Vacuum-pumping type adsorption mechanism for silicon display panel

Abstract

The invention discloses a vacuumizing type adsorption mechanism for a silicon display panel. According to the mechanism, an adsorption table is arranged on a movable platform; a plurality of groups of suction nozzles are movably arranged on the adsorption table; a display panel is placed at the top ends of the suction nozzles; the driving part is arranged in the adsorption table, is in transmission connection with the suction nozzle, and controls the suction nozzle to have two states, namely a first state and a second state; the suction nozzle is communicated with the driving part under the pressure of the display panel, and the suction nozzle communicated with the driving part is driven by the pump body to adsorb and fix the display panel; a second state; the suction nozzle does not communicate with the driving part, and the bottom of the suction nozzle is in a communicating state for discharging waste residues; in the invention, the driving piece is matched with the suction nozzles to adsorb and fix the display panel, the suction nozzles can adsorb and fix the display panel in a sealed and communicated state after being in contact with the display panel under the action of the display panel, and the non-contact suction nozzles discharge waste residues flowing into the suction nozzles through a formed bottom communication structure; and the use effect of the suction nozzle is prevented from being influenced by blockage caused by accumulated waste residues flowing into the suction nozzle.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of adsorption mechanism, and particularly relates to a vacuum adsorption mechanism for a silicon display panel. BACKGROUND

[0002] The silicon display panel is a crystallization of the deep integration of display technology and semiconductor technology. It realizes the pixel density and performance far exceeding traditional display by virtue of the semiconductor-level precision process. In the manufacturing, detection and packaging process, the silicon display panel needs to be safely, non-destructively and stably grabbed and moved. The vacuum adsorption is adopted to adsorb and fix the silicon display panel. The core principle is very simple: the pressure difference between the atmospheric pressure and the pressure in the vacuum cavity generates a positive pressure between the adsorption pad (suction nozzle) and the adsorbed silicon display panel, so as to firmly "press" the workpiece.

[0003] The prior art has the following disadvantages: when the suction nozzle adsorbs the silicon display panel, the silicon display panel needs to be placed above the suction nozzle to avoid the deviation of the adsorption force and further adjust the position of the silicon display panel on the suction nozzle. In the silicon display panel processing process, the liquid for cooling usually contains waste residues flowing into the unused and open suction nozzle, so that the waste residues accumulated in the suction nozzle cause the suction nozzle to be blocked, affecting the use effect of the suction nozzle. SUMMARY

[0004] The purpose of the present application is to provide a vacuum adsorption mechanism for a silicon display panel, which adsorbs and fixes the display panel by the cooperation of the driving member and the suction nozzle. Under the action of the display panel, the suction nozzle can be adsorbed and fixed in the state of contacting and sealing the display panel. The waste residues flowing into the suction nozzle are discharged through the bottom communication structure formed when the suction nozzle is not in contact, so as to avoid the accumulated waste residues flowing into the suction nozzle from causing blockage and affecting the use effect of the suction nozzle.

[0005] In order to achieve the above purpose, the present application adopts the following technical scheme: a vacuum adsorption mechanism for a silicon display panel, comprising: a moving platform, a suction table provided on the moving platform; a plurality of suction nozzles movably provided on the suction table, a display panel placed on the top end of the suction nozzle, and the display panel adsorbed on the suction table through the suction nozzle; a driving member provided in the suction table, the driving member drivingly connected with the suction nozzle, and the driving member controlling the suction nozzle having two states:

[0006] The first state: when the display panel contacts the suction nozzle, the suction nozzle moves and communicates with the driving member under the pressure of the display panel, and the suction nozzle connected with the driving member by the pump body adsorbs and fixes the display panel; the second state: when the display panel does not contact the suction nozzle, the suction nozzle does not communicate with the driving member, and the bottom of the suction nozzle is in a communication state for discharging waste residues;

[0007] Further description of the above technical scheme:

[0008] The driving component includes a piston chamber, which is located within the adsorption stage. One end of the piston chamber is connected to a guide groove, and the two ends of the guide groove are symmetrically provided with connecting grooves.

