Low frequency resonant piezoelectric motor for semiconductor manufacturing

Abstract

The application discloses a low-frequency resonance type piezoelectric motor for semiconductor manufacturing, which comprises a base, a pre-tightening assembly and a moving part, and a piezoelectric motor stator is arranged between the pre-tightening assembly and the moving part; the piezoelectric motor stator comprises one expansion type rhombic displacement amplifier and two contraction type rhombic displacement amplifiers, and a piezoelectric stack element is inlaid in each rhombic displacement amplifier; a driving foot is fixedly arranged on one side power output end of the two contraction type rhombic displacement amplifiers, respectively, and the power output end on the other side is connected with the positioning end of the pre-tightening assembly through a flexible hinge, respectively. When specific excitation signals are applied to the three groups of piezoelectric stacks, the piezoelectric motor stator drives the two driving feet to generate an amplified elliptical displacement track, so that the surface thereof alternately rubs and contacts the side surface of the moving part, thereby enabling the moving body to realize high-efficiency motion output in the form of low-frequency resonance along a predetermined direction, and the piezoelectric motor has the advantages of high displacement amplification efficiency and low resonance frequency.

Description

Technical Field

[0001] This invention belongs to the field of piezoelectric motor technology, specifically a low-frequency resonant piezoelectric motor for semiconductor manufacturing. Background Technology

[0002] In precision fields such as integrated circuit manufacturing, testing, and packaging, micro-displacement driving devices are widely used in wafer transfer, photolithography mask alignment, and chip packaging positioning, requiring large stroke, high response speed, and stable operation within a limited space. Existing driving methods, such as ball screws and linear motors, can provide large displacements, but their complex structures, friction, and backlash make them unsuitable for clean or vacuum environments. Traditional piezoelectric actuators, while fast-responding and backlash-free, have displacements limited by material strain, requiring amplification using flexible mechanisms such as rhombic displacement amplifiers. However, existing designs based on rhombic amplifiers often employ single expansion or contraction structures and rely on high-frequency excitation, resulting in poor low-frequency driving efficiency, limited amplification, and insufficient controllability of the output direction. These limitations make it difficult to meet the comprehensive requirements of IC manufacturing for low-frequency, large-stroke, compact, and stable driving. Summary of the Invention

[0003] The purpose of this invention is to provide a low-frequency resonant piezoelectric motor for semiconductor manufacturing. The stator of this motor mainly consists of two contracting rhombic displacement amplifiers and one expanding rhombic displacement amplifier, with each rhombic amplifier containing embedded piezoelectric stack elements. When a specific excitation signal is applied to these three sets of piezoelectric stacks, the system can drive a moving body to move along a predetermined direction in a low-frequency resonant manner.

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0005] A low-frequency resonant piezoelectric motor for semiconductor manufacturing includes a base, a pre-tightening assembly fixedly disposed on the surface of the base, and a moving part slidably disposed on the surface of the base, wherein a piezoelectric motor stator is disposed between the pre-tightening assembly and the moving part;

[0006] The piezoelectric motor stator includes an expanded rhombic displacement amplifier and two contracted rhombic displacement amplifiers located on both sides of the expanded rhombic displacement amplifier. The two power output terminals of the expanded rhombic displacement amplifier are fixedly connected to the corresponding contracted rhombic displacement amplifiers. The expanded rhombic displacement amplifier has a longitudinally polarized first piezoelectric stack element embedded inside, and the contracted rhombic displacement amplifier has a transversely polarized piezoelectric stack element embedded inside.

[0007] Two retractable rhomboid displacement amplifiers have drive feet fixedly installed on the power output ends near the moving part, and the power output ends away from the moving part are connected to the positioning end of the pre-tightening component through flexible hinges.

[0008] The stator of the piezoelectric motor drives two drive legs to perform elliptical motion. The surfaces of the two drive legs alternately rub against the sides of the moving part, propelling the moving part to perform linear motion.

[0009] Furthermore, all the piezoelectric stacked elements are made of high-performance piezoelectric ceramics or single-crystal materials.

[0010] Furthermore, the drive foot is made of wear-resistant material, and its end near the moving part has a rounded convex surface.

[0011] Furthermore, a friction pad is fixedly provided on the side of the moving component near the driving foot.

[0012] Furthermore, the friction pad is an alumina ceramic pad or a zirconia ceramic pad.

