All-spectrum analyzer for wideband high-resolution signal demodulation of MEMS optical sensors

Abstract

A full-spectrum analyzer for MEMS optical sensor wide-frequency high-resolution signal demodulation, comprising: a shared ultra-flat broadband light source, provided with a first laser and a second laser for saturating amplification of light from the first laser within a given broadband; a first coupler arranged to divide the light from the shared ultra-flat broadband light source into two or more paths; a wavelength scanning demodulation device; a laser interference phase demodulation device; and a self-compensation device. Furthermore, the disclosure also proposes a self-compensation method based on the above analyzer. The full-spectrum analyzer and the corresponding self-compensation method of the disclosure aim to improve the wide-frequency response capability and measurement resolution of multi-beam interference type and double-beam interference type MEMS optical sensors.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of MEMS optical sensing, in particular to a full-spectrum analyzer for MEMS optical sensor wide-frequency high-resolution signal demodulation. BACKGROUND

[0002] The MEMS optical sensor based on the principle of microcavity interferometer is essentially a MEMS optical chip and sensor of the precision displacement measuring instrument of the optical interferometer type, which has the advantages of both the microcavity interferometric optical sensing signal high-precision modulation / demodulation technology and the MEMS micro-nano integrated manufacturing technology, and has the significant advantages of optical measurement, passive and electric, anti-electromagnetic interference, radiation resistance, small volume, light weight, wide temperature working, ultra-high precision, etc., and has been widely applied in the fields of wind turbine blade and tower structure damage identification and aerodynamic load measurement, rail train pantograph net contact pressure and line hard point detection, high-voltage power transmission and transformation equipment partial discharge pressure wave and ultrasonic monitoring, nuclear power unit process industry pressure and flow measurement, aerospace equipment structure monitoring and predictive health management (PHM), semiconductor equipment vacuum degree measurement, etc.

[0003] The current equipment for MEMS optical sensor signal demodulation is mainly based on two technical paths: laser interference high-speed phase demodulation technology suitable for double-beam interference type MEMS optical sensor signal demodulation and wavelength scanning query wavelength demodulation technology suitable for multi-beam interference type MEMS optical sensor signal demodulation. First, the laser interference high-speed phase demodulation technology obtains the phase signal of the MEMS optical sensor interference spectrum through three or more specific laser wavelengths, and further calculates the dynamic change of the MEMS optical sensor interference cavity length. Its advantages are large range (the change range of the interference cavity length is from tens of pm to hundreds of μm) and high signal acquisition frequency (hundreds of kHz to hundreds of MHz). Its disadvantages are low resolution (the effective resolution of the change of the interference cavity length is tens of pm) and inability to measure "zero frequency" signals, which leads to the fact that the double-beam interference type MEMS optical sensor can only be used for dynamic measurement of relative physical quantities (i.e. relative value measurement). Taking the double-beam interference type MEMS optical acceleration sensor as an example, it can only be used for vibration measurement and cannot be used for inclination and inertial navigation measurement. Second, the wavelength scanning query wavelength demodulation technology is to finely scan the interference spectrum of the multi-beam interference type MEMS optical sensor by using a narrow linewidth laser with continuous wavelength scanning and tuning, to obtain the center wavelength signal, and to further calculate the real-time absolute value of the interference cavity length of the MEMS optical sensor. Its advantages are high resolution (the detection resolution of the absolute value of the interference cavity length can reach 1 pm level) and high precision (the intensity variation of the light source and the transmission line loss have little effect on the wavelength detection precision). Its disadvantages are limited by the bandwidth of the light source (it is difficult to exceed 100 nm spectral range) and the wavelength scanning tuning rate (it is difficult to reach MHz level), so it is difficult to measure more than 1 μm of the change of the interference cavity length, and the signal demodulation rate is usually only hundreds of kHz, which is useless for high-frequency vibration and impact pressure measurement. Due to the limitations of existing spectral signal demodulation technology and related equipment, MEMS optical sensors may have one or more of the following problems in actual application in the industrial field: the problem of not being able to balance absolute value measurement and relative value measurement, the problem of mutual restriction of high resolution and wide frequency response, the problem of clock synchronization between multi-category spectral signal demodulation equipment, and the problem of random error of multiple MEMS optical sensors caused by differential spectral fluctuation and attenuation change of equipment light source, etc. For example, the balance between high demodulation accuracy and speed: while pursuing high accuracy, the demodulation technology usually cannot balance high-speed demodulation, and vice versa. For example, multi-type sensor compatibility: the existing multi-type sensor needs multiple demodulators to calculate, which leads to different system clocks, complex system, and high cost.For example, light source cost and integration: wavelength scanning query method wavelength demodulation device and laser interference high-speed phase demodulation device usually need to be equipped with independent light sources respectively, increasing the system cost and complexity, especially three-wavelength laser interference demodulation system (even four-wavelength or more wavelength laser interference demodulation system), which traditionally needs multiple independent lasers, and the system error between different light sources is large, the cost is high, and the volume is large. For example, multi-modal data decoupling problem: temperature / pressure, strain, acceleration, displacement, force decoupling. The traditional system cannot fuse and decouple multi-modal data, resulting in temperature drift problem and large temperature coefficient error of Young's modulus. For example, static / dynamic mutual calibration problem: such as measuring the volume flow of the thermometer and the cross flow of the accelerometer, which need to be measured simultaneously and mutually calibrated. The traditional system cannot solve the problem of simultaneous measurement of relative value and absolute value. For example, system stability in the whole temperature range: the wavelength scanning query method wavelength demodulation device and the laser interference high-speed phase demodulation device in the whole temperature (-55℃~85℃) region, due to the wavelength drift, phase drift and optical power fluctuation of the laser in the whole temperature region, resulting in the decrease of the stability of the system, and even the failure of signal demodulation.

[0004] Therefore, the prior art still needs to be improved and improved.

[0005] It should be noted that the above introduction to the technical background is only for the convenience of clearly and completely describing the technical solutions of the present application, and facilitating the understanding of those skilled in the art. The above technical solutions cannot be considered as known to those skilled in the art just because they are described in the background section of the present application. SUMMARY

[0006] In order to solve one or more of the above technical problems, the present disclosure provides a full-spectrum analyzer for MEMS optical sensor wide frequency high resolution signal demodulation, which aims to realize real-time, synchronous, high-resolution, high-speed measurement of interference spectrum signal wavelength, phase and power, improve the wide frequency response capability and measurement resolution of multi-beam interference type and double-beam interference type MEMS optical sensor, especially solve the technical bottleneck problem that the existing sensor must sacrifice the measurement resolution when improving the frequency response range, at the same time, solve the problem that the existing three-wavelength high-speed phase demodulation technology cannot realize "zero frequency" signal measurement, resulting in that the double-beam interference type MEMS optical sensor can only be used for dynamic measurement of relative change physical quantity (i.e. relative value measurement), and the wavelength scanning query method wavelength demodulation technology is limited by the bandwidth of the light source and cannot realize wavelength signal demodulation in the range of 100nm, 100kHz to MHz, resulting in the bottleneck problem that the current multi-beam interference type MEMS optical sensor has small range and low frequency response in high resolution mode.