[0009] As a further description of the above technical solution:

[0010] A piston block is movably disposed inside the piston chamber. A connecting rod is fixedly connected to one end of the piston block. The connecting rod passes through the adsorption platform and is fixedly connected to a transmission rack.

[0011] As a further description of the above technical solution:

[0012] The inner wall of the suction nozzle is provided with a connecting groove, and the connecting groove is adapted to the connecting groove of the adsorption table.

[0013] As a further description of the above technical solution:

[0014] The bottom end of the suction nozzle is fixedly connected to a lower branch pipe, the bottom end of the lower branch pipe is fixedly connected to a connecting sleeve, and the bottom end of the connecting sleeve is movably provided with a movable seat, which is movably located inside the suction platform.

[0015] As a further description of the above technical solution:

[0016] A return spring is fixedly connected to the top of the movable seat, and the top of the return spring is fixedly connected to the suction nozzle. A discharge groove is opened inside the movable seat, and a connection hole is opened at the bottom of the connecting sleeve, and the connection hole is adapted to the discharge groove.

[0017] As a further description of the above technical solution:

[0018] It also includes a linkage assembly, which includes a horizontal arm, with a rack rod symmetrically fixedly connected to the top end of the horizontal arm, and a gear shaft meshing with one end of the rack rod, the gear shaft meshing with a transmission gear.

[0019] As a further description of the above technical solution:

[0020] The gear shaft is symmetrically and movably provided with positioning blocks at both ends, and the positioning blocks are fixed on the adsorption platform. One end of the positioning block is fixedly connected to a limit strip, and the limit strip is used to limit the movement direction of the rack rod.

[0021] As a further description of the above technical solution:

[0022] The cross arm is symmetrically fixedly connected to support rods at both ends, and a support block is fixedly connected to the top of the support rod. The support block is adapted to the slot opened in the movable seat.

[0023] As a further description of the above technical solution:

[0024] The mobile platform is provided with a movable tube at one end, and a diversion tube is connected to one end of the movable tube and the diversion tube is connected to the piston chamber. The other end of the movable tube is connected to a connecting tube, and a connecting rod is fixedly connected to the connecting tube and slidably connected to the mobile platform.

[0025] This invention provides a vacuum adsorption mechanism for silicon display panels, which has the following advantages:

[0026] In this invention, the display panel is adsorbed and fixed by a driving component and a suction nozzle. Under the action of the display panel, the suction nozzle can adsorb and fix the display panel in a sealed and connected state after contact with the display panel. The waste residue flowing into the suction nozzle is discharged through the bottom connecting structure formed by the suction nozzle, so as to avoid the waste residue accumulating in the suction nozzle and causing blockage, which would affect the use effect of the suction nozzle. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the structure of a vacuum adsorption mechanism for a silicon display panel proposed in this invention;

[0028] Figure 2 This is a schematic diagram of the adsorption stage in this invention;

[0029] Figure 3 This is a schematic diagram of the display panel structure in this invention;

[0030] Figure 4 In this invention Figure 3 Enlarged view of point A in the middle;

[0031] Figure 5 This is a schematic diagram of the driving component in this invention;

[0032] Figure 6 This is a schematic diagram of the guide groove in the present invention;

[0033] Figure 7 This is a schematic diagram of the gear shaft in this invention;

[0034] Figure 8 This is a diagram showing the connection state between the connecting slot and the connecting groove in this invention;

[0035] Figure 9 This is a diagram showing the connection state between the connecting hole and the discharge trough in this invention.