[0013] Furthermore, one end of the longitudinally polarized piezoelectric stack element is connected to the first driving signal source, and the other end is grounded. The two transversely polarized piezoelectric stack elements have the same polarization direction, and the end closer to the expanded rhombic displacement amplifier is simultaneously connected to the second driving signal source, while the end farther away from the expanded rhombic displacement amplifier is simultaneously grounded.

[0014] Furthermore, the excitation frequencies of the first and second driving signal sources are the same, and the phase difference is 90°. ° .

[0015] Furthermore, the pre-tightening assembly includes a thrust baffle fixedly disposed on the surface of the base, a pre-tightening bolt threaded into the thrust baffle, a linear slider loosely fitted on the outside of the end of the pre-tightening bolt and slidably disposed on the base, a spring matching component fixedly disposed on the pre-tightening bolt, a pre-tightening spring sleeved on the outside of the pre-tightening bolt being disposed between the spring matching component and the linear slider, and a horizontally disposed pre-tightening connecting rod fixedly disposed on the top of the linear slider.

[0016] Furthermore, a groove is provided inside the pre-tightening connecting rod, and a locking screw is provided inside the groove. The end of the locking screw is threadedly connected to the end of the flexible hinge.

[0017] Furthermore, the flexible hinge is a semi-circular structure made of elastic material, and each end is integrally provided with a screw connecting block.

[0018] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0019] This invention provides a low-frequency resonant piezoelectric motor. It applies two-phase voltage excitation signals with the same frequency but different phases to three sets of piezoelectric stacks, and combines this with the displacement amplification characteristics of a rhombic displacement amplifier in a resonant state to achieve an amplified elliptical displacement trajectory driven by the foot, thereby driving the moving body to achieve efficient motion output. By adjusting the phase relationship between the excitation signals, reverse motion control of the moving body can also be achieved. This device has advantages such as simple structure, high overall rigidity, high integration, high displacement amplification efficiency, and low resonant frequency, which helps reduce the requirements for the excitation source and facilitates impedance matching optimization between the piezoelectric motor and the load. Simultaneously, this method significantly reduces the dependence on motor assembly precision, improves the system's adaptability and overall performance, and has significant engineering application value for integrated circuit equipment that needs to integrate drive mechanisms within a limited space and achieve high rigidity and reliable long-stroke transmission. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall three-dimensional structure of the piezoelectric motor of the present invention;

[0021] Figure 2 This is an exploded view of the piezoelectric motor of the present invention;

[0022] Figure 3 This is a schematic diagram of the structure of the piezoelectric motor stator of the present invention;

[0023] Figure 4 This is a schematic diagram of the extreme positions of the drive foot motion trajectory of the piezoelectric motor stator of the present invention;

[0024] Figure 5 This is a schematic diagram of the excitation signal applied to the stator of the piezoelectric motor in an embodiment of the present invention;

[0025] Figure 6 The following is a motion simulation diagram of the stator of the piezoelectric motor in an embodiment of the present invention; wherein part (a) is the lateral elongation deformation state and part (b) is the first-order bending deformation state.

[0026] In the diagram: 101, base; 102, thrust baffle; 103, preload bolt; 104, longitudinal guide rail; 105, spring matching component; 106, preload spring; 107, linear slider; 108, first flexible hinge; 109, fourth bolt; 110, first retractable diamond displacement amplifier; 111, second piezoelectric stacked element; 112, guide rail support; 113, transverse guide rail; 114, moving part; 115, first piezoelectric stacked element; 116. Expanding rhombic displacement amplifier; 117. Third piezoelectric stacked element; 118. Second contracting rhombic displacement amplifier; 119. Fifth bolt; 120. Second flexible hinge; 121. Preloaded connecting rod; 201. First bolt; 202. Seventh bolt; 203. Sixth bolt; 204. Friction plate; 205. Locking screw; 301. First drive foot; 302. Second drive foot; 303. Second bolt; 304. Third bolt. Detailed Implementation

[0027] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby providing a clearer and more explicit definition of the scope of protection of the present invention.

[0028] It should be noted that when a component is said to be "installed on" another component, it can be directly on the other component or it may be in a component that is centered on it. When a component is said to be "set on" another component, it can be directly set on the other component or it may also be in a component that is centered on it. When a component is said to be "fixed to" another component, it can be directly fixed to the other component or it may also be in a component that is centered on it.

[0029] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the specification of this invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "or / and" as used herein includes any and all combinations of one or more of the associated listed items.

