 to 9 X-axis test points. Therefore, by using the triaxial displacement stage 400 to move the probe 510 to each X-axis test point, the irradiance of each X-axis test point can be obtained.

[0041] When the probe 510 is moved along the Y-axis using a triaxial displacement stage 400, so that the probe 510 passes through 5 to 9 Y-axis test points in sequence, the center point of the receiving surface of the probe 510 is adjusted to the second focal point of the ellipsoidal reflector bowl 120 of the light source system to obtain the first Y-axis test point. Then, the remaining test points are symmetrically taken in the left and right directions along the Y-axis to obtain 5 to 9 Y-axis test points. Therefore, by using the triaxial displacement stage 400 to move the probe 510 to each Y-axis test point, the irradiance of each Y-axis test point can be measured.

[0042] Through the above operations, the average irradiance of the light output of the mercury lamp's light source system, as well as the irradiance uniformity U, can be obtained. x and U y To complete the light output performance test of the mercury lamp light source system.

[0043] The following examples will illustrate this: Implementation Plan 1: Place a 4500W mercury lamp 1 in the light source system, and adjust the center of the distance between the anode and cathode of the mercury lamp to the first focal point of the ellipsoidal reflector 120. Calibrate the UV radiometer 500, then mount its probe 510 on the probe holder 420. Use a triaxial displacement stage 400 to adjust the center point of the receiving surface of the probe 510 to the second focal point of the ellipsoidal reflector 120. Turn on the power, start the mercury lamp, and wait 30 minutes until the mercury lamp light source reaches a stable state. Next, turn on the UV radiometer 500 for testing, and use the triaxial displacement stage 400 to move the probe 510 of the UV radiometer 500 along the X-axis. Test the irradiance at five X-axis measurement points, which are 15.02, 14.65, 14.17, 14.90, and 14.78 (unit: mW / cm²). 2 ), calculate the average irradiance It is 14.70 mW / cm 2 Subsequently, a triaxial displacement stage 400 was used to reset the probe 510 of the ultraviolet radiometer 500, adjusting the center point of the receiving surface of the probe 510 back to the second focal point of the ellipsoidal reflector bowl 120. The irradiance at the first point on the Y-axis was measured. Then, the stage was moved along the Y-axis, and the irradiance at a total of 5 Y-axis measurement points was obtained, which were 15.02, 14.81, 13.63, 14.24, and 13.82 (unit: mW / cm²). 2 ), calculate the average It is 14.30 mW / cm 2 The irradiance uniformity along the X-axis was calculated to be 97.09%, and the irradiance uniformity along the Y-axis was calculated to be 95.15%, indicating that the performance of the light source system was qualified.

[0044] Implementation Plan Two: A 4500W mercury lamp was placed in the light source system, and the center of the distance between the anode and cathode of the mercury lamp was adjusted to be at the first focal point of the ellipsoidal reflector bowl 120. The ultraviolet radiometer 500 was calibrated, and its probe 510 was mounted on the probe holder 420. The center point of the receiving surface of the probe 510 was adjusted to the second focal point of the ellipsoidal reflector bowl 120 using a triaxial displacement stage 400. The power was turned on, the mercury lamp was started, and 40 minutes were allowed for the light source to stabilize. Next, the ultraviolet radiometer 500 was turned on for testing. The probe 510 of the ultraviolet radiometer 500 was moved along the X-axis using the triaxial displacement stage 400, and the irradiance at seven X-axis measurement points was obtained: 15.21, 15.02, 14.87, 13.93, 15.14, 14.42, and 13.82 (unit: mW / cm²). 2 ), calculate the average value It is 14.63 mW / cm 2 Subsequently, a triaxial displacement stage 400 was used to reset the probe 510 of the ultraviolet radiometer 500, adjusting the center point of the receiving surface of the probe 510 back to the second focal point of the ellipsoidal reflector bowl 120 to measure the irradiance at the first point on the Y-axis. Then, the probe was moved along the Y-axis, acquiring the irradiance at seven Y-axis measurement points: 15.21, 14.46, 14.01, 13.78, 14.80, 14.07, and 13.79 (unit: mW / cm²). 2 ), calculate the average It is 14.30 mW / cm 2 The irradiance uniformity along the X-axis was calculated to be 95.21%, and the irradiance uniformity along the Y-axis was calculated to be 95.07%. Therefore, the performance of the light source system is qualified.

[0045] Implementation Plan 3: A 4500W mercury lamp (light source 3) was placed in the light source system, and the center of the distance between the anode and cathode of the mercury lamp was adjusted to be at the first focal point of the ellipsoidal reflector bowl 120. The UV radiometer 500 was calibrated, and then its probe 510 was mounted on the probe holder 420. The center point of the receiving surface of the probe 510 was adjusted to the second focal point of the ellipsoidal reflector bowl 120 using a triaxial displacement stage 400. The power was turned on, the mercury lamp was started, and 40 minutes were allowed for the light source to stabilize. Next, the UV radiometer 500 was turned on for testing. The triaxial displacement stage 400 was used to move the probe 510 of the UV radiometer 500 along the X-axis, and the irradiance at nine X-axis measurement points was obtained: 15.17, 15.15, 14.95, 14.06, 13.76, 15.13, 14.71, 14.29, and 13.73 (unit: mW / cm²). 2 ), calculate the average value It is 14.55mW / cm 2Subsequently, a triaxial displacement stage 400 was used to reset the probe 510 of the ultraviolet radiometer 500, adjusting the center point of the receiving surface of the probe 510 back to the second focal point of the ellipsoidal reflector bowl 120 to measure the irradiance at the first point on the Y-axis. Then, the probe was moved along the Y-axis, acquiring the irradiance at nine Y-axis measurement points: 15.17, 14.92, 14.25, 13.79, 13.75, 14.68, 14.31, 13.90, and 13.76 (unit: mW / cm²). 2 ), calculate the average It is 14.28 mW / cm 2 The irradiance uniformity along the X-axis was calculated to be 95.02%, and the irradiance uniformity along the Y-axis was calculated to be 95.09%. Therefore, the performance of the light source system is qualified.

