Comprehensive microscopic measurement system for multi-parameter synchronous measurement and measurement method thereof

Abstract

The invention discloses a comprehensive microscopic measurement system for multi-parameter synchronous measurement and a measurement method thereof, and solves the problems that an existing microscopic measurement system is single in measurement mode and cannot meet the requirement for in-situ measurement of various optical parameters, and the comprehensive microscopic measurement system specifically comprises an objective table, a transmission illumination module, an imaging module and a reflection illumination module; the objective table is used for bearing a to-be-tested sample; the transmission illumination module is arranged below the objective table so as to emit transmission measurement light to a sample to be measured on the objective table; the reflection illumination module is arranged on the side surface of the objective table and is used for emitting reflection measurement light; the imaging module is arranged above the objective table and used for receiving the transmission measuring light or the reflection measuring light so as to measure corresponding parameters. According to the comprehensive microscopic measurement system and the measurement method thereof, physical measurement of imaging, three-dimensional morphology, phase modulation amount, polarization modulation amount and the like of a light-transmitting / light-proof sample to be measured can be realized, various measurement requirements are met, and the measurement efficiency and multifunctionality are remarkably improved.

Description

Technical Field

[0001] This invention relates to a microscopic measurement system and method, specifically to a comprehensive microscopic measurement system and method for simultaneous measurement of multiple parameters. Background Technology

[0002] Traditional microscopic measurement systems typically perform only a single function, such as intensity imaging or phase distribution measurement. Furthermore, existing microscopic measurement systems have significant limitations in polarization and three-dimensional topography measurements; for example, point-by-point scanning methods are slow and cannot meet the rapid measurement needs of dynamic samples; single-wavelength measurement systems cannot achieve large-scale phase retardation measurements; and while existing optical three-dimensional topography measurement devices, optical material birefringence distribution testing devices, and laser beam polarization measurement systems have made progress in some aspects, they cannot meet the requirement of in-situ measurement of multiple optical parameters. Multi-parameter measurements require multiple sets of equipment, which not only increases costs but also reduces measurement efficiency. Summary of the Invention

[0003] To address the technical problem that existing microscopic measurement systems have a single measurement mode and cannot meet the requirements of in-situ measurement of multiple optical parameters, this invention provides a comprehensive microscopic measurement system and its measurement method for simultaneous measurement of multiple parameters.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: A comprehensive microscopic measurement system for simultaneous multi-parameter measurement, characterized by the following features: It includes a stage, a transmission illumination module, an imaging module, and a reflection illumination module; The stage is used to hold the sample to be tested; The transmission illumination module is located below the stage to emit transmission measurement light onto the sample to be tested on the stage. The imaging module includes an objective lens, a tube lens, an analyzer, and a first reflecting mirror, a complex amplitude measuring instrument, and a camera, all arranged sequentially above the stage along the emission direction of the transmission measurement light. A semi-transparent mirror is also provided between the objective lens and the tube lens. The semi-transparent mirror is mounted on a first driving mechanism. The first driving mechanism is used to cut the semi-transparent mirror into or out of the optical path of the transmission measurement light. The first reflecting mirror is mounted on a second driving mechanism. The second driving mechanism is used to cut the first reflecting mirror into or out of the optical path of the transmission measurement light. The complex amplitude measuring instrument is located on the optical path of the transmission measurement light when the first reflecting mirror is cut out. The camera is located on the optical path of the transmission measurement light reflected by the first reflecting mirror when it is cut in, and the camera's working end corresponds to the first reflecting mirror for imaging. The active end of the reflective illumination module corresponds to the semi-transparent mirror and is used to emit reflected measurement light to it.

[0005] Furthermore, the reflective illumination module includes a first light source for emitting reflected measurement light, and a first lens, a first polarizer, an aperture, and a second lens arranged sequentially along the emission direction at the emission end of the first light source. The first lens is used to collimate the reflected measurement light; The first polarizer is used to adjust the polarization state of the reflected measurement light; The aperture is used to adjust the size of the optical field region for reflected measurement light; The second lens is used to converge the adjusted reflected measurement light onto the cut-in semi-transparent mirror.