[0030] See appendix Figure 1 and Figure 2A low-frequency resonant piezoelectric motor for semiconductor manufacturing includes a base 101, a pre-tightening assembly fixedly disposed on one side of the surface of the base 101, and a moving component 114 slidably disposed on the other side of the surface of the base 101. Specifically, in this embodiment, the base 101 is a rectangular metal plate with several threaded holes to allow the base 101 to be fixedly connected to an external work platform by screws, thereby achieving overall assembly of the entire piezoelectric motor on the work platform. The moving component 114, as the linear motion output end of the piezoelectric motor, is disposed on the rear edge of the base 101 and moves horizontally linearly. Therefore, a horizontally distributed guide rail support 112 is disposed at its bottom, and a horizontal guide rail 113 is disposed above the guide rail support 112. The horizontal guide rail 113 and the guide rail support 112 are fixedly mounted on the base 101 by a sixth bolt 203. The moving component 114 adopts a slider structure in a linear guide rail slider structure and is slidably disposed on the top of the horizontal guide rail 113, allowing it to slide freely in the horizontal direction.

[0031] The preload assembly includes a thrust baffle 102 fixedly mounted on the surface of the base 101, a preload bolt 103 threaded into the thrust baffle 102, and a linear slider 107 loosely fitted around the end of the preload bolt 103 and slidably mounted on the base 101. Specifically, the thrust baffle 102 is an "L"-shaped corner plate structure. Its horizontal section is fixedly connected to the middle of the front edge of the top surface of the base 101 by a first bolt 201. A threaded hole is opened in the middle of its vertical section. The preload bolt 103 is horizontally and longitudinally arranged, with its outer end threaded into the threaded hole and its inner end facing the moving component 114, and the inner end is divided into a smooth rod. A shaft hole is opened on the outer end face of the linear slider 107, and the smooth rod end of the preload bolt 103 is inserted into the shaft hole. A longitudinal guide rail 104 is provided below the linear slider 107, and the longitudinal guide rail 104 is fixedly installed on the base 101 by the seventh bolt 202. The linear slider 107 is slidably disposed on the top of the longitudinal guide rail 104.

[0032] A spring matching component 105 is fixedly mounted on the preload bolt 103. A preload spring 106, sleeved on the outside of the preload bolt 103, is positioned between the spring matching component 105 and the linear slider 107. A horizontally positioned preload connecting rod 121 is fixedly mounted on the top of the linear slider 107. Specifically, the spring matching component 105 is a hollow bushing, sleeved on the smooth rod of the preload bolt 103. One end is positioned by a shoulder at the connection between the smooth rod and the threaded end, and the shaft hole is fixed with epoxy resin adhesive. Slots are provided on the opposite sides of both the spring matching component 105 and the linear slider 107 to accommodate the two ends of the preload spring 106. The preload connecting rod 121 is horizontally positioned and fixed to the top of the linear slider 107 with epoxy resin adhesive. By rotating the preload bolt 103, the preload bolt 103 can be moved along its axial direction under the action of the threaded drive, thereby driving the spring matching part 105 on it to move horizontally relative to the linear slider 107, thereby changing the compression deformation of the preload spring 106 and realizing the adjustment of the preload force.

[0033] A piezoelectric motor stator is disposed between the preload assembly and the moving part 114. For example... Figure 3 As shown, the piezoelectric motor stator includes an expanded rhombic displacement amplifier 116 and a first contracted rhombic displacement amplifier 110 and a second contracted rhombic displacement amplifier 118 located on the left and right sides of the expanded rhombic displacement amplifier 116. The left and right arms of the expanded rhombic displacement amplifier 116, where the two power output terminals are located, are curved arms with a centrally convex shape, and the angle between the edge line of the curved arm and the horizontal longitudinal direction is... The front and rear sides of the two input terminals are horizontally arranged straight arms. A longitudinally arranged first piezoelectric stack element 115 is embedded between the two power input terminals inside the expanded rhombic displacement amplifier 116. The two ends of the first piezoelectric stack element 115 are fixedly bonded to the expanded rhombic displacement amplifier 116 with epoxy resin. After the first piezoelectric stack element 115 is connected to the excitation drive source, its horizontal longitudinal extension and contraction motion can be converted and amplified by the expanded rhombic displacement amplifier 116 into the horizontal lateral motion of its two power output terminals, thereby driving the first contracting rhombic displacement amplifiers 110 and the second contracting rhombic displacement amplifiers 118 on both sides to move synchronously towards or away from each other.