[0007] In a first aspect of the present disclosure, a full spectrum analyzer for MEMS optical sensor wide frequency high resolution signal demodulation is provided, which comprises: a shared ultra-flat broadband light source, which is provided with a first laser and a second laser for saturating amplification of light from the first laser within a given broadband; a first coupler, which is configured to split light from the shared ultra-flat broadband light source into two or more paths; a wavelength scanning demodulation device, which is configured to modulate light from one path of the first coupler into a linear sweep light signal and transmit the light to a microcavity multi-beam interference type MEMS optical sensor, and generate corresponding electrical signals by photoelectric conversion of the spectrum signal reflected by the microcavity multi-beam interference type MEMS optical sensor for data acquisition and processing to obtain the wavelength value of the microcavity multi-beam interference type MEMS optical sensor and the corresponding calculated measured physical quantity; a laser interference phase demodulation device, which is configured to transmit light from another path of the first coupler to a microcavity double-beam interference type MEMS optical sensor after splitting, and generate corresponding electrical signals by photoelectric conversion of the spectrum signal reflected by the microcavity double-beam interference type MEMS optical sensor for data acquisition and processing to obtain the phase value of the microcavity double-beam interference type MEMS optical sensor and the corresponding calculated measured physical quantity; a self-compensation device, which is configured to synchronize the data acquisition clock of the wavelength scanning demodulation device with the data acquisition clock of the laser interference phase demodulation device, and compensate the obtained phase value and the corresponding calculated measured physical quantity with the obtained wavelength value and the corresponding calculated measured physical quantity, or correct the obtained wavelength value and the corresponding calculated measured physical quantity with the obtained phase value and the corresponding calculated measured physical quantity.

[0008] Further, in some embodiments, the first laser is configured as a SOA laser, and a 50:50 coupler is arranged at the input end of the SOA laser to loop back the light; an optical isolator is arranged between the second laser and the first laser to prevent the reflected light signal from affecting the output signal of the second laser.

[0009] Further, in some embodiments, the wavelength scanning demodulation device is configured to perform wavelength scanning on the light from one path of the first coupler to generate a first scanning light and a second scanning light.

[0010] Further, in some embodiments, the wavelength scanning demodulation device is configured to transmit the first scanning light to a wavelength reference etalon for forming a measurement calibration spectrum of the wavelength scanning demodulation device.

[0011] Further, in some embodiments, the wavelength scanning demodulation device is configured to transmit the second scanning light to the end of the microcavity multi-beam interference MEMS optical sensor through a 50:50 coupler, and transmit the output reflected light of the microcavity multi-beam interference MEMS optical sensor to the photodetector through the 50:50 coupler.

[0012] Further, in some embodiments, the wavelength scanning demodulation device is configured to transmit the second scanning light to the microcavity multi-beam interference MEMS optical sensor array through a 50:50 coupler for measuring one or more physical quantities of temperature, strain, pressure, acceleration, displacement, force, and sound pressure.

[0013] Further, in some embodiments, the laser interference phase demodulation device is configured to transmit light to the end of the microcavity dual-beam interference MEMS optical sensor through a 50:50 coupler, and transmit the output reflected light of the microcavity dual-beam interference MEMS optical sensor to the dense wavelength division multiplexer through the 50:50 coupler.

[0014] Further, in some embodiments, the dense wavelength division multiplexer is configured to include a first dense wavelength division multiplexer, a second dense wavelength division multiplexer, and a third dense wavelength division multiplexer, or the dense wavelength division multiplexer is configured to include a first dense wavelength division multiplexer, a second dense wavelength division multiplexer, a third dense wavelength division multiplexer, and a fourth dense wavelength division multiplexer.

[0015] Further, in some embodiments, the dense wavelength division multiplexer is configured to multiplex and demultiplex optical signals of different wavelengths, so that light of a given wavelength enters a corresponding photodetector.

[0016] Further, in some embodiments, the full-spectrum analyzer further includes: a multi-channel photoelectric conversion amplifier configured to amplify and condition the electrical signals output by the multi-channel photodetector, so that the signal-to-noise ratio and amplitude meet the input requirements of the analog-to-digital conversion collector for analog electrical signals; an analog-to-digital conversion collector configured to convert the analog voltage signals output by the photoelectric conversion amplifier into digital signals that can be read by the embedded processor; the embedded processor is configured to synchronously read and control the MEMS optical sensor interference spectrum data collected by the analog-to-digital conversion collector, and demodulate the wavelength, phase and power signals contained in the interference spectrum data, so as to realize the calculation of each measured physical quantity, and the mutual compensation or mutual correction between multiple measured physical quantities.

[0017] The second aspect of the present disclosure also provides a self-compensation method based on the full-spectrum analyzer, which comprises: synchronously calibrating a data collection clock of the wavelength scanning demodulation device and a data collection clock of the laser interference phase demodulation device; and compensating or correcting one or more phase values and corresponding calculated measured physical quantities collected and obtained by the laser interference phase demodulation device in a first non-collection half cycle and a second collection half cycle by using a first wavelength value and corresponding calculated measured physical quantities collected and obtained by the wavelength scanning demodulation device in the first collection half cycle.

[0018] Further, the self-compensation method also comprises: compensating or correcting one or more phase values and corresponding calculated measured physical quantities collected and obtained by the laser interference phase demodulation device in a second non-collection half cycle and a third collection half cycle by using a second wavelength value and corresponding calculated measured physical quantities collected and obtained by the wavelength scanning demodulation device in the second collection half cycle.

[0019] Further, the self-compensation method also comprises: compensating or correcting one or more phase values and corresponding calculated measured physical quantities collected and obtained by the laser interference phase demodulation device in an Nth non-collection half cycle and an N+1th collection half cycle by using an Nth wavelength value and corresponding calculated measured physical quantities collected and obtained by the wavelength scanning demodulation device in the Nth collection half cycle, wherein N is a positive integer.