[0006] Furthermore, the reflective illumination module also includes a first filter disposed between the first light source and the first lens; The color temperature range of the first light source is 3500K~4500K, the fiber core diameter is 105um±2%, and the numerical aperture is 0.22±0.02. The focal length of the first lens is in the range of 280mm to 320mm; The focal length range of the second lens is 180mm~220mm; The first filter operates in the wavelength range of 380nm to 780nm and has a full width at half maximum (FWHM) range of 8nm to 12nm.

[0007] Furthermore, the first light source is a fiber-coupled LED light source with a color temperature of 4000K; The focal length of the first lens is 300mm; The focal length of the second lens is 200mm; The first filter operates at a wavelength of 633nm and has a full width at half maximum (FWHM) of 10nm.

[0008] Furthermore, the transmission illumination module includes a second light source for emitting transmission measurement light, and a third lens, a field stop, an aperture stop, and a fourth lens arranged sequentially along the emission direction at the emission end of the second light source. The third lens is used to converge the transmitted measurement light to the aperture stop; The field stop is used to adjust the size of the optical field region of the transmitted measurement light. The aperture stop is used to eliminate stray light in the transmitted measurement light; The fourth lens is used to collimate the transmitted measurement light.

[0009] Furthermore, the transmission illumination module also includes a second filter disposed between the second light source and the third lens; The second light source has a color temperature range of 3500K~4500K, an optical fiber core diameter of 105um±2%, and a numerical aperture of 0.22±0.02. The focal length range of the third lens is 45mm~55mm; The focal length of the fourth lens is 130mm~170mm; The second filter operates in the wavelength range of 610nm to 640nm and has a full width at half maximum (FWHM) range of 8nm to 12nm.

[0010] Furthermore, a third reflecting mirror, a second polarizer, and a liquid crystal half-wave compensator are sequentially arranged between the fourth lens and the stage. The third reflecting mirror is used to reflect the collimated transmitted measurement light to the second polarizer; The second polarizer is used to adjust the polarization state of the transmitted measurement light; The liquid crystal half-wave compensator is used to adjust the phase delay of the transmitted measurement light.

[0011] Furthermore, a quarter-wave plate is also provided in the transmission measurement optical path between the tube lens and the analyzer; The camera uses a color CMOS sensor; The extinction ratio of the second polarizer is greater than 1000:1; The modulation accuracy of the liquid crystal half-wave compensator is less than or equal to 0.01 wavelength.

[0012] A measurement method based on the above-mentioned integrated microscopic measurement system with multiple parameters simultaneously, characterized by the following features: When measuring the morphological undulation parameters of the surface of the sample, the sample is placed on a stage and measured using the reflectance measurement method: Step A1: Insert the semi-transparent mirror using the first drive mechanism; Step A2: The reflected measurement light is emitted from the semi-transparent mirror through the reflection illumination module; Step A3: The semi-transparent mirror reflects the reflected measurement light to the objective lens. After the objective lens is aligned, the light is incident on the sample to be tested. Then, the light passes through the sample to be tested for reflection, the objective lens for alignment, the semi-transparent mirror for transmission, the tube lens for alignment, and the analyzer for polarization state selection. Step A4: The first reflecting mirror is driven to cut in by the second driving mechanism, and the first reflecting mirror reflects the reflected measurement light to the camera, and the camera images it; The first reflecting mirror is cut out by the second driving mechanism, and the reflected measurement light enters the optical field complex amplitude measuring instrument to obtain the phase distribution of the reflected measurement light. Step A5: Obtain the morphological undulation parameters of the surface of the sample under test through the imaging and phase distribution obtained in step A4; When measuring the polarization modulation and phase delay parameters of a sample made of a transparent material, the sample is placed on a stage and measured using the transmission measurement method. Step B1: Transmitted measurement light is emitted onto the sample to be tested on the stage through the transmitted illumination module; Step B2: After the transmitted light passes through the sample to be tested, it enters the objective lens, and then passes through the objective lens collimation, the tube lens collimation, and the analyzer to screen the polarization state in sequence. Step B3: Drive the first reflecting mirror to cut in through the second driving mechanism, and the first reflecting mirror will reflect the transmitted measurement light to the camera, and the camera will image it. Step B4: Drive the first reflecting mirror to cut out through the second driving mechanism, and the transmitted measurement light enters the optical field complex amplitude measuring instrument to obtain the phase distribution of the transmitted measurement light; Step B5: Obtain the polarization modulation and phase delay parameters of the sample under test by using the phase distribution of the transmitted light obtained in step B3 and step B4.