[0034] The front and rear arms of the first contractile rhombic displacement amplifier 110 and the second contractile rhombic displacement amplifier 118 are both concave curved arms in the middle, and the angle between the edge line of the curved arm and the horizontal direction is... The first retractable rhomboid displacement amplifier 110 has a first driving foot 301 fixedly installed on the power output end near the moving part 114 (rear side), and the power output end away from the moving part 114 (front side) is fixedly connected to the left end of the pre-tightening connecting rod 121 through the first flexible hinge 108; the second retractable rhomboid displacement amplifier 118 has a second driving foot 302 fixedly installed on the power output end near the moving part 114 (rear side), and the power output end away from the moving part 114 (front side) is fixedly connected to the left end of the pre-tightening connecting rod 121 through the second flexible hinge 120. Specifically, in this embodiment, both the first driving foot 301 and the second driving foot 302 are made of wear-resistant material and are respectively bonded to the rear power output ends of the first shrinking rhomboid displacement amplifier 110 and the second shrinking rhomboid displacement amplifier 118 with epoxy resin adhesive. The material can be selected according to actual application requirements, such as alumina, zirconium oxide, silicon carbide ceramic, wear-resistant metal, or carbon fiber, which are high-strength and wear-resistant materials, thereby improving the working performance of the device. Furthermore, the ends of the first driving foot 301 and the second driving foot 302 near the moving component are arc-shaped convex surfaces, such as hemispherical or semi-cylindrical structures, so that they make point or line contact with the power receiving side of the moving component 114 and the ends of the first driving foot 301 and the second driving foot 302, ensuring reliable contact during transmission. Preferably, a friction plate 204 is fixedly provided on the power receiving side of the moving component 114. In this embodiment, the friction plate 204 is an alumina ceramic plate or a zirconium oxide ceramic plate and is bonded to the moving component 114 with epoxy resin adhesive.

[0035] Both the first flexible hinge 108 and the second flexible hinge 120 are semi-annular structures made of elastic material, and each end is integrally provided with a screw connecting block. The rear screw connecting block of the first flexible hinge 108 is fixedly connected to the front power output end of the first retractable diamond displacement amplifier 110 by a fourth bolt 109, and the rear screw connecting block of the second flexible hinge 120 is fixedly connected to the front power output end of the second retractable diamond displacement amplifier 118 by a fifth bolt 119. The front screw connecting blocks of the first flexible hinge 108 and the second flexible hinge 120 are reliably fixed to the left and right ends of the preload connecting rod 121 by locking screws 205, thereby ensuring that the preload force can be stably transmitted. This forms a connection mechanism between the entire piezoelectric motor stator and the preload assembly that has both the necessary rigidity and a certain degree of flexibility. This double-ended flexible hinge connection method not only helps to absorb local assembly errors, but also improves the energy transfer efficiency and overall system reliability of the piezoelectric motor while maintaining structural stability. Preferably, a groove is provided in the pretensioning link 121, and a locking screw 205 is provided in the groove so as to adjust the assembly position of the flexible hinge and the pretensioning link 121 so that the pretensioning link 121 can transmit the pretensioning force evenly.

[0036] The left and right arms where the two power input terminals of the first contractile rhombic displacement amplifier 110 and the second contractile rhombic displacement amplifier 118 are located are both straight arms. The right straight arm of the first contractile rhombic displacement amplifier 110 is fixedly connected to the left power output terminal of the expansion rhombic displacement amplifier 116 by the second bolt 303. The left straight arm of the second contractile rhombic displacement amplifier 118 is fixedly connected to the right power output terminal of the expansion rhombic displacement amplifier 116 by the third bolt 304, so that the first contractile rhombic displacement amplifier 110 and the second contractile rhombic displacement amplifier 118 are symmetrically arranged on the left and right sides of the expansion rhombic displacement amplifier 116.