[0020] The third aspect of the present disclosure also provides a self-compensation method based on the full-spectrum analyzer, which comprises: synchronously calibrating a data collection clock of the wavelength scanning demodulation device and a data collection clock of the phase demodulation device; and correcting or compensating a first wavelength value and corresponding calculated measured physical quantities collected and obtained by the wavelength scanning demodulation device at the end of a first collection half cycle by using one or more phase values and corresponding calculated measured physical quantities collected and obtained by the phase demodulation device at the end of the first collection half cycle.

[0021] The present disclosure has the following beneficial effects:

[0022] In some embodiments, real-time, synchronous, high-resolution, high-speed measurement of the wavelength, phase and power of the interferometric optical sensor spectrum signal is achieved, and the "full spectrum" signal demodulation capability suitable for interferometric optical sensors is truly achieved, so that different types of MEMS optical sensors such as temperature, strain, pressure, acceleration, displacement, force, sound pressure, etc. The physical quantities sensed by the sensor can be data collected by the full spectrum analyzer of the present disclosure, and the absolute and relative value measurement capabilities and the high-resolution and high-precision measurement capabilities of the static "zero frequency" direct current signal and the transient signal are taken into account. From the signal demodulation level, the wide frequency response capability and measurement resolution of multi-beam interferometric and double-beam interferometric MEMS optical sensors are improved, which solves the technical bottleneck problem that the existing sensor must sacrifice the measurement resolution when increasing the frequency response range. At the same time, it can solve the problem that the existing three-wavelength high-speed phase demodulation technology cannot realize "zero frequency" signal measurement, which leads to the fact that double-beam interferometric MEMS optical sensors can only be used for dynamic measurement of relative change physical quantities (i.e. relative value measurement), and the wavelength demodulation technology of the existing wavelength scanning query method is limited by the bandwidth of the light source and cannot realize wavelength signal demodulation in a 100nm spectral range and 100kHz to MHz, which leads to the bottleneck problem that the current multi-beam interferometric MEMS optical sensor has a small range and a low frequency response in high-resolution mode. The high-resolution, high-precision, wide frequency response, large range and other key performance of MEMS optical sensors meet the application requirements in wind turbine blade and tower structure damage identification and aerodynamic load measurement, rail train pantograph net contact pressure and line hard point detection, high-voltage power transmission and transformation equipment partial discharge pressure wave and ultrasonic monitoring, nuclear power unit process industry pressure and flow measurement, aerospace equipment structure monitoring and predictive health management (PHM), semiconductor equipment vacuum measurement and other important industrial fields. Further, the full spectrum analyzer of the present disclosure is suitable for individual batch networking use or mixed batch networking use of various types of MEMS optical sensors such as double-beam interferometric and multi-beam interferometric, which expands the ability of MEMS optical sensors to solve complex problems in industrial digitalization and intelligentization in industrial fields. The full spectrum analyzer is beneficial to ensure the real-time synchronization performance of multi-modal data and the mutual compensation and correction between dynamic data and static data and multi-physical quantity data in multi-channel application scenarios.

[0023] In some embodiments, by using the same super-flat broadband light source, the wavelength scanning demodulation device and the laser interference phase demodulation device are homologous, which is beneficial to ensure the real-time synchronization performance of the measurement, suppress and offset the random errors of the multiple MEMS optical sensors caused by the spectral fluctuations and attenuation changes of the light source, improve the integration of the MEMS optical sensor signal demodulation device, and significantly reduce the cost, volume, power consumption and maintenance workload of the MEMS optical sensor measurement system. Further, in the laser interference phase demodulation device, the wavelength is selected from the common super-flat broadband light source, which replaces the traditional three or more independent lasers which are expensive, bulky and have high power consumption, and eliminates the random measurement errors caused by the differentiated spectral fluctuations and attenuation changes of the three or more independent lasers. BRIEF DESCRIPTION OF DRAWINGS

[0024] The above and other features, advantages, and aspects of embodiments of the present disclosure will become more apparent by describing in detail the following embodiments thereof with reference to the attached drawings, in which:

[0025] Figure 1 A general schematic diagram of a full spectrum analyzer for MEMS optical sensor wide frequency high resolution signal demodulation according to an embodiment of the present disclosure is shown;

[0026] Figure 2 A schematic diagram of a common super-flat broadband light source according to an embodiment of the present disclosure is shown;

[0027] Figure 3 A general schematic diagram of another example of a full spectrum analyzer for MEMS optical sensor wide frequency high resolution signal demodulation according to an embodiment of the present disclosure is shown;

[0028] Figure 4 A general schematic diagram of still another example of a full spectrum analyzer for MEMS optical sensor wide frequency high resolution signal demodulation according to an embodiment of the present disclosure is shown;

[0029] Figure 5 A flowchart of a self-compensation device of a full spectrum analyzer for MEMS optical sensor wide frequency high resolution signal demodulation according to an embodiment of the present disclosure is shown;

[0030] Figure 6 A data acquisition timing diagram of a self-compensation device of a full spectrum analyzer for MEMS optical sensor wide frequency high resolution signal demodulation according to an embodiment of the present disclosure is shown; and

[0031] In each of the drawings, the same or corresponding reference numerals represent the same or corresponding parts. DETAILED DESCRIPTION

[0032] Embodiments of the present disclosure will be described below in greater detail with reference to the accompanying drawings. While certain embodiments of the present disclosure are shown in the drawings, it is understood that the present disclosure can be embodied in various forms and should not be interpreted as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that the present disclosure will be thoroughly and completely understood. It should be understood that the drawings and embodiments of the present disclosure are for illustrative purposes only and are not intended to limit the scope of the present disclosure.

[0033] In the description of embodiments of the present disclosure, the term "includes" and its derivatives are to be construed as open-ended, i.e., as "comprising but not limited to." The term "based on" is to be construed as "based at least in part on." The term "one embodiment" or "an embodiment" are to be construed as "at least one embodiment." The term "another embodiment" is to be construed as "at least one other embodiment." The terms "first," "second," etc. can refer to different or the same objects. Other explicitly and implicitly recited definitions can also be found below.