[0013] Further, step B3 specifically involves driving the first reflecting mirror to engage via the second driving mechanism, applying different voltages to the liquid crystal half-wave compensator to adjust the polarization state of the transmitted measurement light in different ways, and then the first reflecting mirror reflects the transmitted measurement light in different polarization states to the camera, which then images the light. Step B4 specifically involves driving the first reflector to cut out through the second driving mechanism, applying a fixed phase modulation voltage to the liquid crystal half-wave compensator to modulate the transmitted measurement light with a fixed phase, and then having the transmitted measurement light enter the optical field complex amplitude measuring instrument to obtain the phase distribution of the transmitted measurement light. Step B5 specifically involves obtaining the polarization modulation and phase delay parameters of the sample under test through the various images obtained in step B3 and the phase distribution of the transmitted measurement light obtained in step B4.

[0014] The beneficial effects of this invention are: 1. Multi-parameter synchronous measurement: This invention provides a comprehensive microscopic measurement system for simultaneous multi-parameter measurement, comprising a transmission illumination module, an imaging module, and a reflection illumination module. The imaging module includes a semi-transparent mirror corresponding to the reflection illumination module, and a first driving mechanism is provided for the semi-transparent mirror. This first driving mechanism drives the semi-transparent mirror to enter / exit the optical path of the transmission measurement light, enabling the imaging of transparent / opaque samples, measurement of three-dimensional morphology, phase modulation, polarization modulation, and other physical quantities, meeting various measurement needs and significantly improving measurement efficiency and multifunctionality. Furthermore, it enables high-resolution measurement of the phase distribution, polarization distribution, and birefringence distribution of transparent materials, further expanding the capabilities of optical measurement.

[0015] 2. Dual optical path design: This invention provides a comprehensive microscopic measurement system for simultaneous multi-parameter measurement, which includes both a transmission illumination module and a reflection illumination module. The reflection illumination module contains a first polarizer, and the transmission illumination module contains a second polarizer, making it suitable for different measurement needs. Combined with an optical fiber coupled LED light source, it can match beams of different wavelengths and spectral widths, thereby satisfying both low-coherence-noise imaging measurements and high-precision phase and polarization distribution measurements.

[0016] 3. High-resolution phase distribution and polarization distribution measurement: The present invention provides a comprehensive microscopic measurement system for simultaneous measurement of multiple parameters. A second polarizer and a liquid crystal half-wave compensator are set between the fourth lens and the stage. The combination of the second polarizer and the liquid crystal half-wave compensator enables the comprehensive microscopic measurement system to accurately control the polarization state of the transmitted measurement light and achieve high-resolution phase distribution and polarization distribution measurement.

[0017] 4. Compact structure: The present invention provides a comprehensive microscopic measurement system for simultaneous measurement of multiple parameters. A third reflecting mirror is set between the fourth lens and the second polarizer. The third reflecting mirror reflects the transmitted measurement light, which makes the structure of the entire comprehensive microscopic measurement system more compact.

[0018] 5. Modular design: The present invention provides a comprehensive microscopic measurement system for simultaneous measurement of multiple parameters. Through modular design, it has high flexibility and scalability, and can quickly switch functional modules according to different measurement needs, making it widely applicable. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of an embodiment of a comprehensive microscopic measurement system for simultaneous multi-parameter measurement according to the present invention; Figure 2 This is a schematic diagram illustrating the working principle of the transmission measurement light in an embodiment of the present invention; Figure 3 This is a schematic diagram illustrating the working principle of the reflection measurement light in this embodiment of the invention.