[0037] A second piezoelectric stack 111, arranged laterally, is embedded between the two power input terminals of the first contractile rhombic displacement amplifier 110. The two ends of the second piezoelectric stack 111 are fixedly bonded to the first contractile rhombic displacement amplifier 110 with epoxy resin. After the second piezoelectric stack 111 is connected to an excitation drive source, its horizontal expansion and contraction motion can be converted and amplified by the first contractile rhombic displacement amplifier 110 into the horizontal longitudinal motion of its two power output terminals, thereby driving the synchronous opposite or opposite motion of the two power output terminals of the first contractile rhombic displacement amplifier 110. Similarly, a third piezoelectric stack 117, arranged laterally, is embedded between the two power input terminals of the second contractile rhombic displacement amplifier 118. The two ends of the third piezoelectric stack 117 are fixedly bonded to the two power input terminals of the second contractile rhombic displacement amplifier 118 with epoxy resin. After the third piezoelectric stack element 117 is connected to the excitation drive source, its horizontal extension and retraction motion can be converted and amplified by the second contraction type rhombic displacement amplifier 118 into the horizontal longitudinal motion of its two power output ends, and the synchronous opposite or opposite motion of the two power output ends of the second contraction type rhombic displacement amplifier 118.

[0038] By adjusting the amplitude, angular frequency, and phase of the voltages applied to the first piezoelectric stack element 115, the second piezoelectric stack element 111, and the third piezoelectric stack element 117, the first drive foot 301 and the second drive foot 302 can be made to generate elliptical trajectories. The pre-tightening assembly ensures tight and reliable contact between the first drive foot 301 and the second drive foot 302 and the power-receiving side of the moving part 114, thereby achieving stable power transmission.

[0039] In this embodiment, the first piezoelectric stack element 115, the second piezoelectric stack element 111, and the third piezoelectric stack element 117 are all fabricated using high-performance piezoelectric ceramics or single-crystal materials. Preferably, as shown below... Figure 3As shown, the second piezoelectric stack element 111 and the third piezoelectric stack element 117 have the same polarization direction, both being transversely polarized (both polarization directions are to the right in the figure). The ends closer to the expanded rhombic displacement amplifier 116 (i.e., the right end of the second piezoelectric stack element 111 and the left end of the third piezoelectric stack element 117) are simultaneously connected to the second driving signal source CH2, while the ends farther from the expanded rhombic displacement amplifier 116 (i.e., the left end of the second piezoelectric stack element 111 and the right end of the third piezoelectric stack element 117) are simultaneously grounded. The first piezoelectric stack element 115, however, is longitudinally polarized (horizontal longitudinal, selectable upwards or downwards), with one end connected to the first driving signal source CH1 and the other end grounded.

[0040] In this embodiment, the excitation frequencies of the first driving signal source CH1 and the second driving signal source CH2 are the same, and their phase difference is 90°, such as... Figure 5 As shown. When the excitation frequencies of the two drive signals CH1 and CH2 are consistent, and the phase difference between them is set to 90°, the stator of the piezoelectric motor will sequentially generate at different time points. Figure 4 (a) – Figure 4 The vibration mode shown in (d) is as follows. At this time, the first drive foot 301 and the second drive foot 302 located on both sides of the stator of the piezoelectric motor will perform elliptical motion with a phase difference of 180°, so that the surfaces of the two drive feet alternately and continuously rub against the sides of the moving part, pushing the moving part to perform linear motion.

[0041] Specifically, in Figure 5 In and At times, CH1 is at its maximum and minimum values, respectively, and the amplitude of the CH2 signal is exactly zero. At these times, the drive trajectories of the piezoelectric motor stator are as follows: Figure 4 As shown in (a) and 4(c), the two driving feet are located at their extreme positions in the horizontal direction; at times t2 and t4, CH2 is at its minimum and maximum values, respectively, and the amplitude of the CH1 signal is zero. At this time, the motion trajectories of the two driving feet of the piezoelectric motor stator are as follows: Figure 4 As shown in (b) and 4(d), the two driving feet are located at extreme positions in the longitudinal direction. In 0- , - , - as well as - Within these four time intervals, the two driving legs continuously reciprocate between the four extreme positions. By means of this time-based switching and displacement control method, the two driving legs of the piezoelectric motor alternately reach the displacement peak in the horizontal and vertical directions, thereby forming a set elliptical composite motion trajectory and realizing effective driving of the moving body (moving component 114).