[0034] Generally, the existing MEMS optical sensor signal demodulation device has the following challenges: the problem of not being able to balance absolute value measurement and relative value measurement, the problem of high resolution and wide frequency response being mutually restricted, the problem of clock synchronization between multi-category spectrum signal demodulation devices, and the problem of random errors of multiple MEMS optical sensors not being able to offset each other due to the difference in spectrum fluctuation and attenuation change of the device light source. For example, 1) the contradiction between high resolution and wide frequency response: the existing high-resolution signal demodulation device cannot simultaneously realize high-speed signal acquisition, which limits the detection ability of weak and transient signals. This is often a typical signal feature when industrial equipment such as wind turbines, subway train pantographs, high-voltage transmission and transformation equipment, etc. fail or early damage occurs (the ultrasonic signal of the early transformer partial discharge fault is a weak sound pressure signal with a frequency of 10 kHz to MHz and an amplitude of dozens of μPa, which is extremely difficult to capture, far exceeding the detection capability of existing sensors). For another example, 2) the signal demodulation device of multiple types of sensors is not compatible: the existing multi-type sensor needs multiple demodulation instruments to solve, which leads to system clock out of synchronization, complex system, and high cost. For yet another example, 3) the problem of light source cost and integration: wavelength scanning query method wavelength demodulation device and laser interference high-speed phase demodulation device usually need to be equipped with independent light sources respectively, which increases the system cost and complexity, especially for three-wavelength laser interference demodulation system (even four-wavelength or more wavelength laser interference demodulation system), multiple independent lasers are needed, and the system error between different light sources is large, the cost is high, and the volume is large. For still another example, 4) the problem of decoupling of multi-modal data: temperature, pressure, strain, acceleration, displacement, force and other physical quantities are coupled in actual industrial applications, and the existing signal demodulation device cannot realize high resolution and high-speed acquisition of static and transient signals. For a single MEMS optical sensor, there is a temperature drift problem and a sensitivity K value error problem introduced by the temperature coefficient of Young's modulus; and for multiple MEMS optical sensors, there is a mutual calibration problem of static / dynamic: such as the error introduced by the acceleration of the aircraft when measuring the liquid level of the aircraft fuel tank with a MEMS optical pressure sensor, which needs to be measured and calibrated simultaneously.

[0035] To solve one or more problems in the prior art, or potential problems or part of the problems, the following will be described in more detail in combination with the drawings.

[0036] As Figure 1As shown, in the example embodiment, a full spectrum analyzer for MEMS optical sensor wideband high resolution signal demodulation is proposed, which obviously comprises: a shared super-flat broadband light source, a first coupler, a wavelength scanning demodulation device, a laser interference phase demodulation device, and a self-compensation device.

[0037] Regarding the shared super-flat broadband light source, it needs to be explained in combination with Figure 2 In the example embodiment, the shared super-flat broadband light source can be a shared broadband light source (in other embodiments, in order to appropriately sacrifice measurement accuracy to reduce cost, it can also be an ASE light source, also referred to as a super-flat broadband light source in some embodiments), which is provided with a first laser (for example, SOA1 laser shown) and a second laser (for example, SOA2 laser shown) for saturating amplification of light from the above-mentioned first laser within a given broadband. In further embodiments, the first laser is provided as a SOA laser, and at the input end of the above-mentioned SOA laser, a light loopback is performed through a 50:50 coupler; an optical isolator is provided between the above-mentioned second laser and the above-mentioned first laser, for preventing the reflected light signal from affecting the output signal of the above-mentioned second laser. It should also be understood that in some embodiments, the shared super-flat broadband light source can use one broadband light source (for example, it can be the super-flat broadband light source shown, or it can be an ASE light source, Amplified Spontaneous Emission Source) as the shared light source of the entire system, and the light is split into two paths through a coupler. Further, the shared super-flat broadband light source uses a SOA semiconductor laser to achieve a bandwidth of more than 80 nm, and compared with the form of a 980 nm pump laser plus an erbium-doped fiber, the light power in the SOA semiconductor laser wavelength band is more flat, and the SOA laser does not change the light intensity with temperature changes. The light power of the 980 nm pump laser has a hump, and will change with temperature changes. The erbium-doped fiber has a relatively low conversion efficiency under low temperature conditions, resulting in a decrease in light power.

[0038] Further, referring to Figure 1 in combination with Figure 3 and Figure 4 In the example embodiment, the first coupler (labeled as coupler-1) is provided to split the light from the above-mentioned shared super-flat broadband light source into two paths (it should be understood that in some embodiments, it can of course also be multiple paths).

[0039] Regarding the wavelength scanning demodulation device, referring to Figure 1 in combination with Figure 3 and Figure 4In an example embodiment, the wavelength scanning demodulation device, for example, can be a high-speed wavelength scanning demodulation device that uses one light from a first coupler (coupler-1) for measurement of a wavelength scanning system. The wavelength scanning demodulation device modulates light generated by a broadband light source into a narrow linewidth light signal with wavelength linear sweep through a wavelength tunable filter, transmits the light to a MEMS optical sensor (for example, MEMS optical sensor 1 to MEMS optical sensor 16) via a fiber coupler (coupler-2), generates an electrical signal from a spectrum signal reflected by the MEMS optical sensor through a multi-channel photoelectric conversion amplifier (for example, PD1-PD64), collects and demodulates the wavelength, phase, and power signals contained in the interference spectrum data through an analog-to-digital conversion collector and an embedded processor, further calculates each measured physical quantity, and mutually compensates and corrects multiple measured physical quantities. Regarding the first coupler (labeled as coupler-1 in the figure), it is a 1*2 coupler that divides the light from the super-flat broadband light source into two paths; one path is used for the wavelength scanning demodulation device, and the other path is used for the laser interference phase demodulation device (three-wavelength or four-wavelength or more wavelength laser interference phase demodulation device). Regarding the wavelength tunable filter (Tunable Filter), its input end is connected to the output end of the 1*2 coupler-1, and is used to selectively modulate the broadband spectrum generated by the super-flat broadband light source into narrow linewidth scanning light with periodically changing wavelength, which is controlled by the control circuit of the laser interference phase demodulation device. In addition, the other 1*2 coupler (labeled as coupler-2 in the figure) is connected to the output end of the tunable filter and the input end of the 1*2 coupler-1; a part of the scanning light is divided to the wavelength reference etalon for forming the measurement calibration spectrum of the wavelength scanning demodulation device; another part of the scanning light is divided to the measurement channel of the wavelength scanning demodulation device for measurement of the MEMS optical sensor. Regarding the DWDM with a center wavelength of 1530.3nm, one end of the small splitting ratio of the 1*2 coupler-2 is connected to the input end of the DWDM for forming a notch mark on the measurement accurate spectrum of the wavelength reference etalon. Regarding the wavelength reference etalon, the output end of the DWDM with a center wavelength of 1530.3nm is connected to the input end of the wavelength reference etalon to provide a high-stability accurate wavelength value reference for the wavelength scanning demodulation device. Regarding the 1*16 PLC (Planar Lightwave Circuit Splitter)-1, one end of the large splitting ratio of the 1*2 coupler-2 is connected to the input end of the 1*16 PLC-1 to divide the scanning light into 16 equal parts.Further, as to the diagram 50:50 coupler: it connects the output light of 1*16 PLC-1 with the input end of 16 50:50 couplers, transmits the light through the 50:50 coupler to the MEMS optical sensor end, and transmits the reflected light of the MEMS optical sensor through the 50:50 coupler to the photodetector. As to the MEMS optical sensor (also applicable to wavelength type fiber sensor such as fiber grating and multi-beam interference type F-P fiber sensor with high precision spectrum) array (MEMS optical sensor 1 to MEMS optical sensor 16 in the diagram): it connects the MEMS optical sensor array through 1*16 PLC, for temperature, strain, pressure, acceleration, displacement, force, sound pressure and other physical quantities.