[0036] Legend: 1. Moving platform; 11. Movable tube; 12. Connecting rod; 13. Connecting tube; 14. Diverter tube; 2. Adsorption table; 3. Display panel; 4. Suction nozzle; 41. Connecting groove; 42. Lower branch tube; 43. Connecting sleeve; 431. Connecting hole; 44. Movable seat; 45. Return spring; 46. Through hole; 47. Discharge groove; 5. Driving component; 51. Piston chamber; 52. Piston block; 53. Guide groove; 54. Connecting groove; 55. Linkage rod; 6. Linkage assembly; 61. Transmission rack; 62. Gear shaft; 63. Positioning block; 64. Rack rod; 65. Cross arm; 66. Support block; 67. Limiting strip. Detailed Implementation

[0037] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0038] Reference Figures 1-9 A vacuum adsorption mechanism for silicon display panels includes: a movable platform 1, an adsorption stage 2 on the movable platform 1; multiple sets of suction nozzles 4 are movably mounted on the adsorption stage 2, with a display panel 3 placed on the top of each suction nozzle 4, and the display panel 3 is adsorbed onto the adsorption stage 2 through the suction nozzles 4; it also includes a driving component 5, which is located inside the adsorption stage 2, and is connected to the suction nozzles 4. The driving component 5 controls the suction nozzles 4 to have two states: a first state, when the display panel 3 contacts the suction nozzles 4, the suction nozzles 4 move under the pressure of the display panel 3 and communicate with the driving component 5, and the suction nozzles 4 connected to the driving component 5 are driven by a pump to adsorb and fix the display panel 3; and a second state, when the display panel 3 does not contact the suction nozzles 4, the suction nozzles 4 are not connected to the driving component 5, and the bottom of the suction nozzles 4 is in a communicating state for discharging waste residue.

[0039] Specifically, the mobile platform 1 has a rectangular frame structure and is driven by a separate drive device to move flexibly along its cross-section. An adsorption platform 2 is bolted to the top of the mobile platform 1, and the display screen to be processed is adsorbed and fixed by the adsorption platform 2. The adsorption platform 2 has multiple movable suction nozzles 4, and the drive component 5 connected to the suction nozzles 4 is connected to an external pump. When the pump generates suction force, it drives the drive component 5 to move. Under the pressure of the display panel 3, the suction nozzles 4 connected to the drive component 5 form a sealing and connecting structure, enabling the drive component 5 to adsorb and fix the display panel 3 onto the adsorption platform 2 through the suction nozzles 4. When the display panel 3 is not in contact with the suction nozzles 4, the suction nozzles 4 and the drive component 5 are at an angle... The non-contact structure is blocked. The driving component 5 distributes the adsorption force to the nozzle 4 in the connected state, increasing the adsorption force generated by the nozzle 4 in contact with the display panel 3. At the same time, the bottom of the nozzle 4 that is not in contact with the display panel 3 is in a connected state, which facilitates the discharge of waste residue flowing into the nozzle 4 and avoids accumulation in the nozzle 4 that causes blockage. In this application, the driving component 5 works with the nozzle 4 to adsorb and fix the display panel 3. Under the action of the display panel 3, the nozzle 4 can adsorb and fix the display panel 3 after contacting it and forming a sealed and connected state. The non-contact nozzle 4 discharges the waste residue flowing into the nozzle 4 through the bottom connected structure, avoiding the accumulation of waste residue in the nozzle 4 that causes blockage and affects the use effect of the nozzle 4.

[0040] The driving component 5 includes a piston chamber 51, which is located within the adsorption platform 2. One end of the piston chamber 51 is connected to a guide groove 53, and the two ends of the guide groove 53 are symmetrically provided with connecting grooves 54. A piston block 52 is movably disposed within the piston chamber 51. A connecting rod 55 is fixedly connected to one end of the piston block 52. The connecting rod 55 passes through the adsorption platform 2 and is fixedly connected to a transmission rack 61. A connecting groove 41 is provided on the inner wall of the suction nozzle 4, and the connecting groove 41 is adapted to the connecting groove 54 provided in the adsorption platform 2. A lower branch pipe 42 is fixedly connected to the bottom end of the suction nozzle 4. A connecting sleeve 43 is fixedly connected to the bottom end of the lower branch pipe 42. A movable seat 44 is movably disposed at the bottom end of the connecting sleeve 43, and the movable seat 44 is movably disposed within the adsorption platform 2. A return spring 45 is fixedly connected to the top end of the movable seat 44, and the top end of the return spring 45 is fixedly connected to the suction nozzle 4. A discharge groove 47 is provided within the movable seat 44. A connecting hole 431 is provided at the bottom end of the connecting sleeve 43, and the connecting hole 431 is adapted to the discharge groove 47.