[0042] Specifically, when the inherent resonant frequencies of the three rhombic displacement amplifiers containing the piezoelectric stack are consistent, and the operating frequencies of the two drive signals CH1 and CH2 match these inherent frequencies, the piezoelectric motor stator will enter a low-frequency resonant operating state. In this state, the system can fully utilize the coupling effect between the structure and the drive, enabling the piezoelectric stack to generate significant output displacement and velocity under the transmission and amplification effect of the rhombic displacement amplifiers. Compared to the quasi-static condition, the output performance is significantly improved. Under this resonant matching condition, the elliptical motion trajectory of the endpoints (two drive feet) of the piezoelectric motor stator reaches its peak amplitude in both the major and minor axis directions. This means that the tangential and normal displacement amplitudes at the contact points are simultaneously maximized, thereby optimizing the overall performance of the piezoelectric motor (including key indicators such as output speed, thrust, and energy utilization efficiency). The motion simulation diagram of the piezoelectric motor stator at this time is as follows: Figure 6 (a) and Figure 6 As shown in (b), they reflect the dynamic response behavior of the piezoelectric stack and the rhombic displacement amplifier under coupling conditions.

[0043] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0044] The above description is merely an embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structural or procedural transformations made based on the content of the present invention's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of the present invention.

Claims

1. A low-frequency resonant piezoelectric motor for semiconductor manufacturing, characterized in that: It includes a base, a pre-tightening assembly fixedly disposed on the surface of the base, and a moving part slidably disposed on the surface of the base, wherein a piezoelectric motor stator is disposed between the pre-tightening assembly and the moving part; The piezoelectric motor stator includes an expanded rhombic displacement amplifier and two contracted rhombic displacement amplifiers located on both sides of the expanded rhombic displacement amplifier. The two power output terminals of the expanded rhombic displacement amplifier are fixedly connected to the corresponding contracted rhombic displacement amplifiers. The expanded rhombic displacement amplifier is embedded with a longitudinally polarized piezoelectric stack element, and the contracted rhombic displacement amplifier is embedded with a transversely polarized piezoelectric stack element. Two retractable rhomboid displacement amplifiers have drive feet fixedly installed on the power output ends near the moving part, and the power output ends away from the moving part are connected to the positioning end of the pre-tightening component through flexible hinges. The stator of the piezoelectric motor drives two drive legs to perform elliptical motion. The surfaces of the two drive legs alternately rub against the sides of the moving part, propelling the moving part to perform linear motion.

2. The low-frequency resonant piezoelectric motor for semiconductor manufacturing according to claim 1, characterized in that: The piezoelectric stacking elements are all made of high-performance piezoelectric ceramics or single-crystal materials.

3. The low-frequency resonant piezoelectric motor for semiconductor manufacturing according to claim 1, characterized in that: The drive foot is made of wear-resistant material, and its end near the moving part has a rounded convex surface.

4. The low-frequency resonant piezoelectric motor for semiconductor manufacturing according to claim 1, characterized in that: A friction pad is fixedly installed on the side of the moving component near the driving foot.

5. The low-frequency resonant piezoelectric motor for semiconductor manufacturing according to claim 4, characterized in that: The friction pad is an alumina ceramic pad or a zirconia ceramic pad.

6. The low-frequency resonant piezoelectric motor for semiconductor manufacturing according to claim 1, characterized in that: One end of the longitudinally polarized piezoelectric stack element is connected to the first driving signal source, and the other end is grounded. The two transversely polarized piezoelectric stack elements have the same polarization direction, and the end closer to the expanded rhombic displacement amplifier is simultaneously connected to the second driving signal source, while the end farther away from the expanded rhombic displacement amplifier is simultaneously grounded.

7. The low-frequency resonant piezoelectric motor for semiconductor manufacturing according to claim 6, characterized in that: The excitation frequencies of the first driving signal source and the second driving signal source are the same, and the phase difference is 90°.

8. The low-frequency resonant piezoelectric motor for semiconductor manufacturing according to any one of claims 1 to 7, characterized in that: The preload assembly includes a thrust baffle fixedly mounted on the base surface, a preload bolt threaded into the thrust baffle, and a linear slider loosely fitted on the outside of the end of the preload bolt and slidably mounted on the base. A spring matching component is fixedly mounted on the preload bolt, and a preload spring fitted on the outside of the preload bolt is provided between the spring matching component and the linear slider. A horizontally arranged preload connecting rod is fixedly mounted on the top of the linear slider.

9. The low-frequency resonant piezoelectric motor for semiconductor manufacturing according to claim 8, characterized in that: The pre-tensioning connecting rod has a sliding groove, and a locking screw is installed in the sliding groove. The end of the locking screw is threadedly connected to the end of the flexible hinge.

10. The low-frequency resonant piezoelectric motor for semiconductor manufacturing according to claim 1 or 9, characterized in that: The flexible hinge is a semi-circular structure made of elastic material, and each end is integrally provided with a screw connecting block.

Images