[0040] Further, in some embodiments, the wavelength scanning demodulation device described above is configured to perform wavelength scanning on one light from the first coupler to generate first scanning light and second scanning light. The first scanning light is transmitted to a wavelength reference etalon for forming a precise wavelength value reference of the wavelength scanning demodulation device. In addition, the second scanning light is transmitted through a 50:50 coupler to the MEMS optical sensor end, and the reflected light of the MEMS optical sensor is transmitted through the 50:50 coupler to the multi-channel photoelectric conversion amplifier. Further, the second scanning light is transmitted through the 50:50 coupler to the MEMS optical sensor array for measuring one or more physical quantities such as temperature, strain, pressure, acceleration, displacement, force, sound pressure, etc.

[0041] Furthermore, regarding the laser interferometric phase demodulation device, in some embodiments, the device splits the other light source from the first coupler and transmits it to the MEMS optical sensor via an optical fiber coupler. The light signal reflected from the MEMS optical sensor is then transmitted via a dense wavelength division multiplexer (DWDM), which selects three, four, or more specific wavelengths to acquire the phase of the MEMS optical sensor. Regarding the 1*16 PLC (PlanarLightwave Circuit Splitter)-2: it is connected to the output of the 1*2 coupler-1 and the input of the 1*16 PLC-2, dividing the light from the ultra-flat broadband light source into 16 equal parts. Regarding the 50:50 couplers: the output light of the 1*16 PLC-2 is connected to the inputs of 16 other 50:50 couplers, transmitting the light to the MEMS optical sensor via the 50:50 couplers, and transmitting the reflected light from the MEMS optical sensor to the DWDM via the 50:50 couplers. Regarding the MEMS optical sensor array (MEMS optical sensors 17 to 32 shown in the illustration, which can also be dual-beam interferometric FP fiber sensors with low-resolution spectra): it is connected to a three-wavelength system via a 50:50 coupler for measuring physical quantities such as displacement, pressure, and vibration. Regarding the 100GHz DWDM (dense wavelength division multiplexer): it takes the light reflected back from the 50:50 coupler, for example... Figure 3 For example, in a 100 GHz DWDM system, the transmission wavelengths of three DWDMs—100 GHz DWDM1, 100 GHz DWDM2, and 100 GHz DWDM3—meet the design requirements of a three-wavelength system. In this system, the 100 GHz DWDM is used to multiplex and demultiplex optical signals of different wavelengths, ensuring that specific wavelengths enter the corresponding detectors. Narrowband light of a specific wavelength can be selected, or it can be replaced by a combination of multiple fixed-wavelength narrowband filters. Furthermore, regarding the photodetectors (PD1-PD64): they convert the received optical signals into electrical signals; the diagram shows multiple PDs, each receiving signals from different channels and at different wavelengths. Regarding the multiplexed photoelectric converter amplifiers: they amplify and condition the weak electrical signals output by the PDs to ensure that the signal-to-noise ratio and amplitude meet the input requirements of the analog-to-digital converter (ADC). The ADC is configured to convert the analog voltage signals output by the photoelectric converter amplifiers into digital signals that are easily read by the embedded processor. The embedded processor is configured to synchronously read and control the interference spectrum data of the MEMS optical sensor acquired by the analog-to-digital converter, and demodulate the wavelength, phase and power signals contained in the interference spectrum data to further realize the calculation of each measured physical quantity, as well as the mutual compensation and mutual correction between multiple measured physical quantities.

[0042] Further, in some embodiments, the laser interference phase demodulation device is configured to transmit light to the MEMS optical sensor end through a 50:50 coupler, and transmit light from the reflection end of the MEMS optical sensor to the dense wavelength division multiplexer through the 50:50 coupler. The dense wavelength division multiplexer is configured to include a first dense wavelength division multiplexer, a second dense wavelength division multiplexer, and a third dense wavelength division multiplexer, or the dense wavelength division multiplexer is configured to include a first dense wavelength division multiplexer, a second dense wavelength division multiplexer, a third dense wavelength division multiplexer, and a fourth dense wavelength division multiplexer. Further, the dense wavelength division multiplexer is configured to multiplex and demultiplex light signals of different wavelengths, so that light of a given wavelength enters the corresponding multi-channel photoelectric conversion amplifier.

[0043] Further, in some embodiments, the full spectrum analyzer for MEMS optical sensor broadband high-resolution signal demodulation further comprises: a multi-channel photoelectric conversion amplifier configured to amplify and condition the electrical signals output by the multi-channel photodetector, so that the signal-to-noise ratio and amplitude meet the input requirements of the analog-to-digital conversion collector for analog electrical signals; an analog-to-digital conversion collector configured to convert the analog voltage signals output by the photoelectric conversion amplifier into digital signals for reading by the embedded processor, with 14-bit to 24-bit A / D conversion resolution and analog / digital conversion completed at a sampling rate of 100kSample / s to 250MSample / s. The analog-to-digital conversion collector can be a single multi-channel ADC, or a parallel combination of multiple ADCs, as well as a combination and synchronous sampling of different A / D conversion resolutions and different Sample / s sampling rates; an embedded processor configured to synchronously read and control the MEMS optical sensor interference spectrum data collected by the analog-to-digital conversion collector, and demodulate the wavelength, phase and power signals contained in the interference spectrum data, further realizing the calculation of each measured physical quantity, as well as the mutual compensation and mutual correction between multiple measured physical quantities. Typically, a FPGA, ARM processor, etc. is used as the core operation and control unit to execute a pre-set signal demodulation algorithm, including but not limited to a spectral center wavelength peak finding algorithm, a laser interference phase demodulation algorithm (based on phase or intensity), as well as special demodulation algorithms for multi-beam interferometer and double-beam interferometer cascades, such as aliasing spectrum wavelength-phase and cavity length, etc. Further, the full spectrum analyzer for MEMS optical sensor broadband high-resolution signal demodulation further comprises: a host computer software for providing a human-computer interaction friendly operation interface, performing permission management, parameter configuration, data acquisition, multi-modal decoupling, intelligent identification, cloud platform interface display and big data management, etc. for the MEMS optical sensor. It should be understood that the self-compensation device of the full spectrum analyzer for MEMS optical sensor broadband high-resolution signal demodulation of the present disclosure can include all or part of the functions of the above-mentioned 14-bit to 24-bit analog-to-digital conversion collector, embedded processor, etc. to realize synchronization of the data clock of the above-mentioned wavelength scanning demodulation device and the data clock of the above-mentioned laser interference phase demodulation device, and is configured to calculate the wavelength, phase and power signals obtained into each measured physical quantity, and realize the mutual compensation and mutual correction between multiple measured physical quantities.