[0041] Specifically, the driving component 5 is an adsorption structure composed of a piston block 52 and a guide groove 53. When the piston chamber 51 is connected to the external pump body through the diversion pipe 14, the pump body's suction force drives the piston block 52 to move laterally within the piston chamber 51. When the piston block 52 moves along the piston chamber 51, the guide groove 53 connected to the piston chamber 51 and the connecting groove 54 connected to the guide groove 53 are in a connected state with the connecting groove 41 opened in the suction nozzle 4. The adsorption force generated during the movement of the piston block 52 adsorbs and fixes the display panel 3 placed on the suction nozzle 4. The movable seat 44 located at the bottom of the suction nozzle 4 and fixedly connected by the return spring 45 has two states. When the display panel 3 is pressed against the suction nozzle 4, the return spring 45 elastically supports the movable seat 44 to move downward. When the pump body drives the driving component 5 to move... When in motion, the movable seat 44 moves towards the suction nozzle 4 under the drive of the linkage component 6. The return spring 45 contracts under pressure, and the linkage component 6 drives the movable seat 44 to move, while sealing the bottom of the movable seat 44. The connecting hole 431 in the connecting sleeve 43, which is fixed to the bottom of the suction nozzle 4 through the lower branch pipe 42, is closed. This is beneficial when the suction nozzle 4 is connected to the drive component 5. When the top of the suction nozzle 4 is not in contact with the display panel 3, the return spring 45 pushes the suction nozzle 4 upward. The suction nozzle 4 drives the connecting sleeve 43 to move synchronously through the branch pipe, so that the connecting hole 431 in the connecting sleeve 43 is connected to the discharge groove 47, so as to discharge the waste flowing into the suction nozzle 4 and avoid blockage.

[0042] The system also includes a linkage assembly 6, which includes a horizontal arm 65. A rack rod 64 is symmetrically and fixedly connected to the top of the horizontal arm 65. A gear shaft 62 is meshed at one end of the rack rod 64, and the gear shaft 62 meshes with a transmission gear. Positioning blocks 63 are symmetrically and movably provided at both ends of the gear shaft 62, and the positioning blocks 63 are fixed on the adsorption table 2. A limit strip 67 is fixedly connected to one end of the positioning block 63, and the limit strip 67 is used to limit the movement direction of the rack rod 64. Support rods are symmetrically and fixedly connected to both ends of the horizontal arm 65, and a support block 66 is fixedly connected to the top of the support rod. The support block 66 is adapted to the slot opened in the movable seat 44.

[0043] Specifically, the linkage 55 drives the fixed transmission rack 61 to move directionally along the axis of the linkage 55. The gear shaft 62 meshed with the transmission rack 61 rotates, and the two rack rods 64 meshing with the transmission shaft move directionally under the action of the limiting strip 67. This causes the cross arm 65 fixedly connected to the bottom end of the rack rod 64 to move upward through the support block 66 fixedly connected to the support rod, so that the support block 66 can be matched with the slot opened in the movable seat 44. The support block 66 drives the movable seat 44 to move upward, so that the suction nozzle 4 squeezed by the display panel 3 and the movable seat 44 form a sealed chamber. The chamber is connected to the guide groove 53 through the through hole 46 opened in the lower branch pipe 42. Under the action of the pump body, the display panel 3 is adsorbed and fixed. At the same time, when the support block 66 separates from the movable seat 44, the movable seat 44 and the suction nozzle 4 form an unobstructed channel, which makes it easier to clean the suction nozzle 4.