[0020] Icon labels: 1-Stage; 2-Transmitted illumination module, 21-Second light source, 22-Third lens, 23-Field stop, 24-Aperture stop, 25-Fourth lens, 26-Second filter; 3-Imaging module, 31-Objective lens, 32-Tube lens, 33-Analyzer, 34-First reflecting mirror, 35-Complex amplitude measuring instrument for light field, 36-Camera, 37-Semi-transparent mirror, 38-Quarter-wave plate; 4-Reflective illumination module, 41-First light source, 42-First lens, 43-First polarizer, 44-Aperture, 45-Second lens, 46-First filter; 5-Third reflecting mirror; 6-Second polarizer; 7-Liquid Crystal Half-Wave Compensator. Detailed Implementation

[0021] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings and embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0022] This invention provides a comprehensive microscopic measurement system for simultaneous measurement of multiple parameters, such as... Figure 1 As shown, it includes a stage 1, a transmission illumination module 2, an imaging module 3, and a reflection illumination module 4.

[0023] Stage 1 is used to hold the sample to be tested.

[0024] The transmission illumination module 2 is positioned below the stage 1 to emit transmission measurement light onto the sample to be tested on the stage 1. The transmission illumination module 2 includes a second light source 21 for emitting transmission measurement light, and a second filter 26, a third lens 22, a field stop 23, an aperture stop 24, and a fourth lens 25 arranged sequentially along the emission direction of the transmission measurement light from the emission end of the second light source 21. The second light source 21 has a color temperature range of 3500K~4500K, an optical fiber core diameter of 105µm±2%, and a numerical aperture of 0.22±0.02. In this embodiment, the second light source 21 is an optical fiber coupled LED light source with a color temperature of 4000K. The second filter 26 operates at a wavelength range of 6... The wavelength range is 10nm~640nm, and its full width at half maximum (FWHM) range is 8nm~12nm; in this embodiment, the operating wavelength of the second filter 26 is 633nm, and its FWHM is 10nm; the third lens 22 is used to converge the transmitted measurement light to the aperture stop 24; the focal length range of the third lens 22 is 45mm~55mm; in this embodiment, the focal length of the third lens 22 is 50mm; the field stop 23 is used to adjust the size of the light field region of the transmitted measurement light; the aperture stop 24 is used to eliminate stray light in the transmitted measurement light; the fourth lens 25 is used to collimate the transmitted measurement light, and the focal length of the fourth lens 25 is 130mm~170mm; in this embodiment, the focal length of the fourth lens 25 is 150mm.

[0025] Imaging module 3 includes an objective lens 31, a tube lens 32, a quarter-wave plate 38, an analyzer 33, and a first reflecting mirror 34, a complex amplitude measuring instrument 35, and a camera 36, ​​all arranged sequentially above stage 1 along the direction of transmission measurement light emission. A semi-transparent mirror 37 is also provided between the objective lens 31 and the tube lens 32. The semi-transparent mirror 37 is mounted on a first driving mechanism, which is used to cut the semi-transparent mirror 37 into or out of the optical path of the transmission measurement light. The first reflecting mirror 34 is mounted on a second driving mechanism, which is used to cut the first reflecting mirror 34 into or out of the optical path of the transmission measurement light. Analyzer 3... 3 is mainly used for polarization observation, specifically for qualitative observation of the polarization characteristics of the sample under test. The complex amplitude optical field measuring instrument 35 is positioned on the optical path of the transmitted measurement light when the first reflecting mirror 34 is cut out. In this embodiment, the complex amplitude optical field measuring instrument uses a combination of a high signal-to-noise ratio monochrome camera and diffractive optical elements to measure the phase distribution, and can further convert it into the three-dimensional morphology of the object under test. The camera 36 is positioned on the optical path of the transmitted measurement light reflected by the first reflecting mirror 34 when it is cut in. The active end of the camera 36 corresponds to the first reflecting mirror and is used for intensity imaging. In this embodiment, the camera 36 uses a color CMOS sensor. The cutting in and out of the first reflecting mirror 34 enables switching between the camera and the complex amplitude optical field measuring instrument. The cutting in and out of the semi-transparent mirror 37 enables switching between transmission and reflection measurements. The first and second drive mechanisms are electrically driven, supporting fast and precise switching.