[0044] Referring to Figures 1-3, the full spectrum analyzer for MEMS optical sensor broadband high-resolution signal demodulation can be understood as: the broadband light signal emitted by the ultra-flat broadband light source is split into two paths (illustrated as the upper path and the lower path). One path (illustrated as the upper path) enters the wavelength scanning demodulation device, realizes fast wavelength scanning through the wavelength tunable filter, and the scanned light signal is distributed to the MEMS optical sensor (also applicable to wavelength type fiber optic sensors such as fiber Bragg gratings and multi-beam interference type F-P fiber optic sensors with high-precision spectrum) through the PLC. The reflected light of the MEMS optical sensor carries the respective wavelength and power information, which is returned and coupled through the coupler, the multi-channel photoelectric conversion amplifier containing the PD, and finally the digital conversion is completed by the analog-to-digital conversion collector. The embedded processor performs wavelength peak searching on the sampling data to calculate the measurement value of the MEMS optical sensor. The other path (illustrated as the lower path) enters the laser interference phase demodulation device, selects three specific wavelengths of light from the ultra-flat broadband light source through the DWDM, and these lights are distributed to the MEMS optical sensor (which can also be a double-beam interference type F-P fiber optic sensor with low-precision spectrum) through the PLC. The reflected or transmitted light signal (carrying interference phase or F-P cavity length information) of the MEMS optical sensor is returned, the signals under different wavelengths are separated through the DWDM (PD17-PD64), and after passing through the multi-channel photoelectric conversion amplifier containing the PD, the digital conversion is also completed by the analog-to-digital conversion collector. The embedded processor uses the laser interference phase demodulation algorithm to accurately calculate the measurement value of the MEMS optical sensor according to the intensity or phase difference under different wavelengths. Since the analog-to-digital conversion collector configures high-speed and high-precision A / D conversion chips according to actual needs, it can perform high-resolution and high-speed calculation on the phase information and cavity length information contained in the double-beam interference spectrum.

[0045] Referring to Figures 3-4 , the full spectrum analyzer for MEMS optical sensor broadband high-resolution signal demodulation: one path (illustrated as the upper path) forms a swept light source through the wavelength tunable filter and the coupler, which is used for multi-beam interference type MEMS optical sensor (also applicable to wavelength type fiber optic sensors such as fiber Bragg gratings and multi-beam interference type F-P fiber optic sensors with high-precision spectrum). Referring to Figures 3-4As shown, the full spectrum analyzer for MEMS optical sensor broadband high-resolution signal demodulation includes a laser interference phase demodulation device: another path (illustrated as a lower path) through a plurality of narrow-band filters and a dense wavelength division multiplexer (DWDM), selects or generates three specific wavelength optical signals for three-wavelength laser interference phase demodulation dual-beam interference type MEMS optical sensor (also for dual-beam interference type F-P fiber sensor with low spectral resolution). It should also be understood that the full spectrum analyzer for MEMS optical sensor broadband high-resolution signal demodulation also includes a multi-channel optical sensing probe channel branch expansion array, which realizes the connection of the wavelength scanning demodulation device and the laser interference phase demodulation device to a plurality of MEMS optical sensors, such as multi-beam interference type MEMS optical sensors (MEMS optical sensors 1-16) and dual-beam interference type MEMS optical sensors (MEMS optical sensors 17-32), forming a large-scale sensing network. In addition, it should be understood that the photoelectric conversion and amplification: the reflected light signals returned by each MEMS optical sensor are processed by a multi-channel photoelectric conversion amplifier containing a photodetector (PD). Further, it should also be understood that high-speed high-precision AD sampling: the output analog signals of the multi-channel photoelectric conversion amplifier are connected to a unified analog-to-digital conversion collector, realizing 14-bit to 24-bit high-resolution, 100kSample / s to 250MSample / s high-speed analog-to-digital conversion. In addition, it should also be understood that the integrated demodulation algorithm: the embedded processor built-in or connected in the full spectrum analyzer carries a variety of demodulation algorithms, which can demodulate in synchronization and high precision according to the type of sensor. Further, it should also be understood that the multi-beam interference type MEMS optical sensor (also applicable to wavelength type fiber sensors such as fiber Bragg grating and multi-beam interference type F-P fiber sensor with high spectral resolution) is suitable for wavelength signal demodulation: by scanning and analyzing the reflected spectrum with a swept source, the central wavelength value contained in the spectrum is calculated with high precision. Accordingly, the dual-beam interference type MEMS optical sensor (also for dual-beam interference type F-P fiber sensor with low spectral resolution) is suitable for laser interference phase demodulation: using three wavelengths (or 3, 4 or more laser wavelengths generated by multiple lasers with specific central wavelengths) to realize high-speed phase and cavity length demodulation. In cases where MHz-level signal acquisition is not required, the fine spectral scanning analysis of the swept source can also be combined to improve the performance of three-wavelength phase and cavity length signal demodulation, such as extending its high-frequency to "zero-frequency" response capability, providing cavity length absolute value correction for three-wavelength phase demodulation, etc.

[0046] Further, it should also be understood that adaptive self-compensation devices are needed to address issues such as data collection misalignment in the full spectrum analyzer for MEMS optical sensor broadband high-resolution signal demodulation. The following will be further explained in conjunction with Figure 5 .