[0044] One end of the mobile platform 1 is provided with a movable tube 11, one end of which is connected to a diversion tube 14 and the diversion tube 14 is connected to the piston chamber 51. The other end of the movable tube 11 is connected to a connecting tube 13, and the connecting tube 13 is fixedly connected to a connecting rod 12, which is slidably connected to the mobile platform 1. Specifically, the connecting rod 12, which is movably provided at one end of the mobile platform 1, is used to fix the connecting tube 13 and the movable tube 11 to connect. The connecting tube 13 is connected to the pump body (suction pump) to realize the suction and fixation of the display panel 3 placed on the suction nozzle 4 by the pump body control drive component 5.

[0045] Working principle: First, a separate drive device drives the mobile platform 1 to move along its own cross-section. The top of the mobile platform 1 is fixed to an adsorption platform 2 by bolts. Multiple movable suction nozzles 4 are mounted on the adsorption platform 2. The driving component 5 connected to the suction nozzles 4 is connected to an external pump body. When the pump body generates suction force, it drives the driving component 5 to move. The pump body's suction force drives the piston block 52 to move laterally along the piston cavity 51. When the piston block 52 moves along the piston cavity 51, the guide groove 53 connected to the piston cavity 51 and the connecting groove 54 connected to the guide groove 53 are connected to the suction nozzles 4. When the connecting groove 41 is in a connected state, the suction force generated during the movement of the piston block 52 will attract and fix the display panel 3 placed on the suction nozzle 4. The movable seat 44, located at the bottom of the suction nozzle 4 and fixedly connected by the return spring 45, has two states. When the display panel 3 is pressed against the suction nozzle 4, the return spring 45 elastically supports the movable seat 44 to move downward. When the pump body drives the drive component 5 to move, the movable seat 44 moves towards the suction nozzle 4 under the drive of the linkage component 6. The return spring 45 contracts under the squeezing force, and the linkage component 6 drives the movable seat 44 to move. Among them, the transmission rack 61 is engaged with When the gear shaft 62 rotates, the two rack rods 64 meshing with the transmission shaft move in a directional manner under the action of the limiting strip 67. This causes the cross arm 65, which is fixedly connected to the bottom end of the rack rod 64, to move upward through the support block 66, which is fixedly connected to the support rod. This allows the support block 66 to fit into the slot opened in the movable seat 44, and the support block 66 drives the movable seat 44 to move upward. This creates a sealed chamber between the suction nozzle 4, which is pressed by the display panel 3, and the movable seat 44. The chamber is connected to the guide groove 53 through the through hole 46 opened in the lower branch pipe 42. The discharge groove 47 located in the movable seat 44 and the bottom end of the suction nozzle 4 are connected through the lower branch pipe. The connecting hole 431 in the connecting sleeve 43 of the 42 fixed connection is in a closed state, which is beneficial when the suction nozzle 4 is connected to the driving component 5. When the top of the suction nozzle 4 is not in contact with the display panel 3, the reset spring 45 pushes the suction nozzle 4 upward. The suction nozzle 4 drives the connecting sleeve 43 to move synchronously through the branch pipe, so that the connecting hole 431 in the connecting sleeve 43 is connected to the discharge groove 47, so as to discharge the waste flowing into the suction nozzle 4. When the support block 66 is separated from the movable seat 44, the movable seat 44 and the suction nozzle 4 form an unobstructed channel, which is convenient for cleaning the suction nozzle 4.