[0026] The active end of the reflection illumination module 4 corresponds to the semi-transparent mirror 37 and is used to emit reflected measurement light towards it. Specifically, the reflection illumination module 4 includes a first light source 41 for emitting reflected measurement light, and a first filter 46, a first lens 42, a first polarizer 43, an aperture 44, and a second lens 45 arranged sequentially along the emission direction of the reflected measurement light from the emission end of the first light source 41. The color temperature range of the first light source 41 is 3500K~4500K, the fiber core diameter is 105um±2%, and the numerical aperture is 0.22±0.02. In this embodiment, the first light source 41 is an optical fiber coupled LED light source with a color temperature of 4000K. The operating wavelength range of the first filter 46 is 380nm~780nm, and its full width at half maximum (FWHM) range is 8nm~12nm. m; First filters 46 with different wavelengths and spectral widths are used to modulate arbitrary wavelengths and spectral widths in the visible light band, and are selected according to the needs of imaging and phase measurement; in this embodiment, the working wavelength of the first filter 46 is 633nm and the full width at half maximum (FWHM) is 10nm; the first lens 42 is used to collimate the reflected measurement light; the focal length range of the first lens 42 is 280mm~320mm; in this embodiment, the focal length of the first lens 42 is 300mm; the first polarizer 43 is used to adjust the polarization state of the reflected measurement light, mainly to realize polarization observation, and is used for qualitative observation of the polarization characteristics of the sample under test; the aperture 44 is used to adjust the size of the light field region of the reflected measurement light; the second lens 45 is used to converge the adjusted reflected measurement light to the inserted semi-transparent and semi-reflective mirror 37. The focal length range of the second lens 45 is 180mm~220mm; in this embodiment, the focal length of the second lens 45 is 200mm; Both the reflected illumination module 4 and the transmitted illumination module 2 shape the corresponding light beam into parallel light to illuminate the sample under test.

[0027] Between the fourth lens 25 and the stage 1, along the direction of the transmitted measurement light emission, a third reflecting mirror 5, a second polarizer 6, and a liquid crystal half-wave compensator 7 are sequentially arranged. The third reflecting mirror 5 is used to reflect the collimated transmitted measurement light to the second polarizer 6. The second polarizer 6 is used to adjust the polarization state of the transmitted measurement light to achieve qualitative observation of the polarization characteristics of the sample under test. The extinction ratio of the second polarizer 6 is greater than 1000:1. The liquid crystal half-wave compensator 7 consists of two liquid crystal modules that can achieve a phase delay of up to half a wavelength. By controlling the voltage applied to them by a computer, different phase delays can be adjusted. When used in conjunction with the polarizer and analyzer, by adjusting the phase delay, the change in light field intensity can be recorded at the camera end. Combined with the inversion algorithm, high-resolution transmission phase distribution, polarization distribution, and birefringence distribution of the sample under test can be obtained. The modulation accuracy of the liquid crystal half-wave compensator 7 reaches 0.01 wavelength.