[0047] Referring to Figure 5 The present disclosure also proposes a self-compensation method 100 for the full spectrum analyzer for MEMS optical sensor wideband high-resolution signal demodulation as described above, which comprises: step 120, synchronizing and calibrating the data collection clock of the wavelength scanning demodulation device with the data collection clock of the laser interference phase demodulation device; step 140, using the first wavelength value (and the further calculated measured physical quantity) collected and obtained by the wavelength scanning demodulation device in the first collection half cycle to compensate or correct one or more phase values (and the further calculated measured physical quantity) collected and obtained by the laser interference phase demodulation device in the first non-collection half cycle and the second collection half cycle. Further, the self-compensation method 100 can further comprise: step 160, using the second wavelength value (and the further calculated measured physical quantity) collected and obtained by the wavelength scanning demodulation device in the second collection half cycle to compensate or correct one or more phase values (and the further calculated measured physical quantity) collected and obtained by the laser interference phase demodulation device in the second non-collection half cycle and the third collection half cycle. Alternatively, the self-compensation method 100 can further comprise: step 170, using the Nth wavelength value (and the further calculated measured physical quantity) collected and obtained by the wavelength scanning demodulation device in the Nth collection half cycle to compensate or correct one or more phase values (and the further calculated measured physical quantity) collected and obtained by the laser interference phase demodulation device in the Nth non-collection half cycle and the N+1th collection half cycle, N being a positive integer.

[0048] In addition, it should be noted that Figure 6 The data collection timing diagram in the self-compensation process of the full spectrum analyzer for MEMS optical sensor wideband high-resolution signal demodulation according to the embodiment of the present disclosure is shown. In the diagram, the data collection timing waveform in the upper half corresponds to the optical path in the upper half of Figures 3-4 the lower half of the data collection timing waveform corresponds to the optical path in the lower half of Figures 3-4The light path of the lower half. Among them, the rising edge part of the upper and lower waveforms at a certain time completes the time synchronization. The time synchronization process can include the following processes: generating a main frequency clock through an analog-digital conversion collector or an embedded processor crystal oscillator; for the upper half of the light path, a synchronization signal with a specific frequency is generated by dividing the main frequency clock, and then output to the wavelength scanning demodulation device through the synchronization line for synchronous control of the wavelength tunable filter; correspondingly, for the lower half of the light path, a synchronization signal with a specific frequency is generated by dividing the main frequency clock, to control the sampling frequency of the laser interference phase demodulation device; in combination with the upper and lower light paths, in the system software, according to the synchronization frequency of the two demodulation devices, mutual compensation and mutual correction between the MEMS optical sensors are carried out. For example, set the temperature T1, and then calibrate the pressure sensor; change the temperature to T2, and calibrate the pressure sensor. Then, for example, the temperature and pressure surface fitting data are obtained; finally, the time synchronization of the system is completed, and the accurate measurement of the system can be realized. Obviously, if the synchronization calibration in step 120 is not completed, the upper and lower paths of the system will make separate collection and measurement reports, and the data relationship between them cannot realize accurate self-compensation result output. Regarding step 140 in the above self-compensation method 100, it should be understood that the first wavelength value collected and obtained by the above wavelength scanning demodulation device in the first collection half cycle (for example, it can be the period from t0 time to t1 time) and the further calculated measured physical quantity (because it is scanning demodulation, it only collects the high level interval period after the rising edge of the square wave in the scanning wavelength frequency, that is, as shown in the figure, the first step of the square wave in the scanning wavelength frequency, after the first period, the temperature T1 is obtained), is used to correct or compensate one or more phase values collected and obtained by the above phase demodulation device in the first non-collection half cycle (for example, it can be the period from t1 time to t2 time) and the second collection half cycle (for example, it can be the period from t2 time to t3 time, that is, as shown in the figure, in the second period, it is the second step of the square wave in the scanning wavelength frequency, which is the temperature T2), and the further calculated measured physical quantity (because it is phase demodulation, its collection frequency is almost consistent with the main frequency clock generated by the analog-digital conversion collector or the embedded processor crystal oscillator, which is almost real-time or in Figure 6The rising edge of the lower half of the waveform is collected when it reaches the high voltage period, i.e., as shown in the lower half of the figure, the three square wave step pressures P1, P2, and P3 are all within the sampling period of temperature T1. It is understood that for step 140, the specific value of the wavelength (and the further calculated measured physical quantity) can be obtained at time t1, which is the end of the first collection half cycle, for example, the temperature value T1. Between times t1 and t3, although the phase values (and the further calculated measured physical quantity) of multiple more intensive time points can be obtained, for example, the pressure values, they are still self-compensated using the temperature value T1 for the corresponding phase values (and the further calculated measured physical quantity) obtained, for example, the pressure values P1, P2, and P3 shown in the figure, i.e., the corrected pressure values are obtained through temperature self-compensation.

[0049] It should also be understood that in some embodiments, a self-compensation method for a full-spectrum analyzer for MEMS optical sensor wide-frequency high-resolution signal demodulation as described above is also proposed, in which the collection data clock of the wavelength scanning demodulation device and the collection data clock of the laser interference phase demodulation device are synchronized and calibrated; and the phase value (and the further calculated measured physical quantity) collected and obtained by the laser interference phase demodulation device at the end of the first collection half cycle of the wavelength scanning demodulation device is used to correct or compensate the wavelength value (and the further calculated measured physical quantity) collected and obtained by the wavelength scanning demodulation device at the end of the first collection half cycle. That is, in this embodiment, the measurement physical quantity collected and obtained by the laser interference phase demodulation device can also be used to compensate or correct the measurement physical quantity collected and obtained by the wavelength scanning demodulation device. The difference is that generally, the laser interference phase demodulation device can measure physical quantities with higher frequency and smaller time delay and is more real-time; while the wavelength scanning demodulation device can measure physical quantities with lower frequency, and can only realize single wavelength calculation after completing the scanning and data collection of the entire spectral range corresponding to the broadband light source, so that at the time when the wavelength value is obtained, one or more phase values at the time are necessarily obtained, thereby realizing mutual compensation and correction between the two.

[0050] The above has described various embodiments of the present disclosure, and the above description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Many modifications and changes are obvious to those skilled in the art without departing from the scope and spirit of the described embodiments. The choice of terms used herein is intended to best explain the principles, practical applications, or technical improvements in the market of the embodiments, or to enable other ordinary skilled persons in the art to understand the embodiments disclosed herein.

[0051] The above merely describes optional embodiments of the present disclosure, and is not intended to limit the present disclosure. For those skilled in the art, the present disclosure can have various modifications and changes. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present disclosure shall be included in the protection scope of the present disclosure.