[0046] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A vacuum adsorption mechanism for a silicon display panel, characterized in that, include: Mobile platform (1), with an adsorption platform (2) on the mobile platform (1); Multiple sets of suction nozzles (4) are movably provided on the adsorption platform (2). A display panel (3) is placed on the top of the suction nozzle (4), and the display panel (3) is adsorbed onto the adsorption platform (2) through the suction nozzle (4). It also includes a driving component (5), which is disposed within the adsorption platform (2). The driving component (5) is connected to the suction nozzle (4) and controls the suction nozzle (4) to have two states: First state; When the display panel (3) contacts the suction nozzle (4), the suction nozzle (4) moves down under the pressure of the display panel (3) and connects with the drive component (5). The suction nozzle (4) connected to the drive component (5) is driven by the pump body to adsorb and fix the display panel (3); Second state: When the display panel (3) is not in contact with the suction nozzle (4), the suction nozzle (4) is not connected to the drive unit (5), and the bottom of the suction nozzle (4) is in a connected state for discharging waste residue.

2. The vacuum adsorption mechanism for a silicon display panel according to claim 1, characterized in that, The driving component (5) includes a piston chamber (51), which is located inside the adsorption platform (2). One end of the piston chamber (51) is connected to a guide groove (53), and the two ends of the guide groove (53) are symmetrically provided with connecting grooves (54).

3. The vacuum adsorption mechanism for a silicon display panel according to claim 2, characterized in that, A piston block (52) is movably disposed in the piston chamber (51). A connecting rod (55) is fixedly connected to one end of the piston block (52). The connecting rod (55) passes through the adsorption table (2) and is fixedly connected to a transmission rack (61).

4. The vacuum adsorption mechanism for a silicon display panel according to claim 1, characterized in that, The inner wall of the suction nozzle (4) is provided with a connecting groove (41), and the connecting groove (41) is adapted to the connecting groove (54) provided on the adsorption table (2).

5. The vacuum adsorption mechanism for a silicon display panel according to claim 1, characterized in that, The bottom end of the suction nozzle (4) is fixedly connected to a lower branch pipe (42), and the bottom end of the lower branch pipe (42) is fixedly connected to a connecting sleeve (43). The bottom end of the connecting sleeve (43) is movably provided with a movable seat (44), and the movable seat (44) is movably located inside the adsorption platform (2).

6. The vacuum adsorption mechanism for a silicon display panel according to claim 5, characterized in that, The top of the movable seat (44) is fixedly connected to a return spring (45), and the top of the return spring (45) is fixedly connected to the suction nozzle (4). The movable seat (44) has a discharge groove (47) inside, and the bottom of the connecting sleeve (43) has a connecting hole (431) that is compatible with the discharge groove (47).

7. The vacuum adsorption mechanism for a silicon display panel according to claim 1, characterized in that, It also includes a linkage assembly (6), which includes a cross arm (65), a rack rod (64) symmetrically fixedly connected to the top end of the cross arm (65), a gear shaft (62) meshing at one end of the rack rod (64), and the gear shaft (62) meshing with a transmission gear.

8. The vacuum adsorption mechanism for a silicon display panel according to claim 7, characterized in that, The gear shaft (62) is symmetrically provided with positioning blocks (63) at both ends, and the positioning blocks (63) are fixed on the adsorption platform (2). One end of the positioning block (63) is fixedly connected to a limiting strip (67), and the limiting strip (67) is used to limit the movement direction of the rack rod (64).

9. A vacuum adsorption mechanism for a silicon display panel according to claim 8, characterized in that, The cross arm (65) is symmetrically fixedly connected to support rods at both ends, and a support block (66) is fixedly connected to the top of the support rod. The support block (66) is adapted to the slot opened in the movable seat (44).

10. A vacuum adsorption mechanism for a silicon display panel according to claim 1, characterized in that, The mobile platform (1) is provided with a movable tube (11) at one end. One end of the movable tube (11) is connected to a diversion tube (14), and the diversion tube (14) is connected to the piston chamber (51). The other end of the movable tube (11) is connected to a connecting tube (13). The connecting tube (13) is fixedly connected to a connecting rod (12), and the connecting rod (12) is slidably connected to the mobile platform (1).

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