[0028] The steps for measuring the sample using the multi-parameter synchronous measurement integrated microscopic measurement system described above are as follows: like Figure 2 As shown, when measuring the morphological undulation parameters of the surface of the transparent / opaque sample, the sample is placed on stage 1 and measured using the reflectance measurement method: Step A1: Insert the semi-transparent mirror 37 using the first drive mechanism; Step A2: The reflected measurement light is emitted from the semi-transparent and semi-reflective mirror 37 through the reflection illumination module 4; that is, the reflected measurement light is emitted from the first light source 41, and the reflected measurement light is filtered by the first filter 46, collimated by the first lens 42, the polarization state is adjusted by the first polarizer 43, the size of the light field area is adjusted by the aperture 44, and the light is converged to the semi-transparent and semi-reflective mirror 37 by the second lens 45. Step A3: The semi-transparent mirror 37 reflects the reflected measurement light to the objective lens 31. After the objective lens 31 is collimated, the light is incident on the sample to be tested. Then, the light passes through the sample to be tested for reflection, the objective lens 31 for collimation, the semi-transparent mirror 37 for transmission, the tube lens 32 for collimation, the quarter-wave plate 38 for filtering, and the analyzer 33 for screening the polarization state. Step A4: Drive the first reflecting mirror 34 to cut in through the second driving mechanism, and the first reflecting mirror 34 will reflect the reflected measurement light to the camera 36, ​​and the camera 36 will image it. The first reflecting mirror 34 is driven out by the second driving mechanism, and the reflected measurement light enters the optical field complex amplitude measuring instrument 35 to obtain the phase distribution of the reflected measurement light. Step A5: Obtain the morphological undulation parameters of the surface of the sample under test through the imaging and phase distribution obtained in step A4; like Figure 3 As shown, when measuring the polarization modulation and phase delay parameters of a sample made of a transparent material, the sample is placed on stage 1 and measured using the transmission measurement method: Step B1: Transmitted measurement light is emitted from the transmission illumination module 2 onto the sample to be tested on the stage 1. Specifically, the transmitted measurement light is emitted from the second light source 21, and then sequentially filtered by the second filter 26, converged by the third lens 22, adjusted by the field stop 23 to adjust the size of the light field area, eliminated by the aperture stop 24 to eliminate stray light, and collimated by the fourth lens 25. After that, it is reflected by the third mirror 5, adjusted by the second polarizer 6 to adjust the polarization state, and adjusted by the liquid crystal half-wave compensator 7 to adjust the phase delay, and finally emitted onto the sample to be tested on the stage 1.

[0029] Step B2: After the transmitted light passes through the sample to be tested, it enters the objective lens 31, and then is collimated by the objective lens 31, collimated by the tube lens 32, filtered by the quarter-wave plate 38, and screened by the analyzer 33 to determine the polarization state. Step B3: Drive the first reflector 34 to engage through the second driving mechanism, apply different voltages to the liquid crystal half-wave compensator 7, so that it adjusts the polarization state of the transmitted measurement light in different ways. Then the first reflector 34 reflects the transmitted measurement light in different polarization states to the camera 36 respectively, and the camera 36 images them respectively. Step B4: Drive the first reflector 34 to cut out through the second driving mechanism, apply a fixed voltage to the liquid crystal half-wave compensator 7 to make it generate a fixed phase modulation on the transmitted measurement light, and then the transmitted measurement light enters the optical field complex amplitude measuring instrument 35 to obtain the phase distribution of the transmitted measurement light. Step B5: Obtain the polarization modulation and phase delay parameters of the sample under test by using the images obtained in step B3 and the phase distribution obtained in step B4.

[0030] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions within the technical scope disclosed in the present invention should be covered within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A multi-parameter synchronous measurement integrated microscopic measurement system, characterized in that: comprising a stage (1), a transmission illumination module (2), an imaging module (3) and a reflection illumination module (4); the stage (1) is used for carrying a sample to be measured; the transmission illumination module (2) is arranged below the stage (1) to emit transmission measurement light to the sample to be measured on the stage (1); the imaging module (3) comprises, in sequence from top to bottom, an objective lens (31), a tube lens (32), a polarizer (33), a first mirror (34), a light field complex amplitude measuring instrument (35) and a camera (36) arranged above the stage (1) along the direction of emission of the transmission measurement light; a half-transmission half-reflection mirror (37) is further arranged between the objective lens (31) and the tube lens (32); the half-transmission half-reflection mirror (37) is arranged on a first driving mechanism; the first driving mechanism is used for cutting the half-transmission half-reflection mirror (37) into or out of the light path of the transmission measurement light; the first mirror (34) is arranged on a second driving mechanism; the second driving mechanism is used for cutting the first mirror (34) into or out of the light path of the transmission measurement light; the light field complex amplitude measuring instrument (35) is arranged on the light path of the transmission measurement light when the first mirror (34) is cut out; the camera (36) is arranged on the light path of the transmission measurement light reflected by the first mirror (34) when the first mirror (34) is cut in, and the working end of the camera (36) corresponds to the first mirror, used for imaging; the working end of the reflection illumination module (4) corresponds to the half-transmission half-reflection mirror (37), used for emitting reflection measurement light to the half-transmission half-reflection mirror (37).