[0046] The above are merely preferred embodiments of the present invention. It should be noted that those skilled in the art can make several improvements and substitutions without departing from the technical principles of the present invention, and these improvements and substitutions should also be considered within the scope of protection of the present invention.

Claims

1. A device for measuring the light output performance of an ultraviolet light source system, wherein the light source system has a light source mounting chamber, characterized in that, include: The system comprises a test stage, a light-emitting column, a cover plate, a three-axis displacement stage, and an ultraviolet radiometer. The test stage is connected to the light source mounting chamber of the light source system. The top of the light source mounting chamber has a light-emitting port. The light-emitting column has a light-passing channel in the middle, and the light-emitting column covers the light-emitting port. The bottom end of the light-passing channel communicates with the light-emitting port. The cover plate is located on top of the light-emitting column and has a test light port communicating with the light-passing channel. The three-axis displacement stage is located on the cover plate and has a moving stage for driving the moving stage to move along the X, Y, and Z axes. The moving stage is located at the test light port, and the ultraviolet radiometer has a probe located below the moving stage.

2. The ultraviolet light source system light output performance measurement device according to claim 1, characterized in that, A probe mounting base is provided on the lower side of the mobile stage, and the probe is located on the lower side of the probe mounting base.

3. The ultraviolet light source system light output performance measurement device according to claim 2, characterized in that, Also includes: A light shield; the light shield is fitted over the outside of the probe and the probe mounting base, and the light shield is used to cover the gap between the probe and the test light port.

4. The ultraviolet light source system light output performance measurement device according to claim 3, characterized in that, The light shield has a straight cylindrical part and a flanged part. The flanged part is disposed on the lower side of the straight cylindrical part and is used to cover the gap between the probe and the test light port. The straight cylindrical part is sleeved on the outside of the probe and the probe mounting base.

5. The ultraviolet light source system light output performance measurement device according to claim 4, characterized in that, The straight cylindrical section is provided with a lead wire groove, and the ultraviolet radiometer has a connecting wire that connects to the probe, and the connecting wire passes through the lead wire groove.

6. The ultraviolet light source system light output performance measurement device according to claim 4, characterized in that, Both the probe and the probe holder are cylindrical, and the straight section is a cylindrical tube.

7. The ultraviolet light source system light output performance measurement device according to claim 1, characterized in that, The probe is located above the test optical port.

8. A method for measuring optical output performance, characterized in that, The device for measuring the light output performance of an ultraviolet light source system as described in any one of claims 1-7 includes the following steps: Place the mercury lamp in the light source installation chamber and turn on the power to light the mercury lamp. Wait 30-50 minutes until the mercury lamp light source reaches a stable state. The probe is moved along the X-axis using a three-axis displacement stage, so that the probe passes through 5 to 9 X-axis test points in sequence. The irradiance of all X-axis test points is measured using the probe, and the average value is calculated. ; The probe is moved along the Y-axis using a three-axis displacement stage, so that the probe passes through 5 to 9 Y-axis test points in sequence. The irradiance of all Y-axis test points is measured using the probe, and the average value is calculated. and find and average Average irradiance of light output as a light source system; Extract the maximum irradiance values ​​at the X-axis measurement points respectively. and minimum value and the maximum irradiance at the Y-axis measurement point. and minimum value Calculate the irradiance uniformity U in the X-axis and Y-axis directions using the following formulas. x and U y ; Formula for calculating the uniformity of irradiance in the X-axis direction: ； Formula for calculating the uniformity of irradiance in the Y-axis direction: ； According to the uniformity of irradiance in the X-axis direction U x Irradiance uniformity U in the Y-axis direction y Determine the light output performance of the light source system; if the irradiance uniformity U in the X-axis direction x ≥95% irradiance uniformity in the Y-axis direction U y The light source system performance is qualified if the efficiency is ≥95%.

9. The method for measuring optical output performance according to claim 8, characterized in that, When the probe is moved along the X-axis using a three-axis displacement stage, so that the probe passes through 5 to 9 X-axis test points in sequence, the center point of the receiving surface of the probe is adjusted to the second focus of the ellipsoidal reflector of the light source system to obtain the first X-axis test point. Then, the remaining test points are symmetrically taken in the left and right directions along the X-axis to obtain 5 to 9 X-axis test points.

10. The method for measuring optical output performance according to claim 9, characterized in that, When the probe is moved along the Y-axis using a three-axis displacement stage, so that the probe passes through 5 to 9 Y-axis test points in sequence, the center point of the receiving surface of the probe is adjusted to the second focus of the ellipsoidal reflector of the light source system to obtain the first Y-axis test point. Then, the remaining test points are symmetrically taken in the left and right directions along the Y-axis to obtain 5 to 9 Y-axis test points.

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