Claims

1. An all-spectrum analyzer for MEMS optical sensor wideband high-resolution signal demodulation, characterized in that, Comprising: a common super-flat broadband light source, provided with a first laser and a second laser for saturating amplification of light from the first laser within a given broadband; a first coupler, configured to split light from the common super-flat broadband light source into two or more paths; a wavelength scanning demodulation device, configured to modulate light from one path of the first coupler into a linear sweep light signal and transmit it to a microcavity multi-beam interference MEMS optical sensor, and generate corresponding electrical signals through photoelectric conversion of the spectrum signal reflected by the microcavity multi-beam interference MEMS optical sensor for data acquisition and processing to obtain the wavelength value of the microcavity multi-beam interference MEMS optical sensor and the corresponding calculated measured physical quantity; a laser interference phase demodulation device, configured to transmit light from another path of the first coupler to a microcavity double-beam interference MEMS optical sensor after splitting, and select specific three wavelengths or four wavelengths from the spectrum signal reflected by the microcavity double-beam interference MEMS optical sensor, and then generate corresponding electrical signals through photoelectric conversion for data acquisition and processing to obtain the phase value of the microcavity double-beam interference MEMS optical sensor and the corresponding calculated measured physical quantity; a self-compensation device, configured to synchronize the data acquisition clock of the wavelength scanning demodulation device and the data acquisition clock of the laser interference phase demodulation device, and compensate the obtained phase value and the corresponding calculated measured physical quantity with the obtained wavelength value and the corresponding calculated measured physical quantity obtained by the two demodulation devices, or correct the obtained wavelength value and the corresponding calculated measured physical quantity with the obtained phase value and the corresponding calculated measured physical quantity.

2. The full spectrum analyzer according to claim 1, wherein the first laser is configured as a SOA laser, and a 50:50 coupler is arranged at the input end of the SOA laser to loop back the light; an optical isolator is arranged between the second laser and the first laser to prevent the reflected light signal from affecting the output signal of the second laser.

3. The full spectrum analyzer according to claim 1, wherein the wavelength scanning demodulation device is configured to perform wavelength scanning on the light from one path of the first coupler to generate a first scanning light and a second scanning light.

4. The full spectrum analyzer according to claim 3, wherein the wavelength scanning demodulation device is configured to transmit the first scanning light to a wavelength reference etalon for forming a measurement calibration spectrum of the wavelength scanning demodulation device.

5. The full spectrum analyzer according to claim 4, wherein the wavelength scanning demodulation device is configured to transmit the second scanning light to the microcavity multi-beam interference MEMS optical sensor through a 50:50 coupler, and transmit the output reflected light of the microcavity multi-beam interference MEMS optical sensor to a photodetector through a 50:50 coupler.

6. The full spectrum analyzer according to claim 5, wherein ​ ​ ​ ​ The wavelength scanning demodulation device is configured to transmit the second scanning light to a microcavity multi-beam interference type MEMS optical sensor array through a 50:50 coupler for measuring one or more physical quantities in temperature, strain, pressure, acceleration, displacement, force, and sound pressure.

7. The full spectrum analyzer of claim 1, wherein, The laser interference phase demodulation device is configured to transmit light to the microcavity double-beam interference type MEMS optical sensor end through a 50:50 coupler, and transmit the output reflected light of the microcavity double-beam interference type MEMS optical sensor to a dense wavelength division multiplexer through a 50:50 coupler.

8. The full spectrum analyzer of claim 7, wherein, The dense wavelength division multiplexer is configured to include a first dense wavelength division multiplexer, a second dense wavelength division multiplexer, and a third dense wavelength division multiplexer, or The dense wavelength division multiplexer is configured to include a first dense wavelength division multiplexer, a second dense wavelength division multiplexer, a third dense wavelength division multiplexer, and a fourth dense wavelength division multiplexer.

9. The full spectrum analyzer of claim 7, wherein, The dense wavelength division multiplexer is configured to multiplex and demultiplex light signals of different wavelengths, so that light of a given wavelength enters a corresponding photodetector.

10. The full-spectrum analyser of claim 1, wherein, Further comprising: A multiplexed photoelectric conversion amplifier configured to amplify and condition the electrical signals output by the multiplexed photodetectors, so that the signal-to-noise ratio and amplitude meet the input requirements of the analog-to-digital conversion collector for analog electrical signals; An analog-to-digital conversion collector configured to convert the analog voltage signals output by the photoelectric conversion amplifier into digital signals that can be read by an embedded processor; The embedded processor is configured to synchronously read and control the MEMS optical sensor interference spectrum data collected by the analog-to-digital conversion collector, and demodulate the wavelength, phase, and power signals contained in the interference spectrum data, thereby realizing the calculation of each measured physical quantity and the mutual compensation or mutual correction between multiple measured physical quantities.

11. A self-compensation method of a full-spectrum analyzer as claimed in any one of claims 1-10, characterized by, Including: Synchronizing and calibrating the data collection clock of the wavelength scanning demodulation device with the data collection clock of the laser interference phase demodulation device; Using the first wavelength value and the corresponding calculated measured physical quantity collected and obtained by the wavelength scanning demodulation device in the first collection half-cycle to compensate or correct one or more phase values and the corresponding calculated measured physical quantities collected and obtained by the laser interference phase demodulation device in the first non-collection half-cycle and the second collection half-cycle.

12. The self-compensating method of claim 11, wherein, Further comprising: Using the second wavelength value and the corresponding calculated measured physical quantity collected and obtained by the wavelength scanning demodulation device in the second collection half-cycle to compensate or correct one or more phase values and the corresponding calculated measured physical quantities collected and obtained by the laser interference phase demodulation device in the second non-collection half-cycle and the third collection half-cycle.

13. The self-compensating method of claim 11, wherein, Further comprising: The wavelength scanning demodulation device is used to compensate or correct one or more phase values and corresponding calculated measured physical quantities collected and obtained by the laser interference phase demodulation device in the Nth non-collection half period and the N+1th collection half period, N being a positive integer.

14. A self-compensating method of a full-spectrum analyser according to any one of claims 1-10, characterized by, The wavelength scanning demodulation device comprises: The collection data clock of the wavelength scanning demodulation device is synchronized and calibrated with the collection data clock of the phase demodulation device; The wavelength scanning demodulation device is used to correct or compensate one or more phase values and corresponding calculated measured physical quantities collected and obtained by the phase demodulation device at the end of the first collection half period of the wavelength scanning demodulation device.

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