2. The multi-parameter synchronous measurement integrated microscopic measurement system according to claim 1, characterized in that: the reflection illumination module (4) comprises a first light source (41) for emitting reflection measurement light, and a first lens (42), a first polarizer (43), an aperture (44) and a second lens (45) arranged in sequence along the emission direction at the emission end of the first light source (41); the first lens (42) is used for collimating the reflection measurement light; the first polarizer (43) is used for adjusting the polarization state of the reflection measurement light; the aperture (44) is used for adjusting the light field area size of the reflection measurement light; the second lens (45) is used for converging the adjusted reflection measurement light to the cut-in half-transmission half-reflection mirror (37).

3. The multi-parameter synchronous measurement integrated microscopic measurement system according to claim 2, characterized in that: the reflection illumination module (4) further comprises a first filter (46) arranged between the first light source (41) and the first lens (42); the color temperature range of the first light source (41) is 3500K-4500K, the fiber core diameter is 105um±2%, and the numerical aperture is 0.22±0.02; the focal length range of the first lens (42) is 280mm-320mm; the focal length range of the second lens (45) is 180mm-220mm; the working wavelength range of the first filter (46) is 380nm-780nm, and the half-width range is 8nm-12nm. ​ ​ ​ ​ ​ ​ 4. The multi-parameter synchronous measurement integrated microscopic measurement system according to claim 3, characterized in that: the first light source (41) is a fiber-coupled LED light source with a color temperature of 4000 K; the first lens (42) has a focal length of 300 mm; the second lens (45) has a focal length of 200 mm; the first filter (46) has a working wavelength of 633 nm and a half-width of 10 nm.

5. The multi-parameter synchronous measurement integrated microscopic measurement system according to any one of claims 1-4, characterized in that: the transmission illumination module (2) comprises a second light source (21) for emitting transmission measurement light, and a third lens (22), a field stop (23), an aperture stop (24), and a fourth lens (25) arranged in sequence along the emission direction of the second light source (21); the third lens (22) is used to converge the transmission measurement light to the aperture stop (24); the field stop (23) is used to adjust the light field area size of the transmission measurement light; the aperture stop (24) is used to eliminate stray light in the transmission measurement light; the fourth lens (25) is used to collimate the transmission measurement light.

6. The multi-parameter synchronous measurement integrated microscopic measurement system according to claim 5, characterized in that: the transmission illumination module (2) further comprises a second filter (26) arranged between the second light source (21) and the third lens (22); the second light source (21) has a color temperature range of 3500 K-4500 K, a fiber core diameter of 105 um±2%, and a numerical aperture of 0.22±0.02; the third lens (22) has a focal length range of 45 mm-55 mm; the fourth lens (25) has a focal length of 130 mm-170 mm; the second filter (26) has a working wavelength range of 610 nm-640 nm and a half-width range of 8 nm-12 nm.

7. The multi-parameter synchronous measurement integrated microscopic measurement system according to claim 6, characterized in that: a third mirror (5), a second polarizer (6), and a liquid crystal half-wave compensator (7) are further arranged in sequence between the fourth lens (25) and the stage (1); the third mirror (5) is used to reflect the collimated transmission measurement light to the second polarizer (6); the second polarizer (6) is used to adjust the polarization state of the transmission measurement light; the liquid crystal half-wave compensator (7) is used to control the phase retardation of the transmission measurement light.

8. The multi-parameter synchronous measurement integrated microscopic measurement system according to claim 7, characterized in that: a quarter-wave plate (38) is further arranged on the transmission measurement light path between the cylindrical lens (32) and the polarizer (33); the camera (36) adopts a color CMOS sensor; the second polarizer (6) has an extinction ratio greater than 1000:1; the liquid crystal half-wave compensator (7) has a modulation accuracy less than or equal to 0.01 wavelength.

9. A measurement method based on the multi-parameter synchronous measurement integrated microscopic measurement system according to any one of claims 1-8, characterized in that: When measuring the surface topography parameters of the sample to be measured, the sample to be measured is placed on the object table (1), and the sample to be measured is measured by using the reflection measurement method: Step A1, cut the half-mirror (37) into the first driving mechanism; Step A2, the reflection measurement light is emitted to the half-mirror (37) by the reflection illumination module (4); Step A3, the half-mirror (37) reflects the reflection measurement light to the objective lens (31), and the objective lens (31) collimates the reflection measurement light and then enters the sample to be measured, and then the reflection measurement light is reflected by the sample to be measured, collimated by the objective lens (31), transmitted by the half-mirror (37), collimated by the cylindrical lens (32), and filtered by the polarizer (33) to screen the polarization state; Step A4, the first mirror (34) is driven to cut in by the second driving mechanism, and the reflection measurement light is reflected to the camera (36) by the first mirror (34), and the camera (36) images the reflection measurement light; The first mirror (34) is driven to cut out by the second driving mechanism, and the reflection measurement light enters the light field complex amplitude measuring instrument (35) to obtain the phase distribution of the reflection measurement light; Step A5, the surface topography parameters of the sample to be measured are obtained by imaging and obtaining the phase distribution in step A4; When measuring the polarization modulation and phase retardation parameters of the sample to be measured made of light-transmitting material, the sample to be measured is placed on the object table (1), and the sample to be measured is measured by using the transmission measurement method: Step B1, the transmission measurement light is emitted to the sample to be measured on the object table (1) by the transmission illumination module (2); Step B2, after the transmission measurement light is transmitted through the sample to be measured, the transmission measurement light enters the objective lens (31), and then is collimated by the objective lens (31), collimated by the cylindrical lens (32), and filtered by the polarizer (33) to screen the polarization state; Step B3, the first mirror (34) is driven to cut in by the second driving mechanism, and the first mirror (34) reflects the transmission measurement light to the camera (36), and the camera (36) images the transmission measurement light; Step B4, the first mirror (34) is driven to cut out by the second driving mechanism, and the transmission measurement light enters the light field complex amplitude measuring instrument (35) to obtain the phase distribution of the transmission measurement light; Step B5, the polarization modulation and phase retardation parameters of the sample to be measured are obtained by imaging in step B3 and obtaining the phase distribution of the transmission measurement light in step B4.

10. The measurement method according to claim 9, wherein: Step B3 is specifically that the first mirror (34) is driven to cut in by the second driving mechanism, different voltages are loaded to the liquid crystal half-wave compensator (7) to make the liquid crystal half-wave compensator (7) adjust the polarization state of the transmission measurement light, and then the first mirror (34) reflects the transmission measurement light with different polarization states to the camera (36), and the camera (36) images the transmission measurement light respectively; Step B4 is specifically that the first mirror (34) is driven to cut out by the second driving mechanism, a fixed phase modulation voltage is loaded to the liquid crystal half-wave compensator (7) to make the liquid crystal half-wave compensator (7) perform fixed phase modulation on the transmission measurement light, and then the transmission measurement light enters the light field complex amplitude measuring instrument (35) to obtain the phase distribution of the transmission measurement light; Step B5 is specifically to obtain the polarization modulation and phase retardation parameters of the sample under test by the individual images formed in step B3 and the transmission measurement light phase distribution obtained in step B4